JP2008310193A - Polarization correction optical system and microscope device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polarization correction optical system that corrects changes in a polarization state caused by an optical system constituting a microscope device, and to provide a microscope device equipped with the polarization correction optical system. <P>SOLUTION: A polarizing microscope optical system includes a polarizer 1, a condenser lens 2, an objective lens 3 and an analyzer 4, wherein changes in a polarization state occurring in the condenser lens 2 and the objective lens 3 are corrected by disposing a first polarization correction optical system 10 comprising a first optical element 11, a first quarter-wave plate 12, a second optical element 13 and a first half-wave plate 14, in this sequence, between the polarizer 1 and the condenser lens 2, and by disposing a second polarization correction optical system 20 comprising a second half-wave plate 21, a third optical element 22, a second quarter-wave plate 23 and a fourth optical element 24, in this sequence, between the objective lens 3 and the analyzer 4. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a polarization correction optical system and a microscope apparatus including the polarization correction optical system.

  A polarizing microscope is an apparatus used for observing a sample having birefringence using polarized light. Such a microscope apparatus is configured by arranging two polarizers on the illumination side and the imaging side with their transmission axes orthogonal to each other (this arrangement is referred to as “cross Nicol”). Light that has passed through a polarizer on the imaging side (this is called an “analyzer”) by changing the polarization state by placing an object that changes the polarization state between two polarizers, that is, a sample having birefringence. Is configured to observe the characteristics of the sample. Therefore, in such a microscope apparatus, in order to visualize a slight change in the polarization state due to the sample, it is avoided as much as possible that the optical system other than the sample, that is, the optical system constituting the microscope apparatus causes a change in the polarization state. There must be. However, in reality, since a complicated optical system is arranged between two polarizers, the polarization state changes, and the ability to detect the birefringence of the sample is reduced. In particular, this problem becomes more conspicuous when observing using a high magnification, high numerical aperture optical system.

The change in polarization state mainly depends on two causes. One is that the reflectance of the two polarized light components, P-polarized light and S-polarized light incident on the optical system constituting the microscope apparatus is different for each incident angle, and the other is that the polarization characteristic of the antireflection coating is the incident angle. It has dependency. Because of these reasons, linearly polarized light that has passed through the illumination side polarizer is elliptically polarized when it reaches the analyzer located on the imaging side, and its long axis is not orthogonal to the analyzer. A part of the light passes through regardless of the birefringence of the sample. As means for solving this problem, a method of using a polarization correction optical element made of a lens called a rectifier and a method of performing polarization correction with higher accuracy by coating the refractive surface of the rectifier have been developed. (For example, refer to Patent Document 1).
JP-A-11-72710

  However, in the rectifier, although the rotation of the polarization plane is corrected, there is a problem that the elliptical polarization cannot be corrected by the antireflection coating provided on the incident surface of the optical element. It is difficult to apply a coating as designed on a surface inclined away from the optical axis. Furthermore, in order to correct the polarization of different optical systems, it is necessary to design a new coat, which is a complicated operation.

  The present invention has been made in view of such a problem, and an optical element having a refractive surface and a quarter-wave plate or a half-wave plate are combined and disposed between a polarizer and an analyzer. An object of the present invention is to provide a polarization correction optical system that corrects a change in the polarization state caused by the corrected optical system, and by providing the polarization correction optical system, a change in the polarization state due to the correction optical system is improved. An object of the present invention is to provide a corrected microscope apparatus.

  In order to solve the above-described problem, the polarization correction optical system according to the present invention includes a change in polarization state of the light transmitted through the optical system to be corrected by the optical system to be corrected (for example, the condenser lens 2 and the objective lens 3 in the embodiment). The tilt of the polarization plane and the retardation that occur in the light transmitted through the light are corrected. In addition, the polarization correction optical system according to the first aspect of the present invention includes a first polarization correction optical system (for example, the first polarization correction optical system 10 in the embodiment) disposed on the light source side of the optical system to be corrected. And a second polarization correction optical system (for example, the second polarization correction optical system 20 in the embodiment) disposed on the image side of the optical system to be corrected. The first polarization correction optical system transmits light. In order, a first optical element having at least one refractive surface, a first quarter-wave plate, a second optical element having at least one refractive surface, and a first half. A second wavelength correcting optical system, a second half-wave plate, a third optical element having at least one refracting surface, and a second optical element. And a fourth optical element having at least one refracting surface. It is made.

