JP2009077479A - Wireless switching controller - Google Patents

Wireless switching controller Download PDF

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JP2009077479A
JP2009077479A JP2007242084A JP2007242084A JP2009077479A JP 2009077479 A JP2009077479 A JP 2009077479A JP 2007242084 A JP2007242084 A JP 2007242084A JP 2007242084 A JP2007242084 A JP 2007242084A JP 2009077479 A JP2009077479 A JP 2009077479A
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switch
wireless
electrode
detection voltage
electrostatic attraction
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Toshimasa Mori
敏正 森
Hiromi Yatsuda
博美 谷津田
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Japan Radio Co Ltd
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Japan Radio Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y04INFORMATION OR COMMUNICATION TECHNOLOGIES HAVING AN IMPACT ON OTHER TECHNOLOGY AREAS
    • Y04SSYSTEMS INTEGRATING TECHNOLOGIES RELATED TO POWER NETWORK OPERATION, COMMUNICATION OR INFORMATION TECHNOLOGIES FOR IMPROVING THE ELECTRICAL POWER GENERATION, TRANSMISSION, DISTRIBUTION, MANAGEMENT OR USAGE, i.e. SMART GRIDS
    • Y04S40/00Systems for electrical power generation, transmission, distribution or end-user application management characterised by the use of communication or information technologies, or communication or information technology specific aspects supporting them
    • Y04S40/12Systems for electrical power generation, transmission, distribution or end-user application management characterised by the use of communication or information technologies, or communication or information technology specific aspects supporting them characterised by data transport means between the monitoring, controlling or managing units and monitored, controlled or operated electrical equipment
    • Y04S40/126Systems for electrical power generation, transmission, distribution or end-user application management characterised by the use of communication or information technologies, or communication or information technology specific aspects supporting them characterised by data transport means between the monitoring, controlling or managing units and monitored, controlled or operated electrical equipment using wireless data transmission

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Abstract

<P>PROBLEM TO BE SOLVED: To carry out quick switching control with a wireless switching controller that controls a switch by a radio signal. <P>SOLUTION: The wireless switching controller includes: an antenna for receiving radio signals; a SAW correlator that detects a signal modulated with a specific coding pattern, from radio signals received by the antenna and outputs detection voltage; and a switching control unit that controls a switch, based on the detection voltage of the SAW correlator. The switching control unit includes the movable electrode and the fixed electrode of an electrostatic attraction-driven MEMS switch and applies the detection voltage of the SAW correlator to between the movable electrode and the fixed electrode and drives the electrostatic attraction-driven MEMS switch by electrostatic attraction, produced between the movable electrode and the fixed electrode by the detection voltage. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、特定の変調パターンを有する無線信号の検出によってスイッチを制御するスイッチ制御装置に関する。   The present invention relates to a switch control device that controls a switch by detecting a radio signal having a specific modulation pattern.

温度計、電力量計等の測定器を備える複数の無線測定装置と、無線測定装置から測定結果を取得する無線収集装置とを備える測定システムについて研究が行われている。無線測定装置は測定対象物が存在する位置に配置される。無線収集装置は、システム操作者が測定結果を収集するのに適した位置に配置される。   Research has been conducted on a measurement system including a plurality of wireless measurement devices including measuring instruments such as thermometers and watt-hour meters, and a wireless collection device that acquires measurement results from the wireless measurement devices. The wireless measurement device is arranged at a position where the measurement object exists. The wireless collection device is arranged at a position suitable for the system operator to collect the measurement results.

無線収集装置は、複数の無線測定装置のうち測定結果を取得するものを指定し、測定結果を返信すべき旨の指令信号を送信する。指令を受けた無線測定装置は、測定結果を無線収集装置に送信する。このような処理によって、無線収集装置は、指定した無線測定装置から測定結果を取得する。   The wireless collection device designates one of the plurality of wireless measurement devices that obtains the measurement result, and transmits a command signal indicating that the measurement result should be returned. The wireless measurement device that has received the command transmits the measurement result to the wireless collection device. Through such processing, the wireless collection device acquires a measurement result from the designated wireless measurement device.

また、無線測定装置は、無線収集装置による指令を受けていないときは測定結果を送信する必要がない。そこで、各無線測定装置は、指令を受けたときに電源スイッチをオンにして測定を行い、測定結果の送信を終了した後に、再び電源スイッチをオフにする。このような処理によって、無線測定装置は、無線収集装置からの指令を受けていないときに電力を消費しないようにする。   Further, the wireless measurement device does not need to transmit a measurement result when it has not received a command from the wireless collection device. Therefore, each wireless measurement device performs measurement by turning on the power switch when receiving a command, and turns off the power switch again after completing transmission of the measurement result. By such processing, the wireless measurement device does not consume power when it does not receive a command from the wireless collection device.

