JP2009008137A - Linear guide device and measuring machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a linear guide device capable of improving motion accuracy of a slider device. <P>SOLUTION: When a fluid is blown out of a blowout port 41 toward a first fluid bearing face 75 and the fluid is sucked into a suction port 31, by a portion of the fluid blown out of the blowout port 41 being sucked into the suction port 31, a fluid layer 77 is formed between the first fluid bearing face 75 and a first guide face 21. Further, by the fluid blown out of a second static pressure transmission port 732 being sucked into a second negative pressure transmission port 742, a fluid layer 77 is also formed between a second fluid bearing face 76 and a second guide face 22. Because the slider device 7 can be slidably installed on a linear guide rail without mounting piping for feeding static pressure and negative pressure to the slider device 7, external disturbance due to the piping can be eliminated, and the movement accuracy of the slider device 7 can be improved. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a linear guide device and a measuring machine including the linear guide device.

  2. Description of the Related Art Conventionally, a linear guide device is known that includes a long linear guide rail and a slider device that is slidable (slidably movable) on the linear guide rail via a fluid thin film layer (see FIG. For example, see Patent Document 1, Patent Document 2, and Non-Patent Document 1.)

  In these linear guide devices, a fluid thin film layer is formed between the slider device and the linear guide rail by blowing a fluid such as air from the slider device toward the linear guide rail. With this fluid thin film layer, in these linear guide devices, the resistance between the slider device and the linear guide rail can be reduced, and the slider device is accurately placed on the linear guide rail by an appropriate drive means such as a drive device. Can be slid.

  As such a linear guide device, for example, as shown in FIG. 12 and FIG. 13, the slider devices 7C and 7D surround the linear guide rails 2C and 2D having a rectangular or circular cross section so that the slider device 7C , 7D and restraint type linear guide devices 1C, 1D that regulate the thickness of the fluid thin film layer 77 formed in the gap between the linear guide rails 2C, 2D to a constant thickness are known. Further, as shown in FIG. 14, the slider device 7 </ b> E surrounds a part of the periphery of the straight guide rail 2 </ b> E, so that a partially constrained linear guide device 1 </ b> E that regulates the thickness of the fluid thin film layer 77 to a constant thickness is provided. Are known.

  Further, as shown in FIG. 15, the linear guide device balances the weight of the slider device 7F and the static pressure (air static pressure) of the fluid thin film layer 77, thereby reducing the thickness of the fluid thin film layer 77 to a constant thickness. There is known a balanced linear guide device 1F that regulates the above. Further, as shown in FIG. 16, a fluid such as air is blown out from the slider device 7G and the blown-out fluid is sucked to balance the static pressure (air static pressure) and the vacuum pressure of the fluid thin film layer 77, so that the fluid thin film A vacuum pressure balanced linear guide device 1G that regulates the thickness of the layer 77 to a constant thickness is known. As shown in FIG. 17, the slider device 7G of the vacuum pressure balance type linear guide device 1G has a static pressure supply tube 32 and a negative pressure for supplying a static pressure to the slider device 7G. A negative pressure supply tube 42 for supply is attached, and these tubes 32 and 42 are gathered together by a cable bear K or the like.

JP-A-8-4762 Japanese Patent Laid-Open No. 7-167461 Machine Design Vol. 29, No. 14 (November 1985)

  In the linear guide devices 1C to 1G described above, in the constrained linear guide devices 1C and 1D shown in FIGS. 12 and 13 and the partially constrained linear guide device 1E shown in FIG. 14, the linear guide rails 2C to 2E are used as slider devices. Since it is surrounded by 7C to 7E, a highly rigid fluid thin film layer 77 can be obtained. However, in the linear guide devices 1C and 1E, in addition to the need to finish the flatness of the guide surface 20 which is the outer surface of the linear guide rails 2C and 2E with high accuracy, the fluid thin film layer 77 having an appropriate thickness is secured. Further, in accordance with the shape of the guide surface 20 of the linear guide rails 2C and 2E, the flatness of the fluid bearing surface (air bearing surface) 70 of the slider devices 7C and 7E facing the guide surface 20 and the slider devices 7C and 7E Since it is necessary to finish the dimensions of the component parts with high accuracy, there is a problem that the cost is very high. Further, in the linear guide device 1D shown in FIG. 13, accuracy such as roundness of the linear guide rail 2D and cylindricity of the slider device 7D cannot be improved by manual operation such as lapping, and the accuracy of parts is improved by machining. Because it is determined, there is a problem that the motion accuracy is limited.

  In the balanced linear guide device 1F shown in FIG. 15, the weight of the slider device 7F tends to increase in order to obtain the rigidity of the fluid thin film layer 77 due to the weight of the slider device 7F. For this reason, the mass of the slider device 7F and the fluid thin film layer There is a problem that the natural frequency of the system composed of 77 stiffness is likely to be lowered and is susceptible to disturbance. Further, since the weight of the slider device 7F is likely to increase, there is a problem that the burden on the driving device for driving the slider device 7F increases.

  In contrast to these linear guide devices 1C to 1F, in the vacuum pressure balanced linear guide device 1G shown in FIGS. 16 and 17, a load is applied to the fluid thin film layer 77 by the vacuum pressure, so even the lightweight slider device 7G has high rigidity. The fluid thin film layer 77 can be obtained. In addition, since a load is applied to the fluid thin film layer 77 by the vacuum pressure, the slider device 7G can be formed in an L shape in cross section, and the fluid bearing surface 70 can be made small. Therefore, it is possible to reduce the processing burden of finishing the flatness of the fluid bearing surface 70 and the dimensions of the component parts of the slider device 7G with high accuracy, thereby reducing the cost. Further, since the guide surface 20 of the linear guide rail 2G is flat, the flatness of the guide surface 20 can be increased by wrapping or the like, and the motion accuracy of the slider device 7G can be improved.

