JP2008204490A - Method for manufacturing information recording medium and information recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multilayer information recording medium wherein uniformity of thickness of a resin layer is not reduced even after a light curable resin is spin-coated on a substrate and flow of the light curable resin is hardly generated when a stamper is stuck thereto and to provide a method for manufacturing the same. <P>SOLUTION: A solution of the light curable resin having low viscosity obtained by dissolving the light curable resin having high viscosity in a volatile solvent is applied over the substrate by a spin-coating method to form the resin layer. The volatile solvent is evaporated during rotational application of the solution of the light curable resin to obtain the resin layer in a gel state. Thus reduction of uniformity of thickness of the resin layer is prevented. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method for manufacturing an information recording medium that records and reproduces information such as audio and video as a digital signal, and more particularly to a method for manufacturing an information recording medium capable of recording a large amount of information by multilayering information layers.

  In recent years, research on optical information recording methods has been advanced, and it has been widely used for industrial and consumer purposes. In particular, optical information recording media that can record information at a high density, such as CDs and DVDs, have become widespread. Such an optical information recording medium is formed by laminating a metal thin film or a thin film material capable of thermal recording on a transparent substrate on which concave and convex shapes such as pits and grooves representing an information signal are formed, and this metal It is configured by laminating a protective layer that protects a thin film and the like from moisture in the atmosphere. Information is reproduced by irradiating the uneven shape with laser light and detecting a change in the amount of reflected light.

  A method for manufacturing such an optical information recording medium (hereinafter referred to as an information recording medium) is as follows.

  For example, in the case of a CD, first, a mold called a stamper having a concavo-convex shape is used, and a resin substrate having a concavo-convex shape indicating an information signal is formed by injection molding or the like. A metal thin film or a recording film is formed on the concavo-convex shape by vapor deposition or sputtering, and then a protective layer is formed by coating an ultraviolet curable resin or the like.

  In the case of DVD, a resin substrate having a thickness of about 0.6 mm is formed from a stamper, a metal thin film or a recording film is formed on the uneven shape on the resin substrate, and then the two resin substrates are bonded together with an ultraviolet curable resin or the like. It is produced by.

  Now, there is an increasing demand for a large capacity in such an information recording medium, and the density of the information recording medium has been increased accordingly. Even for DVDs and the like, a two-layered disk in which a signal layer having a concavo-convex shape is formed with an intermediate layer of several tens of μm interposed therebetween has been proposed to increase the capacity.

  In recent years, with the spread of digital high-definition broadcasting, next-generation information recording media with higher density and larger capacity than DVD are required, and large-capacity media such as Blu-ray discs have been proposed. In the Blu-ray disc, the track pitch of the signal layer formed in the concavo-convex shape is narrower and the pit size is smaller than that of the DVD. For this reason, it is necessary to narrow down the spot of the reading laser. However, if the spot is small, it is easily affected by the tilt of the disc, and if the disc is tilted even a little, reproduction becomes impossible. For this reason, the Blu-ray disc compensates for this drawback by reducing the thickness of the cover layer on the laser incident side of the disc to about 0.1 mm.

  By the way, even in the next generation information recording medium having a large capacity such as the Blu-ray disc, further increase in capacity is required, and multilayering of the signal layer is one of the methods. In order to reduce the influence due to the tilt of the disc when Blu-ray disc is multi-layered, the innermost layer as viewed from the laser incident side needs to be about 0.1 mm from the disc surface. The signal layer is stacked with an intermediate layer of several μm to several tens of μm in a thickness of 0.1 mm.

