JP2009056532A - Automatically cleaned filter device, and automatically cleaned machining-liquid filtering device of working machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an automatically cleaned miniaturized filter device, by which a part of machining liquid supplied from a pump is filtered and fed out of a filtered machining liquid outlet and the rest of machining liquid used for cleaning the filter is fed out from a cleaning machining liquid outlet. <P>SOLUTION: Machining liquid supplied to a filter chamber is swirled by a spiral member to be fed out to the outside from the cleaning machining liquid outlet through a restrictor while following a spiral path around a cylindrical outer circumferential surface of the filter. The pressure of the machining liquid flowing on the cylindrical outer circumferential surface of the filter rises thereby, and a part of the machining liquid is filtered by the filter to flow thereinto and fed out of the filtered machining liquid outlet. Cutting chips, fixed when a part of machining liquid is filtered through a number of fine holes drilled in a cylindrical thin plate of the filter, are washed away by the rest of machining liquid spirally flowing on the cylindrical outer circumferential surface of the filter and are discharged from the cleaning machining liquid outlet, so that the filter is automatically cleaned. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an automatic cleaning filter device that automatically cleans a filter for filtering a processing fluid that is circulated in a processing machine, and an automatic cleaning filtration of the processing fluid in a processing machine using the automatic cleaning filter device. It relates to the device.

Patent Document 1 describes a self-cleaning filter for cutting oil that constantly cleans a filter provided in the middle of a flow path to reuse cutting fluid in a cutting machine to prevent clogging. According to this, the used cutting fluid is collected in the primary tank, and the used cutting fluid pumped up from the primary tank by the coolant pump is supplied to the self-cleaning filter. This self-cleaning filter is provided with a flow passage 12 that is inclined downward from the upstream side toward the downstream side, and a filter 14 is disposed on the upper portion of the flow passage wall, and passes through the filter 14 from the flow passage 12. Part of the filtered cutting fluid after use is sent to the secondary tank, and is supplied from the secondary tank to the cutting machine by the high-pressure pump 5. The remaining portion of the used cutting fluid flowing along the flow path 12 is returned to the primary tank while foreign matter such as chips adhering to the lower surface of the filter 14 is allowed to flow to automatically wash the filter 14.
Japanese Unexamined Patent Publication No. 7-124844 (paragraphs [0007] to [0011] and [FIG. 1])

  However, in the cutting oil self-cleaning filter described in Patent Document 1, the discharge chamber 17 and the sludge chamber 13 are not completely separated by the filter 14, so that the pressure is increased by filling the filter case 10 with the cutting fluid. If it does, the cutting fluid before and behind filtration by the filter 14 will mix. Therefore, the cutting fluid filtered by the filter 14 cannot be directly supplied from the discharge chamber 17 to the cutting machine via the outlet port 19 but needs to be supplied by the high-pressure pump 12 or the like. Further, since the inclined flow passage 12 is formed in a straight line, there is a problem that the apparatus becomes large.

  The present invention has been made to solve the above-mentioned problems, and a part of the processing liquid supplied from the pump is filtered by the filter and sent out from the filtered processing liquid delivery port, and the remaining processing liquid after washing the filter is obtained. It is an object of the present invention to provide a self-cleaning filter that can be miniaturized and sent out from a cleaning processing liquid outlet.

  In order to solve the above problems, the structural feature of the invention according to claim 1 is that a case main body in which a cylindrical filter chamber is formed in a liquid-tight manner and a cylinder in which a large number of fine holes are formed. A filter in which both ends of the thin plate are fixed to an upper plate and a lower plate, and the cylindrical thin plate is disposed in a spiral manner between a cylindrical inner peripheral surface of the filter chamber and a cylindrical outer peripheral surface of the filter. A spiral member fixed to the case body, and the upper plate of the filter is connected to the upper end surface of the filter chamber via a connecting portion in a state where the lower plate of the filter is separated from the lower end surface of the filter chamber. A processing liquid supply port that is fixed and faces the upper end of the spiral member and opens into the filter chamber and is supplied with a processing liquid from a pump is formed in the upper portion of the case body, and the connecting portion and the upper plate Penetrated through A filtration liquid outlet is formed in the upper wall of the case body so as to communicate with a flow path that opens inside the filter, and opens in the filter chamber so as to face the lower end of the spiral member. A cleaning liquid feed port for communicating the filter chamber with the outside through a restriction is formed in the lower portion of the case body.

