JP2009006588A - Printer, printing method, printing mask, and method for producing printing mask - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a printer capable of obtaining satisfactory printing quality over the whole of the face to be printed in an object for printing even in the case a printing mask in which bending is easily caused and which has low rigidity is used, to provide a printing method, to provide a printing mask, and to provide a method for producing the printing mask. <P>SOLUTION: The printer is provided with a supporting means supporting a printing mask 2 so as to be freely swingable in such a manner that the printing mask 2 is tilted to a substrate 1. A plurality of opening parts 201 in the printing mask 2 have tapered inside walls 201a gradually widened as it goes to the escaping direction of cream solder 3. The taper angle θt of the plurality of opening parts 201 in the printing mask 2 is wider at the opening part close to the rotary axis 411 being the fulcrum point of swinging. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a printing apparatus and printing method for printing a printing substance on a printing surface of a printing object, a printing mask, and a printing mask manufacturing method.

  Conventionally, as a method of printing a printing substance such as a conductive paste on a printing surface such as a pad electrode provided on a printing object such as a circuit board, a filling member is provided in an opening of a printing mask attached to the printing object. A printing method and a printing apparatus have been proposed in which a printing material is filled on a printing surface of a printing object by filling the printing material with a squeegee and then separating the printing object from a printing mask (Patent Literature). 1).

JP 2000-177098 A

  In recent years, with the miniaturization of electronic components, the printing method and printing apparatus as shown in Patent Document 1 described above are conductive using a plastic printing mask in which openings are formed on a plastic material with a fine pitch with a fine pitch. Printing materials such as pastes are being printed.

  However, when printing with a fine pitch using the above-described plastic print mask having openings formed with a fine pitch, the print quality near the center of the surface to be printed of the printing object is set near the edge. There has been a problem that the print quality is deteriorated or, in some cases, a print omission occurs near the center. That is, after filling a printing material such as the conductive paste in each opening of the printing mask, when trying to separate the printing mask and the printing object, the vicinity of the center of the printing mask is the surface to be printed of the printing object. It will be difficult to leave, and it will bend to the printing object side. In this way, the print mask and the printing object are gradually separated from the peripheral part of the contact surface toward the center part in a state where the print mask is bent. Then, in the vicinity of the center of the printing mask that is separated from the printing object with a delay from the peripheral edge, excessive acceleration is generated in the opposite direction to the printing object due to the increase in tension. For this reason, the separation speed between the printing mask and the printing object becomes faster as the portion is closer to the center of the printing mask, and the printing substance tends to remain in the opening near the center of the printing mask. As a result, a part of the printed material is chipped, deformed, or missing from printing on the surface to be printed corresponding to the vicinity of the center of the print mask, resulting in a decrease in print quality. Such a problem of deterioration in print quality is not limited to a plastic print mask, and may occur when using a low-rigidity print mask that is likely to bend.

  The present invention has been made in view of the above problems, and an object of the present invention is to obtain good print quality over the entire printing surface of a printing object even when using a low-rigidity printing mask that is likely to bend. It is to provide a printing apparatus, a printing method, a printing mask, and a printing mask manufacturing method.

In order to achieve the above object, the invention of claim 1 sets a printing mask having a plurality of openings formed on a printing object, fills the openings of the printing mask with a printing substance, and then prints the printing mask. A printing apparatus that prints the printing material on a printing surface of the printing object by separating the mask and the printing object, and tilts one of the printing mask and the printing object with respect to the other. Support means for swingably supporting the printing mask or the printing object, and the plurality of openings of the printing mask have tapered inner walls that gradually widen in the direction in which the printing material is removed. It is characterized by having.
According to a second aspect of the present invention, in the printing apparatus according to the first aspect, the taper angle of the plurality of openings of the printing mask is larger as the opening is closer to the rotation axis, which is the fulcrum of the oscillation. Is.
According to a third aspect of the present invention, in the printing apparatus according to the first aspect, the distance between the rotation shaft that is the fulcrum of the swing and the opening of the print mask is the distance between the print mask and the print object. The movement trajectory of the inner wall of the opening is set so as not to interfere with the printing material filled in the opening.
According to a fourth aspect of the present invention, in the printing apparatus according to any one of the first to third aspects, the printing mask or the printing object supported by the supporting means is swung with the rotating shaft as a fulcrum. A driving means for driving and a control means for controlling the driving means are provided.
According to a fifth aspect of the present invention, in the printing apparatus according to the fourth aspect, the support means supports the printing mask or the printing object so as to be swingable, and is provided on a printing surface of the printing object. The drive means supports the print mask or the print object along the direction perpendicular to the printing surface of the print object along with the swing. The control means can be driven to move linearly, and the control means moves the print mask or the print object by a predetermined rotation angle set in advance in a direction to separate the print mask and the print object. The printing mask or the printing object is moved linearly in a direction in which the printing mask and the printing object are separated from each other along a direction perpendicular to the printing surface of the printing object. To control the drive means. It is characterized in that.
The invention according to claim 6 is the printing apparatus according to claim 4 or 5, wherein the speed of the print mask or the print object when the print mask and the print object are separated is the opening of the print mask. It is set according to the total number or density of parts.
According to a seventh aspect of the present invention, there is provided the printing apparatus according to the fourth or fifth aspect, further comprising opening detection means for detecting a total number or density of the openings of the print mask, and the control means includes the openings of the print mask. The speed of the printing mask or the printing object when the printing mask and the printing object are separated from each other is controlled based on the detection result of the total number or density.
The invention according to claim 8 is the printing apparatus according to any one of claims 4 to 7, wherein the speed of the printing mask or the printing object when the printing mask and the printing object are separated is the printing device. It is set according to the tension of the mask.
The invention according to claim 9 is the printing apparatus according to any one of claims 4 to 7, further comprising tension detecting means for detecting the tension of the printing mask, wherein the control means is a tension of the printing mask that is the tension detecting means. Based on the above, the speed of the printing mask or the printing object when the printing mask and the printing object are separated from each other is controlled.
The invention of claim 10 is the printing apparatus according to any one of claims 1 to 9, wherein the printing mask is attached from an outer edge of the opening forming area where the plurality of openings are formed in the printing mask. The distance to the attachment member is set according to the total number or density of the openings of the printing mask.

The invention of claim 11 sets a printing mask having a plurality of openings formed on a printing object, fills the opening of the printing mask with a printing material, and then connects the printing mask and the printing object. A printing method for printing the printing material on a printing surface of the printing object by separating the tape, wherein the plurality of openings of the printing mask gradually widen as the printing material is removed. What has a shape-like inner wall is used, The printing mask or the printing object is rocked so that one of the printing mask and the printing object is inclined with respect to the other.
According to a twelfth aspect of the present invention, in the printing method according to the eleventh aspect, the taper angle of the plurality of openings of the printing mask is larger as the opening is closer to the rotation axis that is the fulcrum of the oscillation. Is.
The invention according to claim 13 is the printing method according to claim 11, wherein the distance between the rotation shaft that is the fulcrum of the swing and the opening of the print mask is the distance between the print mask and the print object. The movement trajectory of the inner wall of the opening is set so as not to interfere with the printing material filled in the opening.
The invention according to claim 14 is the printing method according to any one of claims 11 to 13, wherein the printing mask or the printing object is swung to the extent that the printing material is removed from all openings of the printing mask. Then, the printing mask or the printing object is linearly moved in a direction to separate the printing mask and the printing object along a direction perpendicular to the surface to be printed of the printing object. To do.
Further, the invention of claim 15 is the printing method according to any one of claims 11 to 14, wherein the speed of the print mask or the print object when the print mask and the print object are separated is set to the printing method. It is set according to the total number or density of the openings of the mask.
Further, the invention of claim 16 is the printing method according to any one of claims 11 to 15, wherein the speed of the print mask or the print object when the print mask and the print object are separated is set to the printing method. It is set according to the tension of the mask.
The invention according to claim 17 is the printing method according to any one of claims 11 to 16, wherein the distance from the end of the area where the opening of the printing mask is formed to the mask mounting member to which the printing mask is attached is the printing method. The number of openings is changed according to the total number or density of the openings of the mask.

The invention according to claim 18 is a printing mask in which a plurality of openings are formed, each of the plurality of openings having a tapered inner wall that gradually expands in the direction in which the printing substance is removed. The taper angle of the opening is characterized by increasing as it goes from one end side to the other end side of the printing mask.
In the printing mask according to any one of claims 18 to 21, the mounting position of the mask mounting member of the printing mask is set according to the total number or density of the plurality of openings. It is characterized by.

A twentieth aspect of the invention is a method of manufacturing a printing mask having a plurality of openings, each of the openings having a tapered inner wall that gradually widens in the printing material removal direction. In addition, the taper angle is formed so as to increase as it goes from one end side to the other end side of the printing mask.
The invention of claim 21 is the method of manufacturing a print mask according to claim 20, wherein a plastic material is used as the material of the print mask, and the plurality of openings are irradiated by laser capable of changing the setting of irradiation conditions. It is characterized by forming.
The invention according to claim 22 is the method of manufacturing a print mask according to claim 20 or 21, wherein the attachment position of the mask attachment member of the print mask is set according to the total number or density of the plurality of openings. It is what.

In the printing apparatus of Claim 1, and the printing method of Claim 11, after setting the printing mask in which the several opening part was formed on the printing object, and filling the printing substance in the opening part of the printing mask, the printing mask and The printing mask or the printing object is swung so that one of the printing objects is inclined with respect to the other. By this swinging, the print mask and the printing object can be gradually separated from one end side to the other end side of the print mask. Unlike the case in which the print mask is separated, the print mask is not greatly bent and the central portion is not separated from the print object by excessive acceleration.
Further, the plurality of openings of the printing mask have tapered inner walls that gradually widen in the printing material removal direction, so that the inner wall surface of each opening and the printing material at the time of separation due to the swinging. Contact resistance is reduced, and the printed material is less likely to remain in each opening.
Therefore, even when using a low-rigidity printing mask that is likely to bend, it is difficult to cause partial chipping or printing omission on the printing surface of the printing object, and the entire printing surface of the printing object is good. Print quality can be obtained.

