JP2008175626A - Ozone measuring method and ozone measuring device - Google Patents

Ozone measuring method and ozone measuring device Download PDF

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JP2008175626A
JP2008175626A JP2007008070A JP2007008070A JP2008175626A JP 2008175626 A JP2008175626 A JP 2008175626A JP 2007008070 A JP2007008070 A JP 2007008070A JP 2007008070 A JP2007008070 A JP 2007008070A JP 2008175626 A JP2008175626 A JP 2008175626A
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ultraviolet
absorbance
ozone
sample gas
reference gas
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Yoshiyasu Urata
吉康 浦田
Masayuki Watanabe
昌之 渡邉
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DKK TOA Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem wherein an ozone concentration in sample gas cannot be measured accurately if a light quantity of an ultraviolet lamp is fluctuated, in ozone measurement for measuring respectively ultraviolet absorbance of the sample gas and ultraviolet absorbance of reference gas, and operating the ozone concentration in the sample gas from both ultraviolet absorbances. <P>SOLUTION: When a changing rate of the ultraviolet absorbance of the reference gas, namely, a changing rate of the light quantity of the ultraviolet lamp, exceeds a prescribed threshold, operation of the ozone concentration in the sample gas from each ultraviolet absorbance of the sample gas and the reference gas is suspended. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、大気中などのオゾン濃度を測定するオゾン測定方法および装置に関し、さらに詳述すると、試料ガスの紫外線吸光度および参照ガスの紫外線吸光度をそれぞれ測定し、これら両紫外線吸光度の差から試料ガス中のオゾン濃度を求めるオゾン測定方法および装置に関する。   The present invention relates to an ozone measuring method and apparatus for measuring ozone concentration in the atmosphere and the like. More specifically, the ultraviolet absorbance of a sample gas and the ultraviolet absorbance of a reference gas are measured, and the sample gas is determined from the difference between these ultraviolet absorbances. The present invention relates to an ozone measuring method and apparatus for determining the ozone concentration in the inside.

試料ガスの紫外線吸光度および参照ガスの紫外線吸光度をそれぞれ測定し、これら両紫外線吸光度の差から試料ガス中のオゾン濃度を求める紫外線吸収法によるオゾン測定装置として、従来、図5に示す構成のものがある(例えば、特許文献1参照)。図5のオゾン測定装置において、2は試料ガス導入口、4は試料ガス流通管、6は三方切換弁、8はバイパス管、10はオゾン分解器、12は測定セル、14は紫外線ランプ、16は検出器、18は比較演算回路、20は流量計、22はポンプ、24はパイプ、26は試料ガス排出口を示す。図5の装置によるオゾン濃度測定は、下記の手順で行われる。   As an ozone measuring apparatus based on the ultraviolet absorption method for measuring the ultraviolet absorbance of the sample gas and the ultraviolet absorbance of the reference gas and obtaining the ozone concentration in the sample gas from the difference between the two ultraviolet absorbances, there has conventionally been an instrument having the configuration shown in FIG. Yes (see, for example, Patent Document 1). 5, 2 is a sample gas inlet, 4 is a sample gas flow pipe, 6 is a three-way switching valve, 8 is a bypass pipe, 10 is an ozone decomposer, 12 is a measurement cell, 14 is an ultraviolet lamp, 16 Is a detector, 18 is a comparison operation circuit, 20 is a flow meter, 22 is a pump, 24 is a pipe, and 26 is a sample gas outlet. The ozone concentration measurement by the apparatus of FIG. 5 is performed according to the following procedure.

(1)ポンプ22の作動により試料ガス導入口2から流通管4内に試料ガスを一定流量で吸引し、三方切換弁6の操作によってバイパス管8を通さずに試料ガスをセル12に導入する。   (1) By operating the pump 22, the sample gas is sucked into the flow pipe 4 from the sample gas introduction port 2 at a constant flow rate, and the sample gas is introduced into the cell 12 without passing through the bypass pipe 8 by operating the three-way switching valve 6. .