  The structural feature of the invention according to claim 2 is that, in claim 1, the filter, the spiral member, and the filter chamber are arranged on a coaxial line, and an outer periphery of the spiral member is an inner peripheral surface of the filter chamber. The inner periphery of the spiral member is opposed to the cylindrical thin plate of the filter with a gap.

  A structural feature of the invention according to claim 3 is that, in claim 1 or 2, the processing liquid supply port is opened at the upper end surface of the filter chamber, and the lower end surface of the filter chamber is formed in a conical concave surface. The cleaning process liquid outlet is opened at the center bottom of the conical concave surface.

  The structural feature of the invention according to claim 4 is that the workpiece attaching / detaching device is mounted on a bed and the workpiece is attached / detached, and the workpiece attaching / detaching device for processing the workpiece with the attached tool. A tool base that is moved relative to the tool, a machining fluid nozzle that supplies a machining fluid filtered to a machining point where the tool processes the workpiece, and machining on the bed to wash away chips generated by machining. A cleaning processing liquid nozzle for supplying a liquid, a tank for collecting the processing liquid nozzle and the processing liquid flowing out from the cleaning processing liquid nozzle, and a pumping of the processing liquid recovered in the tank through a strainer The automatic cleaning filter device according to any one of claims 1 to 3, wherein the automatic cleaning filter device comprises a pump that supplies the nozzle to the machining liquid nozzle through a filter. The working fluid supply port connected to said pump, filtered machining liquid outlet connected to the machining fluid nozzle is cleaned working fluid outlet that is connected to the cleaning machining fluid nozzle.

  In the invention according to claim 1 configured as described above, the machining fluid supplied from the pump to the filter chamber via the machining fluid supply port is swirled by the spiral member to spirally move around the cylindrical outer peripheral surface of the filter. While being sent out from the cleaning liquid feed outlet through the throttle. As a result, the pressure of the machining fluid flowing on the cylindrical outer peripheral surface of the filter fixed in the cylindrical filter chamber increases, and a part of this machining fluid is filtered by the filter and flows into the filter, and the filtered machining fluid delivery port Is sent from. Then, foreign matter such as chips adhering when a part of the processing liquid is filtered through the fine holes formed in the cylindrical thin plate of the filter, the remaining residue flows spirally around the outer peripheral surface of the filter. Since it is washed away by the processing liquid and discharged from the cleaning processing liquid delivery port, the filter is automatically cleaned, and the number of cleaning steps for the filter can be greatly reduced.

  At this time, the machining fluid supplied from the machining fluid supply port and the filtered machining fluid delivered from the filtration fluid delivery port are separated by a filter in a liquid tightly formed filter chamber. The processing liquid delivered from the processing liquid outlet and the cleaning processing liquid outlet can be pumped to a higher position than the automatic cleaning filter device without using another pump. Furthermore, an automatic cleaning filter device that can be miniaturized with an extremely simple configuration in which a spiral member is disposed between the inner circumferential surface of the filter chamber and the outer circumferential surface of the filter so as to surround the filter is provided at low cost. be able to.

  In the invention according to claim 2, the filter, the spiral member, and the filter chamber are arranged on the coaxial line, the outer periphery of the spiral member is in contact with the inner peripheral surface of the filter chamber, and the inner periphery of the spiral member is the cylinder of the filter. The processing fluid supplied from the pump to the filter chamber is effectively swirled by the spiral member and cleaned while smoothly moving around the cylindrical outer peripheral surface of the filter. It is sent to the outside from the machining fluid outlet through a throttle. Accordingly, a part of the machining liquid can be efficiently filtered by the filter, and the filter can be effectively automatically washed with the remaining part of the machining liquid.

  In the invention according to claim 3, the machining liquid supply port is opened at the upper end surface of the filter chamber, the lower end surface of the filter chamber is formed in the conical concave surface, and the cleaning liquid feeding port is opened at the center bottom of the conical concave surface. Therefore, the machining fluid supplied to the filter chamber in the axial direction toward the upper end of the spiral member is effectively swirled by the spiral member to smoothly spiral around the cylindrical outer peripheral surface of the filter and the conical concave surface. It moves and is sent to the outside through the restrictor from the cleaning liquid delivery port. Accordingly, a part of the machining liquid can be efficiently filtered by the filter, and the filter can be effectively automatically washed with the remaining part of the machining liquid.

