JP2009094147A - Semiconductor wafer holding device - Google Patents

Semiconductor wafer holding device Download PDF

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JP2009094147A
JP2009094147A JP2007261044A JP2007261044A JP2009094147A JP 2009094147 A JP2009094147 A JP 2009094147A JP 2007261044 A JP2007261044 A JP 2007261044A JP 2007261044 A JP2007261044 A JP 2007261044A JP 2009094147 A JP2009094147 A JP 2009094147A
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semiconductor wafer
rib
wafer
substrate mounting
outer peripheral
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JP4839294B2 (en
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Toshiyuki Nakamura
敏幸 中村
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Ulvac Inc
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Ulvac Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor wafer holding device highlyadhesively holding even a large-diameter, thin and ribbed wafer with no damage. <P>SOLUTION: The device includes: a substrate mounting part onto which the semiconductor wafer with the rib formed on its outer peripheral edge is mounted; and a clamping means providing an electrostatic chuck on the substrate mounting part and applying pushing force onto the outer peripheral edge of the semiconductor wafer where the rib is formed. A central area of the substrate mounting part is protruded to have a raised stepped form. Application of the pushing force by the clamping means brings a lower end surface of the rib into contact with a one-step-lowered flat surface of the substrate mounting part to actuate the electrostatic chuck mechanism to bring a device structure part into facial contact with an upper surface of the protruded part to be adsorptively held. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、半導体ウエハに対し所定の処理を施す処理室内で当該半導体ウエハを保持する半導体ウエハ保持装置に関し、より詳しくは、デバイス構造部のみを薄くすることでその外周縁部にリブが形成された半導体ウエハ用の半導体ウエハ保持装置に関する。   The present invention relates to a semiconductor wafer holding apparatus that holds a semiconductor wafer in a processing chamber that performs a predetermined process on the semiconductor wafer. More specifically, only the device structure portion is thinned so that ribs are formed on the outer peripheral edge thereof. The present invention relates to a semiconductor wafer holding device for semiconductor wafers.

CVDやプラズマエッチングなどの所定の処理を行う真空処理装置においては、真空雰囲気中の処理室内で半導体ウエハ(以下、「ウエハ」という)を保持するために、静電吸着方式の所謂静電チャックを組み込んだ基板ステージ(基板保持装置)が配置されている。このように静電チャックによりウエハを保持して上記所定の真空処理を行う場合、ウエハが位置ずれを起こさないように保持するだけでなく、当該基板を密着性よく保持してウエハの加熱、冷却の際にその面内温度を一定に保持したりすること等の性能が求められる。   In a vacuum processing apparatus that performs a predetermined process such as CVD or plasma etching, a so-called electrostatic chuck of an electrostatic adsorption system is used to hold a semiconductor wafer (hereinafter referred to as “wafer”) in a processing chamber in a vacuum atmosphere. An incorporated substrate stage (substrate holding device) is arranged. When the predetermined vacuum processing is performed by holding the wafer by the electrostatic chuck as described above, not only the wafer is held so as not to be displaced but also the substrate is held with good adhesion to heat and cool the wafer. In this case, performance such as maintaining a constant in-plane temperature is required.

ところで、最近では生産性の向上のため、ウエハを大径かつ薄肉のもの(150μm以下の厚さ)にする傾向がある。このようなウエハに対し、所望のデバイス構造を形成すべく薄膜形成やエッチング処理等の複数の処理工程を実施すると、当該ウエハには様々な方向の反りが生じる。この場合、反りの大きいウエハを基板ステージに載置し、静電チャック機構によりウエハを保持すると、ウエハのうち反りが生じている部分が基板ステージに保持できないという不具合が生じる。   By the way, recently, in order to improve productivity, there is a tendency to make a wafer large in diameter and thin (thickness of 150 μm or less). When a plurality of processing steps such as thin film formation and etching processing are performed on such a wafer to form a desired device structure, the wafer is warped in various directions. In this case, when a wafer having a large warp is placed on the substrate stage and the wafer is held by the electrostatic chuck mechanism, a problem arises in that the warped portion of the wafer cannot be held on the substrate stage.