Therefore, when a Blu-ray disc has a multi-layer structure, the manufacturing method is generally performed as follows. First, a process of forming a reflective film or a recording film on a molded resin substrate having a thickness of about 1.1 mm having a signal layer having a concavo-convex shape on one side, and several μm to several tens of μm separating each signal layer called an intermediate layer Forming a resin layer having a thickness on the signal layer of the substrate; transferring the signal layer by pressing a stamper having a concavo-convex shape for signal layer transfer on the resin layer; The signal layers are stacked in order by repeating the process of forming a reflective film or recording film on the signal layer transferred to the layer, and finally a protective layer that protects the signal layer is formed to form a multilayer information recording medium Is manufactured.
JP 2002-092969 A

  When manufacturing a multi-layer Blu-ray disc, it is very important to form a resin layer called an intermediate layer with a uniform thickness and few defects, and a signal layer having an uneven shape is formed on the resin layer. It is also important to form stably.

  Various methods have been studied as methods for forming the intermediate layer. For example, a UV-curable adhesive sheet with a uniform thickness is attached onto a substrate, and the signal layer is transferred by pressing a stamper having a concavo-convex shape for signal layer transfer onto the adhesive sheet attached onto the substrate. There is a method of forming an intermediate layer and a signal layer by peeling a stamper after curing an adhesive sheet. Since this method can use a sheet material with very good thickness uniformity, an intermediate layer with a uniform thickness can be easily formed. However, in general, the sheet material is expensive and the manufacturing cost of the information recording medium is low. There is a disadvantage that it becomes high.

  As a low cost method, for example, a method of forming an intermediate layer by a spin coating method can be considered. The spin coating method is a method in which a low-viscosity photo-curing resin or the like is dropped near the center of the substrate, and then the substrate is rotated at a high speed by a rotary table or the like so that the resin dripped by the centrifugal force due to the rotation of the substrate It is a method of applying to the outer periphery. A simple facility can be used, and there is an advantage that the thickness of the intermediate layer can be easily controlled to some extent by adjusting the dripping amount of the resin, the rotational speed of the rotary table, and the like.

  However, in order to form a resin layer by spin coating, it is necessary to use a resin having a low viscosity to some extent on the substrate. This is because high-viscosity resin is very difficult to apply by rotating the substrate and is not practical because a rotating stage capable of high rotation is required. On the other hand, when a low-viscosity resin is used, if the resin is applied onto the substrate by spin coating and then the rotation of the substrate is stopped, the resin has a low viscosity, so the end surface of the substrate (for example, the outer edge of the substrate), etc. This makes it easy to swell the resin due to surface tension, and the uniformity of the resin layer thickness decreases.

  Further, after forming the resin layer, it is necessary to press the stamper to the resin layer to transfer the signal layer. When the stamper is pressed on the resin layer formed using a low-viscosity resin, the resin is pressed by the pressure. This causes a problem that the thickness uniformity is lowered and the resin protrudes from the substrate. Another characteristic of the spin coating method is that the resin is applied from the inner peripheral portion to the outer peripheral portion, so that the thickness distribution tends to occur concentrically.

  The present invention has been made to solve the above-described problems of the prior art, and a resin layer that is less likely to cause a decrease in thickness uniformity and that does not easily cause resin flow even when a signal layer is transferred. An object is to provide a method of forming.

  For this purpose, the present invention facilitates the formation of the resin layer on the substrate by appropriately reducing the viscosity of the solution of the photocurable resin dropped on the substrate with a volatile solvent, and the resin layer. By forming a gel-like resin layer by volatilizing a volatile solvent during coating, preventing a decrease in the uniformity of the thickness of the resin layer after coating, the resin flows when the stamper is pressed against the resin layer. We propose a configuration to suppress this.

  Specifically, it is as follows.

  A method for producing an information recording medium comprising at least one resin layer laminated on a substrate, wherein a volatile solvent solution of a photocurable resin is applied on the substrate, and the volatile solvent is applied during the application. A step of forming a gel-like resin layer made of the photo-curing resin by volatilization, and a stamper having a signal surface having a concavo-convex shape on at least one surface, the gel-like surface having the signal surface formed on the substrate Realized by a manufacturing method including a step of bonding to a substrate so as to be in contact with a resin layer, a step of exposing and curing the gel-like resin layer, and a step of peeling the stamper from the substrate on which the resin layer is formed Is done.

