JP2008180171A - Micro pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a low cost micro pump of easy assembly capable of preventing liquid leak during drive stop. <P>SOLUTION: The micro pump 100 is provided with a vibration plate 210, a suction and delivery side case 200, a delivery side valve seat 400 including a delivery port 320 and a suction side valve seat 330 including a suction port 310, a suction side check valve 500 arranged to block and open the suction port 310 and put between the vibration plate 210 and the suction side valve seat 330, and a delivery side check valve 600 arranged to block and open the delivery port 320 and put between the suction and delivery side case 330 and the delivery side valve seat 400. A surface of the suction side valve seat 330 in the suction side check valve 500 side and a surface of the delivery side valve seat 400 in the delivery side check valve 600 side are formed in such a manner that the same are depressed in a center part side of the suction side check valve 500 or the delivery side check valve 600 and that the same stick to circumference parts of the suction side check valve 500 and the delivery side check valve 600 respectively by elastic deformation of the suction side check valve 500 and the delivery side check valve 600. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention generally relates to a micropump, and more particularly to a micropump that discharges a minute flow rate.

  In general, when a micropump is used in a field such as a cooling device, the micropump is designed to ensure a certain flow rate. As the size of the piezoelectric element used for the diaphragm for driving the micropump, generally, a piezoelectric element having a diameter of about 20 mm or more is used. In many cases, a commercial AC power source is used as the power source. In an example of an actual product of such a micro pump, the micro pump has a flow rate of about 36 mL (milliliter) per minute (about 10 μL (microliter) per cycle of AC voltage) driven at 60 Hz. . Such micropumps are used in various fields, but when handling a small amount of chemicals in the medical or fragrance fields, the flow rate to be managed is further reduced, and it is required to control the flow rate in units of 1 μL. Is done. Therefore, it is important that there is no liquid leakage when the micropump is stopped.

  FIG. 17 is a diagram showing an entire cross section of a micro pump as an example of a conventional micro pump.

  As shown in FIG. 17, the conventional micropump 900 vibrates the diaphragm 921 that is bonded to the piezoelectric element 923 and forms the bottom surface of the pump chamber 920 by applying an alternating voltage to the piezoelectric element 923, The volume in the pump chamber 920 is changed. The pump chamber 920 is a space that is formed in the recess of the case 930, fluid is sucked in through the suction side check valve 940, and fluid is discharged through the discharge side check valve 950. The suction-side check valve 940 and the discharge-side check valve 950 are umbrella-shaped valves that are shaped like an open umbrella. A head portion 941 of the suction side check valve 940 and a head portion 951 of the discharge side check valve 950 have a flat shape, and a leg portion 942 of the suction side check valve 940 and a leg portion 952 of the discharge side check valve 950 are Each valve is supported so that it does not fall out from the case 930 which is formed in a spherical shape and constitutes the pump chamber 920. There is a space between the top 943 of the head 941 of the suction side check valve 940 and the diaphragm 921 and between the top 953 of the head 951 of the discharge side check valve 950 and the wall surface forming the discharge pipe 910. Is provided. The liquid 902 stored in the liquid tank 901 of the micro pump 900 increases the volume of the pump chamber 920 due to the vibration of the vibration plate 921, and a gap is formed between the suction side check valve 940 and the suction port 931. And flows into the pump chamber 920 through the suction port 931. Further, the liquid flowing into the pump chamber 920 is discharged when the volume of the pump chamber 920 is reduced by the vibration of the diaphragm 921 and a gap is formed between the discharge side check valve 950 and the discharge port 932. The liquid flows out from the inside of the pump chamber 920 to the discharge pipe 910, and is discharged to the outside through the discharge end 911.

  However, in the micropump 900, since the umbrella-type valve only blocks the hole lightly, it is easy to apply pressure from the suction side when the piezoelectric element stops vibration and the pump stops driving. Liquid will come out.

  FIG. 18 is a diagram illustrating a cross section of the small pump valve and the entire small pump described in Japanese Patent Laid-Open No. 2000-274373 (Patent Document 1).

  As shown in FIGS. 18A and 18B, the discharge-side check valve 960 (FIG. 18B) used in the small pump 901 described in Japanese Patent Application Laid-Open No. 2000-274373 (Patent Document 1) and the related art. The check valve 950 (FIG. 18A) is an umbrella type valve that is shaped like an open umbrella. In the check valve 960, the upper surface of the umbrella portion 961 and the shaft portion 962 are used. Is smaller than the angle formed by the umbrella portion 941 and the shaft portion 942 in the suction side check valve 940 (FIG. 18C), and the thickness of the umbrella portion 961 is larger than the thickness of the umbrella portion 941. . In this manner, the bottom part of the umbrella-type valve is configured such that the peripheral part is lowered from the shaft side, and the peripheral part of the umbrella-type valve is pressed against the valve seat part. In this way, leakage is prevented by requiring a force to open the valve. Other configurations of the small pump 901 are the same as those of the micro pump 900.

  FIG. 19 is a view showing a cross section of a small pump described in Japanese Patent Laid-Open No. 2000-274374 (Patent Document 2).

As shown in FIG. 19, in the small pump 902, in addition to the suction side check valve 940 and the discharge side check valve 960, a shutoff valve 970 is further provided on the discharge end 911 side of the discharge side check valve 960. Prevents leakage. Other configurations of the small pump 902 are the same as those of the micro pump 900.
JP 2000-274373 A JP 2000-274374 A

  However, the umbrella-type valve used in the conventional micropump 900 and the small pumps disclosed in JP 2000-274373 A (Patent Document 1) and JP 2000-274374 A (Patent Document 2) is the head of the valve. Since the tip of the leg, which is the opposite side of the part, has a spherical shape or the like and is fitted into the hole, it is difficult to remove the valve from the mold after molding. Also, when attaching the valve to the pump, a force is required to fit the round protrusion into the hole.

  Further, in the small pump described in Japanese Patent Application Laid-Open No. 2000-274374 (Patent Document 2), the number of valves increases, so that the structure becomes complicated and large, and it becomes difficult to assemble the pump or the cost increases. There are issues such as.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a micropump that is inexpensive and easy to assemble and can prevent liquid leakage when driving is stopped.

  A micropump according to the present invention has a first wall portion that forms a flow path, a discharge port that discharges liquid into the flow path, and at least one inlet / outlet of a suction port that sucks liquid into the flow path. A second wall portion and a valve body that is disposed so as to be able to close or open the entrance and that is sandwiched between the first wall portion and the second wall portion, the valve body side of the second wall portion This surface is formed so as to be in close contact with the peripheral portion of the valve body by being dented on the central portion side of the valve body and elastically deforming the valve body.

  The valve body is disposed between the first wall portion and the second wall portion so that the valve body side surface of the second wall portion is in close contact with the peripheral portion of the valve body due to elastic deformation of the valve body. As a result, the shielding power of the valve body can be increased.

  In addition, by arranging the valve body between the first wall portion and the second wall portion, the round protrusion at the tip of the valve body, which has been conventionally provided to hold the valve body, is unnecessary. For example, it is possible to use a valve body that is easy to manufacture, such as a flat valve or a thin film valve.

  By doing so, it is possible to provide a micropump that is inexpensive, easy to assemble, and can prevent liquid leakage when driving is stopped.

  In the micropump according to the present invention, it is preferable that the second wall portion facing the first wall portion forms a concave surface.

  By doing in this way, it becomes easy to produce the 2nd wall part recessed at the center part side of the valve body.

  In the micropump according to the present invention, the concave surface of the second wall portion is preferably formed in a spherical shape.

