JP2009058924A - Lighting system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lighting system using a metal halide arc tube or an extra-high pressure mercury arc tube generating the limit of a using method in illumination/light exposure industrial field, used limiting an emission direction only to a horizontal or vertical direction, and having a dispersion of illuminance or the like. <P>SOLUTION: This lighting system uses a light source unit wherein the emission direction is regulated to an optional angle along the horizontal or vertical direction, under the condition where an electrode axis of the arc tube is kept substantially horizontal, and wherein one part of a plurality of recesses in a reflecting mirror outer circumferential end part is matched and assembled respectively with one part of protrusions of reflecting mirror fixing tool, to match an illuminance difference. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an illuminating device mainly using visible light, and an illuminating device mainly used for curing an adhesive using an ultraviolet light portion or a mask pattern exposure process.

So-called high-intensity lamps such as metal halide lamps and ultra-high pressure mercury lamps are used as liquid crystal projectors, rear-projection projections, store lighting, and fiber lighting that use the visible light part. Further, it is also used for curing an adhesive using an ultraviolet light portion or for an exposure process.
In particular, in response to the recent demand for larger LCD color TVs and plasma TVs, larger LCD color filter substrates and plasma display substrates are also required, and these exposure processes require the need for highly efficient and compact light source devices. Conventionally, efforts have been made to increase the output of the light source device itself or to increase the overall output and efficiency by using a plurality of light source devices.

Hereinafter, the background art of the present invention will be described in detail with reference to FIGS.
The configuration of the conventional light source lamp 7 shown in FIG. 5 is composed of a reflecting mirror 7-1a, a light emitting tube 7-1b, a scatter-preventing front glass, a power input connector with a lead wire, and the like 7-1c, and is parallel to the optical axis. Of course, predetermined electric power is supplied from the power connector to the arc tube arranged in the above.

The lamp 7 can be lit by an AC lighting system or a DC lighting system. The lamp 7 is connected to an anode electrode and a cathode electrode (both electrodes in the case of AC lighting) and supplied with predetermined power from the power input connector. An arc discharge parallel to the optical axis between the two electrodes (horizontal direction when horizontally installed as shown in the figure) occurs between the electrodes and lights up.
The arc discharge of the lamp is most stable in the horizontal direction and can be maintained for a long time, and the inclination limit is said to be within 10 degrees up and down, and the installation method is limited.

  Furthermore, the inside of the light-emitting tube, which is characterized as a general metal halide lamp or an ultra-high pressure mercury lamp, has a high temperature and pressure as high as 3000 ° C. and 200 atmospheres, and is constantly in danger of breakage and explosion.

  In order to keep the lamp 7 lit safely, prevent damage and prevent explosion, it is necessary to manage the optimum temperature of the upper and lower parts of the 7-1bA arc tube and the front and rear parts 7-1bB. Adjustment of the cooling flow to the lamp and selection of the correct arc tube installation angle are essential conditions. Of course, if it is mistaken, it can cause immediate damage and explosion, and there are restrictions on the usage conditions.

FIG. 5A shows a schematic usage example of the vertical irradiation method which is particularly demanded in the industrial world.
In a conventional lamp having a configuration installed in parallel with the optical axes 7XF and 7XB, in order to eliminate the cause of breakage and explosion, the lamp 7 is arranged with the optical axes 7XF and 7XB horizontally (parallel to the optical axis) as shown in this figure. A method of vertically irradiating a desired irradiation surface 7-2b using the reflecting mirror 7-2a is employed.

6 and 6-1, in order to use a plurality of lamps 7 as an exposure light source device, the lamps 7 are juxtaposed along a predetermined spherical curved surface on a metal housing, and Each of them is configured to be held and attached to a back cover 7-1e provided with a support casing 7-1n and a duct 7-1p which are arranged so that the optical axis direction is substantially vertical.
In general, a fly-eye lens group 7-1g is provided in front of the light path 7-1d in the traveling direction of ultraviolet light or the like. Of course, each of the lamps 7 used for the exposure is fixed to a reflector film treatment or a front face glass of a lamp reflector, which is coated with a filter to cut visible light of about 450 nanometers or more on the front surface of the lamp reflector. And is appropriately mounted and arranged in the support housing 7-1n.

FIG. 7 shows a schematic optical path diagram of an exposure apparatus generally employed as an exposure light source.
The optical path 7-1d of ultraviolet light or the like emitted from the light source device is appropriately disposed or directly passes through the fly-eye lens group 7-1g for obtaining the optical path direction freely, and is appropriately reflected as a first reflection for changing the optical path. The mirror 7-1h, the second reflecting mirror 7-1j, and the like reach the exposure surface 7-1k and can arbitrarily obtain necessary exposure illuminance.

