JP2009086183A - Magnetic sensing type input panel and display device with input panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic sensing type input panel which can be reduced in size and thickness. <P>SOLUTION: The input panel comprises a thin film Hall element 18 provided on a substrate 16. The thin film Hall element comprises a semiconductor thin film 19, first and second electrodes 20 and 21 disposed in one of two orthogonal directions of the semiconductor thin film 19 with a predetermined space and electrically connected to the semiconductor thin film 19, and third and fourth electrodes 22 and 23 disposed in the other one of the two directions of the semiconductor thin film 19 with a predetermined space and electrically connected to the semiconductor thin film 19, and generates a Hall voltage between the third and fourth electrodes 22 and 23 by applying a magnetic field to the semiconductor thin film 19 while supplying a current between the first and second electrodes 20 and 21. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a magnetic detection type input panel and a display device with an input panel.

  For example, as a magnetic detection type input panel used for a display device with an input panel or the like, there is conventionally an electromagnetic induction type input panel in which a sensor coil for detecting an induced current generated by a change in a magnetic field is provided on a substrate (patent) Reference 1).

The electromagnetic induction type input panel performs input by an electromagnetic pen provided with a magnetic field generating coil, and generates a magnetic field from the electromagnetic pen generated in the sensor coil when the electromagnetic pen is brought close to the sensor coil. Inductive current is detected according to the strength and change.
JP 2004-302431 A

  However, since the electromagnetic induction type input panel uses electromagnetic induction, in order to increase the sensitivity, the number of turns of the sensor coil is increased to correspond to the strength of the magnetic field applied by the electromagnetic pen. A sufficiently strong induced current must be generated in the sensor coil, which causes a problem that the sensor coil is large and thick.

  An object of the present invention is to provide a magnetic detection type input panel and a display device with an input panel that can be reduced in size and thickness.

  According to a first aspect of the present invention, there is provided a magnetic detection type input panel in which a semiconductor thin film is electrically connected to the semiconductor thin film by providing a predetermined space between the semiconductor thin film and one of two directions perpendicular to each other. The first and second electrodes are formed to be connected to pass current between them, and the other of the two directions across the region between the first and second electrodes of the semiconductor thin film A Hall voltage generated by a magnetic field applied to a region between the first and second electrodes of the semiconductor thin film is formed by being electrically connected to the semiconductor thin film with a predetermined interval between them. A thin film Hall element composed of third and fourth electrodes for detection is provided on the substrate.

  According to a second aspect of the present invention, in the magnetic detection type input panel according to the first aspect, the plurality of thin film Hall elements are arranged in a plurality of rows and a plurality of columns on the substrate. It is characterized by.

  According to a third aspect of the present invention, in the magnetic detection type input panel according to the second aspect, the plurality of thin film Hall elements arranged in a plurality of rows and a plurality of columns are adjacent to each other for each row. The first electrode of one thin film Hall element and the second electrode of the other Hall element are connected in series with each other, and one thin film Hall of adjacent thin film Hall elements is connected for each column. The third electrode of the element and the fourth electrode of the other Hall element are connected in series with each other, and each Hall element row composed of the plurality of thin film Hall elements connected in series for each row includes A current is sequentially applied to each Hall element row between the first electrode of the thin film Hall element at one end of the Hall element row and the second electrode of the thin film Hall element at the other end of the Hall element row. Connected to the current supply system to flow, Each Hall element array composed of the plurality of thin film Hall elements connected in series with each other includes a third electrode of the thin film Hall element at one end of the Hall element array and a thin film Hall element at the other end of the Hall element array. The voltage between the fourth electrode and the fourth electrode is connected to a voltage detection system for detecting each Hall element array.

  According to a fourth aspect of the present invention, in the magnetic detection type input panel according to the second aspect, the plurality of thin film Hall elements arranged in a plurality of rows and a plurality of columns are adjacent to each other for each row. The plurality of thin film Hall elements, wherein the first electrode of one thin film Hall element and the second electrode of the other Hall element are connected in series with each other and connected in series for each row. Each of the Hall element rows is configured to pass a current between the first electrode of the thin film Hall element at one end of the Hall element row and the second electrode of the thin film Hall element at the other end of the Hall element row. And the plurality of thin film Hall elements detect the voltage between the third electrode and the fourth electrode of each of the thin film Hall elements for each of the plurality of thin film Hall elements. Connected to the voltage detection system And wherein the Rukoto.

A display device with an input panel according to claim 5 of the present invention,
A display element for performing image display and key display for displaying a key pattern indicating an input unit at a predetermined position in a screen area for displaying the image;
The display element is disposed on either the observation side or the opposite side of the display element, and the semiconductor thin film is electrically connected to the semiconductor thin film by providing a predetermined interval between one of the two directions perpendicular to each other. First and second electrodes for allowing current to flow between each other, and the region between the first and second electrodes of the semiconductor thin film sandwiching the region between the two directions A hole generated by a magnetic field applied to a region between the first and second electrodes of the semiconductor thin film, which is formed to be electrically connected to the semiconductor thin film with a predetermined interval between them. A magnetic detection type input panel in which a thin film Hall element composed of third and fourth electrodes for detecting a voltage is provided on a substrate;
It is characterized by providing.