  By doing in this way, it becomes easy to contact | adhere the 2nd wall part to the peripheral part of a valve body.

  In the micropump according to the present invention, the concave surface of the second wall is preferably formed in a mortar shape.

  By doing in this way, it becomes very easy to form a concave surface in the 2nd wall part.

  In the micropump according to the present invention, the valve body preferably has a protrusion for contacting the first wall portion.

  By doing so, the valve body can be easily held between the first wall portion and the second wall portion. For example, when the first wall portion is a diaphragm, the valve body can be elastically deformed without disturbing the vibration of the diaphragm.

  In the micropump according to the present invention, the valve body is preferably a thin film.

  By doing in this way, a valve body can be produced, without requiring a metal mold | die.

  In the micropump according to the present invention, the valve body preferably has a first wall portion and / or a positioning portion for determining a positional relationship between the second wall portion and the valve body.

  By doing in this way, the position of a valve body can be determined and fixed easily.

  In the micropump according to the present invention, the first wall portion preferably has a positioning portion for determining the positional relationship between the first wall portion and the valve body.

  By doing in this way, the position of a valve body can be determined and fixed easily.

  In the micropump according to the present invention, it is preferable that the second wall portion has a positioning portion for determining the positional relationship between the second wall portion and the valve body.

  By doing in this way, the position of a valve body can be determined and fixed easily.

  In the micropump according to the present invention, the first wall portion has a convex portion, and the valve body is sandwiched between the convex portion of the first wall portion and the second wall portion. Is preferred.

  By doing in this way, even when the projection is not formed on the valve body, the valve body can be easily sandwiched and held between the first wall portion and the second wall portion.

  As described above, according to the present invention, it is possible to provide a micropump that is inexpensive, easy to assemble, and can prevent liquid leakage when driving is stopped.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a cross-sectional view showing an entire micro pump as a first embodiment of the present invention.

  As shown in FIG. 1, the micropump 100 includes a liquid tank 101, a pump chamber 110 as a flow path, a suction port 310 for sucking liquid from the outside into the pump chamber 110, and a liquid flow in the suction port 310. A suction side check valve 500 as a valve body for adjusting the pressure, a discharge port 320 for discharging liquid from the inside of the pump chamber 110 to a discharge pipe 202 as a flow path outside the pump chamber 110, and liquid at the discharge port 320 The discharge side check valve 600 as a valve body for adjusting the flow of the gas, and the diaphragm 210 for changing the volume of the pump chamber 110 as the first wall portion, A top 503 is incorporated in the pump chamber 110 as a protrusion formed on the head 501 so as to come into contact with the diaphragm 210.

  A space until the liquid is sucked through the suction-side check valve 500 and the liquid is discharged through the discharge-side check valve 600 is the pump chamber 110, and the suction-side check valve 500 and the discharge-side check valve Reference numerals 600 are respectively attached to a suction side valve seat 330 and a discharge side valve seat 400 formed in a housing 300 as a second wall portion. The bottom surface of the pump chamber 110 is formed by a diaphragm 210. An end portion of the diaphragm 210 is inserted and fixed between the housing 300 and the diaphragm side case 212. A piezoelectric element 211 is bonded to the lower surface of the vibration plate 210. A space is provided below the piezoelectric element 211, and the piezoelectric element 211 can vibrate up and down. A suction / discharge side case 200 is attached to an upper portion of the housing 300, and a discharge pipe 202 is formed inside the suction / discharge side case 200. An 8-shaped O-ring 103 is disposed and sealed between the housing 300 and the suction / discharge-side case 200, and an O-ring 104 is disposed and sealed between the housing 300 and the diaphragm-side case 212. .

  The suction-side check valve 500 and the discharge-side check valve 600 have a longitudinal section including the valve shaft, a head having a relatively large cross-sectional area, and a leg portion having a relatively small cross-sectional area, and an open umbrella. It has a shape like

  The suction-side check valve 500 is incorporated in the pump chamber 110 by attaching the flat portion 502 to the housing 300 with the flat head portion 501 facing downward and the rod-shaped leg portion 502 facing upward as a positioning portion. It is. The leg 502 has a substantially flat tip, and is received and held in the recess 332 as a positioning portion of the suction side valve seat 330 formed in the housing 300. A top portion 503 as a protrusion of the head portion 501 of the suction-side check valve 500 is a protrusion formed to protrude from the head portion 501, and is in contact with the diaphragm 210.

  The discharge-side check valve 600 has a flat head 601 facing upward, a rod-shaped leg 602 facing downward as a positioning part, and the leg 602 is attached to the housing 300, so that the pump chamber 110 It has been incorporated. The leg 602 has a substantially flat tip, and is received and held in the recess 402 as a positioning portion of the discharge side valve seat 400 formed in the housing 300. The head 601 of the discharge-side check valve 600 has a top 603 that contacts the protrusion 201 as a convex portion formed on the inner wall of the suction / discharge-side case 200 as a first wall that forms the wall of the discharge pipe 202. ing. In this embodiment, for example, the diameter of the suction side check valve 500 is 5 mm, and the length of the piezoelectric element 211 is 17 mm.

  A liquid tank 101 is disposed in the upper part of the pump chamber 110, and the liquid 102 is stored inside the liquid tank 101. The lower part of the liquid tank 101 and the upper part of the suction / discharge-side case 200 are connected by the opening 105, and the liquid 102 enters the suction port 310 through the opening 105.

  By applying an AC voltage to the piezoelectric element 211, the piezoelectric element 211 vibrates at a frequency corresponding to the frequency of the AC voltage. In conjunction with the vibration of the piezoelectric element 211, the vibration plate 210 bonded to the piezoelectric element 211 vibrates and changes the volume of the pump chamber 110. When the diaphragm 210 is not displaced vertically, the head 501 of the suction side check valve 500 closes the suction port 310, and the head 601 of the discharge side check valve 600 closes the discharge port 320.

  FIG. 2 is a view showing a discharge-side check valve (A), a protrusion (B), and an upper surface (C) of the discharge-side valve seat used in the micropump of the first embodiment of the present invention.

  As shown in FIG. 2A, the discharge-side check valve 600 has a flat head 601 and a rod-like leg 602, and the upper surface of the head 601 including the top 603 is flat.

  As shown in FIG. 2B, the protrusion 201 formed on the inner wall of the suction / discharge-side case 200 (FIG. 1) that forms the wall of the discharge pipe 202 (FIG. 1) has a cylindrical portion and a truncated cone. The bottom surface of the cylinder and the top surface of the truncated cone are joined to each other. In the frustoconical portion of the protrusion 201, the diameter of the upper surface joined to the cylinder is relatively large and the diameter of the lower surface is relatively small. When the discharge side check valve 600 is incorporated in the micro pump, the lower surface of the protrusion 201 presses the top 603 of the discharge side check valve 600.

  As shown in FIG. 2C, the discharge-side valve seat 400 has a recess 402 for receiving the leg 602 of the discharge-side check valve 600, and a plurality of discharge ports 320 surrounding the recess 402. Is formed.

  FIG. 3 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump of the first embodiment of the present invention. 3A shows a state before the discharge-side check valve is inserted into the discharge-side valve seat, and FIG. 3B shows a state where the discharge-side check valve is inserted into the discharge-side valve seat. The state assembled in the housing is shown.

