JP2008290351A - Metal mask for printing - Google Patents

Metal mask for printing Download PDF

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Publication number
JP2008290351A
JP2008290351A JP2007138461A JP2007138461A JP2008290351A JP 2008290351 A JP2008290351 A JP 2008290351A JP 2007138461 A JP2007138461 A JP 2007138461A JP 2007138461 A JP2007138461 A JP 2007138461A JP 2008290351 A JP2008290351 A JP 2008290351A
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Japan
Prior art keywords
mask
printing
metal mask
metal
durability
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JP2007138461A
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Tomoji Saito
齊藤友治
Tomoji Takayanagi
高柳智士
Gakuo Ogawa
小川岳夫
Masanao Sato
佐藤正直
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Process Lab Micron Co Ltd
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Process Lab Micron Co Ltd
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Priority to JP2007138461A priority Critical patent/JP2008290351A/en
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  • Printing Plates And Materials Therefor (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Screen Printers (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a metal mask for printing, a metal mask in which printing durability is improved without changing a method and conditions of forming the opening part of the mask and with printing transferability maintained in the metal mask for use in screen printing. <P>SOLUTION: In the metal mask 101 for printing, a projection 107 made of a resin material is provided, in a part with which an end of a substrate to be printed comes in contact during the printing and in a part which is parallel to the moving direction of a squeegee. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、スクリーン印刷等に用いられる印刷用メタルマスク及びそれを用いた印刷版に関する。 The present invention relates to a printing metal mask used for screen printing and the like and a printing plate using the same.

電子部品を実装するために、導電性ペーストをスクリーン印刷して、バンプを形成する方法が広く実用に供されている。近年、電子部品の実装の高密度化が求められ、それに伴いスクリーン印刷に用いる印刷用メタルマスクの薄膜化が進んでいる。しかし印刷用メタルマスク(マスクと略記)の薄膜化に伴い、印刷時にマスクが損傷する不具合が発生しやすくなっている。 In order to mount an electronic component, a method of forming a bump by screen-printing a conductive paste has been widely used. In recent years, there has been a demand for higher density mounting of electronic components, and accordingly, printing metal masks used for screen printing have been made thinner. However, as the printing metal mask (abbreviated as “mask”) becomes thinner, defects that damage the mask during printing tend to occur.

以下、従来のマスクが損傷する不具合について図1を用いて説明する。
導電性ペーストをマスクを用いて印刷する際に、マスク(101)が被印刷基板(基板と略記)(104)の端部(106)に接触する部分にスキージにより局所的な力が加わる。この状態で繰り返し印刷を行うとマスクが損傷する。また、基板によっては図2に示したように端部(106)にバリが突出した形状になっているものもありマスクの損傷を加速させる。損傷が激しいとマスクは使用不能になり、マスクを交換しなければならず、多大な手間を必要とし、経済上も問題がある。
Hereinafter, a problem that a conventional mask is damaged will be described with reference to FIG.
When the conductive paste is printed using a mask, a local force is applied by a squeegee to the portion where the mask (101) contacts the end portion (106) of the substrate to be printed (abbreviated as substrate) (104). If printing is repeated in this state, the mask is damaged. Further, some substrates have a shape in which burrs protrude from the end portion (106) as shown in FIG. 2, which accelerates damage to the mask. If the damage is severe, the mask becomes unusable, the mask must be replaced, requires a lot of labor, and is economically problematic.

特に、前記したように電子部品の高密度実装のためにマスクが薄膜化するにつれ、損傷によりマスクが使用不能になる頻度が増加し、マスクの耐久性を向上させることが強く望まれている。 In particular, as the mask is thinned for high-density mounting of electronic components as described above, the frequency at which the mask becomes unusable due to damage increases, and it is strongly desired to improve the durability of the mask.

高密度実装用のマスクの作製方法としては、めっきによるアディティブ法やレーザで加工する方法が一般的であり、従来はマスクの材料強度を上げることにより耐久性を向上させていた。
例えば、アディティブ法に於いては、めっきする金属やめっき条件、レーザで加工する方法に於いては、使用する基板材料、等を変更することにより、耐久性を向上させていた。
As a method of manufacturing a mask for high-density mounting, an additive method by plating or a method of processing with a laser is generally used, and conventionally, durability has been improved by increasing the material strength of the mask.
For example, in the additive method, the durability is improved by changing the metal to be plated, the plating conditions, and the method of processing with a laser by changing the substrate material to be used.