  Even in the above configuration, the exposure lamp 7 is turned on, the air is cooled inside the support housing 7-1n used for fixing and cooling the lamp, and the duct 7-1p provided on the back surface of the support housing 7-1n. From the above, an air blower or the like that sucks or blows an appropriate amount of air so that the arc tube 7-1b can be safely turned on and an optimum temperature of each part of the arc tube upper and lower portions 7-1bA and 7-1bB is obtained. A cooling water circulation pump or the like is appropriately arranged and installed so as to be appropriately arranged, and further to cool part or all of the support housing 7-1n with water.

  Utilizing metal halide arc tubes and ultra-high pressure mercury arc tubes, which are said to increase the light source output, comply with environmental protection and energy saving policies, and have a brightness 10 times higher than that of conventional light sources such as halogen lamps. Proposals have been made, of course, but in order to obtain the necessary optical path such as vertical illumination, it is necessary to equip at least one prism or reflector, and a special space for passing the optical path is required. In both cases, the use of the light source beam is limited only in the horizontal direction, which hinders expansion of use.

  Further, the metal halide arc tube and the ultra-high pressure mercury arc tube are high-pressure and high-temperature lamps and have a large individual difference, and each drive power source is a light source having a large individual difference. In order to use these light sources as a lighting device alone or in a plurality or more, it is necessary to keep the overall illuminance constant, and this illuminating device that should be provided in a state where constant illuminance quality is maintained is efficient. There is also a need for solutions for manufacturing operations and effective operation and management measures for effective illumination standards.

  Furthermore, the present invention solves the above-mentioned problems and uses the high-luminance arc tube, etc., for example, based on Japan, Japanese Patent Application Laid-Open No. 2005-234471, etc. The object is to provide a lighting device that maintains a constant illuminance quality and provides a light emitting angle freely, and a visible light illumination device, an ultraviolet light illumination device, and the like that meet a reasonable economic price.

  At least a reflector made of a material having a greater heat dissipation effect than a glass material, for example, a reflector made of an aluminum base material formed by a so-called die casting method, and a light source comprising an arc tube, and the arc tube and the reflector A light source with a large heat dissipation effect consisting of a mirror is set as one unit, and one or more of these light sources are mounted, and a desired region is irradiated with an arbitrary angle or a lens or a fly-eye lens group is disposed in a desired region, The emission direction of each of the light sources is adjusted so that the light emitted from the light source device irradiates the front surface of the lens or fly-eye lens group directly.

  A part of the light source holder provided inside the illumination device is provided with a plurality of convex portions, and a plurality of concave portions are provided at the outer peripheral end of the reflecting mirror, which are aligned and combined with each of the concave and convex portions. By doing so, it matches the specifications defined in advance.

According to the first to sixth aspects of the present invention, even if a prism or a reflecting mirror is not required, it can be used in a vertical light path and in a direct illumination state, and irradiation and exposure can be easily performed in the horizontal and vertical directions.
In addition, the optical path such as ultraviolet light emitted from a light source composed of one unit or more in a vertical installation type (substantially directly under the optical path) (except for a fly-eye lens group or a lens for obtaining an arbitrary irradiation area) In addition, it is unnecessary to use the extremely expensive first reflecting mirror for changing the optical path angle, the second reflecting mirror, etc., and the number of parts can be reduced and the cost can be greatly reduced.
Also, by providing each light source with the arc tube electrode axis approximately horizontal maintenance mechanism, optical axis position changing mechanism and focal position changing mechanism, the illuminance (light quantity) can be increased and decreased and the irradiation direction can be changed instantly, leading to increased production efficiency. It is also economical.
Moreover, it can be mounted without a basic modification as an alternative to the light source unit of an already-exposed illumination device in operation or a used exposure illumination device.
In addition, a low-cost FAN provides sufficient heat dissipation even with a single wind or natural wind, enabling stable irradiation and exposure, eliminating the need for conventional water-cooling devices, ducts and exhaust devices, and reducing the number of parts. In addition, the cost can be significantly reduced and the installation angle can be set freely.
In addition, a support housing having a large spherical curvature is not required, and of course, the cost can be significantly reduced.