  However, in the linear guide device 1G shown in FIG. 16 and FIG. 17, not only the static pressure supply tube 32 but also the negative pressure supply tube 42 is connected to the slider device 7G. It is done. Therefore, the tubes 32 and 42 and the cable bearer K constantly apply force to the slider device 7G when the slider device 7G is driven, resulting in a disturbance in control. Therefore, it is difficult to maintain high motion accuracy. there were. Moreover, as the moving speed of the slider device 7G increases, the tubes 32 and 42 and the cable bear K become unable to follow the speed and apply a larger force to the slider device 7G. There was a problem.

  An object of the present invention is to provide a linear guide device capable of improving the motion accuracy of a slider device, and a measuring machine including the linear guide device.

  The linear guide device of the present invention includes a slider guide device having a flat first guide surface and a flat second guide surface adjacent to a side along the longitudinal direction of the first guide surface; A slider device having a first fluid bearing surface disposed oppositely and a second fluid bearing surface disposed opposite to the second guide surface and provided slidably with respect to the slider guide device. In the guide device, the first guide surface is formed with a blowout port for blowing out fluid and a suction port for sucking in the fluid, and the slider device has a static pressure transmission hole and a negative pressure transmission hole. The static pressure transmission hole is formed as a first static pressure transmission port on the first fluid bearing surface, and as a second static pressure transmission port on the second fluid bearing surface, and is blown out from the blowout port. Said fluid Taking in from the static pressure transmission port and blowing out from the second static pressure transmission port toward the second guide surface, the negative pressure transmission hole opens as a first negative pressure transmission port in the first fluid bearing surface and the first. The two-fluid bearing surface opens as a second negative pressure transmission port, sucks the fluid blown out from the second static pressure transmission port from the second negative pressure transmission port, blows out the first negative pressure transmission port, Due to the negative pressure generated by the suction port sucking in the fluid which has been blown out from the outlet toward the first fluid bearing surface and passed between the first fluid bearing surface and the first guide surface, The first fluid bearing surface is attracted to the first guide surface, so that the rigidity in the thickness direction is increased between the first fluid bearing surface and the first guide surface. A fluid layer is formed, and the second fluid is blown out from the second static pressure transmission port toward the second guide surface and passes through the second fluid bearing surface and the second guide surface. The second fluid bearing surface is attracted to the second guide surface by the negative pressure generated by the suction of the negative pressure transmission port, so that the thickness between the second fluid bearing surface and the second guide surface is increased. A fluid layer having a substantially constant thickness with increased directional rigidity is formed.

According to such a configuration, the fluid is blown out from the outlet toward the first fluid bearing surface (static pressure is supplied), and the fluid is drawn into the inlet (from the inlet to the first fluid bearing surface). Negative pressure is supplied towards the Then, a part of the fluid blown out from the outlet is drawn into the suction port through between the first fluid bearing surface and the first guide surface, and the first fluid bearing surface is caused by the negative pressure generated by the drawing. A fluid layer having a substantially constant thickness with increased rigidity in the thickness direction is formed between the first fluid bearing surface and the first guide surface, which is attracted to the first guide surface.
At this time, the static pressure supplied from the outlet toward the first fluid bearing surface is transmitted to the second static pressure transmission port via the static pressure transmission hole, and from the suction port to the first fluid bearing surface. The negative pressure supplied toward the second end is transmitted to the second negative pressure transmission port via the negative pressure transmission hole. As a result, fluid is blown out from the second static pressure transmission port, and this fluid passes between the second fluid bearing surface and the second guide surface and is drawn into the second negative pressure transmission port. The second fluid bearing surface is attracted to the second guide surface by the pressure, and a fluid layer having a substantially constant thickness with increased rigidity in the thickness direction is formed between the second fluid bearing surface and the second guide surface. Is done.
Therefore, the slider device can be slidably installed on the linear guide rail without attaching piping for sending static pressure and negative pressure to the slider device. Therefore, disturbance due to the piping for sending the static pressure and the negative pressure being attached to the slider device can be eliminated, and the motion accuracy of the slider device can be improved.
In addition, as a slider guide apparatus, the rectangular parallelepiped linear guide rail provided with the 1st guide surface and the 2nd guide surface can be mentioned, for example. Further, the slider device may be formed in an appropriate shape such as a U-shape or a square shape in cross section.

  In the present invention, the slider guide device includes a linear guide rail having the first guide surface and the second guide surface that are in contact with each other at a right angle, and the slider device is formed in an L shape in cross-section. preferable.

  According to such a configuration, since the slider device is formed in an L shape in sectional view, as described in the background art, the slider device has a U shape in a sectional view, a square shape (a shape surrounding a straight guide rail), or the like. The manufacturing cost of the slider device can be reduced as compared to forming the slider device.

  In the present invention, the slider guide device is configured to include the linear guide rail and a surface plate, and the linear guide rail has a side surface on the long side of the linear guide rail in contact with the upper surface of the surface plate. It is preferable that the side surface on the long side of the linear guide rail is formed as the first guide surface, and the upper surface of the surface plate is formed as the second guide surface.

  According to such a configuration, since the slider device can be slid on the surface plate along the straight guide rail, the shape of the slider device can be compared to the conventional case where the slider device is slid on the straight guide rail. The degree of freedom can be improved. That is, for example, the slider device can be formed in a rectangular parallelepiped shape or an L-shape in a cross-sectional view with a long portion facing the surface plate.

  In the present invention, it is preferable that a side surface of the linear guide rail and an upper surface of the surface plate are in contact with each other at a right angle, and the slider device is formed in a rectangular parallelepiped shape.

  According to such a configuration, since the slider device is formed in a rectangular parallelepiped shape, the balance of the slider device can be improved as compared with the slider device formed in an L shape or the like. Therefore, the motion accuracy of the slider device can be further improved.

  In the present invention, a surface constriction type fluid receiving groove extending in a direction along a longitudinal direction of the first guide surface is formed at a position facing the air outlet of the first fluid bearing surface, and the fluid receiving groove It is preferable that the first static pressure transmission port is formed at the bottom of the.

