JP2008268105A - X-ray beam source, x-ray beam irradiator, x-ray beam radiographic device, x-ray beam computer tomography device, x-ray element mapping examination apparatus and x-ray beam forming method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a small and light-weight X-ray beam source which forms X-ray beams. <P>SOLUTION: The X-ray beam source 13 has a lead-in wire 2 inserted into an insulating material 1 to apply voltage, a cathode placed at one end of the lead-in wire 2, a target 6 as an anode placed opposite to the cathode to generate X rays by colliding generated electron beams, a vacuum container 7 which accommodates the lead-in wire 2, the cathode and the target 6 and has an X-ray transmissive window 5 that transmits X rays, a filter 8 placed outside it to selectively extract characteristic X rays from X rays, a housing 10 accommodating the vacuum container 7 and the filter 8 and a Fresnel zone plate (FZP) 9 as an X-ray condensing element placed on the housing 10 to converge the characteristic X rays. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an X-ray beam source, an X-ray beam irradiation apparatus, an X-ray beam transmission imaging apparatus, an X-ray beam CT apparatus, an X-ray element mapping inspection apparatus, and an X-ray beam forming method.

  In general, X-rays emitted when an electron beam is incident on a metal target are X-rays having a broad distribution up to a low energy region with an acceleration voltage of the electron beam as an upper limit energy and a characteristic X-ray characteristic of a metal target. Is included. The braking X-ray is composed of a continuous (white) component, and the characteristic X-ray of the energy spectrum peculiar to the metal target is composed of a monochromatic component.

  In recent years, Fresnel Zone Plate (hereinafter referred to as FZP) using diffraction has been applied as an X-ray optical element that converges the X-ray. In order to converge this X-ray to one point, it is necessary to use a monochromatic component. For this reason, as a light source for using FZP, a synchrotron radiation facility using an electron storage ring accelerator that easily extracts monochromatic X-rays is used.

  FIG. 10 is an explanatory view showing a method of forming an X-ray focused beam using a conventional electron storage ring accelerator.

  As shown in this figure, the electron beam deflected by the deflecting electromagnet 52 in the electron storage ring accelerator 51 which is a synchrotron radiation facility becomes a beam line 53. The beam line 53 becomes an X-ray converged beam via the monochromator 54 and the X-ray condensing element 55. The X-ray converged beam is irradiated onto the test object 56, and the characteristic X-rays of the energy spectrum peculiar to the transmitted metal target are collected in various analyzers 57 and analyzed.

As described above, FZP using diffraction has been applied as an X-ray optical element in order to converge radiation. An X-ray microscope is known as a typical apparatus combining such synchrotron radiation and FZP (see, for example, Patent Document 1). In this X-ray microscope, it is difficult to scan the light source body due to the scale of the light source, and the sample is scanned.
Japanese Patent Laid-Open No. 06-281800

  When FZP is applied to the general X-ray tube described above, it is necessary to adopt a configuration that effectively separates and extracts characteristic X-rays that are monochromatic components from among the X-ray components emitted from the X-ray tube. . An X-ray microscope is known as a typical apparatus combining this synchrotron radiation and FZP.

  However, when a configuration such as this X-ray microscope is employed, it is difficult to scan the light source body due to the size of the light source, and it is also difficult to easily scan the X-ray beam. For this reason, there has been a problem that the method is limited to a method of use that scans the sample.

  In addition, when trying to construct an apparatus that has the function of arbitrarily scanning X-rays that are focused and collimated by FZP, position control is performed by making the X-ray beam source including FZP as small and lightweight as possible. There was a problem that it was necessary to make it easy to perform.

  Further, if FZP is applied to a small X-ray generator such as an X-ray tube and the beam can be effectively extracted as a convergent or parallel beam, there is a problem that the X-ray beam can be arbitrarily scanned.

  The present invention has been made in order to solve the above-described problems, and is intended to reduce the size and weight of an X-ray beam source that forms an X-ray beam, and further has an X-ray beam scanning function using the X-ray beam scanning function. An object is to provide an irradiation apparatus, an X-ray beam transmission imaging apparatus, an X-ray beam CT apparatus, an X-ray element mapping inspection apparatus, and an X-ray beam forming method.

