JP2009039866A - Resin sealing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a resin sealing device which can materialize a high press capacity at a low cost by adopting a toggle link mechanism and simultaneously maintain the parallelism of a mold during advance/retreat movement. <P>SOLUTION: In the resin sealing device 100 of a compression mold, an upper mold 114 arranged on the side of a ceiling panel 110 and a lower mold 116 arranged on the side of a movable platen 120 are made to be contactable/separable by forward/backward moving the movable platen 120 connected with a press mechanism 125 adopting the toggle link mechanism 124 in relation to the ceiling panel 110 supported on a tie bar 112. The movable platen 120 is divided in the advance/retreat movement direction into a lower part movable platen 120A connected with the press mechanism and an upper part movable platen 120 B on which a lower mold 116 is arranged, and the lower part movable platen 120A and the upper part movable platen 120B are brought into point-contact. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a technical field of a resin sealing device that compresses and seals a substrate on which a semiconductor chip is mounted with resin.

  Conventionally, a compression type resin sealing device described in Patent Document 1 is known. Here, by directly moving the movable platen back and forth with a ball screw, the mold provided in the movable platen is brought into contact with and separated from the counterpart mold, and compression molding is performed. When the movable platen is moved forward and backward directly by the ball screw in this way, the parallelism of the mold placed on the movable platen (relative to the other mold) can be kept high, and when moving forward and backward. There is an advantage that the positional accuracy can be finely managed and controlled.

  On the other hand, as described in Patent Document 2, a press mechanism using a toggle link mechanism is also known. This toggle link mechanism has an advantage that, for example, the same level of pressing ability (pressurizing ability) can be realized at a low cost as compared with a case where it is directly driven by a ball screw.

JP 2003-165134 A JP 2006-297818 A

  In recent years, it has been desired to improve the production efficiency, for example, by increasing the size of the substrate and further compressing a large number of substrates with one mold. In order to meet this demand, it is necessary to improve the press capability of a press mechanism for moving the die having a large area forward and backward, as well as ensuring a large die area. For this purpose, for example, it can be dealt with by changing to a large-capacity ball screw and a large-capacity drive source (for example, a motor), but the accompanying increase in cost is significant. For example, if a press mechanism that employs a toggle link mechanism is used, a high press capacity (pressing capacity) can be secured at a relatively low cost. It is not enough to combine mechanisms.

  In compression molding, maintaining the parallelism of the mold when the mold moves back and forth (that is, moving the mold back and forth while maintaining parallelism) is an important point in molding. For example, in transfer molding, since the molds are moved forward and backward to bring the molds into contact with each other and then molded by pushing the resin with a plunger or the like, the molds are not kept somewhat parallel during the forward and backward movement process. However, if the mold comes into contact as a result, the resin can be pressed and molded. However, in the case of compression molding, the resin is brought into contact with the substrate (molded product) while being moved forward and backward (while the mold is advanced and retracted), and compression is performed. Therefore, if the mold is compressed without being parallel, the resin cannot contact the substrate evenly, and an unnecessary resin flow occurs in the cavity, causing the bonding wire to be short-circuited or disconnected. This is a cause of resin leakage. Therefore, in compression molding, it is important to maintain the parallelism of the mold when the mold moves back and forth.

  Looking at the press mechanism using the toggle link mechanism from this point of view, it is difficult to keep the molds parallel during advance and retreat due to the “link” structure. In other words, since a plurality of link members are combined, manufacturing errors and assembly errors of each link member, and backlash are likely to occur due to aging, and it is difficult to move the mold forward and backward in parallel. It has become.

  The present invention has been made to solve such problems, and adopts a toggle link mechanism to achieve high press capability at low cost, and at the same time, it is possible to maintain the parallelism of the mold when moving forward and backward. An object is to provide a resin sealing device.

  According to the present invention, the first plate placed on the fixed platen side and the movable platen side are moved by moving the movable platen connected to the press mechanism forward and backward with respect to the fixed platen supported by the support column. A compression type resin sealing device capable of contacting and separating from a second mold, wherein the press mechanism is a toggle link type press mechanism, and the movable platen is divided at least in the forward / backward direction. A first movable platen connected to the press mechanism, and a second movable platen on which the second mold is disposed, and the first movable platen and the second movable platen The above-described problems are solved by making point contact or line contact.

  By adopting such a configuration, the second mold can be moved forward and backward with respect to the first mold while maintaining parallelism with the first mold. That is, in the toggle link mechanism, even when an obstructing factor that impairs the parallelism of the mold arranged on the movable platen side due to play caused by manufacturing errors or assembly errors of the link member occurs, the first movable By means of “point contact” or “line contact” between the platen and the second movable platen, it is possible to make it difficult to transmit the inhibition factor to the first movable platen. In addition, since a press mechanism employing a toggle link mechanism is used, it is possible to secure the required press capability at a low cost.