  As shown in FIG. 3A, the discharge-side check valve 600 has a flat head 601 and a rod-like leg 602, and the upper surface of the head 601 including the top 603 is flat. The discharge side valve seat 400 is formed in the housing 300 and has a recess 402 for receiving the leg portion 602 of the discharge side check valve 600. A concave surface 401 is formed on the upper surface of the discharge-side valve seat 400 so that the lower surface of the head 601 of the discharge-side check valve 600 comes into contact therewith. The concave surface 401 is formed to have an inclination like the inner surface of a mortar recessed on the concave portion 402 side for receiving the leg portion 602 of the discharge side check valve 600.

  As shown in FIG. 3B, the leg portion 602 of the discharge side check valve 600 is inserted into the recess 402 of the discharge side valve seat 400 from above, and the discharge side check valve 600 is connected to the discharge side valve seat 400. Incorporated. Further, the protrusion 201 formed on the inner wall of the discharge pipe 202 (FIG. 1) fixes the discharge-side check valve 600 so that the top portion 603 of the discharge-side check valve 600 is pressed from above. By doing so, the head 601 of the discharge side check valve 600 is elastically deformed, and in the head 601, the protrusion of the discharge pipe 202 is formed along the concave surface 401 formed on the upper surface of the discharge side valve seat 400. A concave surface is formed on the 201 side, a convex surface is formed on the discharge side valve seat 400 side with the leg portion 602 as a center, and the peripheral portion of the head 601 is in close contact with the discharge side valve seat 400.

  In the micropump 100 of this embodiment, the suction side valve seat 330 is also formed in the housing 300 in the same manner as the discharge side valve seat 400, and is a recess for receiving the leg portion 502 of the suction side check valve 500. 332 (FIG. 1). A concave surface 331 is formed on the lower surface of the suction side valve seat 330 so that the upper surface of the head portion 501 of the suction side check valve 500 comes into contact therewith. The concave surface 331 is formed to be inclined like the inner surface of a mortar recessed on the concave portion 332 side for receiving the leg portion 502 of the suction side check valve 500. A plurality of suction ports 310 are formed in the suction side valve seat 330 so as to surround a recess 332 for receiving the leg portion 502 of the suction side check valve 500. The suction side check valve 500 has a flat head portion 501 and a rod-like leg portion 502, and the top portion 503 on the upper surface of the head portion 501 is formed in a protruding shape. The leg 502 of the suction side check valve 500 is inserted into the recess 332 of the suction side valve seat 330 from below, and the suction side check valve 500 is incorporated into the suction side valve seat 330. In addition, the diaphragm 210 fixes the suction side check valve 500 so as to press the top portion 503 of the suction side check valve 500 from below. By doing so, the head portion 501 of the suction side check valve 500 is elastically deformed, and the head portion 501 moves toward the diaphragm 210 along the concave surface 331 formed on the lower surface of the suction side valve seat 330. A concave surface is formed around the top portion 503, and a convex surface is formed around the leg portion 502 on the suction side valve seat 330 side, so that the peripheral portion of the head 501 is in close contact with the suction side valve seat 330.

  FIG. 4 is a diagram sequentially illustrating the operation of the micropump when the diaphragm is vibrated and the volume of the pump chamber is changed as one embodiment of the present invention.

  First, FIG. 4A is a cross-sectional view showing the periphery of the pump chamber of the micropump when liquid is sucked into the pump chamber.

  As shown in FIG. 4A, when the diaphragm 210 is displaced downward, the volume of the pump chamber 110 increases. When the volume of the pump chamber 110 increases, a gap is formed between the head 501 of the suction side check valve 500 and the suction port 310, and the liquid 102 (FIG. 1) stored in the liquid tank 101 is pumped. Flows in. At this time, the discharge port 320 is blocked by the head 601 of the discharge side check valve 600, and the liquid that has flowed into the pump chamber 110 does not flow out of the discharge port 320.

  Next, FIG. 4B is a cross-sectional view showing the periphery of the pump chamber of the micro pump when the liquid sucked into the pump chamber is discharged to the outside.

  As shown in FIG. 4B, when the diaphragm 210 is displaced upward, the volume of the pump chamber 110 is reduced. When the volume of the pump chamber 110 is reduced, the gap between the head 501 of the suction side check valve 500 and the suction port 310 is blocked, so that no liquid flows from the liquid tank 101 into the pump chamber 110. On the other hand, a gap is formed between the discharge side check valve 600 and the discharge port 320, and the liquid in the pump chamber 110 flows out from the discharge port 320 to the discharge pipe 202 and is discharged to the outside through the discharge end 203. .

  The micropump 100 has a state in which the diaphragm 210 is not displaced as shown in FIG. 1, and a state in which the diaphragm 210 is displaced in the direction of increasing the volume of the pump chamber 110 as shown in FIG. As shown in FIG. 4B, the liquid 102 in the liquid tank 101 is sucked into the pump chamber 110 by repeating the state in which the diaphragm 210 is displaced in the direction of decreasing the volume of the pump chamber 110. And discharged to the outside.

  As described above, the micropump 100 includes a diaphragm 210 that forms the pump chamber 110, a suction / discharge-side case 200 that forms the discharge pipe 202, and a discharge-side valve seat that has the discharge port 320 that discharges liquid into the discharge pipe 202. 400 and a suction side valve seat 330 having a suction port 310 for sucking liquid into the pump chamber 110, and the suction port 310 can be closed or opened, and between the diaphragm 210 and the suction side valve seat 330. The suction side check valve 500 sandwiched between the suction side and the discharge side check valve 600 disposed between the suction / discharge side case 200 and the discharge side valve seat 400 and disposed so as to be able to close or open the discharge port 320. The surface on the discharge side check valve 600 side of the discharge side valve seat 400 is recessed on the center side of the discharge side check valve 600, and the discharge side check valve 600 is elastically deformed, whereby the discharge side reverse valve Stop valve 600 It is formed so as to be in close contact with the peripheral portion. The suction-side check valve 500 side surface of the suction-side valve seat 330 is recessed on the central side of the suction-side check valve 500, and the suction-side check valve 500 is elastically deformed. It is formed in close contact with the peripheral part.

  The discharge side check valve 600 is elastically deformed so that the surface on the discharge side check valve 600 side of the discharge side valve seat 400 is in close contact with the periphery of the discharge side check valve 600. By disposing the suction and discharge side case 200 and the discharge side valve seat 400, the shielding force of the discharge side check valve 600 can be increased. In addition, the suction side check valve 500 is elastically deformed so that the surface of the suction side check valve 500 on the suction side check valve 500 side comes into close contact with the peripheral portion of the suction side check valve 500. By placing 500 between the vibration plate 210 and the suction side valve seat 330, the shielding force of the suction side check valve 500 can be increased.

  Further, the suction side check valve 500 is disposed between the diaphragm 210 and the suction side valve seat 330, and the discharge side check valve 600 is disposed between the suction discharge side case 200 and the discharge side valve seat 400. Thus, a round protrusion at the tip of the valve (which is conventionally provided to hold the suction-side check valve 500 and the discharge-side check valve 600 (the leg 942 of the suction-side check valve 940 in FIG. 17 and the discharge-side reverse valve) is provided. For example, a suction-side check valve 500 and a discharge-side check valve 600 that are easy to manufacture, such as a flat valve or a thin-film valve, are not required. Can be used.

  By doing so, it is possible to provide a micropump 100 that is inexpensive and easy to assemble and can prevent liquid leakage when driving is stopped.

  Further, in the micropump 100, the lower surface of the suction side valve seat 330 facing the diaphragm 210 forms a concave surface 331, and the upper surface of the discharge side valve seat 400 facing the suction / discharge side case 200 forms a concave surface 401. Yes.

