JP2009047358A - Oven, and manufacturing process of polymer film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an oven capable of uniforming a heat history of a heat reception object in an inner chamber. <P>SOLUTION: In the oven 1, a hot air inlet 13 is formed on a first side wall 4a. The inner chamber 4 formed with an air outlet 16, an outer chamber 6 surrounding the inner chamber, a heating means 8 being in a gap between the inner chamber and the outer chamber, an air blasting means 9 for passing hot air 12 into the inner chamber from the hot air inlet and recirculating it to the gap between the inner chamber and the outer chamber from the air outlet, a first air collecting plate 18 located around the hot air inlet and facing the hot air in an upstream side and an opposite side of the hot air in both sides of the hot air inlet, and a second air collecting plate 26 located in an upwind side of the hot air inlet, arranged along a circulating direction of the hot air, and facing each other are provided on a second side wall. An opening area of the hot air inlet is larger than an area of the heat reception object 100 projected on the first wall, and the hot air inlet is positioned so that a whole of the heat reception object fits in an inner side of the hot air inlet as seen from a direction perpendicular to the first side wall. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an oven and a method for producing a polymer film.

  A batch-type oven, which is a kind of oven, usually includes an inner tank and an outer tank containing the inner tank, and a heating unit and an air blowing unit adjacent thereto are provided in a gap between the inner tank and the outer tank. The gas in the oven is heated by the heating means, sent to the gap between the inner tub and the outer tub as hot air by the blowing means, passes through the inner tank through the vent provided in the inner tub, and then blown again. To reflux. Thus, a hot air circulation path (hereinafter referred to as a hot air circulation path) is formed in the oven. The object to be heated is installed in the inner tub and heated by hot air around the hot air circulation path.

  Conventionally, batch-type ovens that are easily available from the market have been provided with a number of hot air inlets on the upper side of the hot air in the inner tank. For this reason, the flow velocity of the hot air introduced into the inner tank tends to be relatively small, and further, the hot air velocity per hot air inlet (hereinafter referred to as hot air velocity) is not relatively uniform. Therefore, depending on the shape of the object to be heated installed in the inner tank, there is a disadvantage that the heat history given to the entire object to be heated tends to be uneven.

As an attempt to avoid such inconvenience, a batch in which a heater and a fan for circulating hot air are provided in a hot air circulation path connecting the gap between the outer tank and the inner tank and the inside of the inner tank in Patent Document 1 below. A batch-type oven is disclosed that includes a plurality of airflow direction plates that are provided along the vertical direction of the gap on the upstream side of the hot air circulation path and that can adjust the air direction of the hot air.
JP 2001-12870 A

  In the oven described in Patent Document 1, the uniformity of the hot air speed per hot air inlet is improved, but the hot air speed in the inner tank is not much different from that of a batch type oven available on the market. There was a tendency for the time required for heating to become longer. There is a limit to strengthening the air blowing means in order to improve the hot air speed, and there is a tendency that the energy consumption for heating increases. Also, simply increasing the hot air speed per hot air inlet by simply reducing the number of hot air inlets facilitates non-uniform hot air speed, resulting in a heat history of the heated object in the inner tank. There was a tendency for the material to be heated to become non-uniform and uneven heating. In particular, when the object to be heated is a polymer material, it is extremely difficult to maintain uniform characteristics of the finally obtained polymer product due to unevenness of thermal energy given to the polymer material. It was a problem that the tendency became more remarkable in the form of a sheet or film.

  The present invention has been made in view of the above problems, and an oven capable of making the thermal history of an object to be heated installed in the inner tank more uniform, and production of a polymer film using the oven It aims to provide a method.

  In order to achieve the above object, an oven according to the present invention includes an inner tank in which a hot air introduction port is formed in the first side wall and an exhaust port is formed in the second side wall opposite to the first side wall, and an outer chamber containing the inner tank. A heating means located in the gap between the tank, the inner tank and the outer tank, and a gas heated by the heating means located in the gap between the inner tank and the outer tank as hot air inside the inner tank through the hot air inlet A blowing means that passes through and is returned to the gap between the inner tub and the outer tub through the exhaust port, and is located around the hot blast inlet in the gap between the first side wall and the outer tub. The first air collecting plate facing the hot air on the side opposite to the upstream side, and located on the windward side of the hot air introduction port in the gap between the first side wall and the outer tub, are arranged along the circulation direction of the hot air and face each other A pair of second air collecting plates, and the opening area of the hot air inlet is the first to-be-heated object installed in the inner tank It is larger than the area projected on the wall, and the position of the hot air inlet is arranged so that the whole object to be heated is placed inside the hot air inlet as viewed from the direction perpendicular to the first side wall. To do.

  In the oven of the present invention, the hot air circulating around the hot air circulation path is efficiently guided to the hot air inlet side by the second air collecting plate, and the hot air is introduced from the hot air inlet port into the inner tank by the first air collecting plate. Since sufficient hot air is supplied to the inner tank, gas flow stagnation (stagnation of hot air) is suppressed, and the heat history of the object to be heated in the inner tank is made more uniform and stable. Can be made. Moreover, in the oven of the present invention, the air speed of the hot air supplied into the inner tank can be relatively increased even by the air blowing means provided in the conventional oven, so that it is necessary to heat the object to be heated. Time can be shortened. In the present invention, “the thermal history of the object to be heated is uniform” means that the temperature difference between the parts of the object to be heated is small, and the time change of the temperature of each part of the object to be heated is the same. It means that there is.

  In an oven that does not have such a wind collecting plate, hot air is not introduced into the inner tank from the hot air inlet, but the upstream side of the hot air across the hot air inlet in the gap between the first side wall and the outer tank. There was a possibility to escape to the space located on the opposite side. Therefore, there is a tendency that hot air stays in a space located on the opposite side of the hot air upstream side of the gap between the first side wall and the outer tub with the hot air introduction port interposed therebetween. As a result of investigation by the present inventor, it has been clarified that the hot air staying in the gap between the first side wall and the outer tank tends to make the thermal history of the object to be heated in the inner tank non-uniform. On the other hand, since the above-described air collecting plate is provided in the oven of the present invention, the occurrence of such a phenomenon is suppressed.