  Further, the polarization correction optical system according to the second aspect of the present invention (for example, the third polarization correction optical system 10 ′ in the embodiment) is disposed on the light source side of the optical system to be corrected, and has at least one surface in the order in which light is transmitted. The first optical element having the above refracting surface, a quarter-wave plate, a second optical element having at least one refracting surface, and a half-wave plate.

  Further, the polarization correction optical system according to the third aspect of the present invention (for example, the fourth polarization correction optical system 20 ′ in the embodiment) is arranged on the image side of the optical system to be corrected, and is divided in half in the order in which the light is transmitted. It comprises a wave plate, a first optical element having at least one refracting surface, a quarter wave plate, and a second optical element having at least one refracting surface.

  A polarization correction optical system according to the fourth aspect of the present invention includes a first polarization correction optical system (for example, the fifth polarization correction optical system 30 in the embodiment) disposed on the light source side of the correction target optical system, The second polarization correction optical system (for example, the sixth polarization correction optical system 40 in the embodiment) disposed on the image side of the correction optical system, and the first polarization correction optical system in the order in which light is transmitted. A first optical element having at least one refractive surface, a first quarter-wave plate, a second optical element having at least one refractive surface, and a second quarter. And a second polarization correction optical system, in the order in which light is transmitted, a third quarter-wave plate, a third optical element having at least one refracting surface, 4 and a fourth optical element having at least one refracting surface. It is.

  In addition, the polarization correction optical system according to the fifth aspect of the present invention (for example, the seventh polarization correction optical system 30 ′ in the embodiment) is arranged on the light source side of the optical system to be corrected and has at least one surface in the order in which light is transmitted. A first optical element having the above refractive surface, a first quarter-wave plate, a second optical element having at least one refractive surface, and a second quarter-wave plate; Consists of

  Furthermore, the polarization correction optical system according to the sixth aspect of the present invention (for example, the eighth polarization correction optical system 40 'in the embodiment) is arranged on the image side of the optical system to be corrected, and in the order in which light is transmitted, A quarter-wave plate, a first optical element having at least one refracting surface, a second quarter-wave plate, and a second optical element having at least one refracting surface; Consists of

  In order to solve the above-described problem, a microscope apparatus according to the present invention has a predetermined polarization characteristic, a polarizer that polarizes light from a light source, and condenses light transmitted through the polarizer. A condenser lens that irradiates the sample, an objective lens that collects light from the sample to form a magnified image, and has a predetermined polarization characteristic, and is disposed between the objective lens and the magnified image. An analyzer is provided, and any one of the above-described polarization correction optical systems is arranged between the polarizer and the condenser lens or between the objective lens and the analyzer.

  When the polarization correction optical system and the microscope apparatus according to the present invention are configured as described above, changes in the polarization state caused by the condenser lens and the objective lens (that is, the optical system to be corrected) constituting the polarization microscope optical system, Correction can be performed with high accuracy by a polarization correction optical system that combines a plurality of optical elements and a quarter-wave plate or a half-wave plate.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows an illumination optical system and an imaging optical system that constitute a polarizing microscope optical system, which includes a polarizer 1, a condenser lens 2, an objective lens 3, and an analyzer 4 in order from a light source (not shown). The sample 5 is arranged between the condenser lens 2 and the objective lens 3. FIG. 2 shows a transmission illumination type microscope apparatus provided with this polarization microscope optical system, and light emitted from the light source 6 is applied to the polarizer 1 through a collector lens 7, a mirror, and the like. The light transmitted through the polarizer 1 becomes linearly polarized light and is condensed by the condenser lens 2 to illuminate the sample 5. Then, the light from the illuminated sample 5 is collected by the objective lens 3 and enters the analyzer 4, and the light transmitted through the analyzer 4 is formed as an enlarged image by the imaging lens 8. This magnified image is observed through the eyepiece 9.

  In such a polarizing microscope optical system, the polarizer 1 and the analyzer 4 are arranged so that their transmission axes are orthogonal to each other (the above-mentioned “Cross Nicol”), and the polarizer 1 and the analyzer 4 If there is no object that changes the polarization state (polarization plane tilt and retardation) during this period, the linearly polarized light that has passed through the polarizer 1 cannot pass through the analyzer 4. However, when a sample 5 having birefringence is arranged between the polarizer 1 and the analyzer 4 and the polarization state of the linearly polarized light transmitted through the polarizer 1 changes, a part of the light passes through the analyzer 4. The observer can observe the image. Note that it is known that the luminance in the visual field at this time is proportional to the amount of retardation of the sample 5 when the amount of retardation is small.