  This can also be realized by including at least one of ethanol, methanol, isopropyl alcohol, methyl ethyl ketone, and methyl isobutyl ketone as the volatile solvent.

  The coating may be a spin coating method.

  During the application of the volatile solvent solution of the photocurable resin to the substrate, the volatile solvent may be volatilized by heating the volatile solvent solution applied to the substrate.

  The heating temperature is sufficient for the volatile solvent to volatilize, and the photocurable resin does not react, and is preferably 20 ° C. or higher and 200 ° C. or lower. More preferably, 50 degreeC or more and 100 degrees C or less are preferable.

  The heating temperature may have a temperature gradient that increases from the inner peripheral side to the outer peripheral side of the substrate.

  Application of the volatile solvent solution of the photocurable resin may be performed in a reduced pressure atmosphere or in a vacuum atmosphere.

  The step of bonding the stamper and the substrate may be performed in a reduced pressure atmosphere or a vacuum atmosphere.

The vacuum atmosphere may have a degree of vacuum of 10,000 Pa or less. More preferably, the degree of vacuum may be 10 Pa or more and 8 × 10 ³ Pa or less. If it exceeds 8000 Pa, the effect of defoaming the resin solution hardly appears, and if it is less than 10 Pa, an expensive apparatus is required to achieve this degree of vacuum, which is not realistic.

  As used herein, the photocurable resin refers to a resin having a double bond or a triple bond that undergoes a crosslinking reaction by light, and may be an ultraviolet curable resin, a mixture of a plurality of types, or a monomer. You can leave. Examples of the photocurable resin include acrylic resin, methacrylic resin, and epoxy resin. In addition, you may use what mixed other resin and materials with photocurable resin.

The volatile solvent here may be any solvent in which the photocurable resin dissolves, and means a solvent having a boiling point of 40 ° C. or more and 150 ° C. or less at normal pressure (1.013 × 10 ⁵ Pa).

  As the volatile solvent used in the present invention, those having a boiling point of 50 ° C. or higher and 120 ° C. or lower are more preferable. When the boiling point is higher than 120 ° C., the volatile solvent is not completely volatilized during coating, and the thickness uniformity may be reduced. Moreover, when the boiling point is less than 50 ° C., the stability in the solution state tends to be lacking.

  Further, a volatile solvent that can dissolve a large amount of the photocurable resin (highly soluble) is preferable because the thickness of the resin layer can be easily controlled.

  According to the present invention, since the viscosity of the solution of the photocurable resin applied on the substrate can be lowered by diluting the photocurable resin with the volatile solvent, the resin layer by spin coating or the like The resin layer having an arbitrary thickness can be formed on the substrate by adjusting the concentration of the solution. Further, by volatilizing the volatile solvent during the spin coating of the substrate, it is possible to form a gel-like resin layer made of a photocurable resin before stopping the rotation, and the thickness of the resin layer after coating It is possible to prevent the uniformity from being lowered and to suppress the resin flow when the stamper is pressed.

  Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1)
A method for manufacturing a two-layer information recording medium according to Embodiment 1 of the present invention will be described. The manufacturing method includes a step of forming a gel-like resin layer on a substrate, a step of attaching a stamper to the substrate on which the gel-like resin layer is formed, a step of curing the gel-like resin layer by exposure, a stamper It consists of the process of peeling.

  First, a process for forming a gel-like resin layer by spin coating will be described with reference to FIG.

  A polycarbonate first resin substrate 101 having a 120 mm diameter and 1.1 mm thickness having an uneven surface on one side is placed on a rotary stage 102, and the resin substrate 101 is held by vacuum suction. A recording reflection film 103 is formed in advance on the information surface of the first resin substrate 101. As shown in FIG. 2, the rotary stage 102 is provided with heaters concentrically inside the stage and heated in advance. The heaters 202 to 205 can be heated to different temperatures. The resin substrate 101 held on the rotary stage 102 is heated to a state having a concentric temperature gradient by the heat of the rotary stage 102.

