JP2008528307A - 5-bar mechanism with dynamic balancing means and method for dynamically balancing a 5-bar mechanism - Google Patents

Abstract

A device and a method for manipulating an object, in particular for manipulating electronic components, which do not have the disadvantages in the prior art, or at least have few of those disadvantages, are operable at high speed.
The present invention relates to a device for manipulating an object, in particular for manipulating electronic components. This device has a rod mechanism (1, 20, 40, 50, 60, 80), two independent actuators (4, 5, 23, 24, 43, 81), and dynamic reaction forces and / or reaction moments. It comprises an equilibrium mechanism (53, 54, 63 to 66, 86) for correcting. The invention also relates to a method for operating an object, in particular an electronic component, using such a device.
[Selection] Figure 3

Description

  The present invention relates to a device for manipulating an object, in particular for manipulating electronic components. The invention also relates to a method for operating an object, in particular an electronic component, using such a device.

  Various types of manipulators are used for manipulating objects, in particular for operations such as gripping, displacing and lowering electronic components. Examples thereof include a carriage and a robot arm that are movable along a right angle guide. Such a manipulator can function with high positional accuracy, but has the disadvantage that operational acceleration is limited. If it is necessary to function with very high accuracy, a powerful frame can also be used to prevent unwanted movement of the frame resulting from the reaction forces and reaction moments associated with the acceleration of the manipulator and the mechanical parts assembled to it. You must prepare. In the electronic component manufacturing and / or processing industry, as manufacturing speeds increase, existing manipulators are increasingly limiting the further optimization of such processes.

  The object of the present invention is to provide a device and a method for manipulating an object, in particular for manipulating electronic components, which can be operated at high speed, without the disadvantages in the prior art, or at least less of those disadvantages. That is.

  For this purpose, the present invention provides a device for manipulating an object, in particular for manipulating electronic components, comprising: A rod mechanism with at least two master rods. A slave rod is pivotally engaged with each of the master rods, and the slave rods are coupled to each other at a position away from the master rod. Two actuators that engage each of the master rods. These actuators can be operated independently of each other. And an equilibrium mechanism for correcting dynamic forces during the movement of the rod mechanism. The rod mechanism is also called a rod assembly. The position defined by the slave rods can be completely controlled by manipulating at least a single degree of freedom of each of the mechanism's master rods. An actuator (also referred to as a drive mechanism) need only have a single degree of freedom of movement and can be further coupled to a fixed field and thus can be implemented in a simple manner. Thus, the dynamic mass of the device can be held fairly limited, and the actuator need not form part of the dynamic mass. The small dynamic mass reduces the force that generates vibrations in the frame. In particular, when the electronic component such as a semiconductor is displaced, the mass of the displaced product is very small, so that the equilibrium mechanism can be adapted to the inertia of the rod mechanism. Therefore, in such an application where the load carrying capacity of the manipulator is very small, operation at (very) high acceleration is possible. It is exactly the manipulator according to the invention that makes this possible without the need for very expensive means for this purpose. The presence of a balancing mechanism for force correction also prevents a substantial reaction force resulting from being applied by the drive means (fixed field on which the drive means forms part). As a result, the frame of the manipulator and the fixing of the frame to the fixed field can be realized relatively easily without generating vibration.

  The balance mechanism for dynamic force correction can include force balancing consisting of a counter body (balance weight) assembled to the rod mechanism. Such a structure is very simple and does not require complex control. This is because the mechanical coupling of the manipulator and the associated counter body (or optionally a single counter body) facilitates the good generation of the desired corrected equilibrium force. Another possibility is that, for force correction, the balancing mechanism consists of at least one body actuated by a correction drive that can be displaced separately from the rod mechanism. Such a balancing mechanism is usually controlled by electronic control. Such an electronically controlled balancing mechanism can be placed away from the rod mechanism and provides greater freedom in construction. Furthermore, the balancing mechanism no longer needs to form part of the dynamic mass and the structure of the rod assembly can be very light. It should be noted that, of course, there is also the possibility of combining an electronically controlled balancing mechanism with a force correction with a counter body assembled to the rod mechanism. Finally, it should be noted that force correction can be performed in all directions (3 degrees of freedom), but only in a limited number of directions, ie with less than 3 degrees of freedom. It is also possible to select. Employing such limited correction of force can at least partially correct the most destructive reaction force, but not another reaction force or other reaction forces.

  In practice, the slave rod carries the machining element. Such processing elements consist of, for example, a head with mechanically or pneumatically controllable grippers, cameras, various types of tools, coupling parts for interacting with various processing elements and the like. The slave rods can be directly connected to each other or can be connected via another element, such as a coupling component.

