JP2009066624A - Workpiece supporting apparatus - Google Patents

Workpiece supporting apparatus Download PDF

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JP2009066624A
JP2009066624A JP2007237992A JP2007237992A JP2009066624A JP 2009066624 A JP2009066624 A JP 2009066624A JP 2007237992 A JP2007237992 A JP 2007237992A JP 2007237992 A JP2007237992 A JP 2007237992A JP 2009066624 A JP2009066624 A JP 2009066624A
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workpiece
work
support member
workpiece support
support device
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Takeshi Kusaka
健 日下
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Amada Co Ltd
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Amada Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece supporting apparatus that can suppress fluttering of a workpiece and that can further reduce possibility of fire breaking. <P>SOLUTION: The workpiece supporting apparatus supports the workpiece W that is machined by a laser beam machine 1 as a sheet material processing machine. The apparatus includes a table 3 for placing the workpiece W thereon and a thin plate-like workpiece supporting member 100 to be arranged on the table 3, wherein the work supporting member 100 is installed with its planar part facing the moving direction of the workpiece W and is elastically deformable in accordance with the movement of the workpiece W. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、例えばレーザ加工機等の板材加工機におけるワーク支持装置に関するものである。   The present invention relates to a workpiece support device in a plate material processing machine such as a laser processing machine.

従来、板材加工機、例えばレーザ加工機を用いて薄板等のワークを加工する場合において、移動するワークを支持するワーク支持装置としては、フリーベア、ローラ、ブラシ等を用いるものが知られている。その一例としては、金属製のローラから成る第1ワーク支持部材と、テーブルに固設される合成樹脂等でできた細い糸からなるブラシと細い糸の途中を束ねるワイヤとから成る第二ワーク支持部材とを備えたワーク支持装置がある(例えば、特許文献1参照)。   2. Description of the Related Art Conventionally, when processing a workpiece such as a thin plate using a plate material processing machine, for example, a laser processing machine, a workpiece support device that uses a free bear, a roller, a brush, or the like is known as a workpiece support device that supports a moving workpiece. For example, a first work support member made of a metal roller, a second work support made up of a brush made of a thin thread made of a synthetic resin or the like fixed to a table, and a wire bundled in the middle of the thin thread. There is a work support device provided with a member (for example, refer to patent documents 1).

ここで、フリーベア、ローラ、ブラシを用いたワーク支持装置は、それぞれ以下の特徴を有する。   Here, the workpiece support devices using free bears, rollers, and brushes have the following characteristics.

まず、フリーベアを用いたワーク支持装置の場合には、ワークは大きなイナーシャを持ったベアリングの頂点にて支持される。そのため、ワークが大きな加速度で加速されると、ワークとフリーベアとの間の摩擦力がイナーシャに負けてしまい、ベアリングを回転させることができずに滑り摩擦となって、ワークに引っ掻き傷が付いてしまうおそれがあった。またフリーベアの頂点でのワークの支持は、ワークとの間に局圧を生じ、ベアリングの接触部の軌跡がワークの支持面に付いてしまうおそれがあった。これらの理由によりフリーベアを用いたワーク支持装置は、ワークの傷無し加工には比較的不向きであった。   First, in the case of a work support device using a free bear, the work is supported at the top of a bearing having a large inertia. For this reason, when the workpiece is accelerated at a large acceleration, the friction force between the workpiece and the free bear loses the inertia, and the bearing cannot be rotated and becomes a sliding friction, and the workpiece is scratched. There was a risk of it. Further, the support of the work at the apex of the free bear generates local pressure between the work and the trajectory of the contact portion of the bearing may be attached to the support surface of the work. For these reasons, the workpiece support device using the free bear is relatively unsuitable for machining a workpiece without scratches.

ローラを用いたワーク支持装置は、ワークを一方向移動させる場合のワーク支持に向いている。しかし、レーザ加工の際にドロスが発生した場合において、そのドロスによる突出部がローラに乗ってしまうと、ワーク高さが変化し、移動するワークにバタつきが発生し、ワークのパスラインが変化してしまうおそれがあった。   A workpiece support device using a roller is suitable for workpiece support when the workpiece is moved in one direction. However, when dross occurs during laser processing, if the projecting part due to the dross gets on the roller, the workpiece height changes, the moving workpiece flutters, and the workpiece pass line changes. There was a risk of doing so.

