JP2008246583A - Thermocompression bonding method and thermocompression bonding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thermocompression bonding method and a thermocompression bonding device not requiring any post-treatment after thermocompression or any pre-treatment of a compression bonding tool, and capable of preventing any easy melt sticking of a body to be compression bonded to the compression bonding tool. <P>SOLUTION: The thermocompression bonding device 100 comprises a furnace 101 capable of performing the high-temperature heating, a compression bonding tool 102 which holds a product (a body to be compression bonded) 10 from the upper and lower sides and is formed of a similar metal to that of the product 10, a hydraulic cylinder 103 for driving the compression bonding tool 102 to apply the pressure to the product 10, and a metallic interleaving sheet 104 which is held between the compression bonding tool 102 and the product 10 for use to prevent the compression bonding tool 102 from being compression bonded to the product 10. The metallic interleaving sheet 104 is heated to the temperature of about 1,000°C in the furnace 101, aluminum is precipitated on its surface, and a release layer of aluminum oxide is deposited to prevent any easy melt sticking of each member. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a thermocompression bonding method and a thermocompression bonding apparatus suitable for thermocompression bonding of an object to be bonded such as a metal thin plate-like laminated member.

  For example, in order to improve the printing density of an ink jet printing apparatus, a pipe portion in which a pipe for feeding a small amount of ink is formed in a nozzle portion in which minute nozzles are arranged at minute intervals is necessary. However, such a minimal piping portion is limited to minimization if it is made of a pipe, and there is no other suitable method. Therefore, this piping portion not only hinders downsizing of the entire apparatus, but also hinders further improvement in printing density.

  The above-described conventional piping section has been hindering the improvement of the performance of various apparatuses because there is no appropriate technique for further pushing down the size reduction. In order to overcome this problem, a thermocompression bonding technique is adopted. It is possible. For example, in order to miniaturize the piping structure for supplying a small amount of ink as described above, a thin plate from which a portion constituting an ink flow path or the like is removed is laminated and fused by thermocompression to form a manifold. It is considered effective.

  However, this method requires heating to the melting temperature of the metal in order to bring the thin plate into close contact. Moreover, when the melting temperatures of the metals to be joined are different, the thin plate having the lower melting temperature is deformed before the joining surfaces of both metals are melted. Must have the same melting temperature. Further, the roughness of the cross-sectional shape of the hole due to the processing of the thin plate becomes the roughness of the inner surface of the pipe as it is, which may increase the frictional resistance of the flow path of ink or the like.

  The applicant of the present invention already has a fine void built-in body that is easy to select and manufacture materials, has no deterioration in the performance of the built-in fine void due to frictional resistance in the pipe, and can be downsized compared to conventional products. The manufacturing method is proposed.

  In the thermocompression bonding process, in a thermocompression bonding process, a body to be bonded (hereinafter, sometimes referred to as a product) made of a thin laminate member made of metal is placed in a furnace and then heated to a high temperature by a crimping jig. While applying pressure. At this time, the above proposal has an advantage that the thermocompression bonding can be performed by lowering the melting temperature. However, if the pretreatment proposed above is not performed, the crimping jig and the object to be bonded may be welded. For example, (1) powdered release material is sprayed, or (2) crimping It is conceivable to prevent welding from occurring by performing titanium nitride coating or DLC treatment on the jig.

  However, in the case of the former (1) release material, it is necessary to release the release material after the thermocompression bonding step, and usually the product is buffed. For this reason, the thickness of the product is reduced, and it is necessary to design in consideration of the machining allowance in advance, and there is a possibility that uneven machining occurs. In addition, when the product has a fine tube or the like, powder may be clogged in the tube. Furthermore, since it is difficult to uniformly disperse the powder on the crimping jig, thermocompression unevenness is likely to occur.

In addition, when surface treatment is performed in advance on the latter (2) crimping jig, it is necessary to periodically perform the surface treatment, and if the jig surface is damaged during the thermocompression bonding process, Since welding starts from there is a risk of losing the crimping jig and product.
Japanese Patent Laid-Open No. 6-179083

  The object of the present invention is to eliminate the need for post-treatment after thermocompression bonding or surface treatment of the crimping jig, and to prevent the welding of the object to be crimped and the crimping jig at low cost. A crimping method and a thermocompression bonding apparatus are provided.