  In the invention according to claim 4, the used working fluid recovered from the processing machine to the tank is pumped up by the pump through the strainer, and is supplied to the filter chamber through the working fluid supply port. The machining fluid is swung by the spiral member and is sent from the washing machining liquid delivery port to the washing machining liquid nozzle through the throttle while spirally moving around the cylindrical outer peripheral surface of the filter. The pressure of the machining fluid flowing on the outer peripheral surface of the filter cylinder in the filter chamber increases due to the squeezing resistance, a part of the machining fluid is filtered by the filter, flows into the filter, and is sent to the machining fluid nozzle from the filtered machining fluid outlet. The Since the machining fluid supplied to the machining point where the tool processes the workpiece needs to be filtered, the machining fluid filtered by the filter is supplied from the machining fluid nozzle to the machining point via the filtered machining fluid delivery port. Lubricate and cool the machining points. Foreign matter such as chips adhering when a part of the machining fluid is filtered through the fine holes drilled in the cylindrical thin plate of the filter is washed away by the remaining machining fluid flowing along the cylindrical outer surface of the filter. The cleaning liquid supply nozzle supplies the cleaning liquid supply nozzle to the cleaning liquid supply nozzle. As a result, the filter is automatically cleaned and the filtered working fluid can be stably supplied to the processing point for a long time, so that it is possible to prevent processing accuracy failure and equipment stoppage due to chips, Cleaning man-hours can be reduced. Since the processing liquid for washing away the chips such as the bed does not need to be filtered, the unfiltered processing liquid delivered from the cleaning processing liquid delivery port is supplied from the cleaning processing liquid nozzle, for example, onto the bed. Wash away chips, etc.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing an overall configuration of an automatic cleaning filter device 12 in a processing machine equipped with a machining center 11 that is an automatic cleaning filter device 10, and FIG. 2 shows an automatic cleaning filter device 10. FIG.

  In the machining center 11, a work table 14 is mounted on a bed 13 so as to be slidable in the X-axis direction perpendicular to the paper surface of FIG. 1, and a workpiece 15 is detachably fixed to the upper surface by a jig. The work table 14 and the jig constitute a workpiece attaching / detaching device that is mounted on the bed and the workpiece is attached / detached.

  A column 16 is slidably mounted on the bed 13 in the Z-axis direction, which is the left-right direction in FIG. 1, and a spindle head 17 is slidably mounted on the column 16 in the Y-axis direction, which is the vertical direction. . A spindle 18 that is rotationally driven by a motor is rotatably supported on the spindle head 17, and a tool 19 is detachably attached to the tip of the spindle 18. The work table 14, the column 16, and the spindle head 17 are moved in the X-axis, Z-axis, and Y-axis directions by ball screws driven by a servo motor (not shown). The spindle head 17, the spindle 18, and the like constitute a tool base that is moved relative to the workpiece attaching / detaching device in order to process the workpiece with the mounted tool.

  A machining fluid nozzle 20 for supplying the machining fluid filtered to a machining point where the tool 19 processes the workpiece 15 is attached to the spindle head 17 toward the tip of the tool 19. A cleaning processing liquid nozzle 21 for supplying a processing liquid onto the table 14 and the bed 13 is fixed on the table 14 in order to wash away the chips generated by the processing. The machining fluid that has flowed out of the machining fluid nozzle 20 and the cleaning fluid nozzle 21 flows into a machining fluid channel formed on the upper surface of the bed 13 by washing away foreign matters such as chips on the table 14 and the bed 13. It is recovered in the tank 23 from the recovery port 22 formed at the lowest point. The processing liquid collected in the tank 23 is pumped up by a pump 25 through a strainer 24 and supplied to an automatic cleaning filter device 10 described later.

  As shown in FIG. 2, the automatic cleaning filter device 10 includes a case main body 31 in which a cylindrical filter chamber 30 is formed in a liquid-tight manner, a filter 32 fixed in the filter chamber 30, and a filter chamber. A spiral member 33 is provided between the inner peripheral surface of the cylinder 30 and the outer peripheral surface of the filter 32 so as to surround the filter 32 and is fixed to the case body 31.