(2)紫外線ランプ14から特定波長の紫外線をセル12内の試料ガスに照射する。これにより、試料ガス中のオゾンおよびその他の紫外線に吸収を有する共存成分の濃度に比例した紫外線が試料ガスに吸収される。この減衰した紫外線を検出器16で検出してその強度に対応した電気信号に変換し、比較演算回路18に記憶する。   (2) The sample gas in the cell 12 is irradiated with ultraviolet rays having a specific wavelength from the ultraviolet lamp 14. Thereby, ultraviolet rays proportional to the concentration of coexisting components having absorption in ozone and other ultraviolet rays in the sample gas are absorbed by the sample gas. The attenuated ultraviolet light is detected by the detector 16 and converted into an electric signal corresponding to the intensity, and stored in the comparison operation circuit 18.

(3)三方切換弁6を切り換えて試料ガスをバイパス管8に流すことにより、試料ガスをオゾン分解器10に通してオゾンを含まない参照ガスを調製し、この参照ガスをセル12に導入して同様の測定を行う。この場合、オゾン分解器10によって試料ガス中のオゾンのみが分解されるため、オゾン以外の共存成分の濃度に比例した紫外線が吸収される。この減衰した紫外線を検出器16で検出してその強度に対応した電気信号に変換し、比較演算回路18に記憶する。   (3) By switching the three-way switching valve 6 and flowing the sample gas to the bypass pipe 8, the sample gas is passed through the ozonolysis device 10 to prepare a reference gas not containing ozone, and this reference gas is introduced into the cell 12. Repeat the same measurement. In this case, since only ozone in the sample gas is decomposed by the ozone decomposer 10, ultraviolet rays proportional to the concentration of coexisting components other than ozone are absorbed. The attenuated ultraviolet light is detected by the detector 16 and converted into an electric signal corresponding to the intensity, and stored in the comparison operation circuit 18.

(4)オゾンおよびその他の共存成分によって減衰した紫外線強度の電気信号と、共存成分のみによって減衰した紫外線強度の電気信号とを比較演算回路18で比較演算し、その差をオゾン濃度に対応する電気信号として出力する。以上の操作を繰り返すことにより、試料ガス中のオゾン濃度が間欠的に測定される。   (4) The comparison calculation circuit 18 compares the ultraviolet intensity electrical signal attenuated by ozone and other coexisting components with the ultraviolet intensity electrical signal attenuated only by the coexistence components, and the difference is an electricity corresponding to the ozone concentration. Output as a signal. By repeating the above operation, the ozone concentration in the sample gas is intermittently measured.

上述したオゾン測定装置では、紫外線ランプ(通常は低圧水銀ランプ)から特定波長の紫外線を試料ガスや参照ガスに照射しているが、この紫外線ランプは光量の安定性が悪く、点灯中に光量が変動することがあり、このように紫外線ランプの光量が変動すると、試料ガス中のオゾン濃度を正しく測定することができなくなる。   In the ozone measuring apparatus described above, the sample gas or reference gas is irradiated with ultraviolet rays having a specific wavelength from an ultraviolet lamp (usually a low-pressure mercury lamp). If the light quantity of the ultraviolet lamp fluctuates in this way, the ozone concentration in the sample gas cannot be measured correctly.

これに対し、図5に示すように、紫外線ランプ14の光量を検出するだけのための検出器28を設け、この検出器28によって紫外線ランプ14の光量が安定しているか否かをモニターすることにより、上述した紫外線ランプの光量が変動する問題に対応することが行われている。   On the other hand, as shown in FIG. 5, a detector 28 is provided only for detecting the light amount of the ultraviolet lamp 14, and the detector 28 monitors whether or not the light amount of the ultraviolet lamp 14 is stable. Thus, the above-described problem that the light amount of the ultraviolet lamp fluctuates is addressed.

また、紫外線ランプの光量に乱れが生じているときには紫外線ランプを一定時間消灯し、その後再点灯することより、上述した紫外線ランプの光量が変動する問題に対応することが提案されている(特許文献2参照)。   Further, it has been proposed to cope with the above-mentioned problem of fluctuation of the light quantity of the ultraviolet lamp by turning off the ultraviolet lamp for a certain period of time when the light quantity of the ultraviolet lamp is disturbed and then turning it on again (Patent Document). 2).

