JP2008309684A - Sample measuring substrate for near field spectral analysis - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a sample measuring substrate enhanced in near field light detection sensitivity by closely adhering and fixing a sample for near field spectral analysis to a light reflective substrate without producing local adhesion defectiveness. <P>SOLUTION: In the sample measuring substrate (2) for near field spectral analysis for holding the sample (8) for near field spectral analysis and pressing the sample (8) from above and below to form the same into a thin film, the surface for holding the sample (8) of the sample measuring substrate (2) is formed of the light reflective material and a plurality of fine projections (4, 4, ...) are provided on the surface of the sample measuring substrate (2). <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sample measurement substrate for near-field spectroscopic analysis.

  In spectroscopic analysis using near-field light, spectroscopic (infrared, Raman, and fluorescence) analysis can be performed on a very small region of a sample, for example, several hundred nanometers. Provide effective means. However, the basic technology necessary to apply near-field light to actual material analysis has not yet been established, and it is in a state of groping for practical use. The inventors are able to perform near-field infrared spectroscopy with high spatial resolution by thinning the sample and fixing it on a light-reflecting substrate with respect to the sample sampling method for near-field infrared spectroscopy. I find out what I can do.

  FIG. 9 is a diagram showing a sample sampling method for near-field infrared spectroscopy by the present inventors. In the figure, 100 is a sample for near-field spectroscopic analysis, 102 is a substrate whose surface is made of a light-reflective material, and 103 is a press. The sample 100 is thinned by being held on the light reflecting substrate 102 and pressed from above and below. The thickness of the sample 100 is thinned to such an extent that it can be used for near-field spectroscopic analysis, for example, infrared light can be transmitted, so that the infrared light that has passed through the sample 100 is reflected on the surface of the light reflecting substrate 102. The light is reflected, passes through the sample 100 again, and exits to the outside. Since the infrared light that has passed through the sample 100 includes near-field light generated at the tip of the probe, near-field spectroscopic analysis can be performed with high sensitivity by detecting reflected light from the substrate 102.

  However, even in the case of the sample formed as described above, the measurement sensitivity often decreases or the measurement becomes impossible. The present inventors considered the cause as follows. That is, when pressing on the light reflecting substrate to make the sample thin, even if the substrate surface is a flat plate, the press pressure is not uniformly applied to the sample due to the subtle waviness of the substrate or the material distribution of the sample. Local adhesion failure occurs between the sample and the substrate. Due to this poor adhesion, the reflectance of the measurement light is reduced or irregular reflection is caused, so that the reflected light detected by the photodetector is greatly reduced, and it is considered that measurement is impossible.

  FIGS. 10A and 10B illustrate the reason why the detection sensitivity of reflected light is reduced due to local adhesion failure between the sample and the substrate. In FIGS. 10A and 10B, reference numeral 104 denotes a local poor adhesion portion between the light reflecting substrate 102 and the sample 100. Reference numeral 105 denotes a probe having a tip radius of curvature of about several hundreds of nanometers. Near-field light 106 is generated by irradiating the tip with, for example, infrared light. The near-field light 106 itself does not propagate, but is scattered by infrared light and reaches the photodetector 107 (see FIG. 5B) and is detected. Since near-field light is very weak light, in order to increase its detection sensitivity, as much near-field light as possible must be reflected toward the detector.

  However, as shown in FIG. 10A, when a local adhesion failure 104 occurs between the substrate 102 and the sample 100 and the probe 105 exists at that location, the near-field light 106 that has passed through the sample 100 is scattered. The light is not reflected by the substrate 102 with directionality but is dispersed. As a result, the detection sensitivity of the photodetector is reduced. Alternatively, as shown in FIG. 10B, even when the probe 105 is brought close to the place where the sample 100 and the substrate 102 are in close contact with each other, irregular reflection 108 is generated by the undulation of the sample 102, and the reflected light is detected by light. The direction of the vessel 107 is not reached. For this reason, the detection sensitivity of near-field light is lowered, and measurement may become impossible.

  Therefore, in order to perform near-field spectroscopic analysis with high sensitivity and high spatial resolution, it is important to fix the sample uniformly on the substrate surface without causing local adhesion failure by the press.

  The following Patent Documents 1 to 4 exist as documents indicating general technical levels related to the present invention.