しかし作製条件を変更するだけでは十分な耐久性は得られず、更なる耐久性の向上が望まれている。又、作製条件を変更すると、導電性ペースト印刷用の開口部(以下開口部と略記)の状態が変わってしまい印刷転写性が低下するという問題も起こっている。 However, sufficient durability cannot be obtained only by changing the production conditions, and further improvement in durability is desired. In addition, when the production conditions are changed, the state of the opening for conductive paste printing (hereinafter abbreviated as “opening”) changes, resulting in a problem that print transferability is lowered.

さらに、マスク作製条件の検討や、マスク変更に伴う印刷条件の調整も必要となるため、多大な手間とコストがかかるという問題もある。 Furthermore, since it is necessary to study the mask manufacturing conditions and to adjust the printing conditions associated with the mask change, there is a problem that much labor and cost are required.

マスクの耐久性を向上する方法として、金属枠にテトロンメッシュを貼り付けた版に金属メッシュを積層し、前記金属メッシュ部に金属めっきを行った後、エッチングで前記金属部に開口部形成を行うマスクの製造方法が開示されている。
特開平6−83067号公報
As a method for improving the durability of the mask, a metal mesh is laminated on a plate having a tetron mesh attached to a metal frame, metal plating is performed on the metal mesh portion, and then an opening is formed in the metal portion by etching. A method for manufacturing a mask is disclosed.
JP-A-6-83067

しかし、前記した方法で作製したマスクは開口部内にメッシュが存在しているため、導電性ペーストの抜け性が悪く、高密度実装用の印刷には使用できない。さらに、2種類のメッシュを積層した構造となっているため、薄型化に対応することも困難である。 However, since the mask manufactured by the above-described method has a mesh in the opening, the conductive paste cannot be easily removed and cannot be used for printing for high-density mounting. Furthermore, since it has a structure in which two types of meshes are laminated, it is difficult to cope with a reduction in thickness.

本発明は、スクリーン印刷により導電性ペーストを印刷し、高密度実装のためのバンプを形成するために使用されるマスクにおいて、印刷転写性を維持したままマスクの耐久性を向上させる。 The present invention improves the durability of a mask while maintaining print transferability in a mask used for printing a conductive paste by screen printing to form bumps for high-density mounting.

本発明者らは、印刷転写性を維持したまま耐久性を向上した高密度実装用に対応したマスクの検討を行い、本発明を完成した。
すなわち、本発明は、
スクリーン印刷等に用いられる印刷用メタルマスクにおいて、印刷時に被印刷基板の端部が接触する部分で、スキージの移動方向と平行な部分が突起している印刷用メタルマスクであって、前記突起部が樹脂材料からなることを特徴とする印刷用メタルマスク、及び
前記した印刷用メタルマスクを紗を介して枠に貼り付けた印刷用メタルマスク版、である。
The inventors of the present invention have studied the mask for high-density mounting with improved durability while maintaining print transferability, and completed the present invention.
That is, the present invention
A printing metal mask used for screen printing or the like, wherein the printing metal mask has a protruding portion at a portion parallel to a moving direction of a squeegee at a portion where an end portion of a substrate to be printed contacts. A metal mask for printing, characterized in that is made of a resin material, and a metal mask plate for printing in which the above-described metal mask for printing is attached to a frame through a ridge.

本発明は、従来のマスクの開口部の形成方法を変更せず、従って印刷転写性を損なうことなく、マスクの耐久性を向上させることができる。 The present invention can improve the durability of the mask without changing the conventional method of forming the opening of the mask, and without impairing the print transferability.

