JP2008178173A5 - - Google Patents
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- JP2008178173A5 JP2008178173A5 JP2007007512A JP2007007512A JP2008178173A5 JP 2008178173 A5 JP2008178173 A5 JP 2008178173A5 JP 2007007512 A JP2007007512 A JP 2007007512A JP 2007007512 A JP2007007512 A JP 2007007512A JP 2008178173 A5 JP2008178173 A5 JP 2008178173A5
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- piezoelectric element
- movable plate
- electromotive force
- elastic member
- voltage
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Claims (15)
前記可動板を支持するための支持部と、
前記可動板を前記支持部に対して回動可能とするように、前記可動板と前記支持部とを連結する連結部とを有し、
前記各連結部は、前記可動板の回動中心軸を介して互いに対向するように設けられた長手形状をなす1対の弾性部材を備え、前記1対の弾性部材を互いに反対方向へ曲げ変形させて前記可動板を回動させるように構成されたアクチュエータであって、
前記1対の弾性部材のそれぞれに対応するように設けられた1対の圧電素子と、
前記1対の圧電素子に電圧を交互にかつ周期的に印加する電圧印加手段と、
前記各圧電素子の前記電圧が印加されていない状態での変形により生じる起電力に基づいて前記可動板の挙動を検知する挙動検知手段とを有していることを特徴とするアクチュエータ。 A movable plate,
A support portion for supporting the movable plate;
A connecting portion that connects the movable plate and the support portion so that the movable plate can rotate with respect to the support portion;
Each of the connecting portions includes a pair of longitudinal elastic members provided so as to face each other via the rotation center axis of the movable plate, and the pair of elastic members are bent and deformed in opposite directions to each other. An actuator configured to rotate the movable plate,
A pair of piezoelectric elements provided to correspond to each of the pair of elastic members;
Voltage application means for alternately and periodically applying a voltage to the pair of piezoelectric elements;
An actuator comprising: behavior detecting means for detecting the behavior of the movable plate based on an electromotive force generated by deformation of each piezoelectric element in a state where the voltage is not applied.
前記光反射部を支持する第1の軸部材および第2の軸部材と、 A first shaft member and a second shaft member that support the light reflecting portion;
前記第1の軸部材に接続される第1の駆動部材と、 A first drive member connected to the first shaft member;
前記第1の駆動部材に接続される第1の弾性部材および第2の弾性部材と、 A first elastic member and a second elastic member connected to the first driving member;
前記第2の軸部材に接続される第2の駆動部材と、 A second drive member connected to the second shaft member;
前記第2の駆動部材に接続される第3の弾性部材および第4の弾性部材と、 A third elastic member and a fourth elastic member connected to the second drive member;
前記第1の弾性部材、前記第2の弾性部材、前記第3の弾性部材および前記第4の弾性部材にそれぞれ1つずつ設けられた複数の圧電素子と、 A plurality of piezoelectric elements each provided on each of the first elastic member, the second elastic member, the third elastic member, and the fourth elastic member;
前記複数の圧電素子にそれぞれ1つずつ接続される複数のスイッチ素子と、 A plurality of switch elements connected to the plurality of piezoelectric elements one by one;
前記複数のスイッチ素子のそれぞれに1つずつ接続され、かつ対応する前記圧電素子の起電力を検出する複数の起電力検出部と、 A plurality of electromotive force detectors connected to each of the plurality of switch elements and detecting an electromotive force of the corresponding piezoelectric element;
前記複数の圧電素子のそれぞれと前記複数のスイッチ素子のそれぞれとの動作を制御する制御部と、を有し、 A control unit that controls the operation of each of the plurality of piezoelectric elements and each of the plurality of switch elements;
前記複数の圧電素子のそれぞれに対して電圧が印加されることにより、前記光反射部が前記第1の軸部材および前記第2の軸部材に対して回動することを特徴とするアクチュエータ。 The actuator, wherein a voltage is applied to each of the plurality of piezoelectric elements, whereby the light reflecting portion rotates with respect to the first shaft member and the second shaft member.