無線収集装置が無線測定装置を指定するため、各無線測定装置には符号パターンが予め割り当てられている。無線収集装置は、指定した無線測定装置の割り当て符号パターンで変調された指令信号を送信する。各無線測定装置は、受信信号の変調パターンと自らの割り当て符号パターンとが一致したときに、電源スイッチをオンにし、温度等の測定および測定結果の送信を行う。   Since the wireless collection device designates a wireless measurement device, a code pattern is assigned to each wireless measurement device in advance. The wireless collection device transmits a command signal modulated with the assigned code pattern of the designated wireless measurement device. Each wireless measurement device turns on the power switch when the modulation pattern of the received signal matches its own assigned code pattern, and measures temperature and the like and transmits the measurement result.

このような処理を実行するため、各無線測定装置は、割り当て符号パターンで変調された入力信号に対し検出電圧を出力するSAWコリレータと、検出電圧に基づいて電源スイッチを制御するスイッチ制御回路とを備える。   In order to execute such processing, each wireless measurement device includes a SAW correlator that outputs a detection voltage with respect to an input signal modulated with an assigned code pattern, and a switch control circuit that controls a power switch based on the detection voltage. Prepare.

無線測定装置の受信信号はSAWコリレータに入力される。SAWコリレータは、割り当て符号パターンで変調された信号が受信信号に含まれているときは、検出電圧を出力する。スイッチ制御回路は、検出電圧が出力されたときに電源スイッチをオンとする。   The reception signal of the wireless measurement device is input to the SAW correlator. The SAW correlator outputs a detection voltage when a signal modulated with the assigned code pattern is included in the received signal. The switch control circuit turns on the power switch when the detection voltage is output.

このような構成によって、無線測定装置は、自らの割り当て符号パターンで変調された指令信号を受信したときに、電源スイッチをオンにして測定を行い、測定結果を送信する。これによって、無線収集装置は、指定した無線測定装置から測定結果を取得することができる。特許3712291号公報には、ここで説明したような測定システムについて記載されている。   With such a configuration, when receiving a command signal modulated with its own assigned code pattern, the wireless measurement device performs measurement by turning on the power switch and transmits the measurement result. Thereby, the wireless collection device can acquire the measurement result from the designated wireless measurement device. Japanese Patent No. 3712291 describes a measurement system as described here.

特許第3712291号公報Japanese Patent No. 3712291

無線測定装置の電源スイッチには、半導体スイッチ、リレースイッチ等が用いられる。ところが、SAWコリレータの検出電圧による電力供給容量は、これらのスイッチを制御することができる程の大きさを有さない。そこで、特許文献1に記載されている無線測定装置では、SAWコリレータの検出電圧によってコンデンサを充電し、コンデンサの充電電圧をスイッチ制御電圧として用いる。この構成によれば、割り当て符号パターンで変調された指令信号が受信されている間は、コンデンサの充電電圧が増加する。そのため、SAWコリレータの電力供給容量が小さい場合であっても、指令信号の継続的な受信によってコンデンサの充電電圧を大きくすることができ、充電電圧を用いて電源スイッチを制御することができる。   A semiconductor switch, a relay switch, or the like is used as a power switch of the wireless measuring device. However, the power supply capacity based on the detection voltage of the SAW correlator is not large enough to control these switches. Therefore, in the wireless measurement device described in Patent Document 1, the capacitor is charged by the detection voltage of the SAW correlator, and the charging voltage of the capacitor is used as the switch control voltage. According to this configuration, the charging voltage of the capacitor increases while the command signal modulated with the assigned code pattern is received. Therefore, even when the power supply capacity of the SAW correlator is small, the charging voltage of the capacitor can be increased by continuously receiving the command signal, and the power switch can be controlled using the charging voltage.

しかし、コンデンサの充電電圧を用いる構成では、充電電圧が電源スイッチオンの閾値に達するまで長時間を必要とし、無線測定装置が指令を受けてから電源スイッチをオンとするまでの時間が長くなるという問題がある。   However, in the configuration using the charging voltage of the capacitor, it takes a long time until the charging voltage reaches the threshold value for turning on the power switch, and the time until the power switch is turned on after receiving a command from the wireless measuring device is increased. There's a problem.

本発明はこのような課題に対してなされたものである。すなわち、無線信号によってスイッチを制御する無線スイッチ装置において、迅速なスイッチ制御を可能とすることを目的とする。   The present invention has been made for such a problem. That is, an object of the present invention is to enable rapid switch control in a wireless switch device that controls a switch by a wireless signal.