  According to a sixth aspect of the present invention, in the display device with an input panel according to the fifth aspect, the display element is a liquid crystal display element that displays an image and a key pattern by controlling light transmission, and the liquid crystal A surface light source for irradiating illumination light toward the liquid crystal display element is disposed on the side opposite to the viewing side of the display element.

  The invention according to claim 7 is the display device with an input panel according to claim 6, wherein the magnetic detection type input panel is disposed between the liquid crystal display element and the surface light source. And

  According to an eighth aspect of the present invention, in the display device with an input panel according to the sixth aspect, the magnetic detection type input panel is disposed on a side opposite to the side facing the liquid crystal display element of the surface light source. It is characterized by.

  Since the magnetic detection type input panel and the display device with an input panel according to the present invention have the above-described configuration, they can be reduced in size and thickness.

(First embodiment)
1 to 4 show a first embodiment of the present invention. FIG. 1 is a sectional view of a display device with an input panel, and FIG. 2 is a plan view of a magnetic detection type input panel.

  As shown in FIG. 1, the display device with an input panel includes a display element 1 that performs image display and key display that displays a key pattern indicating an input unit at a predetermined position in a screen area that displays the image. The magnetic sensing type input panel 15 is provided on either the observation side (the upper side in FIG. 1) of the display element 1 or the opposite side, for example, the opposite side to the observation side.

  The display element 1 is, for example, a liquid crystal display element that displays an image and a key pattern by controlling light transmission. The display device with an input panel of this embodiment is opposite to the observation side of the liquid crystal display element 1. It further includes a surface light source 12 that is disposed on the side and that irradiates illumination light toward the liquid crystal display element 1.

  The liquid crystal display element 1 is surrounded by a pair of transparent substrates 2 and 3 on the observation side bonded to each other via a frame-shaped sealing material 4 and the sealing material 4 between the substrates 2 and 3. The liquid crystal layer 5 sealed in the region and the opposing inner surfaces of the pair of substrates 2 and 3 are provided to face each other, and an electric field is applied to the liquid crystal layer 5 for each region facing each other to form liquid crystal molecules. The first and second transparent electrodes 6 and 7 forming a pixel region for controlling the alignment state of the substrate, and a pair of polarizing plates 10 and 11 disposed on the outer surfaces of the pair of substrates 2 and 3, respectively. ing.

  The liquid crystal display element 1 is provided on the inner surface of one substrate, for example, the substrate 3 opposite to the observation side, with a plurality of pixel electrodes 7 arranged in a matrix in the row and column directions, and the other substrate, This is an active matrix liquid crystal display element in which a single-film counter electrode 6 facing the array region of the plurality of pixel electrodes 7 is provided on the inner surface of the substrate 2 on the observation side. On the inner surface of the opposite substrate 3 provided with the pixel electrodes 7, a plurality of TFTs (thin film transistors) respectively connected to the plurality of pixel electrodes 7, and a plurality of scanning lines for supplying gate signals to the TFTs in each row A plurality of signal lines for supplying data signals to the TFTs in each column are provided.

  Further, on the inner surface of the observation-side substrate 2, the plurality of pixel electrodes 7 and the counter electrode 6 correspond to a region between a plurality of pixels composed of regions facing each other and a periphery of the array region of the plurality of pixels. A formed light-shielding film (black mask) 8 and three color filters 9R, 9G, and 9B of red, green, and blue corresponding to the plurality of pixels are provided, and the counter electrode 6 Are formed on the color filters 9R, 9G, 9B.

  Further, an alignment film (not shown) is provided on the inner surfaces of the pair of substrates 2 and 3 so as to cover the electrodes 6 and 7, respectively, and the liquid crystal molecules of the liquid crystal layer 5 are disposed on the pair of substrates 2. , 3 are aligned in an alignment state defined by the alignment film.

  The liquid crystal display element 1 includes a TN or STN type in which liquid crystal molecules are twist-aligned, a vertical alignment type in which liquid crystal molecules are aligned substantially perpendicular to the surfaces of the substrates 2 and 3, and a substrate without twisting the liquid crystal molecules. Either a horizontal alignment type aligned substantially parallel to two or three planes, a bend alignment type in which liquid crystal molecules are bend aligned, or a ferroelectric or antiferroelectric liquid crystal display element, The polarizing plates 9 and 10 are arranged with their transmission axes oriented so as to obtain good contrast.

  The liquid crystal display element 1 is not limited to one that changes the alignment state of liquid crystal molecules by generating an electric field between the electrodes 6 and 7 provided on the inner surfaces of the pair of substrates 2 and 3, respectively. For example, comb-shaped first and second electrodes for forming a plurality of pixels are provided on either inner surface, and a horizontal electric field (electric field in a direction along the substrate surface) is generated between these electrodes to align liquid crystal molecules. A lateral electric field control type that changes the state may be used.

  The surface light source 12 is made of a plate-like transparent member having an area facing at least the screen area of the liquid crystal display element 1, and an incident end face 13a for allowing light to enter is formed on one end face thereof, and one of the two plate faces. An exit surface 13b for emitting light incident from the entrance end surface 13a is formed on the other plate surface, and a reflection surface 13c for reflecting the light incident from the entrance end surface 13a toward the exit surface 13b is formed on the other plate surface. A light guide plate 13 and a light emitting element 14 such as an LED (light emitting diode) that is disposed to face the incident end surface 13a of the light guide plate 13 and emits light toward the incident end surface 13a of the light guide plate 13; On the side opposite to the viewing side of the liquid crystal display element 1, the light exit surface 13 b of the light guide plate 13 is disposed to face the liquid crystal display element 1.