  As described above, the polarization state changes in the condenser lens 2 and the objective lens 3 arranged between the polarizer 1 and the analyzer 4. Therefore, polarized light combining an optical element having a refracting surface with a quarter-wave plate (hereinafter referred to as “λ / 4 plate”) or a half-wave plate (hereinafter referred to as “λ / 2 plate”). An embodiment of a polarization microscope optical system in which a change in the polarization state generated in the condenser lens 2 and the objective lens 3 is corrected using the correction optical system will be described below. The λ / 4 plate is an optical element that alternately converts circularly polarized light and linearly polarized light, and the λ / 2 plate is an optical element that rotates the plane of polarization symmetrically with respect to the fast axis.

  First, as a first embodiment, the optical system of the polarization microscope is configured to correct the change in the polarization state caused by the lenses 2 and 3 for each of the condenser lens 2 and the objective lens 3. 3 will be described. In the polarization microscope optical system according to the first embodiment, the first polarization correction optical system 10 is disposed between the polarizer 1 and the condenser lens 2, and the second polarization correction is performed between the objective lens 3 and the analyzer 4. An optical system 20 is arranged, the first polarization correction optical system 10 mainly corrects the change in the polarization state of the condenser lens 2, and the second polarization correction optical system 20 mainly changes the polarization state of the objective lens 3. Used to correct changes.

  Here, the first polarization correction optical system 10 includes, in order from the polarizer 1 side, a first optical element 11 in which a concave surface and a convex surface are combined in order of a concave lens, a convex lens, and a concave lens. / 4 plate 12, concave lens, and convex lens, the second optical element 13 in which concave and convex surfaces having substantially the same curvature are combined, and the first λ / 2 plate 14 are configured. The second polarization correcting optical system 20 includes, in order from the objective lens 3 side, a third optical element 22 in which a concave surface and a convex surface having substantially the same curvature are combined in the order of the second λ / 2 plate 21, the convex lens, and the concave lens. The second λ / 4 plate 23 includes a fourth optical element 24 in which a concave surface and a convex surface are combined in order of a concave lens, a convex lens, and a concave lens. In the first and second polarization correction optical systems 10 and 20, the first to fourth optical elements 11, 13, 22, and 24 have at least one refracting surface, but are refracted as a whole. It is preferable that it is comprised so that it may not have force.

Next, a method for correcting changes in the polarization state of the condenser lens 2 and the objective lens 3 by the first and second polarization correction optical systems 10 and 20 will be described with reference to FIGS. 5 and 7 show the polarization state of the first or second polarization correcting optical system 10 or 20 on the Poincare sphere, and among the Stokes parameters constituting the Poincare sphere, S ₁ -S. _It shows the state projected on _three planes.

As an example, first, the first polarization correction optical system 10 will be described with reference to FIGS. 4 and 5. The light transmitted through the polarizer 1 is linearly polarized light whose polarization plane is inclined by 45 °, and is located in the state P ₁₀ on the Stokes parameter S ₂ . When is refracted by the refractive surface of the linearly polarized light is made incident on the first optical element 11, the polarization plane of the linearly polarized light is in a state P ₁₁ tilt. Then, comprising a 1 [lambda / 4 when the transmitting plate 12 yuan linearly polarized light, that is, the state P ₁₂ linearly polarized light and the long axis is elliptical polarized light matching the state P _10. Then, when the refracted by the refracting surface is made incident on the second optical element 13, the long axis becomes the state P ₁₃ inclined elliptically polarized light, fast axis in this state is the direction of the original linearly polarized light 1 [lambda / 2 When the light is transmitted through the plate 14, the first λ / 2 plate 14 becomes elliptically polarized with an axisymmetric polarization state P ₁₄ across the fast axis. When linearly polarized light is incident on the condenser lens 2, the condenser lens 2 acts to incline and ellipsize the polarization plane of this linearly polarized light (to change the polarization state in the direction of arrow 2 in FIG. 5). Act on). Therefore, the condenser lens 2, with tilting the polarization plane of the elliptical polarization in the state P _14, act to return to the state of the original linear polarization, resulting in light transmitted through the condenser lens 2 returns to the state P ₁₀ Therefore, the change in the polarization state by the condenser lens 2 is corrected.

