JP2008216221A - Semiconductor test device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor test device in which a trouble of a DUT is prevented from occurring by preventing the violation of a test program from being uninspected. <P>SOLUTION: The semiconductor test device 100 performs a power supply checker function while the test program is run by a test program execution part 120. A power supply checker control part 110 outputs the data on requirements for violation to a violation requirement check part 124 and sets it. The set data generated for the test program is set in the violation requirement check part 124, and the set data is checked based on the violation requirement data to detect the violation of the test program. When a violation is detected, the execution of the test program is stopped and a processing for displaying it on a screen is performed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a semiconductor test apparatus that performs a test such as operation check on an object to be tested such as a semiconductor device, and more particularly to a configuration for checking violation of a test program.

  2. Description of the Related Art Conventionally, a test program prepared in advance for each type of test in a semiconductor test apparatus that outputs a test signal to a test target such as a semiconductor device (hereinafter referred to as a DUT) and performs an operation check test. By executing the above, the DUT is tested for the contents according to the test program.

  In executing the test program, the test program setting and violation are checked in accordance with the function and model of the semiconductor test apparatus, thereby preventing the malfunction or failure of the DUT. Specifically, a power supply checker function for checking whether or not the voltage value applied to the DUT at the time of the test conforms to the DUT standard (rated value) is provided in the semiconductor test apparatus.

In the test program generation device described in Patent Document 1 below, the program generation function activates the corresponding active template from the template library database based on the template name described in the test specification. The test specification editing function associates an active template with an intermediate parameter, and generates a test program by fetching necessary intermediate parameters from the group of intermediate parameters for the activated active template (for example, , See Patent Document 1).
JP 2006-31354 A (FIG. 1)

  Further, in the conventional semiconductor test apparatus, the setting of a test program to be executed when the test is performed and the violation are checked as follows. FIG. 3 is an explanatory diagram showing a configuration of a semiconductor test apparatus 200 that performs a test of contents according to the test program for the DUT by executing the test program.

  The semiconductor test apparatus 200 controls each internal component of the semiconductor test apparatus 200, and executes a power checker control unit 210 that performs processing for extracting information related to operation settings at the time of the test from the test program, and a test program stored in advance. Thus, the test program execution unit 220 is configured to perform a test. The semiconductor test apparatus 200 is connected to a setting data storage unit 230 and a violation data storage unit 240 which are external storage devices. The setting data storage unit 230 and the violation data storage unit 240 store violation condition data related to test program violation conditions and setting data related to operation settings of the semiconductor test apparatus 200. The semiconductor test apparatus 200 stores setting data. Data can be stored (written) and read from the unit 230 and the violation data storage unit 240.

  Next, the operation of the semiconductor test apparatus 200 will be described using the flowchart shown in FIG. The power checker control unit 210 of the semiconductor test apparatus 200 performs a check using the test program execution unit 220 separately from the actual test for the DUT by executing a command “pwrchk-c dptest.txt”, for example. Run the test program. The setting data collection unit 211 of the power checker control unit 210 uses the test program execution unit 220 to read out the test program stored in advance in the test program storage unit 222 for each line or for each step of the instruction unit.

  In the test program execution unit 220, the hardware setting unit 221 confirms the limit status of the function of the semiconductor test apparatus 200, and in accordance with the contents of each step of the read test program, the test head part (not shown) of the semiconductor test apparatus 200 Thus, the setting relating to the voltage value applied as a test signal to the DUT is performed. In addition, the setting data including the set contents is stored in the hardware setting storage unit 223 (step S401).

  The setting data collection unit 211 reads the setting data stored in step S401 from the hardware setting storage unit 223 and stores the setting data in the setting data storage unit 230 provided as a storage area different from the hardware setting storage unit 223 (step S402), the test program execution unit 220 executes the test program (Step S403).

  The setting data collection unit 211 repeatedly performs the processing of steps S401 to S403 for each step of the test program. When the processing of S401 to S403 is performed in all steps (YES in step S404), the violation condition check unit 212 The violation condition data stored in advance in the violation data storage unit 240 is read (step S405).

  The violation condition check unit 212 reads the setting data stored in step S402 separately from the setting data storage unit 230 for each step of the test program (step S406). Based on the read violation condition data, the violation condition check unit 212 checks whether the voltage value of the test signal actually applied to the DUT meets the violation condition (step S407).

  When a violation is detected as a result of the check (YES in step S407), the violation condition check unit 212 generates violation result data including the content of the detected violation and is connected as an external storage device. The data is stored in the data storage unit 250.

