JP2009023299A - Full-multi-ink-jet head - Google Patents

Full-multi-ink-jet head Download PDF

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Publication number
JP2009023299A
JP2009023299A JP2007190941A JP2007190941A JP2009023299A JP 2009023299 A JP2009023299 A JP 2009023299A JP 2007190941 A JP2007190941 A JP 2007190941A JP 2007190941 A JP2007190941 A JP 2007190941A JP 2009023299 A JP2009023299 A JP 2009023299A
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Japan
Prior art keywords
orifice plate
ink
liquid chamber
head
orifice
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Pending
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JP2007190941A
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Japanese (ja)
Inventor
Tsutomu Kawai
力 河合
Junya Kawase
順也 川瀬
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007190941A priority Critical patent/JP2009023299A/en
Publication of JP2009023299A publication Critical patent/JP2009023299A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To reduce a power consumption of a CR manufacturing method FM head, eliminate unstable inclination and wet clogging, improve the relative position precision of nozzles and heaters, and reduce cost by shortening processing steps and reducing defect rate. <P>SOLUTION: The thickness of an orifice plate of the CR manufacturing method head and the height of liquid chambers are reduced, thereby reducing a discharge resistance of ink. After forming the liquid chambers by pasting the orifice plate, nozzle holes of the orifice plate are processed by laser. An insulating layer covering the upper surfaces of the heaters also serves as a protective film against the nozzle hole processing laser light. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明はフルマルチプリンタのインクジェットヘッドに関するものである。   The present invention relates to an inkjet head of a full multi-printer.

従来のカバーレジスト構造のFMヘッドは
(1)オリフィスプレート厚がTAB材の標準厚である17.5μを越える範囲
(2)主ドロップレットの大きさは一般に5plを越えている(例えば15pl)
(3)液室高さは10μmを越えている(例えば30μm)
(4)ノズル孔形状は吐出口側の孔径は液室側のそれより小さい。
(5)オリフィスプレートの材料はポリイミドでありヒータボードやタブに接着できない為、エポキシ材による接着層が設けてある。
(6)撥水剤の塗工工程を設けている。塗工は印刷方式が主流である。
Conventional cover resist structure FM heads are as follows: (1) Orifice plate thickness exceeds 17.5μ which is the standard thickness of TAB material (2) Main droplet size generally exceeds 5 pl (for example, 15 pl)
(3) Liquid chamber height exceeds 10 μm (for example, 30 μm)
(4) The nozzle hole shape has a smaller hole diameter on the discharge port side than that on the liquid chamber side.
(5) Since the material of the orifice plate is polyimide and cannot be bonded to the heater board or the tab, an adhesive layer made of an epoxy material is provided.
(6) A water repellent coating step is provided. The main method of coating is printing.

従来例としては、例えば特許文献1と特許文献2をあげることができる。
特開2002−079666号公報 特開平07−329304号公報
For example, Patent Document 1 and Patent Document 2 can be cited as conventional examples.
JP 2002-079666 A JP 07-329304 A

(1)オリフィスプレートに穿たれたノズル道長が大でインクの吐出抵抗が大であった。
(2)淡色印刷時ディザ模様が目立ち、画質低下を招く。
(3)液室、液路の毛細管力が小さくインクリフィル速度が遅い。吐出・周波数を高くできない。
(4)縮小光学系によるレーザ孔開けされたオリフィスプレートを、液室形成されたヒータボードに貼付組立しなければならず、その時ヒータとノズル穴位置合せが難工程となる。
(5)接着層分オリフィスプレートが厚くなる。また液室内壁部の天井部に接着層が露呈する為、レーザ加工の2層障害や、薬液との接液障害がある。
(6)均一に塗れるコータ(スピンコータやロールコータ)が使えないため、塗工ムラの問題有、硬化処理工程を含め塗工工程は順序制限が発生する。
(1) The nozzle path length perforated in the orifice plate was large and the ink ejection resistance was large.
(2) A dither pattern is conspicuous at the time of light color printing, resulting in a decrease in image quality.
(3) The capillary force of the liquid chamber and the liquid path is small and the ink refill speed is low. Discharge / frequency cannot be increased.
(4) An orifice plate having a laser hole formed by a reduction optical system must be attached and assembled to a heater board formed with a liquid chamber. At that time, it is difficult to align the heater and the nozzle hole.
(5) The orifice plate is thickened by the adhesive layer. Further, since the adhesive layer is exposed on the ceiling of the liquid chamber wall, there are two-layer obstacles in laser processing and obstacles in contact with chemicals.
(6) Since a coater (spin coater or roll coater) that can be applied uniformly cannot be used, there is a problem of uneven coating, and the coating process including the curing process process is limited in order.

経肺投薬器(ID−TF)のIDカートリッジ製法等流用すれば良い。   What is necessary is just to divert ID cartridge manufacturing method etc. of a transpulmonary medication device (ID-TF).

