JP2009079621A - Vibration resistant mount - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration resistant mount excellent in durability whose vibration resisting properties are hardly adversely influenced by variation in the ambient temperature. <P>SOLUTION: A vibration resistant mount 10 resisting vibration or damping vibration of prescribed equipment comprises a coil spring 16 disposed between a first and second attaching members 12, 14 supporting the weight of the equipment, a cylindrical body 18 arranged within the inner space of the coil spring 16, and a vibration damping mechanism allowing damping of input vibrations by air flowing in and out against an air chamber 24 formed by a piston member 20 slidable within the cylindrical body 18 in its axial direction, wherein a spherical magnet 30 is arranged between the piston member 20 and the second attaching member 14 to constitute a point support mechanism abutted by point support construction, and an abutting keeping means constructed to allow the piston member 20 be supported always by the second attaching member 14 is arranged. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an anti-vibration mount, and in particular, is interposed between a device to be anti-vibrated or controlled and a base on which it is installed to suppress or prevent transmission of vibrations between them. The present invention relates to an anti-vibration mount.

  Conventionally, a structure in which such equipment is installed via a vibration isolation mechanism (vibration mount) so that extraneous vibration transmitted through the floor is not transmitted to precision equipment. Has been adopted. In particular, accuracy of 1 μm or less, such as IC exposure machines that form circuit patterns for electronic devices used in computers and communication equipment, as well as precision measuring instruments and control devices, and three-dimensional measuring instruments that read circuit patterns However, it is highly necessary to prevent the effects of self-excited vibrations and external vibrations.For this reason, the performance of the vibration isolation mechanism that attenuates vibrations transmitted from the floor to the devices is It is recognized as an important factor affecting performance.

  By the way, as a vibration isolation mechanism, a structure incorporating an air spring has been conventionally used. Therefore, by using a diaphragm type air spring having a natural frequency of 1 to 2 kHz, the function of the vibration isolation mechanism is realized by the system of the air spring and the mass of the equipment supported by the air spring. It has become. The advantage of using this air spring is that an auxiliary tank is attached and an orifice is placed between the air spring and the tank, so that attenuation due to the viscous resistance of air can be obtained, and the resonance peak at the natural frequency is obtained. It is possible to suppress the swing of the support load due to disturbances quickly, but such an air spring requires the installation of an auxiliary device such as an auxiliary tank. Therefore, in addition to the problem that the apparatus is increased in size, there are inherent problems that the control system becomes complicated and the cost becomes high.

  On the other hand, as a vibration isolation mechanism that can obtain a vibration isolation function in the vertical direction and the horizontal direction without using such an expensive air spring type device, a device using a combination of a coil spring and a damping material (removal) For example, in Patent Document 1, such a viscoelastic body is used by combining a coil spring as an elastic body and a columnar viscoelastic body (epoxy resin) as a damping material. Is placed in the inner space of the coil spring, and flanges are attached to both ends of the viscoelastic body and both ends of the coil spring so that the elastic center in the load direction acting on the composite of the coil spring and the viscoelastic body is on the viscoelastic body side. And the structure that is tightened together is clarified. By using this structure for vibration-proof support of machinery and equipment, the external force applied in the horizontal direction (lateral direction) and vertical direction (vertical direction) And That can be obtained deal of vibration damping effects have been revealed.

  However, since the diaphragms and viscoelastic bodies used in these conventional vibration isolation mechanisms are all made of a resin material having elasticity, when they are used in a cryogenic environment, their elastic characteristics and viscoelastic bodies are used. The performance that contributes to vibration isolation, such as elastic properties, is greatly reduced, and it becomes difficult to perform the original functions of these members, and problems such as deterioration in durability of the members are brought about. In particular, vibration isolation mechanisms used to attenuate vibrations transmitted to equipment installed in natural environments are expected to be exposed to temperatures in the range of −40 ° C. to + 80 ° C. Therefore, it is desired to provide a mechanism capable of exhibiting an effective vibration isolation function in a wide temperature range.

