JP2009068880A - Diagnostic system, diagnostic method and inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a diagnostic system capable of easily diagnosing the inspection precision and inspection operation of an inspection device in a necessarily sufficient manner even by a user unskillful in the inspection device. <P>SOLUTION: The diagnostic system 10 has optical systems 2, 3 and 5 for photographing a product 7 to be inspected to form an inspection image, an image measuring part 14 for measuring predetermined characteristics from the inspection image to acquire an inspection measured value, an inspection result judging part 17 for comparing the inspection measured value with a judge threshold value to acquire an inspection judgement result and a discharge device 6 for discharging the product 7 to be inspected corresponding to the inspection judge result to diagnose the inspection device 1 and also has an inspection precision diagnosing part 10a for operating the image measuring part 14 and the inspection result judging part 17 without using the optical systems 2, 3 and 5 and the discharge device 6 to diagnose the image measuring part 14 and the inspection result judging part 17 at the time of diagnosis and an inspection operation diagnosing part 10b for operating the discharge device 6 without using the image measuring part 14 and the inspection result judging part 17 at the time of diagnosis to diagnose the discharge device 6. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a diagnostic apparatus and a diagnostic method for diagnosing an inspection apparatus that inspects the inspected product based on an inspection image obtained by photographing the inspected product, and further relates to an inspection apparatus capable of performing the diagnosis.

  In the production line of products such as food and beverages, there is an inspection device that inspects the inspected product by performing image processing based on the inspection image taken of the inspected product for the purpose of inspecting the appearance of the product at high speed and determining pass / fail It is popular. The inspection apparatus is provided to the user after installation and adjustment by a manufacturer of the inspection apparatus, and the inspection accuracy and inspection operation of the inspection apparatus are collectively verified. The user confirms that the inspection accuracy of the inspection apparatus is maintained and the inspection operation is normal by diagnosing the inspection apparatus.

As a conventional technique, Patent Document 1 and the like propose a compensation device for an inspection accuracy of an appearance inspection system that variably calibrates the illuminance of an illumination head that illuminates a product to be inspected when photographing the product to be inspected. Yes. Further, Patent Document 2 proposes a method of measuring a decrease in inspection accuracy based on a decrease in illumination head illumination intensity, and issuing an alarm when the illumination intensity decrease exceeds a limit to prompt maintenance of the illumination head.
JP-A-8-43048 JP-A-7-140092

  However, in the prior art, attention is paid to the illuminance deterioration of the lighting head, but since the lighting head is a local element of the inspection device, the necessary and sufficient diagnosis has been made on the inspection accuracy and inspection operation of the inspection device. I can't say that. Users need to make sufficient diagnoses so that the inspection device does not overlook the appearance of the inspected product, but it is unavoidable to reduce the productivity of the inspected product by taking more time than necessary. I must. However, the user is not necessarily familiar with the inspection apparatus, and it is difficult to make a necessary and sufficient diagnosis.

  Therefore, an object of the present invention is to provide a diagnostic device and a diagnostic method capable of making necessary and sufficient diagnosis about the inspection accuracy or inspection operation of the inspection device even by a user who is not familiar with the inspection device, and further, the diagnosis It is providing the inspection apparatus which can implement.

The present invention that has solved the above problems includes an optical system that generates an inspection image obtained by photographing a product to be inspected,
An image measuring unit that measures predetermined characteristics from the inspection image and obtains a measurement value for inspection; and
An inspection result determination unit that compares the measurement value for inspection with a determination threshold value to obtain a determination result for inspection;
In a diagnostic apparatus for diagnosing an inspection apparatus having a discharge apparatus for discharging the inspected product according to the inspection determination result,
An inspection accuracy diagnosis unit for diagnosing the image measurement unit and the inspection result determination unit by operating the image measurement unit and the inspection result determination unit without using the optical system and the discharge device at the time of the diagnosis; ,
At the time of the diagnosis, it has at least one of an inspection operation diagnosis unit that operates the discharge device and diagnoses the discharge device without using the image measurement unit and the inspection result determination unit. . The technical significance of the invention of the diagnostic device having the inspection accuracy diagnostic unit and the invention of the diagnostic device having the test operation diagnostic unit of the present invention in comparison with the prior art is both the optical system and the image. It is common to provide a diagnostic device capable of easily and sufficiently making a necessary and sufficient diagnosis even for an unskilled user with respect to an inspection device having a measurement unit, the inspection result determination unit, and the discharge device. . The invention of the diagnostic device having the inspection accuracy diagnostic unit and the invention of the diagnostic device having the inspection operation diagnostic unit of the present invention have corresponding special technical features. Therefore, the invention of the diagnostic apparatus having the inspection accuracy diagnostic unit and the invention of the diagnostic apparatus having the inspection operation diagnostic unit of the present invention satisfy the requirement of unity. Further, the invention of the diagnostic method and the invention of the inspection apparatus described later satisfy the unity requirement for the same reason.

Further, the present invention provides an optical system that generates an inspection image obtained by photographing a product to be inspected,
An image measuring unit that measures predetermined characteristics from the inspection image and obtains a measurement value for inspection; and
An inspection result determination unit that compares the measurement value for inspection with a determination threshold value to obtain a determination result for inspection;
In a diagnostic method for diagnosing an inspection apparatus having a discharge apparatus for discharging the inspected product according to the determination result for inspection,
An inspection accuracy diagnosis step of diagnosing the image measurement unit and the inspection result determination unit by operating the image measurement unit and the inspection result determination unit without using the optical system and the discharge device at the time of the diagnosis; ,
At the time of the diagnosis, it has at least one of an inspection operation diagnosis step of operating the discharge device and diagnosing the discharge device without using the image measurement unit and the inspection result determination unit. .

Further, the present invention provides an optical system that generates an inspection image obtained by photographing a product to be inspected,
An image measuring unit that measures predetermined characteristics from the inspection image and obtains a measurement value for inspection; and
An inspection result determination unit that compares the measurement value for inspection with a determination threshold value to obtain a determination result for inspection;
In an inspection apparatus having a discharge device for discharging the inspected product according to the determination result for inspection,
During the diagnosis for diagnosing the inspection device, the image measurement unit and the inspection result determination unit are operated without using the optical system and the discharge device, and the image measurement unit and the inspection result determination unit are diagnosed. An inspection accuracy diagnosis unit to be performed;
At the time of the diagnosis, it has at least one of an inspection operation diagnosis unit that operates the discharge device and diagnoses the discharge device without using the image measurement unit and the inspection result determination unit. .

  According to the present invention, it is possible to provide a diagnostic apparatus and a diagnostic method capable of making necessary and sufficient diagnosis about the inspection accuracy and inspection operation of the inspection apparatus even by a user who is not familiar with the inspection apparatus. Can be provided.

