JP2008216037A - Pressure sensor evaluation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure sensor evaluation device, having a constitution suitable for generating rapid pressure changes. <P>SOLUTION: The pressure sensor evaluation device S1 is provided with a cylinder 200, having a sensor connecting part 201 for connecting a pressure sensor 100 to its one end side, a piston 210 inserted slidably into the cylinder 200 from the other end side of the cylinder 200, and oil 220 sealed in between the sensor connection 201 and the piston 210 in the cylinder 200. Moreover, the device has as an impulse force applying means 300 a rod-like member 302, which has a hammer 301 at its tip side and makes the hammer 301 perform pendulum motion, applies impulse force by striking the piston 210 by the pendulum motion of the hammer 301, and thereby makes the pressure to be applied to the pressure sensor 100 change via the oil 220, by sliding the piston 210 inside the cylinder 200. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a pressure sensor evaluation apparatus that evaluates a pressure sensor by changing a pressure applied to the pressure sensor.

Conventionally, as this type of pressure sensor evaluation apparatus, for example, an apparatus for dynamically performing a pressure test on an article as described in Patent Document 1 has been proposed.
JP 2005-233964 A

  However, the conventional pressure sensor evaluation apparatus is not configured to generate a sudden pressure change, and cannot generate a pressure change of 3 MPa / ms or more, for example.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a pressure sensor evaluation apparatus having a configuration suitable for generating a rapid pressure change.

  In order to achieve the above object, the present invention provides a cylinder (200) having a sensor connecting part (201) to which a pressure sensor (100) is connected on one end side, and a cylinder (200) from the other end side of the cylinder (200). 200) and a piston (210) slidably inserted in the cylinder (200) and sealed between the sensor connection (201) and the piston (210) in the cylinder (200) to transmit pressure to the pressure sensor (100). Pressure transmission fluid (220) and an impact force applying means (300 to 340) provided outside the cylinder (200) and applying an impact force in the axial direction of the cylinder (200) to the piston (210). And by applying an impact force by the impact applying means (300 to 340), the piston (210) is slid in the cylinder (200) and the pressure is transmitted via the pressure transmission fluid (220). Characterized in that changing the pressure applied to the sensor (100).

  According to this, since the pressure applied to the pressure sensor (100) can be changed by applying an impact force, it is possible to provide a pressure sensor evaluation apparatus having a configuration suitable for generating a sudden pressure change. it can.

  Specifically, according to the present invention, the change in pressure applied to the pressure sensor (100) can be a pressure change of 3 MPa / msec or more. Moreover, oil can be employ | adopted as a pressure transmission fluid (220).

  Further, the impact force applying means (300, 310, 320) can apply the impact force by physically hitting the piston (210).

  In this case, as the impact force applying means (300), the hammer (301) is provided with a rod-like member (302) which has a hammer (301) on the tip side and generates a pendulum motion. If the impact force is applied by hitting the piston (210), the impact force can be adjusted by changing the amplitude of the pendulum motion, the mass of the hammer (301), or the like.

  Further, in this case, the impact force applying means (310) is connected to one end side of the rod-like crank rod (312) and the crank rod (312), in addition to the crank disk (313) and the crank rod (312) that perform rotational motion. It comprises a crank mechanism having a slider (311) connected to the end side and reciprocating in accordance with the rotational movement of the crank disk (313). The slider (311) is reciprocated to move the piston (210) by the slider (311). The impact force may be applied by hitting. According to this, since the impact force can be repeatedly applied by the rotational movement of the crank mechanism, it is suitable for repeated measurement.

  Further, the impact force applying means (320) for applying an impact force by physically hitting the piston (210) is arranged so as to contact the piston (210) at the convex portion and away from the piston (210) at the concave portion. It is also possible to provide an impact force by rotating the gear (321) and hitting the piston (210) with the convex portion. Also in this case, since the impact force can be repeatedly applied by the rotational movement of the gear (321), it is suitable for repeated measurement.

  When the piston (210) is made of a magnetic material, the impact force applying means (330, 340) is a magnet member that slides the piston (210) by applying a magnetic force as an impact force to the piston (210). (331, 341) may be provided.