前記制御部は、 The controller is
前記第1の圧電素子と前記第2の圧電素子とに対して交互に電圧を印加し、 A voltage is applied alternately to the first piezoelectric element and the second piezoelectric element,
前記第1の圧電素子に接続されたスイッチ素子と前記第2の圧電素子に接続されたスイッチ素子とのON/OFF状態を交互に切り換え、 Alternately switching ON / OFF states of the switch element connected to the first piezoelectric element and the switch element connected to the second piezoelectric element;
前記第3の圧電素子と前記第4の圧電素子とに対して交互に電圧を印加し、 A voltage is applied alternately to the third piezoelectric element and the fourth piezoelectric element,
前記第3の圧電素子に接続されたスイッチ素子と前記第4の圧電素子に接続されたスイッチ素子とのON/OFF状態を交互に切り換え、 Alternately switching ON / OFF states of the switch element connected to the third piezoelectric element and the switch element connected to the fourth piezoelectric element;
前記ON状態とは、前記圧電素子に生じる起電力が前記起電力検出部へ入力される状態であり、 The ON state is a state in which an electromotive force generated in the piezoelectric element is input to the electromotive force detection unit,
前記OFF状態とは、前記圧電素子に生じる起電力の前記起電力検出部への入力が遮断される状態であることを特徴とする請求項10に記載のアクチュエータ。 The actuator according to claim 10, wherein the OFF state is a state in which an input of an electromotive force generated in the piezoelectric element to the electromotive force detection unit is blocked.
前記可動板を支持するための支持部と、
前記可動板を前記支持部に対して回動可能とするように、前記可動板と前記支持部とを連結する連結部とを有し、
前記各連結部は、前記可動板の回動中心軸を介して互いに対向するように設けられた長手形状をなす1対の弾性部材を備え、前記1対の弾性部材を互いに反対方向へ曲げ変形させて前記可動板を回動させ、前記光反射部で反射した光を走査するように構成された光スキャナであって、
前記1対の弾性部材のそれぞれに対応するように設けられた1対の圧電素子と、
前記1対の圧電素子に電圧を交互にかつ周期的に印加する電圧印加手段と、
前記各圧電素子の前記電圧が印加されていない状態での変形により生じる起電力に基づいて前記可動板の挙動を検知する挙動検知手段とを有していることを特徴とする光スキャナ。 A movable plate including a light reflecting portion having light reflectivity;
A support portion for supporting the movable plate;
A connecting portion that connects the movable plate and the support portion so that the movable plate can rotate with respect to the support portion;
Each of the connecting portions includes a pair of longitudinal elastic members provided so as to face each other via the rotation center axis of the movable plate, and the pair of elastic members are bent and deformed in opposite directions to each other. An optical scanner configured to rotate the movable plate and scan the light reflected by the light reflecting section,
A pair of piezoelectric elements provided to correspond to each of the pair of elastic members;
Voltage application means for alternately and periodically applying a voltage to the pair of piezoelectric elements;
An optical scanner comprising behavior detecting means for detecting the behavior of the movable plate based on an electromotive force generated by deformation of each piezoelectric element in a state where the voltage is not applied.