On the other hand, as shown in FIGS. 6 and 7, in the second polarization correction optical system 20, the light emitted from the condenser lens 2 is corrected for the change in polarization state by the first polarization correction optical system 10 described above. The plane of polarization is linearly polarized light inclined by 45 ° and is located in the state P ₂₀ on the Stokes parameter S ₂ . When linearly polarized light of the state P ₂₀ passes through the objective lens 3 becomes the state P ₂₁ was ovalization with polarization plane is inclined, the elliptically polarized light in this state P ₂₁ is transmitted through the first 2 [lambda] / 2 plate 21, the first 2 [lambda] / 2 It becomes elliptically polarized light with an axisymmetric polarization state P ₂₂ across the fast axis of the plate 21. Further, when the refracted by the refractive surface by the incidence of elliptically polarized light of the state P ₂₂ to the third optical element 22, the vibration direction and the ellipse of the original linearly polarized light (state P ₂₀₎ major axis was in the state P ₂₃ matches It becomes elliptically polarized light. When the elliptically polarized light in this state P ₂₃ is transmitted through the first 2 [lambda] / 4 plate 23, a state P ₂₄ is linearly polarized light. Finally, when the linearly polarized light in this state P ₂₄ is incident on the fourth optical element 24 and is refracted by the refracting surface, the polarizing surface of this linearly polarized light is tilted and returns to the original linearly polarized state P ₂₀ . The change in the polarization state by the objective lens 3 is corrected.

  As described above, according to the first and second polarization correcting optical systems 10 and 20 according to the first example, the polarization plane inclination and retardation (that is, the change in the polarization state) generated in the condenser lens 2 and the objective lens 3 respectively. ), Four optical elements 11, 13, 22, 24 having a refracting surface and having no refractive power as a whole, two λ / 4 plates 12, 23, and two λ / 2 plates 14, 21 It is possible to correct with high accuracy using only and.

  Next, a second embodiment of the polarizing microscope optical system will be described with reference to FIG. In the first embodiment described above, the first and second polarization correction optical systems 10 and 20 are used to correct the change in the polarization state that occurs in the condenser lens 2 and the objective lens 3. In the second embodiment, a third polarization correction optical system 10 ′ having the same configuration as the first polarization correction optical system 10 in the first embodiment is disposed between the polarizer 1 and the condenser lens 2. The polarization correction optical system 10 'is configured to correct a change in polarization state caused by the condenser lens 2 and the objective lens 3. The configuration and effect of the third polarization correction optical system 10 'are the same as those of the first polarization correction optical system 10 described in the first embodiment, and thus detailed description thereof is omitted.

  FIG. 9 shows a third embodiment of the polarizing microscope optical system. In the third embodiment, a fourth polarization correction optical system 20 ′ having the same configuration as that of the second polarization correction optical system 20 in the first embodiment is disposed between the objective lens 3 and the analyzer 4. The polarization correction optical system 20 ′ is configured to correct a change in polarization state caused by the condenser lens 2 and the objective lens 3. Since the configuration and effect of the fourth polarization correction optical system 20 'are the same as those of the second polarization correction optical system 20 described in the first embodiment, detailed description thereof is omitted.

  In the first to third embodiments described above, the change in the polarization state caused by the condenser lens 2 and the objective lens 3 is corrected by combining an optical element having a refractive surface with a λ / 4 plate and a λ / 2 plate. In the fourth and subsequent embodiments, the case where correction is performed by combining a plurality of optical elements and λ / 4 plates will be described with reference to the drawings. First, a polarizing microscope optical system according to the fourth example will be described with reference to FIG. In the fourth embodiment, as in the first embodiment, the fifth polarization correcting optical system 30 is disposed between the polarizer 1 and the condenser lens 2, and the fifth polarization correcting optical system 30 is disposed between the objective lens 3 and the analyzer 4. The sixth polarization correction optical system 40 is arranged, the fifth polarization correction optical system 30 mainly corrects the change in the polarization state of the condenser lens 2, and the sixth polarization correction optical system 40 mainly includes the objective lens 3. Used to correct changes in polarization state.

