CN101137468A - Five-bar mechanism with dynamic balancing means and method for dynamically balancing a five-bar mechanism - Google Patents
Five-bar mechanism with dynamic balancing means and method for dynamically balancing a five-bar mechanism Download PDFInfo
- Publication number
- CN101137468A CN101137468A CNA2006800079924A CN200680007992A CN101137468A CN 101137468 A CN101137468 A CN 101137468A CN A2006800079924 A CNA2006800079924 A CN A2006800079924A CN 200680007992 A CN200680007992 A CN 200680007992A CN 101137468 A CN101137468 A CN 101137468A
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- CN
- China
- Prior art keywords
- balanced controls
- linkage
- mobile jib
- bar
- balanced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0008—Balancing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1602—Programme controls characterised by the control system, structure, architecture
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Manipulator (AREA)
- Control Of Metal Rolling (AREA)
- Transmission Devices (AREA)
Abstract
The invention relates to a device for manipulating objects, more particularly for manipulating electronic components, with a rod mechanism (1, 20, 40, 50, 60, 80), two independent actuators (4, 5, 23, 24, 43, 81) and a balancing mechanism (53, 54, 63-66, 86) for compensating dynamic reactive forces and/or reactive moments. The invention also relates to a method for manipulating objects, more particularly manipulating electronic components, using such a device.
Description
Technical field
The present invention relates to be used for operand, more particularly be used for the device of operation electronic component.The invention still further relates to this device operand, the more particularly method of operation electronic component used.
Background technology
For operand, for example more particularly clamp, move and put down electronic unit, used various types of manipulators.The example is the carriage (carriage) and the manipulator that can move along right-angle guides.This manipulator can operate under high position precision, but has following defective, that is, the acceleration of their operations is restricted.Operation accurately if desired, the manipulator also must be provided with heavy frame to prevent because undesirable frame movement that the reaction force relevant with the acceleration of manipulator and the machine parts that is assembled together with it and the moment of reaction cause.Because more and more faster speed of production in the industrial production of manufacturing and/or processing electronic unit, existing manipulator more and more limits the further optimization to this processing.
Summary of the invention
The object of the present invention is to provide to be used for operand, more particularly therefore the apparatus and method of operation electronic component can operate at a high speed under the situation that does not have or have at least defective in the less prior art.
The present invention provides a kind of operand that is used for for this purpose, the device of operation electronic component more particularly comprises: linkage, and it is provided with at least two mobile jibs, described mobile jib have pivotal engagement on each mobile jib from bar, describedly interconnect from bar and mobile jib separated by a distancely; Two actuators that engage with each mobile jib, described actuator can be operated independently of one another; With the balanced controls that are used in linkage motion compensating during dynamic force.Linkage also is called the bar assembly.The single at least free degree of each mobile jib activates and controls fully by the position of defining from bar in the described mechanism by making.Actuator (it can also be called driving mechanism) can be realized in simple mode, because they only need provide single freedom of motion and be connected on the fixture (fixed world).The therefore extremely limited maintenance of energy of the dynamic mass of described device; Actuator needn't form the part of dynamic mass.Little dynamic mass has reduced the active force that can cause vibration in framework.Particularly in semi-conductive electronic unit moving process for example, the product quality that is used to move is also minimum, and this makes the inertia adjustment mechanism according to linkage become possibility.Can keep in the extremely low this application in manipulator's bearing capacity is to operate under (utmost point) high acceleration clearly.Be that making above-mentioned situation become possible manipulator under the situation that need not utmost point expensive measures is essential to this purpose clearly.The existence that is used for the balanced controls of force compensating has also prevented to be applied to by drive unit near the sizable synthetic reaction force of (drive unit forms its a part of fixture).This has following result, manipulator's framework and framework anchored on the fixture and can relatively easily realize under not vibrative situation.
The balanced controls that are used for compensation of dynamic forces can be provided with thrust balancing device (forcebalancing), and it comprises the balanced body (counterweight) that is assembled together with linkage.This structure can be very simply and is not needed complicated control; The mechanical attachment of manipulator and relational balance body (or optionally, single balanced body) has guaranteed advantageously to produce the compensation balance power of wishing.Another possibility is to comprise at least one main body concerning the balanced controls that are used for force compensating, and it can be independent of the linkage motion and operate by the compensation drive unit.Usually utilize electronic-controlled installation that this balanced controls are controlled.This electronically controlled balanced controls can with the linkage segment distance of being separated by, this structurally provides bigger freedom.Also no longer need balanced controls to become the part of dynamic mass, thereby produce extremely light bar modular construction.It should be noted that, also exist certainly to make electronically controlled balanced controls and the combined possibility of force compensating device that is provided with the balanced body that is assembled together with linkage.At last, it should be noted that the dynamic force balance can be carried out along all directions (3 frees degree), but also can only compensate selectively along a limited number of direction (that is, less than 3 frees degree) realizable force.Use this limited force compensating, most of destructive reaction force can compensate at least in part, and another reaction force or other reaction forces are not compensated.
