JP2008183665A - Lapping device and lapping method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lapping device for accurately lapping a combined head adopted to a hard disc drive device adopting a vertical recording system, and a lapping method using the lapping device. <P>SOLUTION: This lapping device is provided with a tilt mechanism comprising a linear actuator 130 in addition to conventional right and left difference correction mechanisms and a conventional bend correction mechanism. A longitudinal contact angle of a long raw bar is corrected by the right and left difference correction mechanisms (not shown), and waviness of the raw bar is corrected by the bend correction mechanism. Then the length of a rod of the linear actuator 130 which is a tilt mechanism, is adjusted to correct the contact angle in a short direction of the raw bar 100. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a lapping apparatus for lapping a workpiece and a lapping method using the lapping apparatus.

  Recently, not only personal computers but also hard disk drive devices have been used as standard memories for video equipment and the like. Since this hard disk drive device has a recording area with a relatively large capacity compared to other recording devices, if you have one video device equipped with the hard disk drive device, it will take a longer time than before. Video images can be recorded. In television broadcasting, it has already been announced that it is possible to switch to terrestrial digital broadcasting that can transmit a large amount of information to users, and if there is one video device equipped with the hard disk drive device, it can be obtained by terrestrial digital broadcasting. It is possible to record as much information as possible.

  In light of these trends, it is desirable to increase the capacity of hard disk drive devices, but the technology called the horizontal recording method applied to current hard disk drive devices has already attempted to increase the capacity to near the limit. Therefore, the capacity cannot be increased further.

  Therefore, recently, in order to further increase the capacity of the hard disk, a recording technique called a vertical recording system has been proposed instead of the horizontal recording system. When this perpendicular recording method is employed in a hard disk drive device, magnetic paths are formed in the depth direction of the disk rather than in the horizontal direction of the recording surface of the hard disk, so that the magnetic domain can be narrowed. It is possible to increase the capacity as described above.

  By the way, in a hard disk drive device adopting a conventional horizontal recording system, a composite magnetic head including both a write element (for writing) and a read element (for reading) is used. In this composite type magnetic head, when mounted on a hard disk drive device, the above-mentioned write is performed so that information can be freely written on the recording surface of the hard disk and information can be read from the recording surface of the hard disk. Strict dimensional accuracy is imposed on both the dimension between the tip of the element and the recording surface of the hard disk and the dimension between the tip of the read element and the recording surface of the hard disk. For this reason, in the conventional composite magnetic head, the dimensions of the composite magnetic head are obtained by finishing with a lapping apparatus (see, for example, Patent Documents 1 to 4).

  Here, before describing the lapping performed to obtain the dimensions of the composite magnetic head, the manufacturing process of the composite magnetic head will be briefly described.

  In the first step of the manufacturing process of the composite magnetic head, first, a large number of two-dimensional composite magnetic heads having both a write element and a read element are generated on the wafer by a wafer process. At this time, a write element resistance element and a read element resistance element called ELG are embedded in the vicinity of the write element and the read element of each composite type magnetic head generated two-dimensionally (see, for example, Patent Document 5). . Since the resistance value of these resistance elements changes according to the amount of polishing when the composite magnetic head is lapped by lapping by a lapping device, the lapping device reads the resistance value of these resistance elements and wraps them. By accurately grasping the polishing amount, it is possible to perform an appropriate lapping process on the composite magnetic head.

  In the next second step, a plurality of two-dimensionally generated magnetic heads are cut into strips to generate a long row bar in which a plurality of composite magnetic heads are arranged in a line. In the next third step, the row bar is attached to a lapping apparatus, and lapping of a plurality of magnetic heads arranged in the row bar is performed at a time as a finishing process. At this time, when the resistance value of each of the read element resistance element and the write element resistance element generated on the wafer in the first step is read by the lapping device and the read value becomes a predetermined value, a desired finish dimension is obtained. Wrapping is stopped as it becomes. In the next fourth step, the row bar is cut, and a plurality of composite magnetic heads in the row bar are disassembled to obtain respective composite magnetic heads.

  Here, the configuration of a wrapping apparatus that wraps the row bar as the final finishing process in Step 3 will be described.

  1 to 5 are diagrams showing a configuration of a wrapping apparatus disclosed in Patent Document 1 and Patent Document 2. FIG.

  FIG. 1 shows an appearance of a wrapping apparatus 1 including a lap surface plate 10 and a lap base 11. FIG. 2 shows a wrap base 11 shown in FIG. An arm part 120 extending horizontally from the point 1210 and a lower part extending from the tip of the arm part 120, a work (in this example, since the work is a row bar, the work may be referred to as a row bar 100 in the following description), The configuration of the adapter 12 having a support portion 121 that supports the work 100 so that the lower surface of the work 100 is in contact with the lapping surface of the lapping surface plate 10 is shown. Further, FIG. 3 shows a view of the adapter 12 shown in FIGS. 1 and 2 as viewed from above. FIG. 4 shows a left / right difference correction mechanism that is also used as a load adjustment mechanism provided in the wrapping apparatus 1, and FIG. 5 shows a bend mechanism provided in the wrapping apparatus 1.

