JP2009002778A - Device of measuring ultrasonic output - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device of measuring ultrasonic output capable of accurately measuring the distribution of the ultrasonic output. <P>SOLUTION: The device of measuring the ultrasonic output accurately measures the distribution of the ultrasonic output by using the device of measuring the ultrasonic output characterized by arranging a plurality of crystal oscillators receiving ultrasonic waves on a board. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an ultrasonic output measuring device provided with a crystal resonator as a sensor, and more particularly to an ultrasonic output measuring device provided with a crystal resonator as a sensor.

  Measuring the output state of the ultrasonic wave emitted from the device is an important technique indispensable for grasping the performance of the ultrasonic device and adjusting the device characteristics. In general, well-known and used methods for measuring ultrasonic waves are a balance method and a measurement method using a hydrophone.

  The balance measurement is a method of measuring the ultrasonic output intensity as a change in weight. This method has a merit that the ultrasonic output can be measured relatively easily, but has a demerit that the ultrasonic wave to be measured can be grasped only in a spatially averaged form. Therefore, the pressure distribution in the irradiation surface of the ultrasonic wave irradiated from the ultrasonic transducer cannot be measured. Furthermore, since the measurement is based on a change in weight, it is difficult to increase the sensitivity to several mg or more, and there is a problem that the accuracy is worsened as the ultrasonic output is lower.

  On the other hand, measurement with hydrophone is very sensitive, and it is possible to measure the pressure distribution in the surface by arranging multiple hydrophones on the irradiated surface or scanning the irradiated surface in two dimensions. is there. However, since hydrophones are very expensive, enormous costs are required to arrange a plurality of hydrophones on the irradiation surface. Further, when the measurement is performed by scanning the hydrophone, there is a problem that the measurement time becomes long if the measurement density is increased. For example, when measuring 25 mm square at 1 mm intervals, a measurement time of about 2 hours is required. Furthermore, since ultrasonic waves in a high frequency band are difficult to propagate in the air, measurement in water is common, and using a hydrophone in water for a long time leads to accelerated degradation of the hydrophone.

  For the above-mentioned reasons, the performance evaluation of ultrasonic transducers is performed by hydrophone measurement at the design development stage or sampling inspection, and when 100% inspection is performed, simple measurement by the balance method is currently performed. In the balance method, it has been difficult to provide a high-quality and reliable transducer.

  If high-accuracy measurement can be performed easily and in a short time, 100% inspection, which was previously impossible in terms of cost, can be performed with high accuracy, and periodic inspections can also be performed. A high transducer can be provided.

  Japanese Patent Application Laid-Open No. 2006-29823 describes a quartz pressure sensor. This is a pressure sensor using a quartz resonator, and is a proposal regarding high accuracy as a sensor. It does not solve the simple measurement of the output characteristics of the ultrasonic wave, which is the subject of the present invention.

  Japanese Patent Application Laid-Open No. 8-94429 proposes a sheet that encloses bubbles for easily measuring the two-dimensional distribution of ultrasonic waves. However, in this method, if the bubbles inside the sheet are not uniformly diffused, accuracy is increased. Even if it is not possible to measure a good distribution and the location where the ultrasonic wave is irradiated can be identified as being able to diffuse the bubbles uniformly, it is not sufficient for quantitative evaluation of the ultrasonic intensity.

  Japanese Patent Application Laid-Open No. 8-105869 proposes a standard sample for evaluating a two-dimensional distribution of ultrasonic waves. This method is a method for measuring the performance of a transducer by obtaining a reflected signal from a defective portion of the sample. . Therefore, it does not measure the ultrasonic intensity quantitatively. Furthermore, it is necessary to perform two-dimensional scanning as in the hydrophone method, and the measurement time becomes long.

  Japanese Patent Application Laid-Open No. 2006-122762 proposes a technique for irradiating a strong ultrasonic wave and measuring a sound field in a non-contact manner from infrared energy emitted from a non-irradiated object. It is impossible to evaluate the designed ultrasonic transducer.

JP 2006-29823 A JP-A-8-94429 JP-A-8-105869 JP 2006-122762 A

  The present invention provides an ultrasonic output measuring device capable of accurately measuring the distribution of two-dimensional or three-dimensional ultrasonic waves in order to provide a high-quality and highly reliable transducer and to more accurately grasp the tendency of transducer deterioration. Alternatively, an object is to provide an ultrasonic output measurement method.