  Next, embodiments of the present invention will be described in detail with reference to the drawings as appropriate. In each figure, common portions are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
In FIG. 1, the block diagram of the test | inspection apparatus 1 which concerns on the 1st Embodiment of this invention is shown. The inspection device 1 is provided in a process downstream of the production line of the product to be inspected 7 such as food and beverage, and the product to be inspected 7 is placed on the product transport device 8 such as a belt conveyor and moves at a high speed. Then, the inspected product 7 is inspected. As the contents of the inspection, an appearance inspection of the product to be inspected 7, a printed shape inspection such as a shelf life and a production lot, and the like are performed. In the inspection apparatus 1, since the inspected product 7 is flowing, the inspected product 7 conveyed on the product conveying apparatus 8 is detected by the inspection activation sensor 4 and a detection signal is transmitted to the inspection activation control unit 11. . Upon receiving the detection signal, the inspection activation control unit 11 transmits the activation signal to the camera 2 and the illumination power source 5. Upon receiving the activation signal, the camera 2 releases the shutter and shoots the inspected product 7 to generate an inspection image. Further, when the illumination power supply 5 receives the activation signal, flash light is emitted to the illumination head 3 at the timing of the photographing, so that an inspection image without blur is acquired even if the product to be inspected 7 is moved by the product conveying device 8. be able to. The inspection image is converted from an analog image to a digital image by the A / D converter 12 and stored in the image memory 13. The camera 2, illumination head 3, illumination power supply 5, A / D converter 12 and image memory 13 constitute an optical system. This optical system becomes a target range (optical system diagnostic range) of optical system diagnosis described later.

  The variable / threshold setting unit 15 assists the operator of the inspection apparatus 1 to set variables and thresholds. As the variable, a variable for image processing of the inspection image, specifically, a threshold variable for binarization processing for defining the edge of the inspected product 7 shown in the inspection image can be considered. As the threshold value, a determination threshold value to be described later can be considered. The variable / threshold setting unit 15 allows the operator to easily set variables and thresholds via the GUI. The set variable and threshold value are stored in the variable / threshold memory 16.

The image measurement unit 14 uses a variable stored in the variable / threshold memory 16 to measure a predetermined characteristic from the inspection image and obtain a measurement value for inspection. For example, edges are extracted using variables, and the distance between the edges, that is, the width of the product 7 to be inspected is acquired as the measurement value for inspection.
In the inspection result determination unit 17, the inspection measurement value is compared with a variable (determination threshold) stored in the variable / threshold memory 16 to obtain an inspection determination result. This determination result for inspection is a pass / fail determination by inspection of the inspected product 7. The variable / threshold setting unit 15, the variable / threshold memory 16, the image measurement unit 14, and the test result determination unit 17 become a test accuracy diagnosis target range (test accuracy diagnosis range) described later.

  In the discharge device 6, the product 7 to be inspected which has been determined to be rejected according to the inspection determination result is discharged from the product transport device 8. The discharging device 6 may be a sorting device that classifies the product to be inspected 7 with a pass determination and the product 7 to be inspected with a failure. And the product conveyance apparatus 8, the inspection starting sensor 4, the inspection starting control part 11, and the discharge | emission apparatus 6 become the object range (inspection operation diagnosis range) of the inspection operation diagnosis mentioned later.

  As shown in FIG. 1, the inspection device 1 has a diagnostic device 10. The diagnostic apparatus 10 includes an inspection accuracy diagnosis unit 10a, an inspection operation diagnosis unit 10b, and an optical system diagnosis unit 10c.

  The inspection accuracy diagnosis unit 10a does not use (function) the optical systems 2, 3, 5, 12, 13 during diagnosis, and uses (functions) the inspection operation diagnosis range including the discharge device 6. Instead, the image measurement unit 14 and the inspection result determination unit 17 can be operated to diagnose the inspection accuracy diagnosis range including the image measurement unit 14 and the inspection result determination unit 17. The details of the diagnosis will be described later. According to this diagnosis, the image measuring unit can be used without considering the influence of the optical system diagnosis range including the illumination head 3 and the inspection operation diagnosis range including the discharge device 6. 14 and the inspection result determination unit 17 can be diagnosed only in the inspection accuracy diagnosis range. Since the influence of the optical system diagnosis range including the illumination head 3 and the like and the inspection operation diagnosis range including the discharge device 6 is not considered, the interaction can be omitted, the contents of the diagnosis can be simplified, and a necessary and sufficient diagnosis can be easily configured. Short time diagnosis is possible. In addition, when there is an abnormality in the diagnosis result, it is easy to identify the cause of the abnormality.

  The inspection operation diagnosis unit 10b operates the inspection operation diagnosis range including the discharge device 6 without using (functioning) the inspection accuracy diagnosis range including the image measurement unit 14 and the inspection result determination unit 17 at the time of diagnosis. The inspection operation diagnosis range including the discharge device 6 is diagnosed. The details of the diagnosis will be described later. According to this diagnosis, the inspection operation diagnosis range including the discharge device 6 without considering the influence of the inspection accuracy diagnosis range including the image measurement unit 14 and the inspection result determination unit 17. Only a diagnosis can be made. Since the influence of the inspection accuracy diagnosis range including the image measurement unit 14 and the inspection result determination unit 17 is not considered, the interaction can be omitted, the contents of the diagnosis can be simplified, a necessary and sufficient diagnosis can be easily configured, and a short time diagnosis can be performed. Is possible. In addition, when there is an abnormality in the diagnosis result, it is easy to identify the cause of the abnormality.

  The optical system diagnosis unit 10c does not use (function) the inspection accuracy diagnosis range including the image measurement unit 14 and the inspection result determination unit 17 during diagnosis, and uses the inspection operation diagnosis range including the discharge device 6 (function). The optical systems 2, 3, 5, 12, and 13 are operated to diagnose the optical systems 2, 3, 5, 12, and 13. The details of the diagnosis will be described later. According to this diagnosis, the influence of the inspection accuracy diagnosis range including the image measurement unit 14 and the inspection result determination unit 17 and the inspection operation diagnosis range including the discharge device 6 is considered. Therefore, only the optical systems 2, 3, 5, 12, and 13 can be diagnosed. Since the influence of the inspection accuracy diagnosis range including the image measurement unit 14 and the inspection result determination unit 17 and the inspection operation diagnosis range including the discharge device 6 is not taken into consideration, the interaction can be omitted, the contents of the diagnosis can be simplified, and necessary and sufficient It is easy to construct a simple diagnosis and a short-time diagnosis is possible. In addition, when there is an abnormality in the diagnosis result, it is easy to identify the cause of the abnormality.

  The inspection accuracy diagnosis unit 10a diagnoses the inspection accuracy diagnosis range, the inspection operation diagnosis unit 10b diagnoses the inspection operation diagnosis range, and the optical system diagnosis unit 10c uses the optical systems 2, 3, 5, 12, 13 (optical system). The entire inspection apparatus 1 can be diagnosed by diagnosing (diagnosis range).