  By doing so, it becomes easy to manufacture the suction side valve seat 330 that is recessed on the center side of the suction side check valve 500 and the discharge side valve seat 400 that is recessed on the center side of the discharge side check valve 600. .

  The concave surface 331 of the suction side valve seat and the concave surface 401 of the discharge side valve seat are formed in a mortar shape.

  By doing in this way, it becomes very easy to form the concave surface 331 and the concave surface 401 in the suction side valve seat 330 and the discharge side valve seat 400, respectively. In the above embodiment, both the concave surface 331 of the suction side valve seat and the concave surface 401 of the discharge side valve seat are formed in a mortar shape, but the concave surface 331 of the suction side valve seat and the concave surface 401 of the discharge side valve seat are formed. Only one of these may be formed in a mortar shape.

  Further, in the micropump 100, the suction side check valve 500 has a top portion 503 for contacting the diaphragm 210.

  By doing so, the suction side check valve 500 can be elastically deformed without disturbing the vibration of the diaphragm 210.

  Further, in the micropump 100, the suction side check valve 500 has a leg portion 502 for determining the positional relationship between the suction side valve seat 330 and the suction side check valve 500. A recess 332 is provided for determining the positional relationship between the suction side valve seat 330 and the suction side check valve 500, and the discharge side check valve 600 is positioned between the discharge side valve seat 400 and the discharge side check valve 600. The discharge side valve seat 400 has a recess 402 for determining the positional relationship between the discharge side valve seat 400 and the discharge side check valve 600.

  In this way, the positions of the suction-side check valve 500 and the discharge-side check valve 600 can be easily determined and fixed.

  Further, in the micropump 100, the suction / discharge side case 200 has a protrusion 201, and the discharge side check valve 600 is sandwiched between the protrusion 201 of the suction / discharge side case 200 and the discharge side valve seat 400. Yes.

  In this way, even when no protrusion is formed on the top portion 603 of the discharge side check valve 600, the discharge side check valve 600 can be easily placed between the suction discharge side case 200 and the discharge side valve seat 400. Can be held between.

  When the suction-side check valve 500 having a high shielding power is used for the micropump 100, it is necessary to increase the pressure difference between the inside and the outside of the pump chamber 110 that is generated when the micropump 100 is driven. Therefore, by arranging the suction side check valve 500 between the diaphragm 210 and the suction side valve seat 330, the volume of the pump chamber 110 is reduced, and the inside and outside of the pump chamber 110 generated when the micropump 100 is driven. And the pressure difference can be increased. Therefore, since the suction port 310 can be opened even by the suction side check valve 500 having a high shielding power, the micro pump 100 can be provided with the suction side check valve 500 having a high shielding power.

(Second Embodiment)
FIG. 5 is a view showing a cross section around a discharge-side check valve and a discharge-side check valve used in a micropump as a second embodiment of the present invention. 5A shows a state before the discharge-side check valve is inserted into the discharge-side valve seat, and FIG. 5B shows a state where the discharge-side check valve is inserted into the discharge-side valve seat. The state assembled in the housing is shown.

  As shown in FIG. 5A, the discharge-side check valve 610 of the second embodiment has a flat head 611 and a rod-like leg 612, like the discharge-side check valve 600 of the first embodiment. The top surface of the head 611 including the top 613 is flat. The discharge side valve seat 410 has a recess 412 for receiving the leg portion 612 of the discharge side check valve 610. A concave surface 411 is formed on the upper surface of the discharge-side valve seat 410 so that the lower surface of the head 611 of the discharge-side check valve 610 comes into contact therewith. The concave surface 411 is formed with an inclination like the inner surface of a sphere. The discharge side valve seat 410 is formed with a plurality of discharge ports 320 so as to surround a recess 412 for receiving the leg portion 612 of the discharge side check valve 610.

  As shown in FIG. 5B, the leg portion 612 of the discharge side check valve 610 is inserted into the concave portion 412 of the discharge side valve seat 410 from above, and the discharge side check valve 610 is inserted into the discharge side valve seat 410. Incorporated. Further, the protrusion 201 formed on the inner wall of the discharge pipe 202 (FIG. 1) presses the top 613 of the discharge side check valve 610 from above to fix the discharge side check valve 610. By doing so, the head 611 of the discharge side check valve 610 is elastically deformed, and in the head 611, along the concave surface 411 formed on the upper surface of the discharge side valve seat 410, the inner wall side of the discharge pipe 202. A concave surface is formed on the discharge side valve seat 410, and a convex surface is formed on the discharge side valve seat 410 with the leg portion 612 as the center, and the periphery of the head 611 is in close contact with the discharge side valve seat 410.

  Thus, in the micropump 100, the discharge side valve seat 410 facing the suction / discharge side case 200 forms a spherical concave surface 411. By doing so, the discharge-side valve seat 410 can easily adhere to the peripheral portion of the discharge-side check valve 610.

  As shown in FIG. 5B, the discharge side check valve 610 may be pressed by the protrusion 201 so that the lower surface of the head 611 is in contact with the concave surface 411 of the discharge side valve seat 410. In addition, the pressing amount of the discharge side check valve 610 is reduced, and the peripheral portion of the lower surface of the head portion 611 of the discharge side check valve 610 is in close contact with the discharge side valve seat 410, but the entire lower surface of the head portion 611 is It may be pressed so as not to contact the concave surface 411 of the discharge side valve seat 410.

  FIG. 6 is a view showing a cross section of the periphery of a discharge side check valve and a discharge side check valve used in a micropump when the amount of pressing of the discharge side check valve is small as a second embodiment of the present invention. . 6A shows the state before the discharge-side check valve is inserted into the discharge-side valve seat, and FIG. 6B shows the state where the discharge-side check valve is inserted into the discharge-side valve seat. The state assembled in the housing is shown.

  As shown in FIG. 6A, the discharge-side check valve 610 and the discharge-side valve seat 410 are the same as the discharge-side check valve 610 and the discharge-side valve seat 410 shown in FIG. Shape.

  As shown in FIG. 6B, the leg portion 612 of the discharge side check valve 610 is inserted into the concave portion 412 of the discharge side valve seat 410 from above, and the discharge side check valve 610 is inserted into the discharge side valve seat 410. Incorporated. Further, the protrusion 201 formed on the inner wall of the discharge pipe 202 (FIG. 1) presses the top 613 of the discharge side check valve 610 from above to fix the discharge side check valve 610. The protrusion 201 presses the discharge side check valve 610, but the center side of the discharge side check valve 610 is not in contact with the concave surface 411 of the discharge side valve seat 410 on the lower surface of the discharge side check valve 610. . By doing so, the head 611 of the discharge-side check valve 610 is elastically deformed. In the head 611, a concave surface is formed on the inner wall side of the discharge pipe 202, and the leg 612 is formed on the discharge-side valve seat 410 side. And a peripheral portion of the lower surface of the head 611 of the discharge side check valve 610 is in close contact with the concave surface 411 of the discharge side valve seat 410.

  As described above, the discharge side check valve 610 has a lower surface of the head 611 on the discharge side in a portion close to the leg 612 on the center side as long as the peripheral portion of the head 611 is in close contact with the discharge side valve seat 410. It does not have to be in contact with the valve seat 410.

  Other configurations and effects of the micro pump of the second embodiment are the same as those of the micro pump 100 of the first embodiment.

(Third embodiment)
FIG. 7 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump as the third embodiment of the present invention. 7A shows a state before the discharge-side check valve is inserted into the discharge-side valve seat, and FIG. 7B shows a state where the discharge-side check valve is inserted into the discharge-side valve seat. The state assembled in the housing is shown.