JP 63-306285 A

  Here, the present invention has been made in the background of such circumstances, and the problem to be solved thereof is that it is interposed between a device to be vibration-isolated or vibration-damped and a base on which it is installed. In the anti-vibration mount that suppresses or prevents the transmission of vibrations between them, the anti-vibration mount with excellent durability that is hardly affected by the anti-vibration characteristics due to changes in the ambient temperature. It is to provide.

  In the present invention, in order to solve the above-described problems, the present invention can be suitably implemented in various modes as listed below, but each mode described below is optional. It can be used in combination. It should be noted that the aspects and technical features of the present invention are not limited to those described below, but are recognized based on the description of the entire specification and the inventive concept grasped from the drawings. Should be understood.

(1) An anti-vibration mount that is interposed between a device to be vibration-isolated or vibration-damped and a base on which it is installed to suppress or prevent transmission of vibrations between them, (A) It is arranged between a first attachment member attached to one of the device and the base and a second attachment member attached to any one of them, and elastically weights the device A coil spring to be supported; and (b) a cylindrical body portion integrally provided so as to extend from the first mounting member toward the second mounting member in the inner space of the coil spring; A piston member that is slidably inserted into the body part and is slid by a load change of the device based on vibration input, and is formed by the first mounting member, the cylindrical body part, and the piston member Air control against the air chamber And (c) at least one between the piston member and the second mounting member. A point support mechanism for arranging two spheres, abutting them in a point contact structure via the spheres, and movably supporting them in a direction perpendicular to the opposing direction; (d) the piston member and the first member A contact maintaining means configured to hold the two mounting members in a form in which they are always in contact with each other, and the piston member is always supported by the second mounting member via the point support mechanism. And a vibration isolation mount.

(2) The above aspect (1), wherein the spherical body is configured by a spherical magnet, and the piston member and the second mounting member are adsorbed to the spherical magnet, whereby the contact maintaining means is configured. The anti-vibration mount described in 1.

(3) A sliding contact sleeve is integrally inserted and disposed on the inner peripheral surface of the cylindrical portion provided in the first mounting member, and the piston member slides in the sliding contact sleeve. The anti-vibration mount according to the above aspect (1) or (2) configured to be damped.

(4) Any one of the above aspects (1) to (3), wherein an orifice is provided for communicating the air chamber with the outside, and air is allowed to flow in and out through the orifice. Anti-vibration mount described in 1.

(5) Any one of the above aspects (1) to (4), wherein the contact maintaining means is configured by a spring member that biases the piston member toward the second mounting member. The anti-vibration mount described in 1.

(6) Any one of the above aspects (1) to (5), wherein the contact surface of the sphere on the piston member side is configured by a part of a spherical surface having a larger radius than the sphere. Anti-vibration mount described in 1.

(7) Of the above aspects (1) to (6), the contact surface of the sphere on the second mounting member side is configured by a part of a spherical surface having a larger radius than the sphere. The anti-vibration mount according to any one of the above.

(8) The point support mechanism includes a sphere group including a first sphere and a second sphere, and one of the first spheres to be brought into contact with the second attachment member side, The vibration isolation mount according to any one of the above aspects (1) to (7) configured to be supported by the plurality of second spheres.

  In such a vibration isolation mount according to the present invention, the vibration damping mechanism is disposed in the inner space of the coil spring that elastically supports the weight of the device to be vibration-isolated or vibration-damped. The constituent piston members are slid by the load change of the equipment based on the vibration input, causing a limited flow of air into and out of the air chamber formed in such a mechanism, thereby causing the viscosity of the air Attenuation due to resistance is generated, so that the vertical anti-vibration function can be advantageously exhibited.

  Moreover, the piston member in such a vibration damping mechanism is supported so as to be movable in a direction perpendicular to the opposing direction in a point support mechanism using a sphere between the piston member and the second mounting member that supports the piston member. Therefore, for horizontal input vibration, effective vibration damping is achieved by moderate rolling resistance based on a point contact structure between the piston member and the second mounting member via a sphere. The action can be exhibited.