That is, the present invention is as follows.
(1) An ultrasonic output measuring apparatus, which is an apparatus for measuring the output of an ultrasonic wave to be measured, and the means for receiving the ultrasonic wave is a plurality of crystal resonators.
(2) A plurality of the quartz vibrators are held by a base that is a single plane, and the base is arranged in parallel to an ultrasonic wave irradiation surface on which an ultrasonic wave to be measured is irradiated. The ultrasonic output measuring device according to (1).
(3) It is provided with a base for holding the crystal resonator, and the crystal resonator is arranged in a three-dimensional pattern including three dimensions in the vertical direction of the ultrasonic irradiation surface and the ultrasonic irradiation surface. The ultrasonic output measuring device according to (1).
(4) A plurality of the crystal resonators are held on the base that is one plane, and the base is disposed obliquely with respect to the ultrasonic irradiation surface on which the ultrasonic wave to be measured is irradiated. (3) The ultrasonic output measuring device according to (3).
(5) The apparatus includes a plurality of the substrates, and the substrate, which is at least one plane, is arranged in parallel to an ultrasonic wave irradiation surface on which an ultrasonic wave to be measured is irradiated. ) Ultrasonic output measuring device.
(6) The ultrasonic output measuring device according to (5), wherein the plurality of bases are arranged in a spiral step shape with respect to a direction perpendicular to the ultrasonic irradiation surface.
(7) The ultrasonic output measuring device according to any one of (4) to (6), further comprising a rotation mechanism that is connected to the base and rotates the base around the vertical direction of the ultrasonic irradiation surface as a rotation axis. .
(8) The two bases are provided, and the base which is one plane is arranged in parallel to the ultrasonic irradiation surface to which the ultrasonic wave to be measured is irradiated, and the base is used as the bottom, and the other base is used. Is formed in a cylindrical shape, the ultrasonic output measuring device according to (3).
(9) The ultrasonic output measuring device according to any one of (2) to (8), wherein the crystal resonators are regularly arranged on the substrate.
(10) Two or more types of the quartz vibrators having different pressure measurement ranges and / or sensitivities are arranged in the same number and alternately per unit area of the base ultrasonic receiving surface. The ultrasonic output measuring device according to any of (9) to (9).
(11) The ultrasonic output measuring device according to any one of (2) to (10), wherein a measurement chamber having the bottom ultrasonic wave receiving surface as a bottom surface and / or a side surface is provided.
(12) The ultrasonic output measuring device according to (11), wherein water is held inside the measuring chamber.

  By realizing the present invention, the ultrasonic intensity within the ultrasonic irradiation surface can be measured accurately, efficiently and simply. As a result, it is possible to align the transducer quality after production and the like more accurately, and it is possible to provide a high-quality and highly reliable transducer. In addition, since the deterioration tendency of the transducer in the process of use can be grasped more accurately, it is possible to provide a better quality product and to use it optimally.

  The ultrasonic output measurement surface of the ultrasonic output device according to the present invention is configured by providing a plurality of crystal resonators on a base. By providing a plurality of crystal resonators, it is possible to measure the degree of ultrasonic output intensity at each location corresponding to each crystal resonator of the transducer to be measured.

  In general, a crystal resonator is known as an element that regularly vibrates by applying an alternating voltage to both surfaces of a crystal plate. This vibration is often used for an oscillator in an electronic circuit, and is an indispensable part for modern electronics such as a watch, wireless communication, and computer. On the other hand, it is also known that the mass applied to the electrode is detected by utilizing the characteristics of the crystal resonator. Specifically, it is a technology that can detect a change in mass on the order of ng, with the frequency changing according to its mass, and is used in biosensing and the like. In addition, the gas pressure can be measured. In the present invention, by using a crystal resonator as a sensor for measuring the ultrasonic output, the ultrasonic output can be measured in the ng order, and can be measured with high accuracy. In addition, it is also possible to measure an ultrasonic output by using a piezoelectric element capable of measuring an ultrasonic output, such as a piezoelectric ceramic or a piezoelectric polymer material, in the form of the present invention, instead of the quartz resonator.

