JP2008246394A - Method and apparatus for producing nanoparticle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing a nanoparticle, in each of which the high-quality nanoparticle can be produced with excellent controllability on the basis of a new production principle using microspace. <P>SOLUTION: The method for producing the nanoparticle comprises the steps of: supplying a precursor solution to a microreactor 11 having 5 μm to 5 mm typical length from a flow passage 12; and irradiating the precursor solution supplied to the microreactor 11 with a single energy beam or a plurality of combined energy beams selected from a laser beam, an electromagnetic wave, corpuscular radiation and an ultrasonic wave each of which is emitted from an irradiation beam generation unit 13 to produce the nanoparticle. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a nanoparticle production method and nanoparticle production apparatus by irradiating an energy beam to a microreaction field using a microreactor.

  Research on nanoparticle synthesis has become active due to the recent rise and emphasis in the field of nanotechnology, but precious metals such as gold have been studied for a long time. The most common method is decomposition / generation of a solution containing a metal ion or metal complex with heat and a reducing agent. This method is widely applied not only to metals but also to semiconductors such as CdSe or inorganic systems such as oxides, and many researches and developments have been made. In addition, there have been many reports on the synthesis of self-assembled nanoparticles having a very uniform particle size, such as quantum dots, by appropriately controlling nucleation in this method.

  In addition, as a physical method, a dry production method using rapid cooling of metal vapor in an inert gas is known. This method is generally inferior in particle size control compared to chemical methods that can also be self-organized, but it can be synthesized in large quantities and is starting to be supplied for fine wiring. .

  In addition to the general nanoparticle synthesis method as described above, synthesis methods by irradiation with various energy beams have been reported. Production of gold or silver noble metal nanoparticles by ultraviolet light irradiation has been known for a long time as photoreduction. It has also been reported that various metal / alloy or oxide nanoparticles can be synthesized by irradiating a precursor solution of a laser, particularly an ultraviolet laser.

  Nanoparticle production by ultrasonic irradiation has also been reported (see, for example, Non-Patent Document 1). It is known that an ultra-high temperature / ultra-high pressure field is generated by ultrasonic irradiation of a solution, and nanoparticles are generated by the effect of such a field. The chemical field dealing with these is called sonochemistry.

  Also, nanoparticle synthesis by irradiation with radiation such as gamma rays or electron beams has been reported (for example, see Patent Document 1). It is said that when these radiations pass through the precursor solution, reducing (or oxidizing) radicals are generated and contribute to nanoparticle generation.

In recent years, as a new field of chemical analysis and chemical synthesis, microchemistry using the effect of a microfield such as a microchip has been attracting attention (for example, see Non-Patent Document 2). The advantages of using microfields for chemical reactions and synthesis are generally considered as follows.
1. Efficiency and control of reaction and mixing 2. Precision and controllability of temperature control Easy scale-up to production plant

1. With respect to, since the surface area per unit volume is increased, the interfacial reaction is promoted and the mixing time by molecular diffusion is shortened, so that the reaction / mixing is promoted.
2. As for the micro field, since the volume of the micro field is small, the heat capacity is also small and precise temperature control is possible. Therefore, chemical reaction control can be refined, and high quality products are expected.
3. With respect to the above, by connecting in parallel a large number of microreactors optimized at the laboratory level, it becomes easy to scale up to a production plant. Actually, trial production of several tens of tons per year is being started for sol synthesis.

  The application of micro fields as described above to nanoparticle synthesis has begun to be performed by a few research institutions or companies. For example, there is one that uses a microreactor mainly for the synthesis of semiconductor nanoparticles such as CdSe (see Patent Document 2). In this case, the principle of nanoparticle synthesis is decomposition / generation with heat and a reducing agent, and the use of a microreactor can improve the quality of nanoparticles.

  In addition, there is one in which a microreactor is applied to the synthesis of copper oxide or organic material nanoparticles (see Patent Document 3). Again, the principle of nanoparticle synthesis consists of mixing with a reducing agent and heating.

  As described above, the use of microreactors in nanoparticle synthesis currently utilizes both thermal decomposition and the effect of reduction with a reducing agent. Nanoparticle synthesis methods based on other principles can be applied to microfields. There are no report examples used.