以下本発明のマスク、及びそれを用いた印刷用メタルマスク版(印刷版と略記)に関して具体的に説明する。
図3は本発明のマスクを紗を介して枠に貼り合わせた印刷版の1例を示す。又、図4は図3のb部の拡大図を表す。
本発明のマスク(101)は基板(104)と接触する部分に突起(107)を有し、紗(102)を介して枠(103)に貼り合わされている。
The mask of the present invention and a printing metal mask plate (abbreviated as printing plate) using the mask will be specifically described below.
FIG. 3 shows an example of a printing plate in which the mask of the present invention is bonded to a frame through a ridge. FIG. 4 shows an enlarged view of part b of FIG.
The mask (101) of the present invention has a protrusion (107) at a portion in contact with the substrate (104), and is bonded to the frame (103) through a ridge (102).

この突起は印刷時に基板の端部が接触する箇所の一部又は全部に設けることができるが、印刷時にスキージのスムースな移動の妨げにならないように、図5に示したようにスキージの移動方向と平行に連続して設けることが望ましい。又、突起の角部は丸めるのが望ましい。突起の形状は特に限定はないが、高さが10〜100μm程度、幅は5〜40mm程度が好ましい。   These protrusions can be provided in a part or all of the portion where the end of the substrate contacts during printing. However, in order to prevent the smooth movement of the squeegee during printing, as shown in FIG. It is desirable to provide it continuously in parallel. Also, it is desirable to round the corners of the protrusions. The shape of the protrusion is not particularly limited, but the height is preferably about 10 to 100 μm and the width is preferably about 5 to 40 mm.

本発明のマスクの製造方法に関して説明する。先ず公知の方法、例えば、レーザ加工法、めっき法、エッチング加工等の方法で開口部を形成したマスクを作製する。次に突起を形成するが、突起の形成方法としては、突起部にポリイミド等の樹脂材料からなる突起部材を接着して形成する。また、突起を形成してから開口部をレーザ加工法やエッチング加工法で形成して本発明のマスクを作製することもできる。   The mask manufacturing method of the present invention will be described. First, a mask in which an opening is formed is prepared by a known method such as a laser processing method, a plating method, or an etching method. Next, a protrusion is formed. As a method for forming the protrusion, a protrusion member made of a resin material such as polyimide is bonded to the protrusion. In addition, the mask of the present invention can be manufactured by forming the opening after forming the protrusion by a laser processing method or an etching processing method.

マスクの製造方法は特に限定しないが、印刷転写性が良好なめっきで作製することが望ましい。 Although the manufacturing method of a mask is not specifically limited, It is desirable to produce by masking with favorable print transferability.

突起部材の樹脂材料は特に限定しないが、印刷時の耐久性を考慮するとポリイミドが望ましい。 The resin material of the protruding member is not particularly limited, but polyimide is desirable in consideration of durability during printing.

マスクに突起部材を接着する方法は特に限定しないが、板厚の均一性を確保するために、厚さの均一な接着シートで貼り付ける方法、もしくは突起部材に複数の貫通孔を設け、突起部材をマスク表面の貼り付け箇所に設置した後、突起部材の貫通孔に接着剤を注入して接着する方法が望ましい。 The method for adhering the protruding member to the mask is not particularly limited, but in order to ensure the uniformity of the plate thickness, the method is a method of attaching with an adhesive sheet having a uniform thickness, or a plurality of through holes are provided in the protruding member, and the protruding member It is desirable that a method of injecting an adhesive into the through hole of the projecting member and then adhering it to the pasting portion of the mask surface.

マスクに突起部材を接着するための接着剤の種類は特に限定しないが、マスク使用時及び洗浄時に突起が剥がれないようにするため、耐薬品性及び接着強度の良好なエポキシ系、シアノアクリレート系、アクリル系、フェノール樹脂系等が挙げられる。 The type of adhesive for adhering the protruding member to the mask is not particularly limited, but in order to prevent the protrusion from peeling off when using the mask and cleaning, an epoxy system, a cyanoacrylate system with good chemical resistance and adhesive strength, An acrylic type, a phenol resin type, etc. are mentioned.

マスクに突起部材を接着する際は、マスクとの接着力を向上させるため、マスク及び又は突起部材の接着面を物理研磨、化学研磨等により、十点平均の粗さ(Rzjis)を0.02〜20μm程度に粗面化することが望ましい。 When bonding the protruding member to the mask, the ten-point average roughness (Rzjis) is set to 0.02 by physical polishing, chemical polishing or the like on the bonding surface of the mask and / or the protruding member in order to improve the adhesive force with the mask. It is desirable to roughen the surface to about 20 μm.

