JP2008229767A - Vacuum suction device of flexible sheet-like member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent generation of sucked marks and damage in a flexible sheet-like member when sucking the member by vacuum, since the sucked marks are generated in the member by vacuum suction and partial recess and damage are generated in the member when suction force is too high, when sucking the flexible sheet-like member by vacuum to hold the member at a prescribed position. <P>SOLUTION: A base 2 of the vacuum suction device 1 is provided with a mounting surface 4 mounted with a flexible circuit board 20 to be the flexible sheet-like member thereon, a suction hole 6 formed to be exposed to the mounting surface 4 to suck the flexible circuit board 20 on the mounting surface 4 by vacuum, a communicating passage 7 communicated with the suction hole 6, and a vacuum pump connection port 8 connected to an external vacuum pump to suck gas in the communicating passage 7. The base 2 has an external gas intake port 11 taking in external gas and communicated with the communicating passage 7. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to the structure of a vacuum suction device for a flexible sheet-like member.

In general, when a part is processed or assembled, it is often used to suck the part with a vacuum suction means.
For example, Patent Document 1 describes that when a liquid crystal module is assembled using a liquid crystal panel, a backlight, or the like, the liquid crystal panel is sucked using a vacuum suction means to transport the liquid crystal panel to a predetermined position. Yes. In this case, it has been pointed out that when the liquid crystal panel becomes large and its weight increases, the liquid crystal panel has a problem of causing adsorption marks. For this reason, in Patent Document 1, the liquid crystal panel is transported by inserting the engaging claws of the liquid crystal panel holding means into the notches provided in the corners of the liquid crystal panel without using the vacuum suction means.
On the other hand, in order to mount an electronic component on a flexible sheet-like member such as a flexible circuit board or to carry the assembly, a vacuum suction device that holds the flexible sheet-like member in a predetermined position is often used.

JP 2007-10991 A (see [0007])

Since patent document 1 abandoned using a vacuum suction means, the solution means which prevents the said adsorption | suction trace in the case of vacuum suction is not disclosed at all.
On the other hand, when vacuum-adsorbing the flexible sheet-like member in order to hold the flexible sheet-like member in a predetermined position, the flexible sheet-like member has a risk of causing a suction mark to deteriorate the appearance, Since the suction target is a flexible sheet-like member, if the suction force is too high, the flexible sheet-like member can be partially recessed or damaged.

An object of the present invention is to prevent the flexible sheet-like member from being attracted or damaged when vacuum-adsorbing the flexible sheet-like member in order to hold the flexible sheet-like member at the predetermined position.

  The vacuum suction device for a flexible sheet-like member of Embodiment 1 of the present invention is a vacuum suction device for a flexible sheet-like member, comprising a base on which the vacuum suction device is configured, and the base is the flexible sheet-like shape A mounting surface for mounting the member at a predetermined position; a suction hole formed to be exposed on the mounting surface; and a vacuum hole for vacuum-sucking the flexible sheet-shaped member to the mounting surface; and formed in the base. A communication passage communicating with the suction hole, a vacuum pump connection portion connected to an external vacuum pump so as to suck gas in the communication passage, and an external gas intake portion taking in external gas and communicating with the communication passage It is characterized by having.

According to the configuration of the first embodiment of the present invention, the base on which the vacuum suction device is configured includes the external gas intake portion that communicates with the outside and takes in the external gas. Even if the target object is a flexible sheet-like member, the suction force sucked by the suction holes is alleviated, and it is possible to prevent suction marks or damage to the flexible sheet-like member.
In general, manufacturing or assembly factories often manufacture and assemble various products, and hold various products in a predetermined position by vacuum suction or transport them to the next process position. In the above-mentioned factory, it is not preferable to provide a dedicated vacuum pump for performing vacuum suction for each of various products because of the equipment burden. Therefore, the factory often performs vacuum suction of various products using a common vacuum pump. For this reason, in order to enable vacuum suction of various products, the common vacuum pump is set to have a strong suction force. Therefore, when vacuum-adsorbing the flexible sheet-like member, the attractive force tends to be too strong.
In the present invention, an external gas intake part for taking in external gas is provided in order to relieve an excessively strong adsorption force on the flexible sheet-like member.
Therefore, even when the suction force by the vacuum pump is too strong, outside air enters from the external gas intake portion, so that the suction force for vacuum-sucking the flexible sheet-like member by the suction holes can be reduced.
The gas and the outside air are generally air, but may be other gases.