Stephen Au Yeung et al, “Formation of gold sols using ultrasound”, J. Chem. Soc. Chem. Commun. (UK), 1993, No. 4, p.378 International Publication No. 2004/083124 Pamphlet Takehiko Kitamori et al., “Technology and application of micro chemical chip”, Maruzen Co., Ltd., 2004 JP 2005-125280 A JP 2006-96569 A

  The use of microreactors for nanoparticle synthesis has the potential to provide highly controllable nanoparticles, but so far the principle has only been reported by pyrolysis and chemical reduction, There is no example using micro space based on the principle.

  The present invention has been made paying attention to such problems, and based on a new generation principle using a microspace, a nanoparticle production method capable of producing high-quality nanoparticles with good controllability and It aims at providing the nanoparticle manufacturing apparatus.

  In order to achieve the above object, the nanoparticle production method according to the present invention is applied to a precursor solution supplied to a microreactor having a representative length of 5 μm to 5 mm, and is any one of laser light, electromagnetic waves, particle beams, and ultrasonic waves. It is characterized by irradiating a single energy beam or a plurality of energy beams to generate nanoparticles.

  The nanoparticle production apparatus according to the present invention includes a microreactor having a representative length of 5 μm to 5 mm, a flow path provided to be able to supply a precursor solution to the microreactor, laser light, electromagnetic waves, particle beams, or ultrasonic waves. And an irradiation beam generator provided so as to be able to irradiate any one of the energy beams or a combination of a plurality of energy beams to the precursor solution supplied to the microreactor.

  In the nanoparticle production method and nanoparticle production apparatus according to the present invention, the energy beam is applied to a minute volume of the precursor solution supplied to the microreactor, so that the energy beam, temperature, and other non-uniformities can be suppressed. Quality nanoparticle colloids can be produced. Thus, according to the nanoparticle production method and nanoparticle production apparatus according to the present invention, high quality with good controllability based on a new generation principle using microspace, which is not based on thermal decomposition or chemical reduction. Nanoparticles can be produced.

  Since the energy beam irradiation is not a batch type, by changing the solution flow rate, the irradiation energy amount to the precursor solution can be changed, and the particle diameter of the produced nanoparticles can be controlled.

  At the laboratory level, the microreactor preferably uses a capillary (capillary) such as glass or quartz, or a microchemical chip. The microreactor is preferably made of a material that transmits the energy beam to be irradiated. For example, in the case of ultraviolet light / ultraviolet laser light, quartz or ultraviolet transmissive resin, in the case of visible light / visible range laser light, glass, acrylic, etc., in the case of far infrared light / far infrared laser light, Ge, For example, ZnSe.

  In bioapplication of gold nanoparticles, a complexing process is often performed in which a biological material such as an antibody or DNA is added to gold nanoparticles. In the nanoparticle manufacturing method and the nanoparticle manufacturing apparatus according to the present invention, by using a microreactor such as a microchemical chip, such a nanoparticle composite process is integrated and integrated in one place, and processing in one stage is possible. Is possible.

  In addition, noble metal nanoparticles such as gold nanoparticles and silver nanoparticles, particularly silver nanoparticles, tend to aggregate and are generally difficult to store for a long time. In such a case, in the nanoparticle production method and nanoparticle production apparatus according to the present invention, only the precursor solution can be stored, and the nanoparticle colloid solution can be produced when necessary, and high quality on demand. Nanoparticle can be provided.

  In the nanoparticle production method according to the present invention, the microreactor includes a narrow tubular container having an inner diameter of the representative length, a rectangular or thin film container having an inner thickness of the representative length, or an average inner diameter of the representative length. It is preferable that it consists of at least any one of the porous materials which have these. In the nanoparticle production apparatus according to the present invention, the microreactor includes a narrow tubular container having an inner diameter of the representative length, a rectangular or thin film container having an inner thickness of the representative length, or an average inner diameter of the representative length. It is preferable that it consists of at least any one of the porous materials which have these.

  In this case, particularly high quality nanoparticles can be produced. The representative length of the microreactor is, for example, the inner diameter of a tubular channel in a capillary or the like, the inner thickness of a rectangular or thin film channel in a microchemical chip, or the average inner diameter of a porous material. According to the current optical lithography technology, it is possible to form a pattern width from about 1 μm. However, with a typical length of several μm or less, the fluid resistance is particularly high when the viscosity of the fluid is high, and the nanoparticle Adhesion / aggregation on the inner wall of the flow path becomes remarkable, which is not desirable. On the other hand, when the representative length is several mm or more, the effect unique to the microreactor becomes unclear, which is not desirable. For this reason, the representative length is preferably in the range of 50 μm to 3 mm, and more preferably in the range of 100 μm to 1 mm.