  In order to achieve the above object, in the X-ray beam apparatus of the present invention, an introduction line inserted into an insulating material to which a voltage is applied, a cathode provided at one end of the introduction line, and provided facing the cathode. A target that is an anode that generates X-rays by colliding the generated electron beam, a vacuum vessel that contains the introduction line, the cathode, and the target and contains an X-ray transmission window through which the X-ray passes, and this X-ray transmission A filter provided outside the window for selectively extracting characteristic X-rays from the X-ray, a housing for housing the vacuum container and the filter, and an X-ray collection provided through the housing for converging the characteristic X-rays And an optical element.

  In order to achieve the above object, in the method of forming an X-ray beam of the present invention, a cathode inserted into an insulating material in a vacuum vessel and provided at one end of an introduction line, and provided facing the cathode. An X-ray generation step of generating an X-ray by colliding an electron beam generated by applying a voltage between a target as an anode, and a characteristic from the X-ray through a filter provided outside the vacuum vessel A characteristic X-ray extraction step for selectively extracting X-rays, and an X-ray convergence step for converging the characteristic X-rays with an X-ray condensing element provided in a housing accommodating the vacuum vessel and the filter. It is a feature.

  According to the X-ray beam source, the X-ray beam irradiation apparatus, the X-ray beam transmission imaging apparatus, the X-ray beam CT apparatus, the X-ray element mapping inspection apparatus, and the X-ray beam forming method of the present invention, the insulator is provided in the vacuum container. By arranging the lead-in through, the X-ray beam source can be reduced in size and weight. Thus, an X-ray beam can be scanned, and an X-ray can be irradiated to an arbitrary position of a large irradiation object that is difficult to move.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of an X-ray beam source, an X-ray beam irradiation apparatus, an X-ray beam transmission imaging apparatus, an X-ray beam CT apparatus, an X-ray element mapping inspection apparatus, and an X-ray beam forming method according to the present invention will be described below. The description will be given with reference. Here, the same or similar parts are denoted by common reference numerals, and redundant description is omitted.

  FIG. 1 is a longitudinal sectional view showing a configuration of a transmission type X-ray beam apparatus according to a first embodiment of the present invention, and FIG. 2 is a reflection type X-ray according to the first embodiment of the present invention. It is a longitudinal cross-sectional view which shows the structure of a beam apparatus.

  As shown in the figure, the X-ray beam irradiation apparatus is composed of a vacuum vessel 7. An introduction line 2 to which a high voltage 33 is applied is inserted from the lower part of the vacuum vessel 7. In the vacuum vessel 7, the introduction wire 2 penetrates the insulating material 1. Since the insulating material 1 is formed in a concavo-convex shape, the creeping insulation distance with respect to the high voltage 33 is sufficiently ensured.

  A Wehnelt Electrode 3 is provided at the upper end of the lead-in line 2. The Wehnelt 3 is a cylindrical electrode for converging electron beams, and is mounted so as to surround the cathode. An emitter 4 is provided on the top surface of the Wehnelt 3. The emitter 4 emits carriers.

  In addition, an X-ray transmission window 5 is provided on the upper part of the vacuum vessel 7. A target (anode) 6 is disposed inside the X-ray transmission window 5.

  The vacuum container 7 is housed in the housing 10. A Fresnel zone plate (FZP) 9 using diffraction is provided on the upper portion of the housing 10 as an X-ray optical element for converging X-rays. A filter 8 is provided between the FZP 9 and the X-ray transmission window 5. The X-ray beam source 13 is constituted by the components described above.

  Further, the vacuum container 7 is placed on the table 11 a of the scanning mechanism 11. By operating the table 11a, the X-ray beam source 13 can be moved in the vertical direction and the horizontal direction.

  In the present embodiment configured as described above, a negative high voltage 33 is applied to the emitter 4 via the lead-in line 2. By applying this negative high voltage 33, an electron beam 31 is generated from the emitter 4 by field emission. The generated electron beam 31 is orbitally shaped by the Wehnelt 3 and accelerated by the electric field between the emitter 4 and the target 6 and collides with the target 6. The electron beam 31 colliding with the target 6 is braked by the target metal, and X-rays 32 are emitted in the 4π (sr) direction from the point of the collision. A part of the X-ray 32 is taken out of the vacuum vessel 7 by passing through the X-ray transmission window 5. The X-ray 32 taken out to the outside of the vacuum vessel 7 passes through the filter 8 while spreading. Through this filter 8, the X-ray 32 becomes a characteristic X-ray having a monochromatic energy spectrum. This characteristic X-ray is incident on the FZP 9. Through this FZP 9, the X-ray beam 32 is converged to a focal point 35 which is one point.