  While slowly rotating the rotary stage 102, a volatile solvent solution 105 of an ultraviolet curable resin diluted with a volatile solvent from the dropping nozzle 104 installed on the inner periphery of the substrate and having a reduced viscosity is placed on the resin substrate 101. (FIG. 1a). Volatile solvents include organic solvents such as toluene and benzene, ketone solvents such as methyl ethyl ketone and methyl isobutyl ketone, ether solvents such as dimethyl ether, tetrahydrofuran and dioxolane, and alcohol solvents such as ethanol, methanol and isopropyl alcohol. However, ethanol was used here so as not to contaminate the base substrate. An ultraviolet curable resin having a viscosity of about 50000 mPa · s was dissolved in ethanol, and the viscosity of the volatile solvent solution 105 of the ultraviolet curable resin at the time of dropping was set to about 2000 mPa · s. The viscosity was measured with a rotational viscometer.

  After the volatile solvent solution 105 of the ultraviolet curable resin is dropped in a ring shape on the inner periphery of the substrate 101 (FIG. 1b), the rotation speed of the turntable 102 is increased. The table rotation speed was set to about 5000 rpm. The volatile solvent solution 105 of the ultraviolet curable resin is applied toward the outer periphery on the resin substrate 101 by the centrifugal force generated by the rotation of the rotary table. At this time, the volatile solvent in the solution 105 is volatilized under the influence of application and heating, and the viscosity of the volatile solvent solution 105 of the ultraviolet curable resin is gradually increased. During the application, the viscosity of the volatile solvent solution 105 of the ultraviolet curable resin is increased to about 50000 mPa · s and gels (FIG. 1c). Here, a Micasa coater was used as the spin coater.

  Thereafter, when the rotary stage is stopped, a resin layer made of only a gel-like ultraviolet curable resin is formed on the substrate 101. When an ultraviolet curable resin having a viscosity of about 2000 mPa · s is used as it is, the resin flows due to the influence of the surface tension at the end surface of the substrate when the rotary table is stopped, and the thickness of the resin layer that is almost uniform during the coating. Will change. On the other hand, by using a solution adjusted to a viscosity of about 2000 mPa · s by dissolving an ultraviolet curable resin having a viscosity of about 50000 mPa · s in a volatile solvent, the viscosity of the solution gradually increases during application of the solution. However, since the gel-like resin layer is formed when the solvent is completely volatilized, the uniformity of the thickness of the resin layer is not easily lost.

  Next, a process of transferring the signal layer to the substrate on which the gel-like resin layer is formed in this way will be described. FIG. 4 shows a stamper bonding step and a stamper peeling step.

  A resin substrate 401 on which a gel-like resin layer 402 is formed is held on a rotary stage 403. A center pin 404 having a diameter substantially the same as the inner diameter hole of the substrate 401 is inserted into the inner diameter hole of the resin substrate 401.

  A stamper 405 having a signal surface having a concavo-convex shape on one side is bonded so that the signal surface is in contact with the gel-like resin layer 402. A signal surface is formed on the stamper 405 with a track pitch of 320 nm and a depth of 25 nm. The center pin 404 also has a portion having substantially the same diameter as the inner diameter hole of the stamper 405, and the center of the signal surface of the resin substrate 401 and the stamper 405 is mechanically aligned by the center pin 404. The deviation (eccentricity) of the center position of the signal surface is reduced. When the stamper is pressed against the gel-like resin layer 402, the shape of the signal surface formed by the uneven shape on the stamper is transferred to the gel-like resin layer 402. Since the gel-like resin layer 402 has a high viscosity of about 50000 mPa · s, the flowability of the resin is small even when the stamper is pressed, and the thickness distribution of the resin layer remains uniform. Further, when the viscosity is about 50,000 mPa · s, there is no problem in the transferability of the uneven shape when the stamper is pressed. Thereafter, when ultraviolet rays are irradiated from the stamper or the substrate side, the gel-like resin layer 402 is cured. Finally, when the stamper is peeled off at the interface between the stamper and the cured resin layer, a second signal layer is formed in the cured resin layer. The unevenness depth of the resin layer after the transfer was about 24 nm, whereas the unevenness depth of the stamper was about 25 nm, and a transfer rate of about 96% was confirmed. When a recording reflection film 407 is formed on the uneven surface of the cured resin layer 408 to which the signal layer has been transferred, and finally a cover layer serving as a protective layer of the signal layer is formed by spin coating or the like, information recording with a two-layer structure is performed. The medium is completed.

