JP2008205517A - Substrate treating equipment and manufacturing method of semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate treating equipment which can form excellent film by suppressing an oxygen richness increase of substrate interface when it is processed in film formation treatment such as Epi-SiGe or the like by supplying Ge contentaining gas. <P>SOLUTION: When the film formation treatment is applied to the substrate, Si coating treatment is processed in a step S13 before processing the Epi-SiGe film formation treatment in a step S18. This makes oxide such as GeO or the like adhered to substrate support confined with coating. The oxygen desorbed from GeO can be prevented from being incorporated by the interface between the Epi-SiGe film and Si substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate processing apparatus and a semiconductor device manufacturing method for processing a substrate such as a semiconductor device.

  In a process of manufacturing a semiconductor device such as an IC or LSI, a thin film is formed on a substrate by a low pressure CVD method (chemical vapor deposition method). When processing this type of substrate, impurities are generated from the substrate and the processing chamber, and these impurities have various adverse effects.

  As one of the prior arts, when forming a nitride film on a substrate, a quartz film is coated on the inner wall surface of a quartz reaction tube, and the nitride film that is intended to adhere to the quartz of the inner wall of the reaction tube and the inner wall surface of the reaction tube; It is known to provide a polysilicon film having a strong adhesive strength to both of them to prevent the nitride film from falling off (see, for example, JP-A-63-29522).

  Further, as a technique different from the conventional example, it is known that an epitaxial silicon film (hereinafter referred to as an Epi-Si film) or an epitaxial silicon germanium film (hereinafter referred to as an Epi-SiGe film) is formed by a low pressure CVD method. It has been. The Epi-SiGe film is used for a base layer of a heterojunction bipolar transistor (hereinafter referred to as HBT), and realizes high transmission frequency characteristics in a high-speed LSI for communication. Further, it is also used for elevated source / drain film formation for forming ultra-shallow junctions of field effect transistors (MOSFETs) and strained silicon channel film formation for improving carrier mobility, which has been accelerated in recent years.

One of the absolute conditions for forming an Epi-Si film and an Epi-SiGe film with good crystallinity by the low pressure CVD method is that the oxygen concentration of the Epi-Si film, Epi-SiGe film and Si substrate is 10 ¹⁷ (atoms / cm ³ ) When oxygen having an order of 10 ¹⁸ (atoms / cm ³ ) or more is present at the interface between the Epi-Si film or Epi-SiGe film and the Si substrate, a film with good crystallinity cannot be formed.

  The present inventors have found that when the Epi-SiGe film deposition process is repeated at a low temperature (for example, 500 ° C.), oxygen significantly increases at the interface between the Epi-SiGe film and the Si substrate. did.

The present inventors have investigated the cause of this, and found that it is as follows.
In general, Ge is more likely to be oxidized than Si at room temperature and in the atmosphere, and GeO is more easily vaporized than SiO at high temperatures. On the other hand, once the Epi-SiG film forming process is performed, a by-product containing Ge atoms adheres to the inner wall of the processing chamber and the substrate support, and when the substrate support is unloaded from the load lock chamber, the processing chamber is a gate valve. The substrate support does not come into direct contact with the atmosphere containing oxygen, but the substrate support comes into contact with the atmosphere, and Ge atoms attached to the substrate support are oxidized. The containing compound (as an example, Ge-containing oxide: GeO) remains on the substrate support. Further, when the substrate support is exposed to the air atmosphere, a substance containing oxygen such as moisture adheres to the substrate support. Then, when the substrate support is loaded into the processing chamber, GeO and a part of moisture adhering to the substrate support are desorbed, and Ge atoms adhering to the processing chamber wall are oxidized. A substance containing oxygen such as moisture adhering to the substrate support is easily discharged out of the processing chamber when exhausting the processing chamber. However, since GeO is a compound, it is difficult to exhaust out of the processing chamber by exhaust. is there. Then, oxygen is desorbed from GeO adhering to the inner wall of the processing chamber or the substrate support due to the heat during the deposition process of the next Epi-Si film or Epi-SiGe film. This oxygen is directly taken into the substrate, or reacts with Ge atoms attached to the inner wall of the processing chamber to become GeO, then desorbs again and is taken into the substrate, increasing the oxygen concentration at the substrate interface. Let

  When forming an Epi-Si film or Epi-SiGe film at a high temperature, hydrogen baking is performed at a high temperature of, for example, about 1000 ° C., so that GeO adhering to the processing chamber wall or substrate support is reduced and vaporized by hydrogen. May be discharged outside the processing chamber. However, when the Epi-Si film or Epi-SiGe film is formed at a low temperature (for example, 500 ° C.), the hydrogen baking temperature is also set at a low temperature of 700 ° C. to 800 ° C. As a result, the reduction effect on GeO adhering to the substrate decreases, and a large amount of oxygen is taken into the substrate.