  The liquid crystal display element 1 is not limited to one provided with the three color filters 9R, 9G, and 9B of red, green, and blue corresponding to a plurality of pixels, but is used for field sequential display without a color filter. In this case, the surface light source 12 may be provided with a light emitting element that emits red light, a light emitting element that emits green light, and a light emitting element that emits blue light.

  The liquid crystal display element 1 is driven by a display drive circuit (not shown), and always displays an image over the entire screen area corresponding to an array region of a plurality of pixels, and at the time of input to the magnetic detection type input panel 15, A plurality of key patterns (numbers and symbols indicating key shapes and key types) indicating the input unit are displayed at predetermined positions in the screen area.

  In FIG. 1, the pixel pitch of the liquid crystal display element 1 is greatly exaggerated. However, the plurality of pixels are arranged at a pitch of 50 to 100 μm, and each of the plurality of key patterns is several tens. The pixel group is displayed.

  The magnetic detection type input panel 15 is disposed between the liquid crystal display element 1 and the surface light source 12.

  This magnetic detection type input panel 15 is provided with a plurality of thin film Hall elements 18 on a transparent insulating substrate 16 made of glass or the like corresponding to the display positions of the plurality of key patterns of the liquid crystal display element 1. Is. A transparent base film 17 made of silicon nitride or the like is formed on the substrate 16, and the plurality of thin film Hall elements 18 are formed on the base film 17.

  The thin film Hall element 18 includes a semiconductor thin film 19 formed on the base film 17 at a position corresponding to the outer shape of the key pattern displayed by the liquid crystal display element 1, and the semiconductor thin film 19 orthogonal to each other. The first and second electrodes 20 and 21 are disposed in one of the two directions with a predetermined interval between them and electrically connected to the semiconductor thin film 19, and the first and second electrodes of the semiconductor thin film 19 The semiconductor thin film 19 is electrically connected to the semiconductor thin film 19 with a predetermined interval between the other two sides of the semiconductor thin film 19 across the region between the second electrodes 20 and 21. It consists of first and second electrodes 22, 23.

  The semiconductor thin film 19 is made of an i-type amorphous silicon film formed to a thickness of about 100 nm, and the electrodes 20, 21, 22, 23 are made of a metal such as molybdenum or chromium. The semiconductor thin film 19 is electrically connected via a contact layer 24 made of n-type amorphous silicon formed in the same shape as 20, 21, 22, and 23. In this embodiment, the semiconductor thin film 19 is formed on the base film 17, and the first to fourth electrodes 20, 21, 22, 23 are formed on the edges of the semiconductor thin film 19. Is forming.

  The semiconductor thin film 19 is formed in, for example, a rectangular shape, and the first and second electrodes 20 and 21 are parallel to the longitudinal direction of both ends of the semiconductor thin film 19 in the longitudinal direction. The third and fourth electrodes 22, 23 are formed in both strip edges of the semiconductor thin film 19 in a strip shape parallel to the length direction of the respective edges. Has been.

  In the thin film Hall element 18, a current is applied between the first and second electrodes 20 and 21, and a magnetic field is applied to a region of the semiconductor thin film 19 between the first and second electrodes 20 and 21. Then, a voltage due to the Hall effect, that is, a Hall voltage is generated between the third and fourth electrodes 22 and 23.

  That is, a current is applied to the semiconductor thin film 19 from one of the first and second electrodes 20 and 21 toward the other, and a magnetic field is applied to the semiconductor thin film 19 from a direction intersecting the film surface. As a result, the Hall voltage is generated in the direction perpendicular to the direction in which the current flows in the semiconductor thin film 19, that is, between the third and fourth electrodes 22 and 23.

  FIG. 3 shows the third and fourth electrodes 22, 22 with respect to the current value flowing between the first and second electrodes 20, 21 when an N-polar magnetic field is applied in the thin film Hall element 18. It is the Hall voltage characteristic figure which showed the relationship with the Hall voltage which generate | occur | produces between 23.

  As shown in FIG. 3, the thin film Hall element 18 includes the third and the second electrodes 20 and 21 when no current flows between the first and second electrodes 20 and 21. The voltage between the fourth electrodes 22 and 23 is substantially zero. When a current is passed between the first and second electrodes 20 and 21, the strength of the magnetic field and the first and second electrodes 20 and 21 are between the third and fourth electrodes 22 and 23. A Hall voltage corresponding to the current value passed between them is generated. The thin film Hall element 18 has a magnetic field strength between the third and fourth electrodes 22 and 23 and between the first and second electrodes 20 and 21 even when an S-polar magnetic field is applied. A Hall voltage corresponding to the current value is generated.

  The plurality of thin film Hall elements 18 are arranged in a plurality of rows and a plurality of columns on the substrate 16 (on the base film 17). In this embodiment, nine key patterns indicating the input section are arranged on the liquid crystal display element 1 in three rows in the row direction (left and right direction of the screen area) and three in the column direction (up and down direction of the screen area). The magnetic detection type input panel 15 is provided with nine thin film Hall elements 18 arranged corresponding to the display positions of the respective key patterns of the liquid crystal display element 1.

