JP2009042607A - Two-dimensional scanner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a two-dimensional scanner carried out at the same frequency in both a swing around the first axis and a swing around the second axis, and in a phase having different each other by 90°. <P>SOLUTION: This two-dimensional scanner 1 has a swing member 2, a ring member 3 arranged in an outside of the swing member to conform its center with the swing member, the first paired connection members 4A for connecting the swing member to the ring member and arranged along the first axis, and the second paired connection members 4B for connecting the swing member to the ring member and arranged along the second axis orthogonal to the first axis, and further has driving means 5 capable of oscillating the first connection members and the second connection members along a direction substantially orthogonal to a plane including the ring member, using a connection portion to the ring member as the oscillation center, and for oscillating the swing member by expanding and contracting the ring member to swing the first connection members and the second connection members. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a two-dimensional scanning apparatus capable of two-dimensional scanning.

  As a two-dimensional scanning method of laser light for reading and writing images, a tornado scan that scans a laser beam in a spiral shape is known. As a method of performing such a tornado scan, for example, a method of swinging a swing member having a mirror surface that reflects laser light so that the normal line of the mirror surface draws a spiral can be cited. A gimbal structure can be given as a structure for swinging the swing member so that the normal line of the mirror surface draws a spiral.

  As shown in FIG. 12, the gimbal structure includes a swinging member 101 having a mirror surface 101a, a first frame body 102 disposed outside the swinging member 101, and an outer side of the first frame body 102. The arranged second frame body 103, the first shaft member 104 that connects the swing member 101 and the first frame body 102, and the second shaft member that connects the first frame body 102 and the second frame body 103. 105. The first shaft member 104 supports the swing member 101 with respect to the first frame 102 so as to be swingable about its axis (around the first axis). The axis of the second shaft member 105 is orthogonal to the axis of the first shaft member 104, and the first frame 102 swings around the axis (around the second axis) with respect to the second frame 103. I support it as possible.

  In such a gimbal structure, the oscillation around the first axis and the oscillation around the second axis are performed at the same frequency and with a phase difference of 90 °. By increasing or decreasing the amplitude of the swing around the two axes with time, the swing member 101 swings so that the normal line of the mirror surface 101a draws a spiral.

  The gimbal structure described above is configured such that the swing around the first axis and the swing around the second axis can be performed independently of each other. Therefore, in the above-described gimbal structure, there is a possibility that the frequency of oscillation around the first axis and the frequency of oscillation around the second axis are shifted. For the same reason, in the gimbal structure, the difference between the phase of oscillation around the first axis and the phase of oscillation around the second axis may deviate from 90 °. Therefore, in the gimbal structure, the swing member 101 may not swing so that the normal line of the mirror surface 101a draws a spiral.

  The present invention provides a two-dimensional scanning device in which the rocking around the first axis and the rocking around the second axis are performed at the same frequency and in phases different from each other by 90 °.

  In order to solve the above-mentioned problems, the present invention is arranged on the outer side of the swing member so that the center of the swing member coincides with the center of the swing member. A pair of ring members, the swing member and the ring member connected to each other, present in a plane including the ring member, and disposed along a first axis passing through the center of the swing member A first connection member, a second member that connects the swing member and the ring member, exists in a plane including the ring member, passes through the center of the swing member, and is perpendicular to the first axis. A pair of second connecting members arranged along an axis, wherein the first connecting member and the second connecting member are on a plane including the ring member with a connection portion with the ring member as a swing center. The ring member can be swung in a substantially orthogonal direction, and the ring member can be expanded and contracted. And driving means for swinging the swinging member by swinging the first connecting member and the second connecting member, and the driving means extends the ring member in the first axial direction. At the same time, by contracting in the second axial direction, the swinging member swings around the first axis, and the ring member contracts in the first axial direction and extends in the second axial direction. Thus, a two-dimensional scanning device is provided in which the swing member is swung around the second axis.

  As a specific configuration for oscillating the oscillating member such that the normal line of the oscillating member draws a spiral, the drive means includes the first shaft as described in claim 2. The ring member generates vibration in the first in-plane cos 2θ mode that expands and contracts in the direction and the second axis direction, and the first axial direction of the ring member and the second in the vibration in the first in-plane cos 2θ mode. A configuration in which the amount of expansion and contraction in the axial direction is increased or decreased with time can be given.

  Preferably, as described in claim 3 of the claims, the connection portion of the first connection member is bent in a convex shape in the second axial direction, and the connection portion of the second connection member is the first connection member. A configuration that is bent in a uniaxial direction can be given.

  Preferably, as described in claim 4 of the claim, the swing member and the ring member are connected, exist in a plane including the ring member, pass through the center of the swing member, and A pair of third connection members arranged along a third axis that forms an angle of 45 ° with the first axis, the swing member and the ring member, and in a plane including the ring member A pair of fourth connecting members that exist and pass along the fourth axis perpendicular to the third axis, passing through the center of the swing member, the third connecting member, and the fourth connecting member Is capable of swinging in a direction substantially orthogonal to a plane including the ring member with a connection portion with the ring member as a swing center, and the driving means is configured to vibrate in the first in-plane cos 2θ mode. The maximum expansion / contraction direction with respect to the vibration in the first in-plane cos 2θ mode is The ring member simultaneously generates a vibration in the second in-plane cos 2θ mode that is 5 ° different from the expansion / contraction phase of the ring member by 90 °, and the first in-plane vibration in the first in-plane cos 2θ mode is generated. A configuration in which the amount of expansion / contraction in the axial direction and the second axial direction, and the amount of expansion / contraction in the third axial direction and the fourth axial direction of the ring member in vibration in the second in-plane cos 2θ mode increase or decrease with time. It is said.

  Preferably, as described in claim 5, the connection portion of the third connection member is bent in a convex shape in the fourth axis direction, and the connection portion of the fourth connection member is the first connection portion. A configuration bent in a convex shape in three axial directions can be given.

  The present invention can provide a two-dimensional scanning device in which a difference between the natural frequency around the first axis and the natural frequency around the second axis is prevented from occurring due to a machining error.

  FIG. 1 is a schematic plan view of a two-dimensional scanning apparatus 1 according to this embodiment. As shown in FIG. 1, the two-dimensional scanning device 1 includes a swing member 2, a ring member 3, first to fourth connection members 4 </ b> A to 4 </ b> D, and a driving unit 5. Further, the two-dimensional scanning device 1 includes a support member 6, a housing 7, and a laser (not shown). Of the members constituting the two-dimensional scanning device 1 mentioned here, the members except for the casing 7, the laser, and the first to fourth AC power supplies provided in the driving means 5 described later are made of silicon. Yes. These members formed of silicon are manufactured by processing a single silicon substrate using a known MEMS (Micro Electro Mechanical System) technique such as etching or film formation.

  As shown in FIG. 1, the swing member 2 has a circular disk shape in a plan view. The surface of the oscillating member 2 is subjected to mirror processing such as aluminum vapor deposition in order to efficiently reflect the laser beam from the laser.

  The ring member 3 is disposed outside the swing member 2 so that the center of the ring member 3 coincides with the center of the swing member 2. The ring member 3 is supported by a support member 6. One end of the support member 6 extends from the ring member 3 in the radially outward direction, and the other end is connected to a housing 7 disposed outside the ring member 3.