An object of the present invention is to provide a substrate processing apparatus capable of suppressing a rise in oxygen concentration at the substrate interface and forming a good film when a Ge-containing gas is supplied to perform a film forming process such as Epi-SiGe. There is.
Another object of the present invention is to provide a substrate processing apparatus capable of preventing oxygen from being taken into a substrate by a substrate support exposed to an atmosphere containing oxygen outside the processing chamber.
Furthermore, another object of the present invention is to provide a semiconductor device manufacturing method capable of forming Epi-SiGe or the like having good crystallinity on a substrate.

  The first feature of the present invention is that a processing chamber for storing a substrate, a gas supply means for supplying a desired gas to the processing chamber, a heating means for heating the substrate, and a substrate for supporting the substrate. A processing gas is supplied into the processing chamber with the support, a moving means for moving the substrate support outside the processing chamber, and a substrate support exposed to an atmosphere containing oxygen outside the processing chamber being inserted into the processing chamber. And a control means for controlling the gas supply means, the heating means and the moving means so as to coat the substrate support.

  The second feature of the present invention is that a processing chamber for storing a substrate, a gas supply means for supplying a desired gas to the processing chamber, a heating means for heating the substrate, and a substrate for supporting the substrate. A support, a moving means for moving the substrate support to the outside of the processing chamber, and the substrate support exposed to an atmosphere containing oxygen after being inserted into the processing chamber from the outside of the processing chamber before performing the next substrate processing The substrate processing apparatus includes: a control unit that controls the gas supply unit, the heating unit, and the moving unit to supply a processing gas into the processing chamber to coat the substrate support.

  The fourth feature of the present invention is that a processing chamber for storing a substrate, a gas supply means for supplying a desired gas to the processing chamber, a heating means for heating the substrate, and germanium ( A first film-forming process for processing the substrate by supplying a Ge) -containing gas; and a desired processing gas is supplied to the processing chamber subsequent to the first film-forming process to a substrate different from the substrate. A silicon (Si) -containing gas is supplied to the processing chamber between the second film forming process to be processed, the first film forming process, and the second film forming process, and a predetermined amount in the process chamber is set. The substrate processing apparatus includes the gas supply means and the control means for controlling the heating means so as to perform a coating process for coating.

  Preferably, the apparatus includes a substrate support that supports the substrate, and a moving unit that moves the substrate support into and out of the processing chamber. The control unit is a substrate that has been processed after the first film forming process. The substrate support that supports the substrate is discharged from the processing chamber by the moving means, and the substrate support that does not support the substrate is inserted into the processing chamber by the moving means, and then contains Si in the processing chamber. The gas supply means, the heating means and the moving means are controlled so as to supply a gas and coat the substrate support in the processing chamber.

Preferably, the control unit supplies the Si-containing gas into the processing chamber and coats the substrate support in the processing chamber, and then places an unprocessed substrate on the substrate support, and the Ge-containing gas in the processing chamber. Control is performed so as to perform the second film forming process using.

  Preferably, the film forming process is an Epi-SiGe film forming process using a Ge-containing gas as a processing gas.

  Preferably, in the substrate processing apparatus, the substrate support is coated using a Si-containing gas.

  Preferably, in the substrate processing apparatus, a Si-containing gas is also used as the processing gas.

  Preferably, in the substrate processing apparatus, the film forming process is a boron-containing Epi-SiGe film forming process doped with boron, and a film thickness of the Si coating film is set to 30 nm to 40 nm.

Preferably, in the substrate processing apparatus, the Si-containing gas is SiH ₄ , Si ₂ H ₆ or SiH ₂ Cl ₂ .

  A fifth feature of the present invention is that a film forming process for processing a substrate by supplying a desired gas to the processing chamber and a substrate support exposed to an atmosphere containing oxygen outside the processing chamber are placed in the processing chamber. In the inserted state, a gas supply means for supplying a desired gas to the processing chamber and a heating means for heating the substrate are controlled so that a processing gas is supplied into the processing chamber to coat the substrate support. A method of manufacturing a semiconductor device on a substrate using a substrate processing apparatus provided with a control means that performs a step of transporting the substrate into the processing chamber, and supplying a desired gas into the processing chamber by the gas supply means. A semiconductor device manufacturing method includes a gas supply step of supplying and a step of heating the substrate by the heating means.