  Moreover, in the oven of the present invention, the opening area of the hot air inlet is larger than the area of the object to be heated installed in the inner tank projected on the first side wall, and the position of the hot air inlet is on the first side wall. Since the hot air is uniformly supplied to the entire heated object in the inner tank by arranging the heated object as viewed from the direction perpendicular to the inside of the hot air inlet, the heated object The uneven heating is suppressed.

  In the oven of the present invention, it is preferable that the first air collecting plate is inclined toward the windward side of the hot air inlet, and both ends of the first air collecting plate are viewed from a direction perpendicular to the first side wall. In addition, it is preferable to bend toward the windward side of the hot air inlet.

  Hot air is easily introduced into the hot air introduction port by tilting the first air collection plate toward the windward side of the hot air introduction port or bending both ends of the first air collection plate toward the windward side of the hot air introduction port. As a result, temperature overshoot can be suppressed during the temperature rising process in the inner tank, the temperature in the inner tank can be easily controlled within a predetermined range, and the heat history of the object to be heated in the inner tank is more uniform. And can be stabilized.

  In the oven of the present invention, it is preferable that the first air collecting plate is disposed along the edge of the hot air inlet when viewed from the direction perpendicular to the first side wall.

  By arranging the first air collecting plate along the edge of the hot air introduction port, the hot air can be more reliably introduced from the hot air introduction port into the inner tank.

  In the oven of the present invention, it is preferable that the distance between the pair of second air collecting plates is gradually narrowed toward the hot air inlet. As a result, hot air is more reliably supplied into the inner tank, and the heat history of the object to be heated in the inner tank can be made more uniform and stable.

  In the oven of the present invention, a space located on the opposite side to the upstream side of the hot air across the hot air introduction port in the gap between the first side wall and the outer tub is closed by the first air collecting plate and the second air collecting plate. It is preferable that

  As a result, hot air can be easily introduced from the hot air inlet to the inside of the inner tank without staying in the gap between the inner tank and the outer tank, and the heat history of the heated object in the inner tank can be made more uniform. And can be stabilized.

  The oven of the present invention preferably further includes a cylindrical third air collecting plate that surrounds the hot air inlet and protrudes from the first side wall into the inner tank. Moreover, it is preferable that the oven of the present invention further includes a louver located inside the cylindrical third air collecting plate.

  Hot air can be more reliably supplied to the object to be heated by the third air collecting plate and the louver.

  The method for producing a polymer film of the present invention comprises a step of winding a polymer film precursor to form a roll body, and heat-treating the roll body in the inner tank of the oven of the present invention, And a step of converting the precursor into a polymer film.

  By heat-treating the roll body in an inner tank having a uniform temperature distribution, the entire roll body is uniformly heated, and a polymer film having uniform characteristics without uneven heating can be obtained. In addition, for example, when aromatic liquid crystal polyester is used as a polymer film precursor, the temperature of the conventional tank overshoots during the temperature rising process in the conventional oven, and the resulting polymer film is partially thermally decomposed. In addition, there is a problem that the mechanical properties of the polymer film are greatly deteriorated even if thermal decomposition is not reached. However, when the oven of the present invention is used, such inconvenience can be satisfactorily avoided.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the oven which can make the thermal history of the to-be-heated material installed in the inner tank more uniform, and the manufacturing method of a polymer film using this oven. .

  Hereinafter, a suitable embodiment of the present invention will be described in detail with reference to the accompanying drawings 1 to 4 as appropriate. However, the present invention is not limited to the following embodiments. In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals, and redundant description is omitted. In addition, the dimensional ratio in each drawing does not necessarily match the actual dimensional ratio.

(oven)
The oven 1 of this embodiment includes an inner tub 4 and an outer tub 6 that encloses the inner tub 4. In the gap between the upper wall of the inner tank 4 and the upper wall of the outer tank 6, heating means (heater 8) and air blowing means (fan 9) are installed adjacent to each other. A work receiver 22 is provided inside the inner tank 4, and a cylindrical object to be heated (roll body 100) is installed on the work receiver 22.

  When the oven 1 is operated, the gas inside the inner tank 4 and the outer tank 6 is used as a heat medium. A gas heated by the heater 8 (hereinafter referred to as hot air) is sent out as a hot air 12 to the gap between the inner tank 4 and the outer tank 6 by the fan 9. The gas used as the heat medium can be appropriately changed depending on the material constituting the object to be heated. When the material constituting the object to be heated is relatively easily oxidized, the heating medium is preferably an inert gas such as nitrogen, argon, or neon. When the gas used as the heat medium is an inert gas, the air inside the inner tank 4 and the outer tank 6 may be temporarily replaced with an inert gas, and the interior of the oven 1 may be sealed. Alternatively, the inner tank 4 or the outer tank 6 may be provided with an intake hole and an exhaust hole, and a gas serving as a heat medium may be supplied from the intake hole and exhausted from the exhaust hole. In the embodiment provided with the intake hole and the exhaust hole as described above, the inside of the tank may be kept in a slightly pressurized state by adjusting the gas supply amount from the intake hole and the exhaust amount from the exhaust hole.

  A circular hot air inlet 13 is formed in the first side wall 4 a of the inner tank 4. The hot air inlet 13 is located on the leeward side of the fan 9 and the heater 8. A circular exhaust port 16 that faces the hot air inlet 13 is formed in the second side wall 4 b that faces the first side wall 4 a among the side walls of the inner tank 4.