  The case body 31 includes a cylindrical body 34, and an upper lid 35 and a lower lid 36 that seal the upper end portion and the lower end portion of the cylindrical body 34, respectively. The filter chamber 30 is liquid-tightly formed inside by being closed by the lower lid. The upper lid 35 has a flange portion 37 and a fitting portion 38. The fitting portion 38 is fitted to the upper end portion of the cylindrical body 34 via an O-ring 39, and the bolt 40 is inserted through the flange portion 37 in the axial direction. Is fastened to the upper end of the cylindrical body 34. A bottomed hole 41 having a depth from the end surface to the flange portion 37 is recessed in the fitting portion 38 on the axis. The lower lid 36 has a flange portion 42 and a fitting portion 43, and the fitting portion 43 is fitted to the lower end portion of the cylindrical body 34 via the O-ring 44 and is inserted through the flange portion 42 in the axial direction. 45 is fastened to the lower end of the cylindrical body 34. A conical concave surface 46 is formed on the end surface of the fitting portion 43 that forms the lower end surface of the filter chamber 30.

  The filter 32 is an ordinary one that is commercially available. For example, both ends of a cylindrical thin plate 47 having a large number of fine holes of 200 mesh are fixed to an upper plate 48 and a lower plate 49. A boss portion protruding from the center of the upper plate 48 has a through hole opened in the filter 32, that is, in the center of the cylindrical thin plate 47, and a pipe taper female screw engraved in the through hole is formed in the boss portion. A tapered male thread for a lower pipe is screwed into a pipe joint 51 in which a tapered male thread for a pipe is engraved at both ends and a flow path 50 is formed through the axis.

  The upper cover 35 that forms the upper wall portion of the case body 31 is formed with a filtration fluid delivery port 52 that opens on the bottom surface of the bottomed hole 41, penetrating on the axis, and is engraved in the filtration fluid delivery port 52. The upper pipe taper male thread of the pipe joint 51 is screwed to the pipe taper female thread. Thereby, the upper plate 48 of the filter 32 is fixed to the upper end surface of the filter chamber 30 via the pipe joint 51 in a state where the lower plate 49 of the filter 32 is separated from the lower end surface 46 of the filter chamber 30. . The filtered processing liquid delivery port 52 is drilled through the pipe joint 51 and the upper plate 48 and communicates with the flow path 50 opened inside the filter 32.

  The filter 32 and the spiral member 33 are arranged coaxially in the filter chamber 30, the outer periphery of the spiral member 33 abuts on the cylindrical inner peripheral surface of the filter chamber 30, and the inner periphery of the spiral member 33 is the cylinder of the filter 32. It faces the thin plate 47 with a gap. The spiral member 33 is formed by bending a pipe material in a spiral shape, and is sandwiched between both end surfaces of the fitting portions 38 and 42 of the upper lid 37 and the lower lid 36, and one end of the pipe material is fitted on the fitting portion 38 of the upper lid 37. It is engaged with a hole drilled in the end face to prevent rotation.

  53 is a machining fluid supply port through which the machining fluid is supplied from the pump 25, and is drilled through the edge of the upper lid 35 in the axial direction. The upper end surface of the filter chamber 30 faces the upper end of the spiral member 33. Open. Reference numeral 54 denotes a cleaning liquid feed outlet that communicates the filter chamber 30 to the outside through the restriction 55, and opens at the center bottom of the conical concave surface 46 that is the lower end surface of the filter chamber 30.

  Then, the machining fluid supply port 53 of the automatic cleaning filter device 10 is connected to the pump 25 by a pipe, the filtration processing fluid delivery port 52 is connected to the machining fluid nozzle 20 by a pipe, and the washing processing fluid delivery port 54 is cleaned. A pipe is connected to the liquid nozzle 21.

