JP2007117859A - Air cleaner - Google Patents

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JP2007117859A
JP2007117859A JP2005312184A JP2005312184A JP2007117859A JP 2007117859 A JP2007117859 A JP 2007117859A JP 2005312184 A JP2005312184 A JP 2005312184A JP 2005312184 A JP2005312184 A JP 2005312184A JP 2007117859 A JP2007117859 A JP 2007117859A
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gas filter
air
humidity
flow rate
amount
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JP4942325B2 (en
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Hisaya Wakaizumi
久哉 若泉
Minoru Ouchi
稔 大内
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Komatsu Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To always predict the service life of a gas filter highly precisely regardless of the conditional change of polluted air. <P>SOLUTION: This air cleaner is provided with: a flow meter 7 for detecting a flow rate of air passing through the gas filter 3; a hygrometer 6 for detecting humidity of the air passing through the gas filter 3; a controller 8 for calculating an amount of consumption of the gas filter 3 based on the respective detection data of the flow meter 7 and hygrometer 6 and predicting a residual amount of the gas filter from the calculated consumed amount; a display 9 for displaying a residual amount; a display lamp 10 for warning exchange of the gas filter 3; and a speaker 11 for generating warning sound. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、クリーンルーム内を清浄雰囲気にするための空気浄化装置に関するものである。   The present invention relates to an air purification device for making a clean room a clean atmosphere.

従来、高度清浄雰囲気を形成するために用いられるクリーンルームにおいては、汚染空気をろ過するガスフィルタを備える空気浄化装置を外気の取入れ口に装着して、前記ガスフィルタにて空気中に含まれる汚染物質を物理的に分離、除去し、室内の清浄度を維持するようにされている。   Conventionally, in a clean room used to form a highly clean atmosphere, an air purifier equipped with a gas filter for filtering contaminated air is attached to an intake port for outside air, and the pollutant contained in the air by the gas filter. Are physically separated and removed to maintain the cleanliness of the room.

ところで、このクリーンルームに用いられる空気浄化装置においては、ガスフィルタが消耗すると空気浄化性能が低下するため、このガスフィルタの消耗度を計測して、寿命に達する前にそのガスフィルタを交換することが必要となる。従来、このガスフィルタの消耗度の計測は、ガスフィルタの整備時等にその質量の変化を計測することにより行われている。   By the way, in the air purification apparatus used in this clean room, when the gas filter is consumed, the air purification performance deteriorates. Therefore, it is possible to measure the degree of wear of the gas filter and replace the gas filter before the end of its life. Necessary. Conventionally, the degree of wear of the gas filter is measured by measuring a change in its mass during maintenance of the gas filter.

一方、ガスフィルタの寿命を予測するものとしては、汚染性ガス検知器によって気体中の汚染性ガス濃度を検知し、この汚染性ガス検知器の出力に基づいてガスフィルタへの汚染性ガス成分の負荷量の積算値を算出し、この積算値に基づいてガスフィルタの寿命を予測するようにしたものが提案されている（特許文献１参照）。   On the other hand, to predict the life of the gas filter, the pollutant gas detector detects the concentration of the pollutant gas in the gas, and the pollutant gas component to the gas filter is detected based on the output of the pollutant gas detector. There has been proposed a method in which an integrated value of the load amount is calculated and the life of the gas filter is predicted based on the integrated value (see Patent Document 1).

特開平１１−２２６３４１号公報Japanese Patent Laid-Open No. 11-226341

しかしながら、ガスフィルタの消耗度をその質量の変化により計測する従来方法では、その消耗度の計測が整備時に限られているため、ガスフィルタが寿命に達するまで有効利用できないという問題点がある。なお、ガスフィルタの質量をリアルタイムに計測するシステムも知られているが、このシステムでは、ガスフィルタが他のフィルタ類（パーティクルフィルタ、デシカントを用いるフィルタ等）と一体型で形成されていることから、質量計測の誤差が発生して寿命予測が精度良く行えず、やはりガスフィルタの有効利用が図れないという問題点がある。   However, the conventional method for measuring the degree of wear of the gas filter by the change in its mass has a problem that the gas filter cannot be used effectively until the life of the gas filter is reached because the measurement of the degree of wear is limited during maintenance. A system that measures the mass of the gas filter in real time is also known, but in this system, the gas filter is formed integrally with other filters (particle filter, filter using a desiccant, etc.). There is a problem in that an error in mass measurement occurs and life prediction cannot be performed accurately, and the gas filter cannot be effectively used.