The flexible sheet-like member vacuum suction device according to the second embodiment of the present invention is the flexible sheet-like member vacuum suction device according to the first embodiment, wherein the external gas intake portion is located between the suction holes and the vacuum pump. It is arrange | positioned in the position connected to the exterior of the said base in the upstream of the gas flow used as a position on the opposite side to a connection part, It is characterized by the above-mentioned.

  According to the above configuration, the installation location of the external gas intake portion is the upstream side of the gas flow that is located on the opposite side of the vacuum pump connection portion with the suction hole in between, and the location communicating with the outside of the base As a result, the suction force for vacuum-sucking the flexible sheet-like member by the suction holes is surely reduced.

A flexible sheet-like member vacuum suction device according to Embodiment 3 of the present invention is the flexible sheet-like member vacuum suction device according to any one of Embodiments 1 to 2, wherein a plurality of the suction holes are formed. The communication passage communicates with all of the suction holes, and the external gas intake section is located upstream of the gas flow at a position opposite to the vacuum pump connection section with all the suction holes in between. It is arranged at a position communicating with the outside of the base.

According to the above configuration, the external gas intake portion is formed on the upstream side of the gas flow, which is located on the opposite side of the vacuum pump connection portion with the plurality of suction holes in between, and outside the base. Therefore, the suction force for vacuum-sucking the flexible sheet-like member is surely relieved by each suction hole.
The external gas intake part is not limited to the second and third embodiments. That is, the external gas intake part is disposed at a position communicating with the outside of the base on the upstream side of the gas flow, which is the position opposite to the vacuum pump connection part, with the one or all suction holes in between. It is not essential to be arranged, and the vacuum pump connection part may be disposed between the one, all, or some of the suction holes so as to communicate with the outside of the base. .

A flexible sheet-like member vacuum suction device according to a fourth embodiment of the present invention is the flexible sheet-like member vacuum suction device according to any one of the first to third embodiments, wherein the flow path cross section of the external gas intake section is described above. The area is smaller than the flow path cross-sectional area of the vacuum pump connection part.

According to the above configuration, when the flow passage cross-sectional area of the external gas intake portion is smaller than the flow passage cross-sectional area of the vacuum pump connection portion, the suction force of the vacuum pump reaches the suction hole, and the suction hole Thus, the flexible sheet-like member can be reliably adsorbed.
On the contrary, when the flow passage cross-sectional area of the external gas intake portion is larger than the flow passage cross-sectional area of the vacuum pump connection portion, the suction of gas from the vacuum pump connection portion is performed by the outside air from the external gas intake portion. Therefore, the flexible sheet-like member cannot be appropriately adsorbed by the suction holes.

  A flexible sheet-like member vacuum suction device according to a fifth embodiment of the present invention is the flexible sheet-like member vacuum suction device according to any one of the first to fourth embodiments, wherein the external gas intake is performed by the external gas intake unit. It has an external gas intake amount adjusting means capable of adjusting the input amount.

According to the above configuration, since the external gas intake amount by the external gas intake portion can be adjusted by the external gas intake amount adjusting means, the size of the vacuum pump connection portion and the suction force of the vacuum pump are affected by the flexible sheet shape. Even when it is not suitable for the member, it can be adjusted so as to obtain an optimum suction force for the flexible sheet-like member.

  The flexible sheet-like member vacuum suction device according to Embodiment 6 of the present invention is the flexible sheet-like member vacuum suction device described in Embodiment 5, wherein the external gas intake amount adjusting means is a flow of the external gas intake portion. It is a valve which adjusts a road section area.

According to the above configuration, since the external gas intake amount adjusting means uses a valve that adjusts the flow passage cross-sectional area of the external gas intake portion, the external gas intake amount adjustment can be easily configured, It can also be adjusted reliably.