  The thickness of the cured resin layer 408 thus formed was measured. The results are shown in FIG. For comparison, thickness measurement data of resin layers formed by three kinds of methods are shown. First, the results of measuring the thickness of a resin layer formed by spin coating using an ultraviolet curable resin (conventional resin) having a viscosity of about 2000 mPa · s without dilution with a volatile solvent are shown. Secondly, the results of measuring the thickness of a resin layer formed by spin coating without using a high-viscosity resin whose viscosity is reduced to about 2000 mPa · s by diluting with a volatile solvent without heating the rotary stage are shown. . Third, using a volatile solvent solution of a high-viscosity resin whose viscosity has been reduced to about 2000 mPa · s by diluting with a volatile solvent, the rotating stage is heated by a heater to move from the inner circumference to the outer circumference. The results are shown together with the results of measuring the thickness of the resin layer formed by the spin coat method in a state where a temperature gradient is provided so as to increase the temperature.

  The measurement used the method of measuring interlayer thickness using optical interference, and the measurement data was shown by the average value of the measurement data (one 64 points) of 1 round in each radial position.

  Further, the temperature gradient when the rotating stage is heated is about 50 ° C. for the heater 202 part, about 55 ° C. for the heater 203 part, about 60 ° C. for the heater 204 part, about 60 ° C. The temperature is set to about 65 ° C. at 205 parts. In the first embodiment of the present invention, an electrothermal heater is individually provided for each area of the rotary stage as a heater, and the temperature can be set individually.

  In the thickness measurement data of the conventional resin, there was a variation of about ± 3 μm, and it was confirmed that the thickness increased particularly near the outermost periphery (radius around 58 mm). This is thought to be because the resin applied by the spin coating method flows when the rotation stops and the resin swells due to the surface tension at the outer edge of the substrate.

  However, in the case of the resin layer forming method according to the present invention using a volatile solvent solution of a high-viscosity photocurable resin that has been reduced in viscosity by a volatile solvent, the resin layer prepared by the spin coating method becomes a gel. Since the uniformity of the thickness is easily maintained, the thickness variation from the inner peripheral portion to the outer peripheral portion of the information recording medium is suppressed within ± 1 μm. Further, it was confirmed that the thickness variation was further suppressed when the rotary table was heated and a temperature gradient was provided so that the temperature increased from the inner circumference toward the outer circumference.

  Here, the viscosity of the resin solution and the rotational speed of the rotary stage are set so that the thickness of the resin layer is around 25 μm, but the dilution concentration by the volatile solvent, the rotational speed of the rotary stage, and the temperature setting of the rotary table are changed. Thus, it is possible to obtain a desired thickness of the resin layer.

  FIG. 8 shows (1) the ease of application by spin coating and (2) the resin layer after application when the conditions of the viscosity of the UV curable resin and the viscosity of the solvent solution diluted with the volatile solvent are changed. The figure which compares the result of the resin flow at the time of the uniformity maintenance of thickness and (3) stamper bonding is shown.

  Considering the ease of application by spin coating, it is preferable to set the viscosity of the applied resin or volatile solvent solution to about 2000 mPa · s or less. On the other hand, when the viscosity of the ultraviolet curable resin itself is 10,000 mPa · s or less, the thickness changes after coating, or the resin oozes out when the stamper is bonded. Therefore, in consideration of maintaining the uniformity of the thickness of the resin layer after application and the resin flow during stamper bonding, the viscosity of the ultraviolet curable resin itself is preferably about 50000 mPa · s.