また、前記特許文献１にて提案された方法では、汚染空気の濃度や種類が変わった場合に予測精度がばらつくことになり、精度の高い計測が困難であるという問題点がある。また、この方法では、装置作動時の連続データ取得による寿命予測であるために、突発的な理由によってデータ取得が欠落した場合に、計測精度が低下するという問題点がある。   In addition, the method proposed in Patent Document 1 has a problem that prediction accuracy varies when the concentration or type of contaminated air changes, and it is difficult to measure with high accuracy. In addition, this method has a problem that the measurement accuracy is lowered when data acquisition is lost due to a sudden reason because the lifetime is predicted by continuous data acquisition during operation of the apparatus.

本発明は、このような問題点を解消するためになされたもので、汚染空気の状況の変化に関わらず、常に高精度にガスフィルタの寿命予測を行うことができ、この寿命予測に基づいてガスフィルタを有効に使用することのできる空気浄化装置を提供することを目的とするものである。   The present invention has been made to solve such problems, and it is possible to always predict the life of a gas filter with high accuracy regardless of changes in the state of contaminated air. It is an object of the present invention to provide an air purification device that can effectively use a gas filter.

本発明は、ガスフィルタの性能が、処理すべき汚染空気の湿度による影響を受け易いという点に着目し、汚染空気の状況の変化に対応でき、かつ汚染空気の流量の変化にも対応できる空気浄化装置を提案しようとするものである。要するに、本発明による空気浄化装置は、前記目的を達成するために、
汚染空気をろ過するガスフィルタを備える空気浄化装置において、
（ａ）前記ガスフィルタを通過する空気の流量を検知する流量検知器、
（ｂ）前記ガスフィルタを通過する空気の湿度を検知する湿度検知器および、
（ｃ）前記流量検知器および湿度検知器の各検知データに基づき前記ガスフィルタの消耗量を算出し、この算出された消耗量から前記ガスフィルタの残存量を予測する制御装置
を備えることを特徴とするものである。 The present invention pays attention to the fact that the performance of the gas filter is easily affected by the humidity of the contaminated air to be processed, and can cope with the change in the state of the contaminated air and the air that can also respond to the change in the flow rate of the contaminated air. It is intended to propose a purification device. In short, the air purifying apparatus according to the present invention achieves the above-described object,
In an air purification apparatus comprising a gas filter for filtering contaminated air,
(A) a flow rate detector for detecting a flow rate of air passing through the gas filter;
(B) a humidity detector for detecting the humidity of the air passing through the gas filter;
(C) A controller is provided that calculates a consumption amount of the gas filter based on each detection data of the flow rate detector and the humidity detector, and predicts a remaining amount of the gas filter from the calculated consumption amount. It is what.

本発明においては、前記制御装置により算出された残存量を表示する表示器を備えるのが好ましい。   In this invention, it is preferable to provide the indicator which displays the residual amount calculated by the said control apparatus.

本発明によれば、流量検知器および湿度検知器の各検知データに基づいてガスフィルタの消耗量が算出され、この算出された消耗量からガスフィルタの残存量が予測されるので、汚染空気の湿度の変動に対応したガスフィルタの消耗量および、汚染空気の流量変動に対応したガスフィルタの消耗量を算出することができる。したがって、汚染空気の濃度や種類が変わったとしても、また汚染空気の状況が変化しても、ガスフィルタの残存量を精度良く予測することができ、この予測された残存量に基づいてガスフィルタを有効に使用することができる。   According to the present invention, the consumption amount of the gas filter is calculated based on the detection data of the flow rate detector and the humidity detector, and the remaining amount of the gas filter is predicted from the calculated consumption amount. It is possible to calculate the consumption amount of the gas filter corresponding to fluctuations in humidity and the consumption amount of the gas filter corresponding to fluctuations in the flow rate of contaminated air. Therefore, even if the concentration or type of contaminated air changes or the state of contaminated air changes, the remaining amount of the gas filter can be accurately predicted. Based on the predicted remaining amount, the gas filter Can be used effectively.