  The violation result data includes the conditional expression number of the violation condition data corresponding to the violation content, the line position of the test program, the test number of the test content corresponding to the test program, etc. For example, “caseno = 1, file = This is a text file including a character string of DpsTest1.tdl, line = 100, testno = 200 ".

  The violation condition check unit 212 repeatedly performs the processing of steps S406 to S409 on the setting data divided according to each step of the test program, and checks all setting value data.

  However, such a conventional semiconductor test apparatus has the following problems. That is, the semiconductor test apparatus 200 executes the test program using the test program execution unit 220 by ignoring the test result separately from the actual test for the DUT, and checks at the preparation stage of the actual test. . However, in an actual test for a DUT, a plurality of branches are generated in the test program according to the determination and evaluation processing, and the processing executed by the branch changes every time the test is performed, and different processing is not limited to the same processing flow. There was a case where the flow was executed.

  For this reason, if a processing flow that is different from the processing flow that was checked in the preparatory stage of the test is executed, there is a problem that the setting data is not checked and cannot be detected even if a violation occurs. It was. If the test is executed with a violation, an excessive voltage is applied to the DUT, resulting in a problem such as failure or destruction of the DUT.

  Therefore, an object of the present invention is to provide a semiconductor test apparatus capable of preventing undetected violation of a test program and preventing occurrence of a DUT trouble.

  In order to achieve the above-described problems, a semiconductor test apparatus according to the present invention includes a test program execution unit that executes a test program for performing a test on a test target, and a voltage output to the test target. A violation information storage unit that stores violation condition information including a violation condition related to a value, and a test program based on the violation condition information stored in the violation information storage unit during execution of the test program by the test program execution unit. A violation check unit that detects a violation, and a test program stop unit that stops execution of the test program by the test program execution unit when a violation is detected by the violation check unit. .

  With this configuration, the violation check unit checks for violations during the actual test when the test program is executed by the test program execution means, so that multiple branches occur in the test program and are executed by branching every number of tests. Even if the process changes, it is possible to check for violations for each of those times, and to prevent undetected violations of the test program. Further, when a violation occurs, it can be detected immediately and the execution of the test program can be stopped, so that it is possible to reliably prevent the occurrence of a DUT trouble.

  Another semiconductor test apparatus according to the present invention executes a test execution unit having a function of performing a test on an object to be tested, and a test program for operating the test execution unit to advance the test. A test program executing means, a setting information generating section for generating setting information relating to the setting of the test execution section in accordance with the test program, and the test execution using the setting information during execution of the test program by the test program executing means. A setting check unit for checking the setting of the unit, a violation information storage unit for storing violation condition information including a violation condition related to a voltage value to be output to the test target, and during execution of the test program by the test program execution unit, Based on the violation condition information stored in the violation information storage unit, the setting information is checked and a test program is checked. A violation check unit that detects a violation of the program, and a test program stop unit that stops execution of the test program by the test program execution unit when a violation is detected by the violation check unit. And

  In the semiconductor test apparatus of the present invention, the test execution unit is hardware that actually applies a test signal to the object to be tested, and such hardware operates as the test program is executed. The violation checking unit checks violations at the same time as checking the setting of the test execution unit during the test that actually proceeds by executing the test program. For this reason, even if multiple branches occur in the test program and the processing executed by the branch changes for each number of tests, it is possible to check for violations for each number of times. Misdetection of violations can be reliably prevented. In addition, if a violation has occurred, it can be immediately detected and the execution of the test program can be stopped, so that it is possible to prevent a DUT trouble from occurring.

  In the above-described semiconductor test apparatus, the violation condition information may include information on a range of voltage values that can be applied as a test signal to the test target.

  With this configuration, the voltage value to be applied as the test signal to the device under test is checked based on the violation condition information according to the test program during the test, and if a violation occurs, it is detected immediately and the test program is executed. Is stopped, and troubles such as failure and destruction caused by applying an excessive voltage value to the DUT can be effectively prevented.

  The above-described semiconductor test apparatus may further include a screen display unit that displays on the screen that a violation has been detected in response to the test program being detected by the violation check unit. With such a configuration, when a violation has occurred, it is immediately detected and displayed on the screen, so that the user can confirm by looking at the screen display unit.