JP 2002-148172 A JP 2000-182264 A JP-A-2005-207935 JP-A-9-231608

  The present invention was made for the purpose of solving the above-described problems in the sample sampling method for near-field spectroscopic analysis, and the sample and the light-reflecting substrate are locally disposed in the thinning of the sample by pressing. It is an object of the present invention to provide a sample measurement substrate for near-field spectroscopic analysis that can be uniformly closely fixed without causing any poor adhesion. Further, in order to further increase the detection sensitivity, it is possible to enhance the near-field light by effectively using the light that irradiates the probe and does not contribute to the generation of the near-field light at the probe tip. It is an object of the present invention to provide a sample measurement substrate for near-field spectroscopic analysis having a novel structure.

  In order to solve the above problems, the present invention holds a sample for near-field spectroscopic analysis, and in a sample measurement substrate for thinning the sample by pressing it from above and below, The surface to be held is formed of a light reflecting material, and a plurality of minute protrusions are provided on the surface. In this case, the tips of the minute protrusions may be flattened.

  In the sample measurement substrate having the above-described configuration, the protrusion may be formed in a ridge shape so that evanescent light is induced by the light irradiated to the tip of the protrusion.

  Alternatively, in the sample measurement substrate having the above-described configuration, the substrate and the protrusion are formed by coating a substrate surface of a light-transmitting material with a light-reflective coating, and light propagating through the substrate causes the tip portion of the protrusion to be formed. The light-reflective coating on the tip portion of the protrusion may be removed so as to emit near-field light and induce near-field light on the tip portion.

  Alternatively, in the sample measurement substrate having the above-described configuration, the plurality of ridge line-shaped protrusions may be formed so as to be distributed radially around a portion of the substrate surface that holds the sample.

  Alternatively, in the sample measurement substrate having the above-described configuration, the ridge-line-shaped protrusions may be formed in a spiral shape centering on a portion of the substrate surface that holds the sample.

  In the sample measurement substrate for near-field spectroscopic analysis according to the present invention, since a plurality of minute protrusions are formed on the substrate surface, when holding and pressing the sample on the sample measurement substrate, a high pressure is uniformly applied to the sample. As a result, it is possible to avoid the occurrence of local adhesion failure between the sample and the sample measurement substrate surface. As a result, the light that has passed through the sample can be reflected again toward the sample with a high reflectance by the light reflecting substrate. Furthermore, the reflected light is subjected to multiple reflection using the inclination of the side surface of the protrusion, thereby suppressing the irregular reflection of the near-field light and ensuring a sufficient amount of reflected light in the direction of the photodetector. As a result, it is possible to perform near-field spectroscopic analysis with high detection sensitivity.

  In addition, in the sample measurement substrate having a configuration in which the sample measurement substrate is made of a light-transmitting material and a light-reflective coating is formed on the surface thereof, the coating at the tip of the microprotrusions is removed, and the light propagated in the substrate is By emitting from this tip portion, near-field light can be induced at the tip portion. Therefore, by providing the second light source on the side surface or the back surface of the substrate, the sample measurement substrate itself can be used as the second probe for generating near-field light, and the near-field light can be enhanced. This makes it possible to perform near-field spectroscopic analysis with higher sensitivity.

  Or, other than generating near-field light by striking the tip of the probe by devising such as making the light diameter of the light irradiating the tip of the probe to generate near-field light larger than the sample size or shifting the irradiation position By introducing light into the sample measurement substrate, it is possible to generate near-field light from the tip of the protrusion and enhance the near-field light generated from the tip of the probe without providing a second light source.

  Furthermore, by forming light-reflective protrusions in the shape of ridge lines, when this portion is irradiated with light for generating near-field light, evanescent light is induced at the ridge lines, and near-field light generated at the probe tip Can be strengthened. As a result, near-field spectroscopic analysis can be performed with high sensitivity. The ridge line-shaped protrusions may be formed radially around the place where the sample is held, or may be formed in a spiral shape. In this case, all the light incident on any part of the ridge line is Since the light is condensed downward, the enhancement effect of near-field light is great.

  Hereinafter, various embodiments of the present invention will be described with reference to the drawings. In addition, in each following figure, since the same code | symbol shows the same or similar component, it does not repeat.