  The actuator that engages the two master rods can generate rotational drive motion by, for example, two independently operated servomotors. Therefore, in order to make the assembly compact, it is possible to arrange the rotation axes of the rotary actuator coaxially, that is, to arrange these rotation axes in line with each other. On the other hand, it is also possible to generate a linear drive motion in an actuator that engages two master rods so that the master rods can move relative to each other (eg, in a reciprocating or intermittent manner). The reciprocating actuators can be arranged parallel to each other, for example in the form of a parallel arrangement of linear motors. Alternatively, the master rod can be engaged with a drive rod, one of which is rotationally driven to convert rotational motion into linear motion. Depending on the conditions (total available space, energy consumption, required accuracy, etc.), it is possible to select a special type of drive. Finally, it should be noted that one master rod can be driven to rotate and the other master rod can be driven linearly.

  In addition, if the device also comprises a balancing mechanism for moment correction (torque correction) of the reaction moment (torque) generated by the displacement of the rod assembly, this is an additional advantage. By employing such an additional balancing mechanism, the manipulator can be dynamically balanced in a much larger range. This provides the possibility that the resulting reaction forces and reaction moments will even be completely absent (at least in theory), so that the manipulator (at least in theory) There will be no contact at all. Therefore, the advantages described above with respect to the advantages of the balancing mechanism for force correction also apply with respect to eliminating the resulting moments. It should also be noted about dynamic moment correction that moment correction can be realized in all directions (with 3 degrees of freedom), but only in a limited number of directions, ie with less than 3 degrees of freedom. It is also possible to select as follows. By employing such limited moment correction, the most destructive moment can be corrected at least partially. However, the other moment or other moments are not corrected.

  The balance mechanism for moment correction can be embodied to comprise at least one counter rotating body assembled to the rod mechanism. Conversely, the balancing mechanism for moment correction can consist of at least one body that can be displaced separately from the rod mechanism and is actuated by a correction drive. As mentioned earlier, this second variant requires electronic control, but it can also be located away from the rod mechanism. Once again, the advantages of electrical control are that the rod assembly can be made relatively light and that the total inertia can be limited.

  Further, when a balance mechanism for moment correction is assembled to a balance mechanism for force correction, a (synergistic) advantage can be achieved.

  The invention also provides a method comprising the following processing steps for manipulating an object, in particular for manipulating electronic components, by using a device according to any of the preceding claims. A) The two actuators engaged with the master rod of the rod mechanism are controlled independently. And B) at least partially correcting the reaction force (and / or reaction moment) generated as a result of the displacement of the rod mechanism by at least one balancing mechanism. For the advantages of such a method, reference should be made to the above-mentioned advantages regarding the balancing mechanism of the device according to the invention.

  In this way, it is also possible to mechanically couple the action of the balancing mechanism to the rod assembly or to electrically control the action of the balancing mechanism. Electrical control is possible by controlling an actuator that engages the rod mechanism and / or based on a sensor arranged for this purpose.

  The invention will be further described based on the non-limiting examples shown in the following figures.

  FIG. 1A shows a rod mechanism 1 with two master rods 2, 3 that can be rotated by servo motors 4, 5 (to arrows R1 and R2). Servo motors 4 and 5 are coupled to a fixed field via motor supports 6 and 7. Slave rods 8 and 9 are engaged with the master rods 2 and 3, respectively. The master rod 2 and the slave rod 8 are connected to each other via a hinge 10 in a freely swingable manner. Similarly, the master rod 3 and the slave rod 9 are coupled to each other via a hinge 11 in a freely swingable manner. The position of the head 12 supported by the slave rods 8 and 9 can be completely controlled by the control drive of the servo motors 4 and 5.

  FIG. 1B shows a rod mechanism 20 having two master rods 21, 22 that can be displaced only in the length direction (arrows L 1 and L 2) by means of linear drives 23, 24. These linear drives 23, 24 are coupled to the fixed field via supports 25, 26. The master rods 21 and 22 are coupled to slave rods 29 and 30 via hinges 27 and 28. The slave rods 29 and 30 support the head 31 and the position thereof is determined from the operation result of the linear drives 23 and 24.

  FIG. 1C shows a rod mechanism 40 that is very similar to the rod mechanism 1 shown in FIG. 1A. The master rods 41 and 42 are driven by two separate motors, but only one motor 43 is shown. This is due to the fact that only the upper motor 43 is visible in the figure because the motors are arranged in alignment with each other. For details of the rod mechanism 40, reference should be made to the description relating to FIG. 1A.

  FIG. 2 schematically shows a manipulation device 50 according to the invention. The device 50 includes two master rods 51, 52, which include weights 53, 54 that form a balance mechanism for force correction. For further description of this manipulation device 50, reference should be made to FIGS. 1A to 1C.