  “Point contact” as a point in the present invention is realized by, for example, contact between a flat surface and a spherical surface, realized by contacting spherical surfaces with different radii, or contact with spherical surfaces having the same radius and different centers. Can be realized. By adopting such “point contact”, it is possible to freely absorb inclinations in all directions. In addition, the “line contact” can be realized by, for example, a hook provided on at least one contact surface of the first movable platen or the second movable platen. In the case of “line contact”, a larger contact area can be secured than in the case of point contact, so that a high press load can be allowed and durability can be improved. It should be noted that this effect of the present invention cannot be realized with a surface contact structure such as a universal joint. This is because the offset load component from the toggle link is transmitted to the first movable platen when in surface contact.

  In addition, if the second movable platen is not supported by the support column, the length of the support column itself can be shortened. The presence of a temperature difference in the strut causes a difference in the elongation of each strut, which can be a factor that hinders the mold parallelism.

  In addition, if the main body portion on which the column is erected is provided and the second movable platen is supported by the main body portion via a guide member, the second guide of the second movable platen is supported by the linear guide. Smooth advance and retreat is further promoted, and further parallelism can be maintained.

  In addition, a toggle link mechanism is adopted if a detection means capable of detecting the position of the second movable platen due to the forward / backward movement is provided and the detection result of the detection means is fed back to the control of the press mechanism. Even when the press mechanism is used, it is possible to more precisely control the position accuracy of the mold at the time of advancement / retraction and the speed of advancement / retraction, and as a result, it is possible to ensure high compression molding accuracy. At this time, for example, if the detection means performs the detection from immediately before the first and second molds start clamping to the time when the clamping ends, the position accuracy of the molds can be achieved. Except for the part where the accuracy of the speed control is most required, the accuracy of the position and speed of the toggle press itself is used, so that the control can be simplified and the necessary accuracy can be maintained.

  Further, if the toggle link type press mechanism is configured so that an initial load is applied from the main body portion, for example, the occurrence of looseness caused by manufacturing errors, assembly errors, etc. of the link member is suppressed, and the parallelism of the molds is suppressed. At the same time as maintaining the degree, it is possible to reduce the generation of impact sound or the like during advance / retreat.

  By applying the present invention, it is possible to adopt a toggle link mechanism and realize high press capability at low cost, and at the same time maintain the parallelism of the mold during advancement and retraction.

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a front sectional view of a resin sealing device showing an example of an embodiment of the present invention. FIG. 2 is a cross-sectional side view of the same. FIG. 3 is an enlarged view of the vicinity of an arrow III portion in FIG.

<Configuration of resin sealing device>
In the resin sealing device 100, a substantially rectangular main body 118 is placed on and fixed to the upper portion of the main body base 117 in plan view. In addition, four tie bars (supports: only two appear in the drawing) 112 are erected on the main body 118, and a top plate (fixed platen) 110 is installed and fixed in a manner supported by the tie bars 112. ing. The tie bar 112 and the top plate 110 are connected and fixed by a nut 111. An upper mold 114 (first mold) 114 is suspended from the top plate 112.

  On the other hand, a movable platen 120 is provided inside the main body 118 so as to be movable back and forth in the vertical direction, that is, in the direction of the upper die 114 by a press mechanism 125 employing a toggle link 124 and a ball screw 126. Further, a lower mold (second mold) 116 is placed on the movable platen 120. Since the resin sealing device 100 is a so-called “compression type” resin sealing device, the lower mold 116 includes a frame-shaped mold having a through hole, a compression mold fitted in the through hole, Although it is configured to have a drive mechanism for driving the frame-shaped mold, it is simply described as the lower mold 116 here. The movable platen 120 is divided into two parts in the vertical direction (that is, the forward / backward direction), and includes an upper movable platen (second movable platen) 120B and a lower movable platen (first movable platen) 120A. Composed. The lower movable platen 120A is connected to the toggle link 124.

  The toggle link 124 includes a first link member 124A connected to the ball screw 126, a second link member 124B connected to both the main body 118 and the first link member 124A, and the second link member 124B and the lower movable platen 120A. And a third link member 124C connected to both of them. By adopting such a configuration, the first link member 124A can be moved up and down by the operation of the ball screw 126, and as a result, the movable platen 120 can be moved up and down.

  The ball screw 126 is supported on the main body base 117 via a bearing 128. A motor 150 is installed on the main body base 117, and a pulley 142 fixed to the tip of the output shaft 150 </ b> A of the motor 150 and a pulley 140 connected to a ball screw 126 are connected by a timing belt 141. As a result, the power of the motor 150 can be transmitted to the ball screw 126.