  In the nanoparticle production method according to the present invention, the precursor solution is composed of a plurality, and each precursor solution is supplied to the microreactor through a plurality of different flow paths, and before or simultaneously with the mixing of the precursor solutions, The energy beam may be irradiated later. In the nanoparticle production apparatus according to the present invention, the flow path is composed of a plurality, and a plurality of precursor solutions are provided so as to be separately supplied to the microreactor, and the irradiation beam generator is mixed before each precursor solution, The energy beam may be provided at the same time as mixing or after mixing.

  When the precursor solution includes a plurality of precursor solutions, a plurality of types of precursor solutions can be introduced into the microreactor, mixed in the microreactor, and irradiated with an energy beam. Since each precursor solution is mixed rapidly and uniformly in a laminar flow state, a high-quality nanoparticle colloid can be generated. For example, when the dispersant is reducible, it is often inconvenient if it is mixed from the beginning as a precursor solution. In such a case, it is preferable to introduce a nanoparticle raw material solution such as a metal salt / metal complex and a dispersant solution separately, and irradiate the energy beam in the microreactor simultaneously with mixing or immediately after mixing. Similarly, when synthesizing nanoparticles of multi-component materials such as compounds and alloys, if precursor solutions of each element are supplied individually and irradiated in the microreactor at the same time as mixing or immediately after mixing, The composition can be adjusted by adjusting the supply amount. Similarly, in the case of nanoparticles having a core-shell structure (shell may be a multilayer) composed of a core (core) and a shell (shell) covering the core, the core precursor solution and the shell precursor solution are separately provided. Can be processed.

  In the nanoparticle manufacturing method according to the present invention, the energy beam may be ultraviolet light or ultraviolet laser light having a wavelength of 400 nm or less. In the nanoparticle manufacturing apparatus according to the present invention, the energy beam may be ultraviolet light or ultraviolet laser light having a wavelength of 400 nm or less. In this case, particularly high quality nanoparticles can be produced.

  ADVANTAGE OF THE INVENTION According to this invention, the nanoparticle manufacturing method and nanoparticle manufacturing apparatus which can manufacture a high quality nanoparticle with good controllability based on the new production | generation principle using microspace can be provided.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 4 show a nanoparticle production method and a nanoparticle production apparatus according to an embodiment of the present invention.
As shown in FIG. 1, the nanoparticle production apparatus 10 includes a microreactor 11, two flow paths 12, an irradiation beam generator 13, a temperature controller 14, a desalting apparatus 15, and a nanoparticle colloid recovery container 16. ing.

  As the microreactor 11, for example, a glass or quartz microchemical chip, a capillary assembly, a porous material, or the like can be used. In the examples, the channel pattern of the microchemical chip was appropriately masked and used as the microreactor 11. The microreactor 11 has a representative length in the range of 5 μm to 5 mm, preferably in the range of 50 μm to 3 mm, and particularly preferably in the range of 100 μm to 1 mm. The representative length is the diameter of the flow path of the precursor solution in the microreactor 11. In addition, since various microchemical chips are provided with the recent progress in the microchemical field, commercially available products can be used for the microreactor 11.

  Each flow path 12 is connected to the microreactor 11 so that the precursor solution can be supplied to the microreactor 11. Each flow path 12 can supply a plurality of precursor solutions to the microreactor 11 separately.

  As the irradiation beam generator 13, for example, an excimer or a solid laser generator, an ultraviolet light generator, a microwave generator, an ultrasonic transducer, or the like can be used. Recently, a small semiconductor laser module or a rotary disk laser device using a disk-like crystal has been developed as an ultraviolet laser generator, and if these are used, it is possible to significantly reduce the size of the entire nanoparticle production apparatus. . The irradiation beam generator 13 is provided so that the precursor solution supplied to the microreactor 11 can be irradiated with an energy beam. The energy beam may be any one of laser light, electromagnetic wave, particle beam, or ultrasonic wave, or may be a combination of any two or more, and is the same type and has a different wavelength or frequency. It may be a combination of things. The precursor is preferably a metal salt or a metal complex. As a precursor, for example, when synthesizing gold nanoparticles, hydrogen tetrachlorogold (III) can be used. The precursor solution is formed by dissolving a precursor in a solvent. As an example of the solvent, an organic solvent such as distilled water, alcohols, and ethers can be used, but it is necessary to select the solvent according to the solubility characteristics of the precursor. The precursor solution may contain a dispersant. Examples of the dispersant include polymers such as polo vinyl pyrrolidone, carboxylic acids such as L-ascorbic acid, citric acid and oleic acid, amines such as oleylamine, and various commercially available surfactants. The concentrations of the precursor and the dispersing agent in the precursor solution are not limited, but, for example, are 0.25 mM to 1.0 mM, respectively. Iron pentacarbonyl or the like can be used as it is as a precursor solution without being dissolved in a solvent in such a case because the metal complex itself is liquid at room temperature. The irradiation beam generator 13 can irradiate an energy beam before, simultaneously with, or after mixing a plurality of precursor solutions supplied to the microreactor 11 separately from each flow path 12.