  FIG. 1 shows a schematic configuration of a sample measurement substrate for near-field spectroscopic analysis according to the first embodiment of the present invention. 1A is a plan view of the sample measurement substrate 1, FIG. 1B is an enlarged view of a region A shown in FIG. 1A, and FIG. 1C is a cross-sectional view taken along line XX in FIG. . In addition, although the approximate magnitude | size of each part is described in these figures, these are reference values and do not limit the invention.

In FIG. 1, reference numeral 2 denotes a sample measurement substrate having micron-order pyramidal protrusions 4, 4,. Since the sample measurement substrate 2 is formed with a thickness of about several hundred microns, it is affixed to another large substrate 6 for easy handling. Note that the substrate 6 is omitted in FIG. The sample measurement substrate 2 is formed of a metal having press strength or a hard inorganic material having a metal film on the surface. For example, Fe, Ni or the like can be used as a metal, and diamond, WC, Si ₃ N ₄ or the like can be used as a hard inorganic material.

  The protrusions 4, 4... Are uniformly dispersed on the surface of the sample measurement substrate 2, and the tips thereof are flattened. The inclination angle of the side surfaces of the protrusions 4, 4,... Is about 30 to 60 degrees. The sample measurement substrate 2 having the protrusions 4, 4... Is formed as follows using, for example, an electroforming method. First, anisotropic etching is performed on a Si substrate having a plane orientation (100) using KOH or hydrofluoric acid to form a plurality of pyramidal depressions (concaves) on the Si substrate. Next, the bottom surface of the depression is made flat (flattened) using several kinds of etching solutions having different concentrations.

  If a plurality of minute depressions are formed uniformly dispersed on the Si substrate in this way, then, Au, Pt, Ag, Cu, etc. are vapor-deposited on the order of several tens to several hundreds nm. The entire surface of the substrate is immersed in dilute sulfuric acid using the surface of the vapor deposition layer as a cathode and a rod of Fe, Ni or the like as an anode, and a metal is plated on the Si substrate. When the plating film formed in this manner is peeled off from the Si substrate, the sample measurement substrate 2 provided with a metal pyramid having concavities and convexities opposite to the Si substrate used as the original plate is obtained.

  Since the sample device substrate 2 has a thickness of several hundred microns, it is easily attached to another large substrate 6 for handling. When the material of the substrate 2 is a hard inorganic material such as diamond, the substrate surface is directly processed by a femtosecond laser or the like to form irregularities on the surface. Then, a light reflective metal material is deposited or coated on the surface. In this way, the sample measurement substrate 2 in which the protrusions 4 having a height of, for example, several μm are uniformly distributed on the surface is formed.

  FIG. 2 is a diagram showing a process of forming a sample for near-field spectroscopic analysis using the sample measurement substrate 2 having the structure shown in FIG. 1 and the effect of the formed sample. In FIG. 2, the substrate 6 is omitted. As shown in FIG. 2A, a light-reflective sample measurement substrate 2 having a plurality of protrusions 4, 4,... Uniformly dispersed on the surface is prepared and used for near-field spectroscopic analysis. Sample 8 is installed. In this state, the sample 8 is pressed by applying pressure from above and below the sample measurement substrate 2 to form a thin film. Since the minute top surfaces of the protrusions 4, 4,... Are uniformly distributed on the substrate 2 on the order of several μm, the sample 8 can be pressed with high pressure without unevenness.

  As shown in FIG. 2B, as a result of the high pressure pressing, the sample 8 enters the concave portion of the substrate 2 and is closely fixed to the side walls of the protrusions 4, 4. Since the area of the top surface is small on the top surfaces of the protrusions 4, 4..., The sample 8 is firmly fixed to the protrusions 4, 4. Therefore, when the near-field spectroscopic measurement of the sample 8 is performed using the sample measurement substrate in this state as shown in FIG. 2C, scattering of reflected light and irregular reflection due to poor adhesion of the sample 8 to the substrate 2 are suppressed. And a spectroscopic analysis with high sensitivity is performed.

  In FIG. 2C, reference numeral 10 denotes a fiber probe having a tip curvature diameter of, for example, one hundred to several hundreds nm. By irradiating the tip with infrared light 12 for spectral spectrum measurement, the tip curvature radius and A local light field, that is, the near-field light 14 can be generated in the same order. By applying this near-field light to the sample 8 to detect the scattered light and performing spectrum analysis, chemical analysis limited to a local area of the probe tip diameter order becomes possible.