  Here, the fifth polarization correcting optical system 30 includes, in order from the polarizer 1 side, a first optical element 31 in which a concave surface and a convex lens, and a concave surface, a convex lens, and a concave lens, each having substantially the same curvature, are combined. / 4 plate 32, a concave lens, and a convex lens, a second optical element 33 in which concave and convex surfaces having substantially the same curvature are combined, and a second λ / 4 plate 34. The sixth polarization correcting optical system 40 includes, in order from the objective lens 3 side, a third optical element 42 in which a concave surface and a convex surface having substantially the same curvature are combined in the order of the third λ / 4 plate 41, a convex lens, and a concave lens. A fourth λ / 4 plate 43 and a fourth optical element 44 in which a concave surface and a convex surface are combined in the order of a concave lens, a convex lens, and a concave lens, each having substantially the same curvature. In the fifth and sixth polarization correcting optical systems 30 and 40, the first to fourth optical elements 31, 33, 42, and 44 have at least one refracting surface. It is preferable that it is comprised so that it may not have force.

As shown in FIG. 11, in the fifth polarization correction optical system 30, light transmitted through the polarizer 1 is linearly polarized light whose polarization plane is inclined 45 °, positioned in the state P ₃₀ on Stokes parameter S ₂ . When is refracted by the refractive surface of the linearly polarized light is made incident on the first optical element 31, is ready P ₃₁ rotates the polarization plane of the linearly polarized light, when transmitting the first 1 [lambda / 4 plate 32 in this state elliptically polarized light the state P ₃₂ is. Then, the elliptically polarized light the second polarization plane rotation becomes the state P ₃₃ and is refracted by the refracting surface is made incident on the optical element 33, further, the Stokes parameters S ₁ when transmitting the first 2 [lambda] / 4 plate 34 in this state and S ₃ in a state P ₃₄ are both negative region. As described in the first embodiment, the condenser lens 2 acts to rotate and linearize the polarization plane of linearly polarized light. Therefore, the condenser lens 2 is to rotate the polarization plane of the elliptical polarization in the state P _34, act to return to the state of the original linear polarization, resulting in light transmitted through the condenser lens 2 in the state P ₃₀ Therefore, the change in the polarization state by the condenser lens 2 is corrected.

On the other hand, as shown in FIG. 12, in the sixth polarization correction optical system 40, the light emitted from the condenser lens 2 has its polarization state corrected by the above-mentioned fifth polarization correction optical system 30, so that the polarization surface is linearly polarized light which is inclined 45 °, positioned in the state P ₄₀ on Stokes parameter S _2. When linearly polarized light of the state P ₄₀ is transmitted through the objective lens 3, a state P ₄₁ was ovalization with polarization plane is rotated. The elliptically polarized light in this state P ₄₁ is ready P ₄₂ when passing through the first 3 [lambda] / 4 plate 41 and is transmitted through the third optical element 42 is ready P ₄₃ and transmitted through the first 4.lamda / 4 plate 43 states When it reaches P ₄₄ and finally passes through the fourth optical element 44, it returns to the original linearly polarized state P ₄₀ , so that the change in the polarization state caused by the objective lens 3 is corrected by the sixth polarization correcting optical system 40. .

  Thus, according to the fifth polarization correction optical system 30 and the sixth polarization correction optical system 40 shown in the fourth embodiment, the four optical elements 31, 33, By simply combining 42 and 44 and the four λ / 4 plates 32, 34, 41 and 43, the change in the polarization state generated in the condenser lens 2 and the objective lens 3 can be corrected with high accuracy.

  Next, a fifth embodiment of the polarizing microscope optical system will be described with reference to FIG. In the fourth embodiment described above, the fifth and sixth polarization correcting optical systems 30 and 40 are used to correct the change in the polarization state generated in the condenser lens 2 and the objective lens 3. In the fifth embodiment, a seventh polarization correction optical system 30 ′ having the same configuration as that of the fifth polarization correction optical system 30 in the fourth embodiment is disposed between the polarizer 1 and the condenser lens 2. The polarization correction optical system 30 ′ is configured to correct a change in polarization state caused by the condenser lens 2 and the objective lens 3. The configuration and effects of the seventh polarization correction optical system 30 'are the same as those of the fifth polarization correction optical system 30 described in the fourth embodiment, and a detailed description thereof will be omitted.

  FIG. 14 shows a sixth embodiment of the polarizing microscope optical system. In the sixth embodiment, an eighth polarization correction optical system 40 ′ having the same configuration as that of the sixth polarization correction optical system 40 in the fourth embodiment is disposed between the objective lens 3 and the analyzer 4. The polarization correction optical system 40 'is configured to correct the change in polarization state generated in the condenser lens 2 and the objective lens 3. The configuration and effects of the eighth polarization correction optical system 40 'are the same as those of the sixth polarization correction optical system 40 described in the fourth embodiment, and thus detailed description thereof is omitted.