  In this case, if the magnet member is composed of an electromagnet (331) that changes the magnetic field strength with respect to the piston (210) as a magnetic body, the polarity switching frequency and magnetic field strength of the electromagnet (331) can be electrically controlled. Thus, there is an advantage that the pressure change can be adjusted.

  The magnet member may be a rotating magnetic body (341) that changes the magnetic field strength with respect to the piston (210) by the rotation of the magnetic body (341). According to this, there is an advantage that the pressure change can be adjusted by changing the rotation speed and magnetic field strength of the rotating magnetic body (341).

  In addition, the code | symbol in the bracket | parenthesis of each means described in the claim and this column is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other are given the same reference numerals in the drawings in order to simplify the description.

(First embodiment)
FIG. 1 is a schematic diagram schematically showing a pressure sensor evaluation apparatus S1 according to the first embodiment of the present invention. The pressure sensor evaluation device S1 is for evaluating the detection performance and the like of the pressure sensor 100 by changing the pressure applied to the pressure sensor 100.

  As shown in FIG. 1, the pressure sensor evaluation apparatus S <b> 1 roughly includes a cylindrical cylinder 200 having both ends opened, a piston 210 slidably inserted into the cylinder 200, and sealed in the cylinder 200. Oil 220 as the pressure transmission fluid and an impact force applying means 300 for applying an impact force to the piston 210 are provided.

  Here, the cylinder 200, the piston 210, and the impact force applying means 300 are fixed on the base 230 by a fixing means (not shown) such as screwing, bonding, and welding, and are supported by the base 230. The material of the base 230 is not particularly limited as long as it can fix and support these members.

  The cylinder 200 only needs to be able to securely connect and support the pressure sensor 100 and generate a pressure change of the oil 220 by sliding the piston 210 as will be described later. The material is not particularly limited, such as metal, resin and ceramic.

  And the one end part side of the cylinder 200 is comprised as the sensor connection part 201 to which the pressure sensor 100 is connected. In this embodiment, as will be described later (see FIG. 2 described later), the sensor connecting portion 201 is a screw portion, and the pressure sensor 100 is inserted from an opening on one end side of the cylinder 200 and is connected to the cylinder by screw connection. 200 is fixed.

  The piston 210 is inserted into the cylinder 200 from the other end side of the cylinder 200, and can slide in the cylinder 200 in the axial direction of the cylinder 200, that is, in the left-right direction in FIG. The piston 210 is not limited to any particular material, such as metal, resin, and ceramic, as long as it can perform the function of the piston 210 itself.

  In addition, an incompressible fluid can be employed as the pressure transmission fluid, but oil 220 is employed here. As this oil 220, for example, silicone oil or fluorine oil can be applied. The oil 220 is sealed between the sensor connecting portion 201 and the piston 210 in the cylinder 200, and transmits the pressure from the piston 210 to the pressure sensor 100.

  The impact force applying means 300 is fixedly supported on the base 230 outside the cylinder 200. The impact force applying means 300 is applied to the piston 210 along the axial direction of the cylinder 200 (left-right direction in FIG. 1), that is, the direction from the other end side of the cylinder 200 toward the one end side where the sensor connecting portion 201 exists. It gives an impact force to it.

  By applying an impact force by the impact applying means 300, the piston 210 slides in the cylinder 200. Then, this impact force is applied to the pressure sensor 100 via the oil 220. Thereby, the pressure applied to the pressure sensor 100 changes.

  The impact force applying means 300 of this embodiment applies impact force by physically striking the piston 210. Here, physically hitting the piston 210 is to make the piston 210 collide with a rigid body. A rigid body is an object whose deformation is considered negligible when an external force is applied.

  In this embodiment, a hammer 301 is used as a rigid body. In other words, the impact force applying means 300 of the present embodiment includes a rod-shaped member 302 that has a hammer 301 on the distal end side and causes the hammer 301 to generate a pendulum motion.

  The base end side of the rod-shaped member 302 opposite to the hammer 301 is a fixed end fixed to the support column 303, and the rod-shaped member 302 has the fixed end as an axis and the hammer 301 side as a free end. The pendulum can be exercised.

  The material of the hammer 301, the rod-shaped member 302, and the support column 303 is not particularly limited as long as the function as the impact force applying unit 300 is exhibited, and is not particularly limited.