  As shown in FIG. 2 (c), in the sample measurement substrate 2 of the present embodiment, the near-field light 14 is reflected in multiple directions by the side walls of the protrusions 4, 4,. The sample 8 is emitted. For this reason, light that has been conventionally scattered in a direction other than the direction of the detector 16 due to irregular reflection is directed toward the direction of the detector 16, and the detection sensitivity of near-field light is improved. In addition, since the sample 8 and the substrate 2 are tightly fixed on the top surfaces of the protrusions 4, 4,..., The infrared light incident on the top surface is effectively reflected in the direction of the detector 16. .

  In this embodiment, the inclination angle of the side faces of the pyramid-shaped protrusions 4, 4... Is about 30 to 60 degrees. 1 and 2, the tips of the pyramid-shaped protrusions 4, 4,... Are flattened, but it is a matter of course that the same effect can be obtained even if an acute angle is used without flattening.

  FIG. 3 shows a sample measurement substrate for near-field infrared analysis according to the second embodiment of the present invention. 3A is a plan view of the sample measurement substrate 20, FIG. 3B is an enlarged view of a region B in FIG. 3A, and FIG. 3C is a cross-sectional view along the line XX in FIG. is there. As is apparent from FIGS. 3B and 3C, the sample measurement substrate 20 according to the present embodiment has a micron-order inverted pyramid-shaped recess 22 opposite to the sample measurement substrate 2 shown in FIG. 20 are uniformly dispersed. The bottom surface of the recess 22 is flattened. As shown in FIGS. 2 (b) and (c), a plurality of ridge line-shaped protrusions 24 are formed on the substrate 20 by uniformly forming the inverted pyramid-shaped depressions 22 on the surface of the substrate 20. It becomes like this. Reference numeral 26 in the figure indicates a ridge line formed by the protrusion 24.

  FIG. 4 shows a state in which the sample is held on the sample measurement substrate 20 shown in FIG. As shown in FIG. 4A, by pressing the sample 28, the protrusion 24 of the sample measurement substrate 20 bites into the sample 28 and comes into close contact with the sample at the bottom surface portion 22. The inverted pyramid-shaped depression 22 whose tip is surrounded by the protrusion 24 constituting the ridge line 26 constitutes a closed space as shown in FIGS. 3B and 3C, so that the sample measurement according to the first embodiment is performed. The reflected light is more effectively prevented from being scattered outside the direction of the detector 16 due to multiple reflections by the pyramid wall than in the case of the substrate 2. As a result, the near-field light detection sensitivity is further improved.

  As shown in FIG. 4B, since the ridge line 26 formed by the protrusions 24 corresponds to the ridge line of the prism, when the infrared light 12 is irradiated on this portion, the evanescent light 30 is induced along the ridge line 26. Is done. The evanescent light 30 propagates on the ridge line 24, but is confined within the ridge line and does not propagate outside, and functions to enhance the near-field light 14 for spectroscopic analysis. Accordingly, the sample measurement substrate 20 of the present embodiment has an effect of suppressing near-field light as well as an effect of suppressing local adhesion failure and irregular reflection of infrared light at the time of sample pressing. As a result, it is possible to perform near-field spectroscopic analysis with higher sensitivity than in the case of the first embodiment.

The sample measurement substrate 20 of this embodiment can be manufactured by performing electroforming using the sample measurement substrate 2 of the first embodiment shown in FIG. 1 as a cathode. When the sample measurement substrate 20 is formed of a hard inorganic material such as diamond, WC, or Si ₃ N ₄ , it can be manufactured by directly processing the substrate material with a femtosecond laser or the like. When the substrate 20 is formed of a hard inorganic material, it is necessary to form a metal film that reflects infrared light on the surface of the substrate 20 including the recesses 22 and the protrusions 24 by vapor deposition or coating.

