JP2008258355A - Electrode foil for capacitor - Google Patents

Electrode foil for capacitor Download PDF

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Publication number
JP2008258355A
JP2008258355A JP2007098160A JP2007098160A JP2008258355A JP 2008258355 A JP2008258355 A JP 2008258355A JP 2007098160 A JP2007098160 A JP 2007098160A JP 2007098160 A JP2007098160 A JP 2007098160A JP 2008258355 A JP2008258355 A JP 2008258355A
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JP
Japan
Prior art keywords
electrode foil
base material
foil
valve action
action metal
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Pending
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JP2007098160A
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Japanese (ja)
Inventor
Yuji Murashima
祐二 村嶋
Tatsuji Aoyama
達治 青山
Kazuhiko Mikami
和彦 三上
Hiroshi Adachi
博 安達
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2007098160A priority Critical patent/JP2008258355A/en
Publication of JP2008258355A publication Critical patent/JP2008258355A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrode foil for capacitors having capacity expanded by expanding a surface area further and having excellent mechanical strength for the electrode foil used for the capacitor for various kinds of electronic equipment. <P>SOLUTION: The electrode foil comprises a base material 1 made of valve action metal foil, and a vapor-deposited layer 1a of a valve action metal formed by deposition on the surface of the base material 1. The vapor-deposited layer 1a of the valve action metal is in a frost columnar structure toward the surface layer from the base material 1, and respective particles in each column are branched into a plurality of parts for integration, thus realizing a so-called Caulerpa lentillifera shape. Further roughening enlarges the surface area and increases mechanical strength and capacity. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は各種電子機器に使用されるコンデンサ用電極箔に関するものである。   The present invention relates to a capacitor electrode foil used in various electronic devices.

各種コンデンサに使用されるコンデンサ用電極箔(以下、電極箔と呼ぶ)は、単位面積当たりの表面積を拡大して容量拡大を図る目的で、一般に表面を粗面化して用いるようにしており、この粗面化作業はエッチングによるものと、蒸着によるものとに大別される。   Capacitor electrode foils (hereinafter referred to as electrode foils) used for various capacitors are generally used with a roughened surface for the purpose of enlarging the capacity by increasing the surface area per unit area. The roughening operation is roughly classified into etching and vapor deposition.

上記エッチングによるものとしては、塩素イオンを含むエッチング液中でアルミニウム箔を電解エッチングする際に、前段でアルミニウム箔の直流電解エッチングを行い、後段で前記アルミニウム箔の浸漬処理をした後、交流電解エッチングの電流密度を徐々に上昇させ、その後一定電流密度でエッチングを行う方法により、アルミニウム原箔の特性変化があっても、後段の交流電解エッチングの開始点となる一定の初期ピットを作ることができて安定した品質の電極箔を製造することができる(特許文献1)等の技術が開示されている。   As for the above-mentioned etching, when the aluminum foil is electrolytically etched in an etching solution containing chlorine ions, the aluminum foil is subjected to DC electrolytic etching in the former stage, and the aluminum foil is immersed in the latter stage, and then AC electrolytic etching is performed. By gradually increasing the current density and then etching at a constant current density, even if the characteristics of the aluminum foil change, it is possible to create a constant initial pit that is the starting point for the subsequent AC electrolytic etching. In addition, there is disclosed a technique capable of manufacturing an electrode foil having a stable and stable quality (Patent Document 1).