そこで、従来では、基板ステージの周囲に立設した昇降自在な複数本の駆動軸と、当該駆動軸の上端に接続され、ウエハの外周縁部に押圧力を加え得るクランプリングとからなるクランプ手段を設けることが特許文献1で開示されている。このものでは、当該クランプリングを基板ステージの上方に位置させた状態で、基板ステージ上にウエハを載置し、クランプリングを下降させてウエハの外周縁部に押圧力を加えて、ウエハを基板ステージ上面に密着させ、この状態で、静電チャック機構を作動させてウエハを基板ステージに吸着保持する。これにより、クランプ手段によりウエハを基板ステージに密着固定させ、この状態で静電チャックによりウエハを吸着保持することで、反ったウエハであっても密着性よく保持できる。
特開2001−53030号公報
Therefore, conventionally, a clamping means comprising a plurality of up and down drive shafts erected around the substrate stage, and a clamp ring connected to the upper end of the drive shaft and capable of applying a pressing force to the outer peripheral edge of the wafer. It is disclosed in Patent Document 1 to provide the above. In this device, with the clamp ring positioned above the substrate stage, the wafer is placed on the substrate stage, the clamp ring is lowered, and a pressing force is applied to the outer peripheral edge of the wafer to place the wafer on the substrate. In close contact with the upper surface of the stage, the electrostatic chuck mechanism is operated to attract and hold the wafer on the substrate stage. Thus, the wafer is adhered and fixed to the substrate stage by the clamping means, and the wafer is attracted and held by the electrostatic chuck in this state, so that even a warped wafer can be held with good adhesion.
JP 2001-53030 A

ここで、ウエハを大径かつ薄肉のものとすると、耐圧が低下したり、デバイス構造部製作の各処理工程中や搬送中にウエハが破損する虞が増大する。このことから、近年では、デバイス構造部のみを薄くすることでその外周縁部にリブが形成された所謂リブ付きウエハを用いることが提案されている。然し、このようなリブ付きウエハであっても、リブを有さない従来のウエハと同様に、各処理工程を実施すると様々な方向に反りが生じていることから、リブの形成面と反対側の面(デバイス構造が形成される面)に所定の処理を実施するために、当該リブ付きウエハが破損することなく、密着性よく基板ステージに保持されるようにする必要がある。   Here, if the wafer has a large diameter and a thin wall, the pressure resistance is reduced, and the possibility that the wafer is damaged during each processing step of manufacturing the device structure and during transfer increases. For this reason, in recent years, it has been proposed to use a so-called ribbed wafer in which ribs are formed on the outer peripheral edge by thinning only the device structure. However, even if such a wafer with ribs is warped in various directions when each processing step is performed as in the case of a conventional wafer having no ribs, the opposite side to the rib forming surface. In order to perform predetermined processing on the surface (surface on which the device structure is formed), the ribbed wafer needs to be held on the substrate stage with good adhesion without being damaged.

本発明は、以上の点に鑑み、リブ付きウエハが、破損することなしに密着性よく基板載置部に保持(セット)できる半導体ウエハ保持装置を提供することをその課題としている。   In view of the above points, an object of the present invention is to provide a semiconductor wafer holding device in which a wafer with ribs can be held (set) on a substrate mounting portion without being damaged.