  As shown in FIG. 1, the diagnostic device 10 may be incorporated into the inspection device 1 and become inseparable, but is not limited thereto, and may be separable from the inspection device 1. In this case, the diagnostic device 10 can be realized by starting software of a diagnostic method on a PC (personal computer). Then, by connecting the PC and the inspection apparatus 1, the inspection apparatus 1 can be diagnosed. If the diagnostic device 10 can be separated from the inspection device 1, a plurality of inspection devices 1 can be diagnosed by one diagnostic device 10, and the inspection accuracy between the inspection devices 1 can be unified.

  Further, in the diagnosis of the inspection apparatus 1, it is not always necessary to perform all of the inspection accuracy diagnosis, the inspection operation diagnosis, and the optical system diagnosis. For example, the implementation frequency may be different. The inspection accuracy diagnosis must be performed every day, but the inspection operation diagnosis may be performed once a month, and the optical system diagnosis may be performed once a week. In such a case, it is not necessary for one diagnostic apparatus 10 to include all of the inspection accuracy diagnosis unit 10a, the inspection operation diagnosis unit 10b, and the optical system diagnosis unit 10c. A plurality of diagnostic apparatuses 10 may be dispersed. That is, the diagnostic device 10 only needs to include at least one of the inspection accuracy diagnosis unit 10a, the inspection operation diagnosis unit 10b, and the optical system diagnosis unit 10c. In particular, the inspection accuracy diagnosis and the inspection operation diagnosis are diagnoses that have not been performed in the past, and the diagnostic apparatus 10 includes at least one of the inspection accuracy diagnosis unit 10a and the inspection operation diagnosis unit 10b. At least one diagnosis of the inspection operation can be performed sufficiently and sufficiently.

(Second Embodiment)
In FIG. 2, the block diagram of the test | inspection apparatus 1 which concerns on the 2nd Embodiment of this invention is shown. The inspection apparatus 1 according to the second embodiment is described with a clear relationship with other components in the inspection apparatus 1 so that the configuration of the inspection accuracy diagnosis unit 10a can be easily understood. Therefore, although the illumination head 3 etc. which were described in the inspection apparatus 1 of 1st Embodiment are provided also in the inspection apparatus 1 of 2nd Embodiment, in order to make description of the inspection precision diagnostic part 10a easy. The description is omitted.

  As shown in FIG. 2, the inspection accuracy diagnosis unit 10a includes an inspection accuracy diagnosis control unit 22 that controls and manages items to be performed in the inspection accuracy diagnosis and the execution order thereof, and a reference image setting that supports an operator to set a reference image 25a. And a reference image memory 25 that stores the reference image 25a, the reference measurement value 25b, and the reference determination result 25c in association with each other.

  Further, the inspection accuracy diagnosis unit 10 a includes an input source switching unit 23, an inspection accuracy determination unit 26, and a function confirmation recording unit 21. The input source switching unit 23 inputs the reference image 25a from the reference image memory 25 at the time of diagnosis as an image to be stored in the image memory 13, and is other than the time of diagnosis (such as at the time of inspection or prior preparation before diagnosis) as A / Switching is performed so that an inspection image is input from the D conversion unit 12. The inspection accuracy determination unit 26 determines the coincidence between the output result (diagnosis measurement value) of the image measurement unit 14 at the time of diagnosis and the reference measurement value stored in the reference image memory 25, and the inspection result at the time of diagnosis. A determination is made as to whether or not the output result (diagnosis determination result) of the determination unit 17 matches the reference determination result stored in the reference image memory 25. The function confirmation recording unit 21 displays a warning if the result of the determination does not match, prompts the operator to take countermeasures, and records the result of the determination as to whether or not the result matches.

  FIG. 3 shows a flowchart of a diagnostic method (for inspection accuracy diagnosis) of the inspection apparatus according to the second embodiment of the present invention.

  First, advance preparations for carrying out a diagnostic method for inspection accuracy diagnosis are performed. As advance preparation, registration of the reference image 25a, the reference measurement value 25b, and the reference determination result 25c is performed. Specifically, first, the operator prepares an inspection standard product. As the inspection reference product, a plurality of OK reference samples and a plurality of NG limit samples used for confirmation at the time of installation and adjustment of the inspection apparatus 1 can be used. The inspection apparatus 1 inspects the inspection standard product. By performing this inspection, the reference image 25a of the inspection reference product is photographed by the optical system. A reference image 25 a is written into the image memory 13 of the optical system via the input source switching unit 23. The image measurement unit 14 measures a predetermined characteristic using the reference image 25a and acquires a reference measurement value 25b. The inspection result determination unit 17 compares the reference measurement value 25b with the determination threshold stored in the variable / threshold memory 16, and acquires the reference determination result 25c of pass or fail.

  The reference image setting unit 24 prompts the operator to determine whether or not to store the reference image 25a via the GUI. When the operator determines to store the information, the operator inputs that fact via the GUI. By this input, the reference image setting unit 24 sends the reference image 25a, the reference measurement value 25b corresponding to the reference image 25a, and the reference determination result 25c corresponding to the reference image 25a together with the identification symbol of the reference image 25a. The reference image memory 25 stores them in association with each other. Usually, since a plurality of OK reference samples and NG limit samples are made, a plurality of reference images 25a are also generated. This completes the preparation.

  Next, the time of diagnosis of inspection accuracy diagnosis will be described.

  First, in step S1, the input source switching unit 23 is switched and transmits (calls) the reference image 25a from the reference image memory 25 to the image memory 13.

  In step S2, the image memory 13 stores the reference image 25a. When the image memory 13 stores the reference image 25a, so-called inspection of the reference image 25a is performed again. The reason why the so-called inspection is described is that the re-executed inspection omits photographing with the optical system. Further, as will be described later, in the re-executed inspection, the inspection operation of the discharge device 6 and the like is also omitted.

  Then, the image measurement unit 14 measures a predetermined characteristic using the reference image 25a and acquires a measurement value for diagnosis. Since the measurement value for diagnosis and the reference measurement value 25b are obtained by measuring the same characteristic of the same reference image 25a, they should match. If this is used in reverse, that is, if the diagnostic measurement value and the reference measurement value 25b do not match, it can be considered that the inspection accuracy has fluctuated. In the second embodiment, the inspection accuracy is diagnosed by determining the coincidence / mismatch between the diagnostic measurement value and the reference measurement value 25b.

  In the test result determination unit 17, the diagnostic measurement value is compared with the determination threshold stored in the variable / threshold memory 16 to obtain a diagnosis determination result of pass or fail. The diagnosis determination result and the reference determination result 25c are the pass or fail for the same inspection reference product photographed in the same reference image 25a. For example, if the reference determination result 25c is acceptable, the diagnosis determination result is also obtained. It should be matched by passing. If this is used conversely, that is, if the diagnostic determination result and the reference determination result 25c do not match, it can be considered that the inspection accuracy has fluctuated. In the second embodiment, the inspection accuracy is diagnosed by determining whether or not the diagnosis determination result matches the reference determination result 25c.