  The part to which the support member 6 of the ring member 3 is connected is a part that is not on the first to fourth axes AD. The first axis A is an axis that exists in a plane including the ring member 3 and passes through the center of the swing member 2. The second axis B is an axis that exists in a plane including the ring member 3, passes through the center of the swing member 2, and is orthogonal to the first axis A. The third axis C is an axis that exists in a plane including the ring member 3, passes through the center of the swing member 2, and forms an angle of 45 ° with the first axis A. The fourth axis D is an axis that exists in the plane including the ring member 3, passes through the center of the swing member 2, and is orthogonal to the third axis C. Thus, since the ring member 3 is connected to the support member 6 at a portion that is not on the first to fourth axes A to D, the first to fourth fixed electrodes included in the driving means 5 described later are first to fourth. It can arrange | position in the position on axis | shaft AD.

  The first to connecting members 4 </ b> A to 4 </ b> D are members that connect the swing member 2 and the ring member 3. The first connection member 4 </ b> A is disposed along the first axis A on both sides of the swing member 2 in the first axis A direction. The second connection member 4B is disposed along the second axis B on both sides of the swing member 2 in the second axis B direction. The third connection member 4 </ b> C is disposed along the third axis C on both sides of the swing member 2 in the third axis C direction. The fourth connection member 4D is disposed along the fourth axis D on both sides of the swing member 2 in the fourth axis D direction.

  FIG. 2 is a configuration diagram of the first connecting member 4A. Fig.2 (a) shows the top view of 4 A of 1st connection members. As shown in FIG. 2 (a), the connection part 41A of the first connection member 4A with the ring member 3 is divided into two parts on the ring member 3 side, and each part divided into two parts is in the second axis B direction. Is bent in a convex shape. In the present embodiment, the connecting portion 41A is formed long by bending in a convex manner in the second axis B direction in this way. FIG. 2B shows a ZZ cross-sectional view when the first connecting member 4A swings in a direction substantially orthogonal to the plane P including the ring member 3 (the direction of the arrow R in FIG. 2B). . When the connection portion 41A is formed long, as shown in FIG. 2B, the torsion rate of the twist generated in the connection portion 41A that occurs when the first connection member 4A swings can be suppressed to a low level. By suppressing the torsion rate to a low value, the connection portion 41A can be easily twisted, and the first connection member 4A can be easily swung around the connection portion 41A as a swing center.

  Further, as shown in FIG. 2A, the connecting portion 42 </ b> A of the first connecting member 4 </ b> A with the swinging member 2 has the same configuration as the connecting portion 41 </ b> A with the ring member 3. Accordingly, the first connecting member 4A is configured to easily swing around the connecting portion 42A as a swing center.

  As described above, when the first connecting member 4A swings in the direction substantially orthogonal to the plane P with the connection portion 41A or the connection portion 42A as the swing center, as shown in FIG. The distance between the moving member 2 and the ring member 3 is reduced. Therefore, the first connecting member 4A connects the swing member 2 and the ring member 3 so that the ring member 3 can contract in the first axis A direction.

  FIG. 3 is a plan view of the first connecting member 4A. Fig.3 (a) shows the top view of the state which the connection parts 41A and 42A have not expanded. FIG. 3B is a plan view showing a state in which the connection portions 41A and 42A are extended. As shown in FIGS. 3A and 3B, the connecting portion 41A extends in the first axis A direction by deforming so that the convexly bent portion expands and contracts in the first axis A direction. can do. Similarly to the connection portion 41A, the connection portion 42A having the same configuration as the connection portion 41A can also extend in the first axis A direction. Therefore, as shown in FIG. 3B, the first connecting portion 4A connects the swing member 2 and the ring member 3 so that the ring member 3 can expand in the first axis A direction.

  The second to fourth connecting members 4B to 4D have the same configuration as the first connecting member 4A described above.

  The driving unit 5 causes the ring member 3 to simultaneously generate the vibration in the first in-plane cos 2θ mode and the vibration in the second in-plane cos 2θ mode, thereby swinging the swing member 2. FIG. 4A is a plan view showing vibration in the first in-plane cos 2θ mode generated in the ring member 3. FIG. 4B is a plan view showing the vibration in the second in-plane cos 2θ mode generated in the ring member 3.

  4A and 4B, the solid line indicates the ring member 3 in a state where neither the first in-plane cos 2θ mode vibration nor the second in-plane cos 2θ mode vibration is generated, and the broken line indicates each vibration. The ring member 3 in a state is shown. In the first in-plane cos 2θ mode vibration in the present embodiment, as shown in FIG. 4A, the first axis A direction and the second axis B direction are the maximum expansion and contraction directions. On the other hand, in the vibration in the second in-plane cos 2θ mode in the present embodiment, the third axis C direction and the fourth axis D direction are the maximum expansion and contraction directions, as shown in FIG. That is, the maximum extension directions of the first in-plane cos 2θ mode and the second in-plane cos 2θ mode are different by 45 °.

  Further, the expansion / contraction phase of the ring member 3 in the vibration in the second in-plane cos 2θ mode is delayed by 90 ° with respect to the expansion / contraction phase of the ring member 3 in the vibration in the first in-plane cos 2θ mode. Specifically, the expansion / contraction phase in the third axis C direction is 90 ° behind the expansion / contraction phase in the first axis A direction, and the expansion / contraction phase in the fourth axis D direction is expansion / contraction in the second axis B direction. 90 degrees behind the phase.

  Next, a specific configuration of the driving unit 5 will be described. In such a specific configuration, the driving means 5 includes first to fourth movable electrodes, first to fourth fixed electrodes, and first to fourth AC power sources.

  As shown in FIG. 1, the first movable electrode 511 is provided at two sites on the first axis A of the ring member 3. The first movable electrode 511 is formed in a comb-like shape composed of a plurality of protruding portions extending in the radially outward direction of the ring member 3. The second movable electrode 514 is at two sites on the second axis B of the ring member 3, the third movable electrode 521 is at two sites on the third axis C of the ring member 3, and the fourth movable electrode 524 is at The ring member 3 is provided at two sites on the fourth axis D. The second movable electrode 514, the third movable electrode 521, and the fourth movable electrode 524 have the same configuration as the first movable electrode 511.

  The first fixed electrode 512 is disposed outside the ring member 3 at a predetermined interval in the first axis A direction with respect to the first movable electrode 511. The first fixed electrode 512 is formed in a comb-like shape composed of a plurality of protruding portions. The protruding portion of the first fixed electrode 512 extends in the radial direction of the ring member 3 so as to mesh with the protruding portion of the first movable electrode 511. By engaging the protruding portions in this way, the facing area between the first movable electrode 511 and the first fixed electrode 512 is increased, and a large electrostatic force is generated between the first movable electrode 511 and the first fixed electrode 512. It is easy to produce. The second fixed electrode 515 is disposed outside the ring member 3 at a predetermined interval in the second axis B direction with respect to the second movable electrode 514. The third fixed electrode 522 is disposed outside the ring member 3 at a predetermined interval in the third axis C direction with respect to the third movable electrode 521. The fourth fixed electrode 525 is disposed outside the ring member 3 at a predetermined interval in the fourth axis D direction with respect to the fourth movable electrode 524. The second fixed electrode 515, the third fixed electrode 522, and the fourth fixed electrode 525 have the same configuration as the first fixed electrode 512. The first fixed electrode 512, the second fixed electrode 515, the third fixed electrode 522, and the fourth fixed electrode 525 are fixed to the housing 7 by members not shown.