  Therefore, in the vibration isolation mount according to the present invention, the vibration damping action replacing the conventional viscoelastic body is exhibited by the vibration damping mechanism and the point support mechanism, and each member in these mechanisms is viscoelastic. Since it does not require characteristics or elastic properties, it is possible to use a member made of a hard material such as metal, and the temperature changes greatly in the environment where the vibration isolation mount is used. However, even in a large temperature change from minus 40 ° C. to plus 80 ° C., for example, the functions realized by the vibration damping mechanism and the point support mechanism are hardly impaired, and the desired vibration damping action is advantageously exhibited. In addition, even with such a large temperature change, the members constituting each mechanism are hardly deteriorated. Consider necessary without it became a get advantageously aims to improve its durability.

  The vibration isolation mount according to the present invention having such characteristics is advantageously used for supporting a relatively lightweight device.

  Hereinafter, in order to clarify the present invention more specifically, some embodiments according to the present invention will be described in detail with reference to the drawings.

  First, in FIG. 1, an outline of one of the vibration isolation mounts according to the present invention is shown in cross-sectional form. In this case, the vibration isolation mount 10 is arranged between the first attachment member 12, the second attachment member 14, and the two attachment members, and elastically weights the device to be vibration-isolated or damped. And a coil spring 16 for supporting the structure. The first mounting member 12 is made of non-magnetic stainless steel, and a device to be vibration-isolated or vibration-damped and a base on which the device is installed, specifically, a floor surface, a ground surface, a foundation surface, etc. It is attached to either one of the surfaces, and the second attachment member 14 is made of similar stainless steel and is attached to any one of them. Here, the first mounting member 12 has a circular protrusion 13 having a mounting screw hole 12a that opens upwardly and extends downward by a predetermined length so that the first mounting member 12 can be mounted to a predetermined device. The second mounting member 14 is also provided with a mounting screw hole 14a that opens downward so that the second mounting member 14 can be mounted on a predetermined base. The coil spring 16 is fixedly attached to the first and second attachment members 12 and 14 at the upper end and the lower end, respectively, so that it can be handled as an integrated vibration isolation mount 10. Of course, there is no problem even if it is attached in a freely removable form.

  Further, in the vibration isolation mount 10, with respect to the lower surface of the first mounting member 12, in other words, the surface facing the second mounting member 14, so as to be located in the inner space of the coil spring 16, A cylindrical body 18 made of nonmagnetic stainless steel is integrally provided. A piston member 20 made of nonmagnetic stainless steel is fitted in the cylinder 18 so as to be slidable in the axial direction (vertical direction in the figure). Note that an upper recess 20b having an inner diameter slightly larger than the outer diameter of the circular convex portion 13 extending from the first mounting member 12 is formed in the upper portion of the piston member 20 so as to be described later. It is provided with a sufficient size to provide the chamber 24. Further, the inner peripheral surface of the cylindrical body 18 is made of a known lubricating material such as phosphor bronze and has excellent lubricity so that the piston member 20 can be smoothly moved (slided) in the vertical direction. A slidable contact sleeve 22 is integrally inserted and disposed. Thus, the air chamber 24 is formed in the cylindrical body 18 so as to be surrounded by the first mounting member 12, the cylindrical body 18 (sliding contact sleeve 22), and the piston member 20. Here, the air chamber 24 is composed of a space 24 a between the first mounting member 12 and the piston member 20 and a space 24 b provided by the upper recess 20 b of the piston member 20. Then, the air chamber 24 changes its internal pressure by the load change of the mounted equipment based on the vibration input, and further changes the volume by the flow of air into and out of the air chamber 24, and the piston is changed. The member 20 can be moved up and down.

  That is, when vibration is input between the device and the base on which the device is installed in a state where the predetermined device is mounted, the load of the device acting on the first mounting member 12 changes. Such a load change changes the internal pressure in the air chamber 24. Thus, the air in the air chamber 24 flows in and out in a limited amount through the slight gap between the piston member 20 and the sliding contact sleeve 22 and the orifice 26 separately provided in the first mounting member 12. Therefore, since the attenuation due to the viscous resistance of the air can be advantageously exerted, the movement (sliding) of the piston member 20 in the vertical direction based on the change in the internal pressure of the air chamber 24 is restricted. As a result, the input vibration can be effectively attenuated. Therefore, here, the vibration damping mechanism is configured to include the cylindrical body 18 as the cylindrical body portion, the piston member 20, and the air chamber 24 formed in the cylindrical body 18.