  The external appearance will be briefly described with reference to FIGS.

  A lapping apparatus 1 shown in FIGS. 1 to 5 is a lapping apparatus 1 for lapping a row bar 100, and a lapping surface plate 10 having a lapping surface that moves relative to the row bar 100 on an upper surface, and a bottom surface in contact with the lapping surface. A lap base 11 having 111, an arm part 120 supported by the lap base 11 at a predetermined support point 1210 (see FIG. 2) and extending horizontally from the support point 1210, and extending downward from the tip of the arm part 120. The adapter 12 includes a support portion 121 that supports the row bar 100 so that the lower surface of the row bar 100 is in contact with the lapping surface of the lapping surface plate 10. The adapter 12 is provided with a holder 1201 as shown in FIGS. 2 and 3, and the row bar 100 is adhered to the holder 1201 by adhesion.

  The support portion 121 is provided with a rotation mechanism so that the workpiece 100 can be moved closer to the lap surface plate 10 or the workpiece 100 can be moved away from the lap surface plate 10 by rotating the arm portion 120. ing. Before lapping is performed, the arm portion 120 is rotated and the row bar 100 is attached to the holder 1201 provided in the adapter 12, and then the arm portion 120 is rotated so that the row bar 100 is placed on the lapping surface of the lapping surface plate 10. Set. Although not shown, a resistance reading probe for reading the resistance value of the write element resistance element and the resistance value of the read element resistance element is also provided.

  Next, the structure of the wrapping apparatus 1 will be described in detail with reference to FIGS.

  The wrapping device 1 shown in FIGS. 1 to 5 is configured such that the lap base 11 is rotatably and swingably supported by a lap base support portion 13 (see FIG. 1) of the wrapping device 1 and the lap surface plate 10 is rotating. Even if the rotation of the lapping surface plate 10 is somewhat unstable, the parallelism between the lapping surface and the lapping surface of the lapping surface of the row bar 100 supported by the adapter 12 follows the lapping surface of the lapping surface plate 10. It has a structure that is always maintained.

  Further, a load adjusting mechanism 14 for adjusting the lapping load of the workpiece 100 by pressing the arm portion 120 from above so that lapping of the row bar 100 is suitably performed is provided. When a wrapping load is applied to the workpiece 100 via the adapter 12 by the load adjusting mechanism 14, the lapping surface of the row bar 100 reliably contacts the wrapping surface of the lap surface plate 10 and stable lapping is performed. In the lapping apparatus shown in FIGS. 1 to 5, the load adjusting mechanism 14 is arranged in a direction orthogonal to the direction in which the arm 120 shown in FIGS. 1 and 2 extends as shown in FIG. 4. By configuring with the three actuators 141 to 143, it is possible to correct the longitudinal inclination of the row bar 100 having the long shape shown in FIG.

  Further, in the lapping apparatus 1 shown in FIG. 1, in consideration of the fact that the row bar 100 has a long shape as shown in FIG. A bend correcting mechanism is provided so that the swell and the warp can be corrected when the warp occurs.

  Here, the bend correction mechanism shown in Patent Document 3 is adopted. 5 (a) and 5 (b) show an outline of the bend correcting mechanism of Patent Document 3, and each of the plurality of holes 1201h provided in the holder 1201 shown in FIG. 5 (a) is shown in FIG. By inserting the link members 36 and 38 shown in (b), the periphery of the portion inserted through the hole 1201h is deformed to correct partial warping and undulation of the surface to be wrapped.

  A holder 1201 to which the rover 100 is attached is attached to the tip of the arm 120 of the adapter 12 included in the wrapping apparatus having such a mechanism, and the arm 120 is rotated around the support portion 121 (see FIG. 2) to wrap the lap. The lapping surface of the row bar 100 is set at a position facing the lapping surface of the board 10.

  Further, when the wrapping load is adjusted from above the arm portion 12 by the load adjusting mechanism 14, the lapped surface of the row bar comes into contact with the wrapping surface of the lap surface plate 10 so that lapping is properly performed.

  After that, while the lapping platen 10 is rotated and lapping of the row bar 100 is being performed, the load adjusting mechanism 14 plays a role of a left-right difference correcting mechanism, and the inclination of the row direction of the row bar 100 is always set to lapping. The bend mechanism is adjusted so as to be parallel to the lapping surface of the board 10 and the swell and warp of the rover 100 are corrected.

  In addition to the adjustment of the load adjusting mechanism, the lap base 11 is supported by the lap base support portion 13 of the wrapping apparatus 1 so as to be rotatable and swingable as described above, and the wrapping surface of the workpiece 100 is always a lap surface plate. 10 is configured to follow the lapping surface 10, so that the lapping surface of the rover 100 is always parallel to the lapping surface of the lapping surface plate 10 even if the lapping progresses and the cross-sectional shape of the rover 100 changes. Wrapping is performed with high accuracy.