  The first AC power supply 513 is electrically connected to the support member 6 and the first fixed electrode 512, and a first AC voltage (see FIG. 7) between the first movable electrode 511 and the first fixed electrode 512. Can be applied. As described above, since the ring member 3, the support member 6, and the first to fourth movable electrodes 511, 514, 521, and 524 are formed of silicon material, these members are electrically connected to each other. ing. Therefore, the first AC power supply 513 electrically connected to the support member 6 and the first fixed electrode 512 can apply the first AC voltage between the first movable electrode 511 and the first fixed electrode 512. it can.

  Since the second AC power supply 516 is electrically connected to the support member 6 and the second fixed electrode 515, and the support member 6 and the second movable electrode 514 are electrically connected, the second movable electrode A second AC voltage (see FIG. 7) can be applied between 514 and the second fixed electrode 515. The phase of the second AC voltage is delayed by 180 ° with respect to the first AC voltage. The third AC power source 523 is electrically connected to the support member 6 and the third fixed electrode 522, and since the support member 6 and the third movable electrode 521 are electrically connected, the third movable electrode A third AC voltage (see FIG. 7) can be applied between 521 and the third fixed electrode 522. The phase of the third AC voltage is delayed by 90 ° with respect to the first AC voltage. The fourth AC power source 526 is electrically connected to the support member 6 and the fourth fixed electrode 525, and since the support member 6 and the fourth movable electrode 524 are electrically connected, the fourth movable electrode A fourth AC voltage (see FIG. 7) can be applied between 524 and the fourth fixed electrode 525. The phase of the fourth AC voltage is delayed by 180 ° (270 ° with respect to the first AC voltage) with respect to the third AC voltage.

  In the driving means 5 configured as described above, when the first AC voltage is applied between the first movable electrode 511 and the first fixed electrode 512, the first movable electrode 511 and the first fixed electrode 512 are The electrostatic force A ′ (see FIG. 1) in the direction of the single axis A acts. When the electrostatic force A ′ acts, the ring member 3 expands and contracts in the first axis A direction. Similarly, when the second AC voltage is applied between the second movable electrode 514 and the second fixed electrode 515, the second axis B direction is between the second movable electrode 514 and the second fixed electrode 515. The electrostatic force B ′ acts and the ring member 3 expands and contracts in the second axis B direction. Since the phase of the second AC voltage is delayed by 180 ° with respect to the phase of the first AC voltage, the electrostatic force B ′ changes in magnitude with a phase delayed by 180 ° with respect to the electrostatic force A ′. Therefore, the phase of the expansion and contraction in the first axis A direction and the expansion and contraction in the second axis B direction of the ring member 3 is different by 180 °. Accordingly, the driving unit 5 can cause the ring member 3 to generate the vibration in the first in-plane cos 2θ mode as shown in FIG.

  On the other hand, when a third AC voltage is applied between the third movable electrode 521 and the third fixed electrode 522, the electrostatic force in the third axis C direction between the third movable electrode 521 and the third fixed electrode 522. C ′ acts and the ring member 3 expands and contracts in the direction of the third axis C. Similarly, when the fourth AC voltage is applied between the fourth movable electrode 524 and the fourth fixed electrode 525, the fourth axis D direction is interposed between the fourth movable electrode 524 and the fourth fixed electrode 525. The electrostatic force D ′ acts and the ring member 3 expands and contracts in the fourth axis D direction. Since the phase of the fourth AC voltage is delayed by 180 ° with respect to the phase of the third AC voltage, the electrostatic force D ′ changes in magnitude with a phase delayed by 180 ° with respect to the electrostatic force C ′. Therefore, the phase of the expansion and contraction in the third axis C direction and the expansion and contraction in the fourth axis D direction of the ring member 3 differs by 180 °. Accordingly, the driving unit 5 can cause the ring member 3 to generate the vibration in the second in-plane cos 2θ mode as shown in FIG.

  Further, as shown in FIG. 7, the phase of the third AC voltage is delayed by 90 ° with respect to the phase of the first AC voltage, and the phase of the fourth AC voltage is delayed by 90 ° with respect to the phase of the second AC voltage. . Therefore, the electrostatic force C ′ varies in magnitude with a phase delayed by 90 ° with respect to the electrostatic force A ′, and the electrostatic force D ′ varies in magnitude with a phase delayed by 90 ° with respect to the electrostatic force B ′. To do. Therefore, the expansion / contraction phase of the ring member 3 due to the vibration in the second in-plane cos 2θ mode generated by the driving unit 5 is delayed by 90 ° with respect to the expansion / contraction phase of the ring member 3 due to the vibration in the first in-plane cos 2θ mode. .

  5 and 6 show the swing member 2 and the ring member 3 when the vibration in the first in-plane cos 2θ mode and the vibration in the second in-plane cos 2θ mode described above are simultaneously generated in the ring member 3. And the change of the state of the 1st-4th connection members 4A-4D is shown. The states of the swing member 2, the ring member 3, and the first to fourth connection members 4A to 4D are as follows: FIG. 5 (a) → FIG. 5 (b) → FIG. 5 (c) → FIG. 5 (d) → FIG. ) → FIG. 6 (b) → FIG. 6 (c) → FIG. 6 (d). Between each figure of Drawing 5 (a)-(d) and Drawing 6 (a)-(d), the 1st axis A direction of ring member 3, the 2nd axis B direction, the 3rd axis C direction, and the 4th The phase of expansion and contraction in the axis D direction (hereinafter referred to as “each axis direction”) is advanced by 90 °. The plan views of FIGS. 5 and 6 show schematic configurations of the swing member 2, the ring member 3, and the first to fourth connection members 4A to 4D in plan view. 5A, FIG. 5C, FIG. 6A, and FIG. 6C, the VV cross-sectional view is a cross section along the first axis A, and the WW cross-sectional view is a second axis. A cross-section along B is shown. 5 (b), 5 (d), 6 (b), and 6 (d), the XX cross-sectional view is a cross section along the third axis C, and the YY cross-sectional view is the A cross section along four axes D is shown.

  In the state shown in FIG. 5A, the ring member 3 extends in the first axis A direction and contracts in the second axis B direction. In the state shown in FIG. 5B, the ring member 3 extends in the third axis C direction and contracts in the fourth axis B direction. In the state shown in FIG. 5C, the ring member 3 contracts in the first axis A direction and extends in the second axis B direction. In the state shown in FIG. 5D, the ring member 3 contracts in the third axis C direction and extends in the fourth axis B direction. In the state shown in FIG. 6A, the state of the ring member 3 is the same as the state shown in FIG. In the state shown in FIG. 6B, the state of the ring member 3 is the same as the state shown in FIG. In the state shown in FIG. 6C, the state of the ring member 3 is the same as the state shown in FIG. In the state shown in FIG. 6D, the state of the ring member 3 is the same as the state shown in FIG.