  As shown in FIG. 7A, the discharge-side check valve 610 of the third embodiment has a flat head 611 and a rod-like leg 612, and the upper surface of the head 611 is flat. A central portion 611 has a top portion 613 a that protrudes as a protrusion for contacting the inner wall of the suction / discharge-side case 200.

  As shown in FIG. 7B, the discharge-side valve seat 410 of the third embodiment is formed in the housing and has a recess 412 for receiving the leg 612 of the discharge-side check valve 610. . A concave surface 411 is formed on the upper surface of the discharge-side valve seat 410 so that the lower surface of the head 611 of the discharge-side check valve 610 comes into contact therewith. The concave surface 411 is formed in a spherical shape like the discharge side valve seat 410 of the second embodiment. The discharge side valve seat 410 is formed with a plurality of discharge ports 320 so as to surround a recess 412 for receiving the leg portion 612 of the discharge side check valve 610. The protrusion 201 formed on the inner wall of the discharge pipe 202 presses the top portion 613a of the discharge side check valve 610 from above to fix the discharge side check valve 610. The protrusion 201 presses the discharge side check valve 610, but the center side of the discharge side check valve 610 is not in contact with the concave surface 411 of the discharge side valve seat 410 on the lower surface of the discharge side check valve 610. . By doing so, the head 611 of the discharge-side check valve 610 is elastically deformed. In the head 611, a concave surface is formed on the inner wall side of the discharge pipe 202, and the leg 612 is formed on the discharge-side valve seat 410 side. And a peripheral portion of the lower surface of the head 611 of the discharge side check valve 610 is in close contact with the concave surface 411 of the discharge side valve seat 410.

  As described above, the discharge side check valve 610 has a lower surface of the head 611 on the discharge side in a portion close to the leg 612 on the center side as long as the peripheral portion of the head 611 is in close contact with the discharge side valve seat 410. It does not have to be in contact with the valve seat 410.

  As described above, in the micro pump according to the third embodiment, the discharge-side check valve 610 has the top 613 a for contacting the protrusion 201 of the discharge pipe 202.

  By doing so, the discharge-side check valve 610 can be easily sandwiched and held between the protrusion 201 and the discharge-side valve seat 410.

  Other configurations and effects of the micropump of the third embodiment are the same as those of the micropump 100 of the first embodiment.

(Fourth embodiment)
FIG. 8 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump as the fourth embodiment of the present invention. 8A shows a state before the discharge-side check valve is inserted into the discharge-side valve seat, and FIG. 8B shows a state where the discharge-side check valve is inserted into the discharge-side valve seat. The state assembled in the housing is shown.

  As shown in FIG. 8A, the discharge-side check valve 620 according to the fourth embodiment has a flat head 621 and a rod-like leg 622, similar to the discharge-side check valve 600 according to the first embodiment. The top surface of the head 621 including the top 623 is flat. The discharge-side valve seat 420 has a recess 422 for receiving the leg 622 of the discharge-side check valve 620 and surrounds the recess 422 for receiving the leg 622 of the discharge-side check valve 620. A plurality of discharge ports 320 are formed. Further, the discharge side valve seat 420 is formed with a step h between the inner side and the outer side of the discharge port 320 around the recess 422 for receiving the leg portion 622 of the discharge side check valve 620. The side valve seat 420 is recessed on the center side of the discharge side check valve 620.

  As shown in FIG. 8B, the leg 622 of the discharge-side check valve 620 is inserted into the recess 422 of the discharge-side valve seat 420 from above, and the discharge-side check valve 620 is inserted into the discharge-side valve seat 420. Incorporated. Further, the protrusion 201 formed on the inner wall of the discharge pipe 202 (FIG. 1) presses the top 623 of the discharge side check valve 620 from above to fix the discharge side check valve 620. In the head 621 of the discharge side check valve 620, the peripheral portion of the head 621 is higher than the central portion due to the step h formed on the upper surface of the discharge side valve seat 420. By doing so, the head 621 of the discharge side check valve 620 is elastically deformed, and in the head 621, a concave surface is formed on the inner wall side of the discharge pipe 202, and the leg portion 622 is formed on the discharge side valve seat 420 side. And a peripheral surface of the head 621 is in close contact with the discharge-side valve seat 420.

  By doing in this way, the discharge side check valve 620 side surface of the discharge side check valve 420 is in close contact with the peripheral portion of the discharge side check valve 620 by the elastic deformation of the discharge side check valve 620. By disposing the discharge side check valve 620 between the suction discharge side case 200 and the discharge side valve seat 420, the shielding force of the discharge side check valve 620 can be increased.

  In addition, by disposing the discharge side check valve 620 between the suction discharge side case 200 and the discharge side valve seat 420, the tip of the valve, which has been conventionally provided for holding the discharge side check valve 620, is provided. A round protrusion (a round protrusion at the tip of the leg 952 of the discharge-side check valve 950 in FIG. 17) is not necessary, and for example, a discharge-side check that is easy to manufacture, such as a flat valve at the tip or a thin-film valve. A valve 620 can be used.

  By doing so, it is possible to provide a micropump 100 that is inexpensive and easy to assemble and can prevent liquid leakage when driving is stopped.

  Other configurations and effects of the micropump of the fourth embodiment are the same as those of the micropump 100 of the first embodiment.

(Fifth embodiment)
FIG. 9 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump as the fifth embodiment of the present invention. 9A shows a state before the discharge-side check valve is inserted into the discharge-side valve seat, and FIG. 9B shows a state where the discharge-side check valve is inserted into the discharge-side valve seat. The state assembled in the housing is shown.

  As shown in FIG. 9A, the discharge-side check valve 630 of the fifth embodiment is similar to the discharge-side check valve 600 of the first embodiment in that it has a flat head 631 and a rod-like leg 632. The top surface of the head 631 including the top 633 is flat. The discharge side valve seat 430 has a recess 432 for receiving the leg portion 632 of the discharge side check valve 630 and surrounds the recess 432 for receiving the leg portion 632 of the discharge side check valve 630. A plurality of discharge ports 320 are formed. A protrusion 431 is formed on the upper surface of the discharge side valve seat 430 so that the lower surface of the peripheral portion of the head portion 631 of the discharge side check valve 630 comes into contact therewith. In other words, the upper surface of the discharge side valve seat 430 is recessed with respect to the protrusion 431 on the center side of the discharge side check valve 630.

  As shown in FIG. 9B, the leg portion 632 of the discharge side check valve 630 is inserted into the concave portion 432 of the discharge side valve seat 430 from above, and the discharge side check valve 630 is inserted into the discharge side valve seat 430. Incorporated. Further, the protrusion 201 formed on the inner wall of the discharge pipe 202 (FIG. 1) presses the top 633 of the discharge side check valve 630 from above to fix the discharge side check valve 630. In the head 631 of the discharge side check valve 630, the peripheral portion of the head 631 is higher than the center portion by the protrusion 431 formed on the upper surface of the discharge side valve seat 430. By doing so, the head portion 631 of the discharge side check valve 630 is elastically deformed. In the head portion 631, a concave surface is formed on the inner wall side of the discharge pipe 202, and the leg portion 632 on the discharge side valve seat 430 side. And a peripheral surface of the head 631 is in close contact with the discharge side valve seat 430.

  By doing so, the discharge-side check valve 630 is elastically deformed so that the discharge-side check valve 630 side surface of the discharge-side check valve 430 is in close contact with the peripheral portion of the discharge-side check valve 630. By disposing the discharge side check valve 630 between the suction discharge side case 200 and the discharge side valve seat 430, the shielding force of the discharge side check valve 630 can be increased.

