JP2009009765A - Ion generating method and ion generator, and static eliminating method and static eliminator using this ion generating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To restrain in an ion generating element the occurrence of ozone in relation to: an ion generating method and ion generator; and a static eliminating method and a static eliminator using this ion generating method. <P>SOLUTION: The ion generating element 10 has an ion generating electrode 12 and an induction electrode 13 arranged on the top surface and under surface of a dielectric base board 11, respectively. The ion generating electrode 12 includes a plurality of interdigital electrode fingers 12a and a coupling section 12b that integrally connects the plurality of electrode fingers 12a. The application of a desired high-frequency high voltage between the ion generating electrode 12 and the induction electrode 13 brings an undercurrent electric discharge to birth at the tip end 12c of the electrode finger 12a where electric field has been produced. This undercurrent electric discharge accompanies no light-emitting, precedes corona discharge and causes ion to be generated. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an ion generation method and an ion generation apparatus in an ion generation element, and a charge removal method and a charge removal apparatus using the ion generation method.

  Conventionally, as an ion generator and a static eliminator, one that discharges between electrodes such as needles, wires, or grids, or one that discharges between electrodes formed on the surface of a dielectric substrate (for example, Patent Documents) 1), and in all cases, ions were generated by corona discharge by applying a high voltage between the electrodes.

Japanese Unexamined Patent Publication No. 2007-80664 (FIG. 1)

  However, according to the ion generator described in Patent Document 1 described above, since ions are generated by corona discharge, there is an essential problem that not only ions but also ozone harmful to the human body is generated.

  In addition, according to the static eliminator that performs ionization by generating ions by corona discharge, when the ion generating element is brought close to the object to be neutralized while the corona discharge is being performed, the ion generating element is moved to the object to be neutralized. There was a risk of lightning falling and sparks. Therefore, the ion generating element cannot be brought close to the object to be neutralized, and it has been difficult to efficiently neutralize the object to be neutralized.

  Accordingly, an object of the present invention is to provide an ion generation method and an ion generation device that suppresses the generation of ozone, and a static elimination method and a static elimination device that can efficiently neutralize an object to be neutralized using the ion generation method. It is.

Means for Solving the Problems and Effects of the Invention

  An ion generation method according to the present invention is an ion generation method in an ion generation element including a dielectric, and an ion generation electrode and an induction electrode that are opposed to each other through the dielectric, and the ion generation electrode includes a plurality of ion generation electrodes. It has a protrusion and a connecting part that connects the plurality of protrusions. A high frequency voltage is applied between the ion generating electrode and the induction electrode to cause electric field concentration at the tips of the plurality of protrusions, and before corona discharge without light emission at the tips of the plurality of protrusions. Ions are generated by continuously performing a dark current discharge.

  According to the ion generation method of the present invention, it is possible to efficiently generate ions while suppressing generation of ozone by causing dark current discharge before corona discharge without light emission at the tips of a plurality of protrusions. .

  The plurality of protrusions are a plurality of electrode fingers having a uniform electrode width, and are preferably connected to the connection part to form a comb-like electrode. According to this, by concentrating the electric field at the tips of the plurality of electrode fingers, by causing dark current discharge before corona discharge without light emission at the tips, it is possible to efficiently generate ions while suppressing the generation of ozone. Can be generated. Note that the tip of the electrode finger is consumed by sputtering in the long term, but in this case as well, the tip of the electrode finger is uniformly formed by forming the electrode finger with a uniform electrode width. It is consumed. Thereby, ions can be generated stably.

  In another aspect, the ion generation method of the present invention is an ion generation method in an ion generation element comprising a dielectric, and an ion generation electrode and an induction electrode facing each other through the dielectric, The ion generating electrode forms a comb-like electrode having a plurality of electrode fingers having a uniform electrode width, and a high frequency voltage is applied between the ion generating electrode and the induction electrode, Ions are generated by continuously performing a dark current discharge before corona discharge without light emission at least partially.

  According to the ion generation method of the present invention, for example, at least a part of the electrodes can be obtained by causing corona discharge to occur in a part of the plurality of electrode fingers (for example, electrode fingers at both ends) forming the comb-like electrode. It is possible to reliably perform dark current discharge before corona discharge without light emission in the finger, and it is possible to efficiently generate ions while suppressing generation of ozone as a whole.

  Furthermore, in another aspect, the ion generation method of the present invention is an ion generation method in an ion generation element comprising a dielectric, and an ion generation electrode and an induction electrode facing each other through the dielectric, The ion generating electrode forms a comb-like electrode having a plurality of electrode fingers having a uniform electrode width, and the electrode fingers located at both ends of the comb-like electrode are electrodes more than the other electrode fingers. The width is wide, and a high frequency voltage is applied between the ion generating electrode and the induction electrode to continuously perform dark current discharge before corona discharge without light emission at the tips of the plurality of electrode fingers. To generate ions.

  According to the ion generation method of the present invention, the electrode fingers located at both ends of the comb-like electrode are formed so that the electrode width is wider than the other electrode fingers, so that It is possible to prevent the electric field from being concentrated. As a result, it is possible to reliably perform dark current discharge before corona discharge without light emission in a plurality of electrode fingers including electrode fingers located at both ends, and efficiently generate ions while suppressing generation of ozone. Can be made.

  In another aspect, the ion generation method of the present invention is an ion generation method in an ion generation element comprising a dielectric, and an ion generation electrode and an induction electrode facing each other through the dielectric, The ion generating electrode forms a comb-like electrode having a plurality of electrode fingers having a uniform electrode width, and when the induction electrode is viewed from the ion generating electrode, at least both ends of the comb-like electrode It is arranged so that only the portion excluding the electrode finger located is included in the induction electrode region, and a high frequency voltage is applied between the ion generation electrode and the induction electrode, Ions are generated by continuously performing dark current discharge before corona discharge without light emission at the tip.

  According to the ion generation method of the present invention, when the induction electrode is viewed from the ion generation electrode, only the portions excluding the electrode fingers located at both ends of the comb-like electrode are disposed in the induction electrode region. Therefore, it is possible to prevent the electric field from concentrating on the electrode fingers at both ends. As a result, it is possible to reliably perform dark current discharge before corona discharge without light emission in a plurality of electrode fingers including electrode fingers located at both ends, and efficiently generate ions while suppressing generation of ozone. Can be made.

  The ion generator of the present invention is an ion generator having an ion generating element including a dielectric, and an ion generating electrode and an induction electrode facing each other through the dielectric, and the ion generating electrode and the induction A power supply unit that applies a high-frequency voltage between the electrodes and a control unit that controls the power supply unit are provided. The ion generating electrode forms a comb-like electrode having a plurality of electrode fingers having a uniform electrode width, and applies a high frequency voltage between the ion generating electrode and the induction electrode from the power supply unit, and Under the control of the control unit, electric field concentration is generated at the tips of the plurality of electrode fingers, and dark current discharge before corona discharge without light emission is continuously performed at the tips of the plurality of electrode fingers.

  According to the ion generator of the present invention, by concentrating the electric field at the tips of a plurality of electrode fingers, by performing dark current discharge before corona discharge without light emission at the tips, while suppressing the generation of ozone, Ions can be generated efficiently. Note that the tip of the electrode finger will be consumed by sputtering in the long term, but in this case as well, the tip of the electrode finger is consumed evenly by forming the electrode finger with a uniform electrode width. Is done. Thereby, ions can be generated stably.

  The static elimination method of the present invention is a static elimination method using an ion generating element comprising a dielectric, and an ion generating electrode and an induction electrode facing each other through the dielectric, wherein the ion generating electrode includes a plurality of ion generating electrodes. A projecting portion and a connecting portion that couples the plurality of projecting portions, and is disposed in close proximity to the object to be neutralized, between the ion generating electrode and the induction electrode; By applying a voltage to cause electric field concentration at the tips of the plurality of protrusions, and causing the dark current discharge before corona discharge without light emission at the tips of the plurality of protrusions to continuously perform ions. The generated object is neutralized by the generated ions.

  According to the static elimination method of the present invention, ions can be efficiently generated while suppressing generation of ozone by causing dark current discharge before corona discharge without light emission at the tips of a plurality of protrusions. Further, since ions are generated by dark current discharge, the ion generating element can be brought close to the object to be discharged, and the object to be discharged can be discharged efficiently.

  The static eliminator of the present invention is a static eliminator having an ion generating element comprising a dielectric, and an ion generating electrode and an induction electrode facing each other through the dielectric, wherein the ion generating electrode and the induction electrode A power supply unit that applies a high-frequency voltage between them, a control unit that controls the power supply unit, and a surface potential sensor that detects the surface potential of the object to be neutralized. The ion generation electrode has a plurality of protrusions and a connecting portion that connects the plurality of protrusions, and applies a high frequency voltage between the ion generation electrode and the induction electrode from the power supply unit. By controlling the control unit, an electric field concentration is generated at the tips of the plurality of electrode fingers, and the dark current discharge before corona discharge without light emission is continuously performed at the tips of the plurality of electrode fingers. Under the detection of the surface potential of the object to be neutralized by the surface potential sensor, the object to be neutralized is neutralized by ions generated by dark current discharge before corona discharge without light emission.

  According to the static eliminator of the present invention, ions can be generated efficiently while suppressing the generation of ozone by causing dark current discharge before corona discharge without light emission at the tips of the plurality of protrusions. Further, since ions are generated by dark current discharge, the ion generating element can be brought close to the object to be discharged, and the object to be discharged can be discharged efficiently.

<First Embodiment>
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram of an ion generator / static eliminating apparatus according to the first embodiment. FIG. 2 is a plan view of the ion generating element according to the first embodiment. FIG. 3 is a sectional view taken along line III-III.

  As shown in FIG. 1, the ion generator / static elimination device 1 converts the power output from the AC power source 2 into a high frequency high voltage via a rectifier circuit 3, a high frequency inverter circuit 4, and a high frequency high voltage transformer 5, thereby Supply to the generating element 10. The ion generator / static discharge device 1 is a device that generates a current in the atmosphere by applying a high frequency high voltage to the ion generating element 10 to cause a dark current discharge before corona discharge in the ion generating element 10. In the ion generator / discharger 1, an AC power source 2, a rectifier circuit 3, a high-frequency inverter circuit 4, and a high-frequency high-voltage transformer 5 constitute a power circuit 15 (power source unit). The driving conditions for performing this dark current discharge vary depending on the configuration of the ion generating element 10, that is, the material and thickness of the dielectric substrate 11 to be described later, and the formation pattern and constituent materials of the electrodes 12 and 13 to be described later. However, in the first embodiment of the present invention, a high-frequency high voltage of a sine wave of 60 kHz (or any of 40 kHz, 45 kHz, 50 kHz, and 55 kHz) and 3.8 to 4.4 kVp-p is applied to be described later. The dark current discharge before corona discharge without light emission is continuously performed at the tip portions 12c of the plurality of electrode fingers 12a of the ion generating electrode 12 to be performed.

  The AC power source 2 is a power source that outputs AC power having a commercial frequency. The rectifier circuit 3 is a circuit that converts AC power output from the AC power source 2 into DC power (for example, 24 V), and may include a PFC conversion circuit, a harmonic suppression circuit, and the like. The high frequency inverter circuit 4 is a circuit that converts the DC power output from the rectifier circuit 3 into a high frequency voltage of 60 kHz. The high frequency high voltage transformer 5 boosts the high frequency voltage output from the high frequency inverter circuit 4 to a high frequency high voltage (for example, 3.8 to 4.4 kVp-p). Note that the rectifier circuit 3 may not be provided when a DC power source such as a storage battery is used instead of the AC power source 2.

  Further, the ion generator / charger 1 detects a secondary voltage and a secondary current with respect to the ion generator 10 by the secondary voltage detection circuit 6 and the secondary current detection circuit 7, and the surface potential sensor 9 removes the charge to be discharged. The surface potential of the object 50 (see FIG. 4) is detected. The ion generator / static charge device 1 is applied to the ion generating element 10 under the control of the control circuit 8 (control unit) based on the detected secondary voltage, secondary current, and the surface potential of the object to be discharged. For example, in the range of 3.8 to 4.4 kVp-p.

  The secondary voltage detection circuit 6 is connected in parallel between the high-frequency high-voltage transformer 5 and the ion generation element 10, and outputs the detected secondary voltage value to the control circuit 8.

  The secondary current detection circuit 7 is connected in series between the high-frequency high-voltage transformer 5 and the ion generating element 10, and outputs the detected secondary current value to the control circuit 8.

  The surface potential sensor 9 is placed facing the object to be neutralized 50 (see FIG. 4), thereby detecting the surface potential of the object to be neutralized in a non-contact manner and outputting the detected surface potential value to the control circuit 8. To do.