  According to such a configuration, since the fluid receiving groove is formed in a surface throttle type, the air blown from the outlet toward the fluid receiving groove is reliably sucked while being sent to the first static pressure transmission port. Can be sucked into the mouth. Therefore, a fluid thin film layer having a certain thickness can be reliably formed between the first fluid bearing surface and the first guide surface, and the movement accuracy of the slider device can be further improved.

  In the present invention, a plurality of the air outlets and the suction ports are formed in the first guide surface at the same interval along the longitudinal direction of the first guide surface, and the suction port of the first fluid bearing surface is formed. And a suction groove having a second negative pressure transmission port formed at the bottom and extending in a direction along the longitudinal direction of the first guide surface. The fluid receiving groove is always at least 1 The suction groove is formed to have a length capable of covering at least one of the suction ports, and the relative position of the slider device with respect to the slider guide device is formed. Detection means for detecting, a plurality of first flow paths opening as the air outlets at the first guide surface, a plurality of second flow paths opening as the suction ports at the first guide surface, and the first flow paths And the second flow path Opening / closing means provided respectively for opening and closing the first flow path and the second flow path, and the first flow path and the second flow path corresponding to the position of the slider device detected by the detection means. It is preferable that a control means for controlling the provided opening / closing means is provided.

Here, when one air outlet and one air inlet are formed on the first guide surface, the slider device can slide by the length of the fluid receiving groove and the suction groove. Therefore, in order to extend the movable stroke, it is necessary to lengthen the fluid receiving groove and the suction groove, that is, to increase the size of the slider device.
However, according to such a configuration of the present invention, the first guide surface is formed with a plurality of outlets and inlets, and the opening and closing of the outlets and inlets corresponding to the position of the slider device is controlled. Therefore, the slider device can be slid without being limited to the lengths of the fluid receiving groove and the suction groove. Therefore, the movable stroke can be extended without increasing the size of the slider device.

  A measuring machine according to the present invention includes the linear guide device according to any one of claims 1 to 6 and a measurement unit section that moves together with the slider device.

  According to such a configuration, when the slider device moves, the surface unevenness of the object to be measured can be measured by the measurement unit unit. At this time, since the measuring instrument is configured to include the linear guide device substantially the same as described above, the slider device can be moved with high motion accuracy. Therefore, the measurement unit portion that moves together with the slider device can also be moved with high motion accuracy, and the straightness of the object to be measured can be accurately measured by the measurement unit portion. In addition, as a measuring machine, the thing provided with the drive shaft which moves a probe part like a three-dimensional measuring machine, a surface property measuring machine, etc. can be mentioned, for example.

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view of a linear guide device 1 according to the present embodiment.
The linear guide device 1 includes a linear guide rail 2 as a slider guide device, a plurality of first flow paths 3 that open at a vertical guide surface 21 (to be described later) of the linear guide rail 2 and blow off air, and a vertical guide of the linear guide rail 2. As a plurality of second flow paths 4 that open at the surface 21 and suck in air, electromagnetic valves 5 as opening / closing means provided in the first flow paths 3 and the second flow paths 4, and control means for controlling the electromagnetic valves 5 Computer 6, a slider device 7 installed on the linear guide rail 2, and a drive means (not shown) for driving the slider device 7.

  The straight guide rail 2 is formed in a long rectangular parallelepiped shape and is installed on a surface plate (see FIG. 3) 8. A side surface on the long side of the linear guide rail 2 is a vertical guide surface 21 as a first guide surface, and an upper surface is a horizontal guide surface 22 as a second guide surface.

  In the vertical guide surface 21, the first flow path 3 is opened as the blowout port 31, and the second flow path 4 is opened as the suction port 41. A pair of outlets 31 are formed so as to be arranged in the same line shape in the vertical direction (up and down direction in FIG. 1), and are formed at regular intervals L1 in the horizontal direction (left and right direction in FIG. 1). ing. One suction port 41 is formed so as to be sandwiched between the pair of outlets 31 in the vertical direction, and is formed at regular intervals L1 in the horizontal direction. In other words, the air outlet 31 and the air inlet 41 are formed on the vertical guide surface 21 so as to form a line in the vertical direction and at a constant interval L1 in the horizontal direction. A scale (scale) 211 is attached to the lower part of the vertical guide surface 21 along the longitudinal direction of the vertical guide surface 21.

The first flow path 3 is formed outside the straight guide rail 2 by a static pressure transmission pipe 32, and is connected to a compressor 51 as a fluid supply source by the static pressure transmission pipe 32. The compressor 51 supplies compressed air (static pressure) to the first flow path 3.
The second flow path 4 is formed by a negative pressure transmission pipe 42 outside the straight guide rail 2. The negative pressure transmission pipe 42 communicates with the static pressure transmission pipe 32 via an ejector portion 52 (negative pressure generating portion). The ejector unit 52 sucks air in the second flow path 4 and supplies a negative pressure to the second flow path 4. Hereinafter, the ejector unit 52 will be described.

FIG. 2 is a diagram showing the ejector unit 52.
The ejector portion 52 includes a jet port 321 of the static pressure transmission pipe 32, a suction port 322 arranged to face the jet port 321 with a slight gap therebetween, and a negative pressure transmission pipe arranged toward the gap portion. 42 discharge ports 421. In the ejector portion 52, air is jetted from the jet port 321 toward the suction port 322, and this air jet draws the air in the second flow path (negative pressure transmission pipe 42) 4 into the air jet, A negative pressure is generated in the second flow path 4.

  As shown in FIG. 1, in the first flow path 3 and the second flow path 4, there are provided electromagnetic valves 5 that can open and close the first flow path 3 and the second flow path 4, respectively. The solenoid valve 5 is connected to the computer 6 via a solenoid valve controller 61.