  Further, in the printing apparatus of claim 2 and the printing method of claim 12, the movement trajectory of the inner wall of the opening that moves relative to the printing object at the time of separation due to the swinging of the printing mask, and the printing substance in the opening For the opening close to the rotation axis, which is the fulcrum of the above-mentioned oscillation that is likely to interfere, the inner wall of the opening at the time of separation due to the oscillation of the printing mask by increasing the taper angle of the inner wall of the opening The contact resistance between the surface and the printing material is reduced to prevent a part of the printing material from being chipped or missing. For the opening far from the rotational axis, the movement trajectory of the inner wall of the opening and the printing material in the opening are less likely to interfere with each other, by reducing the taper angle of the inner wall of the opening. In addition, it is possible to avoid contact between the individual print patterns made of the adjacent print substances, increase the density of the individual print patterns, and reduce the amount of the print substance used for printing.

In the printing apparatus according to claim 3 and the printing method according to claim 13, the distance between the rotation shaft, which is the fulcrum of the swing, and the opening of the printing mask is an opening when the printing mask and the printing object are separated from each other. This is set so that the movement trajectory of the inner wall does not interfere with the printing material filled in the opening, so that the printing material on the printing surface can be prevented from being scraped off by the inner wall of the opening during the above separation. In addition, it is possible to surely prevent the printing material from partially missing.
When the taper angles of the plurality of openings formed in the printing mask are equal to each other, the closest opening to the rotation axis among the plurality of openings and the rotation axis The distance may be set so that the movement trajectory of the inner wall of the closest opening at the time of the separation does not interfere with the printing material filled in the opening.

  Further, in the printing apparatus according to claim 4, unlike the case where the driving means swings the print mask or the printing object by the driving means, the print mask is set at a predetermined separation speed that is set in advance. Can be stably separated from the printing object.

  Further, in the printing apparatus according to claim 5 and the printing method according to claim 14, as the first separation operation, the printing mask or the printing object is made to the extent that the printing substance has just come out of the plurality of openings formed in the printing mask. The printing material can be prevented from remaining in each opening. Then, after the printing material has been removed, as a second separation operation, the printing mask or the printing object is oriented in a direction to separate the printing mask and the printing object along a direction perpendicular to the printing surface of the printing object. Is moved linearly, the separation operation between the printing mask and the printing object can be quickly terminated, and the tact time of the printing process can be shortened.

Further, in the above printing apparatus, as the total number or density of the openings of the printing mask increases, the adhesion between the opening filled with the printing material and the printing object increases, and when the printing mask and the printing object are separated from each other. The printing mask is easily bent.
Therefore, in the printing apparatus of claim 6 and the printing method of claim 15, according to the total number or density of the openings of the print mask, the speed of the print mask or the printing object at the time of the separation increases as the total number or density increases. By setting it to be small, it is possible to suppress the occurrence of bending of the printing mask and to prevent the occurrence of an excessive separation speed due to the bending of the printing mask.

  According to a seventh aspect of the present invention, based on the detection result of the total number or density of the openings of the print mask, the speed of the print mask or the printing object at the time of the separation decreases as the total number or density detection result increases. By controlling to do so, it is possible to suppress the occurrence of bending of the printing mask and to prevent the occurrence of excessive separation speed due to the bending of the printing mask. In addition, since the total number or density of the openings of the printing mask used for the speed control is detected by the opening detection means, it is not necessary for the operator to check the total number or density of the openings of the printing mask in advance.

Further, in the above printing apparatus, as the tension of the printing mask is reduced, the adhesion between the opening filled with the printing material and the printing object is increased, and the printing mask is easily bent when the printing mask is separated from the printing object. Become.
Therefore, in the printing apparatus of claim 8 and the printing method of claim 16, according to the tension of the printing mask, the speed of the printing mask or the printing object at the time of the separation is set to be smaller as the tension is smaller. Therefore, it is possible to suppress the occurrence of bending of the printing mask and to prevent the occurrence of excessive separation speed due to the bending of the printing mask.

  According to a ninth aspect of the present invention, on the basis of the detection result of the tension of the print mask, the smaller the detection result of the tension, the lower the speed of the print mask or the printing object at the time of separation is controlled. The occurrence of bending of the printing mask can be suppressed, and the occurrence of an excessive separation speed due to the bending of the printing mask can be prevented. In addition, since the tension of the printing mask used for controlling the speed is detected by the tension detecting means, it is not necessary for the operator to check the tension of the printing mask in advance.

Further, in the above printing apparatus, the longer the distance from the outer edge of the opening forming region where the plurality of openings are formed in the printing mask to the mask mounting member to which the printing mask is attached, The adhesion with the print object is increased, and the print mask is easily bent when the print mask is separated from the print object.
Therefore, in the printing apparatus according to claim 10 and the printing method according to claim 17, in accordance with the total number or density of the openings in the print mask, the larger the total number or density of the openings, the more from the outer edge of the opening formation region of the print mask. By setting the distance to the mask mounting member to be short, the occurrence of bending of the printing mask can be suppressed, and the occurrence of an excessive separation speed due to the bending of the printing mask can be prevented.

In the printing mask according to claim 18, the movement trajectory of the inner wall of the opening that moves relative to the printing object when the printing mask or the printing object is swung and separated from each other, and the printing material in the opening. For the opening close to the rotation axis, which is the fulcrum of the above-mentioned oscillation that easily interferes with, the contact resistance between the surface of the inner wall of the opening and the printing material is reduced by increasing the taper angle of the inner wall of the opening. This prevents part of the printing material from being chipped or missing. For the opening far from the rotational axis, the movement trajectory of the inner wall of the opening and the printing material in the opening are less likely to interfere with each other, by reducing the taper angle of the inner wall of the opening. In addition, it is possible to avoid contact between the individual print patterns made of the adjacent print substances, increase the density of the individual print patterns, and reduce the amount of the print substance used for printing.
In the printing mask according to claim 19, the distance from the outer edge of the opening forming region to the mask mounting member is shortened as the total number or density of the openings is increased according to the total number or density of the openings of the printing mask. By setting to, occurrence of bending of the printing mask can be suppressed, and generation of excessive separation speed due to bending of the printing mask can be prevented.

21. The printing mask manufacturing method according to claim 20, wherein the movement of the inner wall of the opening that moves relative to the printing object when the printing mask manufactured by the manufacturing method or the printing object is rocked and separated from each other. For the opening close to the rotation axis, which is the fulcrum of the oscillation, where the trajectory and the printing material in the opening are likely to interfere with each other, by increasing the taper angle of the inner wall of the opening, the surface of the inner wall of the opening The contact resistance with the printing substance is lowered to prevent partial chipping or printing omission of the printing substance. For the opening far from the rotational axis, the movement trajectory of the inner wall of the opening and the printing material in the opening are less likely to interfere with each other, by reducing the taper angle of the inner wall of the opening. In addition, it is possible to avoid contact between the individual print patterns made of the adjacent print substances, increase the density of the individual print patterns, and reduce the amount of the print substance used for printing.
In the printing mask manufacturing method according to claim 21, a plastic material is used as the material of the printing mask, and the plastic material is irradiated with a laser while changing the irradiation conditions, thereby forming tapered shapes having various taper angles. A plurality of openings having an inner wall can be formed.
Here, when an ultraviolet laser (for example, an excimer laser) is used as the laser, the surface roughness of the inner surface of the opening formed in the printing mask is reduced, and the removal of the printing material from the opening is improved. Can do.
A plurality of openings having tapered inner walls having various taper angles may be formed by performing electric discharge machining while changing electric discharge machining conditions on the material of the printing mask. Moreover, you may form several opening part which has a taper-shaped inner wall of various taper angles by performing a press process, changing a press process condition with respect to the material of a printing mask.
Further, in the printing mask manufacturing method according to claim 22, the distance from the outer edge of the opening forming region to the mask mounting member is shortened as the total number or density of the openings is increased according to the total number or density of the openings of the printing mask. By setting so as to perform, it is possible to suppress the occurrence of bending of the printing mask and to prevent the occurrence of excessive separation speed due to the bending of the printing mask.

  According to the present invention, when separating the print mask in which the opening is filled with the print substance and the print object, the print mask or the print object is inclined so that one of the print mask and the print object is inclined with respect to the other. The print mask and the printing object are separated little by little from one end side to the other end side of the print mask by suppressing the occurrence of bending of the print mask, and the separation speed is Unlike the case where both the print mask and the print object are separated without being inclined, the central part of the print mask is printed at an excessive acceleration. It is not separated from. In addition, since the plurality of openings formed in the printing mask have tapered inner walls that gradually widen in the direction in which the printing substance is removed, the inner wall surface of each opening at the time of separation due to the swinging. And the contact resistance between the printing material and the printing material are less likely to remain in each opening. As described above, even when using a low-rigidity printing mask that is likely to be bent, it is possible to suppress the occurrence of partial chipping or printing omission on the printing surface of the printing object, and the entire printing surface of the printing object. There is an effect that good print quality can be obtained.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a process diagram showing an example of an entire substrate manufacturing method including a printing process employing a printing method according to an embodiment of the present invention. 2A and 2B are respectively an explanatory view and a plan view showing an example of a cross-sectional structure of the electronic circuit board 1 manufactured by the substrate manufacturing method of the present embodiment.
As shown in FIG. 2A, the substrate 1 includes a surface mounting resin exterior component (hereinafter referred to as “resin exterior chip”) 1b as a first electronic component and a surface mounting as a second electronic component. This is an electronic circuit board on which a bare chip component (hereinafter simply referred to as “bare chip”) 1c is mounted. The resin exterior chip 1b is a component such as a semiconductor IC sealed with resin, a resistor, and a capacitor, and the bare chip 1c is a bare semiconductor IC chip before being sealed with resin. Between the substrate 1 and the bare chip 1c, a resin 55 is filled so that the bare chip 1c is stably fixed on the substrate 1. On the other hand, the resin is not filled between the substrate 1 and the resin exterior chip 1b.