ブラシを用いたワーク支持装置は、ワークの移動方向を問わず利用できる支持装置である。また、ワークの平面を支えることができ、ドロスのような局所的な突出部があってもブラシの撓みにより高さ変化を吸収できるため、ワークのバタつきが発生することがなく、したがってパスラインが変化しない。さらに、フリーベアやローラを用いた場合と比べて構成が比較的簡単である。そのためレーザ加工機等では、裏傷の発生とパスライン変化を抑えるために、ブラシを用いたワーク支持装置が多く用いられている。
特開平9−103912号公報
A workpiece support device using a brush is a support device that can be used regardless of the moving direction of the workpiece. In addition, it can support the plane of the workpiece, and even if there is a local protrusion such as dross, the height change can be absorbed by the bending of the brush, so there is no fluttering of the workpiece, so the pass line Does not change. Furthermore, the configuration is relatively simple compared to the case where a free bear or a roller is used. For this reason, in a laser processing machine or the like, a work support device using a brush is often used in order to suppress the occurrence of back scratches and changes in the pass line.
Japanese Patent Laid-Open No. 9-103912

しかしながら、ブラシを用いたワーク支持装置において、ブラシは素線を束ねて構成されている。そのため、あたかもランプの芯の如く、毛細管現象にてワークやワーク支持装置に塗布、付着しているグリース等の油分をブラシが吸い上げてしまうおそれがあった。したがって、特にスパッタの飛散する酸素リッチ雰囲気でのブラシを用いたワーク支持装置の使用は、火災が発生する原因となるおそれがあった。   However, in a work support device using a brush, the brush is configured by bundling strands. For this reason, there is a possibility that the brush sucks up oil such as grease applied and adhering to the workpiece and the workpiece supporting device by a capillary phenomenon as if it were a lamp core. Therefore, the use of the work support device using the brush in an oxygen-rich atmosphere in which spatter is scattered may cause a fire.

このような問題に対して、ブラシに難燃性の素材を使用することで対処する方法が実施されている。これにより、火災が発生する可能性をある程度は低減することはできる。しかしながら、火災時に主に燃えるのはブラシに吸い上げられた油であるため、ブラシを難燃性の材質とするだけでは十分な火災対策とはなっていなかった。   A method of dealing with such a problem by using a flame-retardant material for the brush has been implemented. Thereby, the possibility that a fire will occur can be reduced to some extent. However, oil that has been sucked up by the brush mainly burns in the event of a fire, so using a brush as a flame-retardant material has not been a sufficient fire countermeasure.

本発明は、係る状況下でなされたものであり、ワークのバタつきを抑えるとともに、火災が発生する可能性をさらに低減することができるワーク支持装置を提供することを課題とする。   The present invention has been made under such circumstances, and it is an object of the present invention to provide a work support device that can suppress the fluttering of the work and further reduce the possibility of fire.

本発明は前述した課題を解決するためになされたものであり、以下の構成を備える。   The present invention has been made to solve the above-described problems, and has the following configuration.

(1)板材加工機により加工されるワークを支持するワーク支持装置において、前記ワークが載置される支持台と、前記支持台に配設される薄板状のワーク支持部材を備え、前記ワーク支持部材は、その平面部分が前記ワークの移動方向に向くように設けられ、ワークの移動に伴って弾性変形可能であることを特徴とするワーク支持装置。   (1) A workpiece support device for supporting a workpiece to be processed by a plate material processing machine, comprising: a support base on which the workpiece is placed; and a thin plate-like workpiece support member disposed on the support base. The workpiece support device, wherein the member is provided such that a plane portion thereof faces the moving direction of the workpiece, and is elastically deformable with the movement of the workpiece.

(2)前項(1)に記載のワーク支持装置において、前記ワーク支持部材は、前記ワークと当接する側に、切り欠き部を有することを特徴とするワーク支持装置。   (2) The workpiece support device according to (1), wherein the workpiece support member has a notch on a side in contact with the workpiece.

(3)前項(1)又は(2)に記載のワーク支持装置において、前記ワーク支持部材は、前記ワークと当接する位置に球状部を有し、該球状部を介してワークを支持することを特徴とするワーク支持装置。   (3) In the workpiece support device according to (1) or (2), the workpiece support member has a spherical portion at a position where the workpiece abuts the workpiece, and supports the workpiece via the spherical portion. A workpiece support device.