  In the gap between the side wall 4 a and the outer tub 6, a first air collecting plate 18 is installed and fixed on the opposite side of the hot air 12 to the upstream side of the hot air introduction port 13. The first air collecting plate 18 faces the hot air 12 on the opposite side of the hot air 12 from the upstream side of the hot air introduction port 13. Therefore, the hot air 12 from the heater 8 toward the hot air introduction port 13 is introduced from the hot air introduction port 13 into the inner tank 4 by the first air collecting plate 18. The hot air 12 introduced into the inner tub 4 from the hot blast inlet 13 is discharged from the exhaust port 16 to the gap between the second side wall 4 b and the outer tub 6 after heating the roll body 100.

  The oven 1 is located on the upstream side of the hot air inlet 13 in the gap between the first side wall 4a and the outer tub 6, and is disposed along the circulation direction (hot air circulation path) of the hot air 12, and faces a pair of first Two air collecting plates 26 are installed and fixed. It is preferable that the first air collecting plate 18 and the second air collecting plate 26 are integrated to form an air collecting plate. Moreover, it is preferable that the distance between the pair of second air collecting plates 26 gradually decreases toward the hot air inlet 13. By gradually narrowing the distance between the pair of second air collecting plates 26 toward the hot air introducing port 13, the hot air 12 is concentrated on the hot air introducing port 13 by the pair of second air collecting plates 26. As a result, since sufficient hot air 12 is supplied into the inner tank 4, the object to be heated (roll body 100) can be heated extremely efficiently.

  The opening area of the hot air inlet 13 is a surface obtained by projecting the roll body 100 installed in the inner tub 4 onto the first side wall 4a (a cross section perpendicular to the long axis of the roll body 100; hereinafter referred to as a projection surface 100s). The roll body 100 is entirely inside the hot air inlet 13 when viewed from the direction perpendicular to the first side wall 4a (the direction connecting the center of the hot air inlet 13 and the center of the exhaust port 16). The hot air inlet 13 is disposed in the first side wall 4a (see FIG. 2). In this case, the long axis direction of the roll body 100 and the direction connecting the center of the hot air inlet 13 and the center of the exhaust port 16 coincide with each other. The direction of the hot air 12 supplied to the same also coincides. As a result, since the hot air 12 is uniformly supplied to the entire roll body 100, uneven heating of the roll body 100 is suppressed.

  Note that the opening area of the hot air inlet 13 may be configured as described above in relation to the area of the projection surface 100s, but two points are arbitrarily taken around the projection surface 100s and the two points are connected. The straight line is the first straight line, and when the first straight line is extended, the first straight line connects the two points intersecting the edge of the hot air inlet 13 as the second straight line, and the length of the first straight line Is L1, and the length of the second straight line is L2, L2 / L1 (where L1 and L2 are the same scale) is preferably 1.0 or more, more preferably 1.05 or more. 1 or more is more preferable. L2 / L1 is preferably 2.0 or less, more preferably 1.75 or less, and further preferably 1.5 or less.

  As described above, the fan 9 intensively supplies the gas heated by the heater 8 to the hot air inlet 13 as the hot air 12 using the air collecting plates (the first air collecting plate and the second air collecting plate). The gas is allowed to pass through the inner tank 4 through the introduction port 13, and is refluxed to the gap between the inner tank 4 and the outer tank 6 through the exhaust port 16. In other words, the hot air is the hot air 12 as the fan 9, the heater 8, the gap between the inner tank 4 and the outer tank 6, the hot air inlet 13, the inside of the inner tank 4, the exhaust port 16, the inner tank 4 and the outer tank 6. A hot air circulation path is formed through a gap between the two. Further, as described above, an intake hole and an exhaust hole may be provided in the middle of the hot air circulation path to perform intake and exhaust appropriately.

  In the present embodiment, the hot air circulating around the hot air circulation path is efficiently guided by the second air collecting plate 26 to the hot air introducing port 13 side, and the first air collecting plate 18 sandwiches the hot air introducing port 13 upstream of the hot air 12. Since it faces the hot air 12 on the opposite side, a larger amount of hot air flows from the hot air inlet 13 into the inner tub 4 than when the first air collecting plate 18 and the second air collecting plate 26 are not installed. Is supplied, and the object to be heated can be efficiently heated. Moreover, the heat history given to the object to be heated becomes more uniform, and uneven heating of the object to be heated can be prevented well.

  In an oven that does not include such a wind collecting plate (a wind collecting plate in which the first air collecting plate 18 and the second air collecting plate 26 are integrated), the hot air 12 flows between the first side wall 4 a and the outer tub 6. There was a possibility of staying in. As a result of studies by the present inventors, it is relatively difficult to efficiently heat an object to be heated in an oven that does not include such a wind collecting plate, and the processing time related to the heat treatment may be exceeded or the object to be heated may be heated. There was a tendency that uneven heating was likely to occur. On the other hand, in the oven 1 of the present embodiment, since the first air collecting plate 18 and the second air collecting plate 26 are provided, the inventor has found that the inconvenience as described above can be avoided. Although the reason why such an effect is manifested is not certain, since a large amount of hot air can be supplied to the hot air inlet 13 by the air collecting plate, heat energy is given to the heated object very efficiently, and the shape of the heated object It is estimated that the uneven heating can be reduced.

  The first air collecting plate 18 is preferably inclined to the windward side of the hot air inlet 13 (see FIG. 1). Further, it is preferable that both ends of the first air collecting plate 18 are bent toward the windward side of the hot air inlet 13 when viewed from the direction perpendicular to the first side wall 4a (see FIG. 2).

  By ascending the first air collecting plate 18 to the windward side of the hot air introducing port 13 and bending both ends of the first air collecting plate 18 to the windward side of the hot air introducing port 13, In the temperature process, temperature overshoot can be suppressed, and the temperature in the inner tank 4 can be easily controlled within a predetermined range.

  In the oven 1, it is preferable that the first air collecting plate 18 is disposed along the edge of the hot air inlet 13 when viewed from the direction perpendicular to the first side wall 4 a (see FIG. 2).

