JP2008537104A - 三次元微細構造の顕微鏡解析を行う方法 - Google Patents
三次元微細構造の顕微鏡解析を行う方法 Download PDFInfo
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- JP2008537104A JP2008537104A JP2008502336A JP2008502336A JP2008537104A JP 2008537104 A JP2008537104 A JP 2008537104A JP 2008502336 A JP2008502336 A JP 2008502336A JP 2008502336 A JP2008502336 A JP 2008502336A JP 2008537104 A JP2008537104 A JP 2008537104A
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- luminescent material
- luminescent
- microstructure
- states
- luminophore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
- G01N21/643—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" non-biological material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
- G01N21/6458—Fluorescence microscopy
Abstract
Description
ただし、λは用いられる光の波長、nは試料の屈折率、αは用いられる対物レンズの半開口角、lは脱励起光信号の入射強度、lSは飽和強度である。飽和強度lSは、試料の蛍光色素が脱励起光信号の作用によって、静的に見て半分脱励起されている際の特性強度である。
2 凸部
3 基板
4 表面
5 ステップ:被覆
6 ルミネセンス物質
7 ステップ:解析
8 ステップ:洗浄
9 洗浄液
10 ステップ:加工
11 励起光ビーム
12 脱励起光ビーム
13 蛍光
14 蛍光顕微鏡
15 試料
16 励起光源
17 ピンホール
18 1/4波長板
19 ダイクロイックミラー
20 ダイクロイックミラー
21 対物レンズ
22 ピンホール
23 光検出器
24 脱励起光源
25 トリガ信号
26 シングルモードファイバ
27 分光器
28 位相板
29 位相板
30 分光器
Claims (10)
- − 三次元微細構造の表面を補助物質で被膜するステップと、
− 該補助物質で被膜された該表面の特性を測定するステップと
を具備する、三次元微細構造の顕微鏡解析を行う方法において、
補助物質としてルミネセンス物質が選択され、該ルミネセンス物質がルミネセンス特性の点で異なる2つの状態を有し、その際、該ルミネセンス物質は、可逆性を有するが、ほぼ完全に光信号によって一方の状態から他方の状態へと遷移できることと、該ルミネセンス物質で被膜された表面の特性を求めるために、該ルミネセンス物質から放出されるルミネセンス光が測定され、その際、該ルミネセンス物質が、観察中の各測定点の周囲内で自らの両状態のうち他方の状態へ移行されることとを特徴とする方法。 - 前記ルミネセンス物質が、自らの両状態の一方の状態から他方の状態へ、飽和するまで遷移することによって移行されることを特徴とする請求項1に記載の方法。
- 前記ルミネセンス物質が、観察中の測定点の周囲において、非活性状態へ移行されることを特徴とする請求項1又は2に記載の方法。
- 前記ルミネセンス物質が、誘導放出によって非活性状態へ移行されることを特徴とする請求項3に記載の方法。
- 微細構造の表面が、前記ルミネセンス物質によって、108mm−2から1015mm−2の表面密度、好ましくは1011mm−2から1012mm−2の表面密度で被膜されることを特徴とする請求項1〜4のいずれか1項に記載の方法。
- 微細構造の表面が、前記ルミネセンス物質の蒸着よって被膜されることを特徴とする請求項1〜5のいずれか1項に記載の方法。
- 前記ルミネセンス物質が、該ルミネセンス物質で被膜された三次元微細構造の表面の特性を測定した後、再び微細構造の表面から除去されることを特徴とする請求項1〜6のいずれか1項に記載の方法。
- 前記ルミネセンス物質が、微細構造の表面から洗浄液によって洗い落とされることを特徴とする請求項7に記載の方法。
- ルミネセンス物質から放出されたルミネセンス光が、イマージョン対物レンズによって検出器へ投影されることを特徴とする請求項1〜8のいずれか1項に記載の方法。
- イマージョン対物レンズ用のイマージョン媒体として固体、特にいわゆるソリッドイマージョンレンズが用いられることを特徴とする請求項9に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005013969A DE102005013969A1 (de) | 2005-03-26 | 2005-03-26 | Verfahren zur mikroskopischen Untersuchung einer räumlichen Feinstruktur |
DE102005013969.8 | 2005-03-26 | ||
PCT/EP2006/002711 WO2006103025A1 (de) | 2005-03-26 | 2006-03-24 | Verfahren zur mikroskopischen untersuchung einer räumlichen feinstruktur |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008537104A true JP2008537104A (ja) | 2008-09-11 |
JP4896124B2 JP4896124B2 (ja) | 2012-03-14 |
Family
ID=36498773
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008502336A Expired - Fee Related JP4896124B2 (ja) | 2005-03-26 | 2006-03-24 | 三次元微細構造の顕微鏡解析を行う方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7538893B2 (ja) |
EP (1) | EP1864115B8 (ja) |
JP (1) | JP4896124B2 (ja) |
AT (1) | ATE410674T1 (ja) |
DE (2) | DE102005013969A1 (ja) |
WO (1) | WO2006103025A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11526091B2 (en) * | 2019-04-08 | 2022-12-13 | Asml Holding N.V. | Sensor apparatus and method for lithographic measurements |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005013969A1 (de) * | 2005-03-26 | 2006-10-05 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur mikroskopischen Untersuchung einer räumlichen Feinstruktur |
RU2305270C2 (ru) | 2005-05-18 | 2007-08-27 | Андрей Алексеевич Климов | Способ флуоресцентной наноскопии (варианты) |
US8217992B2 (en) | 2007-01-11 | 2012-07-10 | The Jackson Laboratory | Microscopic imaging techniques |
DE102007025688A1 (de) | 2007-06-01 | 2008-12-11 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Wellenlängen- oder polarisationssensitiver optischer Aufbau und dessen Verwendung |
DE102007039111B4 (de) * | 2007-08-18 | 2014-11-20 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | STED-Fluoreszenzmikroskopie mit Zweiphotonen-Anregung |
US7772569B2 (en) | 2008-04-01 | 2010-08-10 | The Jackson Laboratory | 3D biplane microscopy |