  The impact force applying means 300 raises the hammer 301 to a predetermined height H (see FIG. 1) by hand, etc., and drops the hammer 301 from this state to cause a pendulum movement, thereby moving the hammer 301 to the piston 210. It is a thing to collide with. That is, the impact force applying means 300 according to the present embodiment applies the impact force by hitting the piston 210 by the pendulum movement of the hammer 301.

  Due to this collision, the piston 210 is displaced in the axial direction of the cylinder 200, and the impact is received by the oil 220, which is transmitted to the pressure sensor 100 as a change in pressure. In other words, the pressure change caused by the displacement of the piston 210 causes the oil 220 to pulsate.

  As described above, according to the present embodiment, a kind of water hammer phenomenon occurs due to the application of the impact force, whereby the pressure applied to the pressure sensor 100 can be easily changed rapidly.

  In the present embodiment, a gap sensor 240 is provided as shown in FIG. The gap sensor 240 is fixedly supported on the base 230 and measures the movement amount of the piston 210 due to the impact force of the impact force applying means 300. As such a gap sensor 240, for example, a sensor that performs displacement measurement using general light can be employed.

  Then, by measuring the movement amount of the piston 210 when the impact force is applied by the gap sensor 240, the correlation between the movement amount and the pressure change can be grasped. By using this correlation, the impact force applying means 300 can easily change the impact force by adjusting the height H and mass of the hammer 301 and adjust the pressure change with respect to the pressure sensor 100. It becomes.

  Here, in the present embodiment, an example of the pressure sensor 100 to be evaluated is shown in FIG. FIG. 2 is a cross-sectional view showing an overall outline of the pressure sensor 100 according to the present embodiment. The pressure sensor 100 can be applied to, for example, a sensor that is mounted on an automobile and detects refrigerant pressure in a refrigerant pipe of an air conditioner of the automobile.

  In the pressure sensor 100, the connector case 10 is made by molding a resin such as PPS (polyphenylene sulfide) or PBT (polybutylene terephthalate), and has a substantially cylindrical shape in this example. A recess 11 is formed at one end of the connector case 10 as the resin case (the lower end in FIG. 2).

  A pressure detection element 20 that outputs an electrical signal corresponding to the applied pressure is disposed on the bottom surface of the recess 11. The pressure detecting element 20 is not limited, but has, for example, a diaphragm as a pressure receiving surface on the surface thereof, converts the pressure received by the diaphragm into an electric signal, and outputs the electric signal as a sensor signal. It is configured as a semiconductor diaphragm type.

  The pressure detection element 20 is integrated with a base 21 made of glass or the like by anodic bonding or the like, and the pressure detection element 20 is mounted on the connector case 10 by bonding the base 21 to the bottom surface of the recess 11. ing.

  In addition, a plurality of metal rod-like terminal pins 12 for electrically connecting the pressure detection element 20 and an external circuit or the like penetrate through the connector case 10. The terminal pins 12 are formed integrally with the connector case 10 by insert molding, and are thereby held in the connector case 10.

  One end of each terminal pin 12 projecting into the recess 11 and the pressure detection element 20 are connected by a bonding wire 13 and are electrically connected. In addition, a sealing agent 14 made of silicon resin or the like is provided in the recess 11.

  On the other hand, in FIG. 2, the other end (the upper end in FIG. 2) side of the connector case 10 is an opening 15, and this opening 15 is connected to the other end of the terminal pin 12 on the outside. It is a connector part for electrically connecting to a wiring member.

  That is, the other end side of each terminal pin 12 exposed in the opening 15 can be electrically connected to the outside by this connector portion. Thus, signal transmission between the pressure detection element 20 and the outside is performed via the bonding wire 13 and the terminal pin 12.

  As shown in FIG. 2, a housing 30 is assembled to one end of the connector case 10. The housing 30 is made of a metal material such as stainless steel (SUS), for example, and a pressure introduction hole 31 into which a measurement pressure from the measurement object is introduced, and a screw for fixing the pressure sensor S1 to the measurement object. Part 32.

  Further, a thin metal diaphragm 34 and a metal pressing member 35 are welded all around the housing 30 and hermetically joined to one end of the pressure introducing hole 31. As shown in FIG. 1, the housing 30 is caulked at one end of the connector case 10 to form a caulked portion 36, whereby the housing 30 and the connector case 10 are fixed. And integrated.