  The control circuit 8 performs feedback control based on the values of the secondary voltage, the secondary current and the surface potential input from the secondary voltage detection circuit 6, the secondary current detection circuit 7 and the surface potential sensor 9, respectively. The high frequency inverter circuit 4 is controlled to change the voltage applied to the ion generating element 10.

  As shown in FIGS. 2 and 3, the ion generating element 10 has an ion generating electrode 12 and an induction electrode 13 arranged on the upper and lower surfaces of a dielectric substrate 11, respectively.

  The dielectric substrate 11 is a rectangular ceramic plate having a thickness of 2 mm, for example. The dielectric constant of the dielectric substrate 11 is preferably 2.0 or more, more preferably around 3.0.

  The ion generating electrode 12 is made of carbon on the upper surface of the dielectric substrate 11, and has a plurality of comb-like electrode fingers 12a and a connecting portion 12b that integrally connects the plurality of electrode fingers 12a. The plurality of electrode fingers 12 a have a long shape along the short direction of the dielectric substrate 11, and are formed at predetermined intervals along the longitudinal direction of the dielectric substrate 11. The predetermined interval is preferably 1.5 mm to 3.0 mm.

  The electrode width of the electrode finger 12a is preferably a uniform electrode width in the range of 0.2 mm to 1.0 mm, and more preferably about 0.5 mm. The tip portion 12c, which is one end of the electrode finger 12a, has a substantially arc shape, and the other end is integrally connected to the connecting portion 12b. That is, the plurality of electrode fingers 12a are integrally electrically connected via the connecting portion 12b. The tip portion 12c of the electrode finger 12a is not limited to a substantially arc shape, but may be any shape such as a rectangular shape. However, by forming a substantially arc shape, a dark current before corona discharge that does not emit light more stably. Discharge can be sustained.

  The induction electrode 13 is formed of carbon on the lower surface of the dielectric substrate 11, like the ion generation electrode 12, and has a rectangular shape smaller than that of the dielectric substrate 11. In addition, when the induction electrode 13 is viewed from the ion generation electrode 12, the induction electrode 13 has a portion on the opposite side to the side connected to the electrode finger 12a of the connection portion 12b (the corner end portion 12d of the connection portion 12b). The electrode region is formed so as to include the electrode finger 12a including the tip portion 12c without including it. Thereby, when a voltage is applied between the ion generating electrode 12 and the induction electrode 13, the electric field concentrates only on the tip portion 12c of the electrode finger 12a, and the electric field concentrates on the corner end portion 12d of the connecting portion 12b. Can be prevented. The carbon electrode constituting the ion generating electrode 12 and the induction electrode 13 is, for example, a synthetic resin such as phenol resin, epoxy resin, polyester resin or polyimide resin dissolved in a predetermined organic solvent such as glycol or ether. The binder is formed by kneading and dispersing flake graphite, carbon black, acetylene black, carbon fiber and the like by screen printing and drying. In the above example, when the induction electrode 13 is viewed from the ion generating electrode 12, the portion of the connecting portion 12b opposite to the side connected to the electrode finger 12a (the corner end portion 12d of the connecting portion 12b) and The electrode region of the induction electrode 13 may be formed so as to include the electrode finger 12a without including the tip 12c of the electrode finger 12a. Also in this case, when a voltage is applied between the ion generating electrode 12 and the induction electrode 13, the electric field concentrates on the tip portion 12c of the electrode finger 12a, and corona discharge without light emission at the tip portion 12c of the electrode finger 12a. The previous dark current discharge can be continuously performed.

  Here, a specific configuration of the ion generator / charger 1 will be described with reference to FIGS. 4 and 5. FIG. 4 is a schematic plan view of the ion generating device / static elimination device according to the first embodiment as viewed from the lower surface side. FIG. 5 is a schematic front view of the ion generator / static elimination apparatus according to the first embodiment. As shown in FIGS. 4 and 5, the static eliminator 1 includes an ion generating element frame 42 fixed to the lower surface side of the main frame 41 extending in one direction, and a main frame 41 on one end side in the longitudinal direction of the frame 42. And a control circuit including a power circuit 15 (power circuit unit) including an inverter circuit 4, a high-frequency high-voltage transformer 5 and a CPU on the upper surface side of the main frame 41. A plurality of sets 8 (control circuit units) are arranged in accordance with the number of arranged ion generating elements 10.