(4)前項(1)ないし(3)のいずれかに記載のワーク支持装置において、前記支持台は前記ワーク支持部材の配設位置にT字状溝を有し、前記ワーク支持部材は一端にT字状部を有し、前記ワーク支持部材は、前記T字状部が前記T字状溝に嵌合して、前記支持台に配設されることを特徴とするワーク支持装置。   (4) In the workpiece support device according to any one of (1) to (3), the support base has a T-shaped groove at a position where the workpiece support member is disposed, and the workpiece support member is at one end. A work support apparatus, comprising a T-shaped part, wherein the work support member is disposed on the support base with the T-shaped part fitted into the T-shaped groove.

本発明によれば、ワークのバタつきを抑えるとともに、火災が発生する可能性をさらに低減することができるワーク支持装置を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, while suppressing the flutter of a workpiece | work, the workpiece | work support apparatus which can further reduce possibility that a fire will generate | occur | produce can be provided.

本発明を実施するための最良の形態を、以下の実施形態を例に説明する。   The best mode for carrying out the present invention will be described with reference to the following embodiments.

ただし、この実施形態に記載されている構成部品の寸法、材質、形状、その相対配置等は、特に特定的な記載がない限りは、この発明の範囲をそれらのみに限定する趣旨のものではない。   However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention only to those unless otherwise specified. .

本実施形態においては、板材加工機としてのレーザ加工機に本発明のワーク支持装置を適用した場合を例にして説明する。   In the present embodiment, a case where the work support device of the present invention is applied to a laser processing machine as a plate material processing machine will be described as an example.

まず、図4を用いてレーザ加工機の概略構成を説明する。図4はレーザ加工機の概略構成図である。図4において、水平な1つの方向をx軸方向とし、水平な他の1つの方向であって、x軸方向に垂直な方向をy軸方向とし、鉛直方向をz軸方向とする。   First, a schematic configuration of the laser processing machine will be described with reference to FIG. FIG. 4 is a schematic configuration diagram of the laser processing machine. In FIG. 4, one horizontal direction is an x-axis direction, another horizontal direction is a direction perpendicular to the x-axis direction is a y-axis direction, and a vertical direction is a z-axis direction.

レーザ加工機1は、ベース部材2を有し、ベース部材2の上側にはワークWを載置可能な板状のテーブル3(支持台)が設けられている。また、ベース部材2の一端部側には上方向に起立して延伸しているポスト4が一体的に設けられ、ポスト4の上端部側には、テーブル3の上方で延伸しているオーバーヘッドビーム5が一体的に設けられている。   The laser processing machine 1 has a base member 2, and a plate-like table 3 (support base) on which a workpiece W can be placed is provided on the upper side of the base member 2. Further, a post 4 standing and extending upward is integrally provided on one end portion side of the base member 2, and an overhead beam extending above the table 3 on the upper end portion side of the post 4. 5 is provided integrally.

テーブル3は、水平方向(x軸方向およびy軸方向)に延伸している平面状部位を有し、この平面状部位にワークWを載置可能なようになっている。さらに、平面状部位には、所定の間隔をあけてz軸方向に延伸した後述するワーク支持部材が配設されており、このワーク支持部材によってワークWを支持するようになっている。   The table 3 has a planar portion extending in the horizontal direction (x-axis direction and y-axis direction), and the workpiece W can be placed on the planar portion. Further, a workpiece support member, which will be described later, is provided in the planar portion and is extended in the z-axis direction with a predetermined interval, and the workpiece W is supported by the workpiece support member.

テーブル3の一端部側には、x軸方向へ伸びたx軸ガイドレール6が設けられており、このx軸ガイドレール6には、x軸方向に伸びたx軸キャリッジ7がx軸方向に移動自在に設けられ、x軸キャリッジ7は例えば不図示の制御モータ等によってx軸方向に移動位置決めされるようになっている。また、x軸キャリッジ7はワークWを把持可能なクランプ装置8A、8Bを有する。ワークWはクランプ装置8A、8Bに把持されて、x軸キャリッジ7が移動することで、x軸方向に移動される。   An x-axis guide rail 6 extending in the x-axis direction is provided on one end side of the table 3, and an x-axis carriage 7 extending in the x-axis direction is provided on the x-axis guide rail 6 in the x-axis direction. The x-axis carriage 7 is movably provided and is positioned in the x-axis direction by, for example, a control motor (not shown). The x-axis carriage 7 has clamping devices 8A and 8B that can grip the workpiece W. The workpiece W is gripped by the clamp devices 8A and 8B and moved in the x-axis direction by moving the x-axis carriage 7.