In fact, will carry treatment element from bar.This treatment element for example can be by the head that has grabbing device, camera, various types of instrument, be used for forming with interactional coupling components of various treatment elements etc., and described grabbing device is controlled by machinery or pneumatic mode.Can be connected to each other directly from bar, perhaps another element by for example coupling components connects.
Be bonded on two actuators on the mobile jib and for example can produce the rotation actuation movement by the servomotor of two independent operations.Therefore, for compact assembly, the rotating shaft coaxle ground of revolving actuator might be arranged that promptly, these rotating shafts are arranged in line each other.On the other hand, also may make to be bonded on two actuators generation Linear Driving motions on the mobile jib, make that mobile jib can (for example with vibration or discontinuous manner) reciprocally mobile possibility that becomes.Linear actuators for example can be arranged parallel to each other, and for example, adopts the mode that is arranged in parallel such as linear motor.Alternatively, also can thinkablely be, mobile jib be engaged by drive rod, and described drive rod drives in a sideway swivel, and will rotatablely move and convert linear movement to.According to circumstances (for example total free space, energy consumption, precision prescribed etc.) select the drive unit of particular type.At last, it should be noted that the rotation of one of mobile jib is driven, and another mobile jib drives with linear movement.
In addition, additionally advantageously, device also comprises the balanced controls that are used for the moment of reaction (moment of torsion) that is moved generation by the bar assembly is carried out torque compensation (torque compensation).Utilize this additional balanced controls, the manipulator can be in the enterprising action attitude of bigger degree balance, described balanced controls provide the possibility of eliminating (at least in theory) the synthetic reaction force and the synthetic moment of reaction fully, therefore, manipulator's (at least in theory) does not produce contact in its vicinity.Therefore the above-mentioned advantage relevant with the advantage of the balanced controls that are used for force compensating also be applicable to elimination (ending) resultant moment.With regard to dynamic force moment compensation, be also noted that torque compensation can realize along all directions (3 frees degree), but also can only realize torque compensation selectively along a limited number of direction (that is, less than 3 frees degree).Use this limited torque compensation, most of destructive moment can compensate at least in part, and another moment or other moment are not compensated.
The balanced controls that are used for torque compensation can comprise at least one the balance rotating body that is assembled together with linkage.On the contrary, for the balanced controls that are used for torque compensation also possible be to comprise at least one main body, it can be independent of linkage motion and operate by the compensation drive unit.As mentioned above, this second distortion needs electronic controller, but the latter also can with the linkage segment distance of being separated by.The advantage of electronic controller also is to produce lighter relatively bar modular construction and limited total inertia.
Be assembled together with the balanced controls that are used for force compensating if be used for the balanced controls of torque compensation, then can realize further (cooperation) advantage.
The present invention also provides and has been used for operand, the method of operation electronic component more particularly, this method is used as any described device in the claim formerly, and comprise step: A) control two actuators that engage with the mobile jib of linkage and B independently) utilize at least one balanced controls to compensate at least in part because the reaction force (and/or moment of reaction) that the linkage displacement produces.For the advantage of this method, relate to according to the above-mentioned advantage of the corresponding to balanced controls of device of the present invention.
Be connected to bar assembly, the perhaps operation of Electronic Control balanced controls with also may making operating machine of balanced controls in the method.Can control be bonded on the actuator on the linkage and/or the basis of the sensor arranged for this purpose on carry out electric control.
Description of drawings
To further explain the present invention according to the non-restrictive example embodiment that figure below shows below.Wherein:
Figure 1A is the schematic diagram of bar assembly, and wherein said bar assembly is as the parts according to device of the present invention;
Figure 1B is the schematic diagram of the optional embodiment distortion of bar assembly, and wherein said bar assembly is as the parts according to device of the present invention;
Fig. 1 C is the schematic diagram of second embodiment distortion of bar assembly, and wherein said bar assembly is as the parts according to device of the present invention;
Fig. 2 is the operations according to the instant invention schematic representation of apparatus, and described operating means is provided with the balanced controls that are used for force compensating;
Fig. 3 is the schematic diagram of the optional embodiment distortion of operations according to the instant invention device, and described operating means is provided with balanced controls that are used for force compensating and the balanced controls that are used for torque compensation; With
Fig. 4 is the schematic diagram of the second optional embodiment distortion of operations according to the instant invention device, and described operating means is provided with electronically controlled balanced controls.