  The above components are housed in the housing 10 and constitute an X-ray beam source 13. Further, for example, a mechanism for three-dimensionally scanning the X-ray beam source 13 can be provided by moving the base 11a of the X-ray beam scanning mechanism 11 on which the housing 10 is mounted in the vertical direction and the horizontal direction. .

  According to the present embodiment, it is possible to secure a creeping insulation distance against a high voltage by disposing an introduction line that penetrates the concavo-convex insulator in the vacuum vessel 7. And the length of the vacuum vessel 7 can be shortened, and the small and metered X-ray beam source 13 can be obtained. Further, by reducing the size and measuring the X-ray beam source 13, the X-ray beam source 13 can be provided with a mechanism for three-dimensional scanning, and the X-ray convergence point can be set to an arbitrary point on the three-dimensional. It is possible to scan. Thus, by using a small X-ray beam source, it is possible to irradiate X-rays at an arbitrary position on a large irradiated object that is difficult to move without moving the sample that is the irradiated object.

  FIG. 2 is a longitudinal sectional view showing the configuration of the main part of the reflective X-ray beam apparatus according to the first embodiment of the present invention. The embodiment of FIG. 2 shows a reflection type target 6a instead of the transmission type target 6 of FIG. 1, and the same or similar parts as those of the embodiment of FIG. The duplicated explanation is omitted.

  As shown in the figure, the reflection type X-ray beam apparatus includes a reflection type target 6a.

  In the present embodiment, the generated electron beam 31 is orbitally shaped by the Wehnelt 3, accelerated by the electric field between the emitter 4 and the reflective target 6 a, and collides with the target 6. The electron beam 31 that has collided with and reflected by the reflective target 6a is braked by the target metal, and X-rays 32 are emitted. A part of the X-ray 32 is taken out of the vacuum vessel 7 by passing through the X-ray transmission window 5. The X-ray 32 taken out to the outside of the vacuum vessel 7 passes through the filter 8 while spreading. Through this filter 8, the X-ray 32 becomes a characteristic X-ray having a monochromatic energy spectrum. This characteristic X-ray is incident on the FZP 9. Through this FZP 9, the X-ray beam 32 is converged to a focal point 35 which is one point.

  According to the present embodiment, it is possible to provide a mechanism for three-dimensionally scanning the X-ray beam source 13 even when a reflective X-ray source is used, and the X-ray convergence point is scanned to an arbitrary point in three dimensions. It becomes possible. Thus, by using a small X-ray beam source, it is possible to irradiate X-rays at an arbitrary position on a large irradiated object that is difficult to move without moving the sample that is the irradiated object.

  FIG. 3 is a longitudinal sectional view showing the configuration of the main part of the X-ray beam apparatus according to the second embodiment of the present invention. In this embodiment, a second FZP 12 is added to the first embodiment, and the same or similar parts as those in the first embodiment are denoted by common reference numerals, thereby overlapping. Description is omitted.

  As shown in the figure, the X-ray beam irradiation apparatus has a configuration in which a second FZP 12 is added in addition to the first FZP 9.

  In the present embodiment, the characteristic X-ray beam 32 monochromatic by the filter 8 is converted into a parallel beam by the first FZP 9. Further, the parallel X-rays 32 can be converged to the focal point 35 by the second FZP 12.

  Further, the X-ray beam can be arbitrarily controlled by using the scanning mechanism 11 shown in FIG.

  According to the present embodiment, the X-ray 32 converted into a parallel beam is provided with the second FZP 12 and converged to one point, thereby suppressing a decrease in the X-ray dose and transmitting the X-ray beam over a long distance. Become. Such an X-ray irradiation apparatus is effective when the distance between the X-ray beam source 13 and the irradiated object cannot be reduced due to the problem of installation space.

  FIG. 4 is a longitudinal sectional view showing the configuration of the main part of the X-ray beam apparatus according to the third embodiment of the present invention. In this embodiment, a plurality of the X-ray beam sources 13 of the first embodiment are provided around the irradiated body 14, and the same or similar parts as those of the first embodiment are common. Duplicate description is omitted by adding symbols.

  As shown in this figure, a plurality of X-ray beam sources 13 shown in FIG. 1 are three-dimensionally arranged around an irradiated body 14 as a sample.