Hereinafter, the present invention will be described based on embodiments shown in the drawings. The present invention is not limited to the illustrated embodiment.
FIG. 1 is an example of a two-dimensional array pattern of an ultrasonic output measuring device according to the present invention as viewed from a measurement surface. In the ultrasonic output measuring apparatus 1, quartz vibrator sensors 2 having a sensing portion having a diameter of 2 mm (the present invention is not limited to this numerical value) are arranged on the base 3 in two dimensions at regular intervals. This crystal sensor 2 receives ultrasonic waves. The size of the substrate area on which the crystal resonator sensors are arranged, the arrangement density of the crystal resonator sensors, or the size of the crystal resonator sensors may be arbitrarily selected depending on the characteristics of the ultrasonic wave to be measured or the transducer to be evaluated. As the base area is larger, the output of the ultrasonic wave radiated to a larger area can be measured. The higher the arrangement density of the quartz vibrator sensors, the more accurately the performance and deterioration of the ultrasonic transducer can be evaluated. In order to increase the arrangement density, it is necessary to make the crystal resonator sensor small. In this embodiment, the center distance of the crystal resonator sensor 2 is 3 mm, and the crystal resonator sensor 2 is arranged in a 15 mm square as a whole. In addition, the arrangement of crystal resonators may be designed in consideration of convenience during measurement, such as 2-3 mm square, 30 mm square, 15 cm square, and 30 cm square. By arranging the angles with respect to the base of the crystal resonator sensor to be equal, ultrasonic waves propagating from a specific direction are detected evenly. There may be a plurality of quartz vibrator sensors, and an appropriate number may be arranged depending on the transducer to be measured. For example, three or more.

  As an example of the arrangement of the quartz vibrator sensors, there is a method of regularly arranging on a substrate, for example, a method of arranging regularly and vertically as a two-dimensional pattern on a substrate on the same plane as shown in FIG. The two-dimensional arrangement pattern is a form in which a plurality of crystal resonator sensors are arranged on a plane parallel to the ultrasonic irradiation surface. The ultrasonic irradiation surface in the present invention refers to a surface irradiated with ultrasonic waves transmitted from a transducer as a measurement target, and refers to a surface parallel to the ultrasonic transmission surface of the transducer or a surface perpendicular to the ultrasonic transmission direction. As a two-dimensional array pattern, as an example of a square array, as shown in FIG. 1, a plurality of straight and vertical lines that are orthogonal to the ultrasonic wave receiving surface of the substrate 3 are assumed, and a crystal resonator sensor 2 is placed at the intersection. The pattern to arrange is mentioned. Other examples include rectangular, oblique coordinate patterns, circular, and fan-shaped arrangements. The rectangular array example is a pattern in which a plurality of crystal resonator sensors are arranged at the intersections assuming a plurality of orthogonally different vertical and horizontal lines on the ultrasonic reception surface of the base, as in the case of a square base. (FIG. 2A). As an oblique coordinate pattern, a pattern in which a plurality of crystal resonator sensors are arranged at intersections on a base ultrasonic receiving surface assuming a plurality of vertical and horizontal straight lines that intersect at non-right angles (FIG. 2B). ). As an example of the circular arrangement, there is a pattern in which a plurality of crystal resonators are arranged at equal intervals on a concentric circle from the center of the base (FIG. 2C). As an example of a fan-shaped arrangement, an arrangement example in which a circular arrangement pattern is cut out in a fan shape can be given (FIG. 2D). In other words, this is a pattern in which a plurality of crystal resonators are arranged at equal intervals on an arc centered at a point where two radii of a sector shape intersect. When scanning a substrate described later, it is efficient to measure the ultrasonic intensity distribution in a specific plane by scanning in the vertical and horizontal directions in the case of a square or rectangular array, and rotating in the sector shape around the apex.

  FIG. 3 is a side view of the ultrasonic power measuring apparatus of FIG. Each crystal oscillator sensor 2 is connected to an oscillation circuit 4 that applies an AC voltage, and an AC voltage is applied to the crystal oscillator sensor 2. Ultrasonic waves are often used not only in gases but also in water. Therefore, in consideration of ultrasonic measurement in water, the ultrasonic output measuring device 1 in FIG. 3 exposes the crystal resonator sensor 2, the base 3, and the oscillation circuit 4 from the ultrasonic receiving surface of the crystal resonator sensor 2. And covered with a cover 5. The cover 5 is preferably waterproofed so that water does not enter inside. Driving power for the oscillation circuit 4 is supplied through a power supply cable 6. The vibration of the crystal resonator sensor 2 is transmitted through the signal cable 7 and can be connected to the detecting means 8. However, the signal cable 7 needs to use a cable having the same number of signal lines as the arranged crystal resonator sensors 2 in order to obtain the vibration frequency of the arranged crystal resonator sensors 2.