The slider device 7 includes a vertical portion 71 disposed so as to face the vertical guide surface 21 and a horizontal portion 72 disposed so as to face the horizontal guide surface 22, and is formed in an L shape in side view. Yes.
A detection head 62 for reading the scale 211 is attached to the bottom surface of the vertical portion 71. The detection head 62 is connected to the counter unit 64 via a wiring 63, and is connected to the computer 6 via the counter unit 64. In the present embodiment, the detection means of the present invention is configured including the linear encoder unit including the detection head 62 and the scale 211.

FIG. 3 is a side view of the slider device 7.
The slider device 7 is formed with a static pressure transmission hole 73 and a negative pressure transmission hole 74. The static pressure transmission hole 73 and the negative pressure transmission hole 74 are both opposed to the first fluid bearing surface 75 formed on the surface of the vertical portion 71 facing the straight guide rail 2 and the straight guide rail 2 of the horizontal portion 72. The second fluid bearing surface 76 is formed on the surface to be opened.

FIG. 4 is a plan view showing the first fluid bearing surface 75 viewed from the IV direction of FIG.
The first fluid bearing surface 75 includes a suction groove 751 that is recessed inwardly at the center of the rectangular outer shape and extends along the longitudinal direction of the first fluid bearing surface 75, and an upper side of the suction groove 751 (see FIG. 4) and a pair of fluid receiving grooves 752 carved on the lower side (lower side in FIG. 4).

  The suction groove 751 is formed at a position facing the suction ports 41 arranged in the horizontal direction. A negative pressure transmission hole 74 is opened as a first negative pressure transmission port 741 at the bottom of the suction groove 751. The suction groove 751 is formed to have a length L2 that is slightly longer than a length obtained by adding the interval L1 between the suction ports 41 and the diameter D of the first negative pressure transmission port 741. That is, the suction groove 751 is formed to have a length L2 that can always cover at least one suction port 41 when the slider device 7 slides. The suction groove 751 transmits the negative pressure from the suction port 41 to the negative pressure transmission hole 74 and, in turn, the second negative pressure transmission port 742 described later.

  The fluid receiving groove 752 is a surface-squeezed groove, and is formed on the upper side and the lower side of the suction groove 751 at positions facing the rows of the outlets 31 arranged in the horizontal direction. As shown in FIG. 4, the fluid receiving groove 752 has a single main fluid receiving groove 753 extending along the longitudinal direction of the first fluid bearing surface 75, and the main fluid receiving groove 753 in the vertical direction. A plurality of narrow subfluid receiving grooves 754 are formed. At the bottom of the main fluid receiving groove 753, a static pressure transmission hole 73 is opened as a first static pressure transmission port 731 on the upper and lower sides of the first negative pressure transmission port 741. The fluid receiving groove 752 is formed to have a length L2 equal to the suction groove 751. Similarly to the suction groove 751, the fluid receiving groove 752 has a length that can always cover at least one outlet 31 when the slider device 7 slides. L2 is formed. The fluid receiving groove 752 transmits the static pressure from the blowout port 31 to the static pressure transmission hole 73 and, consequently, the second static pressure transmission port 732 described later.

  Air is blown from the outlet 31 to the fluid receiving groove 752 of the first fluid bearing surface 75 as described above. At this time, since the suction port 41 sucks air at the same time that the air outlet 31 blows out air, a part of the air in the fluid receiving groove 752 exits the fluid receiving groove 752 and is drawn into the suction port 41, and the first A fluid thin film layer 77 is formed between the fluid bearing surface 75 and the vertical guide surface 21. At this time, the air inside the suction groove 751 is sucked into the suction port 41 and the inside of the suction groove 751 is in a substantially vacuum state, so that the first fluid bearing surface 75 is attracted to the vertical guide surface 21. Thereby, the rigidity in the thickness direction of the fluid thin film layer 77 is enhanced, the thickness of the fluid thin film layer 77 is regulated to a constant thickness, and the distance between the first fluid bearing surface 75 and the vertical guide surface 21 is made a constant distance. Be regulated.

FIG. 5 is a plan view showing the second fluid bearing surface 76 viewed from the V direction of FIG.
The second fluid bearing surface 76 includes a suction groove 761 that is engraved in a concave shape inside a rectangular outer shape at a substantially central portion and extends along the longitudinal direction of the second fluid bearing surface 76, and a rectangular shape surrounding the suction groove 761. And a blowout groove 762 engraved in a frame shape.

A negative pressure transmission hole 74 opens as a second negative pressure transmission port 742 at the bottom of the suction groove 761. A negative pressure is transmitted to the second negative pressure transmission port 742 from the suction port 41 through the negative pressure transmission hole 74.
At the bottom of the blowing groove 762, static pressure transmission holes 73 are opened as second static pressure transmission ports 732 on the top, bottom, left, and right sides of the second negative pressure transmission port 742. Static pressure is transmitted to the second static pressure transmission port 732 from the blowout port 31 through the static pressure transmission hole 73. As shown in FIG. 3, the end of the static pressure transmission hole 73 on the second static pressure transmission port 732 side is an orifice throttle, and air can be blown out from the second static pressure transmission port 732 with vigorous force. It is like that.

  In the second fluid bearing surface 76 as described above, when air is blown out from the outlet 31, the second static pressure transmission port 732 faces the horizontal guide surface 22 through the fluid receiving groove 752 and the static pressure transmission hole 73. The air is blown out. At the same time, when the suction port 41 sucks air, a negative pressure is transmitted to the second negative pressure transmission port 742 via the suction groove 751 and the negative pressure transmission hole 74, and the air is drawn into the second negative pressure transmission port 742. It is. Therefore, the air blown out from the second static pressure transmission port 732 moves toward the second negative pressure transmission port 742 and is drawn into the second negative pressure transmission port 742, so that the second fluid bearing surface 76 and A fluid thin film layer 77 is formed between the horizontal guide surface 22. At this time, since the inside of the suction groove 761 is in a substantially vacuum state and the second fluid bearing surface 76 is attracted to the horizontal guide surface 22, the rigidity in the thickness direction of the fluid thin film layer 77 is increased, and the fluid thin film layer 77 is constant. The thickness is restricted, and the distance between the second fluid bearing surface 76 and the horizontal guide surface 22 is restricted to a constant distance.