  By arranging the first air collecting plate 18 along the edge of the hot air introduction port 13, the hot air 12 can be more reliably introduced from the hot air introduction port 13 into the inner tank 4.

  A space 20 located on the opposite side of the upstream side of the hot air 12 across the hot air inlet 13 in the gap between the first side wall 4a and the outer tub 6 is closed by the first air collecting plate 18 and the second air collecting plate 26. It is preferable that

  By closing the space 20 with the first air collecting plate 18 and the second air collecting plate 26, the hot air 12 can be more reliably introduced into the inner tank 4 from the hot air inlet 13 without escaping into the space 20. It becomes possible. The space 20 is preferably completely closed and sealed, but may not be partially blocked as long as the hot air 12 does not escape into the space 20.

  The oven 1 is preferably provided with a cylindrical third air collecting plate 28 that surrounds the hot air inlet 13 and protrudes from the first side wall 4 a into the inner tank 4. Further, it is preferable that a louver 32 is installed inside the cylindrical third air collecting plate 28. The oven 1 may be provided with a cylindrical wind direction plate 29 that surrounds the exhaust port 16 and protrudes from the second side wall 4 b into the inner tank 4.

  The hot air 12 can be supplied to the roll body 100 more reliably by the third air collecting plate 28 and the louver 32.

  It is preferable that a part of the louver 32 protrudes from the hot air inlet 13 toward the outer tub 6, and the protruding portion is bent toward the windward side of the hot air inlet 13. By bending the louver 32 to the windward side of the hot air introduction port 13 at the portion protruding from the hot air introduction port 13 toward the outer tub 6 side, the hot air 12 can be easily introduced into the inner tub 4 from the hot air introduction port 13.

(Method for producing polymer film)
Then, the manufacturing method of a polymer film using the oven 1 mentioned above is demonstrated.

  In such a production method, it is preferable to form a roll body by using a suitable core and winding a polymer film precursor that can be a polymer film around the core. The polymer film precursor has a film-like or sheet-like shape that can be wound around a core and can form a desired polymer film by heat treatment using the oven of the present invention. . In addition, such a polymer film precursor may be wound around the core as it is, and after being formed on a suitable support substrate, in the form of a laminate of the polymer film precursor and the support substrate. It may be wound up.

  In the following, as a preferred embodiment of a method for producing a polymer film, a metal foil is used as a support substrate, and a laminate (polymer film laminate) in which a polymer film is laminated on the metal foil is formed. The method will be described in detail. Since such a polymer film laminate is a laminate comprising a metal foil as a conductive layer and a polymer film as an insulating layer, it is extremely useful as a member in the electric / electronic field. In this method for producing a polymer film laminate, first, a roll body 100 is formed by winding up a laminate 10 in which a precursor layer 14 made of a polymer film precursor is formed on a metal foil 2 (see FIG. 4). ).

  The precursor layer 14 is a layer that can form the above-described polymer film by heat treatment, for example, a layer containing a precursor compound before imide ring closure in the production of polyimide, polyamideimide, polyimide benzoxazole, or the like, or heat treatment It consists of a layer containing the previous aromatic liquid crystal polyester. The metal foil 1 is composed of, for example, a foil, a thin film, a sheet-like film, or the like made of a metal such as gold, silver, copper, aluminum, or nickel.

  When winding the laminated body 10 to form the roll body 100, it is arranged on the sides located at both ends in the direction intersecting the winding direction of the laminated body 10 so as to be sandwiched between the laminated bodies 10 to be wound. It is preferable to wind up the laminated body 10 after arranging the spacers 30 along the respective sides (see FIG. 4). Since the spacer 30 is used, adhesion between the laminated bodies 10 due to winding can be reliably prevented.

  The spacer 30 preferably has an uneven shape that is continuous in the longitudinal direction. When the spacer 30 has a concavo-convex shape, a vent hole communicating with the gap between the stacked bodies 10 is formed at both ends of the roll body 100. As a result, in the step of heat-treating the roll body 100 in the inner tub 4 of the oven 1, the hot air 12 introduced into the inner tub 4 from the hot air inlet 13 passes through the vent holes opened at both ends of the roll body 100. It can penetrate into the inside of the roll body 100 (between the wound laminated bodies 10) and pass to the exhaust port 16 side. As a result, since the inside of the roll body 100 is heated uniformly, it becomes easy to obtain a homogeneous polymer film laminate without uneven heating.

  The roll body 100 thus formed is heat-treated in the above-described oven 1 to obtain a polymer film laminate in which a polymer film is formed on the metal foil 2. The roll body 100 is heat-treated in a state where it is installed on the work receiver 22 in the inner tank 4 (see FIGS. 1 and 2). The treatment temperature at the time of heat treatment for the roll body 100 is usually in the range of 200 ° C. to 350 ° C., and may be appropriately determined according to the type of the precursor layer 14 to be used.

  After the heat treatment, the roll body 100 is cooled, the polymer film laminate 1 is drawn out from the roll body 100, and further, cutting, removal of the spacers 30 and the like are performed as necessary, so that the shape of the high-practical shape can be increased. A molecular film laminate is obtained.

  Among the polymer film laminates described above, polymer film laminates in which the polymer film is composed of liquid crystalline polyester are excellent in high-frequency characteristics and have low water absorption. Expected. For example, a polymer film laminate including a polymer film made of liquid crystal polyester can be suitably used for applications such as a high-frequency printed wiring board, a high-frequency cable, a communication device circuit, and a package substrate. The heat treatment using the oven of the present invention enables the polymer film to have excellent mechanical strength in the polymer film laminate including the polymer film made of liquid crystal polyester, and between the polymer film and the metal foil. It is possible to efficiently produce a polymer film laminate having excellent adhesive strength.