  Each of the nine thin film Hall elements 18 is one of an edge where the first and second electrodes 20 and 21 are formed and an edge where the third and fourth electrodes 22 and 23 are formed. On the other hand, for example, two end edges on which the first and second electrodes 20 and 21 are formed are formed in the row direction.

  The plurality of thin film Hall elements 18 arranged in the plurality of rows and the plurality of columns includes, for each row, the first electrode 20 of the one thin film Hall element 18 and the other of the adjacent thin film Hall elements 18, 18. The thin film Hall elements adjacent to each other are connected in series with the second electrodes 21 of the Hall elements 18 connected to each other in series via row connection lines 26 formed integrally with the electrodes 20 and 21. 18 and 18, the third electrode 22 of one thin film Hall element 18 and the fourth electrode 23 of the other Hall element 18 are connected to the column-direction connecting line 27 formed integrally with these electrodes 22 and 23. Are connected to each other in series.

  Further, at both ends in the row direction on the substrate 16, a plurality of current supply terminals 28 a and 28 b corresponding to each Hall element row composed of the plurality of thin film Hall elements 18 connected in series for each row. At both ends in the column direction on the substrate 16, a plurality of voltage detection terminals 29 a corresponding to the respective Hall element columns composed of the plurality of thin film Hall elements 18 connected in series for each column. , 29b are formed.

  The first electrode 20 of the thin film Hall element 18 at one end of each Hall element row is integrated with each of the current supply terminals 28a formed at one end side in the row direction, and the electrode 21 and the terminal 28a, respectively. The second electrode 21 of the thin film Hall element 18 at the other end of each Hall element row is connected to the other current supply formed at the other end side in the row direction. The terminals 28b are connected to the electrodes 22 and the terminals 28b through row-direction lead wires 30b formed integrally with the terminals 22b.

  The third electrode 22 of the thin film Hall element 18 at one end of each Hall element row is integrated with each of the voltage detection terminals 29a formed on one end side in the row direction. The fourth electrode 23 of the thin film Hall element 18 at the other end of each Hall element column is connected to each other through the column direction lead wire 31a formed at the other end side in the column direction. The terminals 29b are connected to the electrodes 23 and the terminals 29b through column-direction lead wires 31b formed integrally with the terminals 29b.

  Each of the plurality of thin film Hall elements 18 is formed to correspond to the several tens of pixel groups for displaying one key pattern of the liquid crystal display element 1. The fourth electrodes 20, 21, 22, 23, the row direction connection lines 26 and the column direction connection lines 27, the row direction lead wires 30 a and 30 b, and the column direction lead lines 31 a and 31 b are respectively the surface light sources. An area between adjacent pixels of the liquid crystal display element 1 so as not to block light directed to each pixel of the liquid crystal display element 1 among illumination light irradiated from 12 to the liquid crystal display element 1 It is formed corresponding to.

  The first to fourth electrodes 20, 21, 22, 23, the row direction connection line 26, the column direction connection line 27, and the lead lines 30a, 30b, 31a, 31b are made of a transparent conductive material such as an ITO film. It may be formed by a film, and in that case, these may be formed in a shape that enters the pixel.

  The plurality of thin film Hall elements 18, the row direction connection lines 26 and the column direction connection lines 27, the row direction lead wires 30 a and 30 b and the column direction lead wires 31 a and 31 b are arranged on the substrate 16. It is covered with a transparent protective film 37 made of an insulating material such as silicon nitride formed excluding the peripheral portion where the plurality of current supply terminals 28a and 28b and the voltage detection terminals 29a and 29b are formed.

  Further, the magnetic detection type input panel 15 includes a first electrode 20 of the thin film Hall element 18 at one end of the Hall element row and a second electrode 21 of the thin film Hall element 18 at the other end of the Hall element row. In between, a current supply system 38 (see FIG. 4) for flowing current sequentially for each Hall element row, a third electrode 22 of the thin film Hall element 18 at one end of the Hall element column, and the Hall element column And a voltage detection system 39 (see FIG. 4) for detecting a voltage between the thin film Hall element 18 at the other end of the thin film Hall element 18 for each Hall element array.

  FIG. 4 is a schematic diagram showing a driving method of the magnetic detection type input panel 15, and the first electrode 20 of the thin film Hall element 18 at one end of each Hall element row is connected to the first electrode 20. The second electrode 21 of the thin film Hall element 18 at the other end of each Hall element row is grounded via the current supply terminal 28 b, and the current supply terminal 28 a connected to the second electrode 21 is connected to the second electrode 21. The third electrode 22 of the thin film Hall element 18 at one end of each Hall element row is connected to the voltage detection terminal 29 a connected to the third electrode 22. The fourth electrode 23 of the thin film Hall element 18 at the other end of each Hall element array is grounded via the voltage detection terminal 29b connected to the fourth electrode 23. It is connected to the.

Although the configuration of the current supply system 38 is not illustrated, the current supply system 38 includes a constant current power source and a switching circuit that sequentially supplies a current from the power source to each Hall element row of the magnetic detection type input panel 15. As shown in FIG. 4, the waveforms of the currents I ₁ , I ₂ , and I ₃ supplied to the first to third Hall element rows, respectively, for example, predetermined in the range of 0.1 to 0.3 seconds. For each unit time T, a constant current is supplied to the first Hall element row in the first period t ₁ among the periods t ₁ , t ₂ , t _{3 obtained} by dividing the unit time T into three, and the second period supplying a current of the constant value to the second Hall element row to t _2, it repeats the operation for supplying the current of the constant value to the third Hall element row to the third period t _3.