  FIG. 5 shows a sample measurement substrate 40 according to the third embodiment of the present invention. FIG. 5A is a cross-sectional view of the sample measurement substrate 40, and FIG. 5B is a diagram illustrating a state in which the sample 48 is fixed to the sample measurement substrate 40 by pressure and near-field spectroscopy analysis is performed. The sample measurement substrate 40 of the present embodiment has the same outer shape as the sample measurement substrate 2 according to the first embodiment, but the substrate is made of an infrared transparent material such as diamond, KBr, NaCl, or CaF. It is different in point.

  That is, the sample measurement substrate 40 is formed by directly processing a substrate made of an infrared transparent material such as diamond, KBr, NaCl, or CaF by a femtosecond laser, and forming pyramidal protrusions 42, 42... And grooves 44, 44. .. having a structure formed. The surface of the concavo-convex portion constituted by the protrusion 42 and the groove 44 is covered with a metal film 46 except for the top surface of the protrusion 42. The metal film 46 can be formed by attaching a metal such as Pt, Au, Ag, Al, Pd or the like to the sample measurement substrate 40 by vapor deposition or the like.

  As shown in FIG. 5 (b), the sample measurement substrate 40 of the present embodiment is provided with a second infrared light source 50 outside the side surface of the sample measurement substrate 40, and a second inside the substrate from the side surface of the sample measurement substrate 40. The substrate 40 is used as a probe by introducing infrared light. That is, the top surface 42a not covered with the metal film 46 of the protrusion 42 forms an opening having a width of 1 μm or less with respect to the second infrared light incident on the substrate.

  Therefore, when the strong infrared light 10 is irradiated to the tip of the probe 10 to generate the near-field light 14, the near-field light 52 is induced in the opening of the top surface 42a by resonance. The near-field light 52 enhances infrared light absorption of the sample 48 together with the near-field light 14 generated at the tip of the probe 10. It should be noted that an infrared light reflection film may be formed on the back surface of the sample measurement substrate 40, or the sample measurement substrate 40 may be attached to a large metal plate so as to withstand the press.

  Since the sample measurement substrate 40 of the present embodiment has the same outer shape as the sample measurement substrate 2 of the first embodiment, the same effect as the sample measurement substrate 2 of the first embodiment, that is, the substrate It has the effect of suppressing the occurrence of local adhesion failure between the sample 40 and the sample 48 and the effect of suppressing irregular reflection of infrared light. In addition to this, it also has an effect of enhancing near-field light by generating resonant near-field light from the top opening of the protrusion 42, so that it is possible to guarantee the near-field spectroscopic measurement with high sensitivity. It becomes.

  FIG. 6 shows the structure of a sample measurement substrate 40a according to the fourth embodiment of the present invention. The sample measurement substrate 40a of the present embodiment has basically the same configuration as the sample measurement substrate 40 according to the third embodiment shown in FIG. 5, but around the pyramidal projection group consisting of the projections 42. It differs from the sample measurement substrate 40 according to the third embodiment in that the metal film 46a is not formed. In the sample measurement substrate 40a of the present embodiment, the metal film 46a is not formed around the pyramid-shaped projection group, so that a part of the infrared light 12 that irradiates the tip of the probe 10 is embedded in the sample measurement substrate 40a. Can do.

  Thereby, near-field light can be resonated and generated from the top surface 42a of the protrusion 42 without providing the second infrared light source on the side surface of the sample measurement substrate 40a. In addition, since the light diameter 12a of the infrared light that irradiates the tip of the probe 10 is 10 to 30 μm, if the diameter of the pyramid projection group is about 10 μm, the infrared light is sufficiently contained in the sample measurement substrate 40a. I can dive in. As a result, unlike the case of the third embodiment shown in FIG. 5, the near-field light enhancement effect can be obtained without using the second infrared light source. Note that an infrared light reflection film may be formed on the back surface of the sample measurement substrate 40a, or the sample measurement substrate 40a may be attached to a large metal plate so as to withstand the press.

  FIG. 7 shows a configuration of a sample measurement substrate 60 according to the fifth embodiment of the present invention. 7A is a plan view of the sample measurement substrate 60, FIG. 7B is a cross-sectional view along the line XX in FIG. 7A, and FIG. 7C is a near-field infrared of the sample 62 using the sample measurement substrate 60. It is a figure which shows the state which performs a spectroscopic measurement. The sample measurement substrate 60 of the present embodiment is formed of a metal or a hard inorganic material provided with a metal film, and a light collecting portion 65 is formed on the surface on which the sample 62 is installed. The condensing unit 65 has radial grooves 64, 64... Formed on the substrate surface by femtosecond laser processing or the like. By forming grooves 64, 64... On the surface of the substrate, ridge line-like or ridge-like projections 66, 66... Are formed between adjacent grooves.