  In the present embodiment, a large amount of hot air is supplied relatively uniformly to the roll body 100 installed in the inner tank 4. As a result, the entire roll body 100 is heated uniformly, and a homogeneous polymer film laminate without uneven heating can be obtained. For example, when an aromatic liquid crystal polyester suitable as a polymer film precursor is used, in a conventional oven, the temperature overshoots in the temperature rising process of the inner tank, and the aromatic liquid crystal polyester is thermally decomposed or uneven heating occurs. Although the problem arises that the aromatic polyester film having the desired characteristics is not partially formed, these problems can be satisfactorily avoided in the present embodiment.

  Moreover, in this embodiment, since hot air is efficiently supplied to the roll body 100 and the hot air wind speed can be relatively increased, the heat transfer speed to the roll body 100 is larger than the conventional one, and the roll body 100 is related to heating. The processing time can be shortened. Therefore, in this embodiment, a uniform polymer film laminate without uneven heating can be obtained in a short time. Even if the size of the roll body 100 is large and the heat capacity of the roll body 100 is large, the heat transfer speed to the roll body 100 is large and the roll body 100 is heated in the inner tank 4 having a uniform temperature distribution. A large amount of the polymer film laminate can be obtained in a short time. Thus, in this embodiment, the productivity of the polymer film laminate is improved.

  In the method for producing a polymer film laminate using a conventional oven, the temperature distribution in the tank has to be adjusted by adjusting the inclination of the movable wind direction plate at any time during the heating of the roll body 100. The heating process of the roll body 100 is complicated, and energy is consumed for the operation of the wind direction plate. On the other hand, in the present embodiment, the roll body 100 is easily provided by the hot air inlet 13 and the air collecting plates (the first air collecting plate 18 and the second air collecting plate 26) without using a movable air direction plate. The distribution of thermal history can be made uniform and stable.

  As mentioned above, although preferred embodiment of the manufacturing method of the oven which concerns on this invention, and the polymer film laminated body using the said oven was described, this invention is not necessarily limited to embodiment mentioned above.

  For example, in the oven 1, the first air collecting plate 18 may be formed in a curved shape along the edge of the hot air inlet 13 when viewed from the direction perpendicular to the first side wall 4 a (see FIG. 5). Also in this case, as in the above-described embodiment, more hot air is supplied into the inner tub 4 than in the case where the first air collecting plate 18 is not installed, and the distribution of the heat history given to the roll body 100 is reduced. More uniform and stable. In addition, since the first air collecting plate 18 is formed in a curved shape along the edge of the hot air inlet 13, the gas stagnation is further suppressed and sufficient as compared with the case where the hot air inlet 13 is not curved. Hot air 12 can be introduced into the inner tank 4 from the hot air inlet 13.

  In addition, the first air collecting plate 18 may be arranged perpendicular to the first side wall 4a (see FIGS. 6 and 7). That is, the first air collecting plate 18 is not inclined to the windward side of the hot air introducing port 13, and both ends of the first air collecting plate 18 viewed from the direction perpendicular to the first side wall 4 a are on the windward side of the hot air introducing port 13. It does not have to be bent. Further, the first air collecting plate 18 is merely inclined to the windward side of the hot air introducing port 13, and both ends of the first air collecting plate 18 viewed from the direction perpendicular to the first side wall 4 a are the hot air introducing port 13. It is not necessary to bend to the windward side (see FIG. 8). Also in these cases, the distribution of the thermal history given to the roll body 100 can be made more uniform and stable as compared with an oven that does not include the first air collecting plate 18.

  EXAMPLES Hereinafter, although an Example demonstrates this invention still in detail, this invention is not limited to these Examples.

Example 1
As shown in FIGS. 6 and 7, the oven prepared in Example 1 is the same as the hot air inlet 13 side in the oven 1, and the first air collecting plate and the second air collecting plate are also provided on the exhaust port 16 side. A wind direction plate having a corresponding structure was further installed. In the oven of Example 1, the first air collecting plate 18 was perpendicular to the first side wall 4a, and the airflow direction plate on the exhaust port 16 side was perpendicular to the second side wall 4b. The inner tub 4 provided in the oven of Example 1 was a cube of 1000 mm × 1000 mm × 1000 mm. The distance between the inner tank 4 and the outer tank 6 was 90 mm. The diameter of the hot air inlet 13 was φ397 mm, and the opening area was 1238 cm ² . The thickness of the first air collecting plate 18 was 0.1 mm.

(Example 2)
In Example 2, an oven 1 shown in FIGS. 6 and 7 was prepared. The material, dimensions, and shape of each part in the oven 1 of Example 2 were the same as those of the oven of Example 1 except that no wind direction plate was provided on the exhaust port 16 side.

(Example 3)
In Example 3, an oven having a structure in which the louver 32 was removed from the oven 1 shown in FIGS. The material, size, and shape of each part in the oven 1 of Example 3 are as follows: the first air collecting plate 18 is inclined 45 degrees toward the windward side of the hot air inlet 13 and the direction perpendicular to the first side wall 4a. As seen, the oven was the same as the oven of Example 1 except that the first air collecting plate 18 was bent 45 degrees so that the hot air inlet 13 was sandwiched from the opposite side of the hot air inlet 13.

Example 4
In Example 4, an oven 1 shown in FIGS. 8 and 9 was prepared. As for the material, size, and shape of each part in the oven 1 of Example 4, both ends of the first air collecting plate 18 as viewed from the direction perpendicular to the first side wall 4a are not bent toward the windward side of the hot air inlet 13. Except for this point, the oven was the same as that in Example 3.