  The flexible sheet-like member vacuum suction device according to Embodiment 7 of the present invention is the flexible sheet-like member vacuum suction device according to Embodiment 5, wherein the external gas intake amount adjusting means includes a plurality of external gas intake units, A plurality of flow paths are configured to communicate the plurality of external gas intake portions and the communication passage, and a flow for adjusting an external gas intake amount by selecting either the plurality of external gas intake portions or the flow paths. It is a road selection means.

According to the above configuration, the external gas intake amount adjusting means includes a plurality of the external gas intake portions and a plurality of flow paths that connect the external gas intake portions and the communication passage. In this combination, the flow path selection means for selecting the external gas intake part or the flow path and adjusting the external gas intake amount is provided so that the flow path can be selected. The optimum flow path can be selected from the relationship between the suction hole and the vacuum pump connection portion, and the vacuum suction force of the flexible sheet-like member can be finely adjusted.

The flexible sheet-like member vacuum suction device according to Embodiment 8 of the present invention is the flexible sheet-like member vacuum suction device according to any one of Embodiments 1 to 7, wherein the flexible sheet-like member is a flexible circuit. It is a substrate.

According to the above configuration, when the electronic element is mounted on the flexible circuit board or transported to the next process, the mounting work and the transport work can be performed without damaging or deforming the flexible circuit board. is there.
The flexible sheet-like member is not limited to the flexible circuit board, and may be any flexible sheet-like member. For example, a solar cell in which a photoelectric conversion semiconductor is placed on a flexible board It may be. The sheet-like member may be a thin plate-like plastic, rubber or paper.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
1 is a plan view of a vacuum suction apparatus according to a first embodiment of the present invention, FIG. 2 is a front view of FIG. 1, and FIG. 3 is a position indicated by AA in FIG. It is principal part sectional drawing in a different position.
1 to 3, reference numeral 1 denotes a vacuum suction device, which holds the flexible circuit board 20 by suction.

In the vacuum suction apparatus 1, reference numeral 2 denotes a base, which is made of metal such as engineering plastic, brass, stainless steel or the like.
3 is an upper surface of the base 2.
4 is a mounting surface on which the flexible circuit board 20 of the component to be attracted is mounted, and is a surface that is positioned in the cross-sectional direction when the flexible circuit board 20 is sucked.
Reference numeral 5 denotes a guide concave groove that guides the flexible circuit board 20 of the component to be attracted formed on the upper surface 3 in the planar direction, and has an inner shape similar to the outer shape of the flexible circuit board 20, and is slightly flexible circuit board 20. It is formed in a larger groove shape. Therefore, the planar position of the flexible circuit board 20 can be positioned.

Reference numeral 6 denotes a suction hole, which is exposed on the upper surface of the guide groove 4 and formed inward (vertical direction in FIG. 3), and is used for vacuum suction of the flexible circuit board 20 as will be described later. It is done. In addition, although the suction hole 6 was formed in three places (three pieces) in FIG. 1, the number (number) of the places may be selected suitably and may be two places, four places, or one place. When provided at a plurality of locations as shown in FIG. 1, the flexible circuit board 20 is preferably mounted on the mounting surface 4 because it is a flexible thin plate.
Reference numeral 7 denotes a communication path provided inward of the base 2 and formed in the horizontal direction in FIG. 3 to communicate with each suction hole 6.

Reference numeral 8 denotes a vacuum pump connection port as a vacuum pump connection portion formed on the front side surface 9 of the base 2.
The vacuum pump connection port 8 is a portion to which a vacuum pump connection tube 10 connected to a vacuum pump (not shown) arranged outside the vacuum suction device 1 is attached. The vacuum pump connection port 8 sucks air, which is a gas in the communication passage 7, through the vacuum pump connection tube 10 by the vacuum pump.
Reference numeral 11 denotes an external gas intake as an external gas intake portion that takes in external air, which is external gas, formed on the front side surface 9 of the base 2.
The external gas intake port 11 communicates with the communication path 7. Therefore, the external air taken in from the external gas intake port 11 also flows into the communication path 7.