  As shown in FIGS. 5 and 6, the swing member 2 swings in one direction around an axis parallel to the extending direction of the ring member 3. The swinging in one direction around the axis parallel to the extending direction of the ring member 3 will be described with reference to FIG. As shown in the WW cross-sectional view of FIG. 5A, the ring member 3 contracts in the second axis B direction, which is the contraction direction of the ring member 3, so that the swing member 2 and the ring member 3 And the pair of second connection members 4B swing in a substantially orthogonal direction with respect to the plane P with the connection portion 41B and the connection portion 42B as the swing center, as described with reference to FIG. Move. By this swinging, the connecting portion 42B is separated from the plane P in the orthogonal direction, so that the swinging member 2 has the first axis A around the first axis A parallel to the extending direction of the ring member 3 with the first axis A as the swing center. Swings in one direction A1.

  On the other hand, the swing member 2 does not swing around an axis parallel to the contraction direction of the ring member 3. Among the first to fourth connection members 4A to 4D, in the first to fourth connection members 4A to 4D arranged in a direction parallel to the extending direction of the ring member 3, the connection portions 41A to 41D and the connection portions 42A to 42A are used. 42D follows the expansion of the ring member 3 and expands. Therefore, for example, as shown in the VV sectional view of FIG. 5A, the first connecting member 4A arranged in a direction parallel to the extending direction of the ring member 3 does not swing. Since the first connecting member 4 </ b> A does not swing, the swing member 2 does not swing around the second axis parallel to the contraction direction of the ring member 3.

  Therefore, in the state of FIG. 5A, the swing member 2 swings in one direction A1 around the first axis A. Similarly, in the state shown in FIG. 5B, the swing member 2 swings in one direction C1 around the third axis C, and in the state shown in FIG. In the state shown in FIG. 5D, the swing member 2 swings in one direction D1 around the fourth axis D in the state shown in FIG. 6A. In FIG. 6, the swing member 2 swings in the other direction A2 around the first axis A, and in the state of FIG. 6B, the swing member 2 swings in the other direction C2 around the third axis C. In the state shown in FIG. 6C, the swing member 2 swings in the other direction B2 around the second axis B. In the state shown in FIG. It swings in the other direction D2 around the four axes D. As described above, the phase of oscillation around the third axis C is delayed by 45 ° with respect to the phase of oscillation around the first axis A, and the phase of oscillation around the second axis B is delayed by 90 °. The phase of oscillation around the axis D is delayed by 135 °. Further, the oscillation around the first axis A, the second axis B, the third axis C, and the fourth axis D (hereinafter referred to as “around each axis”) is performed at the same frequency. As a result, the normal line N of the oscillating member 2 changes its direction so as to draw an arc as shown in the plan views of FIGS. 5 (a) to 5 (d) and FIGS. 6 (a) to 6 (d).

  Note that if the phases of the third AC voltage and the fourth AC voltage are switched, the direction of the normal line N of the swing member 2 can be changed to the opposite direction. Therefore, the vibration in the first in-plane cos 2θ mode and the vibration in the second in-plane cos 2θ mode are simultaneously generated in the ring member 3, so that the two-dimensional scanning device 1 changes the direction of the normal line N of the swing member 2. The direction can be controlled.

  Further, the driving means 5 performs the swinging around each axis of the swinging member 2 by utilizing a resonance phenomenon. Since the oscillating member 2 is circular in plan view, the oscillating member 2 has the same configuration in each axial direction, and the natural frequency around each axis is the same. Since the natural frequency around each axis is the same, even if a resonance phenomenon is used for oscillation around each axis, oscillation around each axis can be performed at the same frequency. The swing member 2 can be swung so that N draws an arc. Note that the shape of the swinging member 2 having the same natural frequency around each axis is not only a circular shape in a plan view but also a regular 8n square shape (n: is a positive integer) in a plan view.

  Further, in order to use the resonance phenomenon, the driving means 5 sets the frequency of the first to fourth AC voltages to twice the natural frequency around each axis of the oscillating member 2. As described above, the frequency of the first to fourth AC voltages is set to twice the natural frequency around each axis of the oscillating member 2 as shown in FIGS. 5 (a) to 5 (d) and FIGS. As shown in d), the swinging around each axis is performed once by the ring member 3 expanding and contracting twice in each axial direction. That is, the rocking around each axis is performed at a frequency twice the expansion / contraction frequency of the ring member 3. Thus, by swinging around each axis of the swing member 2 using the resonance phenomenon, swinging around each axis of the swing member 2 can be performed with a small driving force.

  Further, the drive means 5 increases or decreases the amount of expansion / contraction of the ring member 3 with time in the first in-plane cos 2θ mode vibration and the second in-plane cos 2θ mode vibration, so that the normal line N of the swing member 2 is increased. Then, the swing member 2 is swung so as to draw a spiral. The greater the amount of contraction of the ring member 3, the closer the distance between the rocking member 2 and the ring member 3. Therefore, as the contraction amount of the ring member 3 increases, the amplitude of the first to fourth connecting members 4A to 4D (the angle formed by the first to fourth connecting members 4A to 4D and the plane P) increases. As the swing amplitude of the first to fourth connecting members 4A to 4D increases, the connecting portion 42A shown in FIG. The amplitude of becomes larger. Therefore, the diameter of the arc drawn by the normal line N of the swinging member 2 is adjusted by adjusting the amount of expansion and contraction of the ring member 3 in the first in-plane cos 2θ mode vibration and the second in-plane cos 2θ mode vibration. can do. Therefore, by increasing or decreasing the amount of expansion / contraction of the ring member 3 with time, the direction can be changed so that the normal line N of the swing member 2 draws a spiral.

  In addition, as a method of increasing or decreasing the expansion / contraction amount of the ring member 3, for example, the magnitude of the electrostatic forces A ′ to D ′ is increased by increasing or decreasing the effective value of the first to fourth AC voltages with time. Mention may be made of increasing or decreasing over time.

  Thus, since the two-dimensional scanning device 1 can change the direction so that the normal line N of the swing member 2 draws a spiral, the laser beam from the laser is reflected on the swing member 2 so that the tornado scan is performed. can do.

  As described above, the swing of the swing member 2 around the first axis A is interlocked with the expansion and contraction of the ring member 3 in the second axis B direction, and the swing of the swing member 2 around the second axis B. Is interlocked with the expansion and contraction of the ring member 3 in the first axis A direction. In the ring member 3 in which the vibration in the first in-plane cos 2θ mode and the vibration in the second in-plane cos 2θ mode are generated, the expansion and contraction in the first axis A direction and the expansion and contraction in the second axis B direction have the same frequency, and The phase is 180 degrees different from each other. Therefore, the swinging of the swinging member 2 around the first axis A and the swinging of the swinging member 2 around the second axis B are performed at the same frequency and with phases different from each other by 90 °. Therefore, in the two-dimensional scanning device 1, the swinging of the swinging member 2 around the first axis A and the swinging around the second axis B are performed at the same frequency and at phases different from each other by 90 °.