特開平7−159313号公報JP-A-7-159313 実開平5−90349号公報Japanese Utility Model Publication No. 5-90349

しかし、前述した紫外線ランプの光量を検出するだけのための検出器を設ける方法では、上記検出器を設けるために装置コストが高くなるという問題があった。また、前述した特許文献2の方法では、紫外線ランプを消灯している間はオゾン濃度の測定ができなくなるという問題があった。   However, the above-described method of providing a detector only for detecting the amount of light of the ultraviolet lamp has a problem that the cost of the apparatus increases due to the provision of the detector. In addition, the method of Patent Document 2 described above has a problem that the ozone concentration cannot be measured while the ultraviolet lamp is turned off.

本発明は、前述した事情に鑑みてなされたもので、紫外線ランプの光量を検出するだけのための検出器を設けることなく、また紫外線ランプを消灯することなく、紫外線ランプの光量が変動すると試料ガス中のオゾン濃度を正しく測定できなくなるという前述した問題を解決したオゾン測定方法および測定装置を提供することを目的とする。   The present invention has been made in view of the above-described circumstances. When the light quantity of the ultraviolet lamp fluctuates without providing a detector only for detecting the light quantity of the ultraviolet lamp and without turning off the ultraviolet lamp, An object of the present invention is to provide an ozone measuring method and a measuring apparatus that solve the above-mentioned problem that ozone concentration in gas cannot be measured correctly.

本発明者らは、前記目的を達成するために種々検討を行った結果、試料ガスおよび参照ガスの紫外線吸光度から試料ガス中のオゾン濃度を演算する場合、参照ガスにはオゾンが含まれていないため、参照ガスの紫外線吸光度と紫外線ランプの光量とがよく相関し、紫外線ランプの光量が変動すると、参照ガスの紫外線吸光度が上記紫外線ランプの光量変動に対応して変化すること、したがって参照ガスの紫外線吸光度の変化率が大きくなったときには、紫外線ランプの光量が大きく変動し、試料ガス中のオゾン濃度を正しく測定することができなくなると判断できることを知見した。そして、参照ガスの紫外線吸光度の変化率が一定のしきい値を超えた場合には、両紫外線吸光度からのオゾン濃度の演算を行わないこと、すなわちオゾン濃度の測定値を取得しないようにすることにより、紫外線ランプの光量が変動した場合でも試料ガス中のオゾン濃度を常に正しく測定できることを見出した。   As a result of various studies conducted by the present inventors to achieve the above object, when the ozone concentration in the sample gas is calculated from the ultraviolet absorbance of the sample gas and the reference gas, the reference gas does not contain ozone. Therefore, the UV absorbance of the reference gas and the UV lamp light quantity are well correlated, and when the UV lamp light quantity varies, the UV absorbance of the reference gas changes in response to the above-mentioned UV lamp light quantity fluctuation. It has been found that when the rate of change in UV absorbance increases, it can be determined that the amount of light from the UV lamp fluctuates greatly and the ozone concentration in the sample gas cannot be measured correctly. If the rate of change in UV absorbance of the reference gas exceeds a certain threshold, do not calculate the ozone concentration from both UV absorbances, that is, do not acquire the measured ozone concentration. Thus, it was found that the ozone concentration in the sample gas can always be measured correctly even when the light quantity of the ultraviolet lamp fluctuates.

本発明は、上記知見に基づいてなされたもので、試料ガスの紫外線吸光度および参照ガスの紫外線吸光度をそれぞれ測定し、これら両紫外線吸光度から試料ガス中のオゾン濃度を演算するオゾン測定方法において、前記参照ガスの紫外線吸光度の変化率が所定のしきい値を超えたときに、前記両紫外線吸光度からの試料ガス中のオゾン濃度の演算を行わないことを特徴とするオゾン測定方法を提供する。   The present invention was made on the basis of the above findings, and in the ozone measuring method for measuring the ultraviolet absorbance of the sample gas and the ultraviolet absorbance of the reference gas, respectively, and calculating the ozone concentration in the sample gas from both ultraviolet absorbances, Provided is an ozone measuring method characterized in that, when the rate of change in UV absorbance of a reference gas exceeds a predetermined threshold, the ozone concentration in the sample gas is not calculated from both UV absorbances.