  According to the semiconductor test apparatus of the present invention, it is possible to prevent an undetected violation of a test program and prevent a DUT trouble from occurring.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.
FIG. 1 is an explanatory view showing a configuration example of a semiconductor test apparatus 100 which is an embodiment of a semiconductor test apparatus according to the present invention. The semiconductor test apparatus 100 executes a test program prepared in advance for each type of test to output a test signal to the DUT and perform an operation check test. During the test, according to the test program, the DUT and the semiconductor test apparatus This is a device having a power checker function for checking setting data for setting a test head portion and the like.

  The semiconductor test apparatus 100 includes a power checker control unit 110 that controls each component in the semiconductor test apparatus 100 and implements a power checker function for checking operation settings during a test from a test program, and a test program stored in advance. It is comprised from the test program execution part 120 which tests by executing. Further, a violation data storage unit 140 is connected to the semiconductor test apparatus 100. The violation data storage unit 140 is composed of, for example, an external storage device having a storage area, and data related to the violation condition of the test program (violation condition data) is stored in the storage area.

  The power checker control unit 110 uses the test program execution unit 120 to execute a test program, and acquires from the test program execution unit 120 violation result data detected as a result of the test program execution unit 120 checking as a power checker function. It has a function. Further, in response to obtaining the violation result data from the test program execution unit 120, the execution of the test program of the test program execution unit 120 is stopped, and the fact that the violation has been detected is displayed on a display screen or the like.

  The power checker control unit 110 also includes a violation condition setting unit 111 that controls a violation condition check unit 124 provided in the test program execution unit 120 to detect a violation of the test program. The violation condition setting unit 111 reads the violation condition data stored in the violation data storage unit 140 and outputs the violation condition data to the violation condition check unit 124 to perform a process of detecting a test program violation.

  The test program execution unit 120 performs a test on a DUT connected to a test head portion (test execution unit) (not shown) by executing the test program separately for each line or for each step of the instruction unit. Have Further, the test program execution unit 120 includes a hardware setting unit 121 that sets the test head portion and the like according to the test program.

  When the test program execution unit 120 executes a test program and performs a test, the hardware setting unit 121 generates setting data including the setting contents to be set in the test head portion or the like according to the test program for all steps of the test program Thus, the hardware setting storage unit 123 has a function of storing. Further, the contents of the setting data are checked while confirming the limit state of the function of the semiconductor test apparatus 100, and the test head portion and the like are set according to the setting data.

  Here, the setting data is information relating to the connection relationship between various pins in contact with the DUT in the test head portion and the voltage value applied as a test signal from the various pins. For example, the setting data includes information such as “DPS1 = 3V, DPS2 = 1.5V” in a text file format as voltage values applied to various pins of the DUT.

  The test program execution unit 120 includes a test program storage unit 122 that stores a test program prepared in advance for each type of test, and a hardware setting storage that stores setting data including the contents set by the hardware setting unit 121. Part 123 is provided.

  The test program execution unit 120 includes a violation condition check unit 124 that checks for violations of the test program using the setting data stored in the hardware setting storage unit 123.

  The violation condition check unit 124 reads the setting data stored in the hardware setting storage unit 123, checks the setting data based on the violation condition data output from the violation condition setting unit 111, and checks for violation of the test program. It has a function to detect. Further, the violation condition check unit 124 generates violation result data including the content of the violation in response to detecting the violation of the test program, and outputs the violation result data to the power checker control unit 110 via the hardware setting unit 121.

  Here, the violation result data is data including the conditional expression number of the violation condition data corresponding to the violation content, the line position of the test program, the test number of the test content corresponding to the test program, etc. For example, “caseno = 1, This is a text file including a character string of file = DpsTest1.tdl, line = 100, testno = 200 ".

  The violation data storage unit 140 stores violation condition data prepared in advance for each type of test, DUT, and function. Here, the violation condition data is data including information such as the maximum value and the minimum value of the voltage value range that can be applied to the DUT as a test signal according to the type and function of the DUT. The unit 124 checks whether or not the voltage value applied as a test signal to the DUT included in the setting data violates the range of voltage values that can be applied to the DUT based on the violation condition data. Detect violations of test programs.

  Next, the operation of the semiconductor test apparatus 100 in the present embodiment will be described using the flowchart shown in FIG. The power checker function of the semiconductor test apparatus 100 is realized in real time by executing a command such as “pwrchk2-c dptest.txt” during execution of the test program by the test program execution unit 120 in an actual test for the DUT. .

  Step S201: The power checker control unit 110 of the semiconductor test apparatus 100 reads the violation condition data from the violation data storage unit 140 by the violation condition setting unit 111 and outputs the violation condition data to the violation condition check unit 124. The power checker control unit 110 specifies violation condition data according to the test of the test program being executed, the type of DUT, and the function by the violation condition setting unit 111, and reads the violation condition data from the violation data storage unit 140. The read violation condition data is output to the violation condition check unit 124 and set as data used for the power checker function.