  In the above description, the transmission illumination type microscope apparatus has been described. However, the present invention can be applied to an epi-illumination type microscope apparatus that uses an objective lens in both the imaging optical system and the illumination optical system. .

  In the above embodiment, a typical polarizing microscope optical system has been described. However, the present invention is not limited to the polarization microscope, and it is possible to compensate for changes in polarization characteristics of various optical devices that use polarized light, such as ellipsometers and differential interference microscopes. Further, the above-described embodiment is merely an example, and is not limited to the above-described configuration, and can be appropriately changed within the effect range of the present invention.

It is explanatory drawing which shows the structure of a polarizing microscope optical system. It is explanatory drawing which shows the structure of a microscope apparatus provided with the said polarizing microscope optical system. It is explanatory drawing which shows the structure of the polarizing microscope optical system which concerns on 1st Example. It is explanatory drawing for demonstrating the transition of the polarization state of the 1st polarization correction optical system in 1st Example. It is explanatory drawing for demonstrating the transition of the said polarization state by a Poincare sphere. It is explanatory drawing for demonstrating the transition of the polarization state of the 2nd polarization correction optical system in 1st Example. It is explanatory drawing for demonstrating the transition of the said polarization state by a Poincare sphere. It is explanatory drawing which shows the structure of the polarization microscope optical system which concerns on 2nd Example. It is explanatory drawing which shows the structure of the polarization microscope optical system which concerns on 3rd Example. It is explanatory drawing which shows the structure of the polarizing microscope optical system which concerns on 4th Example. It is explanatory drawing for demonstrating the transition of the polarization state of the 5th polarization correction optical system in 4th Example by a Poincare sphere. It is explanatory drawing for demonstrating the transition of the polarization state of the 6th polarization correction optical system in 4th Example by a Poincare sphere. It is explanatory drawing which shows the structure of the polarization microscope optical system which concerns on 5th Example. It is explanatory drawing which shows the structure of the polarizing microscope optical system which concerns on 6th Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Polarizer 2 Condenser lens 3 Objective lens 4 Analyzer 5 Sample 10 1st polarization correction optical system 11 1st optical element 12 1st (lambda) / 4 board 13 2nd optical element 14 1st (lambda) / 2 board 20 2nd polarization correction optical system 21 2nd λ / 2 plate 22 3rd optical element 23 2nd λ / 4 plate 24 4th optical element 10 '3rd polarization correction optical system 20' 4th polarization correction optical system 30 5th polarization correction optical system 31 1st optical element 32 1st λ / 4 plate 33 2nd optical element 34 2nd λ / 4 plate 40 6th polarization correcting optical system 41 3λ / 4 plate 42 3rd optical element 43 4λ / 4 plate 44 4th optical element 30 ′ 7th Polarization correction optical system 40 'Eighth polarization correction optical system

Claims (12)

A polarization correction optical system that corrects a change in polarization state of the light transmitted through the optical system to be corrected by the optical system to be corrected.
A first polarization correction optical system disposed on the light source side of the optical system to be corrected;
A second polarization correction optical system arranged on the image side of the optical system to be corrected,
In the order in which the first polarization correction optical system transmits the light,
A first optical element having at least one refracting surface;
A first quarter wave plate;
A second optical element having at least one refracting surface;
A first half-wave plate,
In the order in which the second polarization correction optical system transmits the light,
A second half-wave plate;
A third optical element having at least one refracting surface;
A second quarter wave plate;
A polarization correction optical system including a fourth optical element having at least one refracting surface. A polarization correction optical system that corrects a change in polarization state of the light transmitted through the optical system to be corrected by the optical system to be corrected.
Arranged on the light source side of the optical system to be corrected, the order in which the light is transmitted,
A first optical element having at least one refracting surface;
A quarter wave plate,
A second optical element having at least one refracting surface;
A polarization correction optical system composed of a half-wave plate. A polarization correction optical system that corrects a change in polarization state of the light transmitted through the optical system to be corrected by the optical system to be corrected.
Arranged on the image side of the optical system to be corrected and in the order in which the light is transmitted,
A half-wave plate,
A first optical element having at least one refracting surface;
A quarter wave plate,
A polarization correction optical system including a second optical element having at least one refracting surface. A polarization correction optical system that corrects a change in polarization state of the light transmitted through the optical system to be corrected by the optical system to be corrected.
A first polarization correction optical system disposed on the light source side of the optical system to be corrected;
A second polarization correction optical system arranged on the image side of the optical system to be corrected,
In the order in which the first polarization correction optical system transmits the light,
A first optical element having at least one refracting surface;
A first quarter wave plate;
A second optical element having at least one refracting surface;
A second quarter wave plate,
In the order in which the second polarization correction optical system transmits the light,
A third quarter wave plate;
A third optical element having at least one refracting surface;
A fourth quarter wave plate;
A polarization correction optical system including a fourth optical element having at least one refracting surface. A polarization correction optical system that corrects a change in polarization state of the light transmitted through the optical system to be corrected by the optical system to be corrected.
Arranged on the light source side of the optical system to be corrected, the order in which the light is transmitted,
A first optical element having at least one refracting surface;
A first quarter wave plate;
A second optical element having at least one refracting surface;
A polarization correction optical system comprising a second quarter-wave plate. A polarization correction optical system that corrects a change in polarization state of the light transmitted through the optical system to be corrected by the optical system to be corrected.
Arranged on the image side of the optical system to be corrected and in the order in which the light is transmitted,
A first quarter wave plate;
A first optical element having at least one refracting surface;
A second quarter wave plate;
A polarization correction optical system including a second optical element having at least one refracting surface. A polarizer having a predetermined polarization characteristic, which polarizes light from a light source, a condenser lens that collects light transmitted through the polarizer and irradiates the sample, and condenses light from the sample A microscope apparatus including an objective lens that forms an enlarged image and an analyzer having a predetermined polarization characteristic and disposed between the objective lens and the enlarged image,
The first polarization correction optical system constituting the polarization correction optical system according to claim 1 is disposed between the polarizer and the condenser lens,
A microscope apparatus in which the second polarization correction optical system constituting the polarization correction optical system according to claim 1 is disposed between the objective lens and the analyzer. A polarizer having a predetermined polarization characteristic, which polarizes light from a light source, a condenser lens that collects light transmitted through the polarizer and irradiates the sample, and condenses light from the sample A microscope apparatus including an objective lens that forms an enlarged image and an analyzer having a predetermined polarization characteristic and disposed between the objective lens and the enlarged image,
A microscope apparatus in which the polarization correction optical system according to claim 2 is disposed between the polarizer and the condenser lens. A polarizer having a predetermined polarization characteristic, which polarizes light from a light source, a condenser lens that collects light transmitted through the polarizer and irradiates the sample, and condenses light from the sample A microscope apparatus including an objective lens that forms an enlarged image and an analyzer having a predetermined polarization characteristic and disposed between the objective lens and the enlarged image,
A microscope apparatus in which the polarization correction optical system according to claim 3 is arranged between the objective lens and the analyzer. A polarizer having a predetermined polarization characteristic, which polarizes light from a light source, a condenser lens that collects light transmitted through the polarizer and irradiates the sample, and condenses light from the sample A microscope apparatus including an objective lens that forms an enlarged image and an analyzer having a predetermined polarization characteristic and disposed between the objective lens and the enlarged image,
The first polarization correction optical system constituting the polarization correction optical system according to claim 4 is disposed between the polarizer and the condenser lens,
A microscope apparatus in which the second polarization correction optical system constituting the polarization correction optical system according to claim 4 is disposed between the objective lens and the analyzer. A polarizer having a predetermined polarization characteristic, which polarizes light from a light source, a condenser lens that collects light transmitted through the polarizer and irradiates the sample, and condenses light from the sample A microscope apparatus including an objective lens that forms an enlarged image and an analyzer having a predetermined polarization characteristic and disposed between the objective lens and the enlarged image,
A microscope apparatus in which the polarization correction optical system according to claim 5 is disposed between the polarizer and the condenser lens. A polarizer having a predetermined polarization characteristic, which polarizes light from a light source, a condenser lens that collects light transmitted through the polarizer and irradiates the sample, and condenses light from the sample A microscope apparatus including an objective lens that forms an enlarged image and an analyzer having a predetermined polarization characteristic and disposed between the objective lens and the enlarged image,
A microscope apparatus in which the polarization correction optical system according to claim 6 is arranged between the objective lens and the analyzer.

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