  Further, as shown in FIG. 2B, the substrate 1 is a substrate in which a large number (for example, several tens to several hundreds) of individual substrates 100 having a predetermined function and the same shape and circuit specifications are arranged in a lump. It is. The substrate 1 is separated into individual substrates 100 after the resin-coated chip 1b and the bare chip 1c are mounted and subjected to a predetermined function test. Each of the separated individual substrates 100 is used as a circuit module component having a predetermined function.

In the substrate manufacturing method shown in FIG. 1, first, a solder printing step (printing a cream solder 3 as a conductive printing substance (printing agent) on the substrate 1 before mounting the resin-coated chip 1b or the bare chip 1c ( P1) is executed. After this solder printing step, the same mounting component (1) mounts the resin-coated chip 1b at a predetermined position on the substrate 1 (P2) and the bare chip 1c at a predetermined location on the substrate 1. And a second mounting step (P3) to be mounted on. Note that the order of the first mounting step and the second mounting step may be reversed.
Next, a reflow process (P4) is performed after the mounting process of the resin exterior chip 1b and the bare chip 1c. Thus, after performing two mounting processes (P2, P3), the reflow process is performed, whereby the number of heating times for the electronic components on the substrate 1 can be reduced.
Next, after the reflow step, an underfill processing step (P5) is performed in which a gap between the substrate 1 and the bare chip 1c is filled with a resin 55 as a filler that fills the gap.
As described above, the exterior chip 1b not subjected to the underfill process and the bare chip 1c subjected to the underfill process can be mixedly mounted on the same substrate 1.

  As mentioned above, according to the board | substrate manufacturing method of this embodiment, since the frequency | count of a heating with respect to the electronic component mounted on the board | substrate 1 can be reduced, the frequency | count of the heat shock given to these electronic components can be reduced. Moreover, since the reflow process of the resin exterior component 1b and the reflow process of the bare chip 1c, which were conventionally performed individually, are simultaneously performed, the number of processing steps can be reduced and workability can be improved.

  A substrate manufacturing system capable of realizing the above-described substrate manufacturing method includes, for example, a printing apparatus that prints cream solder 3 on a predetermined electrode of the substrate 1, and component mounting that positions and mounts the component at a predetermined position on the substrate 1 A mounting device as a device, a reflow device that heats the substrate 1 on which the bare chip 1c and the resin-coated chip 1b are mounted, and an underfill device that fills the gap between the bare chip 1c and the substrate 1 with the resin 55 are configured. be able to.

  Next, a printing method (solder printing step) for printing cream solder as a printing substance (printing agent) on a predetermined electrode of the substrate 1 as a printing object among the steps of the substrate manufacturing method, and a printing apparatus used therefor Will be described.

  FIG. 3 is a schematic configuration diagram illustrating an example of a printing apparatus that can be used in the printing method (solder printing process) according to the embodiment of the present invention. This printing apparatus prints cream solder 3 as a conductive printing substance (printing agent) on a substrate 1 by using a printing mask 2 which is a stencil mask made of a sheet-like plastic material. The printing mask 2 includes a plurality of openings 201 penetrating in the thickness direction formed according to a predetermined printing pattern, and using a capsule on a rectangular mask mounting frame 20 as a mask mounting member with a predetermined tension. It is directly pasted without. The printing mask 2 attached to the mask attachment frame 20 is supported by a support means so as to be able to swing around the rotating shaft. For example, as shown in FIG. 3, the support means is configured using a set of mask frame holding members 41 and 42 to which the mask mounting frame 20 of the printing mask 2 is mounted.

  The swing frame side mask frame holding member 41 includes a plate-like fixing member 410 that is screwed so as to hold one of the two opposite sides of the mask mounting frame 20, and a not-shown apparatus body side bearing portion. The rotary shaft 411 is rotatably attached to the rotary shaft 411. The axis center of the rotating shaft 411 serves as a fulcrum for the oscillation of the printing mask 2.

  On the other hand, the mask frame holding member 42 on the swinging tip side is a plate-like fixing member 420 that is screwed so as to hold the other of the two opposite sides of the mask mounting frame 20 as a driving means. And a driven portion 421 that receives a driving force from the mask driving unit 6 (see FIG. 4). An elongated hole 422 extending in the surface direction of the printing mask 2 is formed in the driven portion 421, and a cylindrical protrusion 601 provided at the distal end of the drive transmission movable member 600 of the mask driving unit 6 in the elongated hole 422. Is inserted so as to be movable along the longitudinal direction of the long hole 422. When the mask frame holding member 42 on the swing front end side is lifted by the drive transmission movable member 600 of the mask drive unit 6, the projection 601 of the drive transmission movable member 600 extends from the inner end in the longitudinal direction of the elongated hole 422 to the outer end. Move towards the department.

  The mask drive unit 6 includes, for example, a cylinder drive mechanism in which a piston connected to an end portion of a drive transmission movable member 600 coupled to the mask frame holding member 42 on the swing front end side is displaced by a change in internal pressure inside the cylinder tube. Can be configured. The mask drive unit 6 may be configured to move the drive transmission movable member 600 with a solenoid.

  The substrate 1 is held on the stage 5 so that the electrode forming surface (printed surface) on which the electrodes are formed is the upper surface. On the lower surface of the stage 5, there is provided a substrate drive unit 7 as drive means for moving the stage 5 linearly along the vertical direction perpendicular to the electrode formation surface (printed surface) of the substrate 1. The substrate driving unit 7 is configured by using a stepping motor 700 that can rotate forward and backward, and a stage vertical movement mechanism 701 that includes a ball screw and a nut (not shown) that is rotationally driven by the motor 700. By controlling the rotation of the stepping motor 700, the stage 5 is driven in the vertical direction, and the substrate 1 is raised to a predetermined printing position in contact with the printing mask 2 or lowered so as to be separated from the printing mask 2. Can be.

  Further, a filling means for filling the cream solder 3 into the opening 201 of the printing mask 2 is provided above the stage 5 moved to the printing position. This filling means includes a squeegee 8 as a filling member for imprinting the cream solder 3 into the opening 201 of the printing mask 2, a squeegee drive unit (not shown) for driving the squeegee 8 in the left-right direction in the figure by a drive belt or the like. It is comprised by.

  The mask drive unit 6, the substrate drive unit 7, and the squeegee drive unit are controlled by a main control unit 100 serving as a control unit configured by a computer device such as a CPU, a RAM, and a ROM. The main control unit 100 reads a program and various control data from the storage device 102 constituted by a hard disk or the like based on a processing instruction input by the operator from the input device 101, and executes the read program to execute a predetermined program. The mask driving unit 6, the substrate driving unit 7, the squeegee driving unit and the like are controlled so as to perform the printing process.

  As the cream solder printed on the substrate 1, a solder containing a predetermined solder or an additive is used according to the type of the substrate 1 to be printed and the electronic component to be soldered. For example, the cream solder used when printing using the fine pattern printing mask 2 is preferably, for example, a solder having an average particle size of 10 μm or less and a flux component content of about 11% by mass.

  FIG. 5 is an enlarged partial sectional view showing an example of the print mask 2 used in the printing apparatus. The printing mask 2 is provided with a plurality of openings 201 corresponding to electrodes on which various electronic components are mounted. The opening 201 is a through-hole penetrating in the thickness direction of the print mask, and the shape and size in the print surface direction are set according to the size and shape of the electrode to be printed. For example, when printing a micro print pattern, the size and shape of the opening 201 is a quadrangle having a side of about 100 to 200 μm or a circle having a diameter of the same size.

  The plurality of openings 201 of the printing mask 2 have a tapered inner wall 201a that gradually expands in the direction in which cream solder as a printing substance is removed. After filling the solder (cream taper opening) 201 having a tapered inner wall 201a of the printing mask 2 with cream solder and then swinging the printing mask 2 away from the substrate 1, Since the contact resistance between the inner wall surface of each tapered opening 201 and the cream judgment is lower than in the case of a cylindrical opening having no taper (hereinafter referred to as “straight opening”), Cream solder hardly remains in the taper opening 201.

As shown in FIGS. 6A and 6B, in the case of the tapered opening 201, when the printing mask 2 is swung away from the substrate 1, the inner wall of the tapered opening 201 is the substrate. A printed pattern made of cream solder of a predetermined shape can be reliably formed without scraping off part of the upper edge or side wall of the cream solder 3 printed on the substrate 1.
On the other hand, as shown in FIGS. 7A and 7B, in the case of the straight opening 210, when the printing mask 2 is swung away from the substrate 1, the inner wall of the straight opening 210 is obtained. And a part of the cream solder 3 printed on the substrate 1 are overlapped, and the upper edge portion 301 and the side wall portion 302 of the cream solder 3 are scraped off by the inner wall of the straight opening 210. Therefore, it is impossible to form a print pattern made of cream solder having a predetermined shape.

  As shown in FIG. 5, the taper angle θt of each of the plurality of openings 201 formed in the printing mask 201 is set on the rotating shaft 411 that has a fulcrum of oscillation of the printing mask 2 driven by the mask driving unit. It is preferable to enlarge the closer opening.

  Here, the taper angle θt of each opening 201 is the taper angle θt of the inner wall surface in a cross section cut along a virtual plane including the movement locus along which the center of the opening 201 moves. It is set according to the distance La to 411, that is, the radius of curvature of the moving locus of the opening 201 around the rotation axis 411. More specifically, for example, among a plurality of openings 201 formed in an opening formation area (print pattern area) of the print mask 2, for example, an opening far from the swinging rotation shaft 411, that is, the distance La (curvature). For the opening 201 having a long radius, the taper angle θt is set to 11 °. The taper angle θt is set to 13 ° for the opening 201 formed at the center of the opening forming area (print pattern area), that is, the opening 201 having the medium distance La (curvature radius). The taper angle θt is set to 16 ° for the opening 201 close to the rotating shaft 411 of the swing, that is, the opening 201 having the short distance La (curvature radius). When the taper angle θt of each opening 201 is set in this way, the distance La (shortest radius of curvature) between the opening 201 closest to the rocking rotation shaft 411 and the rotation shaft 411 is in the range of 200 to 300 mm. More specifically, it is set to 265 mm, for example.

  Further, the taper angle θt of each opening 201 is set for each of a plurality of areas (sections) set in advance by dividing the opening forming area (print pattern area) according to the distance from the rotation axis 411. May be. For example, as shown in FIG. 8, the opening forming region (print pattern region) 202 is divided into a first region 202 a far from the rotation shaft 411 and a central second region 202 b according to the distance from the rotation shaft 411. And the third region 202 c close to the rotation shaft 411. The opening 201 in the first region 202a is formed with a relatively small taper angle θt (for example, 11 °), and the opening 201 in the second region 202b has a medium taper angle θt (for example, 13 °). The opening 201 in the third region 202c is formed with a larger taper angle θt (for example, 16 °).

  As described above, the opening 201 close to the rotation axis, in which the movement trajectory of the inner wall of the opening 201 and the cream solder 3 in the opening 201 easily interfere when separated by the swing of the printing mask 3, By increasing the taper angle θt of the inner wall of the opening 201, the contact resistance between the surface of the inner wall of the opening 201 and the cream solder at the time of separation due to the swinging of the printing mask 3 is reduced, and the cream solder is partially missing. And prevent missing prints. For the opening 201 far from the rotation shaft 411, the inner locus of the opening 201 is less likely to interfere with the movement trajectory of the inner wall of the opening 201 and the cream solder 3 in the opening 201. By reducing the size, it is possible to avoid contact between individual printed patterns made of cream solder that are adjacent to each other independently, to increase the density of the printed pattern, and to reduce the amount of cream solder used for printing Can do.

  The taper angle θt of each opening 201 is determined by the movement trajectory of the inner wall surface of the opening 201 and the cream solder filled in the opening 201 when the printing mask 2 is swung away from the substrate 1. It is preferable to set so as not to interfere with 30. In this case, it is possible to prevent the cream solder 3 on the printed surface of the substrate 1 from being scraped off by the inner wall of the opening 201 when the printing mask 2 is separated, and to prevent part of the cream solder from being chipped. it can.

  Here, when the taper angles θt of the plurality of openings 201 formed in the printing mask 2 are equal to each other, the taper of the nearest opening of the plurality of openings 201 closest to the rotating shaft 411 is the same. The angle θt may be set to such an extent that the movement locus of the inner wall of the closest opening at the time of separation is not interfered with the printing material filled in the opening.

  Further, for example, when the taper angle θt of each opening 201 is set for each of a plurality of regions (partitions) 202a to 202c as shown in FIG. 8, each of the regions 201 has a plurality of openings 201 in the region. Of these, the taper angle θt of the closest opening to the rotation shaft 411 is set so that the movement trajectory of the inner wall of the closest opening at the time of the separation and the printing material filled in the opening do not interfere with each other. You only have to set it.

  In addition, when the taper angle θt of each opening 201 of the printing mask 2 cannot be freely changed and set and is set to a predetermined angle for some other reason, the rotation of the plurality of openings 201 is performed as described above. The distance (shortest curvature radius) La (see FIG. 5) between the closest opening to the shaft 411 and the rotation shaft 411 is filled in the movement locus of the inner wall of the closest opening and the opening at the time of the separation. It may be set so as not to interfere with the printed material.

  In addition, factors that affect the amount of deflection of the print mask 2 when the print mask 2 and the substrate 1 are separated include (1) total print area, (2) tension of the print mask 2, and (3) flux of the cream solder 3 The content and (4) printing conditions (for example, squeegee printing pressure, attack angle, speed, etc.) can be considered. Considering these factors, it is preferable to switch the speed (rotational angular speed) of the printing mask 2 at the time of separation, that is, the plate separation speed.

  For example, when the total printing area S1 is large as shown in FIG. 9A, the adhesive force between the cream solder 3 and the substrate 1 that is the printing object becomes strong as shown in FIG. Since the pulling force F1 that is pulled toward the substrate 1 increases, the deflection amount δ1 of the printing mask 2 increases. On the other hand, when the total printing area S2 is small as shown in FIG. 10A, the adhesive force between the cream solder 3 and the substrate 1 as the printing object is weakened as shown in FIG. Since the pulling force F2 that pulls 2 toward the substrate 1 is weakened, the deflection amount δ2 of the printing mask 2 is reduced. Thus, as the total printing area increases, the adhesive force between the cream solder 3 and the substrate 1 that is the printing object increases, and the printing mask 2 is pulled to the substrate 1 side with a strong pulling force, and is bent when the plate is separated. The amount increases. (See FIG. 11).

  Examples of the parameters related to the total print area include the total number and density of the openings 201 of the print mask 2. As the total number or density of the openings 201 of the printing mask 2 increases, the adhesion between the cream solder 3 and the inner wall of the opening 201 increases, and the printing mask 2 is easily bent when the printing mask 2 and the substrate 1 are separated from each other. Become. Therefore, as shown in FIGS. 12A and 12B, according to the total number or density of the openings 201 of the printing mask 2, the larger the total number or density, the faster the speed of the printing mask 2 at the time of separation (rotational angular velocity). ) May be set smaller. In this case, when the total print area is large, that is, when the total number or density of the openings 201 of the print mask 2 is large, occurrence of bending of the print mask 2 is suppressed, and the print total area, that is, the openings 201 of the print mask 2 is suppressed. Regardless of the total number or density, it is possible to suppress the occurrence of an excessive separation speed and a bounce phenomenon caused by the deflection of the printing mask 2, and to prevent printing variations.

  For example, an opening information acquisition unit that acquires information on the total number or density of the openings 201 of the print mask 2 is provided, and based on the acquired information, the speed of the print mask 2 at the time of separation increases as the total number or density increases. The main control unit 100 may perform control so as to reduce the (rotational angular velocity). The opening information acquisition means can be constituted by, for example, a processing data processing device (computer device) connected to a controller 900 described later used for manufacturing a print mask. And the information of the total number or the density of the said opening part 201 can be acquired by calculating from the numerical control (NC: Numerical Control) data for printing mask manufacture in the said process data processing apparatus (computer apparatus), for example. .

  Further, a detection device (opening detection means) that detects the total number or density of the openings 201 of the printing mask 2 is provided, and based on the detection result of the detection device, the larger the total number or density detection result, the greater the separation time. The main control unit 100 may control the print mask 2 so as to reduce the speed (rotational angular speed). In this case, the operator does not need to check the total number or density of the openings of the printing mask 2 in advance.

  The detection device (opening detection means) that detects the total number or density of the openings 201 of the printing mask 2 detects light using transmission or reflection as shown in FIGS. 13A and 13B, for example. Can be configured. In the detection apparatus of FIG. 13A, light emitted from a light source 801 such as a halogen lamp or a light emitting diode (LED) passes through an opening 201 in a predetermined area of the printing mask 2, and this opening 201 The transmitted light that has passed through is received by a light receiving device 802 such as a CCD (Charge-Coupled Devices). Since the amount of the received transmitted light changes according to the total number or density of the openings 201, the light receiving device 802 can output a signal according to the total number or density of the openings 201. 13B, the line sensor camera 804 scans the area irradiated with light by the light source 803 while irradiating the area where the opening 201 of the print mask 2 is formed. By doing so, it is possible to measure the light reflection image of the opening forming region. Since the density, light amount, contrast, and the like of the light reflection image reflected by the opening 201 change according to the total number or density of the openings 201, predetermined data processing is performed based on the output data of the line sensor camera 804. The data indicating the total number or density can be acquired.

  Further, as the tension of the printing mask 2 attached to the mask mounting frame 20 becomes smaller, the adhesion between the cream solder 3 and the opening 201 becomes larger, and the printing mask 2 is separated when the printing mask 2 and the substrate 1 are separated from each other. It becomes easy to bend. Therefore, according to the tension of the printing mask 2 attached to the mask attachment frame 20 as shown in FIG. 14, the smaller the tension is, the smaller the speed (rotational angular velocity) of the printing mask 2 at the time of separation is. It may be set in advance. In this case, the occurrence of bending of the printing mask 2 when the tension of the printing mask 2 is small is suppressed, and an excessive separation speed and a bounce phenomenon due to the bending of the printing mask 2 are prevented regardless of the tension of the printing mask 2. Suppressing and preventing variation in printing.

  For example, a detection device (tension detection means) comprising, for example, a tension gauge for detecting the tension of the print mask 2 is provided, and based on the detection result of the detection device, the smaller the detection result of the tension, the print mask 2 at the time of separation. The main control unit 100 may perform control so as to reduce the speed (rotational angular speed). In this case, it is not necessary for the operator to check the tension of the print mask in advance.

  Further, as shown in FIG. 15A, when the content a (%) of the flux 3a of the cream solder 3 is large, a region (radius R1) in which the flux 3a in the cream solder 3 blurs around the opening 201 is wide. Become. Therefore, as shown in FIG. 15 (b), the adhesive force between the cream solder 3 and the substrate 1 that is the printing object is increased, and the tensile force F1 that pulls the print mask 2 toward the substrate 1 is increased. 2 is increased. On the other hand, as shown in FIG. 16A, when the content b (%) of the flux 3a of the cream solder 3 is small, there is a region (radius R2) in which the flux 3a in the cream solder 3 bleeds around the opening 201. Narrow. Therefore, as shown in FIG. 16B, the adhesive force between the cream solder 3 and the substrate 1 that is the printing object is weakened, and the tensile force F2 that pulls the print mask 2 toward the substrate 1 is weakened. 2 deflection amount δ2 becomes small. Thus, when the flux content of the cream solder 3 is increased, the flux 3a in the cream solder 3 is likely to bleed around the opening 201, and the flux 3a carved around the opening 201 is applied to the printing mask 2 and the printing target. It acts so as to increase the adhesive force with the substrate 1 which is a thing, and the print mask 2 is easily bent when the print mask 2 and the substrate 1 are separated (see FIG. 17).