  Thus, in this embodiment, the blower outlet 31 and the suction inlet 41 are formed in the linear guide rail 2. FIG. Further, the static pressure transmission hole 73 and the negative pressure transmission hole for transmitting the static pressure and the negative pressure from the air outlet 31 and the suction port 41 to the slider device 7 from the first fluid bearing surface 75 to the second fluid bearing surface 76. 74 is formed. For this reason, by blowing out air from the blower outlet 31 and sucking in air from the suction port 41, the gap between the first fluid bearing surface 75 and the vertical guide surface 21, and the second fluid bearing surface 76 and the horizontal guide surface 22. A fluid thin film layer 77 having a constant thickness can be formed therebetween, and the slider device 7 can be slidably installed on the linear guide rail 2 via the fluid thin film layer 77.

  The driving means is for driving the slider device 7 along the linear guide rail 2 and can be constituted by an appropriate machine.

  6A to 6D are side views for explaining the operation of the linear guide device 1. Below, operation | movement of the linear guide apparatus 1 is demonstrated. In FIGS. 6A to 6D, the outlet 31, the inlet 41, and the electromagnetic valve 5 are respectively labeled 31A, 31B, 41A, 41B, 5A, and 5B from the left side. In addition, as shown in FIG. 6A, the slider device 7 is initially installed at a position where only the vertical outlet 31A and the suction port 41A are covered with the fluid receiving groove 752 and the suction groove 751. And

  In the state of FIG. 6A, the computer 6 detects the relative position of the slider device 7 with respect to the linear guide rail 2 by the scale 211 and the detection head 62 (linear encoder unit), and the air outlet 31A is based on the position. And only the electromagnetic valve 5A for controlling the opening and closing of the suction port 41A is opened. Thus, the slider device 7 is installed on the linear guide rail 2 with the fluid thin film layer 77 having a constant thickness interposed therebetween.

  When the slider device 7 is driven to the right side in FIG. 6A along the straight guide rail 2 from the state of FIG. 6A, as shown in FIG. The fluid receiving groove 752 and the suction groove 751 are covered. Then, the computer 6 opens the solenoid valve 5B on the side of the air outlet 31B and the suction port 41B.

  When the slider device 7 is further driven from the state of FIG. 6B, the air outlet 31A and the suction port 41A are detached from the fluid receiving groove 752 and the suction groove 751, as shown in FIG. 6C. Then, the computer 6 closes the solenoid valve 5A on the side of the outlet 31A and the inlet 41A.

  When the slider device 7 is further driven from the state of FIG. 6C, as shown in FIG. 6D, the outlet 31A and the suction port 41A are detached from the slider device 7, and only the outlet 31B and the suction port 41B are fluid. The state returns to the state covered with the receiving groove 752 and the suction groove 751, that is, the state of FIG. By repeating such steps, the slider device 7 of this embodiment is slid.

As described above, in this embodiment, the length L2 of the fluid receiving groove 752 and the suction groove 751 adds the distance L1 between the air outlet 31 and the inlet 41 and the diameter D of the negative pressure transmission port and the static pressure transmission port. Therefore, by controlling the opening and closing of the air outlet 31 and the suction port 41 corresponding to the position of the slider device 7, it is possible to always supply static pressure and negative pressure to the slider device 7, and to continue Thus, the slider device 7 can be slid.
Further, since air is blown out and sucked from the linear guide rail 2 toward the slider device 7, it is unnecessary to attach the static pressure transmission pipe 32 and the negative pressure transmission pipe 42 to the slider device 7. Therefore, in this embodiment, the disturbance by these piping 32 and 42 can be eliminated, and the motion accuracy of the slider apparatus 7 can be improved.

  Here, in the present embodiment, the straight guide rail 2 is provided with the plurality of air outlets 31 and the suction ports 41, but the straight guide rail 2 is provided with only the vertical row of the air outlets 31 and the suction ports 41. Consider the case where there is not. Hereinafter, the same functional parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted or simplified.

7A and 7B show the vertical outlets 31 and the inlets 41 (the inlets arranged between the pair of outlets 31 and the pair of outlets 31 in the straight guide rail 2). 41) is a side view of a linear guide device 1A provided with only 41).
Even in such a linear guide device 1A, as shown in FIGS. 7A and 7B, the slider device 7 is slid in a range where the air outlet 31 and the suction port 41 are covered with the fluid receiving groove 752 and the suction groove 751. be able to.

However, in such a linear guide device 1A, the movable stroke of the slider 7 and L _0, the length of the slider 7 and Ls, and the length of the linear guide rail 2, L _g, the following equation (1 ), (2) holds,
L ₀ <L2 <Ls (1)
Ls + L ₀ <L _g (2)
When extending the movable stroke of the slider guide device by ΔL, the following equations (3) and (4) are used.
(L ₀ + ΔL) <(L2 + ΔL) <(Ls + ΔL) (3)
(Ls + ΔL) + (L ₀ + ΔL)
= Ls + L ₀ + 2ΔL <L _g + 2ΔL (4)
It can be seen that the length of the linear guide rail 2 needs to be increased by at least 2ΔL.

Therefore, in such a linear guide device 1A, when you try to extend the movable stroke L _0, the slider 7 is increased in size, mass increase or manufacturing cost of the slider device 7 is increased. On the other hand, in the linear guide device 1 of this embodiment, since the air outlet 31 and the inlet 41 are provided in the linear guide rail 2, it is limited to the length L2 of the fluid receiving groove 752 and the suction groove 751. The slider device 7 can be slid without any problems. That is, the movable stroke can be extended without increasing the size of the slider device 7.