The voltage detection system 39 is not shown in its configuration, but the output voltage of the thin film Hall element 18 in each of the first to third Hall element columns is synchronized with the current supply to each Hall element row. The first to third voltage sensors to be detected are provided, and voltage detection signals from these voltage sensors are output for each of the periods t ₁ , t ₂ , and t ₃ .

  The display device with an input panel receives an input to the magnetic detection type input panel 15 from the observation side of the liquid crystal display element 1, and an input pen that generates a magnetic field, for example, a magnet pen 43 having a pen tip 44 made of a permanent magnet ( 1), at the time of the input, the plurality of key patterns are displayed on the liquid crystal display element 1, and the current from the current supply system 38 for each Hall element row of the magnetic detection type input panel 15 is displayed. While the supply is started, the voltage detection system 39 is turned on.

  As an input to the magnetic detection type input panel 15, one of a plurality of key patterns displayed by the liquid crystal display element 1 is selected, and the observation surface of the liquid crystal display element 1 (the outer surface of the observation side polarizing plate 10). This is done by bringing the pen tip 44 of the magnet pen 43 close to or in contact with the selected key pattern display section.

  Thus, when the pen tip 44 of the magnet pen 43 is brought close to or in contact with the observation surface of the liquid crystal display element 1, the magnetic field from the pen tip 44 of the magnet pen 43 passes through the liquid crystal display element 1 and Acts on the semiconductor thin film 19 of the thin film Hall element 18 corresponding to the key pattern display portion of the plurality of thin film Hall elements 18 of the magnetic detection type input panel 15 corresponding to or close to the pen tip 44 of the magnet pen 43, A Hall voltage is generated between the third and fourth electrodes 22 and 23 of the thin film Hall element 18.

  Since the magnetic field passes through the liquid crystal display element 1 without affecting the electro-optical characteristics, the liquid crystal display element 1 can be input even when input from the magnet pen 43 is performed from the observation side of the liquid crystal display element 1. The display of is not disturbed.

  Further, the magnetic detection type input panel 15 is disposed between the liquid crystal display element 1 and the surface light source 12 disposed on the opposite side of the liquid crystal display element 1 from the observation side. Illumination light irradiated from 12 to the liquid crystal display element 1 passes through the semiconductor thin film 19 of each thin film Hall element 18 of the magnetic detection type input panel 15, but the light is transmitted to the semiconductor thin film 19. The current flowing between the first and second electrodes 20 and 21 is increased.

For example, as shown in FIG. 4, when a magnetic field acts on the thin film Hall element 18 in the first column in the second Hall element row of the magnetic detection type input panel 15, the unit time T the current to the second Hall element rows during the second period t ₂ which is fed in, the Hall voltage from the first thin-film Hall element array is output.

That is, when a magnetic field is applied to the thin film Hall element 18 of the first column in the second Hall element row, the output voltages V ₂ and V ₃ from the second and third Hall element columns are equal to the unit time T. Any of the _first to third periods t ₁ , t ₂ , t ₃ is 0, and the output voltage V ₁ from the first Hall element array is the Hall voltage in the second period t ₂ of the unit time T. become.

Similarly, when a magnetic field is applied to the thin film Hall element 18 in the second column of the first Hall element row, for example, the output voltages V ₁ and V ₃ from the first and third Hall element columns are the unit time T. In any of the first to third periods t ₁ , t ₂ , t ₃ , the output voltage V ₂ from the second Hall element row is the Hall in the first period t ₁ of the unit time T. Become a voltage.

The output voltages V ₁ , V _2, V ₃ from the first to third Hall element arrays are the first to third of the voltage detection system 39 for each of the _first to third periods t ₁ , t ₂ , t ₃ . Detected by the third voltage sensor, voltage detection signals from these voltage sensors are output from the voltage detection system 39 to an input determination circuit (not shown).

The input determination circuit, based on the voltage detection signal from the voltage detection system 39, the column number of the Hall element array that has output the Hall voltage, and the first to third periods t ₁ , t ₂ , t ₃ A plurality of key patterns displayed by the liquid crystal display element 1 are determined by determining the position of the thin film Hall element 18 to which a magnetic field from the magnet pen 43 is applied from a period in which Hall voltage is output from the Hall element array. The input information corresponding to the key pattern corresponding to the thin film Hall element 18 to which the magnetic field has acted, that is, the key pattern in which the pen tip 44 of the magnet pen 43 is close or in contact is output. To do.

  The input to the magnetic detection type input panel 15 is not limited to the magnet pen 43 but may be performed by an electromagnetic pen including a coil that generates a DC magnetic field or an alternating magnetic field. It can be performed.

  As described above, the magnetic detection type input panel 15 is electrically connected to the semiconductor thin film 19 by providing a predetermined space between the semiconductor thin film 19 and one of the two directions perpendicular to each other. The first and second electrodes 20 and 21 that are formed to be connected and allow current to flow between them, and the region between the first and second electrodes 20 and 21 of the semiconductor thin film 19 are sandwiched. It is formed to be electrically connected to the semiconductor thin film 19 with a predetermined interval between the other of the two directions, and between the first and second electrodes 20, 21 of the semiconductor thin film 19. Since the thin film Hall element 18 composed of the third and fourth electrodes 22 and 23 for detecting the Hall voltage generated by the magnetic field applied to the region is provided on the substrate 16, the Hall effect is utilized. Input detection That.