オーバーヘッドビーム5には、y軸方向へ長く伸びた不図示のy軸ガイドレールが設けられており、y軸ガイドレールには、y軸キャリッジ9がy軸方向に移動自在に設けられ、y軸キャリッジ9は例えば不図示の制御モータ等によって、y軸方向に移動位置決めされるようになっている。   The overhead beam 5 is provided with a y-axis guide rail (not shown) extending long in the y-axis direction. The y-axis guide rail is provided with a y-axis carriage 9 movably in the y-axis direction. The carriage 9 is moved and positioned in the y-axis direction by a control motor (not shown), for example.

また、y軸キャリッジ9には、上方向からレーザ光をワークWに照射可能なレーザ加工ヘッド10が設けられており、レーザ加工ヘッド10は不図示のz軸ガイドレールを介して、y軸キャリッジ9に対して上下方向(z軸方向)に移動自在に設けられ、例えば不図示の制御モータ等によって、z軸方向に移動位置決めされるようになっている。   The y-axis carriage 9 is provided with a laser processing head 10 capable of irradiating the workpiece W with laser light from above. The laser processing head 10 is connected to the y-axis carriage via a z-axis guide rail (not shown). 9 is provided so as to be movable in the vertical direction (z-axis direction), and is moved and positioned in the z-axis direction by, for example, a control motor (not shown).

そして、x軸キャリッジ7、y軸キャリッジ9等を適宜稼動することによりワークWをレーザ加工ヘッド10に対して相対的に移動させつつワークWにレーザ光を照射してワークWに加工を施すことができるようになっている。   Then, the workpiece W is irradiated with laser light while the workpiece W is moved relative to the laser processing head 10 by appropriately operating the x-axis carriage 7, the y-axis carriage 9, and the like, thereby processing the workpiece W. Can be done.

続いて、本実施形態のワーク支持装置におけるワーク支持部材について詳細に説明する。   Then, the workpiece | work support member in the workpiece | work support apparatus of this embodiment is demonstrated in detail.

図1はワーク支持装置の概略図、図2はy軸方向から見たワークWをワーク支持装置に載置した状態を示す模式図である。   FIG. 1 is a schematic diagram of a workpiece support device, and FIG. 2 is a schematic diagram showing a state in which a workpiece W viewed from the y-axis direction is placed on the workpiece support device.

本発明のワーク支持部材100は薄板状であり、その平面部分がワークWの移動方向(x軸方向)に向くようにテーブル3に配設されている。   The workpiece support member 100 of the present invention is a thin plate, and is disposed on the table 3 so that the plane portion thereof faces the moving direction (x-axis direction) of the workpiece W.

本実施形態におけるワーク支持部材100は、図1に示すように長方形形状の薄板であり、複数のワーク支持部材100が、その平面部分がワークWの移動方向に向き、且つその長辺がワークWと当接するように、所定の間隔をもって互いに平行にテーブル3に配設されている。   As shown in FIG. 1, the workpiece support member 100 in the present embodiment is a rectangular thin plate, and the plurality of workpiece support members 100 have their planar portions directed in the moving direction of the workpiece W, and their long sides as the workpiece W. Are arranged on the table 3 in parallel with each other at a predetermined interval.

また、ワーク支持部材100の長辺部分のワークWが当接する側には、所定の間隔をもって、複数の切り欠き部101が設けられている。切り欠き部101において、ワーク支持部材100はワークWから退避しており、これにより、レーザ加工ヘッド10からワークWに対して照射されたレーザ光によってワーク支持部材100が切断されるのを回避することができる。切り欠き部101の位置、数、大きさ等はワークWのレーザ加工に合わせて、適宜変更することができる。   In addition, a plurality of notches 101 are provided at a predetermined interval on the side where the workpiece W abuts on the long side portion of the workpiece support member 100. In the notch 101, the work support member 100 is retracted from the work W, thereby preventing the work support member 100 from being cut by the laser light applied to the work W from the laser processing head 10. be able to. The position, number, size, and the like of the notch 101 can be changed as appropriate in accordance with the laser processing of the workpiece W.

ワーク支持部材100の材質は、前述のようにその平面部分がワークWの移動方向に向くようにテーブル3に配設された状態で、ワークWの移動に伴って変形可能な程度の弾性を備え、またワークWよりも硬度が低く、難燃性あるいは不燃性のものである。例えば、ワーク支持部材100は金属製である。   The material of the work support member 100 is elastic enough to be deformed as the work W is moved in a state where the plane portion of the work support member 100 is disposed on the table 3 so that the plane portion faces the movement direction of the work W as described above. Also, the hardness is lower than that of the workpiece W, and it is flame retardant or non-flammable. For example, the workpiece support member 100 is made of metal.