  The external gas intake port 11 is formed at a position opposite to the vacuum pump connection port 8 with the suction hole 6 in between, and the formation location is positioned on the upstream side of the gas flow in the outside air to be taken in. It is what. When a plurality of the suction holes 6 are formed as shown in FIG. 1, the external gas intake port 11 is disposed at a position opposite to the vacuum pump connection port 8 with all the suction holes 6 in between. It is preferable from the flow of gas. That is, when the air in the vacuum suction device 1, that is, the base 2 is sucked from the vacuum pump connection port 8 by the vacuum pump, the suction force from the vacuum pump connection port 8 is large, and the suction holes 6 are Even when the acting suction force is increased, the outside air is introduced from the external gas inlet 11 on the upstream side of the suction hole 6, so that the introduced outside air passes through all the suction holes 6. Therefore, the suction force by all the suction holes 6 can be relaxed. Thus, the relaxation of the suction force in each suction hole 6 does not cause damage such as suction marks or partial depressions, and the flexible circuit board 20 is held in a good state.

In addition, when the suction hole 6 is formed at one place as described above, the external gas intake port 11 is disposed at a position opposite to the vacuum pump connection port 8 with the suction hole 6 in between. The upstream side of the gas flow.
The external gas inlet 11 communicates with the outside of the base 2 on the upstream side of the gas flow that is located on the opposite side of the vacuum pump connection port 8 with the one or all of the suction holes 6 in between. It is not indispensable to be disposed at the position, and it is disposed between the vacuum pump connection port 8 and the one, all, or several suction holes 6 so as to communicate with the outside of the base 2. It may be.

Here, the flow path 12 of the external gas inlet 11 that is the external gas inlet, that is, the cross-sectional area of the inner diameter of the external gas inlet 11 in FIG. 1 is the flow of the vacuum pump connection tube 10 that is the vacuum pump connection. The passage 13 is formed smaller than the cross-sectional area of the inner diameter of the vacuum pump connection tube 10 in FIG.
Therefore, when the air in the vacuum adsorption device 1, that is, the base 2 is sucked by the vacuum pump, the flow rate of the external air introduced from the flow path 12 of the external gas inlet 11 is the vacuum pump connection tube. 10 and less than the suction flow rate of air evacuated. Therefore, when the vacuum pump connection tube 10 is evacuated, a suction force acts on all the suction holes 6, and the flexible circuit board 20 is sucked and held on the mounting surface 4. Become. At this time, since the outside air is introduced from the flow path 12 of the external gas inlet 11 as described above, the suction force by the suction hole 6 is appropriately reduced without being too strong.

  The flexible circuit board 20 has a polyimide resin thin plate as a substrate, and a copper foil laminated on the surface thereof is etched to form a desired wiring pattern. A semiconductor element or other circuit is formed on the substrate. The component is mounted in an electrically conductive state.

An example in which the flexible circuit board 20 that is an object to be adsorbed is adsorbed to the vacuum adsorption apparatus 1 configured as described above will be described.
First, the vacuum suction device 1 is in a state in which the vacuum pump connection tube 10 is connected to an external vacuum pump in an operating state, and the air in the flow path in the base 2 is transferred to the vacuum pump side by the vacuum pump. It is in a state of being sucked in.
In this state, the flexible circuit board 20 on which the wiring pattern is formed is placed on the placement surface 4 of the base 2. Since the flexible circuit board 20 is inserted into the guide groove 5 in which the placement surface 4 is formed, the flexible circuit board 20 is described above by the suction hole 6 in a state where the plane position is fixed at a predetermined position. It is sucked and held on the mounting surface 4. At this time, since the external gas intake 11 is formed, the suction force by the suction hole 6 is relieved, and the flexible circuit board 20 does not suffer from suction marks or damage in the suction hole 6.

  Thereafter, a conductive anisotropic adhesive is applied onto the predetermined conductive pattern of the flexible circuit board 20, and, for example, an electrode of a semiconductor element is brought into contact with the application portion of the conductive anisotropic adhesive, and is heated and cured, so that the conductive pattern is formed. And the electrode are conductively joined. During the conductive bonding, the flexible circuit board 20 is continuously held on the mounting surface 4 which is a predetermined position of the base 2. Thereafter, when the continuity with the external vacuum pump in the vacuum suction device 1 is released, the flexible circuit board 20 is chucked by the transfer robot arm and transferred to the assembly position to the electronic device.

[Second Embodiment]
FIG. 4 is a cross-sectional view of the main part of the vacuum suction device 101 showing the second embodiment of the present invention. Basically, it is almost the same as FIG.
The second embodiment is different from the first embodiment in that the part to be attracted is a flexible solar cell sheet 114 of an electronic watch, and the guide structure in the planar direction of the part to be attracted is not a groove but the base 2 This is a plurality of guide pins 115 planted on the upper surface 3. Others are the same as in the first embodiment.

The solar cell sheet 114 is formed by forming a photovoltaic semiconductor layer on a flexible resin sheet and coating an electrode pattern at a predetermined position.
When the plurality of guide holes of the solar cell sheet 114 are inserted into the guide pins 115, the solar cell sheet 114 is vacuum-sucked to the upper surface 3 through the suction holes 6 as described above, and the planar position and the cross-sectional direction The position will be determined.
Thereafter, an adhesive is applied to a predetermined portion of the solar cell sheet 114, and the thin plate holding plate 116 for reinforcing the solar cell sheet 114 and incorporating it into the timepiece module is covered from above the adhesive. At this time, the planar position of the thin plate holding plate 116 is also positioned by the guide pins 115. Thereafter, the adhesive is cured by pressure and heating, and the thin plate holding plate 116 is fixed to the solar cell sheet 114. After that, as described above, after the vacuum suction device 1 is released from the conduction with the external vacuum pump, the solar cell sheet 114 and the thin plate holding plate 116 are chucked by the transfer robot arm to the assembly position to the electronic equipment. It is to be transported.

Therefore, the solar cell sheet 114 is sucked and held at a predetermined position of the vacuum suction device 1 and the thin plate holding plate 16 is joined. In the sucking and holding, the solar cell sheet 114 is The gas intake 11 is free from adsorption marks and damage and can be held in a good adsorption state.

[Third Embodiment]
FIG. 5 is a plan view of a vacuum suction device 201 showing a third embodiment of the present invention, and is a plan view corresponding to FIG.
The third embodiment differs from the first embodiment in that an external gas intake adjustment valve is provided as an external gas intake adjustment means that can adjust the external gas intake through the external gas inlet 12. It is. Specifically, the external gas intake amount adjusting valve is screwed into the side wall of the base 2 from the outside by an external gas intake amount adjusting screw 217 and its tip is exposed to the external gas inlet 12. The external gas intake amount by the external gas intake port 12 is adjusted by adjusting the screwing amount of the external gas intake amount adjusting screw 217. Others are the same as in the first embodiment.

The external gas intake amount adjustment valve and the partial gas intake amount adjustment means are not limited to the screws as described above, and may have other structures such as an adjustment valve.
[Modification]
The external gas intake amount adjusting means uses the external gas intake amount adjusting screw 217 in the third embodiment.
In the modification, although not shown in the drawings, as the external gas intake amount adjusting means, a plurality of the external gas intake portions and a flow path connecting the external gas intake portion and the communication path are provided in the external gas intake portion. A plurality of units are configured correspondingly, and a flow path selection unit is provided that selects either the external gas intake unit or the flow path to adjust the external gas intake amount.
A plurality of external gas intake portions are provided on the side wall of the base 2, and a plurality of flow paths are formed in the base 2 for communicating each external gas intake portion and the communication path.

When selecting the external gas intake part among the flow path selection means, open / close valves are installed in all external gas intake parts, open / close valves of the external gas intake parts to be selected are opened, and non-selected external gas intakes are selected. What is necessary is just to operate the on-off valve of the entrance to close. Further, when selecting the flow path among the flow path selecting means, an open / close valve is installed in the middle of all the flow paths, the open / close valve of the flow path to be selected is opened, and the open / close valve of the non-selected flow path is set. It only has to be closed.
The flow path selecting means is not limited to the above means, and a plurality of the external gas intake portions and a plurality of flow paths communicating the external gas intake portions and the communication passage are configured correspondingly. Any structure and means may be used as long as it is a flow path selection means that selects either the external gas intake portion or the flow path to adjust the external gas intake amount.