上記課題を解決するために、本発明は、デバイス構造部のみを薄くすることでその外周縁部にリブが形成された半導体ウエハに対し所定の処理を施す処理室内で当該半導体ウエハが載置される基板載置部と、前記リブが存する半導体ウエハの外周縁部に押圧力を加え得るクランプ手段と、基板載置部に組付けた静電チャックとを備える半導体ウエハ保持装置であって、前記基板載置部はその中央領域を凸状に突出させた段付き形状であり、この凸状の突出部上面がリブ内側のチップ有効部の面積より小さく形成され、前記リブが基板載置部に対向する方向から半導体ウエハを当該突出部に載置し、前記クランプ手段により押圧力を加えると、前記リブの下端面が基板載置部の一段下がった平坦面に接触し、静電チャック機構を作動させると、デバイス構造部が突出部上面に面接触して吸着保持されるように構成したことを特徴とする。   In order to solve the above-described problems, the present invention provides a semiconductor wafer placed in a processing chamber in which a predetermined process is performed on a semiconductor wafer having a rib formed on its outer peripheral edge by thinning only the device structure. A semiconductor wafer holding device comprising: a substrate mounting portion; a clamping means capable of applying a pressing force to an outer peripheral edge portion of the semiconductor wafer having the rib; and an electrostatic chuck assembled to the substrate mounting portion. The substrate mounting portion has a stepped shape with its central region protruding in a convex shape, and the upper surface of the convex protruding portion is formed smaller than the area of the chip effective portion inside the rib, and the rib is formed on the substrate mounting portion. When the semiconductor wafer is placed on the projecting portion from the opposite direction and a pressing force is applied by the clamping means, the lower end surface of the rib comes into contact with the flat surface lowered by one step, and the electrostatic chuck mechanism is When activated Vice structure is in surface contact with the protrusion upper surface, characterized by being configured so as to be sucked and held.

本発明の半導体ウエハ保持装置でリブ付きウエハ保持する際は、リブが基板載置部に対向する方向から、リブ内側の面積より小さい突出部上面に当該ウエハを載置する。このとき、デバイス構造形成のために複数の処理工程を経たウエハは様々な方向に反りが生じている。そして、クランプリングによりリブが存するウエハの外周縁部に押圧力を加えると、リブの下端面が基板載置部の一段下がった平坦面に接触する。この場合、ウエハは、その反りが矯正され、突出部上面との間で微少な間隙を介して保持される。また、クランプリングにより押圧力を加えても、リブの下端面が上記平坦面に接触するため、当該押圧力でウエハが破損する等の不具合は生じない。そして、静電チャックを作動させると、ウエハは、そのリブ内側の面が突出部上面と面接触して吸着保持される。   When holding the wafer with ribs by the semiconductor wafer holding apparatus of the present invention, the wafer is placed on the upper surface of the protruding portion that is smaller than the area inside the rib from the direction in which the rib faces the substrate placement portion. At this time, the wafer that has undergone a plurality of processing steps for forming the device structure is warped in various directions. When a pressing force is applied to the outer peripheral edge portion of the wafer where the rib exists by the clamp ring, the lower end surface of the rib comes into contact with the flat surface lowered by one step on the substrate mounting portion. In this case, the warpage of the wafer is corrected and held between the upper surface of the protrusions through a minute gap. Further, even when a pressing force is applied by the clamp ring, the lower end surface of the rib comes into contact with the flat surface, so that a problem such as the wafer being damaged by the pressing force does not occur. When the electrostatic chuck is actuated, the wafer is attracted and held with the inner surface of the rib being in surface contact with the upper surface of the protrusion.

このように本発明では、処理すべきウエハがリブ付きのものであっても、当該ウエハが密着性よく保持され、例えばウエハを加熱、冷却する場合でもその面内温度を一定に保持したりすること等の性能を発揮させることができる。   As described above, according to the present invention, even when a wafer to be processed is provided with a rib, the wafer is held with good adhesion. For example, even when the wafer is heated or cooled, the in-plane temperature is kept constant. Such performance can be exhibited.

本発明においては、前記クランプ手段は、前記基板載置部の周囲に立設した昇降自在な駆動軸と、駆動軸の先端に連結された環状のクランプリングとを備え、駆動軸を作動させてクランプリングを下降させると、半導体ウエハの外周縁部全体に押圧力が作用する構成を採用すればよい。   In the present invention, the clamp means includes a drive shaft that is vertically movable around the substrate mounting portion, and an annular clamp ring that is connected to the tip of the drive shaft, and operates the drive shaft. A configuration in which a pressing force acts on the entire outer peripheral edge of the semiconductor wafer when the clamp ring is lowered may be employed.