また、蒸着によるものとしては、酸素又は酸素化化合物を含む雰囲気でアルミニウムを蒸発させ、次いで凝縮及び凝固させることにより、デポジットゾーンの圧力が2.8〜0.3Paであるチャンバ内の固定又は可動基板の片面又は両面に、0.03〜0.2マイクロメートル/秒の厚み増加速度でデポジットを形成する方法により、比較的大きな容量が得られる(特許文献2)等の技術が開示されている。
特開平9−171945号公報 特公平7−15864号公報
In addition, by evaporation, aluminum is evaporated in an atmosphere containing oxygen or an oxygenated compound, and then condensed and solidified, so that the pressure in the deposit zone is fixed or movable in the chamber of 2.8 to 0.3 Pa. A technique is disclosed in which a relatively large capacity can be obtained by a method of forming a deposit at a thickness increase rate of 0.03 to 0.2 micrometers / second on one or both sides of a substrate (Patent Document 2). .
JP-A-9-171945 Japanese Patent Publication No. 7-15864

しかしながら上記従来のコンデンサ用電極箔では、アルミニウム箔の表面をエッチングにより粗面化する特許文献1の技術では、エッチング技術ならびにコンデンサ用電極箔の機械的強度面から、エッチング加工による表面積の更なる拡大には自ずと限界があり、これ以上の容量拡大を図ることは極めて困難であるという課題を有したものであった。   However, in the conventional capacitor electrode foil, in the technique of Patent Document 1 in which the surface of the aluminum foil is roughened by etching, the surface area is further increased by etching from the viewpoint of the etching technique and the mechanical strength of the capacitor electrode foil. However, there is a limit, and it is extremely difficult to expand the capacity beyond this.

また、アルミニウム箔の表面にアルミニウムを蒸着させて粗面化する特許文献2の技術では、蒸着層を形成する各粒子間の繋がり(結合強度)が弱いために化成時にネッキング部が破壊されるという課題があり、このような破壊が発生すると、破壊した箇所から先には電流が流れなくなるため、所望の容量が得られないというものであった。   In addition, in the technique of Patent Document 2 in which aluminum is vapor-deposited on the surface of an aluminum foil to roughen the surface, the necking portion is destroyed during formation because the connection (bond strength) between the particles forming the vapor deposition layer is weak. There is a problem, and when such a breakdown occurs, a current does not flow from the point where the breakdown occurs, so that a desired capacity cannot be obtained.

さらに、このように各粒子間の結合強度を確保することが難しい状態のコンデンサ用電極箔では、巻回形の素子を作製する際に加わる機械的応力によって蒸着層が破壊されてしまうため、巻回形の素子を作製するのが極めて困難であるという課題があった。   Furthermore, in such a capacitor electrode foil in which it is difficult to ensure the bonding strength between the particles, the vapor deposition layer is destroyed by the mechanical stress applied when the wound element is manufactured. There is a problem that it is extremely difficult to manufacture a circular element.

本発明はこのような従来の課題を解決し、更なる粗面化によって表面積を拡大し、かつ、高い機械的強度を有し、高容量化を実現することができるコンデンサ用電極箔を提供することを目的とするものである。   The present invention solves such a conventional problem, and provides an electrode foil for a capacitor that can increase the surface area by further roughening, have high mechanical strength, and realize high capacity. It is for the purpose.

上記課題を解決するために本発明は、弁作用金属箔からなる基材と、この基材の表面に蒸着によって形成された弁作用金属の蒸着層からなり、この弁作用金属の蒸着層が、基材から表層に向かって霜柱状構造に、かつ、夫々の柱は個々の粒子が複数に枝分かれして一体に結合した、いわゆる、海ぶどう状に形成された構成にしたものである。   In order to solve the above-mentioned problem, the present invention comprises a base material made of a valve action metal foil and a valve action metal vapor deposition layer formed on the surface of the base material by vapor deposition, A frost columnar structure is formed from the base material to the surface layer, and each column has a structure formed in a so-called sea grape shape in which individual particles are branched into a plurality and integrally joined.

以上のように本発明によるコンデンサ用電極箔は、蒸着層が基材から表層に向かって霜柱状構造に、かつ、夫々の柱は個々の粒子が複数に枝分かれして一体に結合した、いわゆる、海ぶどう状に形成されることにより、更なる粗面化によって表面積を拡大し、かつ、高い機械的強度を有するため、高容量化を実現することができるという効果が得られるものである。   As described above, the electrode foil for a capacitor according to the present invention is a so-called frost columnar structure in which a vapor deposition layer is formed from a base material to a surface layer, and each column is a single unit in which individual particles are branched into a plurality of pieces. By being formed in the shape of sea grapes, the surface area is increased by further roughening, and since it has high mechanical strength, it is possible to achieve the effect of achieving high capacity.