  In order to solve the above-mentioned problem, the invention of claim 1 is that the object to be bonded is an iron-based metal, the pressure bonding jig is a metal containing aluminum, and the pressure bonding object is thermocompression bonded with the pressure bonding jig. A method of thermocompression bonding, wherein a surface of the crimping jig is heated to deposit aluminum, and a release layer forming step of forming a release layer of aluminum oxide on the surface; And a thermocompression bonding step for thermocompression bonding.

  The invention of claim 2 is a thermocompression bonding method in which the object to be bonded and the pressure bonding jig are ferrous metals, the mating sheet is a metal containing aluminum, and the pressure bonding object is heat bonded by the pressure bonding jig. And inserting the mating sheet between the object to be crimped and the crimping jig, heating the mating sheet in a furnace capable of heating to a high temperature to precipitate aluminum, and oxidizing the surface A thermocompression bonding method comprising: a release layer forming step of forming an aluminum release layer; and a thermocompression bonding step of thermocompression bonding the object to be bonded by the crimping jig.

  According to a third aspect of the present invention, in the thermocompression bonding method according to the first or second aspect, a through-hole forming step of forming a through-hole in a predetermined portion of a plurality of thin plate-like laminated members constituting the object to be bonded. And a laminating step of laminating each of the laminating members to form the microscopic voids having a predetermined three-dimensional shape by communicating the through-holes.

  The invention of claim 4 is a thermocompression bonding apparatus in which the object to be bonded is an iron-based metal, the pressure bonding jig is a metal containing aluminum, and the object to be bonded is thermally bonded by the pressure bonding jig. A furnace that can be heated to a high temperature, a metal crimping jig that is placed in the furnace and pressurizes the metal crimping body, and the crimping jig is driven to press the crimping body. A thermocompression bonding apparatus characterized by comprising: a driving means; and heating the surface of the crimping jig in the furnace to deposit aluminum and forming a release layer of aluminum oxide on the surface.

  According to a fifth aspect of the present invention, the object to be bonded and the pressure bonding jig are ferrous metals, the mating sheet is a metal containing aluminum, and the mating sheet is inserted between the pressure bonding body and the pressure bonding jig. A thermocompression bonding apparatus for thermocompression bonding the object to be bonded with the pressure bonding jig, a furnace capable of being heated to a high temperature, and a metal pressure bonding unit disposed in the furnace and pressurizing the metal object to be bonded A jig, and a driving unit that pressurizes and drives the crimping jig so as to crimp the object to be crimped. The mating sheet is heated in the furnace to precipitate aluminum, and aluminum oxide is deposited on the surface thereof. Forming a release layer of the thermocompression bonding apparatus.

  According to the present invention, the mating sheet on which the metal release layer that does not thermocompression bond with the object to be bonded or the crimping jig on which the metal release layer not thermocompression bonded with the object to be bonded is used is used. When performing thermocompression bonding without post-processing after thermocompression bonding or pre-processing of the crimping jig, welding between the crimping jig and the mating sheet or between the mating sheet and the object to be crimped, or the crimping jig There is an effect that the welding of the object to be bonded can be prevented.

  Hereinafter, the present invention will be described in more detail with reference to the drawings. FIG. 1 is a diagram showing an embodiment of a thermocompression bonding apparatus according to the present invention. The thermocompression bonding apparatus 100 according to this embodiment includes a furnace 101, a crimping jig 102, a hydraulic cylinder 103, a metal interleaf (meeting sheet) 104, and the like.

  The furnace 101 is a furnace capable of high-temperature heating that performs thermocompression bonding. In this embodiment, a temperature of 900 to 1100 ° C. is applied for about 2 hours in a vacuum. The crimping jig 102 is a member that normally holds the product (bonded body) 10 from above and below. The material of the crimping jig 102 is desirably a metal of the same type as that of the product 10 in order to match the expansion and contraction of the product 10, for example, SUS304 or SUS430 is used. The hydraulic cylinder 103 is a driving unit that drives the crimping jig 102 so as to apply pressure to the product 10.