  Further, by disposing the discharge-side check valve 630 between the suction-discharge-side case 200 and the discharge-side valve seat 430, the tip of the valve, which has been conventionally provided to hold the discharge-side check valve 630, is provided. A round protrusion (a round protrusion at the tip of the leg 952 of the discharge-side check valve 950 in FIG. 17) is not necessary, and for example, a discharge-side check that is easy to manufacture, such as a flat valve at the tip or a thin-film valve. A valve 630 can be used.

  By doing so, it is possible to provide a micropump 100 that is inexpensive and easy to assemble and can prevent liquid leakage when driving is stopped.

  Other configurations and effects of the micro pump of the fifth embodiment are the same as those of the micro pump 100 of the first embodiment.

(Sixth embodiment)
FIG. 10 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump as the sixth embodiment of the present invention. 10A shows the entire discharge-side check valve, and FIG. 10B shows a state where the discharge-side check valve is inserted into the discharge-side valve seat and incorporated in the housing.

  As shown in FIG. 10A, the discharge-side check valve 640 of the sixth embodiment has a flat head portion 641 and a rod-like leg portion 642, and the upper surface of the head portion 641 is flat. A central portion 641 has a top portion 643 protruding as a protrusion for contacting the inner wall of the suction / discharge-side case 200.

  As shown in FIG. 10B, the discharge-side valve seat 440 of the sixth embodiment is formed in the housing and has a recess 442 for receiving the leg 642 of the discharge-side check valve 640. . A concave surface 441 is formed on the upper surface of the discharge side valve seat 440 so that the lower surface of the head portion 641 of the discharge side check valve 640 comes into contact therewith. The concave surface 441 is formed to be inclined like the inner surface of the mortar, similarly to the discharge side valve seat 400 of the first embodiment. A plurality of discharge ports 320 are formed in the discharge side valve seat 440 so as to surround the recesses 442 for receiving the leg portions 642 of the discharge side check valve 640. The protrusion 201 formed on the inner wall of the discharge pipe 202 presses the top portion 643 of the discharge side check valve 640 from above, thereby fixing the discharge side check valve 640. By doing so, the head portion 641 of the discharge side check valve 640 is elastically deformed, and the inner wall of the discharge pipe 202 is formed along the concave surface 441 formed on the upper surface of the discharge side valve seat 440 in the head portion 641. A concave surface centered on the top portion 643 is formed on the side, and a convex surface centered on the leg portion 642 is formed on the discharge side valve seat 440 side, and the peripheral portion of the head portion 641 is in close contact with the discharge side valve seat 440.

  As described above, in the micro pump of the sixth embodiment, the discharge-side check valve 640 has the top 643 for contacting the protrusion 201 of the discharge pipe 202. In this way, the discharge check valve 640 can be easily held between the inner wall of the discharge pipe 202 and the discharge valve seat 440.

  Other configurations and effects of the micro pump of the sixth embodiment are the same as those of the micro pump 100 of the first embodiment.

(Seventh embodiment)
FIG. 11 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump as the seventh embodiment of the present invention. FIG. 11A shows the entire discharge-side check valve, and FIG. 11B shows a state where the discharge-side check valve is incorporated in the housing.

  As shown in FIG. 11A, the discharge-side check valve 650 of the seventh embodiment has a flat main body 651, the upper surface of the main body 651 is flat, and the central portion of the main body 651 is A top portion 653 is provided as a protruding protrusion. The discharge side check valve 650 does not have a leg portion.

  As shown in FIG. 11B, the discharge side valve seat 450 of the seventh embodiment is formed in the housing. A concave surface 451 is formed on the upper surface of the discharge side valve seat 450 so that the lower surface of the main body 651 of the discharge side check valve 650 is in contact therewith. The concave surface 451 is formed to be inclined like the inner surface of the mortar, like the concave surface 401 of the discharge side valve seat 400 of the first embodiment. A plurality of discharge ports 320 are formed in the discharge side valve seat 450 so as to surround a portion where the central portion of the discharge side check valve 650 contacts. The protrusion 201 formed on the inner wall of the discharge pipe 202 presses the top portion 653 of the discharge side check valve 650 from above to fix the discharge side check valve 650. A recess 205 is formed at the lower end of the protrusion 201 as a positioning portion. The top portion 653 of the discharge side check valve 650 is fitted into the recess 205, and the positional relationship between the discharge side check valve 650 and the suction / discharge side case 200 is determined. By doing so, the main body portion 651 of the discharge side check valve 650 is elastically deformed, and in the main body portion 651, the inner wall of the discharge pipe 202 is formed along the concave surface 451 formed on the upper surface of the discharge side valve seat 450. A concave surface is formed around the top portion 653 on the side, a convex surface is formed on the discharge side valve seat 450 side, and the peripheral portion of the main body portion 651 is in close contact with the discharge side valve seat 450.

  Thus, in the micropump of the seventh embodiment, the discharge side check valve 650 has the top portion 653 for contacting the protrusion 201 of the discharge pipe 202. In this way, the discharge side check valve 650 can be easily sandwiched and held between the inner wall of the discharge pipe 202 and the discharge side valve seat 450.

  In the micropump of the seventh embodiment, the suction / discharge side case 200 has a recess 205 for determining the positional relationship between the suction / discharge side case 200 and the discharge side check valve 650. In this way, the position of the discharge side check valve 650 can be easily determined and fixed.

  Other configurations and effects of the micro pump of the seventh embodiment are the same as those of the micro pump 100 of the first embodiment.

(Eighth embodiment)
FIG. 12 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump as the eighth embodiment of the present invention. 12A shows the entire discharge-side check valve, and FIG. 12B shows a state where the discharge-side check valve is inserted into the discharge-side valve seat and incorporated in the housing.

  As shown in FIG. 12A, the discharge-side check valve 660 of the eighth embodiment has a flat head portion 661 and a rod-like leg portion 662, and the upper surface of the head portion 661 extends from the center to the periphery. An inclined surface descending toward the part is formed, and a top part 663 is provided as a protruding protrusion at the center part of the head part 661. Thus, the shielding force can be reduced by using a valve having a thin peripheral portion.

  As shown in FIG. 12B, the discharge-side valve seat 460 of the eighth embodiment is formed in the housing and has a recess 462 for receiving the leg portion 662 of the discharge-side check valve 660. . A concave surface 461 is formed on the upper surface of the discharge-side valve seat 460 so that the lower surface of the head 661 of the discharge-side check valve 660 is in contact therewith. The concave surface 461 is formed to have an inclination like the inner surface of the mortar, similarly to the discharge side valve seat 400 of the first embodiment. The discharge-side valve seat 460 is formed with a plurality of discharge ports 320 so as to surround a recess 462 for receiving the leg portion 662 of the discharge-side check valve 660. The protrusion 201 formed on the inner wall of the discharge pipe 202 presses the top portion 663 of the discharge side check valve 660 from above to fix the discharge side check valve 660. By doing so, the head 661 of the discharge side check valve 660 is elastically deformed, and in the head 661, the inner wall of the discharge pipe 202 is formed along the concave surface 461 formed on the upper surface of the discharge side valve seat 460. A concave surface is formed around the top portion 663 on the side, a convex surface is formed around the leg portion 662 on the discharge side valve seat 460 side, and the peripheral portion of the head 661 is in close contact with the discharge side valve seat 460.

  Thus, in the micropump of the eighth embodiment, the discharge-side check valve 660 has the top 663 for contacting the protrusion 201 of the discharge pipe 202. By doing so, the discharge-side check valve 660 can be easily held between the inner wall of the discharge pipe 202 and the discharge-side valve seat 460.