  Here, an outline of the strict dimensional accuracy imposed on the composite magnetic head described above will be described.

  FIG. 6 is a schematic view showing a cross section when the row bar 100 is cut in the short direction.

  FIG. 6 shows the configuration of one of the plurality of composite magnetic heads arranged in the row bar.

  Although not shown in FIG. 6, the write element and the read element are formed at positions deviated from each other as shown in FIG. 6, and the write element described above is provided in the vicinity of the write element WR of one of the composite magnetic heads. The above-described read element resistance element is provided in the vicinity of the other read element RD. Lapping is performed from the wrapping direction shown in FIG. 6 while the resistance values of these resistance elements are read by the wrapping apparatus 1 shown in FIGS. 1 to 5, so that the dimensions called MR-h shown in FIG. 6 and the neck height are called. The dimensions are within a predetermined tolerance range.

  In a hard disk drive device adopting a conventional horizontal recording system, the dimensional accuracy of the write element WR is sufficiently larger than that of the read element RD. Lapping was stopped when the resistance value was read and the resistance value of the read element resistance element reached a predetermined value. Even if the lapping is stopped when the resistance value of the resistance element for the read element reaches a predetermined value in this way, in the composite magnetic head used in the hard disk drive device adopting the horizontal recording system, the write element The dimension called the neck height is automatically within the tolerance range. In other words, the horizontal recording method is adopted even if the short direction of the lapping surface of the composite magnetic head (the direction in which the read element and the write element are aligned) is slightly inclined with respect to the lapping surface of the lapping platen. In the case of the composite type magnetic head used in the existing hard disk drive device, there was no particular problem.

  However, in the above-described perpendicular recording system, as the magnetic domain is narrowed as described above, not only the dimension called MR-h which is the element dimension of the read element but also the neck which is the element dimension of the write element. Strict dimensional accuracy is also imposed on the dimension called height.

For this reason, it is allowed that the short direction of the lapping surface of the composite magnetic head shown in FIG. Therefore, the lapping apparatus 1 described with reference to FIGS. 1 to 5 cannot wrap the composite magnetic head used in the hard disk drive apparatus adopting the perpendicular recording method.
Japanese Patent No. 3504105 Japanese Patent No. 3589546 Japanese Patent No. 3638815 JP-A-2005-339781 JP 2006-73088 A

  SUMMARY OF THE INVENTION An object of the present invention is to provide a lapping apparatus that can perform lapping processing of a composite head employed in a hard disk drive apparatus adopting a perpendicular recording method with high accuracy, and a lapping method using the lapping apparatus. .

The lapping apparatus of the present invention that achieves the above object is a lapping apparatus for lapping a workpiece,
A lapping surface plate having a lapping surface that moves relative to the workpiece on the top surface;
A lap base having a bottom surface in contact with the wrapping surface;
An arm portion that is supported by the lap base at a predetermined support point and extends horizontally from the support point, and extends downward from the end of the arm portion so that the lower surface of the work is in contact with the lapping surface. And a tilt mechanism that finely adjusts the contact angle of the work supported by the support portion to the lapping surface by finely adjusting the height of the support point of the adapter. It is provided with.

  According to the lapping apparatus of the present invention, the contact angle of the workpiece to the lapping surface of the lapping surface plate is finely adjusted by the tilt mechanism.

  As described above, in the composite magnetic head used in the hard disk drive device adopting the conventional horizontal recording method, only the read element existing on the surface to be wrapped of the workpiece is parallel to the lapping surface. However, in the magnetic head used in the hard disk drive device adopting the perpendicular magnetic recording method, both the read element and the write element should be infinitely parallel to the lapping surface of the wrap surface plate. A mechanism that can do this is required.

  Therefore, in the lapping apparatus of the present invention, the tilt mechanism is provided so that the contact angle of the work supported by the support portion with the tilt mechanism to the lapping surface can be finely adjusted. Both the read element and the write element existing on the wrapping surface can be kept infinitely parallel to the wrapping surface.

  Thus, if both the read element and the write element can be made parallel to the wrapping surface by the tilt mechanism, suitable wrapping can be performed for the composite magnetic head employed in the perpendicular recording system.

  Here, the lapping surface of the workpiece has a longitudinal direction in a second horizontal direction intersecting at right angles to the first horizontal direction in which the arm portion extends in a state where the workpiece is supported by the support portion. The tilt mechanism preferably has a long shape, and is a mechanism for finely adjusting the tilt of the wrapping surface of the workpiece with respect to the wrapping surface in the short direction.

  That is, as shown in FIG. 6, the read element dimensions (MR−) are obtained by finely adjusting the tilt of the row bar with respect to the wrapping surface in the short direction with the tilt mechanism in which the write element and the read element are arranged. h) and the dimension (neck height) of the light element can be both within the tolerance range.

Wherein the wrap base comprises a pivot for supporting the support point of the adapter;
The tilt mechanism is a linear motion actuator having a body and a rod whose amount of extension from the body is adjusted according to a control signal, and the body of the linear motion actuator is fixed to the arm portion and the linear motion actuator The tip of the rod may be in contact with the pivot, and the height of the support point may be finely adjusted according to the amount of feeding of the rod.