  A plurality of concave portions at the outer peripheral end of the reflector and a plurality of convex portions of the light source holder inside the illuminating device are aligned and combined with each of the concave and convex portions, so that each driving power source of the light source and the arc tube solid It is possible to match the difference in illuminance, more easily align the optical axis, easily define the special specification category defined in advance and the specification category by destination, and when replacing the light source, it is not possible to attach light sources other than those specified by this lighting device, It can be used as a lighting device that can avoid danger from bursting and breakage.

    A light source device having a U-shaped angle having a structure in which a concave portion on the outer periphery of the reflecting mirror open surface and a convex portion on the outer periphery of the light source holder with an optional through hole for passing light are attached and joined, and a pair of rotating holders are provided. One unit, one unit or a plurality of these light sources are mounted, the emitted light from the light source device juxtaposed substantially directly below is directly irradiated to a desired region, or a fly-eye lens group is arranged in a desired region, In this configuration, the emission direction of each light source can be adjusted so that the light emitted from the light source irradiates the front surface of the fly-eye lens group or the like.

  By constructing at least a plurality of concave portions of a part of the outer peripheral end of the reflecting mirror and at least a plurality of convex portions of a part of the light source holder in the lighting device, a difference in illuminance can be obtained by combining a plurality of the concave portions. It is a form that can be matched.

1 to 4 are schematic views showing an embodiment of an illuminating device capable of matching the illuminance by freely setting the installation angle in the present invention.
Applications of the present invention are mainly for store lighting that uses visible light, light sources for fiber lighting, light sources for night work, and liquid crystal colors that use ultraviolet light for exposure and adhesive curing that uses ultraviolet light. It is used for mask pattern exposure processes in industrial applications such as filters, plasma displays, and printed circuit boards.
Particularly, in the present invention, a configuration example of the illumination device for the exposure process will be described.

FIG. 1 is a perspective view of a light source used in the present invention, and FIG. 1-1 is a cross-sectional view including a light source holder 1-3 on a YY cross section of the light source of FIG. Hereinafter, the light source having the configuration shown in FIG. 1-1 is referred to as a light source device 1.
The light source device 1 includes a reflecting mirror 1-1a, a light-emitting tube 1-1b, a filter-preventing shatter-preventing front glass, a power input connector with a lead wire, etc. 1-1c, and of course a predetermined power supply unit and control for obtaining irradiation light. Control from the department is equipped with connection.
The light source device 1 formed of a material having at least a heat radiation effect than the glass material is reflected in order to control the optimum temperature of each part of the arc tube upper and lower parts 1-1bA and the front and rear parts 1-1bB at an appropriate specification temperature. In addition to the pair of electrode portions of the arc tube 1-1b in the mirror 1-1a, the fin 1 is appropriately provided in the light source device 1 with a structure capable of adjusting the amount of cooling air flow around the arc tube 1-1b. -1e is a natural air cooling or light wind level, a temperature detection mechanism that maintains the optimum temperature of the upper and lower portions of the arc tube 1-1b, 1-1bA arc tube, and the front and rear portions of the arc tube 1-1bB for a long time and an appropriate temperature management airflow direction The structure is provided with adjustment.

  Furthermore, in the light source device 1 of FIG. 1-1 according to the present invention, the electrode axis of the pair of arc tubes 1-1b on the 1-1a reflector base portion is substantially perpendicular to the optical axes 1XF and 1XB (in FIG. Arranged substantially vertically). That is, FIG. 1 and FIG. 1-1 are configuration examples in which the emission direction of the light beam 1-1d is installed in the horizontal direction while maintaining the arc tube electrode axis substantially horizontal.

  Further, in FIGS. 1 and 1-1, a plurality of recesses 1-2-1, 1-2-1, 1-2 are formed in a part of the outer peripheral end of the open surface of a part of the reflecting mirror 1-1 a of the light source device 1. 2-3, 1-2-4... Are appropriately provided, and as shown in the cross-sectional view of FIG. A plurality of convex portions 1-3a-1, (hereinafter 1-3a-2, 1-3a-3, 1-3a-4 are not shown),... In the case of 1, the uneven portions (fitting portions) are aligned and combined, and the optical axis (1XF-1XB) is on the common center line (of course on the center line of the light source) of the reflecting mirror 1-1a and the light source holder 1-3. ) And the light source and the light source holder 1-3 are detachably fixed.

In the above configuration, FIGS. 1-2 and 1-3 show a configuration example of the light source device 2 that can irradiate downward (vertically) without the above-described barrier.
1-2 shows a configuration in which the light source device 1 is fixedly equipped with a U-shaped angle 1-4 and a pair of rotating holders 1-4a, etc., and can be freely installed at a rotation angle as indicated by an arrow 1-4b. The figure shows an example of a light source device in a state where it can be irradiated horizontally. (However, the light source holder 1-3 is not shown). Needless to say, the 1-4 angle shape is not limited to the U-shape but may be an arbitrary shape such as a pair of L-shaped upper angles.