また、本発明は、試料ガスの紫外線吸光度および参照ガスの紫外線吸光度をそれぞれ測定し、これら両紫外線吸光度から試料ガス中のオゾン濃度を演算するオゾン測定装置において、前記参照ガスの紫外線吸光度の変化率が所定のしきい値を超えたときに、前記両紫外線吸光度からの試料ガス中のオゾン濃度の演算を行わないことを特徴とするオゾン測定装置を提供する。   The present invention also relates to an ozone measuring apparatus that measures the ultraviolet absorbance of the sample gas and the ultraviolet absorbance of the reference gas, and calculates the ozone concentration in the sample gas from these ultraviolet absorbances, and the rate of change in the ultraviolet absorbance of the reference gas. The ozone measuring device is characterized in that when the value exceeds a predetermined threshold value, the ozone concentration in the sample gas is not calculated from the both ultraviolet absorbances.

なお、本発明のオゾン測定装置は、図5に示したような1つの測定セルに試料ガスおよび参照ガスを交互に導入する構成のものでもよく、2つの測定セルを配置し、一方のセルに試料ガス、他方のセルに参照ガスを導入する構成のものでもよく、さらに他の構成のものでもよい。   The ozone measuring apparatus of the present invention may have a configuration in which the sample gas and the reference gas are alternately introduced into one measuring cell as shown in FIG. 5, and two measuring cells are arranged in one cell. The sample gas may have a configuration in which a reference gas is introduced into the other cell, or may have another configuration.

本発明のオゾン測定方法および測定装置は、紫外線ランプの光量が変動すると試料ガス中のオゾン濃度を正しく測定できなくなるという問題を解決して、紫外線ランプの光量が変動した場合でも、試料ガス中のオゾン濃度を常に正しく測定することができる。   The ozone measuring method and measuring apparatus of the present invention solve the problem that the ozone concentration in the sample gas cannot be measured correctly when the light amount of the ultraviolet lamp varies, and even if the light amount of the ultraviolet lamp varies, The ozone concentration can always be measured correctly.

以下、図面を参照して本発明をさらに詳しく説明する。本発明においては、参照ガスの紫外線吸光度を測定するとともに、図1に示すように、上記参照ガスの紫外線吸光度の変化率、すなわち紫外線ランプの光量変化率が所定のしきい値を超えたときには、試料ガスおよび参照ガスの紫外線吸光度からの試料ガス中のオゾン濃度の演算を行わないことにより、オゾン濃度の異常な測定値をカットする。   Hereinafter, the present invention will be described in more detail with reference to the drawings. In the present invention, while measuring the UV absorbance of the reference gas, as shown in FIG. 1, when the rate of change in UV absorbance of the reference gas, that is, the rate of change in the amount of light of the UV lamp exceeds a predetermined threshold value, By not calculating the ozone concentration in the sample gas from the ultraviolet absorbance of the sample gas and the reference gas, the abnormal measured value of the ozone concentration is cut.

この場合、上記参照ガスの紫外線吸光度の変化率は、下記式により求めることができる。
参照ガスの紫外線吸光度の変化率(%)
=[{R(n)−R(n−1)}/R(n−1)]×100
R(n):今回測定した参照ガスの紫外線吸光度
R(n−1):前回測定した参照ガスの紫外線吸光度
In this case, the rate of change in the UV absorbance of the reference gas can be obtained from the following equation.
Change rate of UV absorbance of reference gas (%)
= [{R (n) -R (n-1)} / R (n-1)] * 100
R (n): UV absorbance of reference gas measured this time R (n-1): UV absorbance of reference gas measured last time

また、しきい値は適宜設定することができるが、上述した参照ガスの紫外線吸光度の変化率(%)のしきい値の絶対値を、0.01〜1.0%の範囲の所定値、より好ましくは0.01〜0.5%の範囲の所定値、さらに好ましくは0.01〜0.1%の範囲の所定値に設定することが適当である。   The threshold value can be set as appropriate, but the absolute value of the threshold value of the change rate (%) of the UV absorbance of the reference gas described above is a predetermined value in the range of 0.01 to 1.0%, More preferably, it is appropriate to set a predetermined value in the range of 0.01 to 0.5%, more preferably a predetermined value in the range of 0.01 to 0.1%.