  FIG. 3 schematically shows a manipulation device 60 according to the invention with master rods 61, 62. These master rods are provided with weights 63, 64 that form a balance mechanism for force correction. However, the manipulation device 60 also includes a balancing mechanism for moment correction. This balancing mechanism for moment correction is formed from two rotatable weights 65, 66. These weights rotate in opposite directions when the rod mechanism 60 rotates due to the presence of two actuating wheels 67, 68 that couple to the master rods 61, 62 and engage inside the ring 69 in a stationary position. To do. Thus, the rod mechanism can be compensated in a fully dynamic manner, with no resultant (or substantially no) resultant force from the support 70 on the fixed field as a result of the movement of the mechanism 60.

  Finally, FIG. 4 shows a rod assembly 80 corresponding to the rod assembly shown in FIG. 1C. However, this drive 81 is coupled to the central control unit 84 via signal lines 82 and 83. The central control unit 84 calculates the desired correction force and moment and then controls a separate correction unit 86 by means of the output signal line 85. This correction unit 86 is coupled to the same fixed field 87 to which the rod assembly 80 is coupled. Accordingly, the resultant force exerted by the rod assembly 80 and the correction unit 86 can be zero (or very small). The correction unit 86 can be provided with complete correction means (movable in three directions and rotatable in three directions, ie having a mass of 6 degrees of freedom). However, it is also possible to choose to embody correction means with only a limited degree of freedom, ie with a degree of freedom of less than 6. By using such limited correction means, most of the destructive reaction forces and / or reaction moments can be corrected, but less disruptive reaction forces and / or reaction moments are not corrected. Obviously, a correction means with less than 6 degrees of freedom is simpler and less expensive than a complete correction means with 6 degrees of freedom.

1 is a schematic illustration of a rod assembly that is a component of a device according to the present invention. 2 is a schematic illustration of an alternative variant embodiment of a rod assembly that is a component of a device according to the invention. 2 is a schematic representation of a second alternative embodiment of a rod assembly that is a component of a device according to the invention. 1 is a schematic illustration of a manipulation device according to the present invention comprising a balancing mechanism for force correction. 2 is a schematic illustration of an alternative variant embodiment of a manipulation device according to the invention comprising a balancing mechanism for force correction and a balancing mechanism for moment correction. 2 is a schematic illustration of a second alternative variant embodiment of a manipulation device according to the invention comprising an electronically controlled balancing mechanism.

Claims (16)

A device for operating an object, in particular an electronic component,
A rod mechanism comprising at least two master rods, each of the master rods being pivotally engaged with a slave rod, and the slave rods being coupled to each other at a position away from the master rod ,
A device comprising two actuators that engage each of the master rods and are operable independently of each other, and a balance mechanism for correcting dynamic forces during movement of the rod mechanism.   The device according to claim 1, wherein the balance mechanism for force correction comprises a counter body assembled to the rod mechanism.   3. Device according to claim 1 or 2, characterized in that the balancing mechanism for force correction consists of at least one body which is displaceable separately from the rod mechanism and is actuated by a correction drive.   A device according to any of the preceding claims, characterized in that the slave rod carries a working element.   A device according to any of the preceding claims, characterized in that the actuator engaging the two master rods generates a rotational drive movement.   6. Device according to claim 5, characterized in that the rotational axis of the rotary actuator is arranged in parallel, preferably coaxially.   6. A device according to any one of the preceding claims, characterized in that the actuator engaging the two master rods generates a linear drive motion.   8. Device according to claim 7, characterized in that the reciprocating actuators are arranged parallel to each other.   A device according to any of the preceding claims, characterized in that the device also comprises a balancing mechanism for correcting moments generated by the displacement of the rod assembly.   The device according to claim 9, characterized in that the balancing mechanism for moment correction comprises at least one counter rotating body assembled to the rod mechanism.   11. Device according to claim 9 or 10, characterized in that the balancing mechanism for moment correction consists of at least one body which is displaceable separately from the rod mechanism and is actuated by a correction drive.   12. A device according to any one of claims 9 to 11, characterized in that the balancing mechanism for moment correction is assembled to the balancing mechanism for force correction. A method for manipulating an object, in particular an electronic component, using a device according to any of the preceding claims,
A) a processing step for independently controlling two actuators engaged with the master rod of the rod mechanism, and B) at least one counterbalance mechanism that generates at least one reaction force as a result of the displacement of the rod mechanism. A method comprising processing steps for partial correction.   The method of claim 13, wherein the action of the balancing mechanism is mechanically coupled to the rod assembly.   15. A method according to claim 13 or 14, characterized in that the action of the balancing mechanism is electrically controlled. The method according to any of claims 13 to 15, characterized in that the action of the balancing mechanism is partly mechanically coupled to the rod assembly and partly electrically controlled.

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