Further, FIG. 1-3 shows a state in which a light source matched and combined with the light source holder 1-3 with a pair of rotating holders 1-3b is mounted on the U-shaped angle 1-4 and is integrated with the light source device 1. It is an Example of the light source device 2 which shows.
This figure, of course, shows a cross-sectional view in a state where the rotation angle of the 1-4b arrow described in FIG. 1-2 is 90 degrees (vertically downward), and the light ray 1-1d is a desired irradiation surface 1- It reaches 1k vertically.
As described above, the light source device 2 irradiates the light source reflecting mirror open surface vertically downward while maintaining the light source arc tube electrode axis substantially horizontal, and the special prism for changing the optical path. This is an embodiment in which a necessary optical path can be obtained without being restricted by a restriction within 10 degrees above and below the installation of the optical axis, which is a problem, without the need to equip a mirror or reflector.

  Further, according to the present invention, when it is desired to irradiate at an arbitrary desired angle, the light source tube electrode axis is maintained in a substantially horizontal state, for example, by the rotary holder integrated with the light source device 2 described above, for example, By adjusting the rotation angle to a desired angle as shown by the 1-4b arrow, it becomes an illuminating device capable of arbitrarily adjusting the light beam 1-1d emission angle and solves the above-mentioned problems.

In the configuration example, the shape of the concave portion 1-2-1,... At the outer peripheral end of the reflecting mirror open surface is a through hole, a notch or the like, and the shape of the convex portion 1-3a-1,. In order to adapt to the through hole, the notch, etc., a protrusion or a male screw tip having a male / female screw configuration may be used, and it may be fixed or detachable by appropriate screwing adjustment, and may be combined appropriately.
Further, according to the plurality of male screw configurations, there is a feature that can be applied as a delicate optical axis adjusting mechanism of each light source.
Furthermore, the above-described uneven portion (fitting portion) installation location in the above configuration example may be any location where the pair of the light source device reflecting mirror portion and the light source holder are attached to each other.

The concave / convex (fitting portion) combination of the concave portion 1-2-1 and the convex portion 1-3a-1 is configured such that the outer peripheral end portion 1-2-1 of the reflecting mirror is a convex portion and the light source holder 1-3a-1 is a concave portion configuration. You can also do it.
Moreover, in the concave / convex combination of the concave portion 1-2-1 and the convex portion 1-3a-1, the concave portion that is not used is filled with a heat-resistant resin, cement, or the same base material as the reflecting mirror, and the convex portion is appropriately Needless to say, they can be added and deleted, and combined with each other.
Of course, the uneven structure can be applied not only to the light source device but also to a combination of a conventional glass reflector and a metal / resin reflector.

  As described above, it has been explained that the performance of so-called high-efficiency metal harad lamps and ultra-high pressure mercury lamps, especially in terms of illuminance, has great variations in individual differences. As for the illuminance, the shipping standard within 10% up and down is reasonable and is also the limit. On the other hand, with regard to the drive power supply, in particular, even in the so-called power control type drive power supply that is controlled by the lamp voltage and the lamp current, the output variation is also reasonable and the limit is 10%.

  In the above development and manufacturing technology background, in particular, in order to obtain a certain illuminance quality by using a plurality of light sources as lighting devices, so-called illuminance ranking of light sources and so-called illuminance ranking of lighting devices (particularly on the drive power source side). • Requires alignment.

以上の通り、前記反射鏡外周端凹部１−２−１・・・と前記光源ホルダ凸部１−３ａ−１・・・の構成による整合組み合わせは、それぞれの個体差バラツキを解消し、製造管理上も、更には出荷後の運営・管理にも有効に機能し、市場には照度一定の品質で供せられる実施例である。For example, a light source obtained with an intermediate illuminance of 100, an upper limit illuminance of 110, a lower limit illuminance of 90, and an illumination device that can obtain the intermediate illuminance of 100, an illumination device that can obtain the upper limit of illuminance of 110, and an illumination that can obtain the lower limit of illuminance The device is 90.
Further, the concave portion 1-2-3 is adapted to a light source having an intermediate illuminance of 100, the concave portion 1-2-4 is adapted to a light source having an upper limit illuminance of 110, and the concave portion 1-2-2 is adapted to a lower limit illuminance of 90. As an example of the arrangement of use, the classification is made to suit each light source.

As described above, the matching combination according to the configuration of the outer peripheral edge concave portion 1-2-1... And the light source holder convex portion 1-3a-1. Further, the embodiment functions effectively for operation and management after shipment, and is provided in the market with a constant illuminance quality.

Conventionally, a light source, that is, an outermost peripheral part of a so-called lamp, and a set of concave and convex portions are usually aligned with the optical axis. However, the dimensional accuracy is not sufficiently obtained, and the optical axis is shifted.
According to the present invention, of course, the optical axes of all the light sources are the plurality of concave portions 1-2-1... Of the light source and the plurality of convex portions 1-3a-1. The optical axis does not change even if it is aligned with each other, so by using a plurality of concave and convex portions, sufficient dimensional accuracy can be obtained, optical axis alignment and fixed positioning can be easily performed with little deviation. You can also.

  Furthermore, the lighting device of the present invention utilizes the plurality of concave portions and the plurality of convex portions when a customer special specification (custom specification) classification, a so-called 100-volt region or a 200-volt region, etc. are requested for shipment. By defining combinations in advance, convenience is provided for manufacturing, operation, and safety management.

Even in the present lighting device, the light source life (so-called lamp life) or damage occurs, and the lighting device is designated as a replacement light source (so-called designated replacement lamp), but there is a light source with a similar shape other than the designated light source. It will also be on the market.
If these light sources are installed incorrectly, they can cause rupture and damage due to illuminance variations and inconsistencies, resulting in serious problems.
However, according to the present invention, in light sources other than those designated by the present lighting device, the convex portions of the light source holder are not aligned and cannot be mounted, and it is significant from the viewpoint of safety to avoid the risk of rupture and breakage. It is an illuminating device that can adjust the illuminance by adjusting the installation angle freely.

1-4 shows a perspective view of a light source device designed in consideration of horizontal and vertical emission angles using so-called plural light sources, and is provided in 1-5 multi-lamp type fixed frame example 1. FIG.
That is, the light source has a configuration in which a plurality of light sources can be mounted by a mounting method similar to that of the light source holder 1-3, and the convex portion 1-3a provided in the peripheral portion of the light-transmitting through hole 1-3t for each light source. Of course, -1... Is adapted to the recesses 1-2-1.
FIG. 1-5 is a cross-sectional view in which the light source device 1 or the light source device 2 is mounted in FIG.
As shown in the figure, irradiation is performed with the arc tube electrode axis of the light source device maintained substantially horizontal, and the 2-1k irradiation surface is irradiated horizontally.
Of course, when vertical illumination is necessary, the 1-5 multi-lamp type fixed frame example 1 is tilted downward (vertically) to illuminate downward, and the arc tube electrode axis of the light source device is maintained in a substantially horizontal state. Needless to say, it can be irradiated (vertical direct).

It is no exaggeration to say that all of the conventional lighting devices using the ultra-high pressure mercury lamp or the like described above or the light source unit are all fixed, and there is a great desire for horizontal and vertical lighting devices. there were.
According to the present invention, as described in detail in FIGS. 1-2 and 1-3, a desired area can be irradiated simply by tilting the open surface of the 1-5 multi-lamp type fixed frame example 1 downward (vertical), The prism and the reflecting mirror 7-2a are not required at all, and the irradiation light is also an embodiment of a high-efficiency direct irradiation method in which the amount of light is not attenuated in a direct irradiation state.
Of course, in the present invention, the open surface of the multi-lamp type fixed frame example 1 may be combined with or unnecessary for other devices, and only the plurality of light source devices may be mounted. According to this, it becomes an illuminating device that can freely obtain an arbitrary emission angle and can perform illuminance matching.

FIG. 2 is a cross-sectional view of an embodiment for an ultraviolet illumination apparatus that requires high energy such as exposure as described above.
This embodiment is fixed to a 1-6t multi-lamp light source holder example 1 for the purpose of irradiating or condensing a desired area using a plurality of light sources, and the multi-lamp light source holder example 1 is further an example of a 1-7 multi-lamp fixed frame. 2 is fixed to the light source device.
The plurality of light sources are respectively mounted on the light source holder 1-6t that has been previously processed to have an arbitrary shape so as to irradiate a desired region, and each light beam 1-1d is transmitted through a front lens or a fly-eye lens group 1-. Irradiate or collect 6g.
FIG. 3 is a cross-sectional view of an embodiment for lighting such as a so-called baseball field or stadium.
In this embodiment, a plurality of light sources are fixed to 1-6t-1 other multi-lamp light source holder example 2 processed into an arbitrary shape so as to irradiate a desired area. -7-1 It is fixed to another multi-lamp fixed frame example 3 and has a light source device integrated configuration.
The plurality of light sources are respectively mounted on the 1-6t-1 other multi-lamp light source holder example 2 having an arbitrary shape so as to irradiate a desired area in advance, and each light beam 1-1d is a front Fresnel lens or the like 1- Wide range irradiation is performed on 6g-1.
Of course, the configuration example of the light source device is for the purpose of irradiating all the light source devices in the same direction. Needless to say, it can be freely installed in any direction, and it is convenient, and it is possible to adjust the difference in illuminance and depolarize it.