(実施の形態)
以下、実施の形態を用いて、本発明の特に全請求項に記載の発明について説明する。
(Embodiment)
Hereinafter, the invention described in the entire claims of the present invention will be described by using embodiments.

図1は本発明の一実施の形態によるコンデンサ用電極箔の構成を示したSEM(走査電子顕微鏡)写真(1万倍)、図2は図1の要部を拡大したSEM写真(3万倍)である。   FIG. 1 is a SEM (scanning electron microscope) photograph (10,000 times) showing the structure of a capacitor electrode foil according to an embodiment of the present invention, and FIG. 2 is an enlarged SEM photograph (30,000 times) of the main part of FIG. ).

図1、図2において、1はアルミニウム箔からなる基材、1aはこの基材1の表面に蒸着によって形成されたアルミニウムの蒸着層であり、図1から分かるように、蒸着層1aは基材1から表層に向かって霜柱状の構造に複数が密集して形成されており、また、このような霜柱状構造に形成された蒸着層1aを構成する夫々の柱は、図2から分かるように、個々の粒子が複数に枝分かれした状態で一体に結合した、いわゆる、海ぶどう状の構造に形成されているものである。   1 and 2, reference numeral 1 denotes a base material made of an aluminum foil, 1a denotes an aluminum vapor deposition layer formed on the surface of the base material 1 by vapor deposition, and as can be seen from FIG. 1, the vapor deposition layer 1a is a base material. As shown in FIG. 2, a plurality of frost column structures are formed densely from 1 to the surface layer, and each column constituting the vapor deposition layer 1 a formed in such a frost column structure can be seen from FIG. 2. These are formed in a so-called sea grape-like structure in which individual particles are integrally bonded in a state of being branched into a plurality of branches.

なお、このように構成された本実施の形態によるコンデンサ用電極箔は、厚みが50μmの高純度アルミニウム箔を用い、真空雰囲気の中にアルゴンガスと酸素を流入させてアルミニウム箔の表面にアルミニウムの微粒子を蒸着させるようにして作製したものであるが、これらはいずれも公知の製造装置ならびに製造方法を用いて行ったものである。   The capacitor electrode foil according to the present embodiment configured as described above uses a high-purity aluminum foil having a thickness of 50 μm. Argon gas and oxygen are allowed to flow into the vacuum atmosphere so that the aluminum foil is placed on the surface of the aluminum foil. These were prepared by vapor-depositing fine particles, both of which were performed using a known manufacturing apparatus and manufacturing method.

このように構成された本実施の形態によるコンデンサ用電極箔は、図3の空孔径分布を示した特性図から明らかなように、空孔径の最頻値が約0.03μmと極めて微細なものであるため、比較用に示したエッチングによる同電極箔の空孔径の最頻値である約0.15μmと比較して極めて微細化されたものであり、これにより、表面積を大きく拡大することができるばかりでなく、蒸着層1aが基材1から表層に向かって霜柱状構造に形成されているために、コンデンサとしてみた場合、液(駆動用電解液やポリマー等)の含浸性に優れるという特徴を有するものである。   The capacitor electrode foil according to this embodiment configured as described above has an extremely fine pore diameter mode of about 0.03 μm, as is apparent from the characteristic diagram showing the pore diameter distribution in FIG. Therefore, compared with about 0.15 μm, which is the mode value of the hole diameter of the same electrode foil by etching shown for comparison, it is extremely miniaturized, which can greatly increase the surface area. In addition to being able to do so, the vapor deposition layer 1a is formed in a frost columnar structure from the base material 1 to the surface layer, so that when viewed as a capacitor, it is excellent in impregnation of liquid (driving electrolyte, polymer, etc.). It is what has.