  Then, for example, the height of the support point 1210 of the arm portion 120 extending in the first direction shown in FIG. 2 is adjusted, and the workpiece (row bar) 100 on the side opposite to the support point 1210 is inclined in the short direction. Is adjusted.

In addition to the tilt mechanism, the second horizontal wrapping load distribution is adjusted by a plurality of actuators arranged in the second horizontal direction that press the arm portion from above as in the conventional case. Therefore, it is good to have a left-right difference correction mechanism that adjusts the inclination of the wrapping surface of the workpiece in the longitudinal direction with respect to the wrapping surface,
The lower surface has a holder fixed to the workpiece, and the workpiece is fixed to the holder, and the holder is supported by the support portion to be supported by the support portion with the holder interposed therebetween. And the holder preferably has a bend correction mechanism for correcting the bending of the workpiece fixed to the lower surface of the holder,
Furthermore, it is preferable that both the bend correcting mechanism and the left / right difference correcting mechanism are provided.

As shown in FIGS. 1 to 5, the work is a row bar, and a write element in charge of recording information on the magnetic recording medium and a read element in charge of reading information recorded on the magnetic recording medium include the above work. These write elements and read elements are arranged in the longitudinal direction of the workpiece, and the resistance value of the workpiece changes with the progress of the wrapping of the write element. When the resistance element for the write element and the resistance element for the read element whose resistance value changes in accordance with the progress of the wrapping of the read element are arranged in plural in the longitudinal direction of the workpiece,
The wrapping device detects the resistance value of the write element resistance element and the resistance value of the read element resistance element, and controls the tilt mechanism based on these resistance values. It is preferable to provide a control device that finely adjusts the inclination of the short side of the surface with respect to the lapping surface.

  Then, the control device automatically finely adjusts the inclination of the wrapping surface of the workpiece with respect to the wrapping surface in the short direction so that the posture of the workpiece is adjusted to be infinitely parallel to the wrapping surface.

  Further, the tilt mechanism may be provided with a control device that finely adjusts the tilt of the wrapping surface of the workpiece with respect to the wrapping surface in the short direction by controlling the tilt mechanism according to a setting value by the user. good.

The wrapping method performed by the wrapping device on the workpiece is as follows:
A lap platen having a wrapping surface that moves relative to the workpiece on the top surface, a lap base having a bottom surface that contacts the wrapping surface, and an arm portion that is supported by the lap base at a predetermined support point and extends horizontally from the support point And an adapter having a support portion that extends downward from the tip of the arm portion and supports the workpiece so that the lower surface of the workpiece is in contact with the lapping surface, and the height of the support point of the adapter is finely adjusted. By using a lapping apparatus having a tilt mechanism that finely adjusts the contact angle of the workpiece supported by the support portion to the lapping surface, a lapping method for lapping the workpiece supported by the support portion. There,
The workpiece is lapped while finely adjusting the contact angle of the lapping surface of the workpiece to the lapping surface by the tilt mechanism.

In addition, the wrapping device has a load adjustment mechanism for adjusting the wrapping load of the work by pressing the arm part from above,
When adjusting the contact angle by the tilt mechanism, it is preferable to temporarily reduce the wrapping load.

  When the contact angle is adjusted by the tilt mechanism, if the wrapping load of the workpiece is still applied, the lap platen or the workpiece being wrapped may be broken when the tilt is adjusted by the tilt mechanism. .

  If the contact angle is adjusted by the tilt mechanism after the lapping load is once reduced as described above, the fear is eliminated.

For the same reason, the lapping apparatus has a speed adjusting means for adjusting the relative movement speed of the lap surface plate with respect to the workpiece,
When the contact angle is adjusted by the tilt mechanism, the relative movement speed of the lap platen may be temporarily reduced or the relative movement may be temporarily stopped.

  Also, the tilting mechanism allows the contact angle of the wrapping surface of the workpiece to the wrapping surface to be adjusted stepwise by an adjustment amount exceeding 0 ° and not more than 0.01 ° per time. Is good.

  If the contact angle is changed too rapidly, the rotating lap platen may be damaged. Therefore, the contact angle can be adjusted with an adjustment amount of more than 0 ° and less than 0.01 ° at a time. By doing so, the lap platen is not damaged. Further, if the adjustment can be performed step by step with an adjustment amount of 0.01 degrees or less as described above, the tilt angle of the workpiece with respect to the lapping surface can be finely adjusted with high accuracy.

Here, the work is formed such that the write element responsible for recording information on the magnetic recording medium and the read element responsible for reading information recorded on the magnetic recording medium are offset from each other in the short direction of the work. In addition, a plurality of these write elements and read elements are arranged in the longitudinal direction of the work, and the work further includes a resistance element for a write element and a read element whose resistance value changes according to the progress of lapping of the write element. When the resistance elements for the read element whose resistance value changes according to the progress of lapping of each are arranged in a plurality in the longitudinal direction of the workpiece,
By detecting the resistance value of the write element resistance element and the resistance value of the read element resistance element and controlling the tilt mechanism based on these resistance values, the tilt mechanism has a short wrapping surface of the workpiece. It is better to finely adjust the inclination with respect to the lapping surface in the hand direction.