  The sample 62 is placed near the center of the radial groove 64 and the protrusion 66. The sample measurement substrate 60 may be attached to a stable large substrate so that handling during sample pressing is easy. In FIGS. 7B and 7C, the sample 62 is placed on the protrusion 66. By pressing the substrate 60 on which the sample 62 is placed from above and below, the sample 62 is thinned, and the sample 62 is formed. May go around into the groove 64.

  When performing near-field spectroscopic measurement of the sample 62 using the sample measurement substrate 60 having the structure shown in FIGS. 7A and 7B, infrared light is applied to the tip of the probe 10 as shown in FIG. 12 is irradiated to generate near-field light. At this time, since the light diameter 12a of the infrared light 12 is 10 to 30 μm, by setting the width of the sample 62 to about 10 μm or less, the periphery of the condensing unit 65 is exposed to the infrared light 12, and the red light 12 It is irradiated with the external light 12. At this time, the infrared light incident on the groove 64 propagates in the longitudinal direction of the groove while being multiple-reflected by the side wall of the groove 64.

  On the other hand, the infrared light irradiated on the ridge-line-shaped protrusion 66 around the condensing portion 65 induces evanescent light 68 at that portion because the protrusion 66 forms the apex angle of the prism. The evanescent light 68 propagates along the ridge line of the protrusion 66 and is condensed below the sample 62 to enhance the near-field light generated at the tip of the probe 10. As a result, it is possible to perform near-field spectroscopic measurement with high sensitivity. In addition, since the infrared light incident on any location of the ridge-shaped protrusion is condensed below the sample 62, the effect of enhancing the near-field light is great.

  Further, as shown in FIG. 7 (b), the infrared light that has passed through the sample 62 is reflected by the side surface of the groove 64, passes through the sample 62 again, and travels in the direction of the photodetector. Detection sensitivity is improved.

  In order to ensure that the infrared light wraps around the sample 62 under the present embodiment, that is, the effect of enhancing the near-field light, the size of the sample 62 is set to be equal to or less than the light diameter of the infrared light, for example, 10 μm or less. It is possible to soften the aperture of the infrared light applied to the probe tip, or to shift the infrared light irradiation position (shown in FIG. 7C).

  FIGS. 8A and 8B are a plan view and a cross-sectional view showing a schematic configuration of a sample measurement substrate 70 according to the sixth embodiment of the present invention. The sample measurement substrate 70 of the present embodiment has substantially the same configuration and operational effects as the sample measurement substrate 60 according to the fifth embodiment, but instead of the radial grooves in the light collecting portion 72 on the surface of the substrate 70. A spiral groove 74 is provided. By providing the spiral groove 74, the spiral protrusion 76 is formed. Therefore, in this embodiment, unlike the case of the fifth embodiment, the groove 74 and the protrusion 76 are formed continuously from the periphery of the light collecting portion 72 toward the center. The sample 78 is placed at the center of the light collecting unit 72.

  As described above, in the sample measurement substrate 70 of the present embodiment, since the protrusions 76 are continuous from the periphery of the light collecting unit 72 toward the center, the infrared light that has hit the substrate 70 off the probe tip is The evanescent light is induced by the spiral projection 76 and is collected toward the central portion of the light collecting portion 72. Therefore, if the sample 78 is installed in the vicinity of the center of the condensing unit 72, the near-field light generated from the probe tip by the collected evanescent light can be enhanced. Further, the scattered light by the infrared light of the near-field light that has passed through the sample 78 and reached the side surface of the groove 74 is reflected in multiple by the side surface of the groove 74 and condensed below the sample 78, and the light detector Since it is reflected toward the direction, the detection sensitivity of near-field light is improved.

  The sample measurement substrate 70 of the sixth embodiment is formed in the same manner as the sample measurement substrate 60 of the sixth embodiment. In the sample measurement substrates of the fifth and sixth embodiments, the sample 78 is supported by the radial or spiral protrusions 66 and 76. Therefore, when the sample 78 is pressed, a high pressure is evenly applied to the sample 78. Is done. There is no adhesion failure between the sample and the sample measurement substrate.