  Therefore, in the two-dimensional scanning device 1, the oscillation frequency around the first axis A is shifted from the oscillation frequency around the second axis B, and the oscillation phase around the first axis A and the second axis B When the difference from the surrounding rocking phase is shifted from 90 °, there is no possibility that the rocking member 2 does not rock so that the normal N draws a spiral. For the same reason, the two-dimensional scanning device 1 causes the oscillation frequency around the third axis C to be different from the oscillation frequency around the fourth axis D, and the oscillation phase around the third axis C. When the phase difference of the swing around the fourth axis D is shifted from 90 °, there is no possibility that the swing member 2 does not swing so that the normal N draws a spiral.

  If the swing member 2 is circular in plan view as in the present embodiment, the swing member 2 and the like are large as a whole due to processing errors when the swing member 2 and the like are manufactured by processing the silicon substrate. Even if it becomes smaller or smaller, the configuration in the axial direction of the swinging member 2 is the same, and the natural frequency around each axis of the swinging member 2 remains the same. Therefore, the two-dimensional scanning device 1 including the swing member 2 having a circular shape in plan view uses the resonance phenomenon so that the normal line N of the swing member 2 draws a spiral even if such a processing error occurs. The swing member 2 can be swung. Moreover, even if the above processing errors occur, the shape of the swing member 2 having the same natural frequency around each axis of the swing member 2 is not limited to a circular shape in plan view, but is, for example, 8n in plan view. There is a square (n: is a positive integer).

In the present embodiment, as described above, the two-dimensional scanning apparatus 1 controls the first in-plane cos 2θ mode vibration and the first in order to control the change direction of the direction of the normal line N of the swing member 2. Although the two-plane cos 2θ mode vibration can be generated at the same time, the two-dimensional scanning device according to the present invention can generate only the first in-plane cos 2θ mode vibration. Good. In the case of a configuration in which only vibration in the first in-plane cos 2θ mode is generated, the state of the swing member 2 is in the order of FIG. 5A → FIG. 5C → FIG. 6A → FIG. It is also possible to change in the order of FIG. 5 (a) → FIG. 6 (c) → FIG. 6 (a) → FIG. 5 (c).
The order of change depends on, for example, the weight balance of the swing member 2 when the swing member 2 is actually swinging.

  As described above, in the configuration in which only the vibration in the first in-plane cos 2θ mode is generated, the oscillations around the first axis A and the second axis B are performed at the same frequency. If the phase of oscillation about the second axis B is delayed by 90 ° with respect to the phase of oscillation, the oscillation member 2 can be oscillated so that the normal line N of the oscillating member 2 draws an arc or a spiral. it can. Therefore, in the case of the configuration in which only the vibration in the first in-plane cos 2θ mode is generated, the swing member 2 is swung so that the normal line N of the swing member 2 draws an arc using the resonance phenomenon. The shape of the swing member 2 is such that the natural frequencies around the first axis A and around the second axis B are the same. Examples of the shape in which the natural frequencies around the first axis A and the second axis B are the same include a circular shape in plan view and a 4n square shape in plan view (n: is a positive integer).

  Further, in the case of a configuration that generates only the vibration in the first in-plane cos 2θ mode, when the configuration of the first axis A direction and the second axis B direction of the swing member 2 is the same, the swing member 2 and the like as a whole Even if a processing error that increases or decreases in size occurs, the natural frequency around the first axis A and the natural frequency around the second axis B of the swing member 2 remain the same. Therefore, in the case of the configuration in which only the vibration in the first in-plane cos 2θ mode is generated, when the configuration of the swing member 2 in the first axis A direction and the second axis B direction is the same, Even if a machining error occurs, the oscillation around the first axis A and the second axis B can be performed at the same frequency by utilizing the resonance phenomenon. In addition, as a concrete shape of the rocking | swiveling member 2 from which the structure of the 1st axis | shaft A direction and the 2nd axis | shaft B direction of the rocking | swiveling member 2 becomes the same, for example, a planar view circular shape, a planar view regular 4n square (n : Positive integer).

  Thus, in the case of a configuration that generates only the vibration in the first in-plane cos 2θ mode, the two-dimensional scanning device may not include a member for generating the vibration in the second in-plane cos 2θ mode. In the case of the present embodiment, the members for generating the vibration in the second in-plane cos 2θ mode include the third connecting member 4C, the fourth connecting member 4D, the third movable electrode 521, the third drive electrode 522, the second 3 AC power supply 523, 4th movable electrode 524, 4th drive electrode 525, and 4th AC power supply 526 correspond.

  The two-dimensional scanning apparatus 1 in the present embodiment is configured to perform two-dimensional scanning by reflecting laser light from a laser beam with a swing member 2. The two-dimensional scanning method in the two-dimensional scanning device according to the present invention is not limited to this, and for example, a light emitting element is placed on the surface of the swing member 2 and light such as laser light emitted from the light emitting element is used. A method of performing two-dimensional scanning may be used.

  Below, the modification of the drive means 5 is demonstrated.

<Modification 1>
The driving means 5 according to this modification includes first to fourth electric wires, first to fourth magnetic field generating means, and first to fourth AC power sources.

  FIG. 8 is an explanatory diagram of the two-dimensional scanning apparatus 1 including the driving unit 5 according to this modification. FIG. 8A shows a plan view of the two-dimensional scanning device 1 in the vicinity of a portion on the first axis A of the ring member 3. As shown in FIG. 8A, the first electric wire 53 is approximately second in two parts on the first axis A of the ring member 3 (in FIG. 8A, only one part is shown). It arrange | positions along the axis | shaft B direction. Although not shown, the second electric wire is disposed along two directions on the second axis B of the ring member 3 along the direction of the first axis A, and the third electric wire is connected to the third axis C of the ring member 3. The upper two parts are arranged along the substantially fourth axis D direction, and the fourth electric wire is arranged at the two parts on the fourth axis D of the ring member 3 along the substantially third axis C direction. .

  The first magnetic field generating means 54 generates a magnetic field in the thickness direction of the ring member 3 at the wire arrangement portion of the ring member 3 where the first electric wires 53 are arranged. FIG. 8B is a diagram showing a specific configuration of the first magnetic field generating means 54. As shown in FIG. 8B, the first magnetic field generating means 54 has a permanent 541 located on one side and the other side in the thickness direction of the ring member 3 with respect to the electric wire arrangement part. The magnet 541 is supported by a yoke 542 for increasing the magnetic force in the wire arrangement portion of the ring member 3. Although not shown, the second magnetic field generating means generates a magnetic field in the thickness direction of the ring member 3 at the electric wire arrangement portion of the ring member 3 on which the second electric wire is arranged, and the third magnetic field generating means A magnetic field in the thickness direction of the ring member 3 is generated in the electric wire arrangement portion of the ring member 3 in which the ring member 3 is arranged, and the fourth magnetic field generating means is configured so that the electric wire arrangement portion of the ring member 3 in which the fourth electric wire is arranged. Generate a magnetic field in the thickness direction. The second to fourth magnetic field generating means has the same configuration as the first magnetic field generating means.