The specific embodiment
Figure 1A has shown the linkage 1 that has two mobile jibs 2,3, and described mobile jib can utilize servomotor 4,5 to rotate (referring to arrow R1 and R2).Servomotor 4,5 is connected on the fixture by motor bearing 6,7.Each mobile jib 2,3 with engage from bar 8,9 accordingly.Mobile jib 2 and interconnect in the mode that freely pivots by articulated elements 10 from bar 8.Similarly, mobile jib 3 and interconnect in the mode that freely pivots by articulated elements 11 from bar 9.Position by the head 12 that supports from bar 8,9 can be by the controlled driving of servomotor 4,5 and control fully.
Figure 1B has shown the linkage 20 that has two mobile jibs 21,22, and described mobile jib can only utilize linear actuating device 23,24 longitudinally (referring to arrow L
1And L
2) move.These linear actuating devices 23,24 are connected on the fixture by bearing 25,26.Mobile jib 21,22 is connected to from bar 29,30 by articulated elements 27,28.From bar 29,30 supporting heads 31, its position is determined by operation linear actuating device 23,24.
Fig. 1 C has shown the linkage 40 very similar to linkage shown in Figure 1A 1.Mobile jib 41,42 is driven by two separate motor, wherein only sees a motor 43.This is the result of the following fact, and promptly motor is in straight line, make have only top motor 43 in view as seen.Further describing with reference to Figure 1A of this linkage 40 described.
Fig. 2 has schematically shown operations according to the instant invention device 50.Device 50 is provided with two mobile jibs 51,52, and described mobile jib 51,52 is provided with counterweight 53,54, and described counterweight is formed for the balanced controls of force compensating.With reference to Figure 1A-1C to further describe this operating means 50.
Fig. 3 schematically illustrates the operations according to the instant invention device 60 that has mobile jib 61,62, and described mobile jib is provided with the counterweight 63,64 of the balanced controls that are formed for force compensating.But operating means 60 also is provided with the balanced controls that are used for torque compensation.The balanced controls that are used for torque compensation are made up of two rotation counterweights 65,66, described counterweight when linkage 60 rotation because the former thereby rotation in opposite direction of two driving wheels 67,68, described driving wheel be connected on the mobile jib 61,62 and with the interior side engagement of the ring 69 that is in a fixed position.Therefore, linkage can compensate with complete dynamical fashion, makes that the bearing 70 on the fixture does not apply make a concerted effort (or in fact not applying with joint efforts) owing to the result of mechanism's 60 motions.
At last, Fig. 4 has shown and the corresponding bar assembly 80 of bar assembly shown in Fig. 1 C.But drive unit 81 is connected on the central controller 84 by holding wire 82,83.Central controller 84 calculates the balancing force and the moment of wishing, subsequently by output signal line 85 control separate compensation unit 86.This compensating unit 86 is connected on the identical fixture 87 that is connected with bar assembly 80.Therefore, to make a concerted effort be zero (or minimum) to the active force that bar assembly 80 and compensating unit 86 are applied.Compensating unit 86 can be provided with the full remuneration device and (have and can move and along the rotation of three directions along three directions, the mass that promptly has 6 frees degree), only have a limited number of free degree but can also choose to comprise, that is, have compensation arrangement less than 6 frees degree.Use this limited compensation arrangement, can compensate the most of destructive reaction force and/or the moment of reaction, but the destructive reaction force of smaller portions and/or the moment of reaction are not compensated.It is evident that to have and compare more simple and cheap with full remuneration device with 6 frees degree less than the compensation arrangement of 6 frees degree.
Claims (16)
1. be used for operand, the device of operation electronic component more particularly comprises:
Linkage, it is provided with at least two mobile jibs, described mobile jib have pivotal engagement on each mobile jib from bar, describedly interconnect from bar and mobile jib separated by a distancely;
Two actuators that engage with each mobile jib, described actuator can be operated independently of one another; With
Be used for balanced controls in linkage motion compensating during dynamic force.
2. device as claimed in claim 1 is characterized in that, the balanced controls that are used for force compensating comprise the balanced body that is assembled together with linkage.
3. device as claimed in claim 1 or 2 is characterized in that, the balanced controls that are used for force compensating comprise at least one main body, and it can be independent of the linkage motion and operate by the compensation drive unit.
4. as formerly any described device in the claim is characterized in that, and is described from bar carrying treatment element.
5. as formerly any described device in the claim is characterized in that, the actuator that engages with two mobile jibs produces and rotates actuation movement.
6. device as claimed in claim 5 is characterized in that, parallel, the preferably placement coaxially of the rotating shaft of described revolving actuator.