  Next, the operation of the above embodiment will be described. The spindle 18 on which the tool 19 is mounted is rotationally driven by a motor, the spindle head 17 and the work table 14 are relatively moved, and the workpiece 15 is cut by the tool 19. At this time, a part of the processing liquid pumped up by the pump 25 is filtered by the automatic cleaning filter device 10, the processing liquid is supplied from the processing liquid nozzle 20 to the processing point, and the processing point is lubricated and cooled to be on the bed 13. To flow down. The remaining processing liquid is washed on the filter 32 of the automatic cleaning type filter device 10 and supplied from the cleaning processing liquid nozzle 21 onto the work table 14, and foreign matters such as chips are washed off from the work table 14 and the bed 13 to the processing point. Along with the supplied processing liquid, it is recovered from the recovery port 22 to the tank 23.

  The used processing liquid recovered from the machining center 11 to the tank 23 is pumped up by the pump 25 through the strainer 24 and supplied to the filter chamber 30 through the processing liquid supply port 53 of the automatic cleaning filter device 10. The processing liquid is swung by the spiral member 33 and is sent to the cleaning processing liquid nozzle 21 from the cleaning processing liquid delivery port 54 through the restrictor 55 while spirally moving around the cylindrical outer peripheral surface of the filter 32.

  At this time, the filter 32, the spiral member 33, and the filter chamber 30 are arranged on the coaxial line, the outer periphery of the spiral member 33 abuts on the inner peripheral surface of the filter chamber 30, and the inner periphery of the spiral member 33 is Since it opposes the cylindrical thin plate 47 with a gap, the machining fluid supplied from the pump 25 to the filter chamber 30 is effectively swirled by the spiral member 33 and smoothly around the cylindrical outer peripheral surface of the filter 32. And the flow is improved by the conical concave surface 46 formed on the end surface of the fitting portion 43 of the lower lid 36, and is sent out from the cleaning processing liquid delivery port 54.

  The pressure of the machining fluid flowing on the cylindrical outer peripheral surface of the filter 32 in the filter chamber 30 is increased by the resistance of the restriction 55, and a part of the machining fluid passes through a large number of fine holes formed in the cylindrical thin plate 47 of the filter 32. It is filtered in between and flows into the filter 32, and is sent out from the filtered machining liquid delivery port 52 to the machining liquid nozzle 20. Since the processing liquid supplied to the processing point needs to be filtered, the processing liquid filtered by the filter 32 is supplied from the processing liquid nozzle 20 to the processing point via the filtered processing liquid delivery port 52.

  When a part of the processing liquid is filtered by the filter 32, foreign matters such as chips adsorbed in the fine holes of the cylindrical thin plate 47 are washed away by the remaining processing liquid flowing along the cylindrical outer peripheral surface of the filter 32. The cleaning liquid supply nozzle 21 supplies the cleaning liquid to the cleaning liquid supply nozzle 21. Thereby, the filter 32 is automatically cleaned, and the filtered working fluid can be stably supplied to the processing point for a long time. Thereby, while being able to prevent the processing precision defect and equipment stop resulting from a chip, the cleaning man-hour of the filter 32 can be reduced. Since the processing liquid for washing away the chips such as the bed may not be filtered, the non-filtered processing liquid sent from the cleaning processing liquid delivery port 54 is supplied to the cleaning processing liquid nozzle 21.

  In the automatic filtration apparatus for the processing machine, as an example, the flow rate from the pump 25 is 400 l / min. Is supplied to the automatic cleaning filter device 10, the pressure at the processing liquid supply port 53 becomes 0.05 MPa, and the flow rate from the filtered processing liquid delivery port 52 is 60 l / min. Then, the filtered machining fluid having a pressure of 0.045 Mpa is delivered, and the flow rate is 340 l / min. Then, the working fluid that washed the filter 32 having a pressure of 0.04 Mpa was sent out. The pressure loss due to the filter 32 was 0.002 Mpa.

  When the mesh of the fine holes drilled in the cylindrical thin plate 47 of the filter 32 is changed, the discharge amount of the pump 25 is adjusted. The ratio of the filtered machining fluid delivered from the outlet 52 and the machining fluid delivered from the cleaning machining fluid delivery outlet 54 is set appropriately to obtain the required amount of filtered machining fluid and to improve the filter 32 Can be washed.

  In the above embodiment, the spiral member is formed of a pipe material, but may be formed of resin or the like.

  Further, the throttle 55 is provided in the middle of the pipe connecting the cleaning processing liquid delivery port 54 to the cleaning processing liquid nozzle 21, but it may be provided in the cleaning processing liquid delivery port 54.