  Accordingly, as shown in FIG. 18, in accordance with the flux content of the cream solder 3, the speed (rotational angular velocity) of the printing mask 2 at the time of separation is reduced in advance as the flux content of the cream solder 3 increases. It may be set. In this case, the occurrence of bending of the printing mask 2 when the cream solder 3 has a high flux content is suppressed, and the excessive separation speed and bounce caused by the bending of the printing mask 2 regardless of the flux content of the cream solder 3. Occurrence of the phenomenon can be suppressed and variations in printing can be prevented.

  Further, the printing condition of the cream solder 3 also affects the deflection of the printing mask 2. For example, when the printing pressure that is the pressing force of the squeegee used for printing the cream solder 3 increases, the cream solder 3 transferred to the substrate 1 that is the printing object tends to increase, and the flex in the cream solder 3 also increases. It becomes easy to ooze out and goes around the periphery of the opening 201 on the back side of the printing mask 2 (the side facing the substrate). When the amount of the flux around the back increases, the adhesive force of the cream solder 3 to the substrate 1 increases, and the printing mask 2 is easily bent when the printing mask 2 and the substrate 1 are separated. That is, as shown in FIG. 19, as the printing pressure increases, the printing mask 2 is more easily bent when the printing mask 2 and the substrate 1 are separated from each other.

  Therefore, as shown in FIG. 20, according to the printing pressure of the printing conditions, the speed (rotational angular velocity) of the printing mask 2 at the time of separation may be set in advance as the printing pressure increases. In this case, the occurrence of bending of the printing mask 2 when the printing pressure is high is suppressed, and the excessive separation speed and the bounce phenomenon caused by the bending of the printing mask 2 are suppressed regardless of the printing pressure. Can be prevented.

  Further, the longer the distance from the outer edge of the opening forming region where the plurality of openings 201 are formed in the printing mask 2 to the mask mounting frame 20 to which the printing mask 2 is attached, the longer the cream solder 3 and the inside of the opening 201 become. The adhesion with the wall is increased, and the printing mask 2 is easily bent when the printing mask 2 and the substrate 1 are separated from each other. Therefore, in accordance with the total number or density of the openings 201 of the print mask 2, the distance from the outer edge of the opening formation area of the print mask 2 to the mask mounting frame 20 is shortened as the total number or density of the openings 201 increases. It may be set. In this case, the occurrence of bending of the printing mask 2 can be suppressed, and the occurrence of an excessive separation speed due to the bending of the printing mask 2 can be prevented.

  Further, the size inside the mask mounting frame 20 (hereinafter referred to as “inner frame size”) facing the opening forming area where the plurality of openings 201 are formed in the printing mask 2 causes trouble in the printing process. It is preferable to set as small as possible and as small as possible within the range. When the inner frame size (span) of the mask mounting frame 20 is reduced, the deflection amount δ of the print mask 2 due to the adhesive force of the cream solder 3 when the print mask 2 and the substrate 1 are separated from each other is reduced as shown below (FIG. 21).

In FIG. 21, the deflection amount δ of the printing mask 2 is expressed by the following equation (1) (refer to the mechanical design manual).
δ = W · L ³ / (192 · E · I) (1)
W: Load E: Young's modulus of printing mask I: Second moment of inertia of printing mask L: Span between inner frames of printing mask (inner frame size)

Further, the sectional secondary moment I of the printing mask 2 is expressed by the following equation (2).
^{I = bh 3/12 ··· (} 2)
b: Length of printing mask (corresponding to span L)
h: Print mask thickness

From the above formulas (1) and (2), the deflection amount δ of the printing mask 2 is expressed by the following formula (3).
δ = W · L ² / (16 · E · h ³ ) (3)

Here, if only the span L between the inner frames of the print mask 2, that is, the “inner frame size” is different and the other parameters W, E, and h are the same, for example, the frame size of the print mask 2 is 650 mm and The ratio of the deflection amounts δ ₆₅₀ and δ ₃₈₀ in the case of 380 mm is expressed by the following equation (4), and the deflection amount δ is reduced to about ３ when the frame size of the printing mask 2 is changed from 650 mm to 380 mm. I understand. For example, the mask attachment frame 20 with a frame size of 650 mm and the amount of deflection is about 5 mm, but the mask attachment frame 20 with a frame size of 380 mm has a deflection amount of about 1.7 mm.
^{_{δ 380 / δ 650 = 380 2}} /650 2 = 0.342 ··· (4)

  When the inner frame size of the mask mounting frame 20 is thus reduced, the amount of deflection δ of the printing mask 2 due to the adhesive force of the cream solder 3 when the printing mask 2 and the substrate 1 are separated (when the plate is separated) is reduced. It is possible to suppress the occurrence of excessive separation speed and bounce phenomenon due to the bending of the printing mask 2 at the time of separation of the printing plate, thereby preventing printing variations.

  In some cases, the size of the outer side of the mask mounting frame 20 (hereinafter referred to as “outer frame size”) is fixed to a predetermined size due to restrictions on the mounting portion of the mask mounting frame 20 of the printing mask 2 in the printing apparatus. is there. In this case, the outer frame size of the mask mounting frame 20 is unified to the predetermined size, and the printing area, squeezing stroke, squeezing size, etc. are taken into consideration as illustrated in FIGS. 22 (a) and 22 (b). However, a crosspiece 20a is provided in the mask mounting frame 20 so that the inner frame size is as small as possible.

  Further, as shown in FIG. 23, the axis center Ca of the rotation shaft serving as the fulcrum of the printing mask 2 deviates from the virtual mask reference plane Sm passing through the lower surface of the printing mask 2 facing the substrate 1. May be present. In this case, when the printing mask 2 is swung around the rotation axis, the inner wall surface of each tapered opening 201 of the printing mask 2 and the cream solder 3 filled in the tapered opening 201 are likely to interfere with each other. Therefore, the axial center Ca is preferably configured to be positioned on the virtual mask reference plane Sm. If the offset is present, it is preferable to set the taper angle θt of each tapered opening 201 and the distance La between each tapered opening 201 and the rotation shaft 411 in consideration of the offset.

For example, as shown in FIG. 23, when the axial center Ca of the rotation shaft serving as the fulcrum of the printing mask 2 is offset downward from the virtual mask reference plane Sm, four points at the four corners of the tapered opening 201 are provided. The curvature radii R of the movement trajectories of a1, a2, a3, and a4 are expressed by the following equations (5) to (8) when expressed in a coordinate system with the axis center Ca of the rotation axis as the origin (0, 0). Become.
a1 point: R ² = (D1 + B) ² + A ² (5)
a2 point: R ² = ((D1 + D2) / 2 + B) ² + (A + T) ² (6)
a3 point: R ² = B ² + A ² (7)
a4 point: R ² = ((D1−D2) / 2 + B) ² + (A + T) ² (8)

Further, when the axial center Ca of the rotation shaft serving as the fulcrum of the printing mask 2 is offset upward from the virtual mask reference plane Sm, four points a1, a2, a3, a4 at the four corners of the tapered opening 201 are provided. The curvature radii R of the movement trajectories are expressed by the following equations (5) ′ to (8) ′ when expressed in a coordinate system with the axis center Ca of the rotation axis as the origin (0, 0).
a1 point: R ² = (D1 + B) ² + (A + T) ² (5) ′
a2 point: R ² = ((D1 + D2) / 2 + B) ² + A ² (6) ′
a3 point: R ² = B ² + (A + T) ² (7) ′
a4 point: R ² = ((D1-D2) / 2 + B) ² + A ² (8) ′

Here, when the printing mask 2 is swung upward with the axial center Ca of the rotating shaft as a fulcrum, the inner wall surface of each tapered opening 201 of the printing mask 2 interferes with the cream solder 3 filled in the tapered opening 201. The following conditions (9) and (10) indicate that the radius of curvature of the movement locus of the four points a1, a2, a3, a4 at the four corners of the tapered opening 201 is R1, R2, R3, R4, respectively. expressed.
R1> R2 (9)
R4> R3 (10)

  When the axial center Ca of the rotating shaft is offset downward from the virtual mask reference plane Sm (FIG. 23), it is difficult to satisfy the conditional expression (9) and the taper opening 201 is far from the axial center Ca. The side wall surface of the sphere easily interferes with the cream solder 3. On the other hand, when the axial center Ca of the rotating shaft is offset upward from the virtual mask reference surface Sm, the conditional expression (10) is difficult to be satisfied, and the side wall surface on the side close to the axial center Ca in the tapered opening 201 is formed. It becomes easy to interfere with the cream solder 3.