  Further, the lower movable platen 120A and the main body 118 are linked by a spring 125, and an initial load is always applied to press the lower movable platen 120A downward. By applying the initial load in this way, it is possible to prevent the occurrence of play due to manufacturing errors and assembly errors occurring in each link member constituting the toggle link 124, and to prevent the generation of impact noise during operation. It is configured.

  Further, the upper movable platen 120B is formed in a “U” shape having a concave bottom surface when viewed from the side (see FIG. 2). Further, the upper movable platen 120B is supported from the main body 118 by four linear guides (guide members) 119 so as to be slidable in the vertical direction. As described above, the upper platen 120 </ b> B can be smoothly moved up and down by being supported from the main body 118 by the plurality of linear guides 119.

  As described above, the movable platen 120 is divided into two in the vertical direction, and is composed of the lower movable platen 120A and the upper movable platen 120B. The upper movable platen 120B is merely placed on the lower movable platen 120A, and is not connected and fixed by bolts or the like. The two movable platens 120A and 120B are arranged in contact with each other by so-called “point contact” (see α part in FIG. 3). In the present embodiment, the surface (upper surface) of the lower movable platen 120A is a flat surface, while a part of the bottom surface of the upper movable platen 120B is a spherical surface, and point contact is realized between the spherical surface and the flat surface. Has been. By adopting such a configuration, even when the lower movable platen 120A is moved up and down by the toggle link 124 and tilted back and forth and left and right, the influence of the inclination of the lower movable platen 120A is affected by the upper movable platen. There is no transmission to the 120B side. That is, regardless of the inclination of the lower movable platen 120 </ b> A, the upper movable platen 120 </ b> B can maintain parallelism with respect to the upper mold 114 and the top plate 110.

  The “point contact” is not necessarily limited to the above-described embodiment. For example, as shown in FIG. 4A, point contact is caused by two spherical surfaces having different radii (the radius of the spherical surface RS-2 on the upper movable platen 220B side <the radius of the spherical surface RS-3 on the lower movable platen 220A side). It may be realized. Further, even if the radius is the same (the radius of the spherical surface RS-4 on the upper movable platen 320B side = the radius of the spherical surface RS-5 on the lower movable platen 320A side), it is realized by the contact of two spherical surfaces having different center points. Is good (B). It is of course possible to configure the point contact portion so that it is inverted between the lower movable platen side and the upper movable platen side.

  In addition to “point contact”, “line contact” can also exert the same effect. In the case of line contact, a larger contact area can be ensured than in the case of point contact, so that a high press load can be allowed and durability can be improved. Specifically, as shown in FIG. 5, it is possible to form a flange 420C on the lower surface of the upper movable platen 420B to realize line contact. Further, for example, the movable platen may be divided into three to form two contact surfaces, and the direction of the flange formed on one contact surface and the direction of the flange formed on the other contact surface may be arranged orthogonally. . If comprised in this way, while being able to absorb the inclination over all directions like "point contact", the improvement with respect to load performance is also realizable. In addition, the collar part may be formed in the lower movable platen side, and it is good also as a structure where the other part which contacts a collar part was dented like a groove | channel.

  Here, for the contact between the lower movable platen 120A and the upper movable platen 120B, "surface contact" such as a universal joint cannot be adopted. This is because in the case of surface contact, the offset load component from the toggle link 124 is transmitted to the upper movable platen 120B via the lower movable platen 120A.

  Reference numeral 127 denotes a guide shaft for guiding the vertical movement (advancement and retraction) of the lower movable platen 120A, and a part of the main body 118 protrudes to support the guide shaft, thereby forming the shaft support portion 118A. is doing.

<Operation of resin sealing device>
Then, the effect | action of this resin sealing apparatus 100 is demonstrated.

  The motor 150 as a power source rotates its output shaft 150A at a predetermined timing. When the output shaft 150 </ b> A rotates, the rotation is transmitted to the pulley 140 via the pulley 142 and the timing belt 141. This power is transmitted to the ball screw 126 supported by the bearing 128. Due to the rotation of the ball screw 126, the first link member 124A constituting the toggle link 124 starts to rise. Along with this, the second link member 124B and the third link member 124C also rotate, and as a result, the lower movable platen 120A is raised. During the ascent, the lower movable platen 120A is inclined due to backlash or the like caused by manufacturing errors or assembly errors of the link members constituting the toggle link 124, and the parallelism (with respect to the upper mold 114 and the top plate 110) is generated. Parallelism) may be disturbed. However, even in such a case, the inclination is absorbed by the point contact (point contact portion α) between the lower movable platen 120A and the upper movable platen 120B, and the inclination of the lower movable platen 120A moves toward the upper movable platen 120B. Not transmitted. As a result, the upper movable platen 120B and the lower mold 116 placed on the upper movable platen 120B are raised while maintaining parallelism. Further, the upper movable platen 120B is supported by the linear guide 119 so as to be slidable in the vertical direction from the main body 118, and rises smoothly without receiving complicated sliding resistance from the main body 118.