FIG. 4 shows an embodiment of the present invention that replaces the apparatus configuration shown in FIGS. 5 and 6 as an application for exposure.
That is, in the embodiment of the present invention, for example, as described with reference to FIG. 2, the light source unit housing 3 is configured by one unit or a plurality of units with the 1-7 multi-lamp fixed frame example 2 as one unit.
The light source unit housing 3 is provided in a part of an exposure illumination device or the like, and tilts and irradiates a predetermined region from a predetermined position, that is, vertically irradiates as shown in FIG. If the light is condensed on the fly-eye lens group 1-6g, the light reaches the irradiation surface 2-1k and is exposed.
The above is also a typical embodiment of the vertical installation type (substantially directly below optical path), which is a feature of the present invention, and the conventional method of horizontal installation type, which has been a major problem, and the so-called horizontal direction (light Axis) There is no limit restriction within 10 degrees above and below, and it can be used as a lighting device that can adjust the illuminance by freely adjusting the so-called installation angle intended by the present invention, and mass production is also possible by unitizing in small units The reduction in cost and the reduction in weight are also convenient because the life-expanding light source and replacement work at the time of rupture / breakage can be simplified.
Needless to say, the present invention is not limited to the unitization of the 1-7 multi-lamp fixed frame example 2 described above, and a plurality of the light source devices can be integrated into one unit (for example, the same number of used light sources as in FIGS. 5 and 6). Needless to say,

In addition, ultra-high pressure mercury lamps and the like generally have a light intensity (illuminance) attenuation of about 40% after about 2000 hours from the initial lighting to the end of life, and usually a constant light intensity (illuminance) of about 80%. The operation and management of the exposure apparatus and the like are performed while adjusting and setting as necessary.
However, by using the illuminance matching and installation angle adjustable type illuminating device according to the present invention, some light source devices are arranged as initial non-lighting, the number of lighting is increased with the passage of lighting time, and the overall illuminance It can be configured to keep constant or increase / decrease illumination.

Furthermore, when it is necessary to change the irradiation intensity or irradiation direction depending on the type of material to be exposed, the exposure apparatus has become complicated, large and non-conventional, such as moving the material to a separate exposure apparatus or adding a separate process. It was both efficient and uneconomical.
However, according to the present invention, in order to increase or decrease the illuminance and change the irradiation direction in a short time, the light source device 2 or a part of the light source device has a mechanism that can maintain the electrode axis of the arc tube substantially horizontal and the optical axis. Arbitrarily adding a position change mechanism and focal position change mechanism to reduce illumination, increase illumination, or change illumination direction, etc. It is also connected and economical.

  As described above, the illuminating device according to the present invention is also characterized in that it can be mounted at low cost without any major modification as a substitute for an already-exposed light source device or a used exposure light source device as described above.

  Further, the advantages of the vertical installation type (substantially directly under the optical path) will be described with reference to FIG. 4. The optical path 1-1d such as ultraviolet light emitted by the vertical installation type (substantially directly under the optical path) is a lens or fly-eye lens. Except for the group 1-6g, at least the extremely expensive first reflecting mirror, the second reflecting mirror, etc. are unnecessary, reach the exposure surface 2-1k, and the necessary exposure illuminance can be obtained arbitrarily. Needless to say, cost reduction is a universal installation angle proving device.

Further, the industry demand for the entire exposure apparatus is that it is an inexpensive light source apparatus for exposure that can obtain a small amount of light with high efficiency and illuminance. Therefore, the lamp 7 described with reference to FIGS. A water cooling apparatus or a blower including a circulation pump for dissipating high heat inside the support housing 7-1n, which is juxtaposed along a predetermined curved surface and which is emitted from each and arranged so that the optical axis direction is substantially vertical A back cover 7-1e provided with a duct 7-1p that requires equal incidental facilities and an exhaust device were required.
The light source device 2 described above, which replaces the conventional lamp 7, can be used alone or in a small size as well as in a breeze or a natural wind, so that a sufficient heat radiation effect can be obtained, and a highly efficient light quantity and illuminance can be obtained. The configuration of one or more light source devices juxtaposed in such a way as to be directly under the optical path is an illuminating device that eliminates the need for the above-mentioned expensive incidental equipment, reduces the number of parts, and significantly reduces the cost.