  Further, in the lower recess 20a provided in the lower part of the piston member 20, a knock pin-shaped contact rod 28 made of a ferromagnetic material such as iron projects downward with a predetermined length, and the piston It is erected coaxially with respect to the member 20, and the tip end surface of the lower end of the contact rod 28 is constituted by a spherical convex surface 28a. A spherical magnet 30 made of a permanent magnet is interposed between the contact rod 28 and a support plate 32 made of a ferromagnetic material fixed to the second mounting member 14. The support plate 32 is attracted or magnetized. Thereby, the contact in the point contact structure of the contact rod 28 and the support plate 32 through the spherical magnet 30 is realized, and the direction of the contact rod 28 and the support plate 32 perpendicular to the facing direction thereof. In other words, a point support mechanism is formed which is supported so as to be movable in the horizontal direction.

  And here, since the spherical magnet 30 is used as a sphere constituting the point support mechanism between the piston member 20 and the second mounting member 14, the magnetic force (attraction force) by the spherical magnet 30 is used. The contact between the piston member 20, specifically, the spherical convex surface 28a, which is the tip surface of the contact rod 28, and the upper surface of the second mounting member 14 (support plate 32) can always be secured. Thereby, the contact maintaining means capable of always supporting the piston member 20 on the second mounting member 14 via the point support mechanism is skillfully configured.

  Therefore, in the vibration isolating mount 10 having such a configuration, the piston member that constitutes the vibration damping mechanism with respect to vibration that is input mainly in the vertical direction (vertical direction) in the drawing, that is, in the axial direction of the cylindrical body 18. 20 is slid by the load change of the mounted equipment based on such input vibration, and the inflow and outflow of air to the air chamber 24 formed in the cylindrical body 18 are restricted, and the air By exhibiting the damping action due to the viscous resistance, the sliding of the piston member 20 is mitigated, and therefore, the attenuation of the input vibration mainly in the vertical direction can be effectively achieved. Further, in the figure, the piston member 20 supports the second mounting member 14 via the spherical magnet 30 with respect to the input vibration in the horizontal direction (horizontal direction), that is, in the direction perpendicular to the axial direction of the cylindrical body 18. The rolling of the spherical magnet 30 is caused from being supported on the plate 32, and the rolling resistance based on the rolling mainly causes such lateral input vibration. Damping can be effectively achieved, so that transmission of vibrations between the on-board equipment to be isolated or damped and the base on which it is installed can be effectively suppressed or prevented. It is.

  Moreover, such a vibration isolation or vibration suppression mechanism in the vibration isolation mount 10 can be used even in a wide temperature range where the ambient temperature (environment temperature) where the vibration isolation mount 10 is installed ranges from minus 40 ° C. to plus 80 ° C. In addition, it is almost unaffected, and its constituent members are also made of a hard rigid material such as metal, using a rubber material or a viscoelastic material as in a conventional vibration isolation mount Therefore, the material or characteristics do not change over the wide temperature range described above, so that the desired vibration isolation or vibration control characteristics can be exhibited advantageously, and the durability of these components As a result, the life of the vibration isolation mount 10 as a whole can be advantageously improved.

  Further, in the vibration isolation mount 10 shown in FIG. 1, the inner diameter of the upper recess 20b of the piston member 20 is slightly larger than the outer diameter of the circular convex portion 13 of the first mounting member 12, Since the outflow resistance of the air from the upper recess 20b (space 24b) is caused when the circular convex portion 13 is plunged into the upper recess 20b, it is abruptly caused by a large vibration input. When a significant load change occurs, an effective buffering action against the displacement of the piston member 20 based on the change can be exerted, whereby the buffering between the first mounting member 12 and the piston member 20 is advantageously avoided. To get.