  A sixth feature of the present invention is that a film forming process for processing a substrate by supplying a desired gas to the processing chamber and the substrate support exposed to an atmosphere containing oxygen from the processing chamber to the processing chamber. Gas supply means for supplying a desired gas to the processing chamber so as to perform a coating process for supplying a processing gas into the processing chamber and coating the substrate support after the insertion and before performing the next substrate processing, and the substrate A method of manufacturing a semiconductor device on a substrate using a substrate processing apparatus having a control means for controlling heating means for heating the substrate, the step of transporting the substrate into the processing chamber, and the gas in the processing chamber A semiconductor device manufacturing method includes a gas supply step of supplying a desired gas by a supply unit and a step of heating the substrate by the heating unit.

  A seventh feature of the present invention is that a film forming process for processing a substrate by supplying a desired gas to the processing chamber and a process for processing the substrate by supplying a germanium (Ge) -containing gas to the processing chamber. A first film forming process; a second film forming process for supplying a desired processing gas to the processing chamber following the first film forming process to process a substrate different from the substrate; Between the first film forming process and the second film forming process, a silicon (Si) -containing gas is supplied to the processing chamber, and a coating process for coating a predetermined portion in the processing chamber is performed. A method of manufacturing a semiconductor device on a substrate using a substrate processing apparatus having a gas supply means for supplying a desired gas to a processing chamber and a control means for controlling a heating means for heating the substrate, A step of conveying the inside of the processing chamber, and the processing chamber A gas supply step of supplying a desired gas by the gas supply means, there the substrate to a method of manufacturing a semiconductor device including a step of heating by the heating means.

The present invention differs from the above-described known examples in the following points.
Patent Document 1 does not disclose that the crystallinity of the generated film is deteriorated due to contamination by an oxide such as GeO attached to the substrate support, and does not disclose that the oxide is contained by coating. In particular, Ge is easily oxidized and oxygen components are easily released when the temperature is raised. Therefore, when a Ge-containing gas is used, the crystallinity of the generated film is significantly deteriorated. The present invention solves this point, and is an effective technique when performing substrate processing with a Ge-containing gas. Patent Document 1 does not disclose or suggest this point.
Further, Patent Document 1 discloses only the point of coating on the inner wall of the processing chamber, and does not disclose the point of coating on the substrate support as in the present invention according to claim 2 or 3. In Patent Document 1, even when a substrate support is exposed to an atmosphere containing oxygen outside the processing chamber and a compound containing oxygen adheres to the substrate support, such a compound cannot be contained.

Next, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows a substrate processing apparatus 10 according to an embodiment of the present invention. The substrate processing apparatus 10 is, for example, a vertical type and includes a housing 12 on which a main part is arranged. A cassette stage 16 is provided on the front side of the inside of the housing 12 as a holder transfer member for transferring the cassette 14 as a substrate storage container to and from an external transfer device (not shown). A cassette elevator 18 as lifting means is provided on the side, and a cassette transfer machine 20 as transport means is attached to the cassette elevator 18. On the rear side of the cassette elevator 18, a cassette shelf 22 as a means for placing the cassette 14 is provided. The cassette shelf 22 is provided on the slide stage 23 so as to be able to traverse. Further, a buffer cassette shelf 24 as a means for placing the cassette 14 is provided above the cassette shelf 22. A clean unit 26 is provided on the rear side of the buffer cassette shelf 24 and is configured to distribute clean air through the inside of the housing 12.

  A processing furnace 28 is provided above the rear portion of the housing 12, and a processing chamber 88 for performing predetermined processing on the substrate 36 is formed in the processing furnace 28. A load lock chamber 30 as a semi-cylindrical airtight chamber is connected to the lower side of the processing chamber 88 by a gate valve 32 as a gate valve, and a front surface of the load lock chamber 30 is opposed to the cassette shelf 22. A load lock door 34 is provided as a partitioning means. In the load lock chamber 30, there is provided a boat elevator 40 as a lifting means for moving up and down a substrate support (boat) 38 that holds the substrate 36 in a horizontal posture in multiple stages to the processing chamber 88. A seal cap 42 as a lid is attached to support the substrate support 38 vertically. A transfer elevator (not shown) is provided between the load lock chamber 30 and the cassette shelf 22, and a substrate transfer machine 44 as a transfer means is attached to the transfer elevator. The load lock chamber 30 is connected to a purge nozzle 46 for introducing purge gas.

  A transport control means 48 for controlling the transport operation of the cassette transfer machine 20 and the like is provided below the cassette stage 16.

Hereinafter, a series of operations in the substrate processing apparatus will be described.
A cassette 14 transported from an external transport device (not shown) is placed on a cassette stage 16, and the cassette 14 is changed in its attitude by 90 degrees on this cassette stage 16. The cassette 20 is transported to the cassette shelf 22 or the buffer cassette shelf 24 in cooperation with the forward / backward movement of the transfer machine 20.

  The substrate 36 is transferred from the cassette shelf 22 to the substrate support 38 by the substrate transfer device 44. In preparation for transferring the substrate 36, the substrate support 38 is lowered by the boat elevator 40, the processing chamber 88 is closed by the gate valve 32, and a purge gas such as nitrogen gas is supplied from the purge nozzle 46 into the load lock chamber 30. Is introduced. After the load lock chamber 30 is restored to atmospheric pressure, the load lock door 34 is opened.

  The slide stage 23 moves the cassette shelf 22 horizontally and positions the cassette 14 to be transferred so as to face the substrate transfer machine 44. The substrate transfer machine 44 transfers the substrate 36 from the cassette 14 to the substrate support 38 by cooperation of the raising / lowering operation and the rotating operation. The substrate 36 is transferred to several cassettes 14, and after the transfer of a predetermined number of substrates 36 to the substrate support 38 is completed, the load lock door 34 is closed and the load lock chamber 30 is evacuated. Is done.

  After the evacuation is completed, the purge gas is again introduced from the purge nozzle 46, and when the pressure inside the load lock chamber 30 is restored to the atmospheric pressure, the gate valve 32 is opened, and the substrate support 38 is moved into the processing chamber 88 by the boat elevator 40. Inserted, the gate valve 32 is closed. Note that the substrate support 38 may be inserted into the processing chamber 88 in a state of less than atmospheric pressure without returning the pressure inside the load lock chamber 30 to atmospheric pressure after completion of evacuation. After predetermined processing is performed on the substrate 36 in the processing chamber 88, the gate valve 32 is opened, the substrate support 38 is pulled out by the boat elevator 40, and the inside of the load lock chamber 30 is restored to atmospheric pressure. Later, the load lock door 34 is opened.

The substrate 36 after processing is transferred from the substrate support 38 to the cassette stage 16 through the cassette shelf 22 by a procedure reverse to the above-described operation, and is carried out by an external transfer device (not shown).
The transport operation of the cassette transfer machine 20 and the like is controlled by the transport control means 48.

Next, FIG. 2 shows the configuration around the processing furnace 28 of the substrate processing apparatus according to the embodiment of the present invention.
A lower substrate 50 is provided on the outer surface of the load lock chamber 30 serving as an airtight chamber, an upper substrate 54 is provided on the upper end of a guide shaft 52 erected on the lower substrate 50, and a ball screw is provided between the lower substrate 50 and the upper substrate 54. 56 is rotatably provided. The ball screw 56 is connected to an elevation motor 58 provided on the upper substrate 54 and is rotated by the elevation motor 58. The lifting platform 60 is fitted to the guide shaft 52 so as to be movable up and down, and is screwed to the ball screw 56.

  A hollow elevating shaft 62 is vertically suspended from the elevating platform 60, and a support portion between the elevating platform 60 and the elevating shaft 62 is airtight. The elevating shaft 62 passes through the top plate 64 constituting the load lock chamber 30, and the lower end of the elevating shaft 62 reaches the vicinity of the bottom surface of the load lock chamber 30. The penetrating portion of the top plate 64 has a sufficient margin so that it does not come into contact with the lifting movement of the lifting shaft 62, and covers the protruding portion of the lifting shaft 62 between the load lock chamber 30 and the lifting platform 60. A bellows 66 having stretchability is provided in an airtight manner, and the bellows 66 has a sufficient amount of expansion and contraction that can correspond to the amount of elevation of the lifting platform 60. There is no contact with the expansion and contraction.

  An elevating board 68 is fixed horizontally to the lower end of the elevating shaft 60. A drive unit cover 70 is attached to the lower surface of the elevating board 68 to form a drive unit storage case 72. The joint between the elevating board 68 and the drive unit cover 70 is sealed with a sealing member such as an O-ring. Therefore, the inside of the drive unit storage case 72 is isolated from the atmosphere in the load lock chamber 30.

Further, a rotating mechanism 74 for rotating the substrate support 38 is provided on the lower surface of the elevating substrate 68, and a cooling means 76 is provided around the rotating mechanism 74, and the rotating mechanism 74 is cooled by the cooling means 76. It has become so.
A power supply cable 78 is led from the upper end of the elevating shaft 60 through the hollow portion to the rotating mechanism 74 and connected thereto. A cooling flow path 80 is formed in the cooling means 76 and the above-described seal cap 42, and a cooling water pipe 82 for supplying cooling water is connected to the cooling flow path 80. The cooling water pipe 82 is connected to the lifting shaft. The upper end of 62 passes through the hollow portion of the lifting shaft 62.

  A seal cap 42 is airtightly provided on the upper surface of the elevating substrate 68. When the lift motor 58 is driven, the drive unit storage case 72 is raised and lowered via the lift platform 60 and the lift shaft 62 by rotating the ball screw 56 described above.

  In the vicinity of the top dead center of the lifting platform 60, the seal cap 42 closes the furnace port 84, which is an opening of the processing chamber 88, so that the substrate can be processed. When the substrate processing is completed, the lift motor 58 is driven, the substrate support 38 is lowered, and the substrate 36 can be unloaded.

FIG. 3 shows details of the processing furnace 28 used in the substrate processing apparatus according to the embodiment of the present invention.
The processing furnace 28 has a cylindrical outer tube 86 whose upper portion is closed, and a processing chamber 88 is formed in the outer tube 86. In the processing chamber 88, a cylindrical inner tube 90 opened upward is disposed, and the substrate support 38 described above is inserted into the inner tube 90. On the outside of the outer tube 86, a heater 94 that constitutes heating means made of a heating element wire and a heat insulating material is disposed. The outer tube 86 is supported by a cylindrical manifold 95. The manifold 95 is provided with a gas exhaust pipe 98, and the seal cap 42 is provided with a gas supply pipe 96 so as to penetrate the seal cap 42. The gas supply pipe 96 is connected to the first to third gas supply sources 114, 116, 118 via the open / close valves 100, 102, 104, 106 and the mass flow controllers (MFC) 108, 110, 112. Thus, gas supply means is configured. On the other hand, the gas exhaust pipe 98 is connected to the vacuum pump 122 via the exhaust valve 120. The gas introduced into the processing chamber 88 from the gas supply rod 96 passes through the inner tube 90 as indicated by an arrow, and is exhausted through a gas passage formed between the inner tube 90 and the outer tube 86. Exhaust from tube 98.

  For example, the control device 124 configured by a computer controls heating by the heater 94, controls gas supply and exhaust of the on-off valves 100, 102, 104, 106, MFCs 108, 110, 112, the exhaust valve 120, etc., and further the substrate. The loading and unloading of the support 38 into the processing chamber 88 is controlled.

Next, a process when the substrate processing apparatus is used as an Epi-SiGe film forming apparatus will be described.
The first gas supply source 114 described above contains SiH ₄ , Si ₂ H ₆ or SiH ₂ Cl ₂ as the Si-containing gas, and the second gas supply source 116 has GeH ₄ as the Ge-containing gas. And the _second gas supply source 118 is filled with H ₂ .

FIG. 4 is a flowchart showing an Epi-SiGe film forming process flow.
First, in step S10, the processing chamber 88 is cleaned with a cleaning gas or the like. In the next step S11, it is determined whether or not it is the first Epi-SiGe film forming process after the by-product attached to the processing chamber 88 and the substrate support 38 is cleaned. If it is the first time, the following steps S12 to S14 are skipped, and the process proceeds to step S15. If it is not the first time (if it is the second time or later), the process proceeds to step S12. In step S <b> 12, only the substrate support 38 (the substrate support 38 on which the substrate 36 is not placed) is loaded into the processing chamber 88.

When only the substrate support 38 is loaded into the processing chamber 88 in step S12, Si coating is performed in the next step S13. That is, the atmosphere in the processing chamber 88 is evacuated, the inside of the processing chamber 88 is maintained at a temperature of, for example, 650 ° C. to 680 ° C. by the heater 94, the openings of the MFCs 108 and 112 are adjusted, and the open / close valves 100, 102, 106 is opened, Si-containing gas and H ₂ are introduced into the processing chamber 88 from the first gas supply source 114 and the third gas supply source 118, and the Si-containing gas and H ₂ are exhausted after a lapse of a predetermined time. Thus, the Si film having a film thickness of, for example, 30 nm to 1 μm is coated on the substrate support 38 and the inner wall of the processing chamber 88 (including the outer tube 86 and the inner tube 90).

  In the next step S14, the Si-coated substrate support 38 is unloaded from the processing chamber 88. In the next step 15, the substrate 36 is placed on the unloaded substrate support 38, and in the next step S16. Then, the substrate support 38 on which the substrate 36 is placed is loaded into the processing chamber 88.

In the next step S17, hydrogen baking is performed. That is, the inside of the processing chamber 88 is maintained at a temperature of, for example, 700 ° C. to 800 ° C. by the heater 94, the opening of the MFC 112 is adjusted so that a flow rate of, for example, 5 slm flows, and the on-off valves 100 and 106 are opened. H ₂ gas is introduced into the processing chamber 88 from the gas supply source 118, and the H ₂ gas is exhausted after 30 minutes, for example. Thereby, oxygen existing on the surface of the substrate 36 is reduced, and the oxygen concentration on the surface of the substrate 36 is reduced to the order of 10 ¹⁷ (atoms / cm ³ ).

In the next step S18, an Epi-SiGe film forming process is performed. That is, the atmosphere in the processing chamber 88 is evacuated, the inside of the processing chamber 88 is maintained at a temperature of, for example, 450 ° C. to 550 ° C. by the heater 94, the opening degrees of the MFCs 108, 110, 112 are adjusted, 102, 104, 106 are opened, and Si-containing gas, Ge-containing gas, and H ₂ are introduced into the processing chamber 88 from the first gas supply source 114, the second gas supply source 116, and the third gas supply source 118. These gases are exhausted after a predetermined time has elapsed. As a result, a SiGe film epitaxially grown on the surface of the substrate 36 is generated.

  In the next step S19, the substrate support 38 on which the Epi-SiGe film-formed substrate 36 is placed is unloaded, and in the next step S20, the substrate 36 is discharged from the load lock chamber 30, and in the next step S21, It is determined whether or not the Epi-SiGe film forming process is the final time. If it is not the final time, the process returns to step S11, and if it is the final time, the process ends.

  In Step S18, once the Epi-SiGe film forming process is performed, a by-product containing Ge atoms adheres to the inner wall of the processing chamber 88 and the substrate support 38, and the substrate support 38 is removed from the load lock chamber 30 in Step S20. At the time of unloading, the processing chamber 88 is closed by the gate valve 32, so that it does not come into direct contact with the atmospheric atmosphere containing oxygen, but the substrate support 38 comes into contact with the atmospheric atmosphere, and the substrate support 38 The attached Ge atoms are oxidized to become GeO and remain on the substrate support 38. Further, when the substrate support 38 is exposed to the air atmosphere, a substance containing oxygen such as moisture adheres to the substrate support 38. Then, when loading the substrate support 38 into the processing chamber 88, GeO and a part of moisture adhering to the substrate support 38 are desorbed, and Ge atoms adhering to the inner wall of the processing chamber 88 are oxidized. A substance containing oxygen such as moisture adhering to the substrate support 38 is easily discharged out of the processing chamber 88 when the processing chamber 88 is exhausted. However, since GeO is a compound, it is exhausted to the outside of the processing chamber 88. It is difficult to discharge. As it is, oxygen is desorbed from GeO adhering to the inner wall of the processing chamber 88 and the substrate support 38 due to heat at the time of forming the next Epi-SiGe film, and taken into the substrate 36, and the oxygen concentration at the interface of the substrate 36 is reduced. increase.

However, in this embodiment, except for the first time, since Si coating is performed on predetermined portions of the inner wall of the processing chamber 88 and the substrate support 38 in step S13, the inner wall of the processing chamber 88 and the substrate support 38 are not coated. The remaining GeO and Ge atoms are enclosed by the Si coating, and oxygen can be prevented from desorbing from GeO. In particular, as in this embodiment, if the Si-containing gas for Si coating is the same as that used for the Epi-SiGe film forming process, there is no need to newly provide a gas supply source, and the cost of the apparatus can be reduced. . In addition, since Si and Ge have similar characteristics (thermal expansion coefficient, etc.), the Si coating formed on GeO is difficult to peel off and does not cause generation of particles. For example, when a nitride film is used as a coating, nitrogen is desorbed by heat at the time of Epi-SiGe film formation, and the desorbed nitrogen is taken into the substrate, which may adversely affect the crystallinity of the Epi-SiGe film. There is.
Next, examples and comparative examples will be described.

[Example]
Si coating was performed under the conditions shown in Table 1, and Epi-SiGe film formation was performed under the conditions shown in Table 2. The result of analyzing the obtained substrate by SIMS (secondary ion mass spectrometer) is shown in FIG. It is understood that the oxygen concentration at the interface between the Epi-SiGe film and the Si substrate is suppressed to the order of 10 ¹⁷ (atoms / cm ³ ).

[Comparative example]
Epi-SiGe film formation was performed under the same conditions as in Table 2 without performing Si coating. The result of analyzing the obtained substrate by SIMS is shown in FIG. It is understood that the oxygen concentration at the interface between the Epi-SiGe film and the Si substrate is rapidly increased.

  In the above-described embodiment, the process of performing the Epi-SiGe film forming process following the previous Epi-SiGe film forming process has been described. However, the Epi-Si film forming process is performed following the previous Epi-SiGe film forming process. The present invention is also effective when performed.

The film thickness of the Si coating film varies depending on the use of the Epi-SiGe film to be formed.
That is, when the strained Si film is formed, the Epi-SiGe film is formed non-doped. In this case, the thickness of the Si coating film is preferably 30 nm or less. If the Si coating film exceeds 30 nm, it causes a decrease in throughput.
In addition, when an Epi-SiGe film is formed on the base of an HBT or an elevated drain source, boron is doped. In this case, the Si coating film is made slightly thicker than that in the case of non-doping, and 30 nm to 40 nm. It is preferable to do.

  In the case of boron-doped Epi-SiGe film formation, so-called autodoping occurs in which boron adhering to the processing chamber wall and the substrate support during the previous substrate processing is detached and taken into the substrate during the next substrate processing. In particular, when a non-doped Epi-SiGe film is formed on another substrate after the boron-doped Epi-SiGe film is formed, the boron produced in the previous batch is taken into the interface between the substrate and the non-doped film, and analyzed by SIMS, the boron spike shape This produces a so-called boron spike in which a peak is observed.

  Therefore, when the Si coating film is formed as in the above embodiment, boron can be contained together with GeO, and auto-doping and boron spikes can be prevented from occurring.

However, if the Si coating film is thin, boron may not be sufficiently contained. The present inventors analyzed the boron doping amount by SIMS when the thickness of the Si coating film was 10 nm and when it was 30 nm to 40 nm. As a result, when the thickness of the Si coating film is 10 nm, when the boron doping amount of the boron-doped Epi-SiGe film is on the order of 10 ¹⁹ (atoms / cm ³ ), the non-doped Epi performed on another substrate after the Si coating. The boron doping amount of the -SiGe film is on the order of 10 ¹⁸ atoms / cm ³ ), and boron also appears in the non-doped Epi-SiGe film after Si coating. On the other hand, when the film thickness of the Si coating film was 30 nm to 40 nm, the boron doping amount of the non-doped Epi-SiGe film could be suppressed to the order of 10 ¹⁶ to 10 ¹⁷ (atoms / cm ³ ). If the thickness of the Si coating film exceeds 40 nm, it is not preferable because it causes a reduction in throughput.

Furthermore, in the above embodiment, the Epi-SiGe film forming process has been described. However, the present invention is not limited to the epitaxial process, and the present invention can also be applied to a Poly-SiGe film forming process or an amorphous SiGe film forming process. .
For example, when forming a Poly-SiGe film, the Poly-SiGe film can be formed even if some oxygen is present at the interface with the Si substrate, but an extremely thin gate oxide film has already been formed on the Si substrate. When forming a Poly-SiGe film on the formed substrate, oxygen attached to the walls of the processing chamber and the substrate support is desorbed, which leads to an increase in the thickness of the gate oxide film and a deterioration in device characteristics. Will be invited. Accordingly, such a problem can be prevented by forming a Si coating film to prevent the desorption of oxygen adhering to the inner wall of the processing chamber or the substrate support.

  As described above, according to the present invention, when a Ge-containing gas or the like is supplied for film formation, an increase in oxygen concentration at the substrate interface can be suppressed and a good film can be formed.

  The present invention is used for a substrate processing apparatus that suppresses an increase in oxygen concentration at the substrate interface and needs to form a good film when a Ge-containing gas is supplied to perform film formation processing such as Epi-SiGe. I can do it.

1 is a perspective view showing a substrate processing apparatus according to an embodiment of the present invention. It is sectional drawing which shows the processing furnace used for the substrate processing apparatus which concerns on embodiment of this invention, and its periphery. It is sectional drawing which shows the processing furnace used for the substrate processing apparatus which concerns on embodiment of this invention. It is a flowchart which shows the substrate processing process controlled by the control apparatus of the substrate processing apparatus which concerns on embodiment of this invention. It is a chart which shows the SIMS analysis result in the Example of this invention. It is a chart which shows the SIMS analysis result in a comparative example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Substrate processing apparatus 28 Processing furnace 30 Load lock chamber 36 Substrate 38 Substrate support 86 Outer tube 88 Processing chamber 90 Inner tube 94 Heater 114 First gas supply source 116 Second gas supply source 118 Third gas supply source 124 Control device

Claims (13)