本発明は、無線信号を受信するアンテナと、アンテナで受信された無線信号から特定の符号パターンで変調された信号を検出し、検出電圧を出力するSAWコリレータと、SAWコリレータの検出電圧に基づいてスイッチを制御するスイッチ制御部と、を備える無線スイッチ制御装置において、スイッチ制御部は、 静電引力駆動型MEMSスイッチの可動電極および固定電極を備え、SAWコリレータの検出電圧を可動電極と固定電極との間に印加し、検出電圧によって可動電極と固定電極との間に発生する静電引力によって静電引力駆動型MEMSスイッチを駆動することを特徴とする。   The present invention is based on an antenna that receives a radio signal, a SAW correlator that detects a signal modulated with a specific code pattern from the radio signal received by the antenna, and outputs a detection voltage, and a detection voltage of the SAW correlator. And a switch control unit that controls the switch. The switch control unit includes a movable electrode and a fixed electrode of an electrostatic attraction drive type MEMS switch, and detects a detection voltage of the SAW correlator with the movable electrode and the fixed electrode. The electrostatic attraction drive type MEMS switch is driven by an electrostatic attraction generated between the movable electrode and the fixed electrode by a detection voltage.

また、本発明に係る無線スイッチ制御装置においては、可動電極と固定電極との間にバイアス電圧を印加するバイアス回路を備えることが好適である。   In the wireless switch control device according to the present invention, it is preferable to include a bias circuit that applies a bias voltage between the movable electrode and the fixed electrode.

また、本発明に係る無線スイッチ制御装置においては、静電引力駆動型MEMSスイッチがオンとなる位置またはオフとなる位置のいずれかに可動電極が留まるよう駆動電極を導くトグル機構を備えることが好適である。   Further, the wireless switch control device according to the present invention preferably includes a toggle mechanism that guides the drive electrode so that the movable electrode stays at either the position where the electrostatic attraction drive type MEMS switch is turned on or the position where it is turned off. It is.

本発明によれば、無線信号によってスイッチを制御する無線スイッチ装置において、迅速なスイッチ制御を可能とすることができる。   ADVANTAGE OF THE INVENTION According to this invention, rapid switch control can be performed in the radio | wireless switch apparatus which controls a switch with a radio signal.

図1に本発明の実施形態に係る測定システムの構成を示す。測定システムは、無線収集装置10によって、温度、湿度等の測定結果を無線測定装置12から取得するシステムである。測定システムによれば、無線収集装置10が無線測定装置12から測定結果を取得することで、複数箇所の測定結果を一箇所で収集することができる。   FIG. 1 shows a configuration of a measurement system according to an embodiment of the present invention. The measurement system is a system in which the wireless collection device 10 acquires measurement results such as temperature and humidity from the wireless measurement device 12. According to the measurement system, the wireless collection device 10 acquires the measurement results from the wireless measurement device 12, whereby the measurement results at a plurality of locations can be collected at one location.

測定システムは、例えば、工場の製品倉庫に保管されている複数の製品について、製品ごとに保管状態を監視するために用いることができる。この場合、無線測定装置12は、製品保管箱の内部等、温度、湿度等を測定する位置に配置される。また、無線収集装置10は、システム操作者が測定結果を取得するのに適した位置に配置される。その他、測定システムは、各家庭に設けられた電力量計、ガス使用量計等の測定結果を一箇所で取得する、テレメータリングシステム等に用いることもできる。   The measurement system can be used, for example, for monitoring a storage state of each product for a plurality of products stored in a product warehouse of a factory. In this case, the wireless measurement device 12 is arranged at a position for measuring temperature, humidity, etc., such as the inside of the product storage box. In addition, the wireless collection device 10 is disposed at a position suitable for the system operator to acquire the measurement result. In addition, the measurement system can also be used for a telemetering system or the like that obtains measurement results of a watt hour meter, a gas usage meter, and the like provided in each household at one place.

無線収集装置10が、複数の無線測定装置12のうち測定結果を取得するものを指定するため、各無線測定装置12には符号パターンが割り当てられる。無線収集装置10は、操作者の操作に応じて無線測定装置12を指定する。そして、指定した無線測定装置12の割り当て符号パターンで変調された指令信号を送信する。無線測定装置12は、受信信号の変調パターンと自らの割り当て符号パターンとが一致したときに、温度等の測定および測定結果の送信を行う。   Since the wireless collection device 10 designates a plurality of wireless measurement devices 12 that acquire measurement results, a code pattern is assigned to each wireless measurement device 12. The wireless collection device 10 specifies the wireless measurement device 12 according to the operation of the operator. Then, a command signal modulated with the assigned code pattern of the designated wireless measurement device 12 is transmitted. When the modulation pattern of the received signal matches its assigned code pattern, the wireless measurement device 12 measures the temperature and transmits the measurement result.

図2に本発明の実施形態に係る無線測定装置12の構成を示す。無線測定装置12は、割り当て符号パターンの検出によってオン駆動される静電引力駆動型MEMS(Micro Electro Mechanical Systems)スイッチ18を電源スイッチとする。すなわち、無線測定装置12は、受信信号から割り当て符号パターンが検出されたときに電源スイッチをオンとし、温度測定結果を送信する。これによって、無線収集装置10からの指令を受けていないときに電力を消費しないようにする。   FIG. 2 shows a configuration of the wireless measurement device 12 according to the embodiment of the present invention. The wireless measurement device 12 uses an electrostatic attraction drive type MEMS (Micro Electro Mechanical Systems) switch 18 that is turned on by detection of an assigned code pattern as a power switch. That is, the wireless measurement device 12 turns on the power switch when the assigned code pattern is detected from the received signal, and transmits the temperature measurement result. Thus, power is not consumed when a command from the wireless collection device 10 is not received.