前記光反射部を支持する第1の軸部材および第2の軸部材と、 A first shaft member and a second shaft member that support the light reflecting portion;
前記第1の軸部材に接続される第1の駆動部材と、 A first drive member connected to the first shaft member;
前記第1の駆動部材に接続される第1の弾性部材および第2の弾性部材と、 A first elastic member and a second elastic member connected to the first driving member;
前記第2の軸部材に接続される第2の駆動部材と、 A second drive member connected to the second shaft member;
前記第2の駆動部材に接続される第3の弾性部材および第4の弾性部材と、 A third elastic member and a fourth elastic member connected to the second drive member;
前記第1の弾性部材、前記第2の弾性部材、前記第3の弾性部材および前記第4の弾性部材にそれぞれ1つずつ設けられた複数の圧電素子と、 A plurality of piezoelectric elements each provided on each of the first elastic member, the second elastic member, the third elastic member, and the fourth elastic member;
前記複数の圧電素子にそれぞれ1つずつ接続される複数のスイッチ素子と、 A plurality of switch elements connected to the plurality of piezoelectric elements one by one;
前記複数のスイッチ素子のそれぞれに1つずつ接続され、かつ対応する前記圧電素子の起電力を検出する複数の起電力検出部と、 A plurality of electromotive force detectors connected to each of the plurality of switch elements and detecting an electromotive force of the corresponding piezoelectric element;
前記複数の圧電素子のそれぞれと前記複数のスイッチ素子のそれぞれとの動作を制御する制御部と、を有し、 A control unit that controls the operation of each of the plurality of piezoelectric elements and each of the plurality of switch elements;
前記複数の圧電素子のそれぞれに対して電圧が印加されることにより前記光反射部が前記第1の軸部材および前記第2の軸部材に対して回動し、前記平面部に入射した光を走査することを特徴とする光スキャナ。 When a voltage is applied to each of the plurality of piezoelectric elements, the light reflecting portion rotates with respect to the first shaft member and the second shaft member, and the light incident on the planar portion is reflected. An optical scanner characterized by scanning.
前記可動板を支持するための支持部と、
前記可動板を前記支持部に対して回動可能とするように、前記可動板と前記支持部とを連結する連結部とを有し、
前記各連結部は、前記可動板の回動中心軸を介して互いに対向するように設けられた長手形状をなす1対の弾性部材を備え、前記1対の弾性部材を互いに反対方向へ曲げ変形させて前記可動板を回動させ、前記光反射部で反射した光を走査し、対象物に画像を形成するように構成されている光スキャナを備えた画像形成装置であって、
前記1対の弾性部材のそれぞれに対応するように設けられた1対の圧電素子と、
前記1対の圧電素子に電圧を交互にかつ周期的に印加する電圧印加手段と、
前記各圧電素子の前記電圧が印加されていない状態での変形により生じる起電力に基づいて前記可動板の挙動を検知する挙動検知手段とを有していることを特徴とする画像形成装置。 A movable plate including a light reflecting portion having light reflectivity;
A support portion for supporting the movable plate;
A connecting portion that connects the movable plate and the support portion so that the movable plate can rotate with respect to the support portion;
Each of the connecting portions includes a pair of longitudinal elastic members provided so as to face each other via the rotation center axis of the movable plate, and the pair of elastic members are bent and deformed in opposite directions to each other. An image forming apparatus including an optical scanner configured to rotate the movable plate, scan the light reflected by the light reflecting portion, and form an image on an object,
A pair of piezoelectric elements provided to correspond to each of the pair of elastic members;
Voltage application means for alternately and periodically applying a voltage to the pair of piezoelectric elements;
An image forming apparatus comprising: a behavior detecting unit configured to detect a behavior of the movable plate based on an electromotive force generated by deformation of each piezoelectric element in a state where the voltage is not applied.