  The temperature control device 14 is provided in contact with the microreactor 11. The temperature control device 14 can cool and heat the microreactor 11 so as to keep the microreactor 11 at a constant temperature. The desalting apparatus 15 includes an apparatus for performing a desalting process such as an electrodialysis apparatus, and is connected to the microreactor 11. The desalting apparatus 15 is configured to perform a desalting process on the nanoparticle colloid generated in the microreactor 11. The nanoparticle colloid recovery container 16 is connected to a desalting apparatus 15. The nanoparticle colloid collection container 16 can collect the nanoparticle colloid generated in the microreactor 11 and desalted by the desalting apparatus 15.

  The nanoparticle manufacturing method according to the embodiment of the present invention can generate nanoparticles using the nanoparticle manufacturing apparatus 10. First, a plurality of precursor solutions are separately supplied from each channel 12 to the microreactor 11. The precursor solution is irradiated with an energy beam by the irradiation beam generator 13 before, at the same time as or after the mixing of the precursor solutions supplied to the microreactor 11. Thereby, a nanoparticle colloid can be generated. Moreover, at this time, since mixing of each precursor solution is performed rapidly and uniformly in a laminar flow state, a high-quality nanoparticle colloid can be generated.

  The nanoparticle colloid generated in the microreactor 11 is desalted by the desalting apparatus 15 and then recovered by the nanoparticle colloid recovery container 16. Thus, by the nanoparticle production method of the embodiment of the present invention, high-quality nanoparticles with good controllability are produced based on a new generation principle using microspace without using thermal decomposition or chemical reduction. Can do.

  In the case of batch-type irradiation of solutions in beakers and other containers, it is difficult to suppress local non-uniformity such as temperature or energy beam to be irradiated even if sufficient stirring is performed. It becomes difficult to obtain high-quality nanoparticles with wide distribution. On the other hand, according to the nanoparticle manufacturing method and the nanoparticle manufacturing apparatus 10 according to the embodiment of the present invention, the energy beam is irradiated to the minute volume of the precursor solution supplied to the microreactor 11, so that the energy beam, temperature, etc. Non-uniformity can be suppressed, and high-quality nanoparticle colloids can be produced. Further, since the energy beam irradiation is not a batch type, the amount of irradiation energy to the precursor solution can be changed by changing the solution flow rate, and the particle size of the produced nanoparticles can be controlled.

  There is no problem when the metal ions or metal complexes in the precursor solution are completely reduced to the nanoparticles by the irradiated energy beam. Reduction ions or complexes, or ions generated after reduction remain. Since the nanoparticle manufacturing apparatus 10 includes the desalting apparatus 15, these residues can be removed.

  As shown in FIG. 1, if the capillaries or microchemical chips of the microreactor 11 are arranged in parallel / connected or stacked in the thickness direction, the energy of the irradiated energy beam can be used efficiently. As a method of arranging a plurality of such micro fields, many variations can be designed according to circumstances.

  When used as a production plant, a large number of capillaries, microchemical chips, etc., whose conditions are optimized at the laboratory level may be arranged. However, when the energy beam is irradiated radially, it is particularly disc-shaped or spherical. It is desirable to arrange. It is desirable to form an energy beam confinement structure by incorporating various mirrors or the like in the flow path of the microreactor 11 such as a capillary assembly or a microchemical chip because the energy beam utilization efficiency is further increased. For supplying the precursor solution to the microreactor 11, a syringe set in a syringe pump is generally used at a laboratory level, but various solution pumps such as a peristaltic pump can be used depending on the scale.