  Here, the resin layer is heated by heating the rotary stage and heating the substrate. However, the method of heating the resin is not limited to this, and for example, as shown in FIG. A method is also possible. In this case, as shown in FIG. 5, it is more effective to divide the infrared heater or the like so that it can be heated to different temperatures on a concentric circle and increase the heating temperature from 502 parts to 505 parts of the heater.

  The heating temperature is preferably set to 50 ° C. or higher and 120 ° C. or lower, and preferably has a temperature gradient in which the temperature increases toward the outer periphery. When the temperature is 50 ° C. or higher, the boiling point of the volatile solvent used in Embodiment 1 of the present invention is exceeded, and the solvent can be efficiently volatilized. However, when the heating temperature is 120 ° C. or higher, the reaction or alteration of the components contained in the ultraviolet curable resin may be observed.

  Although ethanol is used as the volatile solvent here, the same effect can be obtained if the volatile solvent does not dissolve or contaminate the substrate.

  Further, here, the heating of the substrate is intended only to volatilize the volatile solvent during the application of the solvent solution of the ultraviolet curable resin, and the resin layer made of the ultraviolet curable resin is not cured by the heating of the substrate. However, the reaction of the resin layer may be advanced to some extent by heating the substrate to form a semi-cured resin layer.

  Further, here, the manufacturing method of the information recording medium having a two-layer structure has been described. However, if the resin layer formation, the bonding with the stamper, the curing by ultraviolet irradiation, and the stamper peeling process are repeated in the same manner, more signals can be obtained. It is also possible to produce a multilayer information recording medium having layers.

(Embodiment 2)
FIG. 6 illustrates a method for manufacturing a two-layer information recording medium according to Embodiment 2 of the present invention. The method for forming the resin layer and the signal layer is the same as that described in the first embodiment of the present invention, except that the step of forming the resin layer on the resin substrate 601 by the spin coat method is performed in a vacuum chamber. In 606. By this method, the volatilization of the volatile solvent is promoted, and bubbles contained in the volatile solvent solution 605 of the ultraviolet curable resin can be blown out of the solution. Thereby, it is possible to remove the entrapment of bubbles that are likely to occur in the resin layer.

  In addition to the formation of the resin layer by spin coating, it is also possible to prevent the entrapment of bubbles by performing in the vacuum chamber until the subsequent stamper bonding process (or the resin layer curing process by ultraviolet irradiation). It is effective. The reason why bubbles are generated is not only the bubbles contained in the volatile solvent solution 605 of the ultraviolet curable resin, but also the bubbles existing between the uneven surface of the stamper and the resin layer when the stamper is bonded. For this reason, it is possible to reduce the entrapment of bubbles by performing the stamper bonding process in the vacuum chamber.

  The UV curable resin solution diluted with a volatile solvent and reduced in viscosity to about 2000 mPa · s contains a large amount of bubbles. When used in a resin layer formed on an information recording medium, bubbles are generated. If the size is 100 μm or more, the recording / reproducing characteristics are affected.

  Accordingly, a two-layer information recording medium having a diameter of 120 mm was prepared under the condition that only the degree of vacuum in the vacuum chamber was different, and the number of bubbles in the resin layer due to the difference in degree of vacuum was examined. The results are shown in FIG. Three samples were prepared for each sample, and the number of bubbles of 100 μm or more in a visual field having a diameter of about 1 mm was examined by an optical microscope, and an average was taken. The effect of defoaming appears from a degree of vacuum of about 10,000 Pa, and bubbles are almost zero at 8000 Pa or less.

  In the vacuum chamber used in Embodiment 2 of the present invention, the degree of vacuum was set to 1000 Pa. With this degree of vacuum, the effect of defoaming the resin can be obtained, and the volatile solvent in the resin layer can be effectively volatilized. The experiment was conducted while measuring the degree of vacuum using a rotary pump made by Iwaki as the vacuum pump.