  The ion generating element frame 42 has a rectangular shape with a size in the longitudinal direction corresponding to the static elimination width of the static elimination target object 50 to be neutralized. In the frame 42, a plurality of ion generating elements 10 are arranged on the surface opposite to the main frame 41 in the extending direction of the main frame 41. The plurality of ion generating elements 10 are fixed to the ion generating element frame 41 in a removable state by a fixing tool 42a.

  The support member 43 has a long rectangular shape. The support member 43 is provided with a plurality of surface potential sensors 9 corresponding to the number of the ion generating elements 10 at intervals corresponding to the arrangement of the ion generating elements 10 in a state in which the surface potential sensors 9 are arranged in the extending direction of the main frame 41. ing. The plurality of surface potential sensors 9 are provided at positions separated from the plurality of ion generating elements 10 by about 5 cm in a direction orthogonal to the extending direction of the main frame 41. This is to prevent the plurality of surface potential sensors 9 from erroneously measuring the surface potential of the ion generating element 10 when measuring the surface potential of the object 50 to be neutralized.

  The object to be neutralized 50 is conveyed from the lower side to the upper side in FIG. That is, the charged surface of the object to be neutralized 50 is first neutralized by the ion generating element 10, and the surface potential after neutralization is measured by the surface potential sensor 9.

  Next, the relationship between the high frequency high voltage applied between the ion generating electrode 12 and the induction electrode 13 and the charge removal time of the charge removal target object 50 will be described with reference to the experimental data shown in FIG. Furthermore, the experimental data shown in FIG. 7 is used for the relationship between the high-frequency high voltage applied between the ion generating electrode 12 and the induction electrode 13 and the number of tip portions 12c of the electrode fingers 12a where corona discharge is generated. The description will be given with reference. FIG. 6 is a graph showing the relationship between the high frequency high voltage applied between the ion generating electrode and the induction electrode and the charge removal time of the charge removal object. Here, the time during which the surface potential of the object to be neutralized 50 is neutralized from +1000 V to +100 V is measured. The proximity distance between the ion generating element 10 and the object to be neutralized 50 is 5 cm. FIG. 7 is a graph showing the relationship between the high-frequency high voltage applied between the ion generating electrode and the induction electrode and the number of tip portions of the electrode fingers where corona discharge is generated. Here, an example is shown in which 16 electrode fingers 12a are used as the ion generating electrode 12 with an electrode interval of 3.0 mm and an electrode width of 0.5 mm.

  As shown in FIG. 6, as the voltage applied between the ion generating electrode 12 and the induction electrode 13 is increased, the time for removing the object 50 to be discharged becomes shorter, and 4.3 kVp-p. The static elimination time at the time of voltage application is about 2.0 sec, and the static elimination time at the time of voltage application of 4.5 kVp-p is 1.310 sec. However, when a voltage of 4 kVp-p or more is applied, corona discharge is generated from a part of the ion generating electrode 12 instead of dark current discharge. When the voltage is further increased, ozone is generated from the vicinity of 4.7 kVp-p, and the time for discharging is prolonged (the discharging performance is lowered). Here, ozone is generated means that 0.006 ppm or more of ozone is generated in about 30 seconds to 3 minutes after voltage application. For the measurement of ozone, EG-2001F (manufactured by Sugawara Jitsugyo Co., Ltd.) was used. Note that the example shown in FIG. 6 in the present embodiment is a case where measurement is performed when the proximity distance between the ion generating element 10 and the object to be neutralized 50 is 5 cm, and when the applied voltage is 4.5 kVp-p, The time was 1.31 sec, but when the proximity distance was 2 cm, the static elimination time was 0.8 sec.

  As shown in FIG. 7, when the voltage applied between the ion generating electrode 12 and the induction electrode 13 is increased, the tips of all 16 electrode fingers 12a are increased up to an applied voltage of 4.4 kVp-p. It is in the state of dark current discharge before corona discharge without light emission, but the discharge state of the tip 12c of the electrode finger 12a at both ends from 4.4kVp-p near 4.4kVp-p is changed from dark current discharge to corona discharge. To change. As the voltage was further increased, a phenomenon was found in which the number of tip portions 12c that generate corona discharge increased.