  In the connector case 10 and the housing 30 thus combined, the pressure detection chamber 40 is configured between the concave portion 11 of the connector case 10 and the diaphragm 34 of the housing 30.

  The pressure detection chamber 40 is filled and sealed with oil 41 made of fluorine oil or the like which is a pressure transmission medium and is a filling liquid. By sealing the oil 41, the recess 11 is filled with the oil 41 so as to cover the electrical connection parts such as the pressure detection element 20 and the bonding wire 13, and the oil 41 is covered and sealed by the diaphragm 34. It has become.

  By constructing such a pressure detection chamber 40, the pressure introduced from the pressure introduction hole 31 is transmitted through the diaphragm 34 and the oil 41 to the pressure detection element 20, the bonding wire 13, and the terminal pin in the pressure detection chamber 40. 12 is applied.

  An annular groove 42 is formed around the outer periphery of the pressure detection chamber 40, and an O-ring 43 for hermetically sealing the pressure detection chamber 40 is disposed in the groove 42. Thus, the pressure detection chamber 40 is sealed and closed by the diaphragm 34 and the O-ring 43.

  And this pressure sensor 100 is attached to pressure sensor evaluation apparatus S1, as the said FIG. 1 shows. That is, it is screw-coupled to the sensor connection part 201 in the cylinder 200 via the screw part 32 of the housing 30. At this time, an O-ring 101 is provided between the pressure sensor 100 and the sensor connection portion 201 for sealing.

  As a result, the oil 220 is sealed between the piston 210 and the pressure sensor 100 in the cylinder 200. Therefore, the pressure of the oil 220 in the cylinder 200 is introduced into the pressure sensor 100 from the pressure introduction hole 31 of the housing 30.

  Then, the introduced pressure is applied from the diaphragm 34 to the surface of the pressure detection element 20, that is, the pressure receiving surface, through the oil 41 in the pressure detection chamber 40. Then, an electrical signal corresponding to the applied pressure is output from the pressure detection element 20 as a sensor signal.

  This sensor signal is output from the pressure detection element 20 to the outside via the wire 13 and the terminal pin 12. In this way, pressure detection in the pressure sensor 100 is performed. Then, the pressure applied to the pressure sensor 100 via the oil 220 is changed by the impact force applying means 300 as described above, and this change is detected by the action of the pressure detection described above. Therefore, the characteristics of the pressure sensor 100 can be evaluated.

  By the way, according to the present embodiment, the pressure applied to the pressure sensor 100 can be changed by applying an impact force. Therefore, the pressure sensor evaluation apparatus S1 having a configuration suitable for generating a sudden pressure change is provided. Can be provided.

  In addition, according to the present embodiment, the impact force applying means 300 includes the hammer 301 and the rod-shaped member 302 as described above, and applies the impact force by hitting the piston 210 by the pendulum movement of the hammer 301. Is.

  Therefore, as described above, the impact force can be adjusted by changing the height H (see FIG. 1) of the hammer 301 to change the amplitude of the pendulum motion or changing the mass of the hammer 301. As a result, the change in pressure applied to the pressure sensor 100 can be easily adjusted.

  Specifically, according to the study by the present inventor, in this embodiment, the change in pressure applied to the pressure sensor 100 can be a change in pressure at a rate of 3 MPa / msec or more. This pressure change rate is obtained as shown in FIG. FIG. 3 is a diagram showing a change with time of the pressure applied to the pressure sensor 100 in the evaluation apparatus S1 of the present embodiment.

  As shown in FIG. 3, the applied pressure P changes with time t, and the time taken for the applied pressure to reach the maximum value P1 from 0 is assumed to be t1. The pressure change rate in the evaluation of the pressure sensor 100 is represented by a value (P1 / t1) obtained by dividing the maximum value P1 by time t1.

  In this embodiment, the speed P1 / t1 can generate a pressure change at a speed of 3 MPa / msec or more, and such a large pressure change can never be realized by a conventional pressure sensor evaluation apparatus. It is a thing.

(Second Embodiment)
FIG. 4 is a schematic view schematically showing a pressure sensor evaluation device S2 according to the second embodiment of the present invention. This pressure sensor evaluation device S2 is the same as the pressure sensor evaluation device according to the first embodiment, except that the impact force imparting means 310 is modified. And

  As shown in FIG. 4, the impact force applying means 310 in the pressure sensor evaluation apparatus S2 of the present embodiment is a crank mechanism provided outside the cylinder 200, and is a rigid body fixedly supported on the base (not shown). The slider 311 is made to collide with the piston 210. That is, the impact force applying means 310 of the present embodiment also applies the impact force by physically hitting the piston 210.

  The impact force applying means 310 of the present embodiment includes a rod-shaped crank rod 312, a crank disk 313 connected to one end side of the crank rod 312, and the slider 311 connected to the other end side of the crank rod 312. It is comprised by the provided crank mechanism. In addition, the material of these parts 311 to 313 is not particularly limited as long as the function as the impact force applying unit 310 of the present embodiment is exhibited, such as metal, resin, and ceramic.

  The crank disk 313 is disk-shaped and can be rotated by an electric motor 314. Further, the rotational speed of the crank disk 313 can be adjusted by a motor 314.

  When the crank disk 313 rotates, the crank rod 312 attached thereto reciprocates linearly in the longitudinal direction, that is, in the axial direction of the cylinder 200. Then, the piston 210 is repeatedly hit by the slider 311 attached to the crank rod 312.

  Due to the physical collision of the slider 311 with the piston 210, the piston 210 is displaced toward the pressure sensor 100 along the axial direction of the cylinder 200. Then, also in the present embodiment, the impact is transmitted to the pressure sensor 100 as an abrupt pressure change via the oil 220 as in the first embodiment. And since the pressure sensor 100 outputs the signal according to this pressure change, the pressure sensor 100 is evaluated.

  In the case of the present embodiment, the pressure frequency can be adjusted by changing the rotational speed of the crank disk 313, and the pressure amplitude can be adjusted by changing the size of the crank disk 313. Then, the pressure change speed can be controlled by these.

  As described above, according to the present embodiment, as in the first embodiment, the pressure applied to the pressure sensor 100 can be changed by applying an impact force, so that a rapid pressure change of 3 MPa / msec or more can be achieved. It is possible to provide the pressure sensor evaluation device S2 having a configuration suitable for generating the pressure.

  Further, the impact force applying means 310 of the present embodiment includes a crank mechanism including the crank rod 312, the crank disk 313 and the slider 311 described above, and applies impact force to the piston 210 by the reciprocating motion of the slider 311. However, since the impact force can be repeatedly applied by the rotational movement of the crank mechanism in this way, it is suitable for repeated measurement.

(Third embodiment)
FIG. 5 is a schematic view schematically showing a pressure sensor evaluation device S3 according to the third embodiment of the present invention. This pressure sensor evaluation device S3 is the same as the pressure sensor evaluation device according to the first embodiment, except that the impact force imparting means 320 is modified. And

  As shown in FIG. 5, the impact force applying means 320 in the pressure sensor evaluation apparatus S3 of the present embodiment includes a gear 321 provided outside the cylinder 200, and the gear 321 is not shown in the above-described base. It is a rigid body supported so as to be rotatable.

  The gear 321 collides with the piston 210 to apply an impact force. The impact force applying means 320 of the present embodiment also applies the impact force by physically hitting the piston 210. Configured to do.

  That is, the impact force imparting means 320 of the present embodiment is configured by a gear 321 whose peripheral surface has an uneven shape and an electric motor 322 that rotates the gear 321. The rotation speed of the gear 321 can be adjusted by the motor 322. Further, the material of the gear 321 is not particularly limited as long as the function as the impact force applying unit 310 of the present embodiment is exhibited, such as metal, resin, and ceramic.

  The gear 321 is arranged so as to come into contact with the piston 210 at the convex portion and away from the piston 210 at the concave portion as the gear 321 rotates, and when the gear 321 is rotated by the motor 322, the convex portion of the gear 321 causes the piston to move away from the piston 210. 210 is repeatedly hit.

  Then, the piston 210 is displaced toward the pressure sensor 100 along the axial direction of the cylinder 200 due to a physical collision of the gear 321 with the piston 210. The impact is transmitted to the pressure sensor 100 as a sudden pressure change via the oil 220. And since the pressure sensor 100 outputs the signal according to this pressure change, the pressure sensor 100 is evaluated.

  In the case of this embodiment, the pressure frequency can be adjusted by changing the number of peaks of the gear 321, that is, the number of protrusions and the number of rotations, and the pressure amplitude can be adjusted by changing the height of the protrusions of the gear 321. Can be adjusted. Then, the pressure change speed can be controlled by these.

  As described above, according to the present embodiment, as in the first embodiment, the pressure applied to the pressure sensor 100 can be changed by applying an impact force, so that a rapid pressure change of 3 MPa / msec or more can be achieved. It is possible to provide a pressure sensor evaluation device S3 having a configuration suitable for generating

  Further, the impact force imparting means 320 of the present embodiment includes the gear 321 described above, and imparts impact force to the piston 210 by the rotational motion of the gear 321, but by the rotational motion of the gear 321. Since repeated impact force can be applied, it is suitable for repeated measurement.

(Fourth embodiment)
FIG. 6 is a schematic diagram schematically showing a pressure sensor evaluation device S4 according to the fourth embodiment of the present invention. This pressure sensor evaluation apparatus S4 is the same as the pressure sensor evaluation apparatus according to the first embodiment, except that the impact force imparting means 330 is modified. And

  In the first to third embodiments, the impact force applying means applies the impact force by physically hitting the piston 210 with a pendulum mechanism, a crank mechanism, or a gear. On the other hand, the impact force imparting means 330 in the pressure sensor evaluation device S4 of the fourth embodiment includes a magnet member 331 that applies a magnetic force as an impact force to the piston 210 to slide the piston 210.

  As shown in FIG. 6, in this embodiment, the piston 210 is made of a magnetic material. For example, the piston 210 is made of a permanent magnetic material such as ferrite. And the magnet member 331 as an impact-force provision means of this embodiment is the electromagnet 331.

  The electromagnet 331 has a general electromagnet configuration in which a soft iron core is inserted into a coil. The AC power source 332 controls the energization of the electromagnet 331 and turns on / off the magnetic force. The magnetic field strength from the electromagnet 331 to the piston 210 is changed by controlling the magnetic force of the electromagnet 331 by the AC power source 332.

  The electromagnet 331 applies a magnetic force as a reaction force between the electromagnet 331 and the piston 210, thereby applying a magnetic force as an impact force to the piston 210. The piston 210 is displaced toward the pressure sensor 100 along the axial direction of the cylinder 200 by applying the magnetic force as the reaction force to the piston 210.

  The impact due to the displacement of the piston 210 is transmitted to the pressure sensor 100 as a sudden pressure change via the oil 220. And since the pressure sensor 100 outputs the signal according to this pressure change, the evaluation of the pressure sensor 100 can be performed appropriately also in this embodiment.

  In the case of the present embodiment, the pressure frequency can be adjusted by changing the polarity switching frequency of the electromagnet 331, and the pressure amplitude can be adjusted by changing the magnetic field strength of the electromagnet 331. Then, the pressure change speed can be controlled by these.

  As described above, according to the present embodiment, as in the first embodiment, the pressure applied to the pressure sensor 100 can be changed by applying an impact force, and therefore, a rapid pressure change of 3 MPa / msec or more can be applied. A pressure sensor evaluation device S4 having a configuration suitable for generation can be provided.

  In addition, the impact force applying means 330 of the present embodiment includes the above-described electromagnet 331, and by electrically controlling the polarity switching frequency and magnetic field strength of the electromagnet 331 by the AC power source 332, the pressure change can be reduced. There is an advantage that adjustment can be performed.

(Fifth embodiment)
FIG. 7 is a schematic view schematically showing a pressure sensor evaluation device S5 according to the fifth embodiment of the present invention. This pressure sensor evaluation device S5 is the same as the pressure sensor evaluation device of the first embodiment except that the impact force imparting means 340 is modified, and the rest is the same. Therefore, this difference will be mainly described below. And

  Also in the pressure sensor evaluation device S5 of the present embodiment, the piston 210 is made of a magnetic material, and the impact force applying means 340 applies a magnetic force as an impact force to the piston 210, as in the fourth embodiment. A magnet member 341 for sliding the piston 210 is provided.