  In the present embodiment, the convergence point of the X-ray beam 32 from each X-ray beam source 13 can be adjusted to overlap the focal point 35. Thus, it becomes possible to irradiate an arbitrary point on the irradiated body 14 with high-intensity X-rays.

  According to the present embodiment, it is possible to reduce extra X-ray irradiation to a place other than an arbitrary X-ray irradiation point of the irradiation object 14. Further, by moving the stage 11a of the scanning mechanism 11 shown in FIG. 1, the X-rays to the irradiated object 14 are controlled by controlling the positions of a plurality of X-ray convergence points and changing the beam intensity of each X-ray irradiation apparatus. Intensity modulated irradiation is also possible.

  FIG. 5 is a front view showing the configuration of the X-ray beam apparatus according to the fourth embodiment of the present invention. In the present embodiment, the X-ray beam source 13 of the first embodiment is incorporated into a lens holder 24, and the same or similar parts as those of the first embodiment are denoted by common reference numerals. The duplicated explanation is omitted.

  As shown in the figure, the X-ray beam source 13 shown in FIG. 1 has a very small size, for example, the size of the objective lens of the microscope 26, and is incorporated in the rotary lens holder 24 of the microscope 26. It is.

  In the present embodiment, observation and X-ray beam irradiation are configured to be switched. Further, the X-ray beam source 13 may be configured to be installed on a fine adjustment stage 25 having a mechanism for arbitrarily finely adjusting the position on the lens holder 24.

  According to the present embodiment, the X-ray irradiation position can be controlled while observing the sample 14 using the optical microscope 26 using visible light and ultraviolet light other than X-rays. Thus, a series of measurement operations can be performed while switching between observation of the sample 14 and X-ray beam irradiation.

  FIG. 6 is an explanatory diagram showing the configuration of the X-ray beam apparatus according to the fifth embodiment of the present invention. The present embodiment relates to an X-ray transmission imaging apparatus using the X-ray beam source 13 of the first embodiment, and common reference numerals are used for parts that are the same as or similar to those of the first embodiment. A duplicate description will be omitted.

  As shown in this figure, the present invention relates to an X-ray transmission imaging apparatus using the X-ray beam source 13 shown in FIG. The X-ray beam emitted from the X-ray beam source 13 is a convergent beam 32, and its focal point 35 is positioned immediately before the irradiated body 14 that is the subject or in the vicinity of the measurement site inside the irradiated body 14 in some cases. Adjust as follows. The X-ray beam that has passed through the irradiation object 14 is divergent beam 34 and is incident on the opposite X-ray camera 15.

  According to the present embodiment, by irradiating the X-ray beam emitted from the X-ray beam source 13 as the convergent beam 32, compared to X-rays from a general X-ray tube that emits isotropically, X-rays can be irradiated in a concentrated manner on the region to be imaged. Thus, the smaller the size of the imaging target portion of the irradiated body 14 is, the more focused the target portion is irradiated with X-rays, and the X-ray camera 15 can efficiently capture the amount of X-rays (light). Imaging by X-ray transmission imaging can be obtained efficiently.

  FIG. 7 is an explanatory diagram showing the configuration of the X-ray CT apparatus according to the sixth embodiment of the present invention. This embodiment relates to an X-ray CT (Computed Tomography) apparatus using the X-ray beam source 13 of the first embodiment, and is the same as or similar to the first embodiment. These parts are denoted by the same reference numerals, and redundant description is omitted.

  As shown in this figure, the present invention relates to an X-ray CT apparatus constructed by improving the system related to the X-ray transmission imaging apparatus shown in FIG. 6 using an X-ray beam source 13.

  In the present embodiment, the irradiated object 14 is placed on the turntable 17. The convergent X-ray beam 32 emitted from the X-ray beam source 13 is incident on the object to be irradiated 14 that is a rotating subject. On the other hand, the signal of the transmitted X-ray beam 34 is measured using the X-ray detector 16. The turntable 17 is rotated to collect irradiation signal data, transmission signal data, and the like from many directions. A CT image of the irradiation object 14 can be obtained by processing the collected data by the image reconstruction device 18. Further, it is possible to display on a CRT (Cathode Ray Tube) 19.

  Further, when photographing a minute region of the irradiated object 14, X-rays can be focused on the target site and can be efficiently emitted by the X-ray detector, as in the fifth embodiment. This is effective in capturing the amount of (light).