  The violation condition data includes, for example, information such as a maximum value and a minimum value of a range of voltage values that can be applied as a test signal to the DUT according to the type and function of the DUT. In addition, the violation condition data includes information on the range of voltage values that can be applied by designating various pins and variables of the DUT, the power supply module of the semiconductor test apparatus 100, and the like.

  Step S202: The test program execution unit 120 performs a process of reading and acquiring setting data from the test information for each step included in the test program stored in the test program storage unit by the hardware setting unit 121. Further, the test program execution unit 120 causes the hardware setting unit 121 to store the acquired setting data in the hardware setting storage unit 123.

  The hardware setting unit 121 checks the read setting data with the power checker function and sets it as data for detecting violation. The setting data includes, for example, information such as “DPS1 = 3V, DPS2 = 1.5V” for setting voltage values to be applied as test signals to various pins of the DUT.

  Step S203: The test program execution unit 120 checks the setting data stored in the hardware setting storage unit 123 by the hardware setting unit 121 while confirming the limit status of the function of the semiconductor test apparatus 100, and a hardware setting violation is detected. A process of detecting whether or not it exists is performed.

  The test program execution unit 120 controls the hardware setting unit 121, refers to the setting data stored in the hardware setting storage unit 123, and can output power from various pins that come into contact with the DUT at the test head portion and the test. The contents of the setting data are checked while confirming the limit state of the function of the semiconductor test apparatus 100 such as the voltage value of the signal, and it is detected whether there is a setting violation on hardware.

  If a hardware setting violation is detected as a result of checking by the hardware setting unit 121 (YES in step S203), violation result data including the contents of the hardware setting violation is generated in response to this, and the power checker control unit 110 Output to. Then, the process of step S207 is executed.

  Step S204: The test program execution unit 120 checks the setting data based on the violation condition data by the violation condition check unit 124, and performs a process of detecting a violation of the test program.

  The test program execution unit 120 controls the violation condition check unit 124 to check the setting data set in step S202 based on the violation condition data set in step S201, and the voltage value applied to the DUT becomes the DUT. It is detected whether or not there is a test program violation by comparing whether or not the range of voltage values that can be applied is violated. For example, it is checked whether the voltage value indicated by the information “DPS1 = 3V, DPS2 = 1.5V” included in the setting data is within the range of the applicable voltage value included in the violation condition data. To do.

  As a result of checking by the violation condition check unit 124, if a violation of the test program is detected (YES in step S204), violation result data including the content of the violation of the test program is generated in response to this, and the hardware setting unit 121 To the power checker control unit 110. Then, the process of step S207 is executed.

  Step S205: The test program execution unit 120 performs a process of setting the test head portion and the like according to the setting data by the hardware setting unit 121. The test program execution unit 120 refers to the setting data stored in the hardware setting storage unit 123 by the hardware setting unit 121, and the voltage applied as a test signal to various pins of the DUT in the test head portion or the like according to the setting data Performs hardware settings such as values and test operations.

  Step S206: The test program execution unit 120 performs processing for determining whether or not the setting data has been checked and set for all the steps of the test program. The test program execution unit 120 determines whether or not the hardware setting unit 121 and the violation condition check unit 124 generate and check the setting data for all the steps of the test program.

  If there is a step in which the setting data is not checked or set and is not executed as a result of the determination (NO in step S206), the test program execution unit 120 controls the hardware setting unit 121 to execute the test program. Setting data is generated for this step by extracting data, etc., and the processing after step S202 is executed again.

  In addition, when the test program execution unit 120 determines that the setting data is not checked or set and there is no step that has not been executed (YES in step S206), the test program execution unit 120 is executed for all the steps of the test program. Determine and end the test.

  Step S207: The power checker control unit 110 stops the execution of the test program of the test program execution unit 120 in response to obtaining the violation result data from the test program execution unit 120, and displays on the screen that the violation has been detected. Then, a process for displaying a message prompting the user to correct or change the test program is performed.

  As described above, in the semiconductor test apparatus 100 according to the present embodiment, the power checker function is realized during the execution of the test program by the test program execution unit 120 in the actual test for the DUT. The violation condition data is read from the storage unit 140 and output to the violation condition check unit 124 for setting. The violation condition check unit 124 reads the setting data generated for all the steps of the test program from the hardware setting storage unit 123, checks the setting data based on the violation condition data, and detects a violation of the test program. When a violation is detected, violation result data is generated, the execution of the test program is stopped, and processing for displaying on the screen that the violation has been detected is performed.