7. as any described device among the claim 1-5, it is characterized in that the actuator that engages with two mobile jibs produces the Linear Driving motion.
8. device as claimed in claim 7 is characterized in that described linear actuators is placed in parallel with each other.
9. as formerly any described device in the claim is characterized in that, described device also comprises the balanced controls that are used for the moment that is produced by the displacement of bar assembly is carried out torque compensation.
10. device as claimed in claim 9 is characterized in that, the balanced controls that are used for torque compensation comprise at least one the balance rotating body that is assembled together with linkage.
11., it is characterized in that the balanced controls that are used for torque compensation comprise at least one main body as claim 9 or 10 described devices, it can be independent of the linkage motion and operate by the compensation drive unit.
12., it is characterized in that the balanced controls that are used for torque compensation are assembled together with the balanced controls that are used for force compensating as any described device among the claim 9-11.
13. be used for operand, the method for operation electronic component is more particularly used as any described device in the claim formerly, comprises step:
A) independently two actuators engaging with the mobile jib of linkage of control and
B) utilize at least one balanced controls to compensate at least in part because the reaction force that the linkage displacement produces.
14. method as claimed in claim 13 is characterized in that, the operation of balanced controls and bar assembly mechanical attachment.
15., it is characterized in that the operation of balanced controls is subjected to Electronic Control as claim 13 or 14 described methods.
16., it is characterized in that the operation part of balanced controls ground machinery is connected on the bar assembly as any described method among the claim 13-15, and Electronic Control partly.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL1028138A NL1028138C2 (en) | 2005-01-27 | 2005-01-27 | Device and method for manipulating an object. |
| NL1028138 | 2005-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101137468A true CN101137468A (en) | 2008-03-05 |
Family
ID=34974959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006800079924A Pending CN101137468A (en) | 2005-01-27 | 2006-01-26 | Five-bar mechanism with dynamic balancing means and method for dynamically balancing a five-bar mechanism |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP2008528307A (en) |
| KR (1) | KR20070102564A (en) |
| CN (1) | CN101137468A (en) |
| NL (1) | NL1028138C2 (en) |
| TW (1) | TW200631883A (en) |
| WO (1) | WO2006080846A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101734024B (en) * | 2008-11-20 | 2011-12-21 | 塔工程有限公司 | Device for offsetting repulsive force, method for setting up its mass, method for offsetting repulsive force using it, and dispenser having it |
| CN111664233A (en) * | 2019-03-08 | 2020-09-15 | 中国科学院长春光学精密机械与物理研究所 | Five-connecting-rod spoke mechanism with variable degree of freedom |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009030755B4 (en) | 2009-06-27 | 2013-10-10 | Fritz Kraft | Handling device with scissor arm |
| CN105697703B (en) * | 2016-03-15 | 2018-04-10 | 西安电子科技大学 | A kind of three-stable state implementation method of complete submissive five-rod |
| CN105805252A (en) * | 2016-05-06 | 2016-07-27 | 广州市兴世机械制造有限公司 | Dual-drive five-linkage mechanism |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4712971A (en) * | 1985-02-13 | 1987-12-15 | The Charles Stark Draper Laboratory, Inc. | Control arm assembly |
| US20020182036A1 (en) * | 2001-06-04 | 2002-12-05 | Applied Materials, Inc. | Semiconductor wafer handling robot for linear transfer chamber |
-
2005
- 2005-01-27 NL NL1028138A patent/NL1028138C2/en not_active IP Right Cessation
-
2006
- 2006-01-24 TW TW095102560A patent/TW200631883A/en unknown
- 2006-01-26 JP JP2007553060A patent/JP2008528307A/en active Pending
- 2006-01-26 CN CNA2006800079924A patent/CN101137468A/en active Pending
- 2006-01-26 KR KR1020077019156A patent/KR20070102564A/en not_active Application Discontinuation
- 2006-01-26 WO PCT/NL2006/000048 patent/WO2006080846A1/en active Application Filing
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101734024B (en) * | 2008-11-20 | 2011-12-21 | 塔工程有限公司 | Device for offsetting repulsive force, method for setting up its mass, method for offsetting repulsive force using it, and dispenser having it |
| CN111664233A (en) * | 2019-03-08 | 2020-09-15 | 中国科学院长春光学精密机械与物理研究所 | Five-connecting-rod spoke mechanism with variable degree of freedom |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008528307A (en) | 2008-07-31 |
| WO2006080846A1 (en) | 2006-08-03 |
| KR20070102564A (en) | 2007-10-18 |
| TW200631883A (en) | 2006-09-16 |
| NL1028138C2 (en) | 2006-07-31 |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |