JP2008232806A5 - - Google Patents

Claims (10)

A method for manufacturing an optical element using localized plasmon resonance configured by arranging a metal material that generates localized plasmon resonance on a substrate made of a first material,
Preparing the substrate having a plurality of protrusions or depressions on the surface; and
Forming a film made of a second material from a direction oblique to the surface normal to the surface of the substrate,
(1) Using the second material as the metal material, partially forming a film made of the metal material on the substrate, or
(2) After forming a film made of the second material on the substrate as a material capable of removing the second material from the substrate surface, a film made of a metal material as the third material is formed on the second material. Forming on the substrate on which the film made of is formed, removing the film made of the second material, and partially leaving the film made of the metal material on the substrate;
A method of manufacturing an optical element using localized plasmon resonance characterized by the following . 2. The size of the opening formed by exposing the substrate made of the first material without forming the film made of the metal material in the step (1) on the substrate is in the range of 10 nm to 500 nm. A manufacturing method of an optical element using the localized plasmon resonance described in 1. The method of manufacturing an optical element using localized plasmon resonance according to claim 1, wherein the film made of the second material in the step (2) is a film that can be removed by etching. The method of manufacturing an optical element using localized plasmon resonance according to claim 3, wherein the film made of the metal material in the step (2) has a size in a range of 10 nm to 500 nm. According to any one of claims 1, 3 and 4 the film made of a metal material in step (2) is formed by supplying the vertical material for forming the membrane to the surface of the substrate A method of manufacturing an optical element using localized plasmon resonance. Wherein said metallic material is gold, silver, copper and a metal material selected from the group consisting of aluminum, or any one of claims 1 to 5, an alloy of two or more metal materials selected from the group A method of manufacturing an optical element using localized plasmon resonance . The method of manufacturing an optical element using localized plasmon resonance according to any one of claims 1 to 6, wherein the protrusion or depression of the substrate is formed by pressing a mold . The method for manufacturing an optical element using localized plasmon resonance according to any one of claims 1 to 7, wherein a film-forming material is supplied by oblique vapor deposition from a direction oblique to a direction normal to the surface of the substrate. . Method of manufacturing an optical element utilizing localized plasmon resonance according to claim 1 wherein the optical element is a sensor. The method of manufacturing an optical element using localized plasmon resonance according to claim 1, wherein the optical element is a filter .