  A processing chamber for containing a substrate; a gas supply means for supplying a desired gas to the processing chamber; a heating means for heating the substrate; a substrate support for supporting the substrate; and the substrate support outside the processing chamber. The gas supply so as to coat the substrate support by supplying a processing gas into the processing chamber in a state where the moving means for moving the substrate and the substrate support exposed to an atmosphere containing oxygen outside the processing chamber are inserted into the processing chamber. And a control means for controlling the heating means and the moving means.   A processing chamber for containing a substrate; a gas supply means for supplying a desired gas to the processing chamber; a heating means for heating the substrate; a substrate support for supporting the substrate; and the substrate support outside the processing chamber. And the substrate support exposed to the atmosphere containing oxygen after being inserted into the processing chamber from outside the processing chamber and then supplying a processing gas into the processing chamber before performing the next substrate processing. A substrate processing apparatus comprising: a control unit that controls the gas supply unit, the heating unit, and the moving unit to coat a body.   A processing chamber for containing a substrate, a gas supply means for supplying a desired gas to the processing chamber, a heating means for heating the substrate, and a germanium (Ge) -containing gas are supplied to the processing chamber to process the substrate. A first film-forming process; a second film-forming process for supplying a desired processing gas to the processing chamber following the first film-forming process and processing the substrate different from the substrate; Between the first film forming process and the second film forming process, a silicon (Si) -containing gas is supplied to the processing chamber to perform a coating process for coating a predetermined portion in the processing chamber. And a control means for controlling the gas supply means and the heating means.   4. The substrate processing apparatus according to claim 3, further comprising: a substrate support that supports the substrate; and a moving unit that moves the substrate support into and out of the processing chamber, and the control unit includes the first film formation. After the processing, after the substrate support supporting the processed substrate is discharged from the processing chamber by the moving means, and the substrate support not supporting the substrate is inserted into the processing chamber by the moving means A substrate processing apparatus for controlling the gas supply means, the heating means, and the moving means so as to supply a Si-containing gas into the processing chamber and coat a substrate support in the processing chamber.   5. The substrate processing apparatus according to claim 4, wherein the control means supplies the Si-containing gas into the processing chamber and coats the substrate support in the processing chamber, and then places an unprocessed substrate on the substrate support, Then, the substrate processing apparatus is controlled to perform the second film forming process using the Ge-containing gas.   6. The substrate processing apparatus according to claim 1, wherein the film forming process is an Epi-SiGe film forming process using a Ge-containing gas as a processing gas.   7. The substrate processing apparatus according to claim 1, wherein the substrate support is coated using a Si-containing gas.   8. The substrate processing apparatus according to claim 1, wherein a Si-containing gas is also used as the processing gas.   9. The substrate processing apparatus according to claim 1, wherein the film forming process is a boron-containing Epi-SiGe film forming process doped with boron, and a film thickness of the Si coating film is set to 30 nm to 40 nm. Substrate processing apparatus. 10. The substrate processing apparatus according to claim 1, wherein the Si-containing gas is SiH ₄ , Si ₂ H ₆ or SiH ₂ Cl ₂ .   A process gas is supplied into the processing chamber while a substrate support exposed to an oxygen-containing atmosphere outside the processing chamber is inserted into the processing chamber while supplying a desired gas to the processing chamber. A substrate processing apparatus including a gas supply means for supplying a desired gas to a processing chamber and a control means for controlling a heating means for heating the substrate to perform a coating process for coating the substrate support. A method of manufacturing a semiconductor device on a substrate, the step of transporting the substrate into the processing chamber, the gas supply step of supplying a desired gas into the processing chamber by the gas supply means, and the heating of the substrate And a step of heating by means.   A film forming process for supplying a desired gas to the processing chamber and processing the substrate, and the substrate support exposed to an atmosphere containing oxygen is inserted into the processing chamber from the outside of the processing chamber, and then before the next substrate processing. A gas supply means for supplying a desired gas to the processing chamber and a heating means for heating the substrate so as to perform a coating process for coating the substrate support by supplying a processing gas into the processing chamber. A method of manufacturing a semiconductor device on a substrate using the substrate processing apparatus, the step of transporting the substrate into the processing chamber, and the gas supply step of supplying a desired gas into the processing chamber by the gas supply means And a step of heating the substrate by the heating means.   A film forming process for processing a substrate by supplying a desired gas to the processing chamber; a first film forming process for processing a substrate by supplying a germanium (Ge) -containing gas to the processing chamber; Subsequent to the film processing, a second film forming process for supplying a desired processing gas to the processing chamber and processing the substrate different from the substrate, and the first film forming process and the second film forming process. A gas supply for supplying a desired gas to the processing chamber so as to supply a silicon (Si) -containing gas to the processing chamber and to perform a coating process for coating a predetermined portion in the processing chamber. And a substrate processing apparatus having a control means for controlling the heating means for heating the substrate, and a method of manufacturing a semiconductor device on the substrate, the step of transporting the substrate into the processing chamber, and the processing The desired gas is supplied into the room by the gas supply means. The method of manufacturing a semiconductor device, which comprises a gas supply step of supplying, and a step of heating the substrate by the heating means.

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