For example, A = 0 mm, D1 = 180 μm, D2 = 150 μm, and B = 200 mm are (5) as numerical examples when there is no offset from the virtual mask reference surface Sm and the taper angle θt of the taper opening 201 is relatively large. ) To (8), the curvature radii R1, R2, R3, and R4 of the movement trajectories of the points a1, a2, a3, and a4 are as follows. These values satisfy the above conditional expressions (9) and (10), and it can be seen that the side wall surface of each tapered opening 201 of the printing mask 2 and the cream solder 3 filled in the tapered opening 201 do not interfere with each other.
R1 = 20.180mm
R2 = 200.165mm
R3 = 200.000mm
R4 = 200.015mm

As numerical examples when the axis center Ca of the rotation axis is offset downward from the virtual mask reference plane Sm and the taper angle θt of the taper opening 201 is relatively small, A = 10 mm, D1 = 180 μm, D2 = 178 μm, B = 200 mm is substituted into the above equations (5) to (8), the curvature radii R1, R2, R3, and R4 of the movement trajectories of the points a1, a2, a3, and a4 are as follows. In this case, since the conditional expression (9) is not satisfied, the side wall surface far from the center Ca of the tapered opening 201 of the printing mask 2 interferes with the cream solder 3 filled in the tapered opening 201.
R1 = 200.430mm
R2 = 200.431mm
R3 = 200.250mm
R4 = 200.253mm

  In order to reliably prevent interference between the side wall surface of the taper opening 201 of the printing mask 2 and the cream solder 3 when the taper angle θt of the taper opening 201 and the offset are set in advance, the opening The horizontal position of the print mask 2 may be adjusted so that the distance La between 201 and the rotating shaft 411 (corresponding to the distance B + D1 / 2 in FIG. 23) is increased.

  FIGS. 24A and 24B are explanatory diagrams illustrating an example of a drive mechanism (mask drive unit) of the print mask 2 that can be driven so as to adjust the position of the print mask 2 with respect to the rotation shaft 411. In this drive mechanism, the end of the mask mounting frame 20 of the printing mask 2 on the rotating shaft 411 side is held so as to be sandwiched between the base member 412 of the mask frame holding member 41 and the flat mask clamper 413. One end of the mask frame holding member 41 in the longitudinal direction is attached to a linear motion (LM) guide member 414, and the other end is attached to a movable part of a ball screw 416 that is rotationally driven by a motor 415. Has been. By rotating the motor 415, the print mask 2 can be linearly moved in the direction of arrow D in the figure, and the position of the print mask 2 can be adjusted.

  Further, as shown in FIGS. 25 to 29, a mask height adjusting mechanism (mask height adjusting means) for adjusting the height of the printing mask 2 so as to make the offset zero may be provided.

  In the mask height adjusting mechanism of FIG. 25, a set of parallel links 422 are provided between the lower support member 420 a of the mask frame holding member 420 that holds the mask mounting frame of the printing mask 2 and the base member 421. When the connecting member 423 is moved in the front-rear direction (arrow E1 direction) by the motor 424, the parallel link 422 swings, and the mask frame holding member 420 moves in the front-rear direction indicated by arrow E1 and in the vertical direction (arrow E2 direction). Therefore, the height of the printing mask 2 can be adjusted.

  In the mask height adjusting mechanism of FIG. 26, both end portions 430a and 430b of the mask frame holding member 430 that holds the mask mounting frame of the printing mask 2 are respectively supported by side support members via a sliding mechanism 431 such as a cross roller guide. 432, 433. On the lower surface of the mask frame holding member 430, an upper end of a movable portion of a vertical movement mechanism 435 that is moved up and down by a motor 434 is attached. When the movable portion of the vertical movement mechanism 435 is moved in the vertical direction (arrow F direction) by the motor 434, the mask frame holding member 430 moves in the vertical direction (arrow G direction), so that the height of the printing mask 2 can be adjusted. .

  In the mask height adjusting mechanism of FIG. 27, the lower surface of the mask frame holding member 440 that holds the mask mounting frame of the printing mask 2 is supported by the support mechanism 441 so as to be vertically movable and biased downward. A cam follower 442 is attached to the end of the frame holding member 440. The cam follower 442 is in contact with a slope of a drive member 444 that is driven in the front-rear direction by a motor 443. When the driving member 422 is moved in the front-rear direction (arrow H direction) by the motor 443, the mask frame holding member 440 is moved in the vertical direction (arrow I direction) via the cam follower 442 in contact with the slope of the driving member 422. Since it moves, the height of the printing mask 2 can be adjusted.

  In the mask height adjusting mechanism shown in FIG. 28, the upper end portions of the vertical guide moving mechanisms 452 provided on the base member 451 are mounted on the lower surfaces of both end portions of the mask frame holding member 450 that holds the mask mounting frame of the printing mask 2. Has been. Further, an upper end portion of a ball screw 454 that is rotationally driven by a motor 453 is attached to the lower surface of the central portion of the mask frame holding member 450. When the ball screw 454 is rotationally driven by the motor 453, the upper end portion of the ball screw 454 moves in the vertical direction (arrow J direction) with respect to the base member 451, and the mask frame holding member 430 is also in the vertical direction (arrow K direction). Therefore, the height of the printing mask 2 can be adjusted.

  29, the vertical movement guide mechanism 462 with the brake 462a provided on the base member 461 is provided on each of the lower surfaces of both ends of the mask frame holding member 460 that holds the mask mounting frame of the printing mask 2. The upper end is attached. For example, a cross roller can be used as the vertical movement guide mechanism 462. In addition, an eccentric cam 453 that is rotationally driven by a motor (not shown) is provided between the lower surface of the central portion of the mask frame holding member 460 and the upper surface of the base member 461. When the cam 463 is rotationally driven by the motor as indicated by an arrow L in the figure, the mask frame holding member 460 moves in the vertical direction (arrow M direction) with respect to the base member 461, so that the height of the printing mask 2 is increased. Can be adjusted.

For example, the printing process using the printing apparatus having the above-described configuration is performed as follows. First, after the printing mask 2 is fixed to the mask frame holding members 41 and 42, the motor 6 is rotationally driven to raise the stage 5 holding the substrate 1 and to contact the printing mask 2. Then, the cream solder 3 is set on the upper surface of the printing mask 2 and the squeegee 8 is moved in the direction of arrow A in FIG. 3 to fill and print the cream solder 3 in the opening 201 of the printing mask 2.
Next, in a state where the printing mask 2 filled with the cream solder 3 and the substrate 1 are kept in contact with each other, timing of a waiting time set in advance based on the printing conditions is started. The printing mask 2 supported by the mask frame holding members 41 and 42 is used with the axis center of the rotation shaft 411 as a fulcrum in a state where the predetermined waiting time has elapsed and the tacking force (adhesive strength) of the cream solder 3 has increased. Rock. As a result, as shown in the direction of arrow B in FIG. 3, the print mask 2 gradually moves away from the substrate 1 while being gradually inclined with respect to the electrode formation surface (printed surface) of the substrate 1. By swinging the printing mask 2, the printing mask 2 and the substrate 1 are gradually separated from the end side opposite to the rotation axis 4 c of the printing mask 2 toward the end side on the rotation axis side. Therefore, unlike the conventional case where the print mask 2 is not tilted and separated without being inclined, the print mask 2 is largely bent and the central portion thereof is not separated from the substrate 1 with excessive acceleration.

Further, the printing mask separation operation in the printing process using the printing apparatus having the above-described configuration may be performed in two stages as follows, for example. First, as a first separation operation, the printing mask 2 is swung to such an extent that the cream solder 3 is completely removed from the plurality of openings 9 formed in the printing mask 2, and the cream solder 3 is placed in each opening 9. It can be prevented from remaining.
Next, after the cream solder 3 is completely removed from the openings 201 of the printing mask 2, the motor 6 is rotationally driven to lower the stage 5 in the direction of arrow C in FIG. Then, the print mask 2 is linearly moved downward in a direction in which the print mask 2 and the substrate 1 are separated from each other along a direction perpendicular to the printing surface of the substrate 1. As a result, the separation operation between the printing mask 2 and the substrate 1 can be quickly completed, and the tact time of the printing process can be shortened.

  As described above, according to the printing method and printing apparatus using the printing mask 2 in the present embodiment, when the printing mask 2 in which the opening 201 is filled with the cream solder 3 and the substrate 1 are separated from each other, the printing mask 2 is attached to the substrate. By swinging the printing mask 2 so as to be inclined with respect to 1, the printing mask 2 is gradually separated from the one end portion side of the printing mask 1 toward the other end portion side on the rotating shaft 411 side. Suppresses the occurrence of bending. Further, the separation speed of the print mask 2 is substantially the same from the one end side to the other end side of the print mask 2, and unlike the case where the print mask and the substrate are separated without being inclined, the print mask 2. Is not separated from the substrate 1 by excessive acceleration. In addition, since the plurality of openings 201 formed in the printing mask 2 have tapered inner walls that gradually expand in the direction in which the cream solder 3 is removed, each opening 201 at the time of separation due to the swinging. The contact resistance between the inner wall surface and the cream solder 3 is reduced, and the cream solder 3 hardly remains in each opening 201. As described above, even when a low-rigidity printing mask 2 that is likely to be bent is used, the occurrence of partial chipping or printing omission of cream solder on the printed pattern on the electrode forming surface (printed surface) of the substrate 1 is suppressed. Good print quality can be obtained over the entire electrode forming surface (printed surface).

  In the printing apparatus shown in FIG. 3, the printing mask 2 is swung by rotating the opposite side of the rotation shaft 411 with the printing mask 2 interposed therebetween, but the rotation is performed as shown in FIG. The print mask 2 may be swung by rotating the opposite side of the print mask 2 with the shaft 411 interposed therebetween. In the printing pressure apparatus of FIG. 30, a stage 5 including a backup jig on which the substrate 1 is set is attached to the central portion of the upper surface of the apparatus body table 650. A mask frame holding member 470 that supports the end of the mask mounting frame 20 of the print mask 2 is mounted on a rotation shaft 411 that is rotatably provided at the end of the upper surface of the apparatus main body table 650. Further, the tip of the drive transmission movable member 600 of the mask drive unit 6 is attached to the end of the mask frame holding member 470 on the opposite side of the print mask 2 with the rotation shaft 411 interposed therebetween. As in the embodiment of FIG. 3, the mask drive unit 6 has a piston connected to the end of the drive transmission movable member 600 connected to the mask frame holding member 42 on the swing tip side inside the cylinder tube. A cylinder drive mechanism that is displaced by a change in internal pressure, a solenoid, or the like can be used.