  As shown in FIG. 8A, the first AC power supply 513 can apply a first AC voltage to the first electric wire 53. Although not shown, the second AC power source can apply the second AC voltage to the second electric wire, the third AC power source can apply the third AC voltage to the third electric wire, and the fourth AC power source. Is capable of applying a fourth AC voltage to the fourth electric wire.

  As shown in FIG. 8A, in the above configuration, when a first AC voltage is applied to the first electric wire 53 and a current flows through the first electric wire 53, the force A '' in the first axis A direction is a ring. It generate | occur | produces in the electric wire arrangement | positioning part by which the 1st electric wire 53 of the member 3 is arrange | positioned. Thus, the ring member 3 expands and contracts in the first axis A direction by generating the force A ″ in the first axis A direction. Similarly, by applying the 2nd to 4th AC voltage to the 2nd to 4th electric wires, forces in the 2nd to 4th axis B to D directions are generated in the respective electric wire arrangement portions of the ring member 3, and the 2nd to 4th axes. The ring member 3 expands and contracts in the second to fourth axis B to D directions by generating the forces in the B to D directions.

  Therefore, the driving unit 5 according to the present modification can generate the vibration in the first cos 2θ mode and the vibration in the second cos 2θ mode in the ring member 3 so that the normal line N of the swing member 2 draws an arc. The swing member 2 can be swung. Similarly to the above-described embodiment, the driving unit 5 according to this modification increases or decreases the amount of expansion / contraction of the ring member 3 with time in the first in-plane cos 2θ mode vibration and the second in-plane cos 2θ mode vibration. By doing so, the swing member 2 is swung so that the normal N of the swing member 2 draws a spiral. As a method of increasing or decreasing the amount of expansion / contraction of the ring member 3, for example, the first to fourth axes A to A generated in the electric wire arrangement part by increasing or decreasing the effective value of the first to fourth AC voltages with time. Mention may be made of increasing or decreasing the force in the D direction with time.

<Modification 2>
FIG. 9 is a plan view of the vicinity of the ring member 3 of the two-dimensional scanning apparatus 1 including the driving unit 5 according to this modification. As shown in FIG. 9, the driving unit 5 according to this modification includes first to fourth piezoelectric elements 55 </ b> A to 55 </ b> D and first to fourth AC power supplies 513, 516, 523, and 526.

  The first piezoelectric element 55 </ b> A is disposed at two portions on the second axis B of the ring member 3 such that the expansion / contraction direction is directed to the first axis A direction. The second piezoelectric element 55B is disposed at two portions on the first axis A of the ring member 3 such that the expansion / contraction direction is directed to the second axis B direction. The third piezoelectric element 55 </ b> C is disposed at two portions on the fourth axis D of the ring member 3 such that the expansion / contraction direction is directed to the third axis C direction. The fourth piezoelectric element 55D is disposed at two portions on the third axis C of the ring member 3 such that the expansion / contraction direction is directed to the fourth axis D direction. The ring member 3 in which the first to fourth piezoelectric elements 55A to 55D are arranged contracts in the expansion / contraction direction of the expanded / contracted piezoelectric element among the first to fourth piezoelectric elements 55A to 55D. The amount of expansion / contraction of the first to fourth piezoelectric elements 55A to 55D increases as the applied voltage increases.

  The first AC power supply 513 can apply a first AC voltage to the first piezoelectric element 55A. The second AC power supply 516 can apply a second AC voltage to the second piezoelectric element 55B. The third AC power source 523 can apply a third AC voltage to the third piezoelectric element 55C. The fourth AC power source 526 can apply a fourth AC voltage to the fourth piezoelectric element 55D.

  As described above, the second piezoelectric element 55B is applied with the second AC voltage whose phase is delayed by 180 ° with respect to the first AC voltage applied to the first piezoelectric element 55A. The expansion / contraction phase of the second piezoelectric element 55B is delayed by 180 ° with respect to the expansion / contraction phase. Therefore, the phase of the expansion and contraction in the first axis A direction and the expansion and contraction in the second axis B direction of the ring member 3 is different by 180 °. Therefore, vibration in the first in-plane cos 2θ mode is generated in the ring member 3 by expansion and contraction of the first piezoelectric element 55A and the second piezoelectric element 55B.

  The fourth piezoelectric element 55C is applied with the fourth AC voltage whose phase is delayed by 180 ° with respect to the third AC voltage applied to the third piezoelectric element 55C. The phase of expansion / contraction of the fourth piezoelectric element 55D is delayed by 180 ° with respect to the phase. Therefore, the phase of the expansion and contraction in the third axis C direction and the expansion and contraction in the fourth axis D direction of the ring member 3 differs by 180 °. Therefore, vibration in the second in-plane cos 2θ mode is generated in the ring member 3 due to expansion and contraction of the third piezoelectric element 55C and the fourth piezoelectric element 55D.

  Further, the phase of the third AC voltage is delayed by 90 ° with respect to the phase of the first AC voltage. Therefore, the expansion and contraction of the ring member 3 in the third axis C direction is delayed in phase by 90 ° with respect to the expansion and contraction in the first axis A direction. Further, the phase of the fourth AC voltage is delayed by 90 ° with respect to the phase of the second AC voltage. Therefore, the expansion and contraction of the ring member 3 in the fourth axis D direction is delayed in phase by 90 ° with respect to the expansion and contraction in the second axis B direction. Therefore, the expansion / contraction phase of the ring member 3 due to the vibration in the second in-plane cos 2θ mode is delayed by 90 ° with respect to the expansion / contraction phase of the ring member 3 due to the vibration in the first in-plane cos 2θ mode.

  Therefore, the driving means 5 according to the present modification causes the ring member 3 to generate vibration in the first in-plane cos 2θ mode and vibration in the second in-plane cos 2θ mode, so that the normal line N of the swing member 2 is an arc. As shown, the swing member 2 can be swung. Similarly to the above-described embodiment, the driving unit 5 according to this modification increases or decreases the amount of expansion / contraction of the ring member 3 with time in the first in-plane cos 2θ mode vibration and the second in-plane cos 2θ mode vibration. By doing so, the swing member 2 is swung so that the normal N of the swing member 2 draws a spiral. As a method of increasing or decreasing the amount of expansion / contraction of the ring member 3, for example, the amount of expansion / contraction of the first to fourth piezoelectric elements 55A to 55D is increased by increasing or decreasing the effective value of the first to fourth AC voltages with time. Mention may be made of increasing or decreasing over time.

<Modification 3>
FIG. 10 is a plan view of the two-dimensional scanning apparatus 1 including the driving unit 5 according to this modification. As shown in FIG. 10, the driving unit 5 according to this modification includes a piezoelectric element 56 disposed on the support member 6 and first to fourth AC power sources 513, 516, 523, and 526. As shown in FIG. 10A, the piezoelectric element 56 is disposed in a portion of the support member 6 that extends radially outward from the ring member 3. The piezoelectric elements 56 are arranged at one end portion and the other end portion of the support member 6 in the circumferential direction of the ring member 3.