  Furthermore, the filter, the spiral member, and the filter chamber need only be arranged on substantially the same line, and the spiral member is arranged with a slight gap between the outer periphery and the inner peripheral surface of the filter chamber. May be.

The figure which shows the automatic washing type | formula filtration apparatus of the process liquid of the processing machine which concerns on this invention. Sectional drawing of an automatic cleaning filter device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Automatic washing type filter apparatus, 11 ... Machining center (processing machine), 12 ... Filtering apparatus of the process liquid in a processing machine, 13 ... Bed, 14 ... Work table, 15 ... Workpiece, 16 ... Column, 17 ... Spindle head, DESCRIPTION OF SYMBOLS 18 ... Main shaft, 19 ... Tool, 20 ... Processing liquid nozzle, 21 ... Cleaning processing liquid nozzle, 23 ... Tank, 24 ... Strainer, 25 ... Pump, 30 ... Filter chamber, 31 ... Case body, 32 ... Filter, 33 ... Spiral 34, cylindrical body, 35 ... upper lid, 36 ... lower lid, 37, 42 ... flange portion, 38, 43 ... fitting portion, 39, 44 ... O-ring, 46 ... conical concave surface, 47. ..Cylindrical thin plate, 48... Upper plate, 49... Lower plate, 50... Channel, 51... Pipe fitting (connection part), 52. ... Cleaning fluid outlet, 5 ... iris.

Claims (4)

A case body in which a cylindrical filter chamber is liquid-tightly formed; and
A filter in which both ends of a cylindrical thin plate having a large number of fine holes are fixed to an upper plate and a lower plate;
A helical member disposed between the cylindrical inner peripheral surface of the filter chamber and the cylindrical outer peripheral surface of the filter so as to spirally surround the cylindrical thin plate and fixed to the case body,
With the lower plate of the filter being separated from the lower end surface of the filter chamber, the upper plate of the filter is fixed to the upper end surface of the filter chamber via a connecting portion,
Opposing to the upper end of the spiral member is opened in the filter chamber, a machining liquid supply port through which a machining liquid is supplied from a pump is formed in the upper part of the case body,
A filtration fluid feed outlet is drilled in the upper wall portion of the case body so as to communicate with a flow path that is drilled through the connecting portion and the upper plate and opens inside the filter,
A cleaning process liquid delivery port that opens to the filter chamber facing the lower end of the spiral member and communicates the filter chamber to the outside through a throttle is formed in the lower portion of the case body. Automatic cleaning filter device. In claim 1,
The filter, the spiral member, and the filter chamber are arranged on a coaxial line,
The outer periphery of the spiral member is in contact with the inner peripheral surface of the filter chamber,
An automatic cleaning filter device, wherein an inner periphery of the spiral member is opposed to a cylindrical thin plate of the filter with a gap. In claim 1 or 2,
The working fluid supply port opens to the upper end surface of the filter chamber,
An automatic cleaning filter device, wherein a lower end surface of the filter chamber is formed in a conical concave surface, and the cleaning liquid feeding port is opened at a center bottom of the conical concave surface. A workpiece attachment / detachment device that is mounted on a bed and attaches / detaches the workpiece; a tool base that is moved relative to the workpiece attachment / detachment device to process the workpiece with the attached tool; A machining fluid nozzle for supplying a filtered machining fluid to a machining point for machining the workpiece; a cleaning fluid nozzle for supplying a machining fluid on the bed to flow chips generated by machining; and the machining fluid A tank that collects the working fluid that has flowed out of the nozzle and the cleaning processing fluid nozzle, and pumps the processing fluid recovered in the tank through a strainer and supplies the processing fluid to the cleaning processing fluid nozzle, and also through a filter. In a processing machine equipped with a pump that supplies a nozzle,
The processing fluid supply port of the automatic cleaning filter device according to any one of claims 1 to 3 is connected to the pump, a filtered processing fluid delivery port is connected to the machining fluid nozzle, and a cleaning processing fluid delivery port is provided. An automatic cleaning type filtration apparatus for processing liquid in a processing machine, wherein the processing liquid nozzle is connected to the cleaning processing liquid nozzle.

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