ここでは、無線測定装置12は温度計24を備え、温度測定結果を送信するものとするが、湿度計、電力量計、ガス使用量計等を備え、例示した計器による測定結果を送信するものとしてもよい。   Here, the wireless measurement device 12 includes a thermometer 24 and transmits a temperature measurement result, but includes a hygrometer, a watt hour meter, a gas consumption meter, and the like, and transmits a measurement result by the illustrated instrument. It is good.

無線測定装置12が無線収集装置10の指令を受け、測定結果を送信する処理について説明する。無線収集装置10から送信されアンテナ12で受信された信号は、SAWコリレータ16に入力される。SAWコリレータ16には、搭載無線測定装置の割り当て符号パターンで変調された信号に対して検出電圧Vdが出力されるものを用いる。これによって、割り当て符号パターンで変調された無線信号が無線収集装置10から送信され、アンテナ12で受信されたときは、SAWコリレータ16から検出電圧Vdが出力される。   A process in which the wireless measurement device 12 receives a command from the wireless collection device 10 and transmits a measurement result will be described. A signal transmitted from the wireless collection device 10 and received by the antenna 12 is input to the SAW correlator 16. A SAW correlator 16 that outputs a detection voltage Vd with respect to a signal modulated with an assigned code pattern of the on-board wireless measurement device is used. As a result, when the radio signal modulated by the assigned code pattern is transmitted from the radio collection device 10 and received by the antenna 12, the detection voltage Vd is output from the SAW correlator 16.

静電引力駆動型MEMSスイッチ18は、後述するように、SAWコリレータ16から検出電圧Vdが出力されることによってオンとなり、制御部22からオフ駆動電圧Vfが出力されることによってオフとなる。   As will be described later, the electrostatic attraction drive type MEMS switch 18 is turned on when the detection voltage Vd is output from the SAW correlator 16, and is turned off when the off drive voltage Vf is output from the control unit 22.

したがって、SAWコリレータ16から検出電圧Vdが出力されることで、静電引力駆動型MEMSスイッチ18がオンとなる。これによって、電力供給部20は、制御部22、温度計24および送信部26に電力を供給する。温度計24は温度を測定し、測定結果を送信部26に出力する。送信部26は、測定結果をアンテナ12から送信すると共に、送信を終了した旨の送信終了情報を制御部22に出力する。   Therefore, when the detection voltage Vd is output from the SAW correlator 16, the electrostatic attraction drive type MEMS switch 18 is turned on. As a result, the power supply unit 20 supplies power to the control unit 22, the thermometer 24, and the transmission unit 26. The thermometer 24 measures the temperature and outputs the measurement result to the transmission unit 26. The transmission unit 26 transmits the measurement result from the antenna 12 and outputs transmission end information indicating that the transmission has been completed to the control unit 22.

制御部22は、送信部26から送信終了情報が出力されると、静電引力駆動型MEMSスイッチ18にオフ駆動電圧Vfを出力する。これによって、静電引力駆動型MEMSスイッチ18がオフとなり、電力供給部20は、制御部22、温度計24および送信部26への電力供給を遮断する。   When the transmission end information is output from the transmission unit 26, the control unit 22 outputs the off drive voltage Vf to the electrostatic attraction drive type MEMS switch 18. As a result, the electrostatic attractive force drive MEMS switch 18 is turned off, and the power supply unit 20 cuts off the power supply to the control unit 22, the thermometer 24, and the transmission unit 26.

このような処理によれば、無線測定装置12は、自らの割り当て符号パターンで変調された指令信号を受信したときに、温度測定を行い、測定結果を送信する。これによって、無線収集装置10は、指定した無線測定装置12から測定結果を取得することができる。   According to such processing, when receiving a command signal modulated with its assigned code pattern, the wireless measurement device 12 performs temperature measurement and transmits a measurement result. Thereby, the wireless collection device 10 can acquire the measurement result from the designated wireless measurement device 12.

さらに、無線測定装置12は、指令を受けたときに静電引力駆動型MEMSスイッチ18をオンにし、測定結果の送信を終了した後に静電引力駆動型MEMSスイッチ18をオフにする。これによって、無線収集装置10からの指令を受けていないときに電力を消費しないようにすることができ、無駄な電力消費をなくすことができる。   Furthermore, the wireless measuring device 12 turns on the electrostatic attraction-driven MEMS switch 18 when receiving the command, and turns off the electrostatic attraction-driven MEMS switch 18 after completing the transmission of the measurement result. As a result, power can be prevented from being consumed when a command from the wireless collection device 10 is not received, and wasteful power consumption can be eliminated.