  In addition, as an energy beam to be irradiated, radiation such as an electron beam or a gamma ray can be used. In the field of radiation irradiation, there are markets for sterilization and sterilization of medical equipment, resin modification for cutting resin cross-links, and power device modification for electronic devices, and these irradiation services are also provided. In the production of nanoparticles, an electron beam is preferable to a gamma ray because it can be processed in a shorter time.

  In the case of noble metal nanoparticles such as gold or silver, decomposition occurs even with a relatively low intensity beam, but in the case of transition metal nanoparticles, transition metal oxide nanoparticles, or rare earth oxide nanoparticles, decomposition occurs.・ Because it is difficult to reduce, laser light of 100 mJ or more or electron beam irradiation of 0.1 MeV or more is desirable. When the energy beam to be irradiated is ultrasonic, it is desirable to install the microreactor 11 body in a liquid such as water.

  Generally, the microreactor 11 generates heat by irradiation with various energy beams or reaction heat of the precursor solution. In the nanoparticle manufacturing apparatus 10, the microreactor 11 can be maintained at a constant temperature by the temperature control apparatus 14, and nanoparticles with better controllability can be generated. When the microreactor 11 made of glass, quartz, or the like is used, it is desirable to perform surface treatment of the inner wall because nanoparticles are likely to adhere and aggregate on the inner wall of the channel. This surface treatment mainly controls surface charge by hydrophilic treatment or water repellent treatment, but this treatment needs to be determined according to the surface charge state of the produced nanoparticles.

Examples of the present invention are shown below.
Nanoparticle synthesis experiments were performed using the gold nanoparticle synthesis precursor solution shown in Table 1. As an energy beam for irradiation, a KrF excimer laser generator (wavelength: 248 nm, manufactured by LAMBDA PHYSIK AG) was used. As the microreactor 11, a flow path pattern of a synthetic quartz microchemical chip (IMT, flow cross-sectional area: 100 μm × 40 μm) that transmits ultraviolet light was appropriately masked. Solution supply was performed using a gas tight syringe (manufactured by Hamilton) set in a syringe pump. The amount of the supply liquid was set to 1 mL / hr, and irradiation was performed for about 2 hours. For comparison, a 100 mL beaker filled with the precursor solution was also irradiated. Both laser irradiation conditions are a laser power of 100 mJ and a pulse rate of 5 Hz.

  The particle size distribution of the nanoparticle colloidal solution obtained by irradiating the microreactor 11 and the beaker was measured based on dynamic light scattering (DLS) (manufactured by Malvern Instruments Ltd.). The measurement results are shown in FIG. In the case of the beaker, the peak distribution is widened, whereas in the case of the microreactor 11, one sharp peak distribution is obtained, and it can be seen that the microreactor 11 provides a better colloidal solution.

  Nanoparticle synthesis experiments were performed using the gold nanoparticle synthesis precursor solution shown in Table 2. As an energy beam to be irradiated, an ultraviolet light generator (manufactured by USHIO INC., An ultra-high pressure UV lamp) was used. As the microreactor 11, a flow channel pattern of a synthetic quartz micro chemical chip (manufactured by IMT, flow channel cross-sectional area: 100 μm × 40 μm) that transmits ultraviolet light was used. The solution supply was performed using a gas tight syringe (manufactured by Hamilton) set in a syringe pump. The amount of the supply liquid was set to 2 mL / hr, and irradiation was performed for about 1 hour. For comparison, a 100 mL beaker filled with the precursor solution was also irradiated. The current value of the UV lamp during both irradiations was set to 8A.

  The particle size distribution of the nanoparticle colloidal solution obtained by irradiating the microreactor 11 and the beaker was measured based on dynamic light scattering (DLS) (manufactured by Malvern Instruments Ltd.). The measurement results are shown in FIG. In the case of the beaker, the peak distribution was split and spread in two, whereas in the case of the microreactor 11, only one peak distribution was obtained.

  Nanoparticle synthesis experiments were conducted using two types of gold nanoparticle synthesis precursor solutions shown in Table 3. When L-ascorbic acid is used as a dispersant, this reagent has a reducing group, and decomposition / reduction proceeds when mixed from the beginning. Therefore, as shown in Table 3, the precursor solution is composed of S1 solution and S2 solution. It is divided into. In the case of a microchip, both solutions are individually supplied to the chip from two syringes, mixed in a Y-shaped channel, and appropriately masked so that beam irradiation is performed immediately after mixing. In the case of a beaker, the S2 solution was first filled into the beaker, and the S1 solution was mixed immediately after the start of beam irradiation.