  The magnetic detection type input panel 15 has the advantage of being small and extremely thin because the thin film Hall element 18 is provided on the substrate 16.

  In the magnetic detection type input panel 15 of the above embodiment, a plurality of thin film Hall elements 18 are arranged on the substrate 16 in a plurality of rows and columns. Can be selectively input to a plurality of input units respectively corresponding to.

Further, the magnetic detection type input panel 15 includes a plurality of thin film Hall elements 18 arranged in a plurality of rows and a plurality of columns, one thin film Hall element 18 among adjacent thin film Hall elements 18 and 18 for each row. The first electrode 20 and the second electrode 21 of the other Hall element 18 are electrically connected to each other and connected in series, and one thin film Hall element 18 of adjacent thin film Hall elements 18, 18 is connected for each column. The third electrode 22 and the fourth electrode 23 of the other Hall element are connected to each other in series, and each Hall element row composed of the plurality of thin film Hall elements 18 connected in series is connected to each row. Each Hall element row is provided between the first electrode 20 of the thin film Hall element 18 at one end of the Hall element row and the second electrode 21 of the thin film Hall element 18 at the other end of the Hall element row. To pass current sequentially Each Hall element array composed of the plurality of thin film Hall elements 18 connected to the current supply system 38 and connected in series for each column is connected to the third electrode 22 of the thin film Hall element 18 at one end of the Hall element array. Since the voltage between the other electrode of the Hall element array and the fourth electrode 23 of the thin film Hall element 18 is connected to the voltage detection system 39 for detecting each Hall element array, the Hall The Hall element column number of the Hall element column that outputs the voltage and the Hall element in each period (first to third periods t ₁ , t ₂ , t _{3 in the} above-described embodiment) in which a current is sequentially supplied to each Hall element row The position of the thin film Hall element 18 to which the magnetic field has acted can be determined from the period in which the Hall voltage is output from the column.

  The display device with an input panel includes a liquid crystal display element 1 for performing image display and key display for displaying a key pattern indicating an input unit at a predetermined position in a screen area for displaying the image, and the liquid crystal display device. The magnetic detection type input panel 15 is disposed on the opposite side of the display element 1 from the observation side, and the thin film Hall element 18 is provided on the substrate 16 corresponding to the display position of the key pattern of the liquid crystal display element 1. Therefore, input detection using the Hall effect can be performed.

  In the display device with an input panel, since the magnetic detection type input panel 15 is extremely thin, the entire device can be reduced in size and thickness.

  Further, in the display device with an input panel of the above embodiment, the magnetic detection type input panel 15 is composed of the liquid crystal display element 1 and the surface light source 12 arranged on the opposite side of the liquid crystal display element 1 from the observation side. Therefore, the illumination light irradiated from the surface light source 12 toward the liquid crystal display element 1 is applied to the semiconductor thin film 19 of each thin film Hall element 18 of the magnetic detection type input panel 15. Since the current flowing between the first and second electrodes 20 and 21 is increased and the Hall voltage is increased according to the current value, highly sensitive input detection can be performed.

(Second Embodiment)
FIG. 5 is a cross-sectional view of a display device with an input panel showing a second embodiment of the present invention. Note that in this embodiment, the same reference numerals are given to those corresponding to the first embodiment, and description of substantially the same components will be omitted.

  In the display device with an input panel of this embodiment, the magnetic detection type input panel 15 is the side facing the liquid crystal display element of the surface light source 12 arranged on the side opposite to the observation side of the liquid crystal display element 1. The other arrangement is the same as that of the first embodiment.

  In this display device with an input panel, the magnetic detection type input panel 15 is arranged on the rear side of the surface light source 12, but a part of the light incident on the light guide plate 13 of the surface light source 12 from the incident end surface 13 a. However, since the light passes through the reflecting surface 13c of the light guide plate 13 and leaks to the rear side, the leakage light is transmitted to the semiconductor thin film 19 of each thin film Hall element 18 of the magnetic detection type input panel 15 with respect to the first and the second. Since the current flowing between the second electrodes 20 and 21 is increased and the Hall voltage is increased according to the current value, more sensitive input detection can be performed.

(Third embodiment)
6 and 7 show a third embodiment of the present invention. FIG. 6 is a plan view of the magnetic detection type input panel, and FIG. 7 is a schematic view of the magnetic detection type input panel. Note that in this embodiment, the same reference numerals are given to those corresponding to the first embodiment, and description of substantially the same components will be omitted.

  In this magnetic detection type input panel 15a, a plurality of thin film Hall elements 18 having the same configuration as that of the first embodiment are arranged on a substrate 16 and arranged in a plurality of rows and a plurality of columns. Nine thin film Hall elements 18 are arranged in three rows in the row direction and in the column direction, respectively.

  In the magnetic detection type input panel 15a, the plurality of thin film Hall elements 18 arranged in the plurality of rows and the plurality of columns is one thin film Hall element 18 of the adjacent thin film Hall elements 18 and 18 for each row. The first electrode 20 and the second electrode 21 of the other Hall element 18 are electrically connected to each other via a row-direction connection line 26 formed integrally with these electrodes 20 and 21 and connected in series. Yes.