[Fourth Embodiment]
FIG. 6 is a cross-sectional view of the main part of a vacuum suction device 301 showing a fourth embodiment of the present invention. Basically, it is almost the same as FIG.
The fourth embodiment differs from the first embodiment in that the part to be sucked is a functional flexible product (filter 302 used in the HDD), and the filter 302 is used as a guide structure in the planar direction of the part to be picked up. The outer peripheral portion 304 a of the binary filter 304 that is a protruding portion protruding downward is positioned in the planar direction by the inner peripheral wall 5 a of the guide groove 5, and the lower surface 304 b of the binary filter 304 is positioned in the guide groove 5. The top cover 305 is disposed on the upper side of the filter 302 and the top cover 305 is flattened by a plurality of guide pins 315 planted on the upper surface 3 of the base 2. Be guided in the direction. Others are the same as in the first embodiment.

The filter 302 will be described in detail. 303 is a filter substrate made of a polyethylene film, and is formed in a predetermined outer shape suitable for being housed in the HDD.
The binary filter 304 is bonded to the lower surface of the filter substrate 303 and has a smaller outer shape than the filter substrate 303. This binary filter 304 contains a carbon polymer inside and can remove contamination (contamination).
The top cover 305 is configured such that the filter substrate 303 is bonded and fixed to the inner surface thereof.

A situation where the filter 302 is held in the vacuum suction device 301 will be described.
First, the filter 302 in which the binary filter 304 is joined to the filter substrate 303 is set on the vacuum suction device 301 in a vacuumed state as in the first embodiment. In the set, a binary filter 304 protruding below the filter 302 is inserted into the guide groove 5 formed on the upper surface of the base 2. At the time of this insertion, suction has already begun, but if the binary filter 304 is not correctly aligned with the above-mentioned guide groove 5 in the plane position, a gap is generated in the cross-sectional direction in the portion that is not correctly aligned. Since air is invaded, almost no adsorption force is applied to the filter substrate 303, and thus the lower surface of the binary filter 304 is not particularly damaged. On the other hand, when the plane position is correctly matched, an adsorption force is applied to the filter 302, and the plane direction of the binary filter 304 is positioned at a predetermined position. Therefore, the filter 302 is positioned at a predetermined position in the plane direction with respect to the vacuum suction device 301.

In this case, the binary filter 304 is flexible. However, since the lower surface 304b of the binary filter 304 is configured to have a gap with respect to the upper surface 5b of the guide groove 5, the binary filter 304 is vacuum-sucked by the suction hole 6. In this case, the lower surface 304b of the binary filter 304 does not contact the upper surface 5b of the guide groove 5, and the external gas intake 11 is provided as described above, so that the outside air is flown from the flow path 12 of the external gas intake. Therefore, when the air in the vacuum suction device 1, that is, the base 2 is sucked from the flow path 13 of the vacuum pump connection port, the suction force by the suction hole 6 is appropriately reduced without being too strong. is there. Therefore, even though the binary filter 304 is flexible, the suction force by the suction hole 6 does not cause damage or suction marks, and the filter 302 can be positioned at a predetermined position of the vacuum suction device 301 with a good suction force. To be held.

When the filter 302 is held at a predetermined position of the vacuum suction device 301 as described above, the top cover 305 is set from above. That is, in the filter 302, the guide pins 315 and 315 are inserted into guide holes formed corresponding to the guide pins 315 and 315 fixed to the upper surface side of the vacuum suction device 301. Since the guide pins 315 and 315 are attached so that the positions in the plane direction are fixed with respect to the guide grooves 5, particularly the inner peripheral wall 5 a, the top cover 305 is flat with respect to the filter 302. It is positioned at a predetermined position in the direction. The top cover 305 is used as a lid on the top of the HDD.
In this way, when the filter 302 is inserted into a predetermined position of the vacuum suction device 301, the filter 302 is processed so that the two are joined by an adhesive applied to the inner surface of the top cover 305 or the upper surface of the filter 302. It is.