  According to the present embodiment, the above-described X-ray CT apparatus can perform a precise inspection of a minute region with high efficiency.

  FIG. 8 is an explanatory diagram showing the configuration of the X-ray beam element mapping inspection apparatus according to the seventh embodiment of the present invention. The present embodiment relates to an X-ray beam element mapping apparatus using the X-ray beam source 13 of the first embodiment, and common reference numerals are used for the same or similar parts as the first embodiment. A duplicate description will be omitted.

  As shown in this figure, the present invention relates to an X-ray beam element mapping inspection apparatus using the X-ray beam source 13 shown in FIG. The X-ray beam emitted from the X-ray beam source 13 is incident on the irradiated body 14 as a convergent beam 32. At this time, the convergent beam 32 is arranged so that the focal point 35 coincides with a minute region on the surface of the irradiated object 14 as a sample by the FZP 9 shown in FIG. The signal of the transmitted X-ray beam 34 is measured using the X-ray detector 16.

  On the other hand, an X-ray spectrum detector 21 having an FZP 9a and a collimator 20 for capturing fluorescent X-rays emitted from the irradiated body 14 is arranged on the X-ray irradiation side with respect to the irradiated body 14. Yes. The collimator 20 obtains a parallel light beam using a lens or the like.

  The FZP 9, the collimator 20, and the X-ray spectrum detector 21 are accommodated in a holder 22. Further, the holder 22 and the X-ray beam source 13 are integrated. The entire holder 22 is installed on the drive stage 23.

  In the present embodiment, X-rays can be focused on a minute region of the irradiated object 14 by the transmission image of the X-ray beam element mapping inspection apparatus, and the elemental analysis of the irradiated object 14 can be performed. It is possible to inspect the composition and structure of the micro region with high resolution.

  Further, by driving the holder 22 on which the X-ray beam source 13 and the X-ray spectrum detector 21 are mounted, a transmission image and an element mapping inspection can be performed while the irradiated object 14 is fixed. Further, even in the sample 14 whose position is likely to change due to driving of the sample or the like precipitated in the solution, the sample is not shaken, and a highly accurate inspection can be performed.

  According to the present embodiment, by using the X-ray beam element mapping inspection apparatus described above, it is possible to perform element mapping inspection with an X-ray beam with high resolution and no positional deviation of the sample by stage driving.

  FIG. 9 is an explanatory diagram showing a configuration of a modified example of the X-ray beam element mapping inspection apparatus according to the eighth embodiment of the present invention. This embodiment relates to an X-ray beam element mapping apparatus using the X-ray beam source 13 of the first embodiment and having a deflector 27 added thereto, and is the same as or similar to the first embodiment. Parts are denoted by common reference numerals, and redundant description is omitted.

  As shown in this figure, this X-ray beam element mapping apparatus is configured using the X-ray beam source of FIG. A deflector 27 that deflects the electron beam 31 is added as an X-ray source constituting the X-ray beam source 13.

  In the present embodiment, the incident point of the target 6 of the electron beam 31 in the X-ray beam source 13 can be changed by using a deflector 27 such as an electrostatic deflector or a deflecting electromagnet. For this reason, the angle at which the X-ray beam 32 is incident on the FZP 9 can be changed. In addition, the X-ray irradiation position on the irradiated body 14 can be arbitrarily changed. Thus, the element mapping inspection of the minute region can be performed under the condition that the elements related to the detection blur such as the X-ray beam source 13, the X-ray spectrum detector 21 and the sample 14 are fixed.

  According to the present embodiment, by using the X-ray beam element mapping inspection apparatus using the deflector 27, it is possible to perform an X-ray beam element mapping inspection that is less affected by the positional deviation.

  Furthermore, the present invention is not limited to the embodiments described above, and the scanning mechanism may be swung, and various modifications may be made without departing from the spirit of the present invention. Can do.