  Other configurations and effects of the micro pump of the eighth embodiment are the same as those of the micro pump 100 of the first embodiment.

(Ninth embodiment)
FIG. 13 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump as the ninth embodiment of the present invention. FIG. 13A shows the entire discharge-side check valve, and FIG. 13B shows a state where the discharge-side check valve is incorporated in the housing.

  As shown in FIG. 13A, the discharge check valve 670 of the ninth embodiment has a flat main body 671, and the main body 671 is formed of a rubber sheet as a flat thin film. A concave portion 674 is provided as a positioning portion on the lower surface of the central portion of the main body portion 671.

  As shown in FIG. 13B, the discharge-side valve seat 470 of the ninth embodiment is formed in the housing and protrudes as a positioning portion for fitting into the recess 674 of the discharge-side check valve 670. Part 472. On the upper surface of the discharge side valve seat 470, a concave surface 471 is formed with the convex portion 472 as the center so that the lower surface of the main body portion 671 of the discharge side check valve 670 comes into contact therewith. The concave surface 471 is formed with an inclination like the inner surface of the mortar, like the discharge-side valve seat 400 of the first embodiment. A plurality of discharge ports 320 are formed in the discharge side valve seat 470 so as to surround a portion where the central portion of the discharge side check valve 670 contacts. The protrusion 201 formed on the inner wall of the discharge pipe 202 presses the concave portion 674 of the discharge side check valve 670 from above to fix the discharge side check valve 670. By doing so, the main body portion 671 of the discharge side check valve 670 is elastically deformed, and in the main body portion 671, the inner wall of the discharge pipe 202 is formed along the concave surface 471 formed on the upper surface of the discharge side valve seat 470. A concave surface is formed on the side, a convex surface is formed around the concave portion 674 on the discharge side valve seat 470 side, and a peripheral portion of the main body portion 671 is in close contact with the discharge side valve seat 470.

  Thus, in the micro pump of the ninth embodiment, the discharge-side check valve 670 is a thin film. By doing so, the discharge-side check valve 670 can be manufactured without the need for a mold.

  Further, in the micro pump of the ninth embodiment, the discharge side check valve 670 has a recess 674 for determining the positional relationship between the discharge side valve seat 470 and the discharge side check valve 670. In this way, the position of the discharge side check valve 670 can be easily determined and fixed.

  Further, in the micro pump of the ninth embodiment, the discharge side valve seat 470 has a convex part 472 for determining the positional relationship between the discharge side valve seat 470 and the discharge side check valve 670.

  In this way, the position of the discharge side check valve 670 can be easily determined and fixed.

  Other configurations and effects of the micro pump of the ninth embodiment are the same as those of the micro pump 100 of the first embodiment.

(10th Embodiment)
FIG. 14 is a view showing a cross section around the discharge-side check valve and the discharge-side check valve used in the micropump as the tenth embodiment of the present invention. FIG. 14A shows the entire discharge-side check valve, and FIG. 14B shows a state where the discharge-side check valve is incorporated in the housing.

  As shown in FIG. 14A, the discharge-side check valve 680 of the tenth embodiment has a flat main body portion 681, and the main body portion 681 is formed of a rubber sheet as a flat thin film, A central portion of the main body portion 681 has a hole 684 as a positioning portion.

  As shown in FIG. 14B, the discharge side valve seat 480 of the tenth embodiment is formed in the housing, and the main body of the discharge side check valve 680 is formed on the upper surface of the discharge side valve seat 480. A concave surface 481 for contacting the lower surface of 681 is formed. The concave surface 481 is formed with an inclination like the inner surface of the mortar, like the discharge-side valve seat 400 of the first embodiment. A plurality of discharge ports 320 are formed in the discharge side valve seat 480 so as to surround a portion where the central portion of the discharge side check valve 680 contacts. The protrusion 201 formed on the inner wall of the discharge pipe 202 has a convex portion 204 as a positioning portion for fitting into the hole 684 of the discharge side check valve 680. The protrusion 201 fixes the discharge side check valve 680 so as to press the discharge side check valve 680 from above. By doing so, the main body portion 681 of the discharge side check valve 680 is elastically deformed. In the main body portion 681, the inner wall of the discharge pipe 202 is formed along the concave surface 481 formed on the upper surface of the discharge side valve seat 480. A concave surface is formed around the hole 684 on the side, a convex surface is formed around the hole 684 on the discharge side valve seat 480 side, and the peripheral portion of the main body portion 681 is in close contact with the discharge side valve seat 480.

  Thus, in the micropump of the tenth embodiment, the discharge-side check valve 680 has a thin film shape. By doing so, the discharge-side check valve 680 can be manufactured without the need for a mold.

  In the micropump of the tenth embodiment, the discharge side check valve 680 has a hole 684 for determining the positional relationship between the discharge side valve seat 480 and the discharge side check valve 680. In this way, the position of the discharge side check valve 680 can be easily determined and fixed.

  In the micropump of the tenth embodiment, the suction / discharge side case 200 has a convex portion 204 for determining the positional relationship between the suction / discharge side case 200 and the discharge side check valve 680. In this way, the position of the discharge side check valve 680 can be easily determined and fixed.

  Other configurations and effects of the micro pump of the tenth embodiment are the same as those of the micro pump 100 of the first embodiment.

(Eleventh embodiment)
FIG. 15 is a view showing a cross section of the periphery of a discharge-side check valve, a discharge-side valve seat, and a discharge-side check valve used in a micropump as an eleventh embodiment of the present invention. 15A shows the whole discharge side check valve, FIG. 15B shows the whole discharge side valve seat, and FIG. 15C shows the discharge side check valve in the housing. The built-in state is shown.

  As shown in FIG. 15A, the discharge-side check valve 690 of the eleventh embodiment is formed of a rubber sheet as a flat thin film, and a protrusion or a recess is formed on the discharge-side check valve 690. No holes are formed.

  As shown in FIG. 15B, a concave surface 491 for contacting the lower surface of the discharge side check valve 690 is formed on the upper surface of the discharge side valve seat 490 of the eleventh embodiment. The concave surface 491 is formed to have an inclination like the inner surface of the mortar, similarly to the discharge side valve seat 400 of the first embodiment. A convex portion 494 is formed in the central portion of the concave surface 491 as positioning means for the discharge side check valve 690.

  As shown in FIG. 15C, the discharge-side valve seat 490 of the eleventh embodiment is formed in the housing, and the discharge-side valve seat 490 surrounds the central portion of the discharge-side check valve 690. In this way, a plurality of discharge ports 320 are formed. The protrusion 201 formed on the inner wall of the discharge pipe 202 has a convex portion 204 at the lower end as a positioning portion for determining the position of the discharge side check valve 690. The protrusion 201 presses the top part 693 of the discharge side check valve 690 from above, and fixes the discharge side check valve 690. By doing so, the discharge side check valve 690 is elastically deformed, and a concave surface is formed on the inner wall side of the discharge pipe 202 along the concave surface 491 formed on the upper surface of the discharge side valve seat 490. A convex surface is formed on the seat 490 side, and the peripheral portion of the discharge side check valve 690 is in close contact with the discharge side valve seat 490.

  Thus, in the micropump of the eleventh embodiment, the discharge-side check valve 690 is a thin film. By doing so, the discharge-side check valve 690 can be manufactured without the need for a mold.