Next, a method for manufacturing the printing mask 2 will be described.
FIG. 31 is a schematic configuration diagram showing an example of a printing mask processing apparatus used for manufacturing the printing mask 2. This apparatus is a processing object driving means on which an excimer laser 910 as a light source, an irradiation optical system 920, a shutter mechanism 930, an aperture mask 940, an imaging optical system 950, and a printing mask material 960 as a processing object are placed. The mounting table 962, the XY stage 963, a controller 900 serving as control means, and the like. As a processing object, a plastic sheet for printing mask (hereinafter referred to as “plastic sheet”) 200 made of biaxially stretched PET (polyethylene terephthalate) or polyimide having a thickness of about 150 μm is used. On the surface of the plastic sheet 200 on the laser beam incident side (surface on the side in contact with the object to be printed at the time of printing), a conductive film made of the above polyurethane resin containing carbon as a film having a larger thermal shrinkage than PET. May be formed. When the conductive film is formed in this manner, when printing is performed using the printing mask 2 manufactured by the present method, the device on the printing object (substrate) due to static electricity at the time of squeezing or peeling of the printing mask is used. Breakage can be prevented.

  The excimer laser 910 generates a pulse laser beam L in the ultraviolet region (eg, wavelength = 248 nm) at a predetermined repetition frequency (eg, 200 Hz) based on a drive trigger signal output from the drive circuit 911 controlled by the controller 900. This is an outgoing KrF excimer laser.

The irradiation optical system 920 includes an optical attenuator 921, a beam shape adjusting optical system 922 as a cross-sectional shape adjusting unit that adjusts a cross-sectional shape of light irradiated to the aperture mask 940, an irradiation lens group 923, a reflection mirror 924, and the like. ing. The optical attenuator 921 is composed of a set of quartz glass plates having a multilayer film formed on the surface, and can change the energy density of the laser beam that passes through the tilt of the quartz glass plates. The optical attenuator 921 adjusts the energy density of the laser beam to an irradiation energy density suitable for processing the plastic sheet 200 as a printing mask material. For example, the irradiation energy density on the surface of the plastic sheet 200 is adjusted to about 0.7 J / cm ² (reduction rate M = 3) to 2.5 J / cm ² (reduction rate M = 8).

  The beam shape adjusting optical system 922 arranged on the downstream side of the laser beam optical path of the optical attenuator 921 is composed of a collimator optical element made of a cylindrical lens, a concave lens or the like having a half-moon shaped cross section. By this beam shape adjusting optical system 922, the cross-sectional shape of the laser beam is shaped into a substantially square shape having a side dimension of about 11 to 12 mm, for example.

  The irradiation lens group 923 collects the laser beam whose cross-sectional shape is substantially square by the beam shape adjusting optical system 922 on the aperture mask 940. The laser beam from the irradiation lens group 923 is reflected by the reflection mirror 924 toward the lower aperture mask 940.

  The shutter mechanism 930 covers a part of the opening pattern formed in the aperture mask 940, and is sandwiched from the outside in two directions (X direction and Y direction) perpendicular to the optical axis of the laser beam L and perpendicular to each other. The movable shutter 933 includes two movable shutter members and a drive system 933 including a drive motor as drive control means for controlling the movement of the shutter members. The drive system 933 is controlled by a controller 900 via a drive circuit 934 so that each shutter member can be moved independently.

  The laser beam that has passed through the opening of the shutter mechanism 930 is applied to an aperture mask 940 in which an opening having a predetermined shape is formed. The aperture mask 940 can be composed of a stainless steel plate excellent in heat resistance and abrasion resistance against laser beam irradiation, or a glass substrate formed with a dielectric multilayer film, and has a rigid frame 941. Removably attached to. The frame body 941 can be moved in the X and Y directions on a horizontal plane orthogonal to the optical axis of the laser beam, and can be rotated around the optical axis as an XY-θ table. 942 is disposed. The XY-θ table 942 is driven by a drive system 943 including a drive motor as an aperture mask drive unit. This drive is controlled by the controller 900 via the drive circuit 944.

  The imaging optical system 950 forms an image of light that has passed through the light passage pattern on one section of the aperture mask 940 on the plastic sheet 200 at a predetermined reduction ratio (for example, 1/5). The reflecting mirrors 951, 952, 953, 955, an imaging lens group 954 as an imaging optical element, and the like. Among the plurality of reflection mirrors, the reflection mirrors 952 and 953 are attached so as to be movable in the left-right direction in FIG. 30, the upstream optical path length L1 between the aperture mask 940 and the center of the imaging lens group 954, and the imaging Optical path length ratio variable means for changing the optical path length ratio L2 / L1 between the center of the lens group 954 and the downstream optical path length L2 between the printing mask material 60 is configured. Here, the downstream optical path length L2 is fixed, and when the reflecting mirrors 952 and 953 are simultaneously moved to the right in FIG. 30, for example, to increase the upstream optical path length L1, the optical path length ratio L2 / L1. Becomes smaller. Therefore, the reduction ratio which is a value obtained by dividing the length of one side of one processing pattern of the plastic sheet 200 by the length of one side of one section on the aperture mask 940 is large, and the M value which is the reciprocal of the reduction ratio. (Magnification) can be reduced.

  The plastic sheet 200 is mounted on the mask mounting frame 20 and mounted on a mounting table 962 having a substantially horizontal mounting surface. The mounting table 962 is disposed on an XY table 963 that can move the mounting surface in the X direction and the Y direction on a horizontal plane orthogonal to the paper surface of FIG. The XY table 963 is driven in the XY direction via a drive system 964 configured by a linear motor, an ultrasonic motor, a piezoelectric element, or the like. The drive system 964 is driven and controlled by a drive circuit 965 that supplies drive power to a drive motor of the drive system based on a drive command from the controller 900.

  FIG. 31A is an enlarged cross-sectional view of a processed portion of the plastic sheet 200 at the time of ablation processing by irradiation with the excimer laser light. The magnitude of the irradiation energy density affects the processing speed, but particularly has a great influence on the taper angle of the inner wall 201a of the opening 201 that has been dug. Regarding the relationship between the irradiation energy density and the taper angle θt, the taper angle θt is small when the irradiation energy density is large, and the taper angle θt is large when the irradiation energy density is small. When the irradiation energy density is gradually increased and reaches a certain limit or more, the taper angle θt decreases as shown in FIG. When the irradiation energy density is decreased as opposed to FIG. 31B, the taper angle θt increases as shown in FIG.

  In the present embodiment, the taper angle θt is 9 to 11 ° (M value = 8), 13 ° (M value = 5), and 14 ° by repeatedly irradiating ultraviolet laser light having a relatively small irradiation energy density a predetermined number of times. The large opening 201 is formed with (M value = 4), 16 ° (M value = 3), and 18 ° (M value = 2). The printing mask 1 manufactured by forming the opening 201 is turned upside down to be brought into close contact with a printing object such as the substrate 1, and printing is performed using the squeegee 8 or the like as described above.

  Table 1 shows the results of a plurality of types of processing examples in which the opening 201 having a taper is formed by changing the focal length setting of the imaging lens group 954 of the processing apparatus and repeatedly irradiating the ultraviolet laser light a predetermined number of times. ing. In this processing example, a plastic sheet made of polyimide having a thickness of 25 μm was used as the plastic sheet 200 to be processed. The taper angle θt (°) in Table 1 was measured at a linear taper portion excluding the “sag” portion on the laser beam incident side of the inner wall surface 201a of the opening 201 as shown in FIG. It is.

  In the printing mask manufacturing embodiment, as described above, the conductive coating 200 made of urethane containing carbon having a larger thermal shrinkage rate than PET as a plastic sheet is formed on the surface on the laser beam incident side. The plastic sheet 200 may be used, or a plastic sheet in which a film having a smaller thermal expansion coefficient than that of PET is formed on the surface on the laser beam incident side may be used. Further, a plastic sheet 200 in which a film having a thermal contraction rate smaller than that of PET or a thermal expansion rate larger than that of PET may be used on the back surface opposite to the laser beam incident side. For example, a plastic sheet 200 in which a metal film such as Ni, Ti, Al or the like is formed on the back surface by an IBAD (Ion Beam Assisted Deposition) method may be used.

  Further, in the above-described printing mask manufacturing embodiment, the plastic sheet 200 made of PET or polyimide is used, but a plastic sheet made of other materials such as polycarbonate, polysulfone, polyethersulfone, and polypropylene may be used.

In the above-described printing mask manufacturing embodiment, an ablation-processable ultraviolet laser beam (wavelength: 248 nm) emitted from a KrF excimer laser is used. However, the present invention is not limited to this, and other energy beams are used. It is also possible to apply it. For example, when an ultraviolet laser beam emitted from an excimer laser such as an ArF laser or an F ₂ laser is used, or when a wavelength component that can be ablated with respect to a workpiece in synchrotron radiation (SOR) is used. Can also be applied.

  Further, a processing method and a processing apparatus for forming the tapered opening 201 by irradiating a YAG laser other than the ultraviolet laser are used, or a processing method and a processing apparatus for forming the tapered opening 201 by electric discharge processing or press processing are used. May be. In the case of performing electric discharge machining, for example, a discharge electrode that is tapered so as to correspond to the shape of the tapered opening 201 is used. In the case of performing press working, a punch whose tip is tapered so as to correspond to the shape of the tapered opening 201 is used.

  In the above-described embodiment, the printing mask 2 is swung (rotated) with respect to the substrate 1. However, the substrate 1 may be swung (rotated) with respect to the printing mask 2. . Alternatively, the substrate 1 and the printing mask 2 may be tilted from a horizontal position and swung (rotated) so as to be gradually separated from each other.

  Moreover, although the said embodiment demonstrated the case where the printing target object was the board | substrate 1, this invention is applicable also when printing on the surface of electronic components, such as semiconductor wafers other than the board | substrate 1, as a printing target object.