  The base 3 fixes the crystal resonator sensor 2 and serves as a base for each measurement surface. The substrate 3 may be any material that can fix the crystal resonator sensor 2 regardless of metal or non-metal. If the arrangement position of the crystal resonator sensor 2 is changed due to the deformation of the base, there is a possibility that accurate measurement may be hindered. Therefore, it is preferable that the base is made of a material or processing that is difficult to be deformed. The substrate is preferably made of a material that can be easily processed in order to realize various forms to be described later, and examples thereof include plastic and aluminum. Furthermore, if the ultrasonic wave receiving surface of the substrate 3 is made of a material that absorbs ultrasonic waves, such as rubber or sponge, unnecessary reflection of ultrasonic waves can be prevented.

  The internal oscillation circuit 4 can be easily constructed with an electronic circuit. The oscillation circuit 4 may be a circuit that applies an AC voltage having a resonance frequency of the crystal resonator sensor 2. Therefore, in the case where the quartz resonator sensors 2 having the same resonance frequency are used, only one oscillation circuit 4 may be used (FIG. 4). If the single oscillation circuit 4 is used as in the embodiment of FIG. 4, the structure of the electronic circuit can be simplified.

  However, when a plurality of types of crystal resonator sensors 2 having different resonance frequencies of the crystal resonator sensor 2 are used, at least as many oscillation circuits 4 as the types of resonance frequencies to be used are required. The quartz resonator sensor 2 has a detectable pressure range or sensitivity, and is affected by the resonance frequency, the processing method of the sensor, and the like. The pressure range is a range of pressure intensity, and the sensitivity indicates a pressure measurement order (measurement fineness). By providing a plurality of types of crystal resonator sensors 2 having different pressure ranges or sensitivities that can be detected, various ultrasonic output ranges, that is, pressure ranges or sensitivities can be handled. As an example, FIG. 11 shows a form using two types of crystal resonator sensors 2 and 23. In addition to the quartz crystal sensor 2, it is possible to widen the measurable ultrasonic output range or sensitivity by using the quartz crystal sensor 23 having different reception characteristics with respect to pressure. At this time, as for the arrangement of the crystal resonator sensors with respect to the substrate 3, it is preferable that two types of crystal resonator sensors are alternately incorporated in the same number and the same arrangement per unit area on the substrate 3, as shown in FIG. . With this configuration, the same ultrasonic intensity distribution characteristic can be obtained even when the pressure distribution is measured with one of two types of quartz vibrator sensors. Furthermore, by using two types of quartz vibrator sensors having different reception sensitivities, it is possible to measure a wide range of pressures with higher sensitivity than using one type of sensor.

  The cover 5 is preferably a mechanism that prevents water from entering the internal oscillation circuit 4 regardless of whether it is a metal or a non-metal. In the case of using a metal, it is preferable to carry out a rust-proof coating treatment that is resistant to underwater measurement on aluminum that is light and easy to process. In the case of using a nonmetal, a material such as rubber or plastic that can be easily processed is preferable. The portion where cables such as the power supply cable 6 and the signal cable 7 go out from the circuit portion has a high possibility of being flooded. Therefore, sealing that prevents flooding using a double waterproof mechanism or an O-ring is necessary. The power supply cable 6 can use an external power supply, and can also use a rechargeable battery when a rechargeable internal power supply (not shown) is used. The signal cable 7 is connected not only to a measuring instrument such as an oscilloscope and a frequency counter, but also to a detecting means 8 that can be manufactured using a microcomputer and a peripheral electronic circuit. A frequency change can be detected by performing a frequency analysis with the oscilloscope, the frequency counter, or the detection means 8 through the signal cable 7, and the pressure due to the ultrasonic wave received by each crystal resonator sensor 2 can be detected.

  The ultrasonic output can be measured by irradiating the ultrasonic wave from the ultrasonic transducer onto the measurement surface of the ultrasonic measurement apparatus 1 in a state where the crystal resonator is oscillated. FIG. 5 shows a signal example obtained from the crystal resonator sensor 2 through the signal cable 7. This signal is a signal obtained from one of the arranged crystal resonator sensors 2. The frequency can be calculated from the time width 9 of the signal. This frequency is the resonance frequency of the crystal resonator sensor 2. This time width 9 changes when an ultrasonic pressure is applied to the crystal resonator. The calculated frequency also changes due to the change in the time width. The magnitude of the pressure applied to the crystal resonator can be calculated by comparing the frequencies or counting the wave number of unit time.

