JP2009075069A5 - - Google Patents
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- JP2009075069A5 JP2009075069A5 JP2008159315A JP2008159315A JP2009075069A5 JP 2009075069 A5 JP2009075069 A5 JP 2009075069A5 JP 2008159315 A JP2008159315 A JP 2008159315A JP 2008159315 A JP2008159315 A JP 2008159315A JP 2009075069 A5 JP2009075069 A5 JP 2009075069A5
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- terahertz wave
- reflected
- transmitted
- sample
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Claims (12)
テラヘルツ波を発生させるための発生部と、
前記発生部が発生させたテラヘルツ波がサンプルを透過あるいは反射したテラヘルツ波を検出するための検出部と、
前記検出部が検出するタイミングを変化させるための遅延部と、
サンプルに関する情報を記憶する記憶部と、
前記記憶部が記憶しているサンプルに関する情報に基づいて前記遅延部を調整する遅延時間調整部と、
前記遅延部を用いて得る、前記透過あるいは反射したテラヘルツ波の時間波形を取得するための波形取得部と、を有し、
前記遅延時間調整部は、前記記憶部が記憶しているサンプルに関する情報に基づいて設定される前記時間波形に関する領域で、前記検出部が前記テラヘルツ波を検出するように、前記遅延部を調整し、
前記波形取得部は、前記領域における前記透過あるいは反射したテラヘルツ波の時間波形を取得することを特徴とする装置。 An apparatus for acquiring information about a terahertz wave transmitted or reflected from a sample,
A generator for generating terahertz waves;
A detection unit for detecting a terahertz wave in which the terahertz wave generated by the generation unit is transmitted or reflected by the sample;
A delay unit for changing the timing detected by the detection unit;
A storage unit for storing information about the sample;
A delay time adjusting unit that adjusts the delay unit based on information about the sample stored in the storage unit;
A waveform acquisition unit for acquiring a time waveform of the transmitted or reflected terahertz wave obtained using the delay unit;
The delay time adjustment unit adjusts the delay unit so that the detection unit detects the terahertz wave in a region related to the time waveform set based on information about the sample stored in the storage unit. ,
The said waveform acquisition part acquires the time waveform of the said transmitted or reflected terahertz wave in the said area | region.
前記遅延時間調整部は、前記記憶部が記憶している前記第1及び第2のパルスに関する情報に基づいて、前記遅延部を非連続的に調整し、The delay time adjustment unit adjusts the delay unit discontinuously based on information on the first and second pulses stored in the storage unit,
前記波形取得部は、前記第1のパルスと前記第2のパルスとの間に時間間隔を与えて前記時間波形を取得することを特徴とする請求項1に記載の装置。The apparatus according to claim 1, wherein the waveform acquisition unit acquires the time waveform by giving a time interval between the first pulse and the second pulse.
前記発生部が、前記パルスレーザを照射することによりテラヘルツ波を発生するための光伝導素子で、
前記検出部が、前記パルスレーザを照射することによりテラヘルツ波を検出するための光伝導素子であることを特徴とする請求項1から8のいずれか1項に記載の装置。 Having a fiber laser for generating a pulsed laser;
The generator is a photoconductive element for generating a terahertz wave by irradiating the pulse laser,
The apparatus according to claim 1, wherein the detection unit is a photoconductive element for detecting a terahertz wave by irradiating the pulse laser.