ところで、リブ付きウエハの処理面に所定の処理を実施した後、リブが形成された面に対しバックグラインド等のさらに所定の処理が行われることがある。このため、ウエハが破損しないよう、基板載置部へのウエハのセット方向に応じて前記半導体ウエハに作用する押圧力を変更自在とすることが好ましい。   By the way, after performing predetermined processing on the processing surface of the wafer with ribs, further predetermined processing such as back grinding may be performed on the surface on which the rib is formed. For this reason, it is preferable that the pressing force acting on the semiconductor wafer can be changed according to the setting direction of the wafer on the substrate mounting portion so that the wafer is not damaged.

図1を参照して説明すれば、1は、デバイス構造部のみを薄くすることでその外周縁部にリブWRが形成されたリブ付きウエハWにエッチング等の所定の処理を施す処理室内に設けられる基板ステージ(基板載置部)であり、リブの形成面と反対側の面(デバイス構造が形成される面)を上側にして当該ウエハWを保持する。基板ステージ1は、基台2と基台2上面中央部に設けられた静電チャック3とを具備する。金属製の基台2は、その中央領域を凸状に突出させた段付き形状であり、この凸状の突出部2a上面がリブ内側のチップ有効部の面積より小さく形成されている。   Referring to FIG. 1, 1 is provided in a processing chamber for performing a predetermined process such as etching on a wafer W with ribs having a rib WR formed on the outer peripheral edge by thinning only the device structure. The wafer W is held with the surface (surface on which the device structure is formed) opposite to the surface on which the rib is formed facing upward. The substrate stage 1 includes a base 2 and an electrostatic chuck 3 provided at the center of the upper surface of the base 2. The metal base 2 has a stepped shape with its central region protruding in a convex shape, and the upper surface of the convex protruding portion 2a is formed smaller than the area of the chip effective portion inside the rib.

静電チャック3は、突出部2a上面に設けたシリコンゴム等の絶縁物内に所定のパターンで電極(図示せず)を配置して構成され、静電チャック3の電極への電圧印加で被処理基板Sが基板ステージ1に吸着保持される。この場合、静電チャック3を含む突出部2aの平坦面2bからの高さは、後述するクランプ手段により押圧力を加えると、リブWRの下端面が基台2の一段下がった平坦面2bに接触し、ウエハWの裏面(リブ内側の面)が微小な隙間を介して突出部2a上面に対し略平行となるように設定されている。   The electrostatic chuck 3 is configured by arranging electrodes (not shown) in a predetermined pattern in an insulator such as silicon rubber provided on the upper surface of the protruding portion 2a, and is covered by applying a voltage to the electrodes of the electrostatic chuck 3. The processing substrate S is sucked and held on the substrate stage 1. In this case, the height from the flat surface 2b of the projecting portion 2a including the electrostatic chuck 3 is such that the lower end surface of the rib WR is lowered by one step on the base 2 when a pressing force is applied by a clamping means described later. The back surface of the wafer W (the surface inside the rib) is set so as to be substantially parallel to the upper surface of the protruding portion 2a via a minute gap.

基台2の周囲には、クランプ手段4が設けられ、このクランプ手段4と静電チャック3を有する基板ステージ1とで本実施の形態のウエハ保持装置が構成される。クランプ手段4は、ウエハWのリブWRが存する外周縁部に押圧力を加えるクランプリング41を具備する。クランプリング41の下面には複数本の駆動軸42が垂設されており、各駆動軸42は、基板ステージ1の一段下がった平坦面2bで上下に貫通してエアーシリンダ等の駆動手段43に連結されている。これにより、駆動手段43の作動によりクランプリング41が基板ステージ1に対し昇降する。   A clamp unit 4 is provided around the base 2, and the clamp unit 4 and the substrate stage 1 having the electrostatic chuck 3 constitute the wafer holding apparatus of the present embodiment. The clamp means 4 includes a clamp ring 41 that applies a pressing force to the outer peripheral edge portion where the rib WR of the wafer W exists. A plurality of drive shafts 42 are suspended from the lower surface of the clamp ring 41, and each drive shaft 42 penetrates up and down on a flat surface 2 b lowered by one step on the substrate stage 1 to drive means 43 such as an air cylinder. It is connected. Accordingly, the clamp ring 41 is moved up and down with respect to the substrate stage 1 by the operation of the driving unit 43.