前記光源からの光を走査する光スキャナと、を備え、 An optical scanner that scans the light from the light source,
前記光スキャナは、 The optical scanner is
前記光を反射する平面部を備える光反射部と、 A light reflecting portion comprising a planar portion for reflecting the light;
前記光反射部を支持する第1の軸部材および第2の軸部材と、 A first shaft member and a second shaft member that support the light reflecting portion;
前記第1の軸部材に接続される第1の駆動部材と、 A first drive member connected to the first shaft member;
前記第1の駆動部材に接続される第1の弾性部材および第2の弾性部材と、 A first elastic member and a second elastic member connected to the first driving member;
前記第2の軸部材に接続される第2の駆動部材と、 A second drive member connected to the second shaft member;
前記第2の駆動部材に接続される第3の弾性部材および第4の弾性部材と、 A third elastic member and a fourth elastic member connected to the second drive member;
前記第1の弾性部材、前記第2の弾性部材、前記第3の弾性部材および前記第4の弾性部材にそれぞれ1つずつ設けられた複数の圧電素子と、 A plurality of piezoelectric elements each provided on each of the first elastic member, the second elastic member, the third elastic member, and the fourth elastic member;
前記複数の圧電素子にそれぞれ1つずつ接続される複数のスイッチ素子と、 A plurality of switch elements connected to the plurality of piezoelectric elements one by one;
前記複数のスイッチ素子のそれぞれに1つずつ接続され、かつ対応する前記圧電素子の起電力を検出する複数の起電力検出部と、 A plurality of electromotive force detectors connected to each of the plurality of switch elements and detecting an electromotive force of the corresponding piezoelectric element;
前記複数の圧電素子のそれぞれと前記複数のスイッチ素子のそれぞれとの動作を制御する制御部と、を有し、 A control unit that controls the operation of each of the plurality of piezoelectric elements and each of the plurality of switch elements;
前記複数の圧電素子のそれぞれに対して電圧が印加されることにより前記光反射部が前記第1の軸部材および前記第2の軸部材に対して回動することを特徴とする画像形成装置。 An image forming apparatus, wherein a voltage is applied to each of the plurality of piezoelectric elements to rotate the light reflecting portion with respect to the first shaft member and the second shaft member.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2007007512A JP5320673B2 (en) | 2007-01-16 | 2007-01-16 | Actuator, optical scanner and image forming apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2007007512A JP5320673B2 (en) | 2007-01-16 | 2007-01-16 | Actuator, optical scanner and image forming apparatus |
Publications (3)
Publication Number | Publication Date |
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JP2008178173A JP2008178173A (en) | 2008-07-31 |
JP2008178173A5 true JP2008178173A5 (en) | 2011-04-07 |
JP5320673B2 JP5320673B2 (en) | 2013-10-23 |
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JP2007007512A Expired - Fee Related JP5320673B2 (en) | 2007-01-16 | 2007-01-16 | Actuator, optical scanner and image forming apparatus |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011099890A (en) * | 2009-11-04 | 2011-05-19 | Seiko Epson Corp | Light scanning device and image forming device |
JP5718075B2 (en) * | 2011-01-24 | 2015-05-13 | スタンレー電気株式会社 | Optical deflection module |
JP6055700B2 (en) * | 2013-03-13 | 2016-12-27 | スタンレー電気株式会社 | Optical deflection module |
CN103324170B (en) * | 2013-06-07 | 2015-09-30 | 苏州苏净保护气氛有限公司 | The control method that the on-the-spot gas system processed of step-less adjustment adopts |
JP6333079B2 (en) * | 2014-06-12 | 2018-05-30 | スタンレー電気株式会社 | Optical scanner |
JP6582519B2 (en) * | 2015-04-27 | 2019-10-02 | 株式会社リコー | Optical deflection apparatus, two-dimensional image display apparatus, optical scanning apparatus, and image forming apparatus |
JP7420645B2 (en) | 2020-05-25 | 2024-01-23 | スタンレー電気株式会社 | optical scanning device |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4076689B2 (en) * | 1998-11-27 | 2008-04-16 | セイコーインスツル株式会社 | Piezoelectric actuator |
JP2001249300A (en) * | 2000-03-06 | 2001-09-14 | Anritsu Corp | Optical scanner |
JP2002250890A (en) * | 2001-02-22 | 2002-09-06 | Canon Inc | Microstructure, micro-optical deflector, optical scanning display device and method of manufacturing the same |
JP4023426B2 (en) * | 2003-09-30 | 2007-12-19 | ブラザー工業株式会社 | Retina scanning display device |
JP4389740B2 (en) * | 2004-09-30 | 2009-12-24 | ブラザー工業株式会社 | Vibrating body control device, image forming apparatus including the same, and swinging scanner control method |
JP2006189697A (en) * | 2005-01-07 | 2006-07-20 | Canon Inc | Beam vibration damper |
JP2006223020A (en) * | 2005-02-08 | 2006-08-24 | Pentax Corp | Actuator control device |
JP4720717B2 (en) * | 2006-10-27 | 2011-07-13 | セイコーエプソン株式会社 | Optical device, optical scanner, and image forming apparatus |
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2007
- 2007-01-16 JP JP2007007512A patent/JP5320673B2/en not_active Expired - Fee Related
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