US8625863B2 (en) | 2009-06-02 | 2014-01-07 | Sofast Gmbh | Superresolution optical fluctuation imaging (SOFI) |
US8547533B2 (en) | 2009-12-28 | 2013-10-01 | The United States Of America, As Represented By The Secretary, Department Of Health And Human Services | Composite probes and use thereof in super resolution methods |
DE102011100507B4 (de) * | 2011-04-29 | 2020-05-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Tragbares optisches Analysegerät |
EP2535755A1 (en) | 2011-06-14 | 2012-12-19 | Ecole Polytechnique Fédérale de Lausanne (EPFL) | Cumulant microscopy |
DE102012200858A1 (de) * | 2012-01-20 | 2013-07-25 | Freie Universität Berlin | Laserpulsformungsverfahren |
US10783697B2 (en) | 2016-02-26 | 2020-09-22 | Yale University | Systems, methods, and computer-readable media for ultra-high resolution 3D imaging of whole cells |
CN108957719B (zh) * | 2018-09-07 | 2020-04-10 | 苏州国科医疗科技发展有限公司 | 一种双光子受激发射损耗复合显微镜 |
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JPH10185782A (ja) * | 1996-10-24 | 1998-07-14 | Hamamatsu Photonics Kk | 蛍光性単一分子を基板表面に並べる方法及び基板表面の構造欠陥を可視化する方法 |
JP2001272343A (ja) * | 2000-03-23 | 2001-10-05 | Olympus Optical Co Ltd | 二重共鳴吸収顕微鏡 |
JP2002287035A (ja) * | 2001-02-06 | 2002-10-03 | Leica Microsystems Heidelberg Gmbh | 走査型顕微鏡及び走査型顕微鏡用モジュール |
JP2003241101A (ja) * | 2002-02-18 | 2003-08-27 | Olympus Optical Co Ltd | 顕微鏡 |
JP2004102032A (ja) * | 2002-09-11 | 2004-04-02 | Olympus Corp | 走査型共焦点顕微鏡装置 |
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US6259104B1 (en) | 1994-07-15 | 2001-07-10 | Stephen C. Baer | Superresolution in optical microscopy and microlithography |
DE10154699B4 (de) | 2001-11-09 | 2004-04-08 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren und Vorrichtung zum räumlich eng begrenzten Anregen eines optischen Übergangs |
DE102005012739B4 (de) * | 2005-03-19 | 2010-09-16 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur Herstellung räumlicher Feinstrukturen |
DE102005013969A1 (de) * | 2005-03-26 | 2006-10-05 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur mikroskopischen Untersuchung einer räumlichen Feinstruktur |
JP2007010413A (ja) * | 2005-06-29 | 2007-01-18 | Canon Inc | 核酸ハイブリッドの融点測定方法及びそのための装置 |
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2005
- 2005-03-26 DE DE102005013969A patent/DE102005013969A1/de not_active Withdrawn
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2006
- 2006-03-24 EP EP06723692A patent/EP1864115B8/de not_active Not-in-force
- 2006-03-24 JP JP2008502336A patent/JP4896124B2/ja not_active Expired - Fee Related
- 2006-03-24 DE DE502006001754T patent/DE502006001754D1/de active Active
- 2006-03-24 AT AT06723692T patent/ATE410674T1/de active
- 2006-03-24 WO PCT/EP2006/002711 patent/WO2006103025A1/de not_active Application Discontinuation
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2007
- 2007-09-26 US US11/861,405 patent/US7538893B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH10185782A (ja) * | 1996-10-24 | 1998-07-14 | Hamamatsu Photonics Kk | 蛍光性単一分子を基板表面に並べる方法及び基板表面の構造欠陥を可視化する方法 |
JP2001272343A (ja) * | 2000-03-23 | 2001-10-05 | Olympus Optical Co Ltd | 二重共鳴吸収顕微鏡 |
JP2002287035A (ja) * | 2001-02-06 | 2002-10-03 | Leica Microsystems Heidelberg Gmbh | 走査型顕微鏡及び走査型顕微鏡用モジュール |
JP2003241101A (ja) * | 2002-02-18 | 2003-08-27 | Olympus Optical Co Ltd | 顕微鏡 |
JP2004102032A (ja) * | 2002-09-11 | 2004-04-02 | Olympus Corp | 走査型共焦点顕微鏡装置 |
WO2004083930A1 (ja) * | 2003-03-20 | 2004-09-30 | Hamamatsu Photonics K.K. | 顕微鏡及び試料観察方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US11526091B2 (en) * | 2019-04-08 | 2022-12-13 | Asml Holding N.V. | Sensor apparatus and method for lithographic measurements |
Also Published As
Publication number | Publication date |
---|---|
EP1864115A1 (de) | 2007-12-12 |
US7538893B2 (en) | 2009-05-26 |
WO2006103025A1 (de) | 2006-10-05 |
ATE410674T1 (de) | 2008-10-15 |
DE102005013969A1 (de) | 2006-10-05 |
JP4896124B2 (ja) | 2012-03-14 |
DE502006001754D1 (de) | 2008-11-20 |
EP1864115B8 (de) | 2009-05-27 |
EP1864115B1 (de) | 2008-10-08 |
US20080007735A1 (en) | 2008-01-10 |
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