突起部材の接着は、マスクをめっき母材から引き剥がす前に行ってもよく、マスクを紗を介して枠に貼り付ける前に行ってもよく、貼り付けた後で行ってもよい。   The protrusion member may be bonded before the mask is peeled off from the plating base material, before the mask is attached to the frame through the ridge, or after the attachment.

本発明のマスクは紗を介して枠に貼り付けて使用するのが望ましい。紗の種類は特に限定しないがポリエステルメッシュや金属メッシュが望ましい。
具体的な実施例を以下に示す。
It is desirable to use the mask of the present invention by attaching it to a frame through a ridge. The type of the ridge is not particularly limited, but a polyester mesh or a metal mesh is desirable.
Specific examples are shown below.

SUS304製のめっき母材にドライフィルムレジストをラミネートし、画像パターンが形成された露光用マスクを介して紫外線を照射し、現像することにより紫外線の照射されていない部分のレジストを除去し、ドライフィルムレジストで開口部に対応する像を形成した。この像が形成された前記めっき母材上に定法によりNiめっきを約30μm析出させ、残存するドライフィルムレジストを剥離した。 A dry film resist is laminated on a plating base material made of SUS304, ultraviolet rays are irradiated through an exposure mask on which an image pattern is formed, and development is performed to remove the resist in a portion not irradiated with ultraviolet rays. An image corresponding to the opening was formed with a resist. About 30 μm of Ni plating was deposited on the plating base material on which this image was formed by a conventional method, and the remaining dry film resist was peeled off.

前記したマスクに突起部材をエポキシ系の熱硬化型の接着シート(厚さ30μm、幅20mm)で貼り付けた。突起部材を接着した位置は図5に示したように、印刷時に基板の端部が接触する部分の中でスキージの移動方向と平行な部分とし、スキージの移動方向と直行する基板の端部を越え、マスクの端部近くまで、基板の端部が接着シートの幅の略中央に位置するように貼り付けた。このようにして突起を接着したマスクをめっき母材から引き剥がし、本発明のマスクを作製した。尚、突起部材は厚み20μmのポリイミドシートを、角を丸めた短冊状(幅20mm)に切断して作製した。 The protruding member was attached to the mask with an epoxy thermosetting adhesive sheet (thickness 30 μm, width 20 mm). As shown in FIG. 5, the position where the protruding member is bonded is a portion parallel to the moving direction of the squeegee among the portions where the end of the substrate contacts at the time of printing, and the end of the substrate orthogonal to the moving direction of the squeegee is used. The substrate was pasted so that the end of the substrate was positioned approximately at the center of the width of the adhesive sheet. In this way, the mask to which the protrusions were bonded was peeled off from the plating base material to produce the mask of the present invention. The protruding member was prepared by cutting a polyimide sheet having a thickness of 20 μm into a strip shape (width 20 mm) with rounded corners.

次に、180メッシュのポリエステル紗を張力のかかった状態で金属枠に貼り付けたメッシュ・スクリーン版の中央部に前記マスクの外周部を接着し、接着部より内側のポリエステル紗を切除することにより印刷版を作製した。 Next, the outer periphery of the mask is bonded to the center of the mesh screen plate attached to the metal frame in a state where a 180 mesh polyester ridge is applied, and the polyester fold inside the bonded portion is cut off. A printing plate was prepared.

実施例1で作製した印刷版、及び比較例として、突起を設けないマスクを用いた印刷版の印刷耐久性と印刷転写性を評価した。結果は、印刷耐久性は実施例1のマスクは2000回以上の印刷が可能であったが、比較例のマスクは950回で損傷を発生し、使用不可能となった。尚、印刷転写性は両者とも良好であった。   The printing durability and print transferability of the printing plate produced in Example 1 and a printing plate using a mask without projections were evaluated as comparative examples. As a result, although the printing durability of the mask of Example 1 was able to be printed 2000 times or more, the mask of the comparative example was damaged at 950 times and became unusable. Both print transfer properties were good.