また、前記制御装置により算出された残存量を表示する表示器を設ければ、予測された残存量を作業者が容易に認識することができる。   Further, if a display for displaying the remaining amount calculated by the control device is provided, the operator can easily recognize the predicted remaining amount.

次に、本発明による空気浄化装置の具体的な実施の形態について、図面を参照しつつ説明する。   Next, specific embodiments of the air purification apparatus according to the present invention will be described with reference to the drawings.

図１には、本発明の一実施形態に係る空気浄化装置のシステム構成図が示されている。   FIG. 1 is a system configuration diagram of an air purification device according to an embodiment of the present invention.

本実施形態の空気浄化装置１は、クリーンルーム２の外壁２ａの外気取入れ口に装着される。この空気浄化装置１は、汚染空気をろ過するガスフィルタ３を備えるとともに、室外側に汚染空気を導入する外気吸入口４を、室内側端部に室外の汚染空気を吸引して外気吸入口４から取り入れるブロワ５をそれぞれ備えて構成されている。ここで、ガスフィルタ３は、活性炭等によって汚染成分を物理的に吸着するものである。こうして、室外の汚染空気はブロワ５により外気吸入口４から取り入れられ、ガスフィルタ３を通過する際にろ過されて浄化された空気がブロワ出口からクリーンルーム２内へ送風される。   The air purification apparatus 1 of this embodiment is attached to an outside air intake port of the outer wall 2a of the clean room 2. The air purifying apparatus 1 includes a gas filter 3 for filtering contaminated air, an outside air inlet 4 for introducing the contaminated air to the outdoor side, and an outside air inlet 4 for sucking the outside contaminated air to the indoor side end. Blowers 5 taken in from each are provided. Here, the gas filter 3 physically adsorbs contaminating components with activated carbon or the like. Thus, the outside contaminated air is taken in from the outside air inlet 4 by the blower 5, and the air filtered and purified when passing through the gas filter 3 is blown into the clean room 2 from the blower outlet.

前記ガスフィルタ３には、空気流路に面して、上流側に湿度計（湿度検知器）６のプローブ６ａが、下流側に流量計（流量検知器）７のプローブ７ａがそれぞれ配され、これらによってガスフィルタ３を通過する空気の湿度および流量がそれぞれ計測（検知）されるようになっている。そして、これら湿度計６および流量計７の各検知データはマイコンで構成されるコントローラ（制御装置）８に入力される。   The gas filter 3 is provided with a probe 6a of a hygrometer (humidity detector) 6 on the upstream side and a probe 7a of a flow meter (flow rate detector) 7 on the downstream side facing the air flow path, Thus, the humidity and flow rate of the air passing through the gas filter 3 are respectively measured (detected). The detected data of the hygrometer 6 and the flow meter 7 are input to a controller (control device) 8 constituted by a microcomputer.

前記コントローラ８は、所定プログラムを実行する中央処理装置（ＣＰＵ）と、このプログラムおよび各種マップ等を記憶する読出し専用メモリ（ＲＯＭ）と、このプログラムを実行するに際して必要なワーキングメモリとして、また各種レジスタとしての書込み可能メモリ（ＲＡＭ）等より構成されている。このコントローラ８においては、前記湿度計６および流量計７より入力された各検知データに基づき所要の演算を実行し、その演算結果を出力する。   The controller 8 includes a central processing unit (CPU) that executes a predetermined program, a read-only memory (ROM) that stores the program and various maps, a working memory necessary for executing the program, and various registers. As a writable memory (RAM). The controller 8 executes a required calculation based on each detection data input from the hygrometer 6 and the flow meter 7 and outputs the calculation result.

前記コントローラ８は、前記演算結果としてのガスフィルタ３の残存量（残存度）を表示する表示器９およびガスフィルタ３のフィルタ交換警告のための表示灯１０、警報音発生用スピーカ１１に接続されており、これら表示器９、表示灯１０、スピーカ１１に所要の信号を出力する。   The controller 8 is connected to a display 9 that displays the remaining amount (remaining degree) of the gas filter 3 as the calculation result, an indicator lamp 10 for a filter replacement warning of the gas filter 3, and an alarm sound generating speaker 11. The necessary signals are output to the indicator 9, the indicator lamp 10, and the speaker 11.