  Next, a method for neutralizing the object 50 to be neutralized by the ion generator / static neutralizer 1 will be described with reference to FIG. In this static elimination method, a predetermined voltage is applied between the ion generating electrode 12 and the induction electrode 13 to cause the ion generating electrode 12 to perform dark current discharge before corona discharge without light emission, thereby generating ions. An ion generation method is used. FIG. 8 is a flowchart for controlling the voltage applied to the ion generating element in the ion generating device / static elimination device.

  First, the ion generating electrode 12 side is arranged facing the object to be neutralized 50, a predetermined high frequency high voltage is applied between the ion generating electrode 12 and the induction electrode 13, and the tip portion 12c where the electric field is concentrated. A dark current discharge before corona discharge without light emission is performed. In this state, the secondary voltage detection circuit 6, the secondary current detection circuit 7, and the surface potential sensor 9 detect the secondary voltage, the secondary current, and the surface potential of the object 50 to be discharged, and these detected values. Is output to the control unit 8 (S1).

  Next, it is determined whether or not the secondary voltage input to the control unit 8 is within a range of 3.8 to 4.4 kVp-p for performing a dark current discharge before a desired corona discharge (S2). When the secondary voltage is in the range of 3.8 to 4.4 kVp-p (S2: YES), it is subsequently determined whether or not the secondary current input to the control unit 8 is in the range of 30 to 36 mA. (S3). When the secondary current is not in the range of 30 to 36 mA (S3: NO), or when the secondary voltage is not in the range of 3.8 to 4.4 kVp-p (S2: NO), the ion generator / static charge device It is determined that 1 is not in a normal driving state, and the driving of the high-frequency inverter circuit 4 is stopped by the control unit 8 and the operation of the ion generator / charger 1 is stopped, thereby stopping the generation of ions, that is, the charge removal operation. (S4).

  If the secondary current is in the range of 30 to 36 mA (S3: YES), whether or not the surface potential of the charge removal target object 50 input to the control unit 8 is a desired value, for example, within a range of ± 100V. Is determined (S5). When the surface potential of the object 50 to be discharged is not within the range of ± 100 V (S5: NO), it is determined whether or not the secondary voltage is 4.3 kVp-p or more (S6). When the secondary voltage is 4.3 kVp-p or more (S6: YES), the control circuit 8 controls the high-frequency inverter circuit 4 so that the discharge state does not enter the corona discharge region, thereby lowering the secondary voltage (S7). ). When the secondary voltage is less than 4.3 kVp-p (S6: NO), it is determined that the static elimination operation is not sufficient and the control circuit 8 controls the high-frequency inverter circuit 4 to increase the secondary voltage (S8). . If the surface potential is within a range of ± 100 V (S5: YES), it is determined that the charge removal target 50 has been discharged, and the control circuit 8 causes the high frequency inverter circuit 4 to prevent reverse charging. To lower the secondary voltage (S7).

  By repeating these routines, the dark current discharge before the corona discharge without light emission is continuously performed at the tip portions 12c of the plurality of electrode fingers 12a, and the generation of ozone is suppressed and the ions are efficiently generated. Can be made. Further, since the discharge at the ion generating electrode 12 is in a dark current discharge state before corona discharge without light emission, the ion generating element 10 can be brought close to the object 50 to be discharged, and the object 50 to be discharged is made efficient. It can be neutralized well.

  Further, the electric field concentrates on the tip portions 12c of the plurality of electrode fingers 12a, so that the tip portions 12c are consumed for a long time by sputtering or the like, but the electrode fingers 12a are formed with a uniform electrode width. As a result, the tips of the electrode fingers are evenly consumed. Thereby, ions can be generated stably.

  In this embodiment, all of the plurality of electrode fingers 12a are subjected to dark current discharge before corona discharge without light emission. However, ions are more efficiently generated by dark current discharge before corona discharge without light emission. Is generated, the electric field concentrates on both ends of the arrayed electrode fingers 12a due to the pattern shape of the ion generating electrode 12, and as shown in FIG. It has been found that corona discharge is caused in the electrode fingers 12a located. Therefore, by making the electrode fingers 12a located at both ends into a corona discharge state, and making the plurality of electrode fingers 12a excluding the electrode fingers 12a located at both ends into a dark current discharge state before corona discharge without light emission, as a whole Ions can be generated more efficiently by dark current discharge before corona discharge without light emission, and generation of ozone can be suppressed as a whole.