テラヘルツ波を発生し、
前記テラヘルツ波がサンプルを透過あるいは反射したテラヘルツ波を検出し、
前記検出するタイミングを変化させることにより、前記透過あるいは反射したテラヘルツ波の時間波形を取得し、
予め取得したサンプルを透過あるいは反射したテラヘルツ波の時間波形に基づいて設定される前記時間波形に関する領域で、前記透過あるいは反射したテラヘルツ波を検出するように、前記タイミングを変化し、
前記領域における前記透過あるいは反射したテラヘルツ波の時間波形を取得することを特徴とする方法。 A method for obtaining information about a terahertz wave transmitted or reflected from a sample,
Generate terahertz waves,
Detecting the terahertz wave transmitted or reflected by the terahertz wave,
By changing the timing to detect, to acquire the time waveform of the transmitted or reflected terahertz wave,
In the region related to the time waveform set based on the time waveform of the terahertz wave that has been transmitted or reflected from the sample acquired in advance, the timing is changed so as to detect the transmitted or reflected terahertz wave,
A method of obtaining a time waveform of the transmitted or reflected terahertz wave in the region.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008159315A JP5371293B2 (en) | 2007-08-31 | 2008-06-18 | Apparatus and method for obtaining information about terahertz waves |
EP08162232A EP2031374B1 (en) | 2007-08-31 | 2008-08-12 | Apparatus and method for obtaining information related to terahertz waves |
US12/193,121 US7551269B2 (en) | 2007-08-31 | 2008-08-18 | Apparatus and method for obtaining information related to terahertz waves |
CN2008102124643A CN101377406B (en) | 2007-08-31 | 2008-08-29 | Apparatus and method for obtaining information related to terahertz waves |
US12/426,979 US7852466B2 (en) | 2007-08-31 | 2009-04-21 | Apparatus and method for obtaining information related to terahertz waves |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007226338 | 2007-08-31 | ||
JP2007226338 | 2007-08-31 | ||
JP2008159315A JP5371293B2 (en) | 2007-08-31 | 2008-06-18 | Apparatus and method for obtaining information about terahertz waves |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009075069A JP2009075069A (en) | 2009-04-09 |
JP2009075069A5 true JP2009075069A5 (en) | 2011-07-21 |
JP5371293B2 JP5371293B2 (en) | 2013-12-18 |
Family
ID=40421057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008159315A Expired - Fee Related JP5371293B2 (en) | 2007-08-31 | 2008-06-18 | Apparatus and method for obtaining information about terahertz waves |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5371293B2 (en) |
CN (1) | CN101377406B (en) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9588041B2 (en) | 2009-10-13 | 2017-03-07 | Picometrix, Llc | System and method for detection and measurement of interfacial properties in single and multilayer objects |
JP5552321B2 (en) * | 2010-01-08 | 2014-07-16 | キヤノン株式会社 | Electromagnetic wave measuring apparatus and method |
JP5477275B2 (en) * | 2010-02-26 | 2014-04-23 | アイシン精機株式会社 | Coating film inspection apparatus and inspection method |
JP5534315B2 (en) * | 2010-03-01 | 2014-06-25 | 独立行政法人理化学研究所 | Physical property measuring apparatus, physical property measuring method and program |
CN102012216A (en) * | 2010-09-26 | 2011-04-13 | 首都师范大学 | Terahertz multi-wavelength phase imaging method |
JP5735824B2 (en) * | 2011-03-04 | 2015-06-17 | キヤノン株式会社 | Information acquisition apparatus and information acquisition method |
JP5710355B2 (en) * | 2011-04-18 | 2015-04-30 | 株式会社東芝 | Inspection apparatus and inspection method using terahertz waves |
JP2013228241A (en) | 2012-04-25 | 2013-11-07 | Advantest Corp | Measuring apparatus, method, program, and recording medium |
JP2014081285A (en) * | 2012-10-17 | 2014-05-08 | Aisin Seiki Co Ltd | Method of measuring film thickness of multilayer ceramic |
US9664570B2 (en) | 2012-11-13 | 2017-05-30 | R.J. Reynolds Tobacco Company | System for analyzing a smoking article filter associated with a smoking article, and associated method |
CN103105368A (en) * | 2013-01-25 | 2013-05-15 | 大连理工大学 | Method for analyzing thickness and structure of first mirror impurity deposition layer of fusion device |