  Further, in Embodiment 2 of the present invention, the same effect can be obtained even under a reduced-pressure atmosphere in the middle of the process until the degree of vacuum reaches 1000 Pa. The same effect can be obtained by using a decompression device such as an aspirator.

  By this method, not only can a resin layer with a uniform film thickness be formed, but it is also possible to remove bubbles that bite into the resin layer.

  An information recording medium manufacturing method of the present invention is a low-cost multilayer information recording medium manufacturing method in which a resin layer is formed by a spin coating method, wherein a resin layer having a uniform thickness is formed and a signal layer is transferred. In this case, the fluidity of the resin can be suppressed. The present invention can be used to easily and inexpensively manufacture a multilayer information recording medium.

The figure which shows the formation process of the resin layer by the spin coat method concerning Embodiment 1 of this invention The figure which shows an example of the turntable concerning Embodiment 1 of this invention. The figure which shows the thickness distribution of the formed resin layer The figure which shows the stamper bonding process concerning Embodiment 1 of this invention, the hardening process by ultraviolet irradiation, and a stamper peeling process The figure which shows an example of the method of heating a board | substrate The figure which shows the manufacturing process of the information recording medium concerning Embodiment 2 of this invention. Diagram showing the relationship between the degree of vacuum and the number of bubbles in the resin layer The figure which shows the characteristic comparison table by viscosity of resin and solvent solution

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 Resin substrate 102 Rotation stage 103 Recording reflective film 104 Dropping nozzle 105 Volatile solvent solution of ultraviolet curable resin 201 Rotation stage 202 Heating heater 203 Heating heater 204 Heating heater 205 Heating heater 401 Resin substrate 402 Gel-like resin layer 403 Rotation stage 404 Center Pin 405 Stamper 406 Ultraviolet Light Source 407 Recording Reflective Film 408 Cured Resin Layer 501 Infrared Heater 502 Heating Heater 503 Heating Heater 504 Heating Heater 505 Heating Heater 506 Resin Substrate 507 Rotation Stage 508 Resin Layer 601 Resin Substrate 602 Rotation Stage 603 Recording Reflective film 604 Dripping nozzle 605 Volatile solvent solution of UV curable resin 606 Vacuum tank 607 Stamper

Claims (8)

A method for producing an information recording medium comprising at least one resin layer laminated on a substrate, wherein a volatile solvent solution of a photocurable resin is applied on the substrate, and the volatile solvent is applied during the application. A step of forming a gel-like resin layer made of the photo-curing resin by volatilizing the solution, and a gel having a signal surface formed on the substrate, the stamper having a signal surface having an uneven shape on at least one surface An information recording comprising a step of bonding to a substrate so as to be in contact with a resin-like resin layer, a step of exposing and curing the gel-like resin layer, and a step of peeling the stamper from the substrate on which the resin layer is formed A method for producing a medium. 2. The method of manufacturing an information recording medium according to claim 1, wherein the volatile solvent solution includes at least one of ethanol, methanol, isopropyl alcohol, methyl ethyl ketone, and methyl isobutyl ketone. 3. The method of manufacturing an information recording medium according to claim 1, wherein the coating is performed by a spin coating method. The volatile solvent solution is volatilized by heating the volatile solvent solution applied to the substrate during application of the volatile solvent solution of the photocurable resin to the substrate. The manufacturing method of the information recording medium in any one of 1-3. 5. The method of manufacturing an information recording medium according to claim 4, wherein the temperature of the heating has a temperature gradient that increases from the inner circumference side to the outer circumference side of the substrate. 6. The method for producing an information recording medium according to claim 1, wherein the volatile solvent solution of the photocurable resin is applied in a reduced pressure atmosphere or a vacuum atmosphere. The method for manufacturing an information recording medium according to claim 1, wherein the step of bonding the stamper and the substrate is performed in a reduced pressure atmosphere or a vacuum atmosphere. An information recording medium produced by using the method for producing an information recording medium according to claim 1.

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