According to this embodiment, the following effects can be achieved.
(1) The static pressure and negative pressure supplied from the vertical guide surface 21 of the linear guide rail 2 toward the first fluid bearing surface 75 are supplied to the second fluid bearing via the static pressure transmission hole 73 and the negative pressure transmission hole 74. Therefore, a fluid thin film layer 77 having a constant thickness is formed between the first fluid bearing surface 75 and the vertical guide surface 21 and between the second fluid bearing surface 76 and the horizontal guide surface 22. Can be formed. Therefore, the slider device 7 can be slidably installed on the linear guide rail 2 without attaching the static pressure transmission pipe 32 and the negative pressure transmission pipe 42 to the slider device 7. Therefore, the movement accuracy of the slider device 7 can be improved.

(2) A plurality of air outlets 31 and suction ports 41 are formed in the linear guide rail 2, and the slider device 7 is slid by controlling the opening and closing of the air outlets 31 and the suction ports 41 corresponding to the position of the slider device 7. Therefore, the slider device 7 can be slid without being limited to the length L2 of the fluid receiving groove 752 and the suction groove 751. Therefore, the movable stroke can be extended without increasing the size of the slider device 7.

(3) Since the fluid receiving groove 752 is formed in a surface throttle type, the air blown from the outlet 31 toward the fluid receiving groove 752 is surely sent to the static pressure transmitting hole 73 to the suction port 41. Can be inhaled. Therefore, the fluid thin film layer 77 having a certain thickness can be reliably formed between the first fluid bearing surface 75 and the vertical guide surface 21, and the motion accuracy of the slider device 7 can be further improved.

(4) Since the end of the static pressure transmission hole 73 on the second static pressure transmission port 732 side is an orifice throttle, a strong throttle effect can be exhibited in the throttle portion, and the second fluid bearing surface can be surely obtained. A fluid thin film layer 77 having a constant thickness can be formed between the horizontal guide surface 22 and 76. Therefore, the movement accuracy of the slider device 7 can be further improved.

[Second Embodiment]
FIG. 8 is a perspective view of a linear guide device 1B according to the second embodiment of the present invention.
The present embodiment has substantially the same configuration as that of the first embodiment, but in the first embodiment, the slider device 7 slides on the horizontal guide surface 22 and the vertical guide surface 21 of the linear guide rail 2. In this embodiment, the point that the slider device 7A slides on the surface plate 8 along the vertical guide surface 21 of the linear guide rail 2 is the first difference from the first embodiment.

In the first embodiment, the relative position of the slider device 7 with respect to the linear guide rail 2 is detected using the detection head 62 and the scale 211. In the present embodiment, the slider device 7 is installed on the surface plate 8. The point of detection using the laser interference side length meter 65 and the reflecting mirror 68 attached to the slider device 7A is the second difference from the first embodiment.
The second embodiment of the present invention will be described below.

  In the present embodiment, as shown in FIG. 8, the linear guide rail 2 is installed on the surface plate 8 so that the vertical guide surface 21 is in contact with the upper surface 81 of the surface plate 8 at a right angle. The slider guide device of the present invention includes the linear guide rail 2 and the surface plate 8. The surface plate 8 is a stone surface plate, and the upper surface 81 thereof is horizontal.

On the surface plate 8, a laser interference side length meter 65 is installed in the sliding direction of the slider device 7A. The laser interference side length meter 65 is connected to a practical wavelength stabilized laser light source 66 by an optical fiber 67. The laser interference side length meter 65 is connected to the computer 6 via the counter unit 64. In the present embodiment, the laser interference side length meter 65 emits light toward the reflecting mirror 68 installed in the slider device 7A and receives the light reflected by the reflecting mirror 68, whereby the linear guide rail 2 of the slider device 7A. The relative position with respect to can be detected.
The slider device 7A is formed in a rectangular parallelepiped shape. A reflecting mirror 68 is provided on the side surface 78 on the short side of the slider device 7A. In the present embodiment, the detection means of the present invention is configured including the reflecting mirror 68 and the laser interference side length meter 65.

FIG. 9 is a cross-sectional view of the slider device 7A.
The slider device 7 </ b> A includes a first fluid bearing surface 75 that faces the vertical guide surface 21 and a second fluid bearing surface 76 that faces the upper surface 81 of the surface plate 8. The first fluid bearing surface 75 is configured in the same manner as in the first embodiment, and a fluid receiving groove 752 in which a first static pressure transmission port 731 is formed at the bottom, and a first negative pressure transmission port 741 at the bottom. The suction groove 751 is formed. The second fluid bearing surface 76 is also configured in the same manner as in the first embodiment, and has a blowout groove 762 in which a second static pressure transmission port 732 is formed at the bottom and a second negative pressure transmission port 742 in the bottom. And a suction groove 761.
Similarly to the first embodiment, the slider device 7A includes a static pressure transmission hole 73 that communicates the first static pressure transmission port 731 and the second static pressure transmission port 732, a first negative pressure transmission port 741, and a first negative pressure transmission port 741. 2 and a negative pressure transmission hole 74 communicating with the negative pressure transmission port 742.

  Also in this embodiment, the static pressure and the negative pressure supplied from the vertical guide surface 21 of the linear guide rail 2 toward the first fluid bearing surface 75 are passed through the static pressure transmission hole 73 and the negative pressure transmission hole 74. Can be transmitted between the first fluid bearing surface 75 and the vertical guide surface 21 and between the second fluid bearing surface 76 and the upper surface 81 of the surface plate 8. The fluid thin film layer 77 regulated by the thickness can be formed. Further, the linear guide device 1B includes the laser interference side length meter 65 installed on the surface plate 8, and the reflecting mirror 68 installed on the slider device 7A so as to face the laser interference side length meter 65. Similar to the first embodiment, the relative position of the slider device 7A with respect to the straight guide rail 2 can be detected.

  Therefore, also in this embodiment, by controlling the opening and closing of the air outlet 31 and the suction port 41, the slider device 7A is slid without attaching the static pressure transmission pipe 32 and the negative pressure transmission pipe 42 to the slider device 7A. Therefore, the disturbance caused by these pipes 32 and 42 can be eliminated. Therefore, also in this embodiment, the same effects (1) to (4) as in the first embodiment can be achieved, and the following effects can be achieved.