(Comparative Example 1)
In Comparative Example 1, an oven 101 shown in FIGS. In contrast to the ovens of Examples 1 to 4, the oven 101 of Comparative Example 1 did not include any of the first air collecting plate, the second air collecting plate, the third air collecting plate, and the louver. Moreover, in the oven 101 of the comparative example 1, as shown in FIG. 11, 364 circular ventilation holes 102 having a diameter of 22 mm were formed vertically and horizontally on the first side wall 4a. The total opening area of the circular ventilation holes 102 formed in the first side wall 4a was 1688 cm ² . Further, in the oven 101 of Comparative Example 1, 374 circular ventilation holes 102 having a diameter of 22 mm were formed vertically and horizontally on the second side wall 4b in substantially the same manner as the first side wall 4a. The total opening area of the circular ventilation holes 102 formed in the second side wall 4b was 1726 cm ² . Except for the above points, the material, dimensions, and shape of each part in the oven 101 of Comparative Example 1 were the same as those of the oven of Example 3.

(Comparative Example 2)
In Comparative Example 2, an oven similar to that of Example 3 was prepared except that the first air collecting plate, the second air collecting plate, and the louver were not provided.

[Wind speed measurement test]
Using each of the ovens of Examples 1 and 2 and Comparative Examples 1 and 2, a wind speed measurement test in the inner tank 4 was performed. The wind speed is measured at two locations, the center of the work receiver 22 on the windward side in the inner tank 4 and the lower part of the work receiver 22 on the leeward side in the inner tank 4 (position corresponding to the vicinity of the lower end of the wind direction plate 29). A hot wire anemometer (manufactured by Nippon Kanomax Co., Ltd., Anemo Master MODEL 6112) was installed. In the wind speed measurement test, the roll body 100 was not installed in the inner tank 4. In the wind speed measurement test, first, the inside of the oven was filled with nitrogen gas, the pressure inside the oven was slightly pressurized, and the temperature inside the oven was maintained at about 32 ° C. Next, the fan inverter was operated to generate hot air, and the windward and leeward wind speeds were measured. The windward wind speed means the wind speed measured at the center of the work receiver 22 on the windward side in the inner tank 4, and the leeward wind speed means the lower part of the work receiver 22 on the leeward side in the inner tank 4. It means the measured wind speed.

  The windward wind speed of Example 1 was 6.4 m / sec, and the leeward wind speed was 0.88 m / sec. The windward wind speed of Example 2 was 7.2 m / sec, and the leeward wind speed was 1.0 m / sec. The windward wind speed of Comparative Example 1 was 1.8 m / sec, and the leeward wind speed was 0.4 m / sec. The windward wind speed of Comparative Example 2 was 6.7 m / sec, and the leeward wind speed was 1.2 m / sec. From these measurement results, in Examples 1 to 4 in which the hot air inlet 13 is formed in the first side wall 4a and Comparative Example 2, the comparison example 1 in which a large number of circular ventilation holes 102 are formed in the first side wall 4a. In comparison, it was confirmed that both the windward wind speed and the leeward wind speed were large.

  In the second embodiment in which the first air collecting plate 18 and the second air collecting plate 26 are installed only on the upwind hot air introduction port 13 side, the first air collecting plate and the downwind exhaust port 16 side are also provided. It was confirmed that both the windward wind speed and the leeward wind speed were larger than those in Example 1 in which the wind direction plate corresponding to the second air collecting plate was installed. Therefore, in the wind speed measurement test, a favorable effect by installing wind direction plates corresponding to the first air collecting plate and the second air collecting plate on the leeward exhaust port 16 side was not confirmed.

[Temperature difference measurement test]
Using the ovens of Examples 1 to 4 and Comparative Examples 1 and 2, the processes of gas replacement, temperature increase, temperature maintenance, and temperature decrease in the inner tank 4 were continuously performed. In the gas replacement process, an operation of maintaining the program temperature (desired temperature) in the inner tank 4 at 30 ° C. for 1 hour was performed. In this gas replacement process, the gas inside the oven was replaced with nitrogen gas. Next, in the temperature raising process, an operation of continuously raising the program temperature in the inner tank 4 from 30 ° C. to 320 ° C. was performed in 2 hours. Next, in the temperature holding process, an operation of maintaining the program temperature in the inner tank 4 at 320 ° C. for 1 hour was performed. Next, in the temperature lowering process, the heating means was stopped, and the program temperature in the inner tank 4 was continuously lowered from 320 ° C. to 30 ° C. in 2 hours. In addition, each process of gas substitution in the inner tank 4, temperature rising, temperature holding, and temperature falling is performed without installing the roll body 100 in the inner tank 4 for the convenience of installing a thermocouple for the temperature measurement mentioned later. It was.

  In each process, the temperature at each measurement point was measured over time by each thermocouple installed at each of the three measurement points in the inner tank 4. When the roll body 100 is installed in the inner tank 4, the temperature in the inner tank 4 is measured at a location where the upper portion 100 a of the roll body is located (hereinafter referred to as the upper portion) and the central portion 100 b of the roll body. The measurement was performed at three locations (referred to as a central portion hereinafter) and locations where the lower portion 100c of the roll body is positioned (referred to as a lower portion hereinafter) (see FIG. 1). In addition, a thermocouple for controlling the program temperature was installed on the windward side in the inner tank 4 (near the middle between the workpiece receiver 22 and the first side wall 4a).

  By the above-mentioned method, each temperature of upper part, the center part, and the lower part was measured in each oven of Examples 1-4 and Comparative Examples 1 and 2.

  In each process of gas replacement, temperature increase, temperature maintenance, and temperature decrease in the inner tank 4, the temperatures of the upper, middle, and lower temperatures are changed from {(program temperature) -5} ° C. to {(program temperature) +5} ° C. Is preferably maintained within the range (hereinafter referred to as the allowable temperature range). In order to uniformly heat the entire roll body 100 and obtain a homogeneous polymer film laminate without uneven heating, the above-described allowable temperature range is required.

  Next, the temperature difference between the measured upper, middle and lower temperatures and the program temperature (hereinafter referred to as the temperature difference with the program), the upper and lower temperatures and the central temperature. Of the temperature difference (hereinafter referred to as the temperature difference from the center) and the upper, middle and lower temperatures at each measurement point, the temperature difference between the highest temperature and the lowest temperature (hereinafter referred to as the temperature difference depending on the position). ), And their changes over time.