次に、実施例を示す。シミュレーションにより、参照ガスの紫外線吸光度の変化率が所定のしきい値を超えたときに試料ガス中のオゾン濃度の演算を行わない場合と、参照ガスの紫外線吸光度の変化率が所定のしきい値を超えたときに試料ガス中のオゾン濃度の演算を行う場合とにおける試料ガス中のオゾン濃度の測定結果を調べた。結果を図2〜図4に示す。   Next, an example is shown. According to the simulation, the ozone concentration in the sample gas is not calculated when the rate of change in the UV absorbance of the reference gas exceeds a predetermined threshold, and the rate of change in the UV absorbance of the reference gas is The measurement result of the ozone concentration in the sample gas was examined when the ozone concentration in the sample gas was calculated when the value exceeded the limit. The results are shown in FIGS.

図2は、ランプ光量(紫外線ランプの光量、以下同じ)aの経時変化と、ランプ光量の変化率b(参照ガスの紫外線吸光度の変化率、以下同じ)とを示すグラフである。図3は、ランプ光量の経時変化aと、ランプ光量の変化率が所定のしきい値を超えたときにオゾン濃度の演算を行う場合の試料ガス中のオゾン濃度cとを示すグラフである。図4は、ランプ光量の経時変化aと、ランプ光量の変化率が所定のしきい値を超えたときにオゾン濃度を求める演算を行わない場合の試料ガス中のオゾン濃度dとを示すグラフである。   FIG. 2 is a graph showing a change in lamp light quantity (light quantity of the ultraviolet lamp, the same applies hereinafter) a and a change rate b of the lamp light quantity (change ratio of the ultraviolet absorbance of the reference gas, the same applies hereinafter). FIG. 3 is a graph showing the change a of the lamp light amount with time a and the ozone concentration c in the sample gas when the ozone concentration is calculated when the change rate of the lamp light amount exceeds a predetermined threshold value. FIG. 4 is a graph showing a temporal change a of the lamp light amount and an ozone concentration d in the sample gas when the calculation for obtaining the ozone concentration is not performed when the change rate of the lamp light amount exceeds a predetermined threshold value. is there.

図3と図4の比較より、ランプ光量の変化率が所定のしきい値を超えたときにオゾン濃度の演算を行う場合(図3)は、ランプ光量の変化が大きいときに異常なオゾン濃度測定値が現れ、オゾン濃度を常に正しく測定することができないのに対し、ランプ光量の変化率が所定のしきい値を超えたときにオゾン濃度の演算を行わない場合(図4)は、ランプ光量の変化が大きいときでも異常なオゾン濃度測定値が現れることがなく、したがって試料ガス中のオゾン濃度を常に正しく測定できることがわかる。以上のように、本実験により、本発明の効果が確認された。   From the comparison between FIG. 3 and FIG. 4, when the ozone concentration is calculated when the change rate of the lamp light amount exceeds a predetermined threshold (FIG. 3), the abnormal ozone concentration when the lamp light amount change is large. If the measured value appears and the ozone concentration cannot always be measured correctly, but the ozone concentration is not calculated when the rate of change in the lamp light intensity exceeds a predetermined threshold (FIG. 4), the lamp It can be seen that an abnormal ozone concentration measurement value does not appear even when the change in the amount of light is large, and therefore the ozone concentration in the sample gas can always be measured correctly. As described above, the effect of the present invention was confirmed by this experiment.

本発明の概念を示す説明図である。It is explanatory drawing which shows the concept of this invention. ランプ光量の経時変化と、ランプ光量の変化率とを示すグラフである。It is a graph which shows the time-dependent change of a lamp light quantity, and the change rate of a lamp light quantity. ランプ光量の経時変化と、本発明による試料ガス中のオゾン濃度の測定結果とを示すグラフである。It is a graph which shows the time-dependent change of a lamp light quantity, and the measurement result of the ozone concentration in the sample gas by this invention. ランプ光量の経時変化と、従来法による試料ガス中のオゾン濃度の測定結果とを示すグラフである。It is a graph which shows the time-dependent change of a lamp light quantity, and the measurement result of the ozone concentration in the sample gas by a conventional method. 紫外線吸収法によるオゾン測定装置の一例を示すブロック図である。It is a block diagram which shows an example of the ozone measuring device by an ultraviolet absorption method.