  By the way, in the vibration isolation mount 10, the sliding contact sleeve 22 is made of a phosphor bronze material which is a non-magnetic material so that the magnetic force of the spherical magnet 30 is effectively applied to the piston member 20. Thus, the piston member 20 is considered to be effectively held in contact with the piston member 20, but in addition to the sliding contact sleeve 22, the piston member is used in order to further enjoy such an action and effect. 20, the cylindrical body 18, the first mounting member 12, and further the coil spring 16 can be formed of a nonmagnetic material. In this case, a known hard resin is used as the nonmagnetic material. Is also possible.

  In addition to the above, the vibration isolation mount according to the present invention can be configured as shown in FIG. That is, in the vibration isolation mount 40 shown in FIG. 2, the piston member 20 is point-supported in a point contact structure with respect to the support plate 32 of the second mounting member 14 by two large and small spherical magnets 42 and 44. In addition, the anti-vibration mount 10 shown in FIG. 1 is used except that the piston member 20 and the support plate 32 are always brought into contact with each other and held by the attractive force of the two spherical magnets 42 and 44. It is set as the same structure.

  Specifically, a large-diameter spherical magnet 42 is fitted into and held in a lower recess 20a provided in the lower portion of the piston member 20 that opens to the lower surface. In the form in which the small-diameter spherical magnet 44 is attracted to the magnet 42, the small-diameter spherical magnet 44 is attracted to the support plate 32 of the second mounting member 14, and thus the two spherical magnets are attracted. The piston member 20 is point-supported in the point contact structure with respect to the second mounting member 14 via 42 and 44, and is always supported in a form in which the piston member 20 is always brought into contact with each other. It is. Here, the sliding contact sleeve 22 is formed of an iron-based lubricating material. In addition, since the other configuration is the same as that of the vibration isolation mount 10 shown in FIG. 1, the same reference numerals are given and detailed description is omitted.

  Even in the vibration isolation mount 40 having such a configuration, the piston member 20 is point-supported in a point contact structure by the second mounting member 14 through two large and small spherical magnets, particularly a small-diameter spherical magnet 44, In addition, in a form in which the piston members 20 are always in contact with each other, the vibration damping action based on the sliding of the piston member 20 in the vertical direction and the rolling based on the rolling of the small-diameter spherical magnet 44 are performed. The vibration damping action due to the resistance can be effectively exhibited.

  Furthermore, the present invention can also be realized as a vibration isolation mount 50 having a configuration as shown in FIG. In this case, the spherical magnets 30, 42, and 44 shown in FIGS. 1 and 2 are used as a rollable sphere that supports the piston member 20 in contact with the second mounting member 14 in a point contact structure. In contrast, a normal steel ball 52 having no suction force is used, and the steel ball 52 is accommodated in a lower recess 20a provided in the lower part of the piston member 20, so that the second mounting member 14 It is disposed on the support plate 32. Therefore, the piston member 20 is point-supported in a point contact structure with respect to the support plate 32 by the intervention of the steel ball 52, and can be moved in the left-right direction (horizontal direction) in the drawing by the rolling of the steel ball 52. ing.

  Further, in the form housed in the upper recess 20b of the piston member 20, an urging coil spring 54 is interposed between the first attachment member 12 and the piston member 20, and the first attachment When a predetermined device is mounted and attached to the member 12, a downward biasing force is applied to the piston member 20 in the drawing, so that the support plate in the piston member 20 and the second attachment member 14 is applied. 32 are always brought into contact with each other via the steel ball 52, and the piston member 20 can be always supported by the second mounting member 14. In short, here, the urging coil spring 54 is used as means for maintaining contact between the piston member 20 and the second mounting member 14.

  Therefore, in the vibration isolating mount 50 having such a structure, when the vibration is input, the piston member 20 slides in the vertical direction and the steel ball 52 rolls in the horizontal direction. Therefore, the transmission of vibration between a predetermined device and a base on which the device is installed can be effectively suppressed or prevented.