  Therefore, in step S3, the inspection accuracy determination unit 26 reads out the reference determination result 25c related to the reference image 25a, and determines whether or not the diagnosis determination result matches the reference determination result 25c by adding an allowable range. Judgment (collation) is performed. If they match, the process proceeds to step S6 (step S3, Yes), and if they do not match, the process proceeds to step S4 (step S3, No).

  In step S4, the function confirmation recording unit 21 displays a warning that the determination result is inconsistent, and prompts the operator to take a countermeasure. In step S5, the function confirmation recording unit 21 records the fact that the determination result is inconsistent, the identification symbol of the reference image 25a, the reference determination result 25c, the determination result for diagnosis, and the diagnosis date and time in the form. Note that the form may be printed or electronically recorded. The same applies to the following forms.

  In step S6, the inspection accuracy determination unit 26 reads the reference measurement value 25b associated with the reference image 25a, and determines whether or not the diagnostic measurement value matches the reference measurement value 25b by adding an allowable range. Judgment (collation) is performed. If they match, the process proceeds to step S9 (step S6, Yes), and if they do not match, the process proceeds to step S7 (step S6, No).

  In step S <b> 7, the function confirmation recording unit 21 displays a warning that the determination results are inconsistent, and prompts the operator to take countermeasures. In step S8, the function confirmation recording unit 21 records that the determination result is inconsistent, the identification symbol of the reference image 25a, the reference measurement value 25b, the measurement value for diagnosis, and the diagnosis date and time in the form. .

  In step S9, the inspection accuracy diagnosis control unit 22 determines whether or not steps S1 to S8 have been performed for all the reference images 25a stored in the reference image memory 25. If it has been performed for all the reference images 25a, the process proceeds to step S10 (step S9, Yes), and if it has not been performed for all the reference images 25a, the process returns to step S1 (step S9, No).

  In step S10, the function confirmation recording unit 21 records the fact that it has been performed on all the reference images 25a and the diagnosis date and time in a form. This completes the diagnostic method for the inspection accuracy diagnosis. In the diagnostic method of the inspection accuracy diagnosis, it can be seen that the diagnosis is performed without using the inspection operation diagnosis range of the optical system (optical system diagnosis range) and the discharge device 6 or the like. For this reason, in the diagnostic method of inspection accuracy diagnosis, the optical system diagnosis range and the inspection operation diagnosis range are not affected.

  In the diagnostic method of the inspection accuracy diagnosis, since the stored reference image 25a is used, it is not necessary to actually flow the product to be inspected 7 to the product conveying device 8. Therefore, diagnosis can be performed easily and in a short time. The inspected product 7 is deteriorated if it is flowed to the product conveying device 8 many times for each diagnosis, but the reference image 25a remains stored in the reference image memory 25 and does not deteriorate. This is especially true if the reference image 25a is a digital image. For this reason, if the inspection apparatus 1 has undergone inspection accuracy diagnosis using the reference image 25a that does not deteriorate, the inspection accuracy can be kept constant.

  In the diagnostic method of the inspection accuracy diagnosis, since it is not necessary to actually flow the product 7 to be inspected, the inspection apparatus 1 is incorporated into the manufacturing facility, and the diagnosis cannot be performed due to restrictions on the installation of the manufacturing facility and the mechanical characteristics. Even in such a case, any diagnostic method for inspection accuracy diagnosis can be implemented.

  Further, when a new defect occurs in the inspected product 7, the operator measures a new characteristic from the inspection image so that the inspected product 7 having the defect can be discharged by the inspection apparatus 1. A measurement value may be set, and a variable and a threshold value stored in the variable / threshold memory 16 may be changed correspondingly. Even in such a case, the inspection apparatus 1 must be capable of being discharged corresponding to the inspected product 7 having a known defect copied in the reference image 25a already stored in the reference image memory 25. According to the diagnostic method of the inspection accuracy diagnosis, it is possible to easily confirm (diagnose) whether or not the inspection apparatus 1 can discharge a known defect. In addition, if a new defect is also registered as the reference image 25a, the reference measurement value 25b, and the reference determination result 25c, it can be diagnosed whether the inspection apparatus 1 can detect the new defect from the next diagnosis.

  In addition, since there is no room for arbitrary determination and the diagnosis is clear and easy like the mismatch / mismatch for the reference determination result 25c and the match / mismatch for the reference measurement value 25b, individual differences among operators can be eliminated. . An operator who is not familiar with the inspection apparatus 1 can easily diagnose the inspection accuracy of the inspection apparatus 1.

  In addition, since the result of diagnosis can be recorded on a form, it is possible to ensure the inspection performance of the inspection apparatus 1 and increase the reliability of the inspection apparatus 1.

(Third embodiment)
In FIG. 4, the block diagram of the test | inspection apparatus 1 which concerns on the 3rd Embodiment of this invention is shown. The inspection apparatus 1 according to the third embodiment is described with a clear relationship with other components in the inspection apparatus 1 so that the configuration of the optical system diagnosis unit 10c can be easily understood. Therefore, the discharge device 6 and the like described in the inspection device 1 of the first embodiment are also provided in the inspection device 1 of the third embodiment, but in order to facilitate the explanation of the optical system diagnostic unit 10c. The description is omitted.

  As shown in FIG. 4, the optical system diagnosis unit 10 c includes an optical system diagnosis control unit 27 that controls and manages items to be performed in the optical system diagnosis and the execution order thereof, and a feature measurement / determination unit (feature measurement unit in claims). And a sixth determination unit) 28, a reference data storage unit 29, a function confirmation recording unit 21, and a continuous video input control unit 30.

  The feature measurement / determination unit 28 measures a predetermined feature by using an optical system image obtained by photographing the optical system diagnosis dedicated sample 9 placed at a predetermined position by the optical system, and obtains an optical system measurement value. It is acquired, and it is determined whether or not the optical system measurement values match at the time of the preliminary preparation for diagnosis and at the time of diagnosis.

  The reference data storage unit 29 stores optical system measurement values at the time of preparation.

  The function confirmation recording unit 21 displays a warning if the result of the determination does not match, prompts the operator to take countermeasures, and records the result of the determination as to whether or not the result matches.

  The continuous video input control unit 30 causes the inspection activation control unit 11 to continuously input a signal in place of the detection signal output from the inspection activation sensor 4 (see FIG. 1) in its own cycle. Corresponding to this continuous input, continuous photographing with an optical system is enabled.

  Since the product 7 to be inspected is generally complicated in shape and is not suitable for accurately measuring the optical system measurement value, the optical system diagnostic sample 9 is used instead of the product 7 to be inspected. As the optical system diagnosis dedicated sample 9, it is desirable to use a standard reflector or a test shape molded product. This is to exclude the influence of deterioration of the inspected product 7 and lot variation of the inspected product 7. FIG. 4 shows an example in which a gray rectangular pattern is used as the optical system diagnosis dedicated sample 9. On the upper surface 9b of the optical system diagnosis dedicated sample 9, a gray and rectangular (rectangular) diagnosis dedicated pattern 9a is provided.