  Further, at both ends in the row direction on the substrate 16, a plurality of current supply terminals 28 a and 28 b corresponding to each Hall element row composed of the plurality of thin film Hall elements 18 connected in series for each row. The first electrode 20 of the thin film Hall element 18 at one end of each Hall element row is connected to each of the current supply terminals 28a formed at one end side in the row direction. The second electrode 21 of the thin film Hall element 18 at the other end of each Hall element row is formed on the other end side in the row direction, connected via a row direction lead wire 30a formed integrally with the terminal 28a. The current supply terminals 28b are connected to the electrodes 22 and the terminals 28b through row-direction lead wires 30b formed integrally with the electrodes 22 and the terminals 28b, respectively.

  Further, one ground terminal 32 is formed on the peripheral edge of the substrate 16, for example, one end in the row direction, and the number corresponding to the number of the thin film Hall elements 18 is formed on the other end in the row direction. Voltage detection terminals 33a, 33b. 33c, 33d, 33e, 33f, 33g, 33h. 33i is formed, and the third electrode 22 of each thin film Hall element 18 is connected to the one ground terminal 32 via a ground lead wire 34 commonly connecting the third electrodes 22 of the thin film Hall elements 18. The fourth electrode 23 of each thin film Hall element 18 is connected to the plurality of thin film Hall elements 18 via a plurality of voltage output leads 35 formed for each thin film Hall element 18. Are respectively connected to the voltage detection terminals 33a to 33i.

  The Hall element rows are connected to the first electrode 20 of the thin film Hall element 18 at one end of the Hall element row and the thin film at the other end of the Hall element row via the current supply terminals 28a and 28b, respectively. A plurality of thin film Hall elements 18 are connected to a current supply system 40 for flowing a current between the Hall element 18 and the second electrode 21, respectively. The voltage between the electrode 22 and the fourth electrode 23 is connected to a voltage detection system 43 for detecting each of the plurality of thin film Hall elements 18.

  As shown in FIG. 7, the current supply system 40 includes a constant current power supply 41. When the input to the magnetic detection type input panel 15a (for example, input by the magnet pen 43 shown in FIG. 1), Current is supplied to each Hall element row at once.

  The voltage detection system 43 has a configuration (not shown), but a plurality of voltage sensors (the same number as the number of thin film Hall elements 18) for detecting the output voltage of the plurality of thin film Hall elements 18 for each thin film Hall element 18. The voltage detection signal by these voltage sensors is output.

  In this magnetic detection type input panel 15a, a plurality of thin film Hall elements 18 are arranged on a substrate 16 in a plurality of rows and columns, and a plurality of thin film Hall elements 18 arranged in the plurality of rows and columns. For each row, the first electrode 20 of one thin film Hall element 18 of the adjacent thin film Hall elements 18 and 18 and the second electrode 21 of the other Hall element 18 are connected to each other in series. Then, each Hall element row composed of the plurality of thin film Hall elements 18 connected in series for each row is referred to as the first electrode 20 of the thin film Hall element 18 at one end of the Hall element row, and the Hall element row, respectively. The thin film Hall element 18 is connected to a current supply system 40 for passing a current between the thin film Hall element 18 and the second electrode 21 of the other end of the thin film Hall element 18. Electrode 2 And the fourth electrode 23 are connected to a voltage detection system 42 for detecting each of the plurality of thin film Hall elements 18, and therefore, a plurality of voltages corresponding to the plurality of thin film Hall elements 18 respectively. Selective input to the input unit can be performed.

(Fourth embodiment)
FIG. 8 is a sectional view of a magnetic detection type input panel showing a fourth embodiment of the present invention. The magnetic detection type input panel 15c of this embodiment is the same as the magnetic detection type input panel 15 of the first embodiment. The contact layer 24 and the first to fourth layers are formed by forming an n-type amorphous silicon film and a metal film (or ITO film) on the semiconductor thin film 19 of the plurality of thin film Hall elements 18 and patterning these films, respectively. An etching stopper layer 25 made of silicon nitride or the like is provided to prevent the semiconductor thin film 19 from being damaged when the electrodes 20, 21, 22, 23 are formed.

(Fifth embodiment)
FIG. 9 is a sectional view of a magnetic detection type input panel showing a fifth embodiment of the present invention. The magnetic detection type input panel 15d of this embodiment is the same as the magnetic detection type input panel 15 of the first embodiment. The semiconductor thin film 19 of the thin film Hall element 18 is formed on a single film over the entire arrangement region of the plurality of thin film Hall elements 18, and each thin film Hall element 18 is formed in the same manner as in the fourth embodiment. An etching stopper layer 25 is provided.

(Other embodiments)
The display device with an input panel of the above embodiment is a liquid crystal display as a display element for performing image display and key display for displaying a key pattern indicating an input unit at a predetermined position in a screen area for displaying the image. The surface light source 12 is arranged on the side opposite to the viewing side of the liquid crystal display element. However, the display element is not limited to the liquid crystal display element, and other display elements such as a surface light source are required. It may be a self-luminous display element that does not.

  That is, when the magnetic detection type input panels 15, 15a, 15c, and 15d are arranged on the side opposite to the viewing side of the display element, the display element is not affected by the magnetic field and allows the magnetic field to pass therethrough. For example, it may be a liquid crystal display element or a self-luminous display element such as an induced EL (electroluminescence) display element.