  The ultrasonic measurement apparatus shown in FIGS. 1, 3 and 4 is a method for measuring pressure changes at a plurality of points at a time, and a plurality of times shown in FIG. A width 9 can be obtained. This time width 9 becomes a time width 22 after reception by receiving ultrasonic waves. At this time, the intensity of the received ultrasonic waves detected by the respective quartz vibrator sensors 2 can be measured by directly detecting the amount of change in the time width, or by performing conversion processing to frequency information and wave number information. . An intensity distribution is obtained from this information, and a time average or a peak thereof, or a spatial average or a peak thereof can be obtained based on each measured value. In addition to the ultrasonic intensity distribution, there is a display format that combines the time average or its peak and the spatial average or its peak in the display form of the output of the ultrasonic equipment. By obtaining the ultrasonic distribution and intensity, It is possible to display measurement results in the form of all the patterns shown from the above average or peak (that is, four patterns of spatial peak and time peak, spatial peak and time average, spatial average and time peak, spatial average and time average) Become.

  If the ultrasonic measurement area is smaller than the area of the base 3, the intensity and its distribution can be measured at once. If the measurement area is larger than the base area, in addition to manually translating or rotating the ultrasonic measurement device 1, a parallel movement mechanism or a rotation mechanism (both not shown) such as a motor is connected to the ultrasonic measurement device 1. Measurement can be performed by scanning or rotating in parallel. Also in this case, since a certain area can be measured at the same time, the measurement can be performed in a shorter time than using a conventional hydrophone. In order to grasp the change in the distribution due to the propagation distance of the irradiated ultrasonic wave, the distance between the transducer and the base 3 of the ultrasonic measurement device 1 may be changed.

  As an arrangement method other than the two-dimensional pattern, there is a three-dimensional pattern. The three-dimensional pattern is a three-dimensional pattern composed of the ultrasonic irradiation surface and the vertical direction of the ultrasonic irradiation surface, specifically, not only one plane parallel to the ultrasonic irradiation surface but also a vertical depth direction. This is a form in which the quartz vibrator sensors are arranged at positions where the distances (that is, ultrasonic propagation distances) are different. In order to arrange the crystal resonators in a three-dimensional pattern, there is a method in which one or a plurality of substrates are arranged at appropriate positions with respect to the ultrasonic irradiation direction of the measurement target. As described in the above-described two-dimensional pattern arrangement, the arrangement method of the quartz oscillator is a method of regularly arranging a plurality of quartz oscillators, for example, square, rectangle, oblique coordinate pattern, circle, fan, etc. The arrangement example is preferable.

  FIG. 9 and FIG. 10 show an example in which crystal resonator sensors are arranged in a spiral staircase shape as an example. In this embodiment, the rotation mechanism (not shown) connected to the central shaft 28 is rotated, and ultrasonic waves are measured each time the rotation is performed, so that an ultrasonic output (characteristic in the depth direction) corresponding to the propagation distance is obtained. It can be measured efficiently. In addition, when this form is used, the ultrasonic intensity distribution under more distance conditions can be obtained once by reducing the area of the base and increasing the number of steps. Further, by adjusting the distance of each step, the intensity distribution of the ultrasonic wave at the intended ultrasonic wave propagation distance can be detected selectively and efficiently.

  In addition, the two-dimensional pattern array shown in FIG. 1 can be used to give a three-dimensional pattern characteristic. As one method to realize, the ultrasonic measuring apparatus 1 can be realized by attaching a manual or parallel movement mechanism in the vertical direction (direction in which the ultrasonic propagation distance changes) and changing the ultrasonic propagation distance. it can. In addition, it is not perpendicular to the ultrasonic irradiation direction, but is inclined and connected to the rotary shaft 28, and measurement is performed by rotating the rotary shaft 28 with a rotating mechanism (FIGS. 15 and 16). . At this time, the ultrasonic output to be measured can be efficiently measured by adjusting the direction of the crystal resonator sensor 2 to the direction in which the ultrasonic wave is irradiated. In this embodiment, the interval in the height direction (the direction in which the ultrasonic wave propagation distance changes) with the base plate 3 as the slope of the array of the crystal resonator sensors 2 is narrowed, or the angle at which the base plate 3 is tilted is abrupt ( In other words, by making it closer to the rotation axis 28), more accurate measurement is possible. In addition, rectangles, circles, sectors, etc. can be tilted, rotated by a rotation mechanism, or translated by a translation mechanism, and given the characteristics of a three-dimensional pattern using a two-dimensional pattern. (Not shown).