  FIG. 5A shows an optical system image 32 obtained by photographing the optical system diagnosis dedicated sample 9. The rectangle of the frame extending over the entire area of the optical system image 32 and the rectangle of the diagnostic dedicated pattern 9a are arranged and photographed so that the opposite sides are parallel to each other. The upper surface 9 b including the diagnostic dedicated pattern 9 a is photographed to generate the optical system image 32, and the optical system measurement value is measured from the diagnostic dedicated pattern 9 a captured in the optical system image 32. Then, as the optical system measurement value, the upper left corner of the rectangle of the optical system image 32 is the origin O, the side extending from the origin O to the right on the paper surface is the X axis, and the side extending from the origin O to the paper surface is Y When the axis is used, the coordinates (SX, SY) of the upper left corner O1 of the diagnostic dedicated pattern 9a are employed. According to the coordinates (SX, SY), the position of the camera 2 can be evaluated. Further, as another optical system measurement value, the inclination angle θ of the diagnostic dedicated pattern 9a is adopted. The position of the camera 2 can also be evaluated by the tilt angle θ. As another optical system measurement value, the horizontal width DX in the horizontal direction and the vertical width DY in the vertical direction of the rectangular paper surface of the diagnostic dedicated pattern 9a which is information defining the input visual field are adopted. Further, as another optical system measurement value, a luminance average value in the diagnostic dedicated pattern 9a which is information defining illuminance (brightness) is adopted. Furthermore, as another optical system measurement value, as shown in FIG. 5 (b), it is surrounded by a dotted line from the X-axis direction position x1 located outside the diagnostic dedicated pattern 9a to the X-axis direction position x2 located inside. The maximum value of the projected distribution slope in the region is adopted. The maximum value of the projected distribution gradient is an index of focus and contrast. These optical system measurement values can be expressed by quantifying the distortion of the optical system image 32.

  FIG. 6 shows a flowchart of an inspection apparatus diagnosis method (for optical system diagnosis) according to the third embodiment of the present invention.

  First, preparations for carrying out a diagnostic method for optical system diagnosis are performed. As advance preparation, an optical system reference image is acquired, and an optical system reference measurement value is measured and registered. Specifically, first, the operator prepares the optical system diagnosis dedicated sample 9 and strictly arranges it at a predetermined position as shown in FIG.

  The continuous video input control unit 30 performs a continuous input operation in a self cycle, images the optical system diagnosis dedicated sample 9 using the camera 2, the illumination head 3, and the like, and acquires an optical system reference image. The optical system reference image is converted from an analog image to a digital image by the A / D converter 12 and stored in the image memory 13.

  The feature measurement / determination unit 28 measures a predetermined feature using the optical system reference image and acquires an optical system reference measurement value. The reference data storage unit 29 stores an optical system reference measurement value. This completes the preparation.

  Next, a description will be given of an optical system diagnosis.

  First, in step S11, the operator strictly arranges the optical system diagnosis dedicated sample 9 at the same predetermined position as the preliminary preparation. The continuous video input control unit 30 performs a continuous input operation in a self cycle, images the optical system diagnostic dedicated sample 9 using the camera 2, the illumination head 3, and the like, and acquires an optical system diagnostic image. The optical system diagnostic image is converted from an analog image to a digital image by the A / D converter 12 and stored in the image memory 13.

  In step S <b> 12, the feature measurement / determination unit 28 measures a predetermined feature using the optical system diagnostic image and acquires an optical system diagnostic measurement value. The optical system diagnostic measurement value and the optical system reference measurement value have the same characteristics of the optical system diagnostic image and the optical system reference image that are photographed by placing the same optical system diagnostic dedicated sample 9 at the same predetermined position. Since these are measured values, they should match. If this is used in reverse, that is, if the optical system diagnostic measurement value and the optical system reference measurement value do not match, it can be considered that the optical system has changed. In the third embodiment, the optical system is diagnosed by determining the coincidence / mismatch between the optical system diagnostic measurement value and the optical system reference measurement value.

  In step S <b> 13, the feature measurement / determination unit 28 sequentially reads out the optical system reference measurement values corresponding to the optical system diagnostic measurement values from the reference data storage unit 29. The feature measurement / determination unit 28 determines (collates) whether or not the optical system diagnostic measurement value matches the optical system reference measurement value by adding an allowable range. If they match, the process proceeds to step S17 (step S13, Yes), and if they do not match, the process proceeds to step S14 (step S13, No).

  In step S14, the function confirmation recording unit 21 displays a warning that the determination results do not match, and prompts the operator to take countermeasures. In step S15, the function confirmation recording unit 21 records that the determination result is inconsistent, the optical system diagnostic measurement value, the optical system reference measurement value, and the diagnosis date and time that are determined to be inconsistent, in the form. In step S16, the operator changes the predetermined feature corresponding to the optical system diagnostic measurement value determined to be inconsistent and the optical system reference measurement value, changes the change parameter that can be changed, and calibrates the predetermined feature. Also good. And in order to confirm the result of this calibration, it returns to step S11.

  In step S17, the function confirmation recording unit 21 records the setting values of the change parameters before and after calibration in step S16 in a form. In addition, the function confirmation recording unit 21 records the fact that diagnosis has been performed on all features (optical system reference measurement values) and the diagnosis date and time in a form. This is the end of the diagnostic method for optical system diagnosis. In the diagnostic method of the optical system diagnosis, it is understood that the diagnosis is performed without using the inspection accuracy diagnosis range (see FIG. 1) and the inspection operation diagnosis range (see FIG. 1) excluding the inspection activation control unit 11. . For this reason, in the diagnostic method of the optical system diagnosis, the inspection accuracy diagnosis range and the inspection operation diagnosis range excluding the inspection activation control unit 11 are not affected.

  Note that as the calibration in step S16, as assumed in normal operation, illumination volume adjustment and lens aperture adjustment to cope with illuminance reduction due to deterioration of the illumination head 3 can be considered. Further, cleaning of the lens surface can be considered as a calibration of focus and contrast due to contamination of the lens surface of the camera 2. Further, as the calibration of the installation position of the camera 2, a restoration work when the camera 2 is broken and removed and repaired can be considered. As described above, the optical system diagnosis operates effectively for the optical system deterioration preventive maintenance. In the inspection accuracy diagnosis, diagnosis of the category of digital processing of the inspection image is performed, but in the optical system diagnosis, it is considered that diagnosis of the category of analog processing of the inspection image is performed. Then, it is considered that the entire image processing of the inspection image is diagnosed by the inspection accuracy diagnosis and the optical system diagnosis.