5 and 6 are arranged side by side along a predetermined curved surface on a metal housing, and in order to extract the heat radiation effect, the optical axis of each lamp is collected on a fly-eye lens group. However, it is forced to be made of an aluminum material having a large spherical curvature, but it requires a large machine tool or the like for processing, and its processing cost is extremely expensive.
The light source device according to the present invention is configured so as to obtain a high-efficiency light amount and illuminance even in a small wind or natural wind as well as a small size, and particularly when a plurality of light source devices are used. The light axis can be arbitrarily adjusted to a desired position with a simple structure that gives the light source holder and the multi-lamp fixed frame the desired predetermined tilt angle, and each light source device can be arbitrarily tilted and condensed on the fly-eye lens group. It is an illumination device capable of matching the illuminance by freely adjusting the installation angle as well as reducing the number of parts and significantly reducing the cost.

The perspective view of the light source device by this invention is shown. It is the Example sectional view which comprised the light source holder in the YY surface cross section of the light source device 1 by this invention. FIG. 1A is a perspective view of an embodiment showing a configuration example of a light source device that has the function of the light source device of FIG. 1 and can be installed at a rotational angle freely by a U-shaped angle and a pair of rotary holders. FIG. 3 is a cross-sectional view of an embodiment of the light source device 2 according to the present invention, which is integrated with the light source device and includes a pair of light source holders with a rotation holder in addition to the embodiment of FIG. The perspective view of the illuminating device which used the light source device by this invention two or more and was designed in consideration of output angles, such as horizontal and vertical, is shown. 1-4 according to the present invention is a cross-sectional view with the light source device 2 and the like attached thereto. It is Example sectional drawing for the ultraviolet light illuminating devices which require high energy, such as exposure by this invention. FIG. 3 is a cross-sectional view of an embodiment of the present invention for lighting such as a so-called baseball field or stadium. FIG. 7 is a schematic optical path diagram showing an embodiment of the present invention that replaces the apparatus configuration shown in FIGS. 5 and 6 as an exposure application. It is sectional drawing which shows the conventional light source lamp. It is the schematic as a conventional downward (vertical) irradiation Example. It is the schematic which showed the front as an Example which shows the conventional multi-lamp type light source device. It is the schematic which showed the cross section as an Example which shows the conventional multi-lamp type light source device. It is the schematic showing the schematic optical path figure of the conventional exposure apparatus.

Explanation of symbols

[FIG. 1] [FIG. 1-1] [FIG. 1-2] [FIG. 1-3] [FIG. 1-4] [FIG. 1-5]
1 Light source device 1
1-1a Reflector 1-1b Arc tube 1-1bA Same as above / upper part 1-1bB Same as above / front and rear part 1-1c Power input connector with lead wire, etc. 1-1d Optical path such as ultraviolet light 1-1e Fin 1-1k irradiation Surface 1XF Optical axis 1XB Optical axis 1X Horizontal line 1Y Vertical line 1-2-1 Reflector recess 1
1-2-2 Reflector recess 2
1-2-3 Reflector recess 3
1-2-4 Reflector recess 4
1-3 Light source holder example 1
1-3a-1 Reflector fixture convex part 1
1-3a-2 Reflector mirror fixture convex part 2
1-3a-3 Reflective mirror fixture convex part 3
1-3a-4 Reflector mirror fixture convex part 4
1-3b A pair of rotating holders, etc. 1-3t Arbitrary through-holes for passing light 1-4 U-shaped angle 1-4a A pair of rotating holders 1-4b, etc. Arrows indicating the direction of rotation 1-5 Multi-lamp type fixed frame Example 1
[Fig. 2] [Fig. 3]
1-6t multiple light source holder example 1
1-6t-1 Other multiple lamp light source holder example 2
1-6g lens and fly-eye lens group 1-6g-1 Fresnel lens, etc. 1-7 Multi-lamp fixed frame example 2
1-7-1 Other multi-lamp fixed frame example 3
[Fig. 1-3] [Fig. 4]
2 Light source device 2
2-1k Irradiation surface 3 Light source housing [Fig. 5] [Fig. 5-1] [Fig. 6] [Fig. 6-1] [Fig. 7]
7 Conventional lamp 7-1a Reflector 7-1b Arc tube 7-1bA Same as above / upper / lower part 7-1bB Same as above / front / rear part 7-1c Power input connector with lead wire, etc. 7-1d Optical path such as ultraviolet light 7-1e Back cover 7-1g Fly-eye lens group 7-1h First reflecting mirror 7-1j Second reflecting mirror 7-1k Exposure surface 7-1n Support housing 7-1p Duct 7XF Optical axis 7XB Optical axis 7-2a Prism and reflecting mirror 7 -2b Irradiation surface