  FIG. 6 shows an ultrasonic measurement apparatus 10 with a built-in detection function. In this embodiment, the detection unit 8 for detecting the frequency of the crystal resonator, the recording unit 11 for recording the detected frequency, the display unit 12 for displaying the detected frequency, the detection unit 8, the recording unit 11, and the display unit 12 are controlled. By incorporating the controller 13 that performs the measurement, the measurer can perform measurement simply by supplying power to the apparatus using the power supply cable 6. The recording means 11 can be constructed by using a semiconductor memory. The measurement result can be taken out arbitrarily by connecting the signal cable 7. Further, a removable medium such as a flash memory can be used instead of the signal cable 7 (not shown). The display unit shows the detection result, and a simple distribution chart can be shown in addition to the numerical display by using the LCD. Further, the recording means 11 records in advance the ultrasonic intensity distribution, average value, peak value or the like of the target transducer, and the controller 13 discriminates the received ultrasonic signal from the signal recorded in the recording means 11. By incorporating the program, it is also possible to determine the characteristics of the transducer depending on whether or not it falls within a certain range, for example, an error range of 10% within the apparatus.

  FIG. 7 shows a wireless communication type ultrasonic measurement apparatus 15. By using the wireless communication terminal 14, data acquisition without a cable can also be realized. However, it is necessary to connect the wireless communication terminal 14 also to the detection means 8. In FIG. 7, the power supply cable 6 is used. However, if the built-in power supply is used, the power supply cable 6 can be used only during charging or can be completely wireless (not shown).

  FIG. 12 shows a form in which the quartz crystal resonator sensors 2 are arranged in a cylindrical shape. In this embodiment, the crystal resonator sensor 2 is also installed on the side substrate 24 other than the substrate 3. Thereby, the ultrasonic output can be detected also on the side surface. The ultrasonic wave has directivity when a frequency of 100 kHz or higher is used, and goes straight when the frequency exceeds 500 kHz. FIG. 13 shows a visualization image of the main lobe 26 and the side lobe 27 when the ultrasonic wave is irradiated. The strongest part that appears in front of the ultrasonic transducer is called a main lobe and is a commonly used area. Further, there is a weak output ultrasonic wave called a side lobe outside the main lobe. Side lobes are processed as noise components in ultrasonic flaw detectors and medical diagnostic imaging apparatuses. In medical ultrasonic therapy equipment, the main lobe is used for treatment. In other words, accurate measurement and efficient treatment are possible by using a transducer with few appearance of side lobes, so it is important to accurately grasp this characteristic of the transducer. Further, the sensors are arranged in a fan-shaped configuration in which the crystal resonator sensor 2 is arranged on the base 3 and the side base 24 as shown in FIG. 14, and a rotating mechanism is used around the rotary shaft 28 for measurement. The same measurement as in the embodiment of FIG. 12 can be performed. When this configuration is used, the number of crystal resonator sensors 2 can be reduced.

  By using the measurement chamber integrated ultrasonic measurement device 16 shown in FIG. 8, it is possible to check the state of the product at the site where the transducer is used. The measurement chamber integrated ultrasonic measurement apparatus 16 shown in the present embodiment includes a crystal resonator sensor 2 that receives ultrasonic waves, a substrate 3 on which the crystal resonator sensors 2 are arranged, an oscillation circuit 4, a detection circuit 8, and a recording means. 11, a display unit 12, a power supply unit 17, a controller 13, a cover 5 covering them, a measurement chamber 18, an ultrasonic absorber 19, a transducer fixing unit 20, and an ultrasonic propagation material 21. The measurement chamber-integrated ultrasonic measurement device 16 fixes the transducer to be measured to the transducer fixing means 21, and receives the ultrasonic wave irradiated from the transducer by the crystal resonator sensor 2. The received signal is detected by the detection circuit 8 and recorded in the recording means 11. The result is shown on the display unit 12. In addition, by recording the ultrasonic intensity distribution, average value, peak value, etc. of the target transducer in advance in the recording means 11 and incorporating a program for discriminating from the signal recorded in the controller 13, the inside of the apparatus. It is also possible to determine the characteristics of the transducer based on whether or not the difference between the received ultrasonic signal and the recorded signal falls within a certain range, for example, an error range of 10%.