Further, in the diagnostic method for optical system diagnosis, it is not necessary to actually flow the product 7 to be inspected to the product conveying device 8. For this reason, diagnosis can be performed easily and in a short time, and the product 7 to be inspected which is easily deteriorated and easily affected by lot variations is not used, so that the reproducibility of diagnosis can be improved.
In addition, since the diagnosis is clear and easy as there is no room for arbitrary judgment as in the case of coincidence / inconsistency with respect to the optical system reference measurement value, individual differences among operators can be eliminated. Even an operator who is not familiar with the inspection apparatus 1 can easily make an optical system diagnosis of the inspection apparatus 1.

  In addition, since the diagnosis result can be recorded on the form, it is possible to guarantee the performance of the optical system of the inspection apparatus 1 and to improve the reliability of the inspection apparatus 1.

(Fourth embodiment)
In FIG. 7, the block diagram of the test | inspection apparatus 1 which concerns on the 4th Embodiment of this invention is shown. The inspection apparatus 1 according to the fourth embodiment is described with a clear relationship with other components in the inspection apparatus 1 so that the configuration of the inspection operation diagnosis unit 10b can be easily understood. Therefore, although the inspection accuracy diagnosis unit 10a and the optical system diagnosis unit 10c described in the inspection device 1 of the first embodiment are also provided in the inspection device 1 of the fourth embodiment, the inspection operation diagnosis unit 10b. The description is omitted for easy explanation.

  As shown in FIG. 7, the inspection operation diagnosis unit 10b includes an inspection operation diagnosis control unit 18 that controls and manages items to be performed in the inspection operation diagnosis and the execution order thereof, a determination unit 19, a reference data storage unit 20, and a function check. A recording unit 21 and an output switching unit 31 are provided.

  FIG. 8 shows a flowchart of an inspection apparatus diagnosis method (for inspection operation diagnosis) according to the fourth embodiment of the present invention. In the inspection operation diagnosis, a first sub-diagnosis for self-diagnosis of hardware, a second sub-diagnosis for self-diagnosis of input timing to the test activation sensor 4, and a third sub-diagnosis for pseudo-checking the test result output And a fourth sub-diagnosis for pseudo-checking the interlock. Below, these four small diagnoses are demonstrated in order.

  First, the first small diagnosis for self-diagnosis of hardware will be described. As hardware self-diagnosis, for example, a memory test for writing / reading / verifying a test pattern in a memory, an operation test for an image processing LSI, an energization test for various sensors, a response test for the camera 2, and a discharge device 6 The response test can be considered.

  In the first sub-diagnosis for self-diagnosis of hardware, first, preparations for carrying out the first sub-diagnosis are performed. As advance preparation, a hardware pass signal output when the test is passed by the hardware test program is stored in the reference data storage unit 20 in association with the identification code of the test program. This completes the preparation.

  Next, the time of diagnosis of the first small diagnosis for self-diagnosis of hardware will be described.

  In step S21, a hardware diagnostic signal is acquired by causing the hardware to execute a test program as a self-diagnosis process.

  In step S <b> 22, the determination unit 19 sequentially reads out a hardware pass signal associated with the test program identification symbol from the reference data storage unit 20. The determination unit 19 determines whether or not the hardware diagnosis signal matches the hardware pass signal. If they match, the process proceeds to step S25 (second small diagnosis for self-diagnosis of the input timing to the test activation sensor 4) (step S22, Yes), and if they do not match, the process proceeds to step S23 (No in step S22).

  In step S23, the function confirmation recording unit 21 displays a warning that the determination results do not match, and prompts the operator to take countermeasures. In step S24, the function confirmation recording unit 21 records in the form that the determination result is inconsistent, the test program identification symbol related to the hardware pass signal determined to be inconsistent, and the diagnosis date and time. To do.

  Next, a second small diagnosis for self-diagnosis of the input timing to the inspection activation sensor 4 will be described. In the second sub-diagnosis for self-diagnosis of the input timing to the inspection activation sensor 4, first, preliminary preparation for performing the second sub-diagnosis is performed. As advance preparation, an operator first prepares an arbitrary inspected product. The inspection apparatus 1 inspects the inspected product to be inspected. In this inspection, the optical system captures a reference entire frame image indicating where the inspected product to be inspected is arranged in the entire frame of the inspection image. That is, an inspection image is normally taken, and the inspection image is stored in the reference data storage unit 20 as a reference whole frame image. Instead of photographing the reference whole frame image, a guidance frame may be provided at the ideal position on the inspection image instead of the image of the inspected product to be inspected.

  Next, the time of diagnosis of the second small diagnosis for self-diagnosis of the input timing to the inspection activation sensor 4 will be described.

  In step S25, the operator prepares an arbitrary inspected product. The inspection apparatus 1 inspects the inspected product to be inspected. In this inspection, the optical system takes an inspection image of the inspected product. The inspection image is set as a whole frame image for diagnosis.

  In step S <b> 26, the determination unit 19 reads the reference whole frame image from the reference data storage unit 20. The determination unit 19 superimposes the diagnostic whole frame image on the reference whole frame image. That is, the coordinate systems of the diagnostic whole frame image and the reference whole frame image are matched.

  In step S <b> 27, the determination unit 19 determines whether or not the images of the inspected products in the diagnosis entire frame image and the reference entire frame image overlap with each other with an allowable range. Specifically, it is determined whether or not the coordinates of the inspected product in the diagnostic whole frame image and the coordinates of the inspected product in the reference whole frame image match in consideration of the allowable range. To do. If they match, the process proceeds to step S30 (third small diagnosis for pseudo-checking the test result output) (step S27, Yes), and if they do not match, the process proceeds to step S28 (step S27, No).

  In step S28, the function confirmation recording unit 21 displays a warning that the determination results do not match (coordinates do not overlap), and prompts the operator to take countermeasures. In step S29, the function confirmation recording unit 21 indicates that the determination result is inconsistent (coordinates do not overlap), the coordinates of the inspected product in the diagnostic whole frame image and the reference whole frame image, Record the date and time of diagnosis on the form. According to the second sub-diagnosis for self-diagnosis of the input timing to the inspection activation sensor 4, it is possible to prevent and maintain misalignment of the inspection activation sensor 4, fluctuations in conveyance conditions of the product conveyance device 8, and the like.

  Next, a description will be given of a third small diagnosis for pseudo-checking the test result output. In the third sub-diagnosis for pseudo-checking the test result output, first, preliminary preparation for performing the third sub-diagnosis is performed. As advance preparation, first, the operator creates and determines a pseudo determination result that simulates the output of the inspection result determination unit 17. Then, the operator stores the pseudo determination result in the reference data storage unit 20. This completes the preparation.

  Next, a description will be given of the time of diagnosis of the third sub-diagnosis for pseudo-checking the test result output.

  In step S <b> 30, the operator prepares inspected products corresponding to the pseudo determination result pattern, and performs inspection with the inspection apparatus 1. In this inspection, the inspection activation sensor 4 detects the inspected product corresponding to the pseudo determination result pattern and transmits a detection signal to the inspection activation control unit 11. Upon receipt of the detection signal, the inspection activation control unit 11 transmits the activation signal to the reference data storage unit 20 as a pseudo determination result read signal. The reference data storage unit 20 outputs the pseudo determination result to the output switching unit 31 in synchronization with the activation signal. The output switching unit 31 inputs a pseudo determination result and outputs it to the discharge device 6 at the time of diagnosis. The output switching unit 31 inputs the determination result from the inspection result determination unit 17 and outputs it to the discharge device 6 at the time of inspection other than the diagnosis, for example. The discharge device 6 performs a discharge operation of the inspected product according to the pseudo determination result (for the pattern).