JP2014209094A (en) * | 2013-03-29 | 2014-11-06 | キヤノン株式会社 | Information acquisition device and information acquisition method for acquiring information on sample using terahertz wave |
DE102013223945A1 (en) * | 2013-11-22 | 2015-05-28 | Inoex Gmbh | Measuring device and method for measuring test objects |
JP6193103B2 (en) * | 2013-12-04 | 2017-09-06 | 古河機械金属株式会社 | Semiconductor electrical property measuring device, semiconductor electrical property measuring method, semiconductor electrical property measuring device control device, and computer program. |
CN103919530A (en) * | 2014-04-21 | 2014-07-16 | 首都师范大学 | System and method for enhancing intensity of biological tissue terahertz wave imaging signal |
US9417181B2 (en) * | 2014-05-08 | 2016-08-16 | Advantest Corporation | Dynamic measurement of density using terahertz radiation with real-time thickness measurement for process control |
CN104330154B (en) * | 2014-10-16 | 2016-08-24 | 中国电子科技集团公司第五十研究所 | The terahertz detector of narrow linewidth |
KR101593399B1 (en) * | 2014-10-24 | 2016-02-12 | 서울시립대학교 산학협력단 | Apparatus for analyzing component using terahertz electromagnetic waves |
CN106248615B (en) * | 2015-06-05 | 2019-04-23 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of THz wave analyzer |
KR101717012B1 (en) * | 2016-02-02 | 2017-03-15 | 광운대학교 산학협력단 | Apparatus and method for terahertz tomographic imaging |
CN106767462A (en) * | 2017-02-28 | 2017-05-31 | 华讯方舟科技有限公司 | Pipe thickness on-line computing model, system and method |
CN107765251B (en) * | 2017-10-19 | 2020-01-17 | 维沃移动通信有限公司 | Distance detection method and terminal equipment |
JP6930711B2 (en) * | 2017-11-20 | 2021-09-01 | フロイント産業株式会社 | Tablet measuring device |
JP7288296B2 (en) | 2017-12-13 | 2023-06-07 | キヤノン株式会社 | Terahertz wave camera and detection module |
JP2020003297A (en) * | 2018-06-27 | 2020-01-09 | ニプロ株式会社 | Inspection device of compressed preparation and inspection method of compressed preparation |
CN109883337A (en) * | 2019-01-25 | 2019-06-14 | 北京航天计量测试技术研究所 | Thermal barrier coating thickness measurement system and measurement method based on terahertz light spectral technology |
CN112345071B (en) * | 2020-11-05 | 2022-06-07 | 南京工程学院 | Low-temperature rotation test system suitable for terahertz radiation power |
CN112345083B (en) * | 2020-11-05 | 2021-08-31 | 南京工程学院 | High-temperature superconducting terahertz radiation source intelligent testing device based on different bias conditions |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06229732A (en) * | 1993-01-29 | 1994-08-19 | Fanuc Ltd | Spot light beam scanning three-dimensional visual sensor |
CA2404434A1 (en) * | 2000-04-06 | 2001-10-18 | Rensselaer Polytechnic Institute | Terahertz transceivers and methods for emission and detection of terahertz pulses using such transceivers |
US6665075B2 (en) * | 2000-11-14 | 2003-12-16 | Wm. Marshurice University | Interferometric imaging system and method |
US20050087690A1 (en) * | 2001-12-28 | 2005-04-28 | Mamoru Usami | Spectral measurnig device |
JP2004003902A (en) * | 2002-06-03 | 2004-01-08 | Tochigi Nikon Corp | Electric characteristic measuring method of plane substrate using terahertz light |
US7119339B2 (en) * | 2002-11-13 | 2006-10-10 | Rensselaer Polytechnic Institute | Transmission mode terahertz computed tomography |
CN1829909A (en) * | 2003-06-19 | 2006-09-06 | 日本独立行政法人情报通信研究机构 | Optical waveform measurement device and measurement method thereof, complex refractive index measurement device and measurement method thereof, and computer program recording medium containing the pro |
-
2008
- 2008-06-18 JP JP2008159315A patent/JP5371293B2/en not_active Expired - Fee Related
- 2008-08-29 CN CN2008102124643A patent/CN101377406B/en not_active Expired - Fee Related
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