  The smaller the temperature difference from the program, the temperature difference from the center, and the temperature difference depending on the position, the better. The smaller the temperature difference from the program, the temperature difference from the center, and the temperature difference depending on the position, the more uniform the temperature distribution in the area where the roll body 100 is originally installed in the inner tank 4.

  Further, in each process of gas replacement, temperature rise, temperature maintenance, and temperature drop in the inner tank 4, the total time (unit: hour, hereinafter, temperature nonuniformity time) when the temperature difference depending on the position becomes 5 ° C. or more. And the ratio of the temperature non-uniformity time to the time required for each process (unit:%, hereinafter referred to as temperature non-uniformity) is preferably as small as possible. It means that the smaller the temperature nonuniformity time and the temperature nonuniformity are, the more uniform and more stable the temperature distribution in the region where the roll body 100 is originally installed in the inner tank 4.

  The results of Example 1 are shown in Table 1 and FIGS. The results of Example 2 are shown in Table 2 and FIGS. The results of Example 3 are shown in Table 3 and FIGS. The results of Example 4 are shown in Table 4 and FIGS. The results of Comparative Example 1 are shown in Table 5 and FIGS. The results of Comparative Example 2 are shown in Table 6 and FIGS.

  In Examples 1 to 4, the temperature nonuniformity time was short and the temperature nonuniformity rate was small in each process of temperature increase, temperature holding, and temperature decrease, as compared with Comparative Examples 1 and 2. That is, in Examples 1 to 4, it was confirmed that the temperature distribution in the region where the roll body 100 was originally installed in the inner tank 4 was uniform and stable compared to Comparative Examples 1 and 2. . In addition, in the lower part of Comparative Example 2, a large overshoot of about 340 ° C. occurred in the initial stage of the temperature holding process, whereas in Examples 1 to 4, such an overshoot was suppressed. confirmed. In particular, the fourth embodiment in which the first air collecting plate 18 is inclined toward the windward side of the hot air introducing port 13, and the first air collecting plate 18 is inclined to the airward side of the hot air introducing port 13, and the first side wall 4a. In Example 3 in which both ends of the first air collecting plate 18 as viewed from the vertical direction are bent toward the windward side of the hot air inlet 13, the effect of suppressing overshoot is particularly great, and the maximum in the initial stage of the temperature holding process. It was confirmed that the temperature was lower than the upper limit 325 ° C. of the allowable temperature range.

  Example 4 in which the first air collecting plate 18 is inclined to the windward side of the hot air introducing port 13 and the first air collecting plate 18 are inclined to the windward side of the hot air introducing port 13 and perpendicular to the first side wall 4a. In the third embodiment in which both ends of the first air collecting plate 18 are bent toward the windward side of the hot air introduction port 13 as viewed from various directions, the first air collecting plate 18 is not bent and is perpendicular to the first side wall 4a. Compared to the installed Examples 1 and 2, the temperature in the inner tank 4 is easily maintained within the allowable temperature range of 315 to 325 ° C. in the temperature holding process, and the temperature difference from the program is less than 5 ° C. and small. Was confirmed.