続いて、本実施形態のワーク支持装置のワーク支持動作について説明する。   Next, the work support operation of the work support apparatus of this embodiment will be described.

ワークWをワーク支持部材100上に載置させた場合には、図2に示すように、複数のワーク支持部材100の頂部がワークWに当接して、ワークWを支持することとなる。ワークWをx軸方向に移動させた場合には、ワーク支持部材100はワークWの移動に伴って弾性変形する。したがって、ブラシと同様にして、移動するワークWを支持することができる。また、ワークWにドロスのような局所的な突出部Waが存在する場合については、突出部Waに当接するワーク支持部材100が突出部Waの高さ分だけ弾性変形して撓むため、突出部Waによる高さ変化を吸収することができる。   When the workpiece W is placed on the workpiece support member 100, the tops of the plurality of workpiece support members 100 come into contact with the workpiece W to support the workpiece W as shown in FIG. When the workpiece W is moved in the x-axis direction, the workpiece support member 100 is elastically deformed as the workpiece W is moved. Therefore, the moving workpiece W can be supported in the same manner as the brush. Further, in the case where the workpiece W has a local protruding portion Wa such as dross, the workpiece supporting member 100 that contacts the protruding portion Wa is elastically deformed and bent by the height of the protruding portion Wa. The height change due to the portion Wa can be absorbed.

また、ワーク支持部材100は前述のように難燃性あるいは不燃性の材質であり、またその構造上、素線を束ねて構成されるブラシとは異なり、毛細管現象によるグリース等の油分の吸い上げがない。   Further, the work support member 100 is made of a flame-retardant or non-flammable material as described above, and, unlike a brush constructed by bundling strands, the work support member 100 absorbs oil such as grease by capillary action. Absent.

したがって、本実施形態のワーク支持装置によれば、ワークのバタつきを抑えるとともに、火災が発生する可能性をさらに低減することができる。   Therefore, according to the workpiece support device of the present embodiment, it is possible to suppress the flutter of the workpiece and further reduce the possibility of fire.

なお、本実施形態においては部品点数を減らして交換等を容易にするために、ワーク支持部材として長方形形状で長辺部分に切り欠き部を設けた薄板を用いた。しかしながら、ワーク支持部材の形状としては特に本実施形態のものに限定されるものではなく、薄板状でワークWの移動に伴なって弾性変形可能なものであればよい。例えば本実施形態におけるワーク支持部材の切り欠き部において完全に切り離されたような正方形形状のワーク支持部材をテーブルに配設するようにしてもよい。   In the present embodiment, in order to reduce the number of components and facilitate replacement, a thin plate having a rectangular shape and having a notch in the long side portion is used as the work support member. However, the shape of the workpiece support member is not particularly limited to that of the present embodiment, and may be any thin plate that can be elastically deformed as the workpiece W moves. For example, a square workpiece support member that is completely cut off at the cutout portion of the workpiece support member in the present embodiment may be arranged on the table.

(他の実施形態)
本発明のワーク支持装置の他の実施形態を、図3を用いて説明する。図3はy軸方向から見たワーク支持装置の概略部分図である。
(Other embodiments)
Another embodiment of the workpiece support device of the present invention will be described with reference to FIG. FIG. 3 is a schematic partial view of the workpiece support device viewed from the y-axis direction.

図3に示すように、他の実施形態としては、ワーク支持部材100の頂部に断面円形の当接部102を設け、ワーク支持部材100を、該当接部102を介してワークWと当接させ、ワークWを支持するようにしてもよい。これにより、ワーク支持部材100によりワークWに傷が付く可能性をさらに低減することができる。   As shown in FIG. 3, as another embodiment, a contact portion 102 having a circular cross section is provided on the top of the work support member 100, and the work support member 100 is brought into contact with the work W via the corresponding contact portion 102. The workpiece W may be supported. Thereby, the possibility that the workpiece W is damaged by the workpiece support member 100 can be further reduced.