前記コントローラ８においては、そのＲＯＭ内に、ガスフィルタ３の破過特性について、湿度条件を変化させて試験を行った結果によるデータマップが記憶されている。図２に示されるのは、この記憶されたデータマップの一例を示すグラフである。このグラフは、単位時間当たりのガスフィルタ通過流量（ｍ３／ｍｉｎ）に対する破過時間（ｍｉｎ）の関係が、湿度ａ（％），ｂ（％），ｃ（％）（ただし、ａ＜ｂ＜ｃ）によって変化する様子を示している。ここで、破過（ｂｒｅａｋ ｔｈｒｏｕｇｈ）時間とは、ガスフィルタ３の下流側に流出する汚染ガス濃度が５ｐｐｍを超過するまでの時間を示すものである。 In the controller 8, a data map is stored in the ROM as a result of a test conducted by changing the humidity condition for the breakthrough characteristics of the gas filter 3. FIG. 2 shows a graph showing an example of the stored data map. In this graph, the relationship between the breakthrough time (min) with respect to the gas filter passage flow rate (m 3 / min) per unit time is shown as humidity a (%), b (%), c (%) (where a <b <C) shows a change state. Here, the breakthrough time indicates the time until the concentration of pollutant gas flowing out downstream of the gas filter 3 exceeds 5 ppm.

本実施形態において、ガスフィルタ３が破過に至るまでのその残存量の予測値の表示（破過残存表示）およびガスフィルタ３の交換警告のための処理は、図３に示されるフローチャートにしたがって実行される。以下、このフローチャートによってその処理内容を順に説明する。   In the present embodiment, the process for displaying the predicted value of the remaining amount until the gas filter 3 breaks through (the breakthrough remaining display) and the replacement warning for the gas filter 3 are performed according to the flowchart shown in FIG. Executed. Hereinafter, the processing contents will be described in order with this flowchart.

Ｓ１：新規のガスフィルタ３を取り付けた後、残存量Ｔをリセットするために、Ｔ＝１とする。ここで、Ｔ＝１は、残存量が１００％であること、言い換えればガスフィルタ３が新品であることを示している。
Ｓ２〜Ｓ３：次に、ブロワスイッチをＯＮにした後、流量計７によりガスフィルタ３を通過する空気の１秒当たりの風量（ｖ）を計測するとともに、湿度計６によって時々刻々変化する湿度（ｈ）を計測し、これらをコントローラ８に取り込む。 S1: After the new gas filter 3 is attached, T = 1 is set in order to reset the remaining amount T. Here, T = 1 indicates that the remaining amount is 100%, in other words, that the gas filter 3 is new.
S2 to S3: Next, after the blower switch is turned on, the flow rate 7 measures the air volume (v) per second of the air passing through the gas filter 3 and the hygrometer 6 changes the humidity ( h) are measured and taken into the controller 8.