  As shown in FIG. 7, the magnet member of this embodiment is a rod-shaped magnetic body 341 made of a permanent magnetic material such as ferrite. Here, the magnetic body 341 has an N-pole at one end and an S-pole at the other end, and an intermediate portion thereof is fixed to the base (not shown), and both ends can be rotated around the fixed portion. It has become.

  The rotation of the magnetic body 341 is performed by an electric motor 342. That is, the impact force applying means 340 of this embodiment is constituted by the magnetic body 341 and the motor 342. The rotation speed of the magnetic body 341 can be adjusted by the motor 342.

  In this case, with the rotation of the magnetic body 341, the magnetic field strength with respect to the piston 210, that is, the magnitude of the magnetic force applied to the piston 210 by the magnetic body 341 changes. That is, by the rotation of the magnetic body 341, a magnetic force that is a reaction force and a magnetic force that is an attractive force are repeatedly applied between the magnetic body 341 and the piston 210.

  And when the magnetic force used as reaction force is applied, the magnetic force as an impact force is provided to the piston 210. At this time, the piston 210 is displaced toward the pressure sensor 100 along the axial direction of the cylinder 200.

  The impact is transmitted to the pressure sensor 100 through the oil 220 as a sudden pressure change. And since the pressure sensor 100 outputs the signal according to this pressure change, evaluation of the pressure sensor 100 is performed also in this embodiment.

  In the present embodiment, the pressure frequency can be adjusted by changing the number of rotations of the magnetic body 341, and the pressure amplitude can be adjusted by changing the magnetic field strength by changing the material of the magnetic body 341. Then, the pressure change speed can be controlled by these.

  As described above, also according to the present embodiment, the pressure applied to the pressure sensor 100 can be changed by applying the impact force by the impact force applying means 340, so that a rapid pressure change of 3 MPa / msec or more is generated. The pressure sensor evaluation device S5 having a configuration suitable for the above can be provided.

  Further, the impact force applying means 340 of the present embodiment includes a magnetic body 341 that changes the magnetic field strength by the rotation described above, and the rotational speed and magnetic field strength of the rotating magnetic body 341 are changed by the electric motor 342. By changing, there is an advantage that the pressure change can be adjusted electrically.

  Further, the magnetic body 341 as the impact force applying means 340 of the present embodiment may be any one that changes the magnetic field strength with respect to the piston 210 as the magnetic body 341 rotates, as shown in FIG. It is not limited to the rod-like thing.

(Other embodiments)
In the second to fifth embodiments, the gap sensor 240 is not provided in the pressure sensor evaluation apparatus in each drawing. However, in these embodiments, the piston 210 is the same as in the first embodiment. A gap sensor may be provided as a movement amount measuring means for measuring the movement amount.

  In this case, the impact force can be controlled by adjusting the motors 314, 322, and 342 or the AC power source 332 constituting the impact force applying means based on the information from the gap sensor.

  Further, in each of the above embodiments, one pressure sensor 100 to be evaluated is attached to the cylinder 200. However, by providing two or more sensor connection portions in parallel in the cylinder 200, a plurality of pressure sensors are provided. You may make it attach individually. Thereby, a plurality of pressure sensors may be simultaneously evaluated.

  In each of the above embodiments, the pressure sensor 100 to be evaluated is not limited to the metal diaphragm type as shown in FIG. The pressure sensor is not particularly limited as long as it is connected to the sensor connecting portion 201 of the cylinder 200 in the pressure sensor evaluation device of each of the above embodiments and can receive pressure from the oil 220 in the cylinder 200. .

  Note that the connection between the pressure sensor and the sensor connection portion 201 of the cylinder 200 is not limited to the above-described screw coupling, and can be attached and detached by, for example, press-fitting or claw fitting. There may be. Furthermore, the pressure sensor may be connected by interposing a separate connecting member between the pressure sensor and the sensor connecting portion.

  Further, in each of the above embodiments, the pressure transmission fluid is limited to the oil 220 made of fluorine oil or silicone oil as long as it can appropriately transmit the impact force from the piston 210 as described above to the pressure sensor 100. Is not to be done.