また、テーブル3のワーク支持部材配設位置にT字状溝113を設け、ワーク支持部材100の一端にT字状溝113に対応するT字状部103を設け、テーブル3のT字状溝113にワーク支持部材100のT字状部103を嵌合して、ワーク支持部材100をテーブル3にスライドさせて取り付ける構成としてもよい。これにより、ワーク支持部材100のテーブル3への着脱が容易となり、ワーク支持部材100の交換等を容易に行うことができる。   Further, a T-shaped groove 113 is provided at the work support member disposition position of the table 3, a T-shaped portion 103 corresponding to the T-shaped groove 113 is provided at one end of the work support member 100, and the T-shaped groove of the table 3 is provided. The T-shaped portion 103 of the work support member 100 may be fitted to 113 and the work support member 100 may be slid and attached to the table 3. Thereby, the workpiece support member 100 can be easily attached to and detached from the table 3, and the workpiece support member 100 can be easily replaced.

第1の実施形態に係るワーク支持装置の概略図Schematic of the workpiece support device according to the first embodiment ワークをワーク支持装置に載置した状態を示す模式図Schematic diagram showing the state where the workpiece is placed on the workpiece support device 他の実施形態に係るワーク支持装置の概略部分図Schematic partial view of a workpiece support device according to another embodiment レーザ加工機の概略構成図Schematic configuration diagram of laser processing machine

符号の説明Explanation of symbols

W ワーク
1 レーザ加工機
3 テーブル(支持台に対応)
100 ワーク支持部材
101 切り欠き部
102 球状部
103 T字状部
W Work 1 Laser processing machine 3 Table (support table)
100 Work support member 101 Notch 102 Spherical part 103 T-shaped part

Claims (4)

板材加工機により加工されるワークを支持するワーク支持装置において、
前記ワークが載置される支持台と、
前記支持台に配設される薄板状のワーク支持部材を備え、
前記ワーク支持部材は、その平面部分が前記ワークの移動方向に向くように設けられ、ワークの移動に伴って弾性変形可能であることを特徴とするワーク支持装置。
In the work support device that supports the work processed by the plate material processing machine,
A support table on which the workpiece is placed;
A thin plate-like workpiece support member disposed on the support base,
The workpiece support device, wherein the workpiece support member is provided such that a plane portion thereof faces in a movement direction of the workpiece, and is elastically deformable with the movement of the workpiece.
請求項1に記載のワーク支持装置において、
前記ワーク支持部材は、前記ワークと当接する側に、切り欠き部を有することを特徴とするワーク支持装置。
The workpiece support apparatus according to claim 1,
The workpiece support device, wherein the workpiece support member has a notch on a side in contact with the workpiece.
請求項1又は2に記載のワーク支持装置において、
前記ワーク支持部材は、前記ワークと当接する位置に断面円形の当接部を有し、該当接部を介してワークを支持することを特徴とするワーク支持装置。
In the workpiece support apparatus according to claim 1 or 2,
The work support device has a contact section with a circular cross section at a position where the work support member comes into contact with the work, and supports the work via the contact section.
請求項1ないし3のいずれかに記載のワーク支持装置において、
前記支持台は前記ワーク支持部材の配設位置にT字状溝を有し、
前記ワーク支持部材は一端にT字状部を有し、
前記ワーク支持部材は、前記T字状部が前記T字状溝に嵌合して、前記支持台に配設されることを特徴とするワーク支持装置。
The workpiece support apparatus according to any one of claims 1 to 3,
The support base has a T-shaped groove at the position where the work support member is disposed,
The workpiece support member has a T-shaped portion at one end,
The workpiece support device, wherein the workpiece support member is disposed on the support base with the T-shaped portion fitted into the T-shaped groove.
JP2007237992A 2007-09-13 2007-09-13 Workpiece supporting apparatus Withdrawn JP2009066624A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
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Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013180220A1 (en) 2012-05-31 2013-12-05 旭硝子株式会社 Alkali-free glass substrate and method for reducing thickness of alkali-free glass substrate
WO2013183681A1 (en) 2012-06-07 2013-12-12 旭硝子株式会社 Alkali-free glass and alkali-free glass plate using same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013180220A1 (en) 2012-05-31 2013-12-05 旭硝子株式会社 Alkali-free glass substrate and method for reducing thickness of alkali-free glass substrate
KR20150028230A (en) 2012-05-31 2015-03-13 아사히 가라스 가부시키가이샤 Alkali-free glass substrate and method for reducing thickness of alkali-free glass substrate
WO2013183681A1 (en) 2012-06-07 2013-12-12 旭硝子株式会社 Alkali-free glass and alkali-free glass plate using same

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