Claims (10)

  An illuminating device in which a light source device in which an arc tube electrode axis is arranged substantially at right angles to an optical axis of light emitted from the reflecting mirror base material portion is formed on a reflecting mirror base material portion formed of a material having at least a heat radiation effect than a glass material The light source device has a structure in which the outer peripheral end fitting part of the reflecting mirror open surface and the paired fitting part of the outer peripheral arrangement of the light source holder with an optional through hole for passing light are attached and joined, and a pair of rotating holders are provided. The light source device 2 is provided with an angle, and the light emission direction of the light source device 2 can be adjusted to an arbitrary angle such as a horizontal direction and a vertical direction while maintaining the light source arc tube electrode axis substantially horizontal. An illumination device that can adjust the illuminance by allowing the emission angle to be adjusted freely.   One or more light source devices in which the arc tube electrode axis is arranged substantially perpendicular to the optical axis of light emitted from the reflecting mirror base material portion on the reflecting mirror base material portion formed of a material having at least a heat dissipation effect than the glass material The light source device has a structure in which each of the reflecting mirror open surface outer peripheral end fitting portions and each pair of fitting portions of the light source holder outer peripheral arrangement with arbitrary through holes for passing light are attached and joined. Then, fixed to the light source holder that has been tilted in advance for the purpose of condensing in a desired region, and further, the light source holder is fixed to a multi-lamp fixed frame, with the light source arc tube electrode axis maintained in a substantially horizontal state, An illumination device capable of adjusting an illuminance by allowing an emission angle to be freely emitted, wherein a light emission direction is irradiated toward a desired region by the inclined light source holder.   The illuminating device according to claim 1 or 2, wherein the light source device and the light source of the light source device 2 are one or more in a state where the arc tube electrode axes of the light source device and the light source device 2 are maintained substantially horizontal. An illuminating device characterized in that the emission direction is arranged so as to emit a light beam toward a desired region located substantially downward.   The illuminating device according to any one of claims 1 to 3, wherein the reflector substrate of the light source device or the like controls the optimal lighting state of the arc tube by natural air cooling or light wind cooling, and includes a plurality of reflector temperature detection mechanisms, An illuminating device characterized in that the air volume of each of the light source devices can be adjusted.   The illumination device according to any one of claims 1 to 4, wherein a lens, a fly-eye lens group, or the like is disposed in a desired region, and light beams emitted from the one or a plurality of light source devices 2 are applied to the lens, the fly-eye lens group, or the like. An illuminating device characterized by being arranged to collect or irradiate.   An exposure apparatus comprising the illumination device according to claim 1, wherein a mask pattern is formed by ultraviolet light emitted from the light source device and the light source device 2.   7. The illumination device according to claim 1, comprising an arc tube electrode axis substantially horizontal maintaining mechanism, an optical axis position changing mechanism, and a focal position changing mechanism, and an instantaneous illuminance (light quantity) increasing / decreasing function and an instantaneous irradiation direction changing function. Provided lighting device.   At least a plurality of fitting portions are provided in a part of the outer peripheral end portion of the light source device and the reflecting mirror of the light source device 2, and at least a plurality of the fitting portions on the outer peripheral arrangement of the light source holder with an optional through hole for passing light. An illuminating device characterized in that the illuminance difference matching between the so-called illuminating device (the light source holder) and the lamp (reflecting mirror side) can be achieved by providing the above-described fitting portions and matching and combining with each of the reflecting mirror fitting portions.   The lighting device according to claim 1, wherein the reflector fitting portion and the pair fitting portion of the light source holder outer peripheral arrangement with the optional through hole for passing light are aligned and combined with each other, thereby easily aligning the optical axis. A lighting device that can be fixedly positioned.   Composed of the lighting device according to claim 1, wherein the reflector fitting portion and the pair fitting portion of the light source holder outer peripheral arrangement with an optional through hole for passing light are respectively combined and defined in advance by being combined with each other, Lighting equipment characterized by special specification classification and specification classification by destination.

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