Second Embodiment
Next, a second embodiment of the present invention will be described with reference to FIG. The second embodiment is the same as the first embodiment except that the shape of the ion generating electrode is different from that of the first embodiment. Accordingly, components similar to those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. FIG. 9 is a plan view of the ion generating element according to the second embodiment.

  As shown in FIG. 9, in the ion generating electrode 22, the width of the electrode fingers 22a located at both ends of the plurality of comb-like electrode fingers 12a is larger than the width of the other electrode fingers 12a. Yes. In this way, the electrode fingers 22a positioned at both ends of the comb-like ion generating electrode 22 are formed so that the electrode width is larger than that of the other electrode fingers 12a. It is possible to prevent the electric field from concentrating on. Thereby, the dark current discharge before the corona discharge without light emission can be surely performed in the entire group of the electrode fingers 12a including the electrode fingers 22a located at both ends, and the generation of ozone can be surely suppressed. .

<Third Embodiment>
Next, a third embodiment of the present invention will be described with reference to FIG. The third embodiment is the same as the first embodiment except that the shape of the induction electrode is different from that of the first embodiment. Accordingly, components similar to those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. FIG. 10 is a plan view of an ion generating element according to the third embodiment.

  When the induction electrode 23 is viewed from the ion generation electrode 12, the electrode region of the induction electrode 23 overlaps with the plurality of electrode fingers 12a excluding the electrode fingers 12a located at both ends of the comb-like ion generation electrode 12. Is formed. Thereby, it can prevent that an electric field concentrates on the electrode finger 12a in both ends. Therefore, dark current discharge before corona discharge without light emission can be reliably performed in the entire group of electrode fingers 12a including the electrode fingers 12a located at both ends, and generation of ozone can be reliably suppressed.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made as long as they are described in the claims. For example, in the above-described first to third embodiments, the ion generating electrode 12 forms a comb-like electrode. However, as shown in FIG. 11, the apex angle is an acute angle and has a pointed portion. A large number of isosceles triangles arranged in a saw-like pattern by arranging one or more isosceles triangles are formed, and the bases of the isosceles triangles of these saw-tooth patterns are connected with thin lines to form one ion generating electrode 30. May be. In this case, when a high frequency high voltage is applied between the ion generating electrode 12 and the induction electrode 13, the electric field concentrates at the tip, and dark current discharge before corona discharge without light emission is performed at the tip.

  Furthermore, in the first to third embodiments described above, ceramics is used as the dielectric substrate 11. However, the dielectric substrate is not limited to ceramics, for example, glass, mica, or polymer, as long as the dielectric substrate is made of a dielectric. May be.

  In addition, in the first to third embodiments described above, carbon is used as the ion generating electrode 12, but is not limited to carbon, for example, a single metal such as aluminum, copper, gold, tantalum, tungsten, or nickel, Or these alloys may be sufficient.

  The output waveform of the high-frequency inverter circuit 4 may be a sine wave with a positive / negative balance, or a positive / negative imbalanced waveform that is biased with a positive or negative DC voltage so that many negative ions or positive ions are generated. It can also be output.

It is a block diagram of the ion generator / static elimination apparatus which concerns on 1st Embodiment. It is a top view of the ion generating element concerning a 1st embodiment. It is sectional drawing which follows an III-III line. It is the schematic plan view which looked at the ion generator / static elimination apparatus which concerns on 1st Embodiment from the bottom. It is a schematic front view of the ion generator / static elimination apparatus which concerns on 1st Embodiment. It is a graph which shows the relationship between the high frequency high voltage applied between an ion generating electrode and an induction electrode, and the static elimination time of a static elimination target object. It is a graph which shows the relationship between the high frequency high voltage applied between an ion generating electrode and an induction electrode, and the number of the front-end | tip parts of the electrode finger in which corona discharge has generate | occur | produced. It is a flowchart which controls the voltage applied to an ion generating element. It is a top view of the ion generating element concerning a 2nd embodiment. It is a top view of the ion generating element which concerns on 3rd Embodiment. It is a top view which shows the modification of the shape of an ion generating electrode.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ion generator / Static elimination apparatus 8 Control part 10 Ion generation element 11 Dielectric substrate 12 Ion generation electrode 12a Electrode finger 12b Connection part 13 Induction electrode 50 Object to be neutralized

Claims (8)