Process drawing which shows an example of the whole board | substrate manufacturing method including the printing process which employ | adopted the printing method which concerns on embodiment of this invention. (A) And (b) is explanatory drawing and a top view which show an example of the cross-sectional structure of the electronic circuit board manufactured with the same board | substrate manufacturing method, respectively. 1 is a schematic configuration diagram illustrating an example of a printing apparatus that can be used in a printing method (solder printing process) according to an embodiment of the present invention. The fragmentary perspective view of the mask frame holding member of the rocking | fluctuation front end side in the printing apparatus. FIG. 3 is an enlarged partial cross-sectional view illustrating an example of a print mask used in the printing apparatus. (A) And (b) is a partial expanded sectional view before and during rocking of a printing mask, respectively. (A) And (b) is a partial expanded sectional view before and during rocking of a printing mask concerning a comparative example, respectively. The expanded partial sectional view which shows an example of the printing mask which concerns on other embodiment. (A) And (b) is explanatory drawing which shows the mode of bending of a printing mask when a printing total area is large. (A) And (b) is explanatory drawing which shows the mode of bending of a printing mask when printing total area is narrow. The graph which shows the relationship between the printing total area and the pulling force and bending of a printing mask. (A) And (b) is a graph which shows the relationship between the optimal value of the speed (rotation angular velocity) of a printing mask, and the total number and density of the opening part of a printing mask, respectively. (A) And (b) is explanatory drawing which shows schematic structure of the detection apparatus which detects the total number or density of the opening part of a printing mask, respectively. The graph which shows the relationship between the optimal value of the speed (rotational angular velocity) of a printing mask, and the tension of a printing mask. (A) And (b) is explanatory drawing which shows the mode of bending of a printing mask when there is much flux content of cream solder. (A) And (b) is explanatory drawing which shows the mode of bending of a printing mask when the flux content of cream solder is small. The graph which shows the relationship between the flux content of cream solder, the pulling force of a printing mask, and bending. The graph which shows the relationship between the optimal value of the speed (rotation angular velocity) of a printing mask, and the flux content of cream solder. The graph which shows the relationship between printing pressure, the pulling force of a printing mask, and bending. The graph which shows the relationship between the optimal value of the speed (rotation angular velocity) of a printing mask, and printing pressure. The model figure of the bending of a printing mask. (A) And (b) is explanatory drawing which shows the structural example of the printing mask which provided the cross | bridging inside, respectively. The model figure of a printing mask in case there exists offset of the rotation center of a printing mask. FIGS. 4A and 4B are a plan view and a front view showing an example of a print mask drive mechanism that can be driven to adjust the position of the print mask with respect to the rotation axis (rotation center), respectively. Explanatory drawing which shows the example of 1 structure of a mask height adjustment mechanism. Explanatory drawing which shows the other structural example of a mask height adjustment mechanism. Explanatory drawing which shows the further another structural example of a mask height adjustment mechanism. Explanatory drawing which shows the further another structural example of a mask height adjustment mechanism. Explanatory drawing which shows the further another structural example of a mask height adjustment mechanism. The front view which shows schematic structure of the printing apparatus which concerns on other embodiment. The schematic block diagram which shows an example of the printing mask processing apparatus used for manufacture of a printing mask. (A)-(c) is an expanded sectional view of the processing part of the plastic sheet in the case of ablation processing by irradiation of an excimer laser beam, respectively. Explanatory drawing of the measurement position of taper angle (theta) t in a taper opening part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate 2 Print mask 3 Cream solder 5 Stage 6 Mask drive unit 7 Substrate drive unit 8 Squeegee 20 Mask mounting frame 41 Mask frame holding member on the rocking center side 42 Mask frame holding member on the rocking tip side 100 Main control unit 201 Opening Part 201a Inner side wall 202 Opening formation area (printing pattern area)
410 Fixed member 411 Rotating shaft 420 Fixed member 421 Driven portion 422 Elongated hole 600 Drive transmission movable member 601 Protrusion portion

Claims (22)

A printing mask on which a plurality of openings are formed is set on a printing object, the printing mask is filled with a printing substance, and then the printing mask and the printing object are separated from each other, thereby printing the printing mask. A printing apparatus for printing the printing material on a surface to be printed of an object,
A support means for swingably supporting the print mask or the print object so that one of the print mask and the print object is inclined with respect to the other;
The printing apparatus according to claim 1, wherein the plurality of openings of the printing mask have tapered inner walls that gradually widen in the direction in which the printing substance is removed. The printing apparatus according to claim 1.
The taper angle of the plurality of openings of the printing mask is such that the opening closer to the rotation axis that is the fulcrum of the swing is larger. The printing apparatus according to claim 1.
The distance between the rotation shaft, which is the fulcrum of the swing, and the opening of the printing mask is filled in the movement locus of the inner wall of the opening and the opening when the printing mask and the printing object are separated from each other. The printing apparatus is set to such an extent that it does not interfere with the printed material. The printing apparatus according to any one of claims 1 to 3,
A driving means for driving the printing mask or the printing object supported by the supporting means to swing around the rotation shaft as a fulcrum, and a control means for controlling the driving means. Printing device to do. The printing apparatus according to claim 4.
The support means supports the printing mask or the printing object so as to be swingable, and supports the printing mask or the printing object so as to be linearly movable along a direction perpendicular to the printing surface of the printing object.
The drive means can be driven to move the printing mask or the printing object in a straight line along the direction perpendicular to the printing surface of the printing object together with the swinging movement.
The control means swings the printing mask or the printing object by a predetermined rotation angle set in advance in a direction in which the printing mask and the printing object are separated from each other, and then the printing surface of the printing object. Printing, wherein the driving means is controlled so as to move the print mask or the print object linearly in a direction in which the print mask and the print object are separated from each other along a direction perpendicular to the print object. apparatus. The printing apparatus according to claim 4 or 5,
A printing apparatus, wherein a speed of the printing mask or the printing object when the printing mask and the printing object are separated from each other is set according to the total number or density of the openings of the printing mask. . The printing apparatus according to claim 4 or 5,
Comprising an opening detection means for detecting the total number or density of openings of the printing mask;
The control means controls the speed of the printing mask or the printing object when the printing mask and the printing object are separated from each other based on the detection result of the total number or density of the openings of the printing mask. A printing apparatus characterized by the above. The printing apparatus according to any one of claims 4 to 7,
A printing apparatus, wherein a speed of the printing mask or the printing object when separating the printing mask and the printing object is set according to a tension of the printing mask. The printing apparatus according to any one of claims 4 to 7,
A tension detecting means for detecting the tension of the printing mask;
The control means controls the speed of the print mask or the print object when the print mask and the print object are separated from each other based on the tension of the print mask that is the tension detection means. Printing device. The printing apparatus according to any one of claims 1 to 9,
The distance from the outer edge of the opening forming area where the plurality of openings are formed in the printing mask to the mask mounting member to which the printing mask is attached is set according to the total number or density of the openings of the printing mask. A printing apparatus characterized by that. A printing mask on which a plurality of openings are formed is set on a printing object, the printing mask is filled with a printing substance, and then the printing mask and the printing object are separated from each other, thereby printing the printing mask. A printing method for printing the printing material on a printing surface of an object,
As the printing mask, a plurality of openings having a tapered inner wall gradually expanding as it goes in the direction in which the printing material is removed,
A printing method comprising swinging the printing mask or the printing object so that one of the printing mask and the printing object is inclined with respect to the other. The printing method according to claim 11.
The printing method, wherein the taper angle of the plurality of openings of the printing mask is larger as the opening is closer to the rotation axis that is the fulcrum of the oscillation. The printing method according to claim 11.
The distance between the rotation shaft, which is the fulcrum of the swing, and the opening of the printing mask is filled in the movement locus of the inner wall of the opening and the opening when the printing mask and the printing object are separated from each other. The printing method is characterized in that it is set to such an extent that it does not interfere with the printed material. The printing method according to any one of claims 11 to 13,
The printing mask or the printing object is swung to the extent that the printing substance is removed from all openings of the printing mask, and then the printing mask and the printing mask along a direction perpendicular to the printing surface of the printing object. A printing method, wherein the printing mask or the printing object is moved linearly in a direction to separate the printing object. In the printing method in any one of Claims 11 thru | or 14,
A printing method comprising: setting a speed of the printing mask or the printing object when the printing mask and the printing object are separated according to a total number or density of openings of the printing mask. In the printing method in any one of Claims 11 thru | or 15,
A printing method comprising: setting a speed of the printing mask or the printing object when the printing mask and the printing object are separated according to a tension of the printing mask. In the printing method in any one of Claims 11 thru | or 16,
A printing method, characterized in that a distance from an end of a region where the opening of the printing mask is formed to a mask mounting member to which the printing mask is attached is changed according to the total number or density of the openings of the printing mask. A printing mask having a plurality of openings formed therein,
Each of the plurality of openings has a tapered inner wall that gradually expands in the direction in which the printing material is removed.
The printing mask according to claim 1, wherein the taper angle of the opening portion increases from one end side to the other end side of the printing mask. The printing mask of claim 18.
A printing mask characterized in that the mounting position of the mask mounting member of the printing mask is set according to the total number or density of the plurality of openings. A method for producing a printing mask having a plurality of openings,
Each of the plurality of openings has a tapered inner wall that gradually expands in the direction in which the printing substance is removed, and the taper angle increases as the printing mask moves from one end side to the other end side. It forms so that it may become. The manufacturing method of the printing mask characterized by the above-mentioned. In the manufacturing method of the printing mask of Claim 20,
Using a plastic material as the material of the printing mask,
A method for manufacturing a printing mask, characterized in that the plurality of openings are formed by laser irradiation capable of changing setting of irradiation conditions. In the manufacturing method of the printing mask of Claim 20 or 21,
A method for manufacturing a printing mask, comprising: setting a mounting position of a mask mounting member of the printing mask according to the total number or density of the plurality of openings.

Images