次に、本発明のウエハ保持装置へのリブ付きウエハWの保持動作を説明する。先ず、クランプリング41が上昇位置にある状態で、フィンガー部を設けた公知の構造の搬送ロボットにより、リブWRが基板ステージ1に対向する方向から当該リブWRが突出部2a上面を跨ぐように(リブの側面と突出部2aとの間に微小な間隙を存して)ウエハWが載置される。このとき、デバイス構造形成のために複数の処理工程を経たウエハは様々な方向に反りが生じている(図2(a)及び図3(b)参照)。   Next, the holding operation of the wafer W with ribs on the wafer holding apparatus of the present invention will be described. First, in a state where the clamp ring 41 is in the raised position, the rib WR straddles the upper surface of the protruding portion 2a from the direction in which the rib WR faces the substrate stage 1 by a transfer robot having a known structure provided with finger portions ( The wafer W is placed with a minute gap between the side surface of the rib and the protrusion 2a. At this time, the wafer that has undergone a plurality of processing steps for forming the device structure is warped in various directions (see FIGS. 2A and 3B).

次に、駆動手段43を作動させて駆動軸42を下降させると、クランプリング41により、リブWRが存するウエハWの外周縁部に押圧力を加えられて、リブWRの下端面が基板載置部の一段下がった平坦面2bに接触するようになる(図2(b)及び図3(b)参照)。このとき、ウエハWはその反りが矯正され、突出部2b上面との間で微少な間隙を介して略水平に保持される。そして、静電チャック3を作動させると、ウエハWは、そのリブ内側の面が突出部2a上面と面接触して密着保持される。   Next, when the drive means 43 is operated to lower the drive shaft 42, the clamp ring 41 applies a pressing force to the outer peripheral edge of the wafer W where the rib WR exists, and the lower end surface of the rib WR is placed on the substrate. It comes into contact with the flat surface 2b that is lowered by one step (see FIGS. 2B and 3B). At this time, the warpage of the wafer W is corrected, and the wafer W is held substantially horizontally with a slight gap between the upper surface of the protrusion 2b. When the electrostatic chuck 3 is operated, the wafer W is held in close contact with the inner surface of the rib being in surface contact with the upper surface of the protruding portion 2a.

これにより、本実施の形態のウエハ保持手段では、処理すべきウエハWがリブWR付きのものであっても、当該ウエハWが密着性よく基板ステージ1に保持させることができ、例えばウエハWを加熱、冷却する場合でもその面内温度を一定に保持したりすること等の性能を発揮させることができる。   Thereby, in the wafer holding means of the present embodiment, even if the wafer W to be processed has a rib WR, the wafer W can be held on the substrate stage 1 with good adhesion. Even in the case of heating and cooling, performance such as maintaining a constant in-plane temperature can be exhibited.

尚、本実施の形態においては、リブWRが形成される面と反対の面にデバイス構造部が形成されることから、リブWRが基板ステージ1に対向する方向から当該リブWRが突出部2a上面を跨ぐようにウエハWを載置する場合について説明したが、リブが形成された面に対しバックグラインド等のさらに所定の処理が行われる場合には、ウエハWが破損しないよう、ウエハWのセットすべき方向に応じてクランプリング41を介して作用する押圧力を変更自在とすることが好ましい。この場合、駆動手段43がエアーシリンダであれば、レギュレータを介してエアーシリンダへの供給圧力を変化させれば、クランプリング41を介して作用する押圧力が変更できる。   In the present embodiment, since the device structure portion is formed on the surface opposite to the surface on which the rib WR is formed, the rib WR protrudes from the direction in which the rib WR faces the substrate stage 1. The case where the wafer W is placed so as to straddle the wafer has been described. However, when further predetermined processing such as back grinding is performed on the surface on which the rib is formed, the wafer W is set so that the wafer W is not damaged. It is preferable that the pressing force acting via the clamp ring 41 can be changed according to the direction to be changed. In this case, if the driving means 43 is an air cylinder, the pressing force acting via the clamp ring 41 can be changed by changing the supply pressure to the air cylinder via a regulator.