次に、無線測定装置12に用いられる静電引力駆動型MEMSスイッチ18について図3を参照して説明する。静電引力駆動型MEMSスイッチ18は、電力供給部20の電源スイッチとして用いる内部スイッチ28を備える。内部スイッチ28のスイッチ切片30およびスイッチ電極32は、それぞれ、電力供給部20の電源スイッチ接続端子34aおよび34bに接続される。   Next, the electrostatic attractive force drive type MEMS switch 18 used in the wireless measuring device 12 will be described with reference to FIG. The electrostatic attraction drive type MEMS switch 18 includes an internal switch 28 used as a power switch of the power supply unit 20. The switch piece 30 and the switch electrode 32 of the internal switch 28 are connected to power switch connection terminals 34 a and 34 b of the power supply unit 20, respectively.

スイッチ切片30は、上下方向を長手方向とし上下方向に可動であるスイッチ駆動棒36に取り付けられる。スイッチ駆動棒36が下方にあるときは、スイッチ切片30はスイッチ電極32に接触し、内部スイッチ28がオンになる。一方、スイッチ駆動棒36が上方にあるときは、スイッチ切片30はスイッチ電極32から離れ、内部スイッチ28がオフになる。   The switch piece 30 is attached to a switch drive rod 36 that is movable in the vertical direction with the vertical direction as the longitudinal direction. When the switch drive rod 36 is at the lower side, the switch piece 30 contacts the switch electrode 32 and the internal switch 28 is turned on. On the other hand, when the switch drive rod 36 is on the upper side, the switch piece 30 is separated from the switch electrode 32 and the internal switch 28 is turned off.

スイッチ駆動棒36を静電引力によって下方向に駆動するため、静電引力駆動型MEMSスイッチ18は、櫛歯型のオン固定電極40およびオン可動電極46を備える。   In order to drive the switch drive rod 36 downward by electrostatic attraction, the electrostatic attraction drive MEMS switch 18 includes a comb-shaped on-fixed electrode 40 and an on-movable electrode 46.

オン固定電極40およびオン可動電極46は、ベース板42と、互いに平行に配置され、ベース板42に垂直に接する複数の櫛歯板44によって形成される。   The on-fixed electrode 40 and the on-movable electrode 46 are formed by a base plate 42 and a plurality of comb-tooth plates 44 that are arranged in parallel to each other and are in contact with the base plate 42 perpendicularly.

オン固定電極40は、歯先を上に向けてMEMS筐体38に固定される。オン可動電極46は、歯先を下に向け、各櫛歯板44がオン固定電極40の櫛歯板44の間に入り込むようスイッチ駆動棒36に取り付けられる。   The on-fixed electrode 40 is fixed to the MEMS casing 38 with the tooth tip facing upward. The on-movable electrode 46 is attached to the switch drive rod 36 such that each comb-tooth plate 44 enters between the comb-tooth plates 44 of the on-fixed electrode 40 with the tooth tips facing downward.

オン可動電極46およびオン固定電極40は、それぞれ、SAWコリレータ16の検出電圧出力端子48aおよび48bに接続される。これによって、SAWコリレータ16から検出電圧Vdが出力されたときは、オン可動電極46とオン固定電極40との間に静電引力が発生し、スイッチ駆動棒36に下方向の力が与えられる。   The ON movable electrode 46 and the ON fixed electrode 40 are connected to detection voltage output terminals 48a and 48b of the SAW correlator 16, respectively. As a result, when the detection voltage Vd is output from the SAW correlator 16, an electrostatic attractive force is generated between the ON movable electrode 46 and the ON fixed electrode 40, and a downward force is applied to the switch drive rod 36.

スイッチ駆動棒36を静電引力によって上方向に駆動するため、静電引力駆動型MEMSスイッチ18は、櫛歯型のオフ固定電極50およびオフ可動電極52を備える。オフ固定電極50およびオフ可動電極52は、それぞれ、オン固定電極40およびオン可動電極46と同様の構成を有する。   In order to drive the switch drive rod 36 upward by electrostatic attraction, the electrostatic attraction drive MEMS switch 18 includes a comb-shaped off-fixed electrode 50 and an off-movable electrode 52. The off fixed electrode 50 and the off movable electrode 52 have the same configuration as the on fixed electrode 40 and the on movable electrode 46, respectively.

オフ固定電極50は、歯先を下に向けてMEMS筐体38に固定される。オフ可動電極52は、歯先を上に向け、各櫛歯板44がオフ固定電極50の櫛歯板44の間に入り込むよう、スイッチ駆動棒36の上端に取り付けられる。   The off-fixed electrode 50 is fixed to the MEMS casing 38 with the tooth tip facing downward. The off-movable electrode 52 is attached to the upper end of the switch drive rod 36 so that the tooth tips face upward and each comb-tooth plate 44 enters between the comb-tooth plates 44 of the off-fixation electrode 50.