  According to the present invention, a lapping apparatus and a lapping method using the lapping apparatus that can perform lapping processing of a composite head employed in a hard disk drive apparatus adopting a perpendicular recording method with high accuracy are realized.

  Embodiments of the present invention will be described below.

  FIG. 7 is a diagram showing a configuration of a lap base 11a and an adapter 12a included in the lapping apparatus 1a according to the embodiment of the present invention.

  As shown in FIG. 7, in addition to the conventional configuration, a linear actuator 130 is provided on the support 121 as a tilt mechanism.

  The lap base 11a includes a pivot PB that supports the support point 1210a of the adapter 12a, and the tilt mechanism 13 is a linear motion actuator 130 having a body and a rod whose amount of extension from the body is adjusted according to a control signal. Thus, the body of the linear actuator 130 is fixed to the arm portion 120a, the rod tip of the linear actuator 130 is in contact with the pivot PB, and the height of the support point 1210a is finely adjusted in accordance with the amount of rod feeding. In this example, an optical flat disclosed in Patent Document 1 is used before starting lapping by using a linear actuator 130 of MSD-23D23H10 (resolution 1 μm, stroke 10 mm) manufactured by Chiba Seimitsu Co., Ltd. The stroke amount of the linear actuator 130 is determined and fixed so that the lapping surface of the row bar 100 and the lapping surface plate are parallel to each other. When the linear actuator 130 is operated from this fixed state and the rod is extended to increase the height of the support point 1201a by 200 μm, the difference in height between the read element RD and the write element WR arranged in the short direction in the rover. Can be kept within 10 nm. Since the linear actuator 130 can adjust 1 μm as the minimum resolution, the parallelism between the read element RD and the write element WR can be increased to a minimum height difference of 0.05 nm.

  That is, with the configuration shown in FIG. 7, the inclination in the short direction shown in FIG. 6 is accurately adjusted by the linear actuator 130, and both the read element RD and the write element WR have good parallelism to the lapping surface. can get.

  FIG. 8 is a diagram illustrating the configuration of the control device 1000a included in the wrapping device 1a.

  A control apparatus 1000a shown in FIG. 8 includes a CPU 1001a, and the CPU 1001a executes processing according to a processing procedure of a program described in the memory 1002a to drive each adjustment mechanism to each control unit.

  In the control device 1000a shown in FIG. 8, a common mechanism for controlling the driving of a motor that rotates the lapping plate 10 provided in the lapping device 1a and for pouring a slurry liquid as a polishing liquid onto the lapping platen. A control unit 1003a is provided. The common mechanism control unit 1003a includes a driver for driving a motor in the surface plate rotation mechanism 170a, a drive unit for driving an electromagnetic valve in the slurry switching mechanism 160, and the like. When an instruction is given to the driver or driving unit provided in the control unit 1003a, the motor in the surface plate rotating mechanism 170 rotates to rotate the lap surface plate 10 and the electromagnetic valve in the slurry switching mechanism 160 is opened to open the lap constant. Slurry is poured onto the board 10 and lapping is started.

  When the lapping platen 10 starts rotating and lapping of the row bar 100 is started, the resistance values of both the read element resistance element and the write element resistance element in the row bar are controlled by the ELG resistance measuring device 1003a under the control of the CPU 1001a. Starts reading.

  The CPU 1001a in the control device 1000a causes each of the resistance elements provided in each of the plurality of composite magnetic heads arranged in the rover by causing the noise abnormality removing unit 1004a in the wrapping device 1a to remove noise during reading. When the correct resistance values are read one after another, generation of a bar shape is started by image processing based on a program in the memory 1001a. Based on the bar shape generation result, the CPU 1001a instructs the left / right difference correction control unit 1005a to cause the left / right difference correction mechanism 14 to adjust the left / right difference in the longitudinal direction of the row bar, or instructs the bend mechanism control unit 1007a. The bend mechanism (see FIG. 5) adjusts the swell of the rover and the warp (corresponding to the bending referred to in the present invention) or instructs the tilt mechanism control unit 1006a to make the tilt mechanism 130 in the short direction of the rover. Adjust the tilt angle.

  FIG. 9 is a diagram illustrating the transition of the shape change state when the row bar 100 is wrapped by the control units included in the control device 1000a of FIG.

  On the right side of FIG. 9, under the control of each control unit, before and after adjustment is performed by the left / right difference correction mechanism 14, the bend mechanism (see FIG. 5) and the tilt mechanism 130, and after correction is performed by any mechanism. The cross-sectional shape of the row bar 100, which is a workpiece, is shown.