1 is a longitudinal sectional view showing the configuration of a transmission type X-ray beam irradiation apparatus according to a first embodiment of the present invention. 1 is a longitudinal sectional view showing a configuration of a main part of a reflection type X-ray beam irradiation apparatus according to a first embodiment of the present invention. The longitudinal cross-sectional view which shows the structure of the principal part of the X-ray beam irradiation apparatus of the 2nd Embodiment of this invention. The longitudinal cross-sectional view which shows the structure of the principal part of the X-ray beam irradiation apparatus of the 3rd Embodiment of this invention. The front view which shows the structure of the X-ray beam irradiation apparatus of the 4th Embodiment of this invention. Explanatory drawing which shows the structure of the X-ray transmission imaging apparatus of the 5th Embodiment of this invention. Explanatory drawing which shows the structure of the X-ray CT apparatus of the 6th Embodiment of this invention. Explanatory drawing which shows the structure of the X-ray beam element mapping inspection apparatus of the 7th Embodiment of this invention. Explanatory drawing which shows the structure of the modification of the X-ray beam element mapping inspection apparatus of the 7th Embodiment of this invention. Explanatory drawing which shows the formation method of the X-ray focused beam using the conventional electron storage ring accelerator.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Insulation material, 2 ... Lead wire, 3 ... Wehnelt, 4 ... Emitter, 5 ... X-ray transmissive window, 6 ... Target, 7 ... Vacuum container, 8 ... Filter, 9 ... Fresnel zone plate (FZP), 10 ... Housing , 11 ... scanning mechanism, 12 ... second FZP, 13 ... X-ray beam source, 14 ... irradiated object (sample), 15 ... X-ray camera, 16 ... X-ray detector, 17 ... turntable, 18 ... image Reconstruction device, 19 ... CRT, 20 ... collimator, 21 ... X-ray spectrum detector, 22 ... holder, 23 ... drive stage, 24 ... lens holder, 25 ... fine adjustment stage, 26 ... microscope, 27 ... deflector.

Claims (12)

A lead wire inserted into the insulating material and applied with voltage;
A cathode provided at one end of the lead-in wire,
A target which is an anode that is provided facing the cathode and generates an X-ray by colliding with the generated electron beam;
A vacuum vessel containing an X-ray transmission window for accommodating the introduction wire, the cathode and the target and through which the X-ray passes;
A filter provided outside the X-ray transmission window to selectively extract characteristic X-rays from the X-ray;
A housing for housing the vacuum container and the filter;
An X-ray condensing element provided through the housing and converging the characteristic X-ray;
An X-ray beam source comprising:   The X-ray beam source according to claim 1, wherein the target is formed so as to transmit the X-ray.   The X-ray beam source according to claim 1, wherein the target is formed so as to reflect the X-ray.   The X-ray focusing element includes a first X-ray focusing element that shapes the X-ray into a parallel beam, and a second X-ray focusing element that converges the parallel X-ray beam at one point. The X-ray beam source according to claim 1.   5. The X-ray beam source according to claim 1, further comprising a scanning mechanism capable of arbitrarily scanning the X-ray.   6. The X-ray beam irradiation apparatus according to claim 5, wherein a plurality of the X-ray beam sources are arranged three-dimensionally around the irradiated body.   4. An X-ray beam irradiation apparatus according to claim 1, wherein the X-ray beam source is housed in an objective lens holder and includes a fine adjustment mechanism.   The X-ray beam source according to any one of claims 1 to 3, a sample mounting table on which a sample irradiated with X-rays from the X-ray beam source is mounted, and transmitted X-rays from the sample are detected And an X-ray detector.   The X-ray beam source according to any one of claims 1 to 3, a sample mounting table on which a sample irradiated with X-rays from the X-ray beam source is mounted, and a turntable for turning the sample mounting table And an X-ray detector that detects transmitted X-rays from the sample, and an image reconstruction device that forms an image by receiving a signal from the X-ray detector. CT device.   The X-ray beam source according to any one of claims 1 to 3, a sample irradiated with X-rays from the X-ray beam source, an X-ray detector for detecting transmitted X-rays from the sample, and An X-ray element mapping inspection comprising: an X-ray spectrum detector for detecting a spectrum of X-rays irradiated on a sample; and a driving stage for driving the X-ray beam source and the X-ray spectrum detector. apparatus.   The X-ray element mapping inspection apparatus according to claim 10, wherein the X-ray beam source includes an electron beam deflector that deflects the electron beam. An electron beam generated by applying a voltage between a cathode inserted into an insulating material in a vacuum vessel and provided at one end of an introduction line and a target, which is an anode provided facing the cathode, is collided. An X-ray generation step for generating X-rays;
A characteristic X-ray extraction step for selectively extracting characteristic X-rays from the X-rays through a filter provided outside the vacuum container;
An X-ray converging step for converging the characteristic X-rays with an X-ray condensing element provided in a housing containing the vacuum vessel and filter;
An X-ray beam forming method comprising:

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