Ｓ４〜Ｓ５：湿度ｈがａ％以下であるか否かを判定し、ａ％以下である場合（ｈ≦ａ）には、ＲＯＭ内に記憶されたデータマップを参照して、湿度ａ％に対応する、１分当たりのガスフィルタ通過流量（ｍ３／ｍｉｎ）に対する破過時間ｔｓ（ｍｉｎ）を求める。すなわち、図２に示される破過特性のグラフにおいて、得られた流量値に対応する、湿度ａ％の破過曲線ｆａ（ｖ）との交点からその湿度ａ％での破過時間ｔｓ（ｍｉｎ）を求める。
Ｓ６〜Ｓ８：一方、湿度がａ％を越えている場合には、次に、ｂ％以下であるか否か（ａ＜ｈ≦ｂ）を判定し、ｂ％以下である場合には、同様にして、湿度ｂ％に対応する、１分当たりのガスフィルタ通過流量（ｍ３／ｍｉｎ）に対する破過時間ｔｓ（ｍｉｎ）を求める。すなわち、図２に示される破過特性のグラフにおいて、得られた流量値に対応する、湿度ｂ％の破過曲線ｆｂ（ｖ）との交点からその湿度ｂ％での破過時間ｔｓ（ｍｉｎ）を求める。さらに、湿度がｂ％を越えている（ｈ＞ｂ）場合には、湿度ｃ％に対応する、１分当たりのガスフィルタ通過流量（ｍ３／ｍｉｎ）に対する破過時間ｔｓ（ｍｉｎ）を求める。すなわち、図２に示される破過特性のグラフにおいて、得られた流量値に対応する、湿度ｃ％の破過曲線ｆｃ（ｖ）との交点からその湿度ｃ％での破過時間ｔｓ（ｍｉｎ）を求める。 S4 to S5: It is determined whether or not the humidity h is a% or less, and if it is a% or less (h ≦ a), the humidity a is referred to by referring to the data map stored in the ROM. The corresponding breakthrough time ts (min) with respect to the gas filter passage flow rate (m 3 / min) per minute is obtained. That is, in the graph of the breakthrough characteristic shown in FIG. 2, the breakthrough time ts (min) at the humidity a% from the intersection with the breakthrough curve fa (v) of the humidity a% corresponding to the obtained flow rate value. )
S6 to S8: On the other hand, when the humidity exceeds a%, it is next determined whether or not it is b% or less (a <h ≦ b). Thus, a breakthrough time ts (min) corresponding to the flow rate (m 3 / min) per minute corresponding to the humidity b% is obtained. That is, in the graph of the breakthrough characteristic shown in FIG. 2, the breakthrough time ts (min) at the humidity b% from the intersection with the breakthrough curve fb (v) of the humidity b% corresponding to the obtained flow rate value. ) Further, when the humidity exceeds b% (h> b), the breakthrough time ts (min) corresponding to the flow rate (m 3 / min) per minute corresponding to the humidity c% is obtained. . That is, in the graph of breakthrough characteristics shown in FIG. 2, the breakthrough time ts (min) at the humidity c% from the intersection with the breakthrough curve fc (v) of the humidity c% corresponding to the obtained flow rate value. )

Ｓ９：ステップＳ５、Ｓ７、Ｓ８のいずれかにおいて得られた破過時間ｔｓ（ｍｉｎ）の単位を分→秒に変換してｔｍ＝ｔｓ×６０を得る。
Ｓ１０：次に破過時間ｔｍ（ｓｅｃ）の逆数を取ることによって、１秒当たりのガスフィルタ３の消耗量ｔｃを次式により演算する。
ｔｃ＝１／ｔｍ S9: The unit of breakthrough time ts (min) obtained in any of steps S5, S7, and S8 is converted from minutes to seconds to obtain tm = ts × 60.
S10: Next, the consumption tc of the gas filter 3 per second is calculated by the following equation by taking the reciprocal of the breakthrough time tm (sec).
tc = 1 / tm

Ｓ１１〜Ｓ１３：残存量Ｔから消耗量ｔｃを減算することで、新たな残存量Ｔを得る。そして、この得られた残存量Ｔを次式により百分率に変換して残存量Ｔｐ（％）を得、得られた残存量Ｔｐ（％）の値を表示器９に表示する。
Ｔｐ＝Ｔ×１００ S11 to S13: A new remaining amount T is obtained by subtracting the consumption amount tc from the remaining amount T. Then, the obtained residual amount T is converted into a percentage by the following formula to obtain the residual amount Tp (%), and the value of the obtained residual amount Tp (%) is displayed on the display 9.
Tp = T × 100