オフ可動電極52およびオフ固定電極50は、それぞれ、制御部22のオフ電圧出力端子54aおよび54bに接続される。これによって、制御部22からオフ駆動電圧Vfが出力されたときは、オフ可動電極52とオフ固定電極50との間に静電引力が発生し、スイッチ駆動棒36に上方向の力が与えられる。   The off-movable electrode 52 and the off-fixed electrode 50 are connected to off-voltage output terminals 54a and 54b of the control unit 22, respectively. As a result, when the off drive voltage Vf is output from the control unit 22, an electrostatic attractive force is generated between the off movable electrode 52 and the off fixed electrode 50, and an upward force is applied to the switch drive rod 36. .

スイッチ駆動棒36をMEMS筐体38内で支持し、内部スイッチ28の状態をオンまたはオフのいずれかの状態に安定させるため、静電引力駆動型MEMSスイッチ18は帯状トグルバネ56を備える。帯状トグルバネ56の両端はMEMS筐体38に固定される。帯状トグルバネ56は、スイッチ駆動棒36を貫通させる貫通穴58を有し、貫通穴58の位置でスイッチ駆動棒36を支持する。   In order to support the switch drive rod 36 in the MEMS housing 38 and stabilize the state of the internal switch 28 in either the on state or the off state, the electrostatic attraction drive type MEMS switch 18 includes a belt-like toggle spring 56. Both ends of the belt-like toggle spring 56 are fixed to the MEMS casing 38. The belt-like toggle spring 56 has a through hole 58 through which the switch drive rod 36 passes, and supports the switch drive rod 36 at the position of the through hole 58.

帯状トグルバネ56は、下に凸または上に凸のいずれかの安定状態をとりうる。上に凸の状態となっているときに、スイッチ駆動棒36によって下方向に力を与えると、帯状トグルバネ56は自らの弾性力によって下に凸の状態となる。これによってスイッチ駆動棒36は下方に留まり、内部スイッチ28がオンとなる。一方、下に凸の状態となっているときに、スイッチ駆動棒36によって上方向に力を与えると、帯状トグルバネ56は自らの弾性力によって上に凸の状態となる。これによってスイッチ駆動棒36は上方に留まり、内部スイッチ28がオフとなる。帯状トグルバネ56には、凸方向を変化させるのに要する力が、内部スイッチ駆動のための静電引力より小さいものを用いる。   The belt-like toggle spring 56 can be in a stable state that is either convex downward or convex upward. When a downward force is applied by the switch drive rod 36 in the upward convex state, the belt-like toggle spring 56 becomes a downward convex state by its own elastic force. As a result, the switch drive rod 36 remains below and the internal switch 28 is turned on. On the other hand, when a force is applied in the upward direction by the switch drive rod 36 in the state of being convex downward, the belt-like toggle spring 56 is convex upward by its own elastic force. As a result, the switch drive rod 36 stays upward and the internal switch 28 is turned off. As the belt-like toggle spring 56, a force that is required to change the convex direction is smaller than the electrostatic attractive force for driving the internal switch.

このような構成によれば、内部スイッチオフ状態でSAWコリレータ16から検出電圧Vdが出力されたときは、静電引力によってオン可動電極46がオン固定電極40に引き寄せられ、スイッチ駆動棒36に下方向の力が与えられる。これによって、帯状トグルバネ56は下に凸の状態となり、スイッチ駆動棒36は下方に留まり、内部スイッチ28がオンとなる。   According to such a configuration, when the detection voltage Vd is output from the SAW correlator 16 in the internal switch-off state, the on-movable electrode 46 is attracted to the on-fixed electrode 40 by electrostatic attraction, and the switch drive rod 36 is moved downward. Directional force is given. As a result, the belt-like toggle spring 56 protrudes downward, the switch drive rod 36 remains below, and the internal switch 28 is turned on.

また、内部スイッチオン状態で制御部22からオフ駆動電圧Vfが出力されたときは、静電引力によってオフ可動電極52がオフ固定電極50に引き寄せられ、スイッチ駆動棒36に上方向の力が与えられる。これによって、帯状トグルバネ56が上に凸の状態となり、スイッチ駆動棒36は上方に留まり、内部スイッチ28がオフとなる。   Further, when the off drive voltage Vf is output from the control unit 22 in the internal switch on state, the off movable electrode 52 is attracted to the off fixed electrode 50 by electrostatic attraction, and an upward force is applied to the switch drive rod 36. It is done. As a result, the belt-like toggle spring 56 protrudes upward, the switch drive rod 36 stays upward, and the internal switch 28 is turned off.