  The shape of the row bar 100 before wrapping shown at the top was a trapezoidal shape, but finally the surface to be wrapped of a composite magnetic head that is wrapped in a proper square shape and includes a read element RD and a write element WR Is adjusted to be infinitely parallel to the wrapping surface.

  A change state of the shape of the row bar 100 will be described from the upper side to the lower side of FIG. 9.

  First, the CPU 1001a included in the control device 1000a generates a bar shape from the read element resistance value read by the ELG resistance measuring device 150 when lapping is started, and creates the top bar shape of FIG. 9 as an image. . The right side of the top diagram in FIG. 9 shows what the shape of the row bar is before wrapping.

  Based on the fact that the shape of the row bar is a trapezoidal shape shown in the upper right of FIG. 9, the control device 1000a first instructs the left / right difference correction control unit 1005a to adjust the left / right difference correction mechanism 14 to adjust the inclination in the longitudinal direction. At the same time, the bend control unit 1007a is instructed to cause the bend mechanism (see FIG. 5) to adjust swell and warp. Then, the shape of the lapping surface of the row bar 100 becomes flatter than before the start as shown in the second from the top right. Here, when only the bend mechanism is driven to further adjust the swell and warp, lapping is performed so that a predetermined difference is formed between the read element RD and the write element WR as shown in the second from the bottom. When this difference becomes parallel, the tilt mechanism 130 is adjusted so that the height of the write element WR is finally reached so that both the read element RD and the write element WR are parallel to the lapping surface. Wrapping is performed.

  Since the lapping was completed at the second position from the bottom in FIG. 9, the lapping of the composite magnetic head used in the hard disk drive device adopting the perpendicular recording method could not be performed. By adding a mechanism, lapping is performed up to the lowest position, so that lapping of a composite magnetic head used in a hard disk drive apparatus adopting a perpendicular recording system can be accurately performed.

  In the present embodiment, the above-mentioned linear motion actuator 130 that is a tilt mechanism adjusts the contact angle of the wrapping surface of the row bar 100 to the wrapping surface every 3 seconds by a constant minute angle of 0.005 degrees. In stepwise adjustment. If adjustment can be made with fine resolution in this way, lapping is performed so that both the read element RD and the write element WR of the lapping surface are in parallel with the lapping surface of the lapping surface plate as much as possible. Can be done. Further, if the contact angle can be adjusted stepwise by the fine tilt mechanism in this way, stable lapping can be performed without damaging the lap platen.

  Further, in order not to damage the lap platen, the load acting mechanism described with reference to FIG. 4 is further used to reduce the load applied to the workpiece 100, and then the linear motion actuator 130 that is a tilt mechanism is operated. The contact angle may be adjusted. Furthermore, in order not to damage the lap platen 10, when adjusting the contact angle by the tilt mechanism 130, the driver in the common mechanism control unit 1003a is instructed to reduce the rotation speed of the motor in the platen rotation mechanism. It is good to have a configuration in which the rotation of the motor is stopped.

  Further, as shown in FIG. 8, since the control unit 1000a includes the operation unit OP1, it is more preferable that the contact angle by the tilt mechanism 130 is arbitrarily set by the operation unit OP1 to perform lapping. Then, for example, when the operator checks the parallelism between the read element RD and the write element WR with a CCD camera or the like and determines that further finishing is necessary, the contact angle is set with the operation unit OP1. Thus, the wrapping apparatus 1 can be made to perform a wrapping process of a necessary amount.

  As described above, a wrapping apparatus and a wrapping method using the wrapping apparatus that realize high-precision lapping of a composite head employed in a hard disk drive apparatus employing a perpendicular recording method are realized.

  Various forms of the present invention will be additionally described below.

(Appendix 1)
A lapping device for lapping a workpiece,
A lapping surface plate having a lapping surface that moves relative to the workpiece on the top surface;
A lap base having a bottom surface in contact with the wrapping surface;
An arm portion supported by the lap base at a predetermined support point and extending horizontally from the support point;
An adapter having a support portion that extends downward from the tip of the arm portion and supports the workpiece so that the lower surface of the workpiece is in contact with the wrapping surface, and fine adjustment of the height of the support point of the adapter By doing so, the lapping apparatus is provided with a tilt mechanism that finely adjusts the contact angle of the work supported by the support portion to the lapping surface.

(Appendix 2)
A long shape in which a lapping surface of the workpiece has a longitudinal direction in a second horizontal direction perpendicular to the first horizontal direction in which the arm portion extends in a state where the workpiece is supported by the support portion. The wrapping apparatus according to appendix 1, wherein the tilt mechanism is a mechanism for finely adjusting an inclination of the wrapping surface of the workpiece in a short direction with respect to the wrapping surface.

(Appendix 3)
The wrap base includes a pivot that supports the support point of the adapter;
The tilt mechanism is a linear motion actuator having a body and a rod whose amount of extension from the body is adjusted according to a control signal, and the body of the linear motion actuator is fixed to the arm portion, and the linear motion actuator The lapping apparatus according to appendix 2, wherein the rod tip is in contact with the pivot and finely adjusts the height of the support point in accordance with the amount of feeding of the rod.