本発明の実施形態の半導体ウエハ保持装置をウエハを保持した状態で示す切断側面図。1 is a cut side view showing a semiconductor wafer holding device according to an embodiment of the present invention while holding a wafer. (a)及び(b)は、図1に示す半導体ウエハ保持装置への半導体ウエハの密着保持を説明する図。(A) And (b) is a figure explaining the close_contact | adherence holding | maintenance of the semiconductor wafer to the semiconductor wafer holding apparatus shown in FIG. (a)及び(b)は、 図1に示す半導体ウエハ保持装置への半導体ウエハの密着保持を説明する図。(A) And (b) is a figure explaining the close_contact | adherence holding | maintenance of the semiconductor wafer to the semiconductor wafer holding apparatus shown in FIG.

符号の説明Explanation of symbols

1 基板ステージ(基板載置部)
2 基台
3 静電チャック
41 駆動軸(クランプ手段)
42 クランプリング(クランプ手段)
W 半導体ウエハ
WR リブ
1 Substrate stage (substrate placement part)
2 Base 3 Electrostatic chuck 41 Drive shaft (clamping means)
42 Clamp ring (clamping means)
W Semiconductor wafer WR Rib

Claims (3)

デバイス構造部のみを薄くすることでその外周縁部にリブが形成された半導体ウエハに対し所定の処理を施す処理室内で当該半導体ウエハが載置される基板載置部と、前記リブが存する半導体ウエハの外周縁部に押圧力を加え得るクランプ手段と、基板載置部に組付けた静電チャックとを備える半導体ウエハ保持装置であって、
前記基板載置部はその中央領域を凸状に突出させた段付き形状であり、この凸状の突出部上面がリブ内側のチップ有効部の面積より小さく形成され、
前記リブが基板載置部に対向する方向から半導体ウエハを当該突出部に載置し、前記クランプ手段により押圧力を加えると、前記リブの下端面が基板載置部の一段下がった平坦面に接触し、静電チャック機構を作動させると、デバイス構造部が突出部上面に面接触して吸着保持されるように構成したことを特徴とする半導体ウエハ保持装置。
A substrate mounting portion on which a semiconductor wafer is placed in a processing chamber for performing a predetermined process on a semiconductor wafer having a rib formed on the outer peripheral edge by thinning only the device structure portion, and a semiconductor having the rib A semiconductor wafer holding device comprising: clamping means capable of applying a pressing force to the outer peripheral edge of a wafer; and an electrostatic chuck assembled to a substrate mounting portion,
The substrate mounting portion has a stepped shape in which the central region protrudes in a convex shape, and the upper surface of the convex protrusion is formed smaller than the area of the chip effective portion inside the rib,
When the semiconductor wafer is placed on the projecting portion from the direction in which the rib faces the substrate placing portion and a pressing force is applied by the clamping means, the lower end surface of the rib becomes a flat surface lowered by one step on the substrate placing portion. A device for holding a semiconductor wafer, wherein the device structure portion is brought into surface contact with the upper surface of the protruding portion and held by suction when the electrostatic chuck mechanism is actuated.
前記クランプ手段は、前記基板載置部の周囲に立設した昇降自在な駆動軸と、駆動軸の先端に連結された環状のクランプリングとを備え、駆動軸を作動させてクランプリングを下降させると、半導体ウエハの外周縁部全体に押圧力が作用することを特徴とする請求項1記載の半導体ウエハ保持装置。   The clamp means includes a drive shaft that can be raised and lowered standing around the substrate mounting portion and an annular clamp ring that is connected to the tip of the drive shaft, and operates the drive shaft to lower the clamp ring. 2. A semiconductor wafer holding apparatus according to claim 1, wherein a pressing force acts on the entire outer peripheral edge of the semiconductor wafer. 前記半導体ウエハに作用する押圧力を変更自在としたことを特徴とする請求項1または請求項2記載の半導体ウエハ保持装置。   3. The semiconductor wafer holding apparatus according to claim 1, wherein a pressing force acting on the semiconductor wafer is freely changeable.
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