本発明の実施形態に係る無線測定装置12では、SAWコリレータ16の検出電圧Vdによって静電引力駆動型MEMSスイッチ18を駆動する。静電引力駆動型MEMSスイッチ18では、オン可動電極46、オフ可動電極52、スイッチ駆動棒36およびスイッチ切片30を軽量化することで、内部スイッチ28の駆動に必要な静電引力を小さくすることができる。   In the wireless measurement device 12 according to the embodiment of the present invention, the electrostatic attraction drive type MEMS switch 18 is driven by the detection voltage Vd of the SAW correlator 16. In the electrostatic attraction drive type MEMS switch 18, by reducing the weight of the on-movable electrode 46, the off-movable electrode 52, the switch drive rod 36 and the switch piece 30, the electrostatic attraction necessary for driving the internal switch 28 can be reduced. Can do.

さらに、帯状トグルバネ56の弾性力を、内部スイッチ28の状態を安定化させる必要最小限の大きさとすることで、内部スイッチ28の駆動に必要な静電引力を小さくすることができる。   Furthermore, by setting the elastic force of the belt-like toggle spring 56 to the minimum necessary level that stabilizes the state of the internal switch 28, the electrostatic attractive force required to drive the internal switch 28 can be reduced.

これによって、SAWコリレータ16から静電引力駆動型MEMSスイッチ18に供給される必要電力量を小さくすることができ、電力供給による駆動遅延時間を短くし、無線測定装置12が指令を受けてから内部スイッチ28をオンとするまでの時間を短くすることができる。   As a result, the required amount of power supplied from the SAW correlator 16 to the electrostatic attraction drive type MEMS switch 18 can be reduced, the drive delay time due to the power supply can be shortened, and the wireless measurement device 12 can receive the command after receiving the command. The time until the switch 28 is turned on can be shortened.

また、帯状トグルバネ56の凸方向が変化するときの弾性力は内部スイッチ28の駆動力となる。これによって、内部スイッチ28を迅速にオンにすることができ、無線測定装置12が指令を受けてから静電引力駆動型MEMSスイッチ18をオンとするまでの時間を短くすることができる。   Further, the elastic force when the convex direction of the belt-like toggle spring 56 changes becomes the driving force of the internal switch 28. As a result, the internal switch 28 can be quickly turned on, and the time from when the wireless measuring device 12 receives a command until the electrostatic attraction drive type MEMS switch 18 is turned on can be shortened.

ここで説明した測定システムでは、無線収集装置10と無線測定装置12との間の距離が大きい場合、SAWコリレータ16の検出電圧Vdの大きさが不十分となり、静電引力駆動型MEMSスイッチ18を駆動するのが困難となることがある。このような場合、図4に示すようにバイアス電圧源60を設け、オン可動電極46とオン固定電極40との間にバイアス電圧を印加する構成とすることが好ましい。   In the measurement system described here, when the distance between the wireless collection device 10 and the wireless measurement device 12 is large, the magnitude of the detection voltage Vd of the SAW correlator 16 becomes insufficient, and the electrostatic attraction drive type MEMS switch 18 is not connected. It can be difficult to drive. In such a case, it is preferable to provide a bias voltage source 60 as shown in FIG. 4 and apply a bias voltage between the on-movable electrode 46 and the on-fixed electrode 40.

バイアス電圧源60の負極端子はオン固定電極40に接続される。また、バイアス電圧源60の正極端子は、SAWコリレータ16の検出電圧出力端子48bに接続される。これによって、オン可動電極46とオン固定電極40との間には、検出電圧Vdによる静電引力に加えて、バイアス電圧による静電引力が発生する。したがって、SAWコリレータ16の検出電圧Vdが小さい場合であっても、オン可動電極46とオン固定電極40との間に十分な大きさの静電引力を発生させることができる。   The negative terminal of the bias voltage source 60 is connected to the on-fixed electrode 40. The positive terminal of the bias voltage source 60 is connected to the detection voltage output terminal 48 b of the SAW correlator 16. As a result, an electrostatic attractive force due to the bias voltage is generated between the ON movable electrode 46 and the ON fixed electrode 40 in addition to the electrostatic attractive force due to the detection voltage Vd. Therefore, even when the detection voltage Vd of the SAW correlator 16 is small, a sufficiently large electrostatic attractive force can be generated between the ON movable electrode 46 and the ON fixed electrode 40.

なお、上述の構成では、静電引力駆動型MEMSスイッチ18を駆動するための電極として櫛歯型のものを用いた。電極の形状としては、その他、平板型のものを用いてもよい。櫛歯電極を用いた場合、そのベース板と面積が等しい平板電極を用いた場合に比べて、大きい静電引力を発生させることができる。さらに、同一電圧での電極の可動範囲を大きくすることができる。しかし、必要な静電引力および可動範囲が確保できるのであれば、構造が簡単な平板電極を櫛歯電極に代えて用いてもよい。   In the configuration described above, a comb-shaped electrode is used as an electrode for driving the electrostatic attraction drive type MEMS switch 18. As the shape of the electrode, a flat plate type may be used. When a comb-tooth electrode is used, a large electrostatic attraction can be generated compared to a case where a flat plate electrode having the same area as the base plate is used. Furthermore, the movable range of the electrode at the same voltage can be increased. However, as long as necessary electrostatic attractive force and movable range can be ensured, a plate electrode having a simple structure may be used instead of the comb electrode.