The metal interleaving paper 104 is used by being sandwiched between the crimping jig 102 and the product 10 and prevents the crimping jig 102 and the product 10 from being welded. The metal interleaving paper 104 is a metal such as precipitation hardening stainless steel containing aluminum in SUS (for example, 430A made by Nippon Yakin), and is heated to about 1000 ° C. in the furnace 101 before use. Thus, aluminum is deposited on the surface, and the deposited aluminum forms a release layer of aluminum oxide (alumina, Al ₂ O ₃ ), and welding of each member (welding of the jig 102 and the interleaf paper 104, Welding with product 10 is prevented.

  As precipitation hardening type stainless steel, in addition to 430A made by Nippon Yakin, KTA17-7, KMS18-14, KMS18-17 made by Nippon Radio Frequency Steel, NCA1 made by Nisshin Steel, SUS631 made by Nippon Metals, NTK405, NTK631, NTKNY-80A, etc. manufactured by Nippon Metal Industry can be used.

  It is preferable that the thermal expansion coefficient of the metal interleaving paper 104 is substantially the same as that of the product 10 and the crimping jig 102.

  The product 10 has a thickness of about 80 μm to 2 mm, and each member is etched based on the design, and a plurality of sheets are laminated and thermocompression bonded, thereby forming a three-dimensional shape such as a flow path penetrating. Is. FIG. 2 is an explanatory view (perspective view) showing one of unit piping parts that constitutes an example of a member to be bonded (product) manufactured by the apparatus of FIG. The product 10 is an example of a manifold that is an assembly of fine pipes that are structural members of an ink jet printing apparatus, and is composed of thin plates 11, 12, 13, and the like.

  The thin plate 11 has a through-hole 11b penetrating the front and back. Similarly, through holes 12b and 13b having different shapes are also formed in the thin plates 12 and 13. The through holes 11a, 12b, 13b and the like of each thin plate are connected to form a fine gap B through which ink or the like passes.

  2 is an example of piping parts for supplying ink to the drive unit of the ink jet printing apparatus, and is generally used as an assembly in which other similar parts or other similar parts are combined. Is. In FIG. 2, a gap serving as a pipe is indicated by a dotted line, and a position of an external pipe to be connected to this is indicated by a two-dot chain line.

  In the example of FIG. 2, three thin plates 11, 12, and 13 are stacked and thermocompression bonded. The thin plates 11, 12, 13 that are the respective materials are SUS304 plates having a thickness of about 80 μm to 0.2 mm, and holes 11 b, 12 b that penetrate the front and back surfaces at predetermined locations where the fine gaps B should be formed, respectively. , 13b are provided. The thin plate 11 is stacked on the top, the thin plate 12 is stacked on the middle, and the thin plate 13 is stacked on the bottom.

  3, 4, and 5 are perspective views showing the thin plate 11, the thin plate 12, and the thin plate 13, respectively. When the thin plates 11, 12, and 13 are stacked and pressure-bonded while being heated, the through holes 11 b, 12 b, and 13 b are connected to each other to form a pipe portion (fine gap) B for supplying a three-dimensional ink. .

  For example, in the case of miniaturization of an apparatus that requires fine piping, an inkjet printing apparatus stacks a laminated plate (thin plate) in which fine voids that become a part of an ink flow path are formed as a piping structure for ink supply, A manifold fused by thermocompression bonding can be used.

  Next, the thermocompression bonding method of the present embodiment will be specifically described with reference to FIGS. The metal interleaving paper 104 is put in a furnace 101 and heated at 1000 ° C. for about 60 minutes. As shown in FIG. 6, aluminum is deposited on the surface of the metal interleaving paper 104 and the aluminum is oxidized (alumina layer). ) Was formed.

  In parallel with this, the thin plates 11, 12, and 13 in which the above-described flow paths were formed in a three-dimensional shape were positioned by positioning pins (not shown) and temporarily fixed by arc welding or the like. Then, as shown in FIG. 7, the temporarily fixed thin plates 11, 12, and 13 were put in a furnace 101 in a form of being sandwiched between metal interleaving papers 104.