(1)製造方法流用で5μ〜10μm厚のオリフィスプレートは実施できる。
(2)(1)に小径ノズル加工することにより、吐出抵抗を大にすることなく、主ドロップレット径が5μ〜10μmの液滴を飛ばすことができる。(3)により吐出エネルギー効率を上げられる。
(3)本構造から液室高さが小になれれば毛細管力は大になることは自明。一般に液室加工をフォトレジ装置にて加工すれば側壁部のテーパが発生するが、液室高さが低くなればテーパの吐出影響力が小になる。
(4)オリフィスプレートの貼付工程によれば、逆テーパノズルになるが、ヒータとノズル穴の位置合せ工程がなくなる。
(5)接着性のあるポリイミド材を用いれば、接着剤層をなくすことができる。
(6)オリフィスプレートへの塗布工程はなくなり、撥水層を均一な厚みにできる。
(1) An orifice plate having a thickness of 5 μm to 10 μm can be implemented by diverting the manufacturing method.
(2) By processing a small-diameter nozzle in (1), a droplet having a main droplet diameter of 5 μm to 10 μm can be ejected without increasing the discharge resistance. The discharge energy efficiency can be increased by (3).
(3) It is obvious that the capillary force increases if the liquid chamber height can be reduced from this structure. In general, when the liquid chamber is processed by a photo-resist device, a taper of the side wall portion is generated.
(4) According to the orifice plate sticking step, a reverse taper nozzle is obtained, but the heater and nozzle hole alignment step is eliminated.
(5) If an adhesive polyimide material is used, the adhesive layer can be eliminated.
(6) The application process to the orifice plate is eliminated, and the water repellent layer can be made to have a uniform thickness.

本発明によれば、フルマルチインクジェットヘッドの消費電力を小にし、傾向よれ、濡れ不吐、をなくすことができる。また、ノズル、ヒータの相対位置精度を向上し、加工工程短縮と不良率低減でコストダウンをはかることができる。   According to the present invention, it is possible to reduce the power consumption of the full multi-ink jet head and to eliminate the tendency and the wet discharge. In addition, the relative position accuracy of the nozzle and heater can be improved, and the cost can be reduced by shortening the machining process and reducing the defect rate.

(第1の実施例)
図12に示す。図1は単列ノズルのフルマルチインクジェットヘッドの外観であって、ノズル部分を順次拡大して示してある。拡大図中の矢印はインクの流入方向を示す。
(First embodiment)
As shown in FIG. FIG. 1 shows the appearance of a single-row nozzle full multi-ink jet head, in which the nozzle portions are sequentially enlarged. The arrow in the enlarged view indicates the inflow direction of ink.

1はオリフィスプレートであって厚みが10μm以内であり、レーザー加工によりノズル孔部1aが穿ってある。図2は2のヒータボードと1により形成される。2b液室部の断面模式図であり、2aは液室形成・壁部、2cはヒータ部、2dは保護膜部を示す。1は透明なポリイミドが主成分の材質であり、2a部は2のシリコンウェア上に形成されたエポキシ系樹脂であり、1と2が貼付組立てられた後2cをターゲットに縮少光学系にてノズルパターンマスクによるレーザ光加工される。2cがターゲットになる為、孔位置が加工によりズレることはない。1aは光学系により、テーパ形状となるが1が薄いため小孔であっても状来に比べ、インクの吐出抵抗は小さくすることが可能である。加工の余剰レーザエネルギは2dにより遮蔽される為、2cに影響はない。   Reference numeral 1 denotes an orifice plate having a thickness of 10 μm or less and having a nozzle hole 1a formed by laser processing. FIG. 2 is formed by two heater boards and one. 2b is a schematic cross-sectional view of a liquid chamber portion, 2a is a liquid chamber formation / wall portion, 2c is a heater portion, and 2d is a protective film portion. 1 is a material composed mainly of transparent polyimide, 2a is an epoxy resin formed on siliconware 2 and after 1 and 2 are attached and assembled, 2c is used as a target with a reduced optical system. Laser beam processing is performed using a nozzle pattern mask. Since 2c becomes a target, the hole position is not shifted by processing. 1a has a tapered shape due to the optical system, but since 1 is thin, even if it is a small hole, it is possible to reduce the ink ejection resistance compared to the conventional case. Since the surplus laser energy for processing is shielded by 2d, 2c is not affected.

図1に於いて3はタブであり配線基板である。2上の2eヒータボード端子部と3aの端子部を4aのボンディングワイヤにて接続してあり、4bの封止剤にてプロテクトしてある。   In FIG. 1, reference numeral 3 denotes a tab, which is a wiring board. The 2e heater board terminal portion on 2 and the terminal portion 3a are connected by a bonding wire 4a and protected by a sealant 4b.