本発明の実施形態に係る測定システムの構成を示す図である。It is a figure which shows the structure of the measurement system which concerns on embodiment of this invention. 本発明の実施形態に係る無線測定装置の構成を示す図である。It is a figure which shows the structure of the radio | wireless measuring apparatus which concerns on embodiment of this invention. 本発明に実施形態に係る静電引力駆動型MEMSスイッチの構成を示す図である。It is a figure which shows the structure of the electrostatic attraction drive type MEMS switch which concerns on embodiment. バイアス電圧源を設けた係る静電引力駆動型MEMSスイッチの構成を示す図である。It is a figure which shows the structure of the electrostatic attraction drive type MEMS switch which provided the bias voltage source.

符号の説明Explanation of symbols

10 無線収集装置、12 無線測定装置、14 アンテナ、16 SAWコリレータ、18 静電引力駆動型MEMSスイッチ、20 電力供給部、22 制御部、24 温度計、26 送信部、28 内部スイッチ、30 スイッチ切片、32 スイッチ電極、34a,34b 電源スイッチ接続端子、36 スイッチ駆動棒、38 MEMS筐体、40 オン固定電極、42 ベース板、44 櫛歯板、46 オン可動電極、48a,48b 検出電圧出力端子、50 オフ固定電極、52 オフ可動電極、54a,54b オフ電圧出力端子、56 帯状トグルバネ、58 貫通穴、60 バイアス電圧源。   DESCRIPTION OF SYMBOLS 10 Wireless collection device, 12 Wireless measuring device, 14 Antenna, 16 SAW correlator, 18 Electrostatic attraction drive type MEMS switch, 20 Electric power supply part, 22 Control part, 24 Thermometer, 26 Transmission part, 28 Internal switch, 30 Switch intercept , 32 switch electrode, 34a, 34b power switch connection terminal, 36 switch drive rod, 38 MEMS housing, 40 on fixed electrode, 42 base plate, 44 comb tooth plate, 46 on movable electrode, 48a, 48b detection voltage output terminal, 50 OFF fixed electrode, 52 OFF movable electrode, 54a, 54b OFF voltage output terminal, 56 band toggle spring, 58 through hole, 60 bias voltage source.

Claims (3)

無線信号を受信するアンテナと、
アンテナで受信された無線信号から特定の符号パターンで変調された信号を検出し、検出電圧を出力するSAWコリレータと、
SAWコリレータの検出電圧に基づいてスイッチを制御するスイッチ制御部と、
を備える無線スイッチ制御装置において、
スイッチ制御部は、
静電引力駆動型MEMSスイッチの可動電極および固定電極を備え、
SAWコリレータの検出電圧を可動電極と固定電極との間に印加し、検出電圧によって可動電極と固定電極との間に発生する静電引力によって静電引力駆動型MEMSスイッチを駆動することを特徴とする無線スイッチ制御装置。
An antenna for receiving radio signals;
A SAW correlator that detects a signal modulated with a specific code pattern from a radio signal received by an antenna and outputs a detection voltage;
A switch control unit for controlling the switch based on the detection voltage of the SAW correlator;
In a wireless switch control device comprising:
The switch controller
A movable electrode and a fixed electrode of an electrostatic attraction drive type MEMS switch are provided,
The detection voltage of the SAW correlator is applied between the movable electrode and the fixed electrode, and the electrostatic attraction drive type MEMS switch is driven by the electrostatic attraction generated between the movable electrode and the fixed electrode by the detection voltage. Wireless switch control device.
請求項1に記載の無線スイッチ制御装置において、
可動電極と固定電極との間にバイアス電圧を印加するバイアス回路を備えることを特徴とする無線スイッチ制御装置。
The wireless switch control device according to claim 1,
A wireless switch control device comprising a bias circuit for applying a bias voltage between a movable electrode and a fixed electrode.
請求項1または請求項2に記載の無線スイッチ制御装置において、
静電引力駆動型MEMSスイッチがオンとなる位置またはオフとなる位置のいずれかに可動電極が留まるよう駆動電極を導くトグル機構を備えることを特徴とする無線スイッチ制御装置。
The wireless switch control device according to claim 1 or 2,
A wireless switch control device comprising a toggle mechanism that guides a drive electrode so that the movable electrode stays at either an on position or an off position of the electrostatic attractive force drive MEMS switch.
JP2007242084A 2007-09-19 2007-09-19 Wireless switching controller Pending JP2009077479A (en)

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CN102201298A (en) * 2011-05-27 2011-09-28 东南大学 Radio-frequency micromechanical switch with longitudinally- push-pull comb units
CN102324344A (en) * 2011-05-27 2012-01-18 东南大学 Radio-frequency micromechanical switch with bidirectional push-pull comb-tooth unit
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