  As an energy beam to be irradiated, a KrF excimer laser generator (wavelength: 248 nm, manufactured by LAMBDA PHYSIK AG) was used. As the microreactor 11, a synthetic quartz microchemical chip (manufactured by IMT, flow path cross-sectional area: 100 μm × 40 μm) that transmits ultraviolet light was used. The solution supply was performed using a gas tight syringe (manufactured by Hamilton) set in a syringe pump. The amount of the supply liquid was set to 1 mL / hr, and irradiation was performed for about 1 hour. For comparison, a 100 mL beaker filled with the precursor solution was also irradiated. Both laser irradiation conditions are a laser power of 100 mJ and a pulse rate of 5 Hz.

  The particle size distribution of the nanoparticle colloidal solution obtained by irradiating the microreactor 11 and the beaker was measured based on dynamic light scattering (DLS) (manufactured by Malvern Instruments Ltd.). The measurement results are shown in FIG. In the case of the beaker, the distribution was split and spread in two peaks, whereas in the case of the microreactor 11, only one relatively sharp peak distribution was obtained.

It is a block diagram which shows the nanoparticle manufacturing method and nanoparticle manufacturing apparatus of embodiment of this invention. Gold nanoparticles synthesized in a microreactor and in a beaker using a precursor solution containing PVP as a dispersant and a KrF excimer laser as a light source in the nanoparticle production method and nanoparticle production apparatus shown in FIG. It is a graph which shows the particle size distribution of this. Gold nanoparticles synthesized in a microreactor and in a beaker when using a precursor solution containing PVP as a dispersant and an ultraviolet light generator as a light source in the nanoparticle production method and nanoparticle production apparatus shown in FIG. It is a graph which shows the particle size distribution of particle | grains. The precursor solution containing L-ascorbic acid and the precursor solution containing hydrogen tetrachloroaurate of the nanoparticle production method and nanoparticle production apparatus shown in FIG. 1 are separately supplied and mixed, and then a KrF excimer laser is used. 2 is a graph showing the particle size distribution of gold nanoparticles synthesized in a microreactor and in a beaker.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Nanoparticle manufacturing apparatus 11 Microreactor 12 Flow path 13 Irradiation beam generator 14 Temperature control apparatus 15 Desalination processing apparatus 16 Nanoparticle colloid collection container

Claims (8)

  A precursor solution supplied to a microreactor having a typical length of 5 μm to 5 mm is irradiated with a single energy beam of laser light, electromagnetic wave, particle beam, or ultrasonic wave or an energy beam that is a combination of a plurality of nanoparticles. A method for producing nanoparticles characterized by producing.   The microreactor includes at least one of a thin tubular container having an inner diameter of the representative length, a rectangular or thin film container having an inner thickness of the representative length, and a porous material having an average inner diameter of the representative length. The method for producing nanoparticles according to claim 1, comprising:   The precursor solution is composed of a plurality, each precursor solution is supplied to the microreactor through a plurality of different flow paths, and the energy beam is irradiated before, simultaneously with, or after mixing of the precursor solutions. The method for producing nanoparticles according to claim 1 or 2, characterized in that:   4. The method for producing nanoparticles according to claim 1, wherein the energy beam is ultraviolet light or ultraviolet laser light having a wavelength of 400 nm or less. A microreactor having a representative length of 5 μm to 5 mm;
A flow path provided to supply a precursor solution to the microreactor;
An irradiation beam generator provided so as to be capable of irradiating the precursor solution supplied to the microreactor with an energy beam of any one of laser light, electromagnetic wave, particle beam, and ultrasonic wave The
An apparatus for producing nanoparticles, comprising:   The microreactor includes at least one of a thin tubular container having an inner diameter of the representative length, a rectangular or thin film container having an inner thickness of the representative length, and a porous material having an average inner diameter of the representative length. The nanoparticle production apparatus according to claim 5, comprising: The flow path is composed of a plurality, provided so that a plurality of precursor solutions can be separately supplied to the microreactor,
The irradiation beam generator is provided so as to be able to irradiate the energy beam before, simultaneously with or after mixing each precursor solution.
The nanoparticle production apparatus according to claim 5 or 6, characterized in that The nanoparticle manufacturing apparatus according to claim 5, wherein the energy beam is ultraviolet light or ultraviolet laser light having a wavelength of 400 nm or less.

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