(Appendix 4)
The longitudinal direction of the surface to be wrapped of the workpiece, comprising a plurality of actuators arranged in the second horizontal direction, pressing the arm portion from above, and adjusting the lapping load distribution in the second horizontal direction The wrapping apparatus according to appendix 2, further comprising a left-right difference correction mechanism that adjusts a tilt with respect to the wrapping surface.

(Appendix 5)
There is a holder to which the work is fixed on the lower surface, and the work is supported by the support part with the holder interposed between the holder and the holder supported by the support part. And
The lapping apparatus according to appendix 2, wherein the holder has a bend correcting mechanism that corrects the bending of a workpiece fixed to the lower surface of the holder.

(Appendix 6)
In the work, a write element in charge of recording information on the magnetic recording medium and a read element in charge of reading information recorded on the magnetic recording medium are formed at positions offset from each other in the short direction of the work. In addition, a plurality of these write elements and read elements are arranged in the longitudinal direction of the workpiece, and the workpiece further includes a resistance element for write elements and a wrapping of the read elements, the resistance value of which varies with the progress of the wrapping of the write elements. A plurality of read element resistance elements whose resistance values change in accordance with the progress of the workpieces in the longitudinal direction of the workpiece,
The resistance value of the resistance element for the write element and the resistance value of the resistance element for the read element are detected, and the tilt mechanism is controlled based on these resistance values. The wrapping device according to claim 2, further comprising a control device that finely adjusts the inclination of the short direction of the wrapping surface with respect to the wrapping surface.

(Appendix 7)
The tilt mechanism includes a control device that finely adjusts the tilt of the wrapping surface of the workpiece with respect to the wrapping surface in the short direction by controlling the tilt mechanism in accordance with a setting value set by a user. The wrapping apparatus according to Supplementary Note 2, which is a feature.

(Appendix 8)
A lap platen having a wrapping surface that moves relative to the workpiece on the top surface, a lap base having a bottom surface that contacts the wrapping surface, and an arm portion that is supported by the lap base at a predetermined support point and extends horizontally from the support point And an adapter having a support portion that extends downward from the tip of the arm portion and supports the workpiece so that the lower surface of the workpiece is in contact with the wrapping surface, and the height of the support point of the adapter. Wrapping to wrap the work supported by the support using a wrapping device having a tilt mechanism that finely adjusts the contact angle of the work supported by the support to the wrapping surface by fine adjustment. A method,
A lapping method comprising lapping a workpiece while finely adjusting a contact angle of a lapping surface of the workpiece to the lapping surface by the tilt mechanism.

(Appendix 9)
The wrapping device has a load adjustment mechanism that adjusts the wrapping load of the workpiece by pressing the arm part from above,
The lapping method according to appendix 8, wherein a lapping load is temporarily reduced when the contact angle is adjusted by the tilt mechanism.

(Appendix 10)
The wrapping device has speed adjusting means for adjusting the relative movement speed of the lap surface plate with respect to the workpiece,
The lapping method according to appendix 8, wherein when the contact angle is adjusted by the tilt mechanism, the relative movement speed of the lap platen is temporarily reduced or the relative movement is temporarily stopped.

(Appendix 11)
Supplementary note 8 wherein the tilt mechanism adjusts the contact angle of the wrapping surface of the workpiece to the wrapping surface stepwise with an adjustment amount exceeding 0 ° and not more than 0.01 ° per time. The wrapping method described.

(Appendix 12)
In the work, a write element in charge of recording information on the magnetic recording medium and a read element in charge of reading information recorded on the magnetic recording medium are formed at positions offset from each other in the short direction of the work. In addition, a plurality of these write elements and read elements are arranged in the longitudinal direction of the workpiece, and the workpiece further includes a resistance element for write elements and a wrapping of the read elements, the resistance value of which varies with the progress of the wrapping of the write elements. A plurality of read element resistance elements whose resistance values change in accordance with the progress of the workpieces in the longitudinal direction of the workpiece,
The resistance value of the resistance element for the write element and the resistance value of the resistance element for the read element are detected, and the tilt mechanism is controlled based on these resistance values. The wrapping method according to appendix 8, wherein an inclination of the short direction of the wrapping surface to the wrapping surface is finely adjusted.

It is a figure which shows the structure of the conventional wrapping apparatus. It is a figure which shows the structure of the conventional wrapping apparatus. It is a figure which shows the structure of the conventional wrapping apparatus. It is a figure which shows the structure of the conventional wrapping apparatus. It is a figure which shows the structure of the conventional wrapping apparatus. 2 is a schematic diagram showing a cross section of a row bar 100. FIG. It is a figure which shows the structure of the lap base 11a and the adapter 12a with which the lapping apparatus 1a which is one Embodiment of this invention is provided. It is a figure explaining the structure of the control apparatus 1000a with which the lapping apparatus 1a is provided. It is a figure which shows the transition of the change state of a shape when a row bar is wrapped by each control part with which the control apparatus 1000a is provided.