An ion generation method in an ion generation element comprising a dielectric, and an ion generation electrode and an induction electrode facing each other through the dielectric,
The ion generating electrode has a plurality of protrusions and a connecting portion that connects the plurality of protrusions,
A high frequency voltage is applied between the ion generating electrode and the induction electrode to cause electric field concentration at the tips of the plurality of protrusions, and before corona discharge without light emission at the tips of the plurality of protrusions. An ion generation method characterized by generating ions by continuously performing dark current discharge.   2. The ion generation method according to claim 1, wherein the plurality of protruding portions are a plurality of electrode fingers having a uniform electrode width, and are connected to the connecting portion to form a comb-like electrode. . An ion generation method in an ion generation element comprising a dielectric, and an ion generation electrode and an induction electrode facing each other through the dielectric,
The ion generating electrode comprises a comb-like electrode having a plurality of electrode fingers of uniform electrode width,
Ions are generated by applying a high-frequency voltage between the ion generating electrode and the induction electrode to continuously perform dark current discharge before corona discharge without light emission in at least a part of the plurality of electrode fingers. Ion generation method characterized by making it occur. An ion generation method in an ion generation element comprising a dielectric, and an ion generation electrode and an induction electrode facing each other through the dielectric,
The ion generating electrode comprises a comb-like electrode having a plurality of electrode fingers of uniform electrode width,
The electrode fingers located at both ends of the comb-like electrode have a wider electrode width than the other electrode fingers,
Ions are generated by applying a high-frequency voltage between the ion generating electrode and the induction electrode to continuously perform dark current discharge before corona discharge without light emission at the tips of the plurality of electrode fingers. An ion generation method characterized by the above. An ion generation method in an ion generation element comprising a dielectric, and an ion generation electrode and an induction electrode facing each other through the dielectric,
The ion generating electrode comprises a comb-like electrode having a plurality of electrode fingers of uniform electrode width,
When the induction electrode is viewed from the ion generating electrode, only the portion excluding the electrode fingers located at both ends of the comb-like electrode is arranged to be included in the induction electrode region,
Ions are generated by applying a high-frequency voltage between the ion generating electrode and the induction electrode to continuously perform dark current discharge before corona discharge without light emission at the tips of the plurality of electrode fingers. An ion generation method characterized by the above. An ion generating device having an ion generating element comprising a dielectric, and an ion generating electrode and an induction electrode facing each other through the dielectric,
A power supply for applying a high frequency voltage between the ion generating electrode and the induction electrode;
A control unit for controlling the power supply unit,
The ion generating electrode comprises a comb-like electrode having a plurality of electrode fingers of uniform electrode width,
A high frequency voltage is applied between the ion generating electrode and the induction electrode from the power supply unit, and electric field concentration is generated at the tips of the plurality of electrode fingers under the control of the control unit, so that the plurality of electrode fingers An ion generating device characterized in that a dark current discharge before corona discharge without light emission is continuously performed at the tip of the electrode. A static elimination method using an ion generating element comprising a dielectric, and an ion generating electrode and an induction electrode facing each other through the dielectric,
The ion generating electrode has a plurality of protrusions and a connecting portion that connects the plurality of protrusions, and is disposed in close proximity to the object to be neutralized,
A high frequency voltage is applied between the ion generation electrode and the induction electrode to cause electric field concentration at the tips of the plurality of protrusions, and before corona discharge without light emission at the tips of the plurality of protrusions. An ionization method characterized in that ions are generated by continuously performing a dark current discharge, and the object to be neutralized is neutralized by the generated ions. A static eliminator having an ion generating element comprising a dielectric, and an ion generating electrode and an induction electrode facing each other through the dielectric,
A power supply for applying a high-frequency voltage between the ion generating electrode and the induction electrode;
A control unit for controlling the power supply unit;
A surface potential sensor for detecting the surface potential of the object to be neutralized,
The ion generating electrode has a plurality of protrusions and a connecting portion that connects the plurality of protrusions,
A high frequency voltage is applied between the ion generating electrode and the induction electrode from the power supply unit, and electric field concentration is generated at the tips of the plurality of electrode fingers under the control of the control unit, so that the plurality of electrode fingers Ions are generated by continuously performing dark current discharge before corona discharge without light emission at the tip of
Under the detection of the surface potential of the object to be neutralized by the surface potential sensor, the object to be neutralized is neutralized by ions generated by dark current discharge before corona discharge without light emission. Characterized static eliminator.

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