  Note that the vibration isolation mount 50 shown in FIG. 3 can also be configured as a vibration isolation mount 60 having a structure as shown in FIG. In this case, instead of a single steel ball 52, a known ball bearing device 62 is disposed between the piston member 20 and the second mounting member 14 (that is, the support plate 32), and the piston member. 20 is point-supported so as to be movable in the left-right direction. Specifically, as is well known, the ball bearing device 62 has a structure in which one large sphere 64 is received by a large number of small spheres 66, and the large sphere 64 is supported by a support plate. It is attached to the piston member 20 so that it can abut against the roller 32 and roll. As a result, the movement of the piston member 20 in the left-right direction (horizontal direction) can be performed more smoothly, thereby effectively contributing to improvement of vibration attenuation in the contact direction. In addition, as the ball bearing device 62 used here, a well-known thing is selected suitably, For example, what is marketed as ISB ball bear (Iguchi Kiko Co., Ltd.) etc. can be utilized.

  The exemplary embodiments of the present invention have been described in detail above. However, the embodiments are merely examples, and the present invention is limited in any way by specific descriptions according to such embodiments. It should be understood that it is not interpreted.

  For example, in the above-described embodiment, the spherical magnets 30, 42, 44 and the steel balls 52 as spheres are received in a point contact manner on the spherical convex surface 28 a (42) or the spherical concave surface 20 c on the piston member 20 side. On the other hand, the support plate 32 is configured to receive a flat surface. Alternatively, the support plate 32 can also be configured to receive a spherical concave surface. This is shown in FIG.

  That is, in FIG. 5, the bottom surface of the lower recess 20 a of the piston member 20 is a spherical concave surface 20 c, and the spherical concave surface 32 a is also provided on the upper surface of the support plate 32. Then, by interposing the steel ball 52 so as to be sandwiched between the two spherical concave surfaces 20c and 32a, the piston member 20 and the support plate 32 can be brought into contact and supported in the point contact structure. It has become. The spherical concave surfaces 20c and 32a are both spherical surfaces having a radius larger than the radius of the steel ball 52, whereby the steel ball 52 is allowed to roll, and the spherical shape is also reduced. Consideration is made so that the centers of the concave surfaces 20 c and 32 a coincide with the center of the steel ball 52, and further, the center of the steel ball 52 is positioned on the axis of the piston member 20 and the cylindrical body 18.

  In the illustrated embodiment, the sliding contact sleeve 22 is inserted into the inner peripheral surface of the cylindrical body 18 so as to be integrated, so that the axial sliding of the cylindrical body 18 of the piston member 20 is performed. The movement can be performed smoothly. Of course, if the inner surface of the cylindrical body 18 is configured as a surface having a sufficiently excellent slidability, the piston is directly applied to the cylindrical body 18. A configuration in which the member 20 is slidably inserted in the axial direction can also be employed.

  Further, the air inflow / outflow (outflow / inflow) with respect to the air chamber 24 is limited by a gap between the piston member 20 and the sliding contact sleeve 22 (cylindrical body 18) and / or an orifice 26 provided separately. However, the size of the gap and the diameter of the orifice 26 are appropriately selected according to the degree of relaxation of the movement (sliding) of the piston member 20 that is suitable for exhibiting the intended vibration damping action. To get. Here, the orifice 26 can be provided in the cylindrical body 18 or the piston member 20 in addition to being provided in the first mounting member 12 as illustrated. In addition, the piston member 20 and the second mounting member 14 are always in contact with each other regardless of the magnitude of the magnetic force (attraction force) of the spherical magnets 30, 42, and 44 and the magnitude of the biasing force of the biasing coil spring 54. They are appropriately selected so that they can abut against each other and can effectively exhibit the vibration damping action due to rolling of the spheres interposed therebetween.

  Furthermore, in the present invention, as illustrated, the first mounting member 12 can be mounted on a predetermined device, and the second mounting member 14 can be mounted on the base, or the reverse mounting mode can be adopted. It is.