さらに、上記霜柱状構造の夫々の柱が、個々の粒子が複数に枝分かれして一体に結合した、いわゆる、海ぶどう状に形成されているために、個々の粒子間の結合強度が高くなってネッキング部の破壊を抑制することができるようになり、これにより、化成時にネッキング部が破壊されるということがなくなるばかりでなく、このコンデンサ用電極箔を用いて巻回形の素子を作製することも容易になるものである。   Furthermore, since each column of the frost columnar structure is formed in a so-called sea grape shape in which individual particles are branched into a plurality of pieces and bonded together, the bond strength between the individual particles is increased. It becomes possible to suppress the destruction of the necking portion, thereby not only preventing the necking portion from being destroyed at the time of chemical formation, but also producing a wound element using this capacitor electrode foil Is also easier.

このように本実施の形態によるコンデンサ用電極箔は、表面積の拡大を図って容量拡大が図れるばかりでなく、液の含浸性に優れ、しかもネッキング部の結合強度を高めることができるため、巻回形の素子を作製することも容易になるという格別の効果を奏するものである。   Thus, the capacitor electrode foil according to the present embodiment can not only increase the surface area and expand the capacity, but also has excellent liquid impregnation properties and can increase the bonding strength of the necking portion. This produces an exceptional effect that it is also easy to produce a device having a shape.

本発明によるコンデンサ用電極箔は、容量拡大が図れ、液の含浸性に優れ、しかも巻回形の素子を作製することも容易になるという効果を有し、あらゆる分野のコンデンサ用として有用である。   The electrode foil for capacitors according to the present invention has the effects that the capacity can be increased, the liquid impregnation property is excellent, and it is easy to produce a wound element, and is useful for capacitors in various fields. .

本発明の一実施の形態によるコンデンサ用電極箔の構成を示したSEM写真SEM photograph showing the configuration of an electrode foil for a capacitor according to an embodiment of the present invention 図1の要部を拡大したSEM写真SEM photo with enlarged main part of FIG. 同コンデンサ用電極箔の空孔径分布を示した特性図Characteristic diagram showing the pore size distribution of the capacitor electrode foil

符号の説明Explanation of symbols

1 基材
1a 蒸着層
1 Base material 1a Vapor deposition layer

Claims (3)

弁作用金属箔からなる基材と、この基材の表面に蒸着によって形成された弁作用金属の蒸着層からなり、この弁作用金属の蒸着層が、基材から表層に向かって霜柱状構造に、かつ、夫々の柱は個々の粒子が複数に枝分かれして一体に結合した、いわゆる、海ぶどう状に形成されたコンデンサ用電極箔。 It consists of a base material made of valve action metal foil and a valve action metal vapor deposition layer formed by vapor deposition on the surface of this base material, and this valve action metal vapor deposition layer has a frost columnar structure from the base material to the surface layer. Each pillar is a so-called sea grape-shaped electrode foil in which individual particles are branched into a plurality of pieces and joined together. 弁作用金属箔からなる基材としてアルミニウム箔を用いた請求項1に記載のコンデンサ用電極箔。 The electrode foil for capacitors according to claim 1, wherein an aluminum foil is used as a base material made of a valve action metal foil. 弁作用金属の蒸着層としてアルミニウムを用いた請求項1に記載のコンデンサ用電極箔。 The electrode foil for capacitors according to claim 1, wherein aluminum is used as a vapor deposition layer of the valve metal.
JP2007098160A 2007-04-04 2007-04-04 Electrode foil for capacitor Pending JP2008258355A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5522048B2 (en) * 2008-10-10 2014-06-18 パナソニック株式会社 Capacitor electrode foil, manufacturing method thereof, and solid electrolytic capacitor using the electrode foil

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5522048B2 (en) * 2008-10-10 2014-06-18 パナソニック株式会社 Capacitor electrode foil, manufacturing method thereof, and solid electrolytic capacitor using the electrode foil

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