  For example, in addition to these oils, incompressible fluids such as water may be adopted, which can cause the above-mentioned kind of water hammer phenomenon and cause a sudden pressure change to the pressure sensor. Become.

It is a figure which shows typically the pressure sensor evaluation apparatus which concerns on 1st Embodiment of this invention. It is a whole schematic sectional drawing of the pressure sensor which concerns on the said 1st Embodiment. It is a figure which shows a pressure change speed. It is a figure which shows typically the pressure sensor evaluation apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows typically the pressure sensor evaluation apparatus which concerns on 3rd Embodiment of this invention. It is a figure which shows typically the pressure sensor evaluation apparatus which concerns on 4th Embodiment of this invention. It is a figure which shows typically the pressure sensor evaluation apparatus which concerns on 5th Embodiment of this invention.

Explanation of symbols

100 ... Pressure sensor, 200 ... Cylinder, 201 ... Sensor connection part,
210 ... piston, 220 ... oil as pressure transmission fluid,
300, 310, 320, 330, 340 ... impact force applying means,
301 ... Hammer, 302 ... Bar member, 311 ... Slider,
312 ... Crank rod, 313 ... Crank disc, 321 ... Gear,
331: Electromagnet as a magnet member, 341: Magnetic body as a magnet member.

Claims (10)

A pressure sensor evaluation apparatus for evaluating the pressure sensor (100) by changing a pressure applied to the pressure sensor (100),
A cylinder (200) having a sensor connection (201) to which the pressure sensor (100) is connected on one end side;
A piston (210) slidably inserted into the cylinder (200) from the other end side of the cylinder (200);
A pressure transmission fluid (220) that is enclosed between the sensor connection (201) and the piston (210) in the cylinder (200) and transmits pressure to the pressure sensor (100);
Impact force applying means (300, 310, 320, 330, 340) provided outside the cylinder (200) and applying an impact force in the axial direction of the cylinder (200) to the piston (210). Prepared,
By applying the impact force by the impact applying means (300 to 340), the pressure sensor is slid through the pressure transmission fluid (220) by sliding the piston (210) in the cylinder (200). The pressure sensor evaluation apparatus characterized by changing the pressure applied to (100). The pressure sensor evaluation apparatus according to claim 1, wherein the change in pressure applied to the pressure sensor is a pressure change of 3 MPa / msec or more. The pressure sensor evaluation apparatus according to claim 1 or 2, wherein the pressure transmission fluid (220) is oil. 4. The impact force applying means (300, 310, 320) applies the impact force by physically hitting the piston (210). The pressure sensor evaluation apparatus described in 1. The impact force applying means (300) includes a rod-shaped member (302) having a hammer (301) on the tip side and generating a pendulum motion on the hammer (301).
The pressure sensor evaluation apparatus according to claim 4, wherein the impact force is applied by hitting the piston (210) by a pendulum movement of the hammer (301). The impact force applying means (310) includes a rod-like crank rod (312), a crank disk (313) connected to one end side of the crank rod (312), and the other end side of the crank rod (312). And a slider (311) that reciprocates according to the rotational movement of the crank disk (313).
The pressure sensor evaluation according to claim 4, wherein the impact force is applied by reciprocating the slider (311) and hitting the piston (210) by the slider (311). apparatus. The impact force applying means (320) includes a gear (321) arranged so as to contact the piston (210) at a convex portion and away from the piston (210) at a concave portion,
The pressure sensor evaluation apparatus according to claim 4, wherein the impact force is applied by rotating the gear (321) and hitting the piston (210) by the convex portion. The piston (210) is made of a magnetic material,
The impact force applying means (330, 340) includes magnet members (331, 341) for applying a magnetic force as the impact force to the piston (210) to slide the piston (210). The pressure sensor evaluation apparatus according to any one of claims 1 to 3. The pressure sensor evaluation apparatus according to claim 8, wherein the magnet member includes an electromagnet (331) that changes a magnetic field strength with respect to the piston (210) as the magnetic body. The pressure according to claim 8, wherein the magnet member is a rotating magnetic body (341), and changes the magnetic field strength with respect to the piston (210) by the rotation of the magnetic body (341). Sensor evaluation device.

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