  In the measurement chamber-integrated ultrasonic measurement device 16, when the cover 5 is limited to the use of ultrasonic waves propagating in the air, waterproofing is not necessary, and the cover for preventing the user from touching the internal electronic circuit. As such, it may be covered with rubber or plastic. The substrate 3 may be any material that can fix the crystal resonator sensor 2 regardless of metal or non-metal. As described above, the substrate 3 is preferably made of plastic or aluminum that can be easily processed. The oscillation circuit 4, the detection circuit 8, and the controller 13 can be composed of a microcomputer and peripheral circuits. The recording means 11 can be easily realized by using a semiconductor memory. The display unit can display the measurement result numerically or visually by using an LCD or the like. The power supply means 17 can be realized by using a battery. If a chargeable material is used, the cost can be reduced. In addition, the form using an external power supply is also mentioned (not shown). The measurement chamber 18 is preferably hermetically sealed except for the portion where the transducer is connected so as not to affect the ultrasonic waves measured inside the measurement chamber due to conditions outside the measurement chamber. The measurement chamber 18 is preferably made of aluminum, stainless steel, or the like that is light and relatively easy to process when using metal. When non-metal is used, plastic or the like may be used. The ultrasonic absorber 19 is installed on the side surface of the measurement chamber 18 in order to absorb the ultrasonic wave irradiated on the side surface so that the quartz crystal resonator does not receive the signal reflected on the side surface when measuring the ultrasonic wave. . The ultrasonic absorber 19 is preferably made of rubber or sponge that easily absorbs ultrasonic waves. When measuring the above-described side lobe, the side surface of the measurement chamber 18 may be constituted by the side surface base 24 on which the crystal resonator sensors 2 are arranged instead of the ultrasonic absorber 19. The transducer fixing means 20 is provided on the upper surface of the measurement chamber 18 and fixes the transducer to be measured. Except for the place where the transducer is fixed, the transducer fixing means 20 creates a sealed state. For this reason, it is preferable that the transducer fixing means 20 be replaced or variable in size so as to be able to cope with the size of the measurement target. If it is to be replaced, it is preferable to use a material that is light and easy to process, such as aluminum, stainless steel, and plastic. If the size of the fixing is changed, elastic rubber or a sliding mechanism can be used. When the slide mechanism is employed, it is preferable to use the light and easy-to-process material described above. The ultrasonic wave propagation material 21 present in the measurement chamber 18 uses water when measuring ultrasonic waves for water, more preferably degassed water, and air when measuring ultrasonic waves for air. Can be used as it is in the air.

  When a transducer failure occurs, it is necessary to send it to a manufacturer or the like to confirm the performance of the transducer and to request performance confirmation work. In addition to cost, it takes time for distribution. By using the measurement room integrated ultrasonic measurement apparatus according to the present invention, performance confirmation can be easily performed even in a place where a performance confirmation test cannot be performed conventionally, such as a use site, and the time can be greatly shortened. . Moreover, failure of a transducer is often unpredictable from the appearance, and an abnormality may be noticed only when the transducer is used. Therefore, when a transducer is used using a device that does not have a function for detecting an abnormality, the abnormality of the transducer being used may not be noticed. Since the measurement time of this device is very short, it is easy to perform measurement every time the transducer is used, and it is possible to contribute to the use of the device after confirming the performance of the transducer at all times. It is possible to provide a high test and treatment.

  The measuring apparatus or measuring method of the present invention can easily and accurately measure the characteristics of ultrasonic waves emitted from a transducer, that is, changes, spreads, intensity distributions, and the like due to the ultrasonic irradiation area and propagation distance. By using this apparatus or method, it is possible to provide a high-quality and highly reliable transducer. Therefore, more reliable data can be obtained for a transducer for industrial inspection, and more for a medical transducer. Optimal treatment and diagnosis, as well as highly safe treatment and diagnosis are possible.