Explanation of symbols

1 1a Wrapping device
10 Lap surface plate
100 Rover (work)
11 11a Lap base 111 Bottom surface 12 12a Adapter 120 Arm part 1201 Holder 1201h Hole 13 Support part 130 Direct acting actuator (tilt mechanism)
14 Load mechanism

Claims (10)

A lapping device for lapping a workpiece,
A lapping surface plate having a lapping surface that moves relative to the workpiece on the top surface;
A lap base having a bottom surface in contact with the wrapping surface;
An arm portion supported by the lap base at a predetermined support point and extending horizontally from the support point;
An adapter having a support portion that extends downward from the tip of the arm portion and supports the workpiece so that the lower surface of the workpiece is in contact with the wrapping surface, and fine adjustment of the height of the support point of the adapter By doing so, the lapping apparatus is provided with a tilt mechanism that finely adjusts the contact angle of the work supported by the support portion to the lapping surface.   A long shape in which a lapping surface of the workpiece has a longitudinal direction in a second horizontal direction perpendicular to the first horizontal direction in which the arm portion extends in a state where the workpiece is supported by the support portion. The wrapping apparatus according to claim 1, wherein the tilt mechanism is a mechanism for finely adjusting an inclination of the wrapping surface of the workpiece in a short direction with respect to the wrapping surface. The wrap base includes a pivot that supports the support point of the adapter;
The tilt mechanism is a linear motion actuator having a body and a rod whose amount of extension from the body is adjusted according to a control signal, and the body of the linear motion actuator is fixed to the arm portion, and the linear motion actuator 3. A lapping apparatus according to claim 2, wherein a tip of said rod is in contact with said pivot to finely adjust the height of said support point according to the amount of feeding of said rod. In the work, a write element in charge of recording information on the magnetic recording medium and a read element in charge of reading information recorded on the magnetic recording medium are formed at positions offset from each other in the short direction of the work. In addition, a plurality of these write elements and read elements are arranged in the longitudinal direction of the workpiece, and the workpiece further includes a resistance element for write elements and a wrapping of the read elements, the resistance value of which varies with the progress of the wrapping of the write elements. A plurality of read element resistance elements whose resistance values change in accordance with the progress of the workpieces in the longitudinal direction of the workpiece,
The resistance value of the resistance element for the write element and the resistance value of the resistance element for the read element are detected, and the tilt mechanism is controlled based on these resistance values. The wrapping apparatus according to claim 2, further comprising a control device that finely adjusts an inclination of the short direction relative to the wrapping surface.   The tilt mechanism includes a control device that finely adjusts the tilt of the wrapping surface of the workpiece with respect to the wrapping surface in the short direction by controlling the tilt mechanism in accordance with a setting value set by a user. The wrapping apparatus according to claim 2, wherein A lap platen having a wrapping surface that moves relative to the workpiece on the top surface, a lap base having a bottom surface that contacts the wrapping surface, and an arm portion that is supported by the lap base at a predetermined support point and extends horizontally from the support point And an adapter having a support portion that extends downward from the tip of the arm portion and supports the workpiece so that the lower surface of the workpiece is in contact with the wrapping surface, and the height of the support point of the adapter. Wrapping to wrap the work supported by the support using a wrapping device having a tilt mechanism that finely adjusts the contact angle of the work supported by the support to the wrapping surface by fine adjustment. A method,
A lapping method comprising lapping a workpiece while finely adjusting a contact angle of a lapping surface of the workpiece to the lapping surface by the tilt mechanism. The wrapping device has a load adjustment mechanism that adjusts the wrapping load of the workpiece by pressing the arm part from above,
The lapping method according to claim 6, wherein the lapping load is temporarily reduced when the contact angle is adjusted by the tilt mechanism. The wrapping device has speed adjusting means for adjusting the relative movement speed of the lap surface plate with respect to the workpiece,
The lapping method according to claim 6, wherein when the contact angle is adjusted by the tilt mechanism, the relative movement speed of the lap surface plate is temporarily reduced or the relative movement is temporarily stopped.   The contact angle of the wrapping surface of the workpiece to the wrapping surface is adjusted stepwise by an adjustment amount of more than 0 ° and not more than 0.01 ° by the tilt mechanism. 6. A wrapping apparatus according to 6. In the work, a write element in charge of recording information on the magnetic recording medium and a read element in charge of reading information recorded on the magnetic recording medium are formed at positions offset from each other in the short direction of the work. In addition, a plurality of these write elements and read elements are arranged in the longitudinal direction of the workpiece, and the workpiece further includes a resistance element for write elements and a wrapping of the read elements, the resistance value of which varies with the progress of the wrapping of the write elements. A plurality of read element resistance elements whose resistance values change in accordance with the progress of the workpieces in the longitudinal direction of the workpiece,
The resistance value of the resistance element for the write element and the resistance value of the resistance element for the read element are detected, and the tilt mechanism is controlled based on these resistance values. The wrapping method according to claim 6, further comprising: finely adjusting an inclination of the short direction relative to the wrapping surface.

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