  Furthermore, since the movable platen is moved back and forth by the press mechanism 125 employing the toggle link 124, a high press capability (pressing capability) is exhibited.

  Further, if the upper movable platen 120B is not supported by the tie bar (support) 112 as in this embodiment, the length of the tie bar 112 itself (the length in the vertical direction) can be shortened. A factor that inhibits the parallelism of the mold caused by the tie bar 112 (for example, the presence of a temperature difference in each tie bar 112 causes a difference in the elongation of each tie bar 112, which may be a factor that inhibits the parallelism of the mold). Can be reduced. Further, for example, a temperature adjusting member such as a rubber heater is arranged on each tie bar 112, and when a temperature difference occurs between the tie bars 112, the temperature difference is positively canceled and the parallelism of the mold is maintained. Various configurations may be adopted.

  Although not shown, for example, if a laser displacement meter or the like (detection means) is provided on the lower surface side of the top plate 110 so that a change in position due to the forward and backward movement of the upper movable platen 120B can be detected, as a result It becomes possible to grasp the current position (distance) between the mold 114 and the lower mold 116. That is, by feeding back the detection result of the laser displacement meter, the vertical movement (advancement and retraction) of the movable platen 120 can be controlled more precisely, and the movable platen 120 and the lower mold 116 can be controlled during resin sealing. It is possible to improve the accuracy of the position, and further the accuracy of the advance / retreat speed. At this time, for example, if the upper mold 114 and the lower mold 116 are configured to be detected by the displacement meter only from immediately before the mold clamping is started until the time when the mold clamping is completed, the compression molding is performed. Except for the parts where the position accuracy and speed control accuracy of both dies are most required, the position and speed accuracy of the press mechanism 125 itself using the toggle link 124 is used, and the control can be simplified and necessary. High accuracy can be maintained.

  The present invention can be used as a compression type resin sealing device that compresses and seals a substrate on which a semiconductor chip is mounted with resin.

Front sectional view of a resin sealing device showing an example of an embodiment of the present invention Side sectional view of a resin sealing device showing an example of an embodiment of the present invention Enlarged view around arrow III in Figure 1 The figure which showed the other structural example of the point contact part Diagram showing configuration example of line contact

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Resin sealing apparatus 110 ... Top plate (fixed platen)
111 ... Nut 112 ... Tie bar
114 ... Upper die 116 ... Lower die 117 ... Main body base 118 ... Main body 119 ... Linear guide (guide member)
120 ... movable platen 120A ... lower movable platen (first movable platen)
120B ... Upper movable platen (second movable platen)
124 ... Toggle link 125 ... Press mechanism 126 ... Ball screw 128 ... Bearing 140, 142 ... Pulley 141 ... Timing belt 150 ... Motor 150A ... Output shaft

Claims (10)

A first mold disposed on the fixed platen side and a second mold disposed on the movable platen side by moving the movable platen connected to the press mechanism forward and backward with respect to the fixed platen supported by the support column. A compression type resin sealing device capable of contacting and separating from a mold,
The press mechanism is a toggle link type press mechanism;
The movable platen is divided in the forward / backward direction and has at least a first movable platen connected to the press mechanism and a second movable platen on which the second mold is disposed;
The resin sealing device, wherein the first movable platen and the second movable platen are in point contact or line contact. In claim 1,
Contact between the first movable platen and the second movable platen is a point contact,
The point contact is realized by contact between a flat surface and a spherical surface. In claim 1,
Contact between the first movable platen and the second movable platen is a point contact,
The point contact is realized by contact of spherical surfaces having different radii. In claim 1,
Contact between the first movable platen and the second movable platen is a point contact,
The point contact is realized by contact of spherical surfaces having the same radius and different centers. In claim 1,
Contact between the first movable platen and the second movable platen is a line contact,
The line contact is realized by a collar provided on at least one contact surface of the first movable platen or the second movable platen. In any one of Claims 1 thru | or 5,
The said 2nd movable platen is supported from members other than the said support | pillar. The resin sealing apparatus characterized by the above-mentioned. In any one of Claims 1 thru | or 6.
A main body portion on which the support column is erected;
The second movable platen is supported by the main body through a guide member. In any one of Claims 1 thru | or 7,
A detection means capable of detecting the position of the second movable platen by the forward and backward movement;
A resin sealing device, wherein the detection result of the detection means is fed back to the control of the press mechanism. In claim 8,
The resin sealing device is characterized in that detection is performed by the detection means from immediately before the first and second molds start clamping to when the clamping ends. In any one of Claims 1 thru | or 9,
An initial load is applied to the toggle link press mechanism from the main body.

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