FIG. 1 is a schematic cross-sectional view of an oven according to an embodiment of the present invention. Fig.2 (a) is II-II schematic sectional drawing in the oven of FIG. 1, FIG.2 (b) is an enlarged view of Fig.2 (a). FIG. 3 is a perspective view of a first air collecting plate and a second air collecting plate provided in the oven of FIG. FIG. 4 shows a roll body formed by winding a laminate in which a precursor layer made of a polymer film precursor is formed on a metal foil in a method for producing a polymer film according to an embodiment of the present invention. It is a perspective view. FIG. 5 is a schematic cross-sectional view of an oven according to another embodiment of the present invention parallel to the first side wall of the inner tank. FIG. 6 is a schematic cross-sectional view of an oven according to another embodiment of the present invention. FIG. 7 is a schematic cross-sectional view of VII-VII in the oven of FIG. FIG. 8 is a schematic cross-sectional view of an oven according to another embodiment of the present invention. FIG. 9 is a schematic cross-sectional view of IX-IX in the oven of FIG. FIG. 10 is a schematic cross-sectional view of the oven of Comparative Example 1. 11 is a schematic cross-sectional view taken along the line XI-XI in the oven of FIG. FIG. 12 (a) is a graph showing the program temperature measured in the temperature difference measurement test of Example 1 and the time variation of the upper, middle, and lower temperatures, and FIG. 12 (b) is a graph showing FIG. It is an enlarged view of a). FIG. 13A is a graph showing a time change of the temperature difference between the actually measured temperature and the program temperature in the temperature difference measurement test of Example 1, and FIG. 13B is the temperature difference measurement test of Example 1. It is a graph which shows the time change of the temperature difference of each temperature of the upper part and lower part which measured by (1), and the temperature of a center part. FIG. 14 (a) is a graph showing the time change of the temperature difference between the highest temperature and the lowest temperature among the upper, middle, and lower temperatures at each measurement time point of the temperature difference measurement test of Example 1. FIG. 14B is an enlarged view of FIG. FIG. 15 (a) is a graph showing the program temperature measured in the temperature difference measurement test of Example 2, and the temporal change of each temperature of the upper part, the central part, and the lower part. FIG. It is an enlarged view of a). FIG. 16A is a graph showing a time change of the temperature difference between the actually measured temperature and the program temperature in the temperature difference measurement test of Example 2, and FIG. 16B is the temperature difference measurement test of Example 2. It is a graph which shows the time change of the temperature difference of each temperature of the upper part and lower part which measured by (1), and the temperature of a center part. FIG. 17 (a) is a graph showing the time change of the temperature difference between the highest temperature and the lowest temperature among the upper, middle, and lower temperatures at each measurement time point of the temperature difference measurement test of Example 2, FIG. 17B is an enlarged view of FIG. FIG. 18 (a) is a graph showing the program temperature measured in the temperature difference measurement test of Example 3 and the time variation of the upper, middle, and lower temperatures, and FIG. 18 (b) is a graph showing FIG. It is an enlarged view of a). FIG. 19A is a graph showing the change over time in the temperature difference between the measured temperature and the program temperature in the temperature difference measurement test of Example 3, and FIG. 19B is the temperature difference measurement test of Example 3. It is a graph which shows the time change of the temperature difference of each temperature of the upper part and lower part which measured by (1), and the temperature of a center part. FIG. 20 (a) is a graph showing the time change of the temperature difference between the highest temperature and the lowest temperature among the upper, middle, and lower temperatures at each measurement point of the temperature difference measurement test of Example 3. FIG. 20B is an enlarged view of FIG. FIG. 21 (a) is a graph showing the program temperature measured in the temperature difference measurement test of Example 4 and the time variation of the upper, middle, and lower temperatures, and FIG. 21 (b) is a graph showing FIG. It is an enlarged view of a). FIG. 22A is a graph showing the change over time of the temperature difference between the measured temperature and the program temperature in the temperature difference measurement test of Example 4, and FIG. 22B is the temperature difference measurement test of Example 4. It is a graph which shows the time change of the temperature difference of each temperature of the upper part and lower part which measured by (1), and the temperature of a center part. FIG. 23 (a) is a graph showing the change over time in the temperature difference between the highest temperature and the lowest temperature among the temperatures at the upper, middle, and lower portions at each measurement point in the temperature difference measurement test of Example 4, FIG. 23 (b) is an enlarged view of FIG. 23 (a). FIG. 24 (a) is a graph showing the program temperature measured in the temperature difference measurement test of Comparative Example 1 and the time variation of the upper, middle, and lower temperatures, and FIG. It is an enlarged view of a). FIG. 25A is a graph showing a change over time in the temperature difference between the actually measured temperature and the program temperature in the temperature difference measurement test of Comparative Example 1, and FIG. 25B is the temperature difference measurement test of Comparative Example 1. It is a graph which shows the time change of the temperature difference of each temperature of the upper part and lower part which measured by (1), and the temperature of a center part. FIG. 26 (a) is a graph showing the time change of the temperature difference between the highest temperature and the lowest temperature among the upper, middle, and lower temperatures at each measurement time point of the temperature difference measurement test of Comparative Example 1. FIG. 26B is an enlarged view of FIG. FIG. 27 (a) is a graph showing the program temperature measured in the temperature difference measurement test of Comparative Example 2, and the time change of each of the upper, central, and lower temperatures, and FIG. 27 (b) is a graph showing FIG. It is an enlarged view of a). FIG. 28A is a graph showing the change over time of the temperature difference between the measured temperature and the program temperature in the temperature difference measurement test of Comparative Example 2, and FIG. 28B is the temperature difference measurement test of Comparative Example 2. It is a graph which shows the time change of the temperature difference of each temperature of the upper part and lower part which measured by (1), and the temperature of a center part. FIG. 29 (a) is a graph showing the time change of the temperature difference between the highest temperature and the lowest temperature among the temperatures of the upper part, the central part, and the lower part at each time point of the temperature difference measurement test of Comparative Example 2, FIG. 29 (b) is an enlarged view of FIG. 29 (a).

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Oven, 4 ... Inner tank, 4a ... 1st side wall, 4b ... 2nd side wall, 6 ... Outer tank, 8 ... Heating means, 9 ... Air blowing means, DESCRIPTION OF SYMBOLS 12 ... Hot air, 13 ... Hot air introduction port, 16 ... Exhaust port, 18 ... 1st air collecting plate, 26 ... 2nd air collecting plate, 100 ... Heated object (roll) body).

Claims (8)

An inner tank in which a hot air inlet is formed in the first side wall, and an exhaust port is formed in the second side wall facing the first side wall;
An outer tank containing the inner tank;
Heating means located in the gap between the inner tank and the outer tank;
Located in the gap between the inner tub and the outer tub, the gas heated by the heating means is passed through the inner tub through the hot air inlet as hot air, and the inner tub and the inner tub through the exhaust port. Air blowing means for refluxing to the gap with the outer tank;
A first air collecting plate that is positioned around the hot air introduction port in a gap between the first side wall and the outer tub, and that faces the hot air on the opposite side of the hot air across the hot air introduction port;
A pair of second air collecting plates that are located on the windward side of the hot air introduction port in the gap between the first side wall and the outer tub and that are disposed along the circulation direction of the hot air and that face each other;
The opening area of the hot air inlet is larger than the area projected on the first side wall of the object to be heated installed in the inner tank,
The oven is characterized in that the position of the hot air inlet is arranged so that the entire object to be heated is contained inside the hot air inlet as viewed from a direction perpendicular to the first side wall.   The oven according to claim 1, wherein the first air collecting plate is inclined toward the windward side of the hot air inlet.   3. The oven according to claim 1, wherein both ends of the first air collecting plate are bent toward the windward side of the hot air inlet when viewed from a direction perpendicular to the first side wall. .   The first air collecting plate is disposed along an edge of the hot air inlet as viewed from a direction perpendicular to the first side wall. The oven described in.   The oven according to any one of claims 1 to 4, wherein a distance between the pair of second air collecting plates is gradually narrowed toward the hot air introduction port.   The oven according to any one of claims 1 to 5, further comprising a cylindrical third air collecting plate that surrounds the hot air introduction port and protrudes from the first side wall into the inner tank.   The oven according to claim 6, further comprising a louver located inside the cylindrical third air collecting plate. Winding a polymer film precursor to form a roll body;
A step of heat-treating the roll body in the inner tank in the oven according to any one of claims 1 to 7 to convert the precursor of the polymer film into the polymer film. A method for producing a polymer film.

Images