  For this reason, since the violation condition check unit 124 checks the setting data at the actual test when the test program is executed by the test program execution unit 120 to detect violations, a plurality of branches occur in the test program, and the number of tests Even if the process executed by the branch of the step changes every time, it is possible to detect the violation every time, and to prevent undetected violation of the test program.

  In addition, when a violation occurs, it is detected immediately and execution of the test program by the test program execution unit 120 is stopped, and troubles such as failure or destruction caused by applying an excessive voltage value to the DUT are effective. Can be prevented. Furthermore, since the fact that the violation has been detected is displayed on the screen or the like, the user can check and confirm the content displayed on the screen to correct or change the violation of the test program.

[Other Embodiments]
In the above-described embodiment, the power checker function realized in real time during the execution of the test program in the actual test for the DUT in the semiconductor test apparatus 100 and the actual test for the DUT in the semiconductor test apparatus 200 in the prior art. It may be possible to realize a power checker function in any mode by selecting a power checker function realized by executing a test program for checking.

  In the above-described embodiment, the range in which the setting data is generated and checked by the hardware setting unit 121 and the violation condition check unit 124 is set for all the steps of the test program, or for some steps. It may be possible to select what to do.

  In the above-described embodiment, in step S207, the power checker control unit 110 determines whether to stop the execution of the test program immediately without acquiring the violation result data from the test program execution unit 120. You may perform the process which displays the message to select. In this case, the power checker control unit 110 stops or continues the execution of the test program in response to the user selecting according to this message.

  Here, when continuing, it may be skipped without performing the process of setting the test head portion or the like according to the setting data in which the violation is detected according to the selection by the user. By skipping, it is possible to check and execute other steps of the test program while preventing the occurrence of a DUT trouble.

  In the above-described embodiment, a command line interface or a graphical user interface is provided. In step S207, the power checker control unit 110 displays on the screen that a violation has been detected, and a message that prompts the user to correct or change the test program. When displayed, in cooperation with the debug tool of the test program, jumps to the step or line where the violation was detected and displays it on the screen, or displays the voltage value of the power module or various pins and the graph of the transition data of the voltage value, etc. May be displayed.

It is explanatory drawing which shows the structure of the semiconductor test apparatus of this embodiment. It is a flowchart which shows operation | movement of the power supply checker function of the semiconductor test apparatus of this embodiment. It is explanatory drawing which shows the structure of the semiconductor test apparatus of a prior art. It is a flowchart which shows operation | movement of the power supply checker function of the semiconductor test apparatus of a prior art.

Explanation of symbols

100, 200 Semiconductor test apparatus 110, 210 Power checker control unit 120, 220 Test program execution unit 121, 221 Hardware setting unit 122, 222 Test program storage unit 123, 223 Hardware setting storage unit 230 Setting data storage unit 140, 240 Violation data storage unit 250 Result data storage unit

Claims (4)

A test program execution means for executing a test program for performing a test on the test object;
Violation information storage unit for storing violation condition information including violation conditions related to the voltage value output to the test target;
A violation check unit that detects a violation of the test program based on violation condition information stored in the violation information storage unit during execution of the test program by the test program execution unit;
A semiconductor test apparatus comprising: a test program stop unit that stops execution of a test program by the test program execution unit in response to a violation detected by the violation check unit. A test execution unit having a function of performing a test on the test object;
Test program execution means for operating the test execution unit to execute a test program for proceeding with the test;
A setting information generating unit that generates setting information related to the setting of the test execution unit according to the test program;
A setting check unit that checks the setting of the test execution unit using the setting information during execution of the test program by the test program execution unit;
Violation information storage unit for storing violation condition information including violation conditions related to the voltage value output to the test target;
A violation check unit that detects the violation of the test program by checking the setting information based on the violation condition information stored in the violation information storage unit during execution of the test program by the test program execution unit;
A semiconductor test apparatus comprising: a test program stop unit that stops execution of a test program by the test program execution unit in response to a violation detected by the violation check unit. The semiconductor test apparatus according to claim 2,
The violation condition information includes information related to a range of voltage values that can be applied as a test signal to the object to be tested. The semiconductor test apparatus according to claim 2 or 3,
A semiconductor test apparatus further comprising a screen display unit for displaying on the screen that a violation has been detected in response to the violation being detected by the violation check unit.

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