(5) Since the slider device 7A is formed in a rectangular parallelepiped shape, the balance of the slider device 7A can be improved and the motion accuracy of the slider device 7A can be improved compared to the slider device 7A formed in an L shape. Can be sufficiently improved.

(6) In the case where the detection head 62 is provided in the slider device 7A, a force is applied to the slider device 7A, albeit slightly, by the wiring 63 that connects the detection head 62 and the counter unit 64. However, in the present embodiment, the relative position of the slider device 7A with respect to the linear guide rail 2 is detected using the laser interference side length meter 65 provided on the surface plate 8 and the reflecting mirror 68 provided on the slider device 7A. Such wiring 63 can be eliminated, and the motion accuracy of the slider device 7A can be improved more sufficiently.

[Third Embodiment]
FIG. 10 is a perspective view of a measuring instrument 100 according to the third embodiment of the present invention.
The measuring instrument 100 of the present embodiment is for measuring the straightness of the linear object 110 to be measured. As shown in FIG. 10, such a measuring machine 100 includes a linear guide rail 1 and a linear guide device 1 that is substantially the same as the first embodiment having a linear guide rail 2 and a slider device 7 that is slidably installed on the linear guide rail 2. And a measurement unit 9 that moves together with the slider device 7 and measures the unevenness of the object 110 to be measured.

FIG. 11 is a perspective view of the straight guide rail 2.
In the linear guide device 1 of the present embodiment, the blowout ports 31 and the suction ports 41 are formed in only one vertical line in the linear guide rail 2, and the fluid receiving groove 752 formed in the slider device 7 is the slider device 7. And the point which moves only the length of the suction groove 751 is a different point from the linear guide apparatus 1 of the said 1st Embodiment. In the linear guide device 1 of the present embodiment, the first flow path 3 and the second flow path 4 in the straight guide rail 2 are formed along the longitudinal direction of the straight guide rail 2, and the straight guide rail 2 The point that the static pressure transmission pipe 32 and the negative pressure transmission pipe 42 are attached to the short side surface 23 is also different from the linear guide device 1 of the first embodiment.

  As shown in FIG. 10, the measurement unit section 9 includes a casing section 91 attached at one end to a side surface 721 along the extending direction of the linear guide rail 2 of the horizontal section 72 of the slider device 7, and the casing section 91. The spindle 92 is configured to be able to move forward and backward from the end toward the object to be measured 110, and a detection unit (not shown) that is provided inside the casing portion 91 and detects the amount of movement of the spindle 92. A measuring element 921 that abuts on the surface of the object to be measured 110 is provided at the tip of the spindle 92. The detection unit is not particularly limited, and various displacement detection means such as a capacitance type, a photoelectric type, and a magnetic type can be used.

The linear object to be measured 110 is arranged so that it is substantially parallel to the straight guide rail 2 and the measured surface 111 faces the side surface 721 along the straight direction of the straight guide rail 2 of the horizontal portion 72. A measuring element 921 is in contact with the surface to be measured 111.
In such a measuring machine 100, when the slider device 7 is linearly moved along the linear guide rail 2, the measurement unit 9 also moves linearly along with the slider device 7, and the spindle 92 advances and retreats according to the unevenness of the measured surface 111. To do. The straightness of the surface to be measured 111 is measured by detecting the advance / retreat amount of the spindle 92 by the detection unit.

  In the measuring instrument 100 of the present embodiment, since the linear guide device 1 is configured in substantially the same manner as the linear guide device 1 of the first embodiment, the same effects (1) and (3) as the first embodiment. , (4) as well as the following effects.

(7) Since the measuring instrument 100 of the present embodiment includes the linear guide device 1 that is substantially the same as the linear guide device 1 of the first embodiment, the slider device 7 is moved on the linear guide rail 2 with high motion accuracy. Can be made. Accordingly, the measurement unit 9 attached to the slider device 7 can also be moved with high motion accuracy, and the straightness of the object 110 to be measured can be accurately measured.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
In the first and third embodiments, the slider device 7 is formed in an L shape in cross section. However, the present invention is not limited to this. That is, the slider device 7 transmits the static pressure and negative pressure received by the first fluid bearing surface 75 to the second fluid bearing surface 76 via the static pressure transmission hole 73 and the negative pressure transmission hole 74 formed therein. In this way, if it is slidably installed on the straight guide rail 2 via the fluid thin film layer 77, it is formed in various shapes such as a U-shape and a square shape in cross-section as described in the background art. It may be formed and may be formed in an appropriate shape.

In the first embodiment, the air outlet 31 and the suction port 41 are formed on the vertical guide surface 21 side of the linear guide rail 2, but may be formed on the horizontal guide surface 22 side.
In the second embodiment, the slider device 7A is formed in a rectangular parallelepiped shape. However, the slider device 7A may be formed in an L shape in a cross-sectional view, or may be formed in an appropriate shape.

  In the first and second embodiments, the detection means includes the scale 211 and the detection head 62 (linear encoder unit), or the laser interference side length meter 65 and the reflecting mirror 68, and the slider devices 7 and 7 </ b> A are relative to the linear guide rail 2. The position can be sequentially detected, but the detection means includes a proximity switch and a limit switch, and detects the position of the slider devices 7 and 7A by detecting a trigger signal corresponding to the position of the slider devices 7 and 7A. You may be comprised so that it can detect.

  The present invention can be used, for example, in a linear guide device provided with a linear guide rail. Moreover, this invention can be used for measuring machines, such as a three-dimensional measuring machine and a surface texture measuring machine, for example.