The flexible sheet-like member vacuum suction apparatus of the present invention is applied to an apparatus for vacuum-sucking the flexible sheet-like member using a flexible member such as a flexible circuit board or a flexible solar cell as described above.
The flexible sheet-like member is vacuum-adsorbed by the vacuum suction device of the present invention, for example, by positioning the flexible sheet-like member at a predetermined position and attaching another member to the flexible sheet-like member or the flexible sheet-like member This is applied to various processing such as surface treatment and external shape processing, or used for assembling and transporting the flexible sheet-like member to a predetermined place of a processing apparatus.

The top view of the vacuum suction apparatus in 1st Embodiment of this invention. The front view of FIG. FIG. 2 is a cross-sectional view of a main part at the position AA in FIG. The principal part sectional drawing of the vacuum suction apparatus which shows 2nd Embodiment of this invention. The top view of the vacuum suction apparatus which shows 3rd Embodiment of this invention. The top view of the vacuum suction apparatus which shows 4th Embodiment of this invention.

Explanation of symbols

    1, 101, 201, 301: vacuum suction device, 2: base, 3: upper surface, 4: mounting surface, 5: guide groove, 5a: inner peripheral wall, 5b: upper surface, 6: suction hole, 7: continuous Passage, 8: Vacuum pump connection port, 9: Front side surface, 10: Vacuum pump connection tube, 11: External gas intake port, 12: External gas intake channel, 13: Vacuum pump connection port, 20 : Flexible circuit board, 114: Solar cell sheet, 115, 315: Guide pin, 116: Thin plate holding plate, 217: External gas intake adjustment screw, 302: Filter, 303: Filter substrate, 304: Binary filter, 304a: Outer peripheral part, 304b: lower surface, 305: top cover

Claims (8)

A vacuum suction device for a flexible sheet-like member,
A base comprising the vacuum suction device;
The base is
A mounting surface for mounting the flexible sheet-like member at a predetermined position;
A suction hole that is exposed on the placement surface and vacuum-sucks the flexible sheet-like member onto the placement surface;
A communication path formed in the base and communicating with the suction hole;
A vacuum pump connection for connecting to an external vacuum pump to suck the gas in the communication path;
A vacuum adsorbing device for a flexible sheet-like member characterized by having an external gas intake portion that takes in external gas and communicates with the communication passage. In the vacuum suction device of the flexible sheet-like member according to claim 1,
The external gas intake part is disposed at a position communicating with the outside of the base on the upstream side of the gas flow, which is located on the opposite side of the vacuum pump connection part with the suction hole in between. Vacuum suction device for flexible sheet-like members. In the vacuum suction device of the flexible sheet-like member according to any one of claims 1 to 2,
A plurality of the suction holes are formed, the communication passage communicates with all of the suction holes, and the external gas intake part is opposite to the vacuum pump connection part with all the suction holes in between. A vacuum suction device for a flexible sheet-like member, which is disposed at a position communicating with the outside of the base on the upstream side of a gas flow as a position. In the vacuum suction device of the flexible sheet-like member according to any one of claims 1 to 3,
The vacuum suction device for a flexible sheet-like member, characterized in that a flow passage cross-sectional area of the external gas intake portion is smaller than a flow passage cross-sectional area of the vacuum pump connection portion. In the vacuum suction device of the flexible sheet-like member according to any one of claims 1 to 4,
A vacuum adsorbing device for a flexible sheet-like member, comprising external gas intake amount adjusting means capable of adjusting an external gas intake amount by the external gas intake portion. In the vacuum suction device of the flexible sheet-like member according to claim 5,
The vacuum suction apparatus for a flexible sheet-like member, wherein the external gas intake amount adjusting means is a valve that adjusts a flow passage cross-sectional area of the external gas intake portion. In the vacuum suction device of the flexible sheet-like member according to claim 5,
The external gas intake amount adjusting means includes a plurality of flow paths that communicate a plurality of external gas intake portions, the plurality of external gas intake portions, and the communication passage, and the plurality of external gas intake portions or A vacuum adsorbing device for a flexible sheet-like member, characterized in that it is a channel selecting means for selecting any one of channels and adjusting the amount of external gas intake. In the vacuum suction device of the flexible sheet-like member according to any one of claims 1 to 7,
The flexible sheet-like member is a flexible circuit board.

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