JP2009092481A5 - - Google Patents
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- Publication number
- JP2009092481A5 JP2009092481A5 JP2007262594A JP2007262594A JP2009092481A5 JP 2009092481 A5 JP2009092481 A5 JP 2009092481A5 JP 2007262594 A JP2007262594 A JP 2007262594A JP 2007262594 A JP2007262594 A JP 2007262594A JP 2009092481 A5 JP2009092481 A5 JP 2009092481A5
- Authority
- JP
- Japan
- Prior art keywords
- light source
- light
- illumination device
- fresnel lens
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005286 illumination Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- 238000011179 visual inspection Methods 0.000 claims 3
- 238000007689 inspection Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
Claims (5)
線状の発光面を有する光源と、
前記発光面の長手方向に屈折する線状の傾斜面を平行に並べたフレネル面を有するシ リンドリカルフレネルレンズと、
を備えることを特徴とする外観検査用照明装置。
In the illumination device for visual inspection that irradiates the inspected substrate with illumination light,
A light source having a linear light-emitting surface;
A cylindrical Fresnel lens having a Fresnel surface in which linear inclined surfaces refracting in the longitudinal direction of the light emitting surface are arranged in parallel;
An illumination device for visual inspection, comprising:
The cylindrical opposite to the Fresnel surface of the cull Fresnel lens, the cylindrical frame Nerurenzu illuminating apparatus for testing appearance according to claim 1, feature, further comprising a guided Fresnel lens converging light converging the light from.
The illumination device for appearance inspection according to claim 1, wherein the light source emits single wavelength light.
The light source includes a first line light source that emits single-wavelength light from a linear light-emitting surface, a second line light source that emits diffused light having a wavelength width larger than that of the first line light source, and the first light source. The drive means for selectively moving the line light source and the second line light source to or near the optical axis of the cylindrical Fresnel lens and a position retracted therefrom. Lighting equipment for exterior inspection.
前記被検査基板が載置される基板ホルダと、を備えることを特徴とする外観検査装置 。
An illumination device for visual inspection according to claim 1 ;
And a substrate holder on which the substrate to be inspected is placed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007262594A JP2009092481A (en) | 2007-10-05 | 2007-10-05 | Lighting device for visual inspection and visual inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007262594A JP2009092481A (en) | 2007-10-05 | 2007-10-05 | Lighting device for visual inspection and visual inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009092481A JP2009092481A (en) | 2009-04-30 |
| JP2009092481A5 true JP2009092481A5 (en) | 2010-10-28 |
Family
ID=40664610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007262594A Withdrawn JP2009092481A (en) | 2007-10-05 | 2007-10-05 | Lighting device for visual inspection and visual inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009092481A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NO336441B1 (en) * | 2012-01-24 | 2015-08-17 | Tomra Sorting As | Apparatus, system and method for optical detection of matter |
| TWI484223B (en) * | 2013-01-22 | 2015-05-11 | Machvision Inc | An optical component for multi-angle illumination of line scanning, and a light source system using the same |
| CN115616003B (en) * | 2022-10-17 | 2024-06-11 | 四川长虹电器股份有限公司 | Fresnel optical film inspection device and inspection method thereof |
-
2007
- 2007-10-05 JP JP2007262594A patent/JP2009092481A/en not_active Withdrawn
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