In the furnace 101, pressure (70 to 80 kg / cm ² ) was applied from above and below by a hydraulic cylinder 103 via a crimping jig 102. In this state, the furnace 101 is evacuated (0.005 MPa), set to a melting temperature (in the case of SUS304, about 1000 ° C.), heated for 6 hours, and then cooled for 6 hours. The thin plates 11, 12, 13 were subjected to thermocompression bonding. After the crimping, the crimping jig 102 was opened and the product 10 was taken out. As a result, the crimping jig 102 and the product 10 were not welded.

  As described above, according to the present embodiment, the metal interleaving paper 104 is a metal in which SUS contains aluminum, and the surface thereof is heated to about 1000 ° C. in the furnace 101 before use. Since aluminum is deposited on the surface of the aluminum oxide and the deposited aluminum forms a release layer 104a of aluminum oxide, it is possible to prevent welding of the crimping jig 102 and the metal interleaf 104, and adhesion between the metal interleaf 104 and the product 10.

  The reason for not welding as described above is considered as follows. Prior to thermocompression bonding, the metallic paper 104 is baked and hardened in the furnace 101 before thermocompression bonding. Then, aluminum is deposited on the surface, and the deposited aluminum is oxidized to form an aluminum oxide film (alumina layer) on the surface. Normally, when two members are thermocompression bonded together, the components of iron, chromium, and nickel go to each other so that the joint does not change from the other parts, and the metal Joining is complete when the component moving speed reaches a certain speed (equilibrium).

  Here, the deposition rate of aluminum is faster than other components (iron and chromium), and the deposition is in the order of aluminum, chromium, and iron. Therefore, when there is another metal member on the opposite surface, it can be bonded only to aluminum. As aluminum is deposited, there is oxygen, so it immediately becomes an alumina layer. That is, before joining with other metal components, it bonds with oxygen and becomes an alumina layer. When this alumina layer is present, it has been experimentally confirmed that the moving speed of other metals is reduced by about four orders of magnitude.

  Chromium is deposited after aluminum is deposited, but the thermocompression bonding of the product is completed while the alumina layer is formed. Therefore, this is sufficient, but in the case of the present embodiment, since chromium is further deposited and is in the order of iron, the joining of SUS is performed unless these three kinds of components are appropriately metal-bonded. Since they are not joined, it is considered that the interface between the crimping jig 102 and the metal paper 104 and the interface between the metal paper 104 and the product 10 do not weld.

The present invention is not limited to the embodiments described above, and various modifications or changes are possible, and these are also within the equivalent scope of the present invention.
(1) In addition to the above-described products, the object to be bonded may be a body with built-in fine voids as follows. For example, FIG. 8 shows more specifically a manifold that is an assembly of fine pipes with a built-in fine void, and the part surrounded by an ellipse at the lower left in the figure is an enlarged part of the manifold. This corresponds to the portion surrounded by the elliptical dotted line in the overall perspective view. In this case, the thin plate 1 has through holes 1a, 1a,. Similarly, through holes 2a and 3a having different shapes are also formed in the thin plates 2 and 3. The through holes 1a, 2a,... 3a of the thin plates are connected to form a fine gap A through which ink or the like passes.

  (2) Although described in the example of the components of the ink jet printing apparatus, the present invention is also applicable to the manufacture of micro ink discharge / supply devices such as dispensers, fuel cell parts, and particulate repair filters for diesel engines. Can be applied.

  (3) Although the through hole penetrating the front and back of the thin plate is produced by the etching method in the above description, it may be formed by other perforation methods. Depending on the method, after the surface treatment of the thin plate, a process for forming a through hole may be performed. In the above description, the air gap constituted by these through-holes has been described for piping such as a manifold having a plurality of outlets with respect to one inlet, but there may be only one open port leading to the outside, Further, unlike the parts used for heat exchange heat pipes, there may be no place communicating with the outside, and the gaps may be sealed inside the microscopic void-containing body. In addition, even if it is what differs in the shape of a fine space | gap, as long as it meets the meaning of this invention, all are included in this invention.