符号の説明Explanation of symbols

12 測定セル
14 紫外線ランプ
16 検出器
18 比較演算回路
12 measurement cell 14 ultraviolet lamp 16 detector 18 comparison operation circuit

Claims (6)

試料ガスの紫外線吸光度および参照ガスの紫外線吸光度をそれぞれ測定し、これら両紫外線吸光度から試料ガス中のオゾン濃度を演算するオゾン測定方法において、前記参照ガスの紫外線吸光度の変化率が所定のしきい値を超えたときに、前記両紫外線吸光度からの試料ガス中のオゾン濃度の演算を行わないことを特徴とするオゾン測定方法。   In the ozone measurement method for measuring the ultraviolet absorbance of the sample gas and the ultraviolet absorbance of the reference gas, and calculating the ozone concentration in the sample gas from these ultraviolet absorbances, the rate of change of the ultraviolet absorbance of the reference gas is a predetermined threshold value. And the ozone concentration in the sample gas is not calculated from the both ultraviolet absorbances. 前記参照ガスの紫外線吸光度の変化率を、下記式により算出することを特徴とする請求項1に記載のオゾン測定方法。
参照ガスの紫外線吸光度の変化率(%)
=[{R(n)−R(n−1)}/R(n−1)]×100
R(n):今回測定した参照ガスの紫外線吸光度
R(n−1):前回測定した参照ガスの紫外線吸光度
The ozone measurement method according to claim 1, wherein the change rate of the ultraviolet absorbance of the reference gas is calculated by the following formula.
Change rate of UV absorbance of reference gas (%)
= [{R (n) -R (n-1)} / R (n-1)] * 100
R (n): UV absorbance of reference gas measured this time R (n-1): UV absorbance of reference gas measured last time
前記参照ガスの紫外線吸光度の変化率(%)のしきい値の絶対値を、0.01〜1.0%の範囲の所定値としたことを特徴とする請求項2に記載のオゾン測定方法。   The ozone measurement method according to claim 2, wherein an absolute value of a threshold value of a change rate (%) of the ultraviolet absorbance of the reference gas is set to a predetermined value in a range of 0.01 to 1.0%. . 試料ガスの紫外線吸光度および参照ガスの紫外線吸光度をそれぞれ測定し、これら両紫外線吸光度から試料ガス中のオゾン濃度を演算するオゾン測定装置において、前記参照ガスの紫外線吸光度の変化率が所定のしきい値を超えたときに、前記両紫外線吸光度からの試料ガス中のオゾン濃度の演算を行わないことを特徴とするオゾン測定装置。   In the ozone measuring apparatus that measures the ultraviolet absorbance of the sample gas and the ultraviolet absorbance of the reference gas, and calculates the ozone concentration in the sample gas from these ultraviolet absorbances, the change rate of the ultraviolet absorbance of the reference gas is a predetermined threshold value. And the ozone concentration in the sample gas is not calculated from the both ultraviolet absorbances. 前記参照ガスの紫外線吸光度の変化率を、下記式により算出することを特徴とする請求項4に記載のオゾン測定装置。
参照ガスの紫外線吸光度の変化率(%)
=[{R(n)−R(n−1)}/R(n−1)]×100
R(n):今回測定した参照ガスの紫外線吸光度
R(n−1):前回測定した参照ガスの紫外線吸光度
The ozone measuring device according to claim 4, wherein a rate of change in ultraviolet absorbance of the reference gas is calculated by the following formula.
Change rate of UV absorbance of reference gas (%)
= [{R (n) -R (n-1)} / R (n-1)] * 100
R (n): UV absorbance of reference gas measured this time R (n-1): UV absorbance of reference gas measured last time
前記参照ガスの紫外線吸光度の変化率(%)のしきい値の絶対値を、0.01〜1.0%の範囲の所定値としたことを特徴とする請求項5に記載のオゾン測定装置。   6. The ozone measuring apparatus according to claim 5, wherein an absolute value of a threshold value of a change rate (%) of ultraviolet absorbance of the reference gas is set to a predetermined value in a range of 0.01 to 1.0%. .
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Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2000019107A (en) * 1998-07-06 2000-01-21 Zexel Corp Ultraviolet radiation absorption type ozone concentration measurement method and device therefor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000019107A (en) * 1998-07-06 2000-01-21 Zexel Corp Ultraviolet radiation absorption type ozone concentration measurement method and device therefor

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