It is a front view of the measurement surface of an ultrasonic measuring device. It is the front view which showed the other form of the two-dimensional pattern arrangement | sequence of the crystal oscillator of a measurement surface. It is a side view of the ultrasonic measuring device of FIG. It is a side view of an ultrasonic measuring device using one oscillation circuit. It is an example of a signal obtained from a crystal oscillator sensor. It is a schematic diagram of an ultrasonic measuring device incorporating a detection function. An ultrasonic measurement device provided with a wireless communication terminal. This is a measurement chamber-integrated ultrasonic measurement device. It is a front view of the measurement surface of a different form of an ultrasonic measuring device. It is the side view seen from diagonally upward of the measurement surface of the different form of the ultrasonic measuring device of FIG. It is a front view of the measurement surface of the ultrasonic measuring device using the crystal oscillator sensor of a different characteristic. It is the side view seen from diagonally upward of the measurement surface of another different form of an ultrasonic measuring device. It is an image figure of the ultrasonic wave irradiated from an ultrasonic transducer. It is the side view seen from the slanting upper part of the measurement surface of a further different form of an ultrasonic measuring device. It is the schematic of the measurement surface of the still another form of an ultrasonic measuring device. FIG. 16 is a side view of a measurement surface of still another form of the ultrasonic measurement device of FIG. 15.

Explanation of symbols

1. 1. Ultrasonic measuring device 2. Crystal resonator sensor Base 4 4. Oscillator circuit Cover 6. 6. Power supply cable Signal cable8. Detection means 9. Time width 10. 10. Ultrasonic measuring device with built-in detection function Recording means 12. Display unit 13. Controller 14. Wireless communication terminal 15. Wireless communication type ultrasonic measurement device 16. Measurement chamber integrated ultrasonic measurement device 17. Power supply means 18. Measurement chamber 19. Ultrasonic absorber 20. Transducer fixing means 21. Ultrasonic propagation material 22. Time width after reception 23. Crystal sensor with different reception characteristics 24. Side base 25. Ultrasonic transducer 26. Main lobe 27. Side lobe 28. Axis of rotation

Claims (12)

  An ultrasonic output measuring apparatus, which is an apparatus for measuring an output of an ultrasonic wave to be measured, and wherein means for receiving the ultrasonic wave is a plurality of crystal resonators.   A plurality of the quartz resonators are held on a base that is a single plane, and the base is arranged in parallel to an ultrasonic irradiation surface on which an ultrasonic wave to be measured is irradiated. The ultrasonic output measuring device according to claim 1.   The substrate includes a substrate for holding the crystal resonator, and the crystal resonator is arranged in a three-dimensional pattern including three dimensions in a direction perpendicular to the ultrasonic irradiation surface and the ultrasonic irradiation surface. The ultrasonic output measuring apparatus according to 1.   A plurality of the crystal resonators are held on the base that is a single plane, and the base is disposed obliquely with respect to an ultrasonic wave irradiation surface on which an ultrasonic wave to be measured is irradiated. The ultrasonic output measuring device according to claim 3.   The said base | substrate which is provided with several this base | substrate and is at least 1 plane is arrange | positioned in parallel with the ultrasonic irradiation surface with which the ultrasonic wave of a measuring object is irradiated, It is characterized by the above-mentioned. Ultrasonic output measuring device.   The ultrasonic output measuring device according to claim 5, wherein the plurality of bases are arranged in a spiral step shape with respect to a direction perpendicular to the ultrasonic irradiation surface.   The ultrasonic output measuring device according to any one of claims 4 to 6, further comprising a rotation mechanism that is connected to the base and rotates the base about a direction perpendicular to the ultrasonic irradiation surface as a rotation axis.   Two bases are provided, and the base, which is one plane, is arranged in parallel to an ultrasonic wave irradiation surface on which an ultrasonic wave to be measured is irradiated, the base is the bottom, and the other base is cylindrical The ultrasonic output measuring device according to claim 3, wherein the ultrasonic output measuring device is formed as described above.   The ultrasonic output measuring device according to claim 2, wherein the crystal resonators are regularly arranged on the substrate.   The two or more types of the quartz vibrators having different pressure measurement ranges and / or sensitivities are arranged in the same number and alternately per unit area of the ultrasonic wave receiving surface of the base. The ultrasonic output measuring device described in 1.   The ultrasonic output measuring apparatus according to any one of claims 2 to 10, wherein a measurement chamber having a bottom ultrasonic wave receiving surface and / or a side surface is provided.   The ultrasonic output measuring device according to claim 11, wherein water is retained in the measuring chamber.