  Accordingly, as shown by the one-dot chain line in FIG. 10A, when a voltage is applied only to the piezoelectric element 56 arranged at the end on the first axis A side among the piezoelectric elements 6 arranged on the support member 6. The support member 6 is curved, and the portion 31 of the ring member 3 connected to the support member 6 moves in the first axis A direction. On the other hand, when a voltage is applied only to the piezoelectric element 56 disposed at the end on the second axis B side among the piezoelectric elements 6 disposed on the support member 6 as indicated by a two-dot chain line in FIG. The support member 6 is curved, and the portion of the ring member 3 connected to the support member 6 moves in the second axis B direction.

  For this reason, as shown in FIG. 10 (b), when a voltage is applied to the piezoelectric element 56 arranged at the end on the first axis A side among the piezoelectric elements arranged on each support member 6, the ring The member 3 expands in the first axis A direction and contracts in the second axis B direction. On the other hand, although not shown, when a voltage is applied to the piezoelectric element 56 disposed at the end on the second axis B side among the piezoelectric elements disposed on the support members 6, the ring member 3 It contracts in the direction of the first axis A and expands in the direction of the second axis B.

  Among the piezoelectric elements 56 arranged as described above, the piezoelectric element 56 arranged at the end on the first axis A side is electrically connected to the first AC power supply 513. The piezoelectric element 56 disposed at the end on the second axis B side is electrically connected to the second AC power source 516.

  Thus, the phase of the piezoelectric element 56 disposed at the end on the second axis B side is in phase with respect to the first AC voltage applied to the piezoelectric element 56 disposed at the end on the first axis A side. A second AC voltage delayed by 180 ° is applied. For this reason, the phase of contraction of the second piezoelectric element 56 disposed at the end on the second axis B side is delayed by 180 ° with respect to the phase of contraction of the piezoelectric element 56 disposed at the end on the first axis A side. . Therefore, the phase of the expansion and contraction in the first axis A direction and the expansion and contraction in the second axis B direction of the ring member 3 is different by 180 °. Accordingly, vibration in the first in-plane cos 2θ mode is generated in the ring member 3 due to expansion and contraction of the piezoelectric element 56.

  The piezoelectric element 56 electrically connected to the first AC power source 513 or the second AC power source 516 is further electrically connected to the third AC power source 523 or the fourth AC power source 526. Specifically, the piezoelectric element 56 disposed at the end of the support member 6 on the third axis C side is electrically connected to the third AC power source 523. The piezoelectric element 56 disposed at the end of the support member 6 on the fourth axis D side is electrically connected to the fourth AC power source 526.

  Thus, the phase of the piezoelectric element 56 disposed at the end on the fourth axis D side is in phase with the third AC voltage applied to the piezoelectric element 56 disposed at the end on the third axis C side. A fourth AC voltage delayed by 180 ° is applied. Therefore, the expansion / contraction phase of the fourth piezoelectric element 56 disposed at the end on the fourth axis D side is delayed by 180 ° with respect to the expansion / contraction phase of the piezoelectric element 56 disposed at the end on the third axis C side. . Therefore, the phase of the expansion and contraction in the third axis C direction and the expansion and contraction in the fourth axis D direction of the ring member 3 differs by 180 °. Therefore, vibration in the second in-plane cos 2θ mode is generated in the ring member 3 due to expansion and contraction of the piezoelectric element 56.

  Further, the phase of the third AC voltage is delayed by 90 ° with respect to the phase of the first AC voltage, and the phase of the fourth AC voltage is delayed by 90 ° with respect to the phase of the second AC voltage. Therefore, as described in the second modification, the expansion / contraction phase of the ring member 3 due to the vibration in the second in-plane cos 2θ mode in this modification is the expansion / contraction phase of the ring member 3 due to the vibration in the first in-plane cos 2θ mode. It is 90 degrees behind.

  Therefore, the driving means 5 according to the present modification causes the ring member 3 to generate vibration in the first in-plane cos 2θ mode and vibration in the second in-plane cos 2θ mode, so that the normal line N of the swing member 2 is an arc. As shown, the swing member 2 can be swung. Similarly to the above-described embodiment, the driving unit 5 according to this modification increases or decreases the amount of expansion / contraction of the ring member 3 with time in the first in-plane cos 2θ mode vibration and the second in-plane cos 2θ mode vibration. By doing so, the swing member 2 is swung so that the normal N of the swing member 2 draws a spiral. As a method for increasing or decreasing the amount of expansion / contraction of the ring member 3, for example, by increasing or decreasing the effective value of the first to fourth AC voltages with time, the bending amount of the support member 6 is increased or decreased with time. A method can be mentioned.

<Modification 4>
FIG. 11 is a configuration diagram of the two-dimensional scanning apparatus 1 provided with the driving unit 5 according to this modification. FIG. 11A is a schematic plan view of the vicinity of the ring member 3 of the two-dimensional scanning apparatus 1 provided with the driving unit 5 according to this modification. FIG.11 (b) is TT sectional drawing of Fig.11 (a).

  As shown in FIG. 11, the drive means 5 includes a permanent magnet 57, first to eighth coils 58 </ b> A to 58 </ b> H, and first to eighth AC power supplies 513, 516, 523, 526, 533, 536, 543, 546. . As shown in FIG. 11B, the permanent magnet 57 is attached to one surface of the swing member 2. The first to eighth coils 58 </ b> A to 58 </ b> H are arranged at a predetermined distance from the plane P on the side where the permanent magnet 57 of the plane P including the ring member 3 is attached. As shown in FIG. 11A, the first to eighth coils 58A to 58H are arranged at 45 ° intervals with respect to the center of the swinging member 2 so as to surround the center of the swinging member 2 in plan view. ing. Specifically, the first coil 58 </ b> A is disposed at a position overlapping the first axis A on one side in the first axis A direction with respect to the center of the swing member 2. With respect to the first coil 58A, the second coil 58B is positioned 45 ° counterclockwise around the swing member 2, and the third coil 58C is 90 ° counterclockwise around the swing member 2. The fourth coil 58D is at a position of 135 ° counterclockwise around the swing member 2, and the fifth coil 58E is at a position of 180 ° counterclockwise around the swing member 2. The sixth coil 58F is located at a position 225 ° counterclockwise around the swing member 2, and the seventh coil 58G is located at a position 270 ° counterclockwise around the swing member 2. Is arranged at a position of 315 ° counterclockwise around the swing member 2.

  The first coil 58A is electrically connected to the first AC power source 513, the second coil 58B is electrically connected to the fifth AC power source 533, and the third coil 58C is electrically connected to the third AC power source 523. The fourth coil 58D is electrically connected to the sixth AC power source 536, the fifth coil 58E is electrically connected to the second AC power source 516, and the sixth coil 58F is connected to the seventh AC power source. The seventh coil 58G is electrically connected to the fourth AC power source 526, and the eighth coil 58H is electrically connected to the eighth AC power source 546. The fifth AC power source 523 can apply a fifth AC voltage (see FIG. 7) whose phase is delayed by 45 ° with respect to the first AC voltage, and the sixth AC power source 536 has a phase with respect to the first AC voltage. The sixth AC voltage (see FIG. 7) delayed by 135 ° can be applied, and the seventh AC power supply 543 applies the seventh AC voltage (see FIG. 7) with a phase delayed by 225 ° relative to the first AC voltage. The eighth AC power supply 546 can apply an eighth AC voltage (see FIG. 7) whose phase is delayed by 315 ° with respect to the first AC voltage.