(実施例2)
図3に示す。列間で隣接するノズル間を互いに補間するように2列ノズルが配置されたタイプである(千鳥配置ノズル)。このヘッドにより、より高精細な画像印刷が可能となる。1の両側面に3が配置される為、インク流路を2側面に設けることができないので、2の中央流路途中に複数箇所の2を貫通するリフィル孔を設け、インク供給を行う(図示せず)。
(Example 2)
As shown in FIG. This is a type in which two row nozzles are arranged so as to interpolate between adjacent nozzles between rows (staggered nozzles). This head enables higher-definition image printing. Since 3 are arranged on both side surfaces of 1, the ink flow path cannot be provided on the 2 side surfaces. Therefore, refill holes penetrating a plurality of 2 are provided in the middle of the central flow path of 2 to supply ink (FIG. Not shown).

図4に従来例との工程順の比較図を示す。   FIG. 4 shows a comparison diagram of the order of steps with the conventional example.

図5に従来例のヘッド部分側断面模式図を示す。   FIG. 5 is a schematic cross-sectional side view of a conventional head portion.

以上説明したように、本実施例によれば、吐出抵抗を小さくできる。駆動電圧を下げられる。消費電力が小さい。吐出周波数を上げられる。ドライブ条件で変調かけ易い。小ドロップレット化できた。高精細化ができ、淡色部のディザ模様が目立たない。リフィル速度向上。吐出周波数を上げられる。ヘッドのローコスト化ができ、ヒータ←→オリプレの位置合せ工程をなくすことができる。撥水剤塗布工程をなくすことができる。インクの吐出方向改善、ヒータとノズル孔位置が正確に合せられる。   As described above, according to the present embodiment, the discharge resistance can be reduced. Drive voltage can be lowered. Low power consumption. The discharge frequency can be increased. Modulation is easy under drive conditions. Small droplets were made. High definition can be achieved, and the dithered pattern in the light color is inconspicuous. Improved refill speed. The discharge frequency can be increased. The cost of the head can be reduced, and the heater ← → alignment process can be eliminated. The water repellent coating step can be eliminated. Improvement of ink ejection direction, heater and nozzle hole position can be accurately matched.

実施例1のFMヘッド外観図。FIG. 3 is an external view of an FM head according to the first embodiment. 実施例1のヘッド部分側断面模式図。FIG. 3 is a schematic cross-sectional side view of a head portion according to the first embodiment. 実施例2の外観図。FIG. 工程順の実施例と従来例の比較図。The comparison figure of the Example of a process order, and a prior art example. 従来例のヘッド部分側断面模式図。The head part side cross-sectional schematic diagram of a prior art example.

符号の説明Explanation of symbols

1 オリフィスプレート
1a ノズル孔部
2 ヒータボード
2a 液室形成壁部
2b 液室部
2c ヒータ部
2d 保護膜部
2e 端子部
3 タブ
3a 端子部
4a ボンディングワイヤ
4b 封止剤
DESCRIPTION OF SYMBOLS 1 Orifice plate 1a Nozzle hole part 2 Heater board 2a Liquid chamber formation wall part 2b Liquid chamber part 2c Heater part 2d Protective film part 2e Terminal part 3 Tab 3a Terminal part 4a Bonding wire 4b Sealant

Claims (1)

フルマルチインクジェットヘッドにおいて、
(1)オリフィスプレート厚が5μ〜10μmの範囲で、
(2)サテライト等含まない主ドロップレット径が5μ〜10μmの範囲(0.65pl〜5.2pl)で、
(3)液室高さが約10μm以内の範囲で
(4)ノズル孔形状が吐出口側の孔径が液室側の孔径より大きいことと、逆テーパであることと、
(5)オリフィス材は接着機能を有するエポキシ材が配合されたポリイミド材であることと、
(6)オリフィス材の保護シート台紙の離型剤としてオリフィス面の撥水剤が使われていることと、
以上を特徴としたフルマルチプリンタのカバーレジスト構造によるフルマルチインクジェットヘッド。
In full multi inkjet head,
(1) The orifice plate thickness is in the range of 5 μm to 10 μm,
(2) The main droplet diameter not including satellites is in the range of 5 μm to 10 μm (0.65 pl to 5.2 pl),
(3) The height of the liquid chamber is within a range of about 10 μm. (4) The nozzle hole shape is such that the hole diameter on the discharge port side is larger than the hole diameter on the liquid chamber side, and a reverse taper.
(5) The orifice material is a polyimide material blended with an epoxy material having an adhesive function;
(6) A water repellent on the orifice surface is used as a release agent for the protective sheet mount of the orifice material,
A full multi inkjet head with a cover resist structure for a full multi printer characterized by the above.
JP2007190941A 2007-07-23 2007-07-23 Full-multi-ink-jet head Pending JP2009023299A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007190941A JP2009023299A (en) 2007-07-23 2007-07-23 Full-multi-ink-jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007190941A JP2009023299A (en) 2007-07-23 2007-07-23 Full-multi-ink-jet head

Publications (1)

Publication Number Publication Date
JP2009023299A true JP2009023299A (en) 2009-02-05

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JP2007190941A Pending JP2009023299A (en) 2007-07-23 2007-07-23 Full-multi-ink-jet head

Country Status (1)

Country Link
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