It is a figure which shows the sample measurement board | substrate for near field spectroscopic analysis concerning the 1st Embodiment of this invention, Comprising: FIG. (A) is a top view of a sample measurement board | substrate, FIG. FIG. 2C is a sectional view on line XX of FIG. FIGS. (A) and (b) show a process of forming a near-field spectroscopic analysis sample using the sample measurement substrate shown in FIG. 1, and FIG. (C) shows a near-field using the sample measurement substrate of FIG. (B). A state in which spectroscopic analysis is performed is shown. It is a figure which shows the sample measurement board | substrate for near field spectroscopy analysis concerning the 2nd Embodiment of this invention, Comprising: FIG. (A) is a top view of a sample measurement board | substrate, FIG. (B) is a figure of (a). FIG. 2C is a sectional view on line XX of FIG. FIG. 4A shows a state in which near-field spectroscopic analysis is performed using the sample measurement substrate shown in FIG. 3, and FIG. 4B is a diagram for explaining generation of evanescent light. FIG. (A) is a diagram showing a configuration of a sample measurement substrate for near-field spectroscopy analysis according to a third embodiment of the present invention, and FIG. (B) is a near-field spectroscopy using the sample measurement substrate of FIG. (A). It is a figure which shows the state which performs analysis. FIG. (A) is a diagram showing the configuration of a sample measurement substrate for near-field spectroscopy according to the fourth embodiment of the present invention, and FIG. (B) is a near-field spectroscopy using the sample measurement substrate of FIG. (A). It is a figure which shows the state which performs analysis. FIG. 5A is a plan view of a sample measurement substrate for near-field spectroscopic analysis according to a fifth embodiment of the present invention, FIG. 5B is a cross-sectional view along line XX in FIG. These are figures which show the state which performs a near field spectroscopic analysis using the sample measurement board | substrate shown to Fig. (A) and (b). FIG. 5A is a plan view of a sample measurement substrate for near-field spectroscopy analysis according to a sixth embodiment of the present invention, and FIG. 5B is an upper-stage view along line XX in FIG. It is a figure which shows the structure of the sample measurement board | substrate for the conventional near field spectroscopy analysis. FIGS. (A) and (b) are diagrams for explaining problems of the sample measurement substrate shown in FIG.

Explanation of symbols

2 Sample measurement substrate 4 Protrusion 6 Support substrate 8 Sample 10 Probe 12 Infrared light 14 Near-field light 16 Photo detector 30 Evanescent light 52 Resonant near-field light 66 Radial projection 76 Helical projection

Claims (6)

In a sample measurement substrate for holding a sample for near-field spectroscopic analysis and pressing the sample from above and below to make a thin film,
A sample measurement substrate for near-field spectroscopic analysis, wherein a surface for holding a sample of the sample measurement substrate is formed of a light reflective material, and a plurality of minute protrusions are provided on the surface.   2. The sample measurement substrate for near-field spectral analysis according to claim 1, wherein the tip of the minute protrusion is flattened.   2. The sample measurement substrate for near-field spectroscopic analysis according to claim 1, wherein the protrusion is formed in a ridge shape so that evanescent light is induced by irradiating light on a tip of the protrusion. Sample measurement board for near-field spectroscopic analysis.   3. The sample measurement substrate for near-field spectroscopic analysis according to claim 2, wherein the substrate and the protrusion are formed by coating a substrate surface of a light-transmitting material with a light-reflective coating and propagating through the substrate. For the near-field spectroscopic analysis, wherein the light-reflective coating on the tip of the protrusion is removed so that the light is emitted through the tip of the protrusion and induces near-field light at the tip. Sample measurement board.   4. The sample measurement substrate for near-field spectroscopic analysis according to claim 3, wherein the plurality of ridge-shaped protrusions are formed so as to be distributed radially around a portion of the substrate surface that holds the sample. A sample measurement substrate for near-field spectral analysis.   4. The sample measurement substrate for near-field spectroscopic analysis according to claim 3, wherein the ridge-shaped protrusion is formed in a spiral shape centering on a portion of the substrate surface that holds the sample. Sample measurement board for near-field spectroscopic analysis.

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