  The vibration isolation mount according to the present invention can be advantageously used as a support mount for a relatively lightweight device, generally having a burden load of about 10 kg or less, preferably about 5 kg or less. Even in the case of the coil spring 16 that elastically supports the weight of the mounted device, a coil spring made of a thin wire suitable for such a burden load is appropriately selected.

  In addition, although not enumerated one by one, the present invention can be implemented in a mode to which various changes, modifications, improvements, and the like are added based on the knowledge of those skilled in the art. It goes without saying that any one of them falls within the scope of the present invention without departing from the spirit of the present invention.

It is sectional explanatory drawing which shows an example of the vibration isolator mount according to this invention. It is sectional explanatory drawing which shows another example of the vibration isolator mount according to this invention. It is sectional explanatory drawing which shows another example of the vibration isolator mount according to this invention. It is sectional explanatory drawing which shows another different example of the vibration isolator mount according to this invention. FIG. 10 is a partially enlarged cross-sectional explanatory view showing a modified example of the arrangement of spheres interposed between the piston member and the second mounting member.

Explanation of symbols

10, 40, 50, 60 Anti-vibration mount 12 First mounting member 14 Second mounting member 12a, 14a Mounting screw hole 16 Coil spring 18 Cylindrical body 20 Piston member 20a Lower recess 20b Upper recess 20c, 32a Spherical concave surface 22 Sliding contact sleeve 24 Air chamber 26 Orifice 28 Contact rod 28a Spherical convex surface 30, 42, 44 Spherical magnet 32 Support plate 52 Steel ball 54 Coil spring for bias 62 Ball bearing device 64 Large ball 66 Small ball

Claims (8)

An anti-vibration mount that is interposed between a device to be vibration-isolated or vibration-damped and a base on which it is installed to suppress or prevent transmission of vibration between them,
A coil that is arranged between a first mounting member that is mounted on one of the device and the base and a second mounting member that is mounted on the other, and elastically supports the weight of the device Springs,
A cylindrical body portion integrally provided so as to extend from the first mounting member toward the second mounting member in the inner space of the coil spring, and slidably fitted in the cylindrical body portion. And a piston member that is slid by a load change of the device based on vibration input, and the air is limited to the air chamber formed by the first mounting member, the cylindrical body portion, and the piston member. A vibration attenuating mechanism that relaxes the sliding of the piston member by flowing in and out to attenuate the input vibration;
At least one sphere is arranged between the piston member and the second mounting member, and they are brought into contact with each other in a point contact structure via the sphere, and are movable in a direction perpendicular to the facing direction thereof. A point support mechanism to be supported;
The piston member and the second mounting member are always held in a form of abutting each other so that the piston member is always supported by the second mounting member via the point support mechanism. Configured contact maintaining means,
Anti-vibration mount characterized by having.   2. The vibration isolation device according to claim 1, wherein the spherical body is configured by a spherical magnet, and the contact maintaining means is configured by adsorbing the piston member and the second mounting member to the spherical magnet. mount.   A sliding contact sleeve is integrally inserted and disposed on the inner peripheral surface of the cylindrical body portion provided in the first mounting member so that the piston member can slide within the sliding contact sleeve. The vibration isolation mount according to claim 1 or 2, wherein the vibration isolation mount is configured as follows.   The removal according to any one of claims 1 to 3, wherein an orifice is provided for communicating the air chamber with the outside, and air is allowed to flow in and out through the orifice. Shaking mount.   5. The vibration isolation device according to claim 1, wherein the contact maintaining unit includes a spring member that biases the piston member toward the second mounting member. mount.   The exclusion surface according to any one of claims 1 to 5, wherein a contact surface of the sphere on the piston member side is constituted by a part of a spherical surface having a larger radius than the sphere. Shaking mount.   The contact surface of the sphere on the second mounting member side is configured by a part of a spherical surface having a larger radius than the sphere. Anti-vibration mount as described. The point support mechanism includes a sphere group including a first sphere and a second sphere, and one or more of the first spheres brought into contact with the second attachment member side are The vibration isolation mount according to any one of claims 1 to 7, wherein the vibration isolation mount is configured to be supported by a second sphere.

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