Ｓ１４〜Ｓ１５：ステップＳ１１で得られた残存量Ｔの値が予め設定された閾値を越えているか否かを判定し、閾値を越えている場合には、ガスフィルタが破過に至るまで相当時間あると判断されるので、ステップＳ３へ戻って以下のステップを繰り返し行う。一方、残存量Ｔが閾値以下である場合には、ガスフィルタ３の寿命が残り少ないと判断されるので、表示器９に残存量Ｔｐを表示するとともに、ガスフィルタの交換警告を表示灯１０および警報音発生用スピーカ１１に出力し、表示灯１０の点灯および警報音発生用スピーカ１１から警報音を発する。こうして、作業者はガスフィルタ３の残存量を容易に認識することができ、かつ警告に基づいてガスフィルタの交換を行うことができる。   S14 to S15: It is determined whether or not the value of the remaining amount T obtained in step S11 exceeds a preset threshold value. If the threshold value is exceeded, it takes a considerable time until the gas filter breaks through. Since it is determined that there is, the process returns to step S3 and the following steps are repeated. On the other hand, when the remaining amount T is less than or equal to the threshold value, it is determined that the life of the gas filter 3 is short, so the remaining amount Tp is displayed on the display 9 and a gas filter replacement warning is displayed with the indicator lamp 10 and the alarm. The sound is output to the sound generating speaker 11 and the warning light is emitted from the lighting of the indicator lamp 10 and the alarm sound generating speaker 11. Thus, the operator can easily recognize the remaining amount of the gas filter 3, and can replace the gas filter based on the warning.

本実施形態の空気浄化装置１によれば、ガスフィルタ３にて処理すべき汚染空気の湿度が変化してもその湿度に応じた適切な破過時間を予測することができ、また汚染空気の流量が変化してもその流量に対応した破過時間を予測することができる。したがって、汚染空気の濃度、種類に拘わらずガスフィルタ３の寿命予測を極めて高精度に行うことができ、この結果、ガスフィルタ３を破過直前に至るまで有効に使用することができる。   According to the air purification device 1 of the present embodiment, even if the humidity of contaminated air to be processed by the gas filter 3 changes, an appropriate breakthrough time according to the humidity can be predicted, and Even if the flow rate changes, the breakthrough time corresponding to the flow rate can be predicted. Therefore, the life prediction of the gas filter 3 can be performed with extremely high accuracy regardless of the concentration and type of contaminated air. As a result, the gas filter 3 can be used effectively until just before breakthrough.

本発明の一実施形態に係る空気浄化装置のシステム構成図The system block diagram of the air purifying apparatus which concerns on one Embodiment of this invention. 本実施形態におけるガスフィルタの破過特性を示すグラフThe graph which shows the breakthrough characteristic of the gas filter in this embodiment 本実施形態における破過残存表示および交換警告のフローチャートFlow chart of breakthrough remaining display and replacement warning in this embodiment

符号の説明Explanation of symbols

１ 空気浄化装置
２ クリーンルーム
３ ガスフィルタ
４ 外気吸入口
５ ブロワ
６ 湿度計
７ 流量計
８ コントローラ
９ 表示器
１０ 表示灯
１１ スピーカ DESCRIPTION OF SYMBOLS 1 Air purification apparatus 2 Clean room 3 Gas filter 4 Outside air inlet 5 Blower 6 Hygrometer 7 Flowmeter 8 Controller 9 Indicator 10 Indicator lamp 11 Speaker

Claims (2)

汚染空気をろ過するガスフィルタを備える空気浄化装置において、
（ａ）前記ガスフィルタを通過する空気の流量を検知する流量検知器、
（ｂ）前記ガスフィルタを通過する空気の湿度を検知する湿度検知器および、
（ｃ）前記流量検知器および湿度検知器の各検知データに基づき前記ガスフィルタの消耗量を算出し、この算出された消耗量から前記ガスフィルタの残存量を予測する制御装置
を備えることを特徴とする空気浄化装置。 In an air purification apparatus comprising a gas filter for filtering contaminated air,
(A) a flow rate detector for detecting a flow rate of air passing through the gas filter;
(B) a humidity detector for detecting the humidity of the air passing through the gas filter;
(C) A controller is provided that calculates a consumption amount of the gas filter based on each detection data of the flow rate detector and the humidity detector, and predicts a remaining amount of the gas filter from the calculated consumption amount. Air purifier. 前記制御装置により算出された残存量を表示する表示器を備える請求項１に記載の空気浄化装置。   The air purifier according to claim 1, further comprising a display that displays a remaining amount calculated by the control device.
JP2005312184A 2005-10-27 2005-10-27 Air purification device Expired - Fee Related JP4942325B2 (en)

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