  As shown in FIG. 11B, when a voltage is applied to the first to eighth coils 58A to 58H, a magnetic field is generated between the first to eighth coils 58A to 58G and the permanent magnet 57, and attractive force or repulsive force is generated. The magnetic force is generated.

  An alternating voltage having a phase difference of 180 ° is applied to the two coils arranged on the opposite sides across the center of the swing member 2. Therefore, as shown in FIG. 11 (b), an attractive force is generated between the third coil 58 </ b> C and the permanent magnet 57 disposed on one side across the center of the swing member 2, and the center of the swing member 2. A repulsive force is generated between the seventh coil 58 </ b> G and the magnet permanent stone 57 arranged on the other side of the magnet. Therefore, as shown by a dotted line in FIG. 11B, the swing member 2 is close to the coil on the side where the attractive force is generated, and is separated from the coil on the side where the repulsive force is generated. By such approach and separation, the swing member 2 swings.

  In the first to eighth coils 58 </ b> A to 58 </ b> H, the AC voltage applied to the coils differs by 45 ° between adjacent coils. Accordingly, when the portion of the swing member 2 that approaches and separates from the coil is displaced in the circumferential direction, the swing member 2 swings so that the normal line N draws an arc.

  Similarly to the above-described embodiment, the driving means 5 according to this modification increases or decreases the swing amplitude of the swing member 2 over time, so that the normal line N of the swing member 2 is spiral. The swing member 2 is swung so as to draw As a method of increasing or decreasing the swing amplitude of the moving member 2 with time, for example, the effective value of the first to eighth AC voltages is increased or decreased with time, so that the first to eighth coils 58A to 58G are made permanent. A method for increasing or decreasing the attractive force or repulsive force generated between the magnet 57 and the magnet 57 can be given.

FIG. 1 is a schematic plan view of a two-dimensional scanning device according to an embodiment. FIG. 2 is a configuration diagram of the first connecting member. Fig.2 (a) shows the top view of the 1st connection member in the state which is not rock | fluctuated. FIG. 2B shows a ZZ cross-sectional view when the first connecting member swings in a direction substantially orthogonal to the plane including the ring member. FIG. 2C shows a plan view of the first connecting member in a swinging state. FIG. 3 is a plan view of the first connecting member. Fig.3 (a) shows the top view of the state which has not expanded the connection part. FIG. 3B is a plan view showing a state where the connection portion is extended. FIG. 4A is a plan view showing vibration in the first in-plane cos 2θ mode generated in the ring member 3. FIG. 4B is a plan view showing the vibration in the second in-plane cos 2θ mode generated in the ring member 3. FIG. 5 is a diagram showing a correspondence relationship between the expansion and contraction state of the ring member and the swinging state of the swinging member. FIG. 6 is a diagram showing a correspondence relationship between the expanded and contracted state of the ring member and the swinging state of the swinging member. FIG. 7 shows each phase of the second to eighth AC voltages with respect to the phase of the first AC voltage. FIG. 8 is an explanatory diagram of a two-dimensional scanning device including a driving unit according to the first modification. FIG. 8A shows a plan view of the two-dimensional scanning device in the vicinity of the part on the first axis of the ring member. FIG. 8B is a diagram showing a specific configuration of the first magnetic field generating means. FIG. 9 is a plan view of the vicinity of the ring member 3 of the two-dimensional scanning device including the driving unit according to the second modification. FIG. 10 is an explanatory diagram of a two-dimensional scanning apparatus including a driving unit according to the third modification. FIG. 10A shows an enlarged plan view of the vicinity of the piezoelectric element of the driving means according to the third modification. FIG. 10B shows a state of the ring member when a voltage is applied to the piezoelectric element arranged at the end portion on the first axis side among the piezoelectric elements arranged on each support member. FIG. 11 is a configuration diagram of a two-dimensional scanning device provided with driving means according to the fourth modification. FIG. 11A is a schematic plan view of the vicinity of the ring member of the two-dimensional scanning device provided with the driving unit according to this modification. FIG.11 (b) shows TT sectional drawing of Fig.11 (a). FIG. 12 is an explanatory diagram of the gimbal structure.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Two-dimensional scanning apparatus, 2 ... Swing member, 3 ... Ring member, 4A-4D ... 1st-4th connection member, 5 ... Drive means, 6 ... Support member, 7 ... Housing

Claims (5)

A swing member;
A ring member disposed outside the swing member so that the center thereof coincides with the swing member;
A pair of first connecting members connecting the rocking member and the ring member, existing in a plane including the ring member, and disposed along a first axis passing through the center of the rocking member; ,
The swing member is connected to the ring member, and is disposed along a second axis that exists in a plane including the ring member, passes through the center of the swing member, and is orthogonal to the first axis. A pair of second connection members,
The first connection member and the second connection member can swing in a substantially orthogonal direction with respect to a plane including the ring member, with a connection portion with the ring member as a swing center.
And a drive means for swinging the swinging member by swinging the first connecting member and the second connecting member by expanding and contracting the ring member,
The driving means includes
The ring member is expanded in the first axis direction and contracted in the second axis direction to swing the swing member around the first axis.
A two-dimensional scanning device characterized in that the rocking member is swung around the second axis by contracting the ring member in the first axial direction and extending in the second axial direction. The driving means includes
The ring member generates vibration in the first in-plane cos 2θ mode that expands and contracts in the first axis direction and the second axis direction, and the first axial direction of the ring member in the vibration in the first in-plane cos 2θ mode. The two-dimensional scanning apparatus according to claim 1, wherein the amount of expansion and contraction in the second axis direction is increased or decreased with time.   The connection portion of the first connection member is bent in a convex shape in the second axial direction, and the connection portion of the second connection member is bent in a convex shape in the first axial direction. The two-dimensional scanning device according to 1 or 2. A third axis that connects the swing member and the ring member, exists in a plane including the ring member, passes through the center of the swing member, and forms an angle of 45 ° with the first axis. A pair of third connecting members disposed along;
The swing member is connected to the ring member, and is disposed along a fourth axis that exists in a plane including the ring member, passes through the center of the swing member, and is orthogonal to the third axis. A pair of fourth connecting members;
The third connecting member and the fourth connecting member can swing in a substantially orthogonal direction with respect to a plane including the ring member, with a connecting portion with the ring member as a swing center.
In the second plane, the maximum expansion / contraction direction is 45 ° and the expansion / contraction phase of the ring member is 90 ° different from the vibration in the first in-plane cos 2θ mode and the vibration in the first in-plane cos 2θ mode. cos 2θ mode vibration is simultaneously generated in the ring member, and the expansion amount of the ring member in the first axial direction and the second axial direction in the first in-plane cos 2θ mode vibration, and the second plane 4. The two-dimensional scanning device according to claim 2, wherein the amount of expansion and contraction of the ring member in the third axis direction and the fourth axis direction in the vibration of the inner cos 2θ mode is increased or decreased with time.   The connection portion of the third connection member is bent in a convex shape in the fourth axis direction, and the connection portion of the fourth connection member is bent in a convex shape in the third axis direction. 5. The two-dimensional scanning device according to 4.

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