  Further, the magnetic detection type input panels 15, 15a, 15c, and 15d may be arranged on the observation side of the display element, and in that case, the influence of the magnetic field on the display element is very small or almost absent, The element may be any of a liquid crystal display element, an induced EL display element, a plasma display element, and the like.

  The magnetic detection type input panels 15, 15a, 15c, and 15d are not limited to display devices with an input panel but can be used for other purposes.

Sectional drawing of the display apparatus with an input panel which shows 1st Example of this invention. The top view of the magnetic detection type | mold input panel of a 1st Example. The current-Hall voltage characteristic view of a thin film Hall element. The schematic diagram of the magnetic detection type | mold input panel of a 1st Example. Sectional drawing of the display apparatus with an input panel which shows 2nd Example of this invention. The top view of the magnetic detection type | mold input panel which shows the 3rd Example of this invention. The schematic diagram of the magnetic detection type | mold input panel of a 3rd Example. Sectional drawing of the magnetic detection type | mold input panel which shows the 4th Example of this invention. Sectional drawing of the magnetic detection type | mold input panel which shows 5th Example of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Liquid crystal display element, 12 ... Surface light source, 15, 15a, 15b, 15c, 15d ... Magnetic detection type input panel, 16 ... Substrate, 17 ... Base film, 18 ... Thin film Hall element, 19 ... Semiconductor thin film, 20th DESCRIPTION OF SYMBOLS 1 electrode, 21 ... 2nd electrode, 22 ... 3rd electrode, 23 ... 4th electrode, 24 ... Contact layer, 37 ... Protective film, 38, 40 ... Current supply system, 39, 42 ... Voltage detection system 43 ... Magnetic pen.

Claims (8)

  A semiconductor thin film and a first thin film formed in electrical connection with the semiconductor thin film with a predetermined interval between the semiconductor thin film and one of two directions perpendicular to each other. The semiconductor thin film is electrically connected to the other of the two directions with a predetermined interval between the first electrode and the second electrode, and the region between the first electrode and the second electrode of the semiconductor thin film. A thin film hole formed of a third electrode and a fourth electrode for detecting a Hall voltage generated by a magnetic field applied to a region between the first electrode and the second electrode of the semiconductor thin film. A magnetic detection type input panel, wherein an element is provided on a substrate.   2. The magnetic detection type input panel according to claim 1, wherein a plurality of thin film Hall elements are arranged in a plurality of rows and a plurality of columns on the substrate. A plurality of thin film Hall elements arranged in a plurality of rows and columns include, for each row, a first electrode of one thin film Hall element and a second electrode of the other Hall element among adjacent thin film Hall elements. Conductively connected to each other and connected in series, and for each column, the third electrode of one thin film Hall element of adjacent thin film Hall elements and the fourth electrode of the other Hall element are electrically connected to each other and connected in series. Has been
Each Hall element row composed of the plurality of thin film Hall elements connected in series for each row includes a first electrode of a thin film Hall element at one end of the Hall element row and a thin film hole at the other end of the Hall element row. Connected to the second electrode of the element is connected to a current supply system for flowing current sequentially for each Hall element row;
Each Hall element array composed of the plurality of thin film Hall elements connected in series for each column includes a third electrode of the thin film Hall element at one end of the Hall element array and a thin film hole at the other end of the Hall element array. 3. The magnetic detection type input panel according to claim 2, wherein the magnetic detection type input panel is connected to a voltage detection system for detecting a voltage between the fourth electrode of each element and each Hall element array. A plurality of thin film Hall elements arranged in a plurality of rows and columns include, for each row, a first electrode of one thin film Hall element and a second electrode of the other Hall element among adjacent thin film Hall elements. Connected to each other in series,
Each Hall element row composed of the plurality of thin film Hall elements connected in series for each row includes a first electrode of a thin film Hall element at one end of the Hall element row and a thin film hole at the other end of the Hall element row. Connected to a current supply system for flowing current between the second electrode of the element,
Each of the plurality of thin film Hall elements is connected to a voltage detection system for detecting the voltage between the third electrode and the fourth electrode of each of the thin film Hall elements for each of the plurality of thin film Hall elements. The magnetic detection type input panel according to claim 2, wherein: A display element for performing image display and key display for displaying a key pattern indicating an input unit at a predetermined position in a screen area for displaying the image;
The display element is disposed on either the observation side or the opposite side of the display element, and the semiconductor thin film is electrically connected to the semiconductor thin film by providing a predetermined interval between one of the two directions perpendicular to each other. First and second electrodes for allowing current to flow between each other, and the region between the first and second electrodes of the semiconductor thin film sandwiching the region between the two directions A hole generated by a magnetic field applied to a region between the first and second electrodes of the semiconductor thin film, which is formed to be electrically connected to the semiconductor thin film with a predetermined interval between them. A magnetic detection type input panel in which a thin film Hall element composed of third and fourth electrodes for detecting a voltage is provided on a substrate;
A display device with an input panel.   The display element is a liquid crystal display element that displays an image and a key pattern by controlling transmission of light, and a surface that irradiates illumination light toward the liquid crystal display element on a side opposite to an observation side of the liquid crystal display element The display device with an input panel according to claim 5, wherein a light source is disposed.   The display device with an input panel according to claim 6, wherein the magnetic detection type input panel is disposed between the liquid crystal display element and the surface light source.   The display device with an input panel according to claim 6, wherein the magnetic detection type input panel is arranged on a side opposite to the side facing the liquid crystal display element of the surface light source.

Images