  In step S <b> 31, the operator determines whether or not the pass / fail permutation operation of the discharge operation of the discharge device 6 matches the pseudo determination result (for the pattern) by visual confirmation. If they match, the process proceeds to step S33 (fourth sub-diagnosis for pseudo-checking the interlock) (step S31, Yes), and if they do not match, the process proceeds to step S32 (No in step S31).

  In step S32, the operator inputs “disagreement (failure of discharge operation)” as a result of determination via the GUI. The function confirmation recording unit 21 records the fact that the determination result is “mismatch (failure of discharge operation)” and the diagnosis date and time in the form.

  Next, a fourth sub-diagnosis for pseudo-checking the interlock will be described. In the fourth sub-diagnosis for pseudo-checking the interlock, first, preliminary preparation for carrying out the fourth sub-diagnosis is performed. As advance preparation, first, the operator creates and determines a pseudo determination result that simulates the output of the inspection result determination unit 17 in which the interlock operates. Then, the operator causes the reference data storage unit 20 to store a pseudo determination result in which the interlock is activated. If a pseudo determination result is created for each interlock, the operation of the interlock can be confirmed without fail. This completes the preparation.

  Next, a description will be given of the time of diagnosis in the fourth sub-diagnosis for pseudo-checking the interlock.

  In step S <b> 33, the operator prepares inspected products corresponding to the pseudo determination result pattern in which the interlock is activated, and inspects the inspection apparatus 1. In this inspection, the inspection activation sensor 4 detects the inspected product for the pseudo determination result pattern in which the interlock is activated, and transmits a detection signal to the inspection activation control unit 11. Upon receipt of the detection signal, the inspection activation control unit 11 transmits the activation signal to the reference data storage unit 20 as a pseudo determination result read signal. The reference data storage unit 20 outputs a pseudo determination result that the interlock is activated to the output switching unit 31 in synchronization with the activation signal. The output switching unit 31 inputs a pseudo determination result and outputs it to the discharge device 6 at the time of diagnosis. The discharge device 6 performs the discharge operation of the inspected product in accordance with the pseudo determination result (for the pattern) in which the interlock is activated. If the interlock is normal by this discharging operation, the interlock is activated and the product transport device 8 is stopped.

  In step S <b> 34, the operator determines whether or not the product conveyance device 8 stops by visual confirmation. When it stops, it progresses to step S36 (step S34, Yes), and when it does not stop, it progresses to step S35 (step S34, No).

  In step S <b> 35, the operator inputs “not stop (interlock operation failure)” as a result of the determination via the GUI. The function confirmation recording unit 21 records in the form that the determination result is “not stop (interlock operation failed)” and the diagnosis date and time.

  In step S36, the inspection operation diagnosis control unit 18 determines whether or not all operation confirmations have been completed. If completed, the process proceeds to step S37 (step S36, Yes), and if not completed, the process returns to step S21 (step S36, No).

  In step S <b> 37, the function confirmation recording unit 21 records the fact that all the operation confirmations are completed and the diagnosis date and time in the form. Thus, the diagnostic method for the examination operation diagnosis is completed. In the inspection operation diagnosis, the diagnosis is performed without using the inspection accuracy diagnosis range (see FIG. 1) by causing the logical operation of the discharge device 6 to be simulated. For this reason, the inspection operation diagnosis is not affected by the inspection accuracy diagnosis range.

  About an interlock, although the content differs for every test | inspection apparatus 1, a check leak can be prevented by covering about the item which operates an interlock. For example, in the inspection apparatus 1 that detects a discharge error and stops the product conveyance device 8, by performing function confirmation control for stopping the discharge device 6 in a pseudo manner, peripheral equipment (for example, a discharge error detection sensor) Etc.) can also be used for confirmation models such as confirming that correct detection can be performed.

In addition, since the diagnosis is clear and easy with no room for arbitrary determination, individual differences among operators can be eliminated. Even an operator who is not familiar with the inspection apparatus 1 can easily diagnose the inspection operation of the inspection apparatus 1.
In addition, since the result of diagnosis can be recorded on a form, it is possible to ensure the performance of the inspection operation of the inspection apparatus 1, and the reliability of the inspection apparatus 1 can be improved.

It is a block diagram of the inspection apparatus (for inspection accuracy diagnosis, inspection operation diagnosis, and optical system diagnosis) according to the first embodiment of the present invention. It is a block diagram of the test | inspection apparatus (for test | inspection precision diagnosis) which concerns on the 2nd Embodiment of this invention. It is a flowchart of the diagnostic method (for test | inspection precision diagnosis) of the test | inspection apparatus which concerns on the 2nd Embodiment of this invention. It is a block diagram of the test | inspection apparatus (for optical system diagnosis) which concerns on the 3rd Embodiment of this invention. (A) is the optical system image which image | photographed the sample only for optical system diagnosis, (b) is a graph which shows the luminance distribution inside and outside the diagnostic exclusive pattern reflected in the optical system image. It is a flowchart of the diagnostic method (for optical system diagnosis) of the inspection apparatus which concerns on the 3rd Embodiment of this invention. It is a block diagram of the test | inspection apparatus (for test | inspection operation | movement diagnosis) which concerns on the 4th Embodiment of this invention. It is a flowchart of the diagnostic method (for test | inspection operation | movement diagnosis) of the test | inspection apparatus which concerns on the 4th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection machine 2 Camera 3 Illumination head 4 Inspection start sensor 5 Illumination power supply 6 Discharge device or sorter 7 Product to be inspected 8 Product conveyance device 9 Optical system diagnostic exclusive sample 9a Diagnosis exclusive pattern 9b Optical system diagnostic exclusive sample top 10 Diagnosis device DESCRIPTION OF SYMBOLS 10a Inspection accuracy diagnostic part 10b Inspection operation diagnostic part 10c Optical system diagnostic part 11 Inspection start control part 12 A / D conversion part 13 Image memory 14 Image measurement arithmetic processing part 15 Variable / threshold setting part 16 Variable / threshold memory 17 Inspection result determination Unit 18 Inspection Operation Diagnosis Control Unit 19 Determination Unit (Second Determination Unit, Third Determination Unit)
20 reference data storage unit (second storage unit, third storage unit, fourth storage unit, fifth storage unit)
21 function confirmation recording unit (first display unit, second display unit, third display unit, fourth display unit, fifth display unit, sixth display unit)
22 inspection accuracy diagnosis control unit 23 input source switching unit 24 reference image setting unit 25 reference image memory (first storage unit)
26 Inspection accuracy determination unit (first determination unit)
27 Optical system diagnosis control unit 28 Feature measurement / determination unit (feature measurement unit, sixth determination unit)
29 Reference data storage unit (sixth storage unit)
30 Continuous Video Input Control Unit 31 Output Switching Unit 32 Optical System Image