実施例1と同じようにしてドライフィルムレジストで開口部に対応する像を形成した後、めっき母材上にNiめっきを厚み約30μm析出させ、残ったドライフィルムレジストを剥離した後、母材を引き剥がして開口部を有するマスクを作製した。次に、180メッシュのポリエステル紗を張力のかかった状態で金属枠に貼り付けたメッシュ・スクリーン版に前記マスクの外周部を接着し、接着部の内側のポリエステル紗を切除することにより印刷版を作製した。   After forming an image corresponding to the opening with a dry film resist in the same manner as in Example 1, Ni plating was deposited on the plating base material with a thickness of about 30 μm, and the remaining dry film resist was peeled off. A mask having an opening was prepared by peeling off. Next, the outer peripheral portion of the mask is bonded to a mesh screen plate attached to a metal frame in a state where a 180 mesh polyester bag is applied with tension, and the polyester plate inside the bonded portion is cut off to obtain a printing plate. Produced.

次に、前記印刷版に実施例1で用いたのと同じ突起部材を実施例1と同じ位置に液状の接着剤で貼り付けた。但し、突起部材にφ0.5mmの貫通孔を2mmピッチで形成し、該貫通孔からシアノアクリレート系接着剤を注入し貼り付けた。   Next, the same protruding member as used in Example 1 was attached to the printing plate at the same position as in Example 1 with a liquid adhesive. However, through holes having a diameter of 0.5 mm were formed in the protruding member at a pitch of 2 mm, and a cyanoacrylate adhesive was injected and pasted from the through holes.

実施例2にて作製した印刷版の印刷耐久性を評価したところ、2000回以上の印刷が可能であった。
When the printing durability of the printing plate produced in Example 2 was evaluated, printing of 2000 times or more was possible.

本発明のマスクは従来のマスクの作製方法を変更すること無く、また、印刷転写性を損なう事無くマスクの耐久性を向上させることができる。
The mask of the present invention can improve the durability of the mask without changing the conventional mask manufacturing method and without impairing the print transferability.

従来のマスクを用いた印刷用メタルマスク版Metal mask plate for printing using conventional mask 図1のa部の拡大図Enlarged view of part a in FIG. 本発明の印刷用メタルマスク版の断面図Sectional view of printing metal mask plate of the present invention 図3のb部の拡大図Enlarged view of part b in FIG. 本発明の印刷用メタルマスク版を上から見た図The figure which looked at the metal mask plate for printing of the present invention from the top

符号の説明Explanation of symbols

101:印刷用メタルマスク
102:紗
103:枠
104:被印刷基板
105:スキージ
106:基板の端部
107:突起
108:開口部
109:印刷時の基板端部の位置
101: metal mask for printing 102: collar 103: frame 104: printed substrate 105: squeegee 106: substrate edge 107: protrusion 108: opening 109: position of substrate edge during printing

Claims (2)

スクリーン印刷等に用いられる印刷用メタルマスクにおいて、印刷時に被印刷基板の端部が接触する部分で、スキージの移動方向と平行な部分に樹脂材料からなる突起部を形成したことを特徴とする印刷用メタルマスク。 In printing metal masks used for screen printing, etc., printing is characterized in that a protrusion made of a resin material is formed in a portion parallel to the moving direction of the squeegee at the portion where the end of the substrate to be printed contacts. Metal mask for use. 請求項1の印刷用メタルマスクを紗を介して枠に貼り付けた印刷用メタルマスク版。
A printing metal mask plate comprising the printing metal mask according to claim 1 attached to a frame through a ridge.
JP2007138461A 2007-05-24 2007-05-24 Metal mask for printing Pending JP2008290351A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102873977A (en) * 2012-10-13 2013-01-16 成都聚合科技有限公司 Irregular array hole type concentrating photovoltaic printing steel mesh
CN110962439A (en) * 2018-09-30 2020-04-07 张娜娜 Wire mesh cloth, weaving method of wire mesh cloth and screen printing screen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102873977A (en) * 2012-10-13 2013-01-16 成都聚合科技有限公司 Irregular array hole type concentrating photovoltaic printing steel mesh
CN110962439A (en) * 2018-09-30 2020-04-07 张娜娜 Wire mesh cloth, weaving method of wire mesh cloth and screen printing screen

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