  (4) As described in the example of inserting the metal interleaving paper, it is also possible to use a crimping jig as a metal containing aluminum and form an alumina layer on the surface thereof in a furnace to form a release layer. In this case, unlike the pretreatment described in the prior art, an alumina layer can be formed in the furnace, and the alumina layers are generated one after another, so there is no disadvantage as in the prior art.

  (5) Although it is conceivable to sandwich a ceramic sheet as a mating sheet, it is expensive, can be used only once, becomes disposable, increases costs, and may crack during use. Are different.

It is a figure which shows embodiment of the thermocompression bonding apparatus by this invention. It is explanatory drawing (perspective view) which showed one of the products crimped | bonded with the thermocompression bonding apparatus of this embodiment. It is a perspective view which shows the thin plate of the uppermost layer of the product of FIG. It is a perspective view which shows the thin plate of the intermediate | middle layer of the product of FIG. It is a perspective view which shows the thin plate of the lowest layer of the product of FIG. It is a figure explaining the metal interleaving paper used with the thermocompression bonding method by this embodiment. It is a figure explaining the metal interleaving paper used with the thermocompression bonding method by this embodiment. It is a perspective view which shows more specifically the product manufactured with the thermocompression bonding apparatus by this embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Thermocompression bonding apparatus 101 Furnace 102 Crimping jig 103 Hydraulic cylinder 104 Metal fitting paper (fitting sheet)
104a Release layer (alumina layer)
10 Products 11, 12, 13 Thin plate B Fine gap (pipe)

Claims (5)

The to-be-bonded body is an iron-based metal, the crimping jig is a metal containing aluminum, and is a thermocompression bonding method in which the to-be-bonded body is thermocompression bonded with the crimping jig,
A release layer forming step of heating the surface of the crimping jig to precipitate aluminum and forming an aluminum oxide release layer on the surface;
And a thermocompression bonding step of thermocompression bonding the object to be bonded with the crimping jig. The to-be-bonded body and the crimping jig are ferrous metals, the mating sheet is a metal containing aluminum, and is a thermocompression bonding method for thermocompression bonding the to-be-bonded body with the crimping jig,
An insertion step of inserting the mating sheet between the workpiece and the crimping jig;
A peeling layer forming step of heating the mating sheet in a furnace capable of heating to a high temperature to precipitate aluminum and forming a peeling layer of aluminum oxide on the surface thereof;
And a thermocompression bonding step of thermocompression bonding the object to be bonded with the crimping jig. In the thermocompression bonding method according to claim 1 or 2,
A through-hole forming step of forming a through-hole in a predetermined portion of a plurality of thin plate-like laminated members constituting the object to be bonded;
And a laminating step of laminating each of the laminating members to form a fine gap having a predetermined three-dimensional shape by communicating the through holes. The to-be-bonded body is an iron-based metal, the crimping jig is a metal containing aluminum, and is a thermocompression bonding apparatus for thermocompression bonding the to-be-bonded body with the crimping jig,
A furnace that can be heated to a high temperature;
A metal crimping jig that is disposed in the furnace and pressurizes a metal object to be bonded;
Driving means for driving the pressure-bonding jig so as to pressure-bond the object to be bonded;
A thermocompression bonding apparatus characterized in that the surface of the crimping jig is heated in the furnace to precipitate aluminum, and a release layer of aluminum oxide is formed on the surface. The to-be-bonded body and the crimping jig are iron-based metals, the mating sheet is a metal containing aluminum, and the mating sheet is inserted between the to-be-bonded body and the crimping jig to A thermocompression bonding apparatus for thermocompression bonding with the crimping jig,
A furnace that can be heated to a high temperature;
A metal crimping jig that is disposed in the furnace and pressurizes a metal object to be bonded;
Driving means for driving the pressure-bonding jig so as to pressure-bond the object to be bonded;
A thermocompression bonding apparatus, wherein the mating sheet is heated in the furnace to precipitate aluminum, and a release layer of aluminum oxide is formed on the surface thereof.

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