1 is a perspective view of a linear guide device according to a first embodiment of the present invention. The figure which shows the ejector part of the said embodiment. The side view of the slider apparatus of the said embodiment. The top view which shows the 1st fluid bearing surface of the said embodiment seen from the IV direction of FIG. The top view which shows the 2nd fluid bearing surface of the said embodiment seen from the V direction of FIG. The side view for demonstrating operation | movement of the linear guide apparatus of the said embodiment. The side view of the linear guide apparatus provided with only the blower outlet and suction inlet of 1 vertical line. The perspective view of the linear guide apparatus which concerns on 2nd Embodiment. Sectional drawing of the slider apparatus of the said embodiment. The perspective view of the measuring machine which concerns on 3rd Embodiment. The perspective view of the linear guide rail of the said embodiment. Sectional drawing of the conventional constraining type | mold linear guide apparatus of rectangular cross section. Sectional drawing of the conventional constrained linear guide apparatus of circular cross section. Sectional drawing of the conventional partial restraint type linear guide apparatus. Sectional drawing of the conventional balance type linear guide apparatus. Sectional drawing of the conventional vacuum pressure balance type linear guide apparatus. The figure which shows the cable bear in the conventional vacuum pressure balance type linear guide apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,1B ... Linear guide apparatus, 2 ... Linear guide rail (slider guide apparatus), 3 ... 1st flow path, 4 ... 2nd flow path, 5 ... Solenoid valve (opening-closing means), 6 ... Computer (control means), 7, 7A ... Slider device, 8 ... Surface plate (slider guide device), 9 ... Measurement unit, 21 ... Vertical guide surface (first guide surface), 22 ... Horizontal guide surface (second guide surface), 31 ... Blow Outlet, 41 ... Suction port, 62 ... Detection head (detection means), 65 ... Laser interference side length meter (detection means), 68 ... Reflector (detection means), 73 ... Static pressure transmission hole, 74 ... Negative pressure transmission hole, 75 ... first fluid bearing surface, 76 ... second fluid bearing surface, 77 ... fluid thin film layer (fluid layer), 81 ... top surface of the surface plate, 211 ... scale (detecting means), 731 ... first static pressure transmission port, 732 ... Second static pressure transmission port, 741 ... First negative pressure transmission port, 742 ... Second negative pressure transmission , 751 ... suction groove 752 ... fluid receiving groove.

Claims (7)

A slider guide device having a flat first guide surface and a flat second guide surface adjacent to a side along the longitudinal direction of the first guide surface, and a first fluid bearing disposed to face the first guide surface A linear guide device having a surface and a second fluid bearing surface disposed opposite to the second guide surface, the slider device being slidably provided with respect to the slider guide device,
The first guide surface is formed with a blowout port for blowing out fluid and a suction port for sucking in the fluid,
The slider device is formed with a static pressure transmission hole and a negative pressure transmission hole,
The static pressure transmission hole opens as a first static pressure transmission port on the first fluid bearing surface and opens as a second static pressure transmission port on the second fluid bearing surface, and the fluid blown out from the blowout port Is taken out from the first static pressure transmission port and blown out from the second static pressure transmission port toward the second guide surface,
The negative pressure transmission hole opens as a first negative pressure transmission port on the first fluid bearing surface and opens as a second negative pressure transmission port on the second fluid bearing surface, and blows out from the second static pressure transmission port. Sucking the fluid from the second negative pressure transmission port and blowing out from the first negative pressure transmission port;
Due to the negative pressure generated by the suction port sucking the fluid that has been blown out from the outlet toward the first fluid bearing surface and passed between the first fluid bearing surface and the first guide surface, When the first fluid bearing surface is attracted to the first guide surface, a fluid having a substantially constant thickness with increased rigidity in the thickness direction between the first fluid bearing surface and the first guide surface. A layer is formed,
The second negative pressure transmission port sucks the fluid blown out from the second static pressure transmission port toward the second guide surface and passed between the second fluid bearing surface and the second guide surface. The second fluid bearing surface is attracted to the second guide surface by the negative pressure generated by this, so that the rigidity in the thickness direction is increased between the second fluid bearing surface and the second guide surface. A linear guide device, wherein a fluid layer having a substantially constant thickness is formed. The linear guide device according to claim 1,
The slider guide device includes a linear guide rail provided with the first guide surface and the second guide surface that are in contact with each other at a right angle.
The slider device is formed in an L shape in a sectional view. The linear guide device according to claim 1,
The slider guide device includes the linear guide rail and a surface plate,
The linear guide rail is installed on the surface plate such that the side surface on the long side of the linear guide rail is in contact with the upper surface of the surface plate,
A linear guide device, wherein a side surface on a longitudinal side of the linear guide rail is formed as the first guide surface, and an upper surface of the surface plate is formed as the second guide surface. In the linear guide device according to claim 3,
The side surface of the linear guide rail and the upper surface of the surface plate are in contact with each other at a right angle,
The slider device is formed in a rectangular parallelepiped shape. In the linear guide apparatus in any one of Claims 1-4,
A surface constriction type fluid receiving groove extending in a direction along the longitudinal direction of the first guide surface is formed at a position facing the air outlet of the first fluid bearing surface,
The linear guide device in which the first static pressure transmission port is formed in a bottom portion of the fluid receiving groove. In the linear guide apparatus according to claim 5,
A plurality of the air outlets and the air inlets are formed in the first guide surface at the same interval along the longitudinal direction of the first guide surface,
A suction groove that extends in a direction along the longitudinal direction of the first guide surface and has the second negative pressure transmission port formed at the bottom is formed at a position facing the suction port of the first fluid bearing surface. ,
The fluid receiving groove is formed in a length that can cover at least one of the outlets at all times,
The suction groove is formed in a length that can cover at least one of the suction ports at all times,
Detecting means for detecting a relative position of the slider device with respect to the slider guide device;
A plurality of first flow paths opening as the air outlets at the first guide surface; a plurality of second flow paths opening as the suction ports at the first guide surface;
An opening / closing means provided in each of the first channel and the second channel and capable of opening and closing the first channel and the second channel;
A linear guide characterized by comprising: control means for controlling the opening / closing means provided in the first flow path and the second flow path corresponding to the position of the slider device detected by the detection means; apparatus. A measuring machine comprising: the linear guide device according to any one of claims 1 to 6; and a measurement unit section that moves together with the slider device.

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