  Further, in the micro pump of the eleventh embodiment, the discharge side valve seat 490 has a convex portion 494 for determining the positional relationship between the discharge side valve seat 490 and the discharge side check valve 690. In this way, the position of the discharge side check valve 690 can be easily determined and fixed.

  In the micropump of the eleventh embodiment, the suction / discharge side case 200 has a convex portion 204 for determining the positional relationship between the suction / discharge side case 200 and the discharge side check valve 690. In this way, the position of the discharge side check valve 690 can be easily determined and fixed.

  Other configurations and effects of the micro pump of the eleventh embodiment are the same as those of the micro pump 100 of the first embodiment.

(Twelfth embodiment)
FIG. 16 shows, as a twelfth embodiment of the present invention, a discharge side check valve (A), a protrusion (B), a discharge side valve seat (C), and a periphery of a discharge side check valve used in a micropump. It is a figure which shows the cross section (D).

  As shown in FIG. 16A, the discharge-side check valve 810 of the twelfth embodiment is formed of a rectangular sheet as a thin film.

  As shown in FIG. 16B, the twelfth embodiment micropump has two protrusions 802 that are formed on the inner wall of the discharge pipe to press the discharge-side check valve 810. Both of the two protrusions 802 have a rectangular parallelepiped shape. The lower surface of the rectangular parallelepiped protrusion 802 presses the upper surface of the discharge-side check valve 810 from above.

  As shown in FIGS. 16C and 16D, the discharge-side valve seat 820 of the twelfth embodiment is formed in the housing. A concave surface 822 is formed on the upper surface of the discharge side valve seat 820 so that the lower surface of the discharge side check valve 810 comes into contact therewith. The discharge side valve seat 820 is formed with one discharge port 821 at a portion of the discharge side check seat 820 that contacts the lower part of the center of the discharge side check valve 810 when the discharge side check valve 810 is placed. The protrusion 802 formed on the inner wall of the discharge pipe in the suction / discharge-side case 801 fixes the discharge-side check valve 810 so that the end side is pressed from above the central portion of the discharge-side check valve 810. . By doing so, the discharge-side check valve 810 is elastically deformed, and a concave surface is formed on the inner wall side of the discharge pipe along the concave surface 822 formed on the upper surface of the discharge-side valve seat 820. A convex surface is formed on the 820 side, and the periphery of the discharge-side check valve 810 is in close contact with the discharge-side valve seat 820.

  Other configurations and effects of the micropump of the twelfth embodiment are the same as those of the micropump 100 of the first embodiment.

  The embodiment disclosed above should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above embodiments but by the scope of claims, and includes all modifications and variations within the meaning and scope equivalent to the scope of claims.

1 is a cross-sectional view showing an entire micro pump as a first embodiment of the present invention. It is a figure which shows the upper surface (C) of the discharge side non-return valve (A), protrusion (B), and discharge side valve seat which are used for the micropump of 1st Embodiment of this invention. It is a figure which shows the cross section of the periphery of the discharge side check valve used for the micro pump of 1st Embodiment of this invention, and a discharge side check valve. Sectional view (A) showing the periphery of the pump chamber of the micropump when the liquid is sucked into the pump chamber, and sectional view (B) showing the periphery of the pump chamber of the micropump when the liquid sucked into the pump chamber is discharged to the outside It is. It is a figure which shows the cross section of the periphery of the discharge side check valve used for a micropump, and a discharge side check valve as 2nd Embodiment of this invention. It is a figure which shows the cross section of the circumference | surroundings of the discharge side check valve used for a micropump when the pressing amount of a discharge side check valve is small as 2nd Embodiment of this invention, and a discharge side check valve. It is a figure which shows the cross section of the periphery of the discharge side check valve used for a micro pump, and a discharge side check valve as 3rd Embodiment of this invention. It is a figure which shows the cross section of the periphery of the discharge side check valve used for a micro pump, and a discharge side check valve as 4th Embodiment of this invention. It is a figure which shows the cross section of the circumference | surroundings of the discharge side check valve used for a micro pump, and a discharge side check valve as 5th Embodiment of this invention. It is a figure which shows the cross section of the periphery of the discharge side check valve and discharge side check valve which are used for a micro pump as 6th Embodiment of this invention. It is a figure which shows the cross section of the periphery of the discharge side check valve used for a micro pump, and a discharge side check valve as 7th Embodiment of this invention. It is a figure which shows the cross section of the periphery of the discharge side check valve used for a micro pump, and a discharge side check valve as 8th Embodiment of this invention. It is a figure which shows the cross section of the periphery of the discharge side check valve used for a micro pump, and a discharge side check valve as 9th Embodiment of this invention. It is a figure which shows the cross section of the periphery of the discharge side check valve used for a micropump, and a discharge side check valve as 10th Embodiment of this invention. It is a figure which shows the cross section of the circumference | surroundings of the discharge side check valve used for a micropump, a discharge side valve seat, and a discharge side check valve as 11th Embodiment of this invention. As a twelfth embodiment of the present invention, a discharge side check valve (A), a projection (B), a discharge side valve seat (C), and a cross section around the discharge side check valve (D) used in a micropump ). It is a figure which shows the whole cross section of a micro pump as an example of the conventional micro pump. It is a figure which shows the cross section of the valve of the conventional small pump, and the whole small pump. It is a figure which shows the whole cross section of the conventional small pump.

Explanation of symbols

100, 800: Micro pump, 110: Pump chamber, 200, 801: Suction / discharge side case, 201: Protrusion, 202: Discharge pipe, 204, 494: Convex part, 205: Concavity, 210: Diaphragm, 300: Housing, 310: suction port, 320: discharge port, 330: suction side valve seat, 331: concave surface, 400, 410, 420, 430, 440, 450, 460, 470, 480, 490, 820: discharge side valve seat, 401, 411, 441, 451, 461, 471, 481, 491, 822: concave surface, 500: suction side check valve, 600, 610, 620, 630, 640, 650, 660, 670, 680, 690, 810: discharge side Check valve, 333, 613a, 643, 653, 663: top, 674: recess, 684: hole.

Claims (10)

A first wall forming a flow path;
A discharge port for discharging liquid into the flow path; and a second wall portion having at least one inlet / outlet of a suction port for sucking liquid into the flow path;
A valve body disposed so as to be capable of closing or opening the entrance and being sandwiched between the first wall portion and the second wall portion;
The surface on the valve body side of the second wall is recessed on the center side of the valve body, and is formed so as to be in close contact with the peripheral portion of the valve body by elastically deforming the valve body. Micro pump.   The micropump according to claim 1, wherein the second wall portion facing the first wall portion forms a concave surface.   The micropump according to claim 2, wherein the concave surface of the second wall portion is formed in a spherical shape.   The micropump according to claim 2, wherein the concave surface of the second wall portion is formed in a mortar shape.   The micro pump according to any one of claims 1 to 4, wherein the valve body has a protrusion for contacting the first wall portion.   The micro pump according to any one of claims 1 to 5, wherein the valve body is in a thin film shape.   The said valve body has a positioning part for determining the positional relationship of said 1st wall part and / or said 2nd wall part, and said valve body, The any one of Claim 1-6 A micropump as described in 1.   The micro pump according to any one of claims 1 to 7, wherein the first wall portion includes a positioning portion for determining a positional relationship between the first wall portion and the valve body.   The micro pump according to any one of claims 1 to 8, wherein the second wall portion includes a positioning portion for determining a positional relationship between the second wall portion and the valve body.   The said 1st wall part has a convex part, The said valve body is pinched | interposed between the said convex part and said 2nd wall part of a said 1st wall part. Item 10. The micropump according to any one of Items 9 to 9.

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