Claims (12)

An optical system for generating an inspection image of the inspected product;
An image measuring unit that measures predetermined characteristics from the inspection image and obtains a measurement value for inspection; and
An inspection result determination unit that compares the measurement value for inspection with a determination threshold value to obtain a determination result for inspection;
In a diagnostic apparatus for diagnosing an inspection apparatus having a discharge apparatus for discharging the inspected product according to the inspection determination result,
An inspection accuracy diagnosis unit for diagnosing the image measurement unit and the inspection result determination unit by operating the image measurement unit and the inspection result determination unit without using the optical system and the discharge device at the time of the diagnosis; ,
At the time of the diagnosis, it has at least one of an inspection operation diagnosis unit that operates the discharge device and diagnoses the discharge device without using the image measurement unit and the inspection result determination unit. Diagnostic device.   The optical system diagnostic unit that operates the optical system and diagnoses the optical system without using the image measurement unit, the inspection result determination unit, and the ejection device at the time of the diagnosis. Item 2. The diagnostic device according to Item 1. The inspection accuracy diagnosis unit
A reference image taken by an optical system from an inspection reference product serving as a reference for inspection of the inspected product, a reference measurement value obtained by measuring the characteristic from the reference image by the image measurement unit, and the inspection result A first storage unit that correlates a reference determination result obtained by comparing the reference measurement value with the determination threshold by the determination unit, and stores the result before the diagnosis;
The reference measurement value related to the reference image obtained by measuring the characteristic from the reference image read from the first storage unit by the image measurement unit during the diagnosis. And at the time of diagnosis, a diagnostic determination result obtained by comparing the diagnostic measurement value with the determination threshold by the examination result determination unit is related to the reference image. A first determination unit that performs at least one of determination on whether or not the reference determination result matches,
The diagnostic apparatus according to claim 1, further comprising: a first display unit that displays a warning if at least one of the determination results does not match at the time of the diagnosis. The inspection operation diagnosis unit
A second storage unit that stores a hardware pass signal that is output when the test program of the hardware that constitutes the inspection apparatus passes, and before the diagnosis;
A second determination unit that determines whether or not a hardware diagnosis signal acquired by executing the test program on the hardware matches the hardware pass signal at the time of the diagnosis;
The diagnostic apparatus according to any one of claims 1 to 3, further comprising a second display unit that displays a warning if the determination result does not match at the time of the diagnosis. The inspection operation diagnosis unit
A third storage unit that stores a reference whole frame image acquired by photographing any inspected product to be inspected by the optical system before the diagnosis;
At the time of diagnosis, the diagnostic entire frame image is made to coincide with the coordinate system of the reference entire frame image obtained by re-photographing any inspected product to be inspected again by the optical system. A third determination unit for determining whether or not the coordinates of the image of the inspected product in the reference whole frame image coincide with each other;
The diagnostic apparatus according to any one of claims 1 to 4, further comprising a third display unit that displays a warning if the result of the determination does not match at the time of the diagnosis. The inspection operation diagnosis unit
A fourth storage unit that stores a pseudo determination result corresponding to the determination result for inspection and capable of discharging the inspected product before the diagnosis;
Whether the discharge operation matches the pseudo determination result to the operator by the discharge operation of the inspected product in accordance with the pseudo determination result input from the fourth storage unit of the discharge device at the time of the diagnosis. The diagnostic apparatus according to claim 1, further comprising a fourth display unit that prompts an input of the determination. The inspection operation diagnosis unit
A fifth storage unit for storing a pseudo determination result corresponding to the determination result for inspection and discharging the inspected product and operating the interlock before the diagnosis;
At the time of the diagnosis, the interlock was activated by the ejection operation of the inspected product inspected according to the pseudo determination result input from the fifth storage unit of the ejection device, and the interlock was activated to the operator. The diagnostic apparatus according to claim 1, further comprising: a fifth display unit that prompts an input of whether or not the determination is made. The optical system diagnostic unit is
An optical system reference measurement value is obtained before the diagnosis by measuring a predetermined feature using an optical system reference image acquired by photographing an optical system diagnosis dedicated sample placed at a predetermined position by the optical system. A feature measurement unit;
A sixth storage unit for storing the optical system reference measurement value before the diagnosis;
At the time of the diagnosis, the feature measurement unit uses the optical system diagnostic image acquired by photographing the optical system diagnostic dedicated sample placed at the same position as the predetermined position by the optical system, A sixth determination unit configured to determine whether or not an optical system diagnostic measurement value obtained by measuring a characteristic matches the optical system reference measurement value;
The diagnostic apparatus according to claim 1, further comprising: a sixth display unit that displays a warning if the result of the determination does not match at the time of the diagnosis. An optical system for generating an inspection image of the inspected product;
An image measuring unit that measures predetermined characteristics from the inspection image and obtains a measurement value for inspection; and
An inspection result determination unit that compares the measurement value for inspection with a determination threshold value to obtain a determination result for inspection;
In a diagnostic method for diagnosing an inspection apparatus having a discharge apparatus for discharging the inspected product according to the determination result for inspection,
An inspection accuracy diagnosis step of diagnosing the image measurement unit and the inspection result determination unit by operating the image measurement unit and the inspection result determination unit without using the optical system and the discharge device at the time of the diagnosis; ,
At the time of the diagnosis, it has at least one of an inspection operation diagnosis step of operating the discharge device and diagnosing the discharge device without using the image measurement unit and the inspection result determination unit. Diagnosis method.   The optical system diagnosis step of diagnosing the optical system by operating the optical system without using the image measurement unit, the inspection result determination unit, and the discharge device at the time of the diagnosis. Item 10. The diagnostic method according to Item 9. An optical system for generating an inspection image of the inspected product;
An image measuring unit that measures predetermined characteristics from the inspection image and obtains a measurement value for inspection; and
An inspection result determination unit that compares the measurement value for inspection with a determination threshold value to obtain a determination result for inspection;
In an inspection apparatus having a discharge device for discharging the inspected product according to the determination result for inspection,
During the diagnosis for diagnosing the inspection device, the image measurement unit and the inspection result determination unit are operated without using the optical system and the discharge device, and the image measurement unit and the inspection result determination unit are diagnosed. An inspection accuracy diagnosis unit to be performed;
At the time of the diagnosis, it has at least one of an inspection operation diagnosis unit that operates the discharge device and diagnoses the discharge device without using the image measurement unit and the inspection result determination unit. Inspection device.   The optical system diagnostic unit that operates the optical system and diagnoses the optical system without using the image measurement unit, the inspection result determination unit, and the ejection device at the time of the diagnosis. Item 12. The inspection apparatus according to Item 11.

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