JP2008170931A5 - - Google Patents
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- JP2008170931A5 JP2008170931A5 JP2007109141A JP2007109141A JP2008170931A5 JP 2008170931 A5 JP2008170931 A5 JP 2008170931A5 JP 2007109141 A JP2007109141 A JP 2007109141A JP 2007109141 A JP2007109141 A JP 2007109141A JP 2008170931 A5 JP2008170931 A5 JP 2008170931A5
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- JP
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- electrode
- substrate
- voltage
- conversion element
- wavelength conversion
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- 239000000758 substrate Substances 0.000 claims 27
- 238000006243 chemical reaction Methods 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 9
- 238000001514 detection method Methods 0.000 claims 6
- 239000011810 insulating material Substances 0.000 claims 1
- 230000000149 penetrating Effects 0.000 claims 1
Claims (10)
基板の一方の面に電圧を印加する第１電極と、
前記基板の一方の面と反対の他方の面に電圧を印加する第２電極と、
前記第１電極及び前記第２電極と前記基板とを互いに近接あるいは離間させる方向に移動させる移動手段と、
前記第１電極及び前記第２電極に電圧を印加する電源とを備え、
少なくとも前記第１電極が複数の電極部を有し、該複数の電極部が一体に形成され、各々の前記電極部が前記基板との対向面を有することを特徴とする波長変換素子の製造装置。 A device for manufacturing a wavelength conversion element,
A first electrode for applying a voltage to one side of the substrate;
A second electrode for applying a voltage to the other surface opposite to the one surface of the substrate;
Moving means for moving the first electrode, the second electrode, and the substrate in directions close to or away from each other;
A power source for applying a voltage to the first electrode and the second electrode,
At least the first electrode has a plurality of electrode portions, the plurality of electrode portions are integrally formed, and each of the electrode portions has a surface facing the substrate. .
前記第１電極と前記基板との平行度を検出する検出手段と、
該検出手段からの検出結果に基づいて前記第１電極と前記基板とが平行になるように前記基板あるいは前記第１電極を移動する平行度調整手段とを備えることを特徴とする請求項１または請求項２に記載の波長変換素子の製造装置。 The moving means is
Detecting means for detecting parallelism between the first electrode and the substrate;
The parallelism adjusting means for moving the substrate or the first electrode so that the first electrode and the substrate are parallel based on a detection result from the detecting means. The apparatus for manufacturing a wavelength conversion element according to claim 2.
前記検出手段が、前記貫通孔に向けて光を射出する光源と、前記光の前記基板上からの
反射光を検出する検出部とを有し、
前記検出手段により検出された前記基板の平行度に基づいて、前記平行度調整手段が前
記基板を移動することを特徴とする請求項３に記載の波長変換素子の製造装置。 A through-hole penetrating from the surface facing the substrate to the opposite surface is formed on both ends in the arrangement direction of the plurality of electrode portions of the first electrode,
The detection means includes a light source that emits light toward the through hole, and a detection unit that detects reflected light from the substrate on the light,
4. The apparatus for manufacturing a wavelength conversion element according to claim 3, wherein the parallelism adjusting means moves the substrate based on the parallelism of the substrate detected by the detecting means.
前記第１単一分極化用電極及び前記第２単一分極化用電極により基板に電圧を印加した後、前記第１電極及び前記第２電極により前記基板に電圧を印加することを特徴とする請求項１から請求項４のいずれか１項に記載の波長変換素子の製造装置。 A voltage is applied to one surface of the substrate, and a voltage is applied to the first single polarization electrode having a flat surface opposite to the one surface and the other surface opposite to the one surface of the substrate. And a second single polarization electrode having a flat surface facing the other surface,
A voltage is applied to the substrate by the first electrode and the second electrode, and then a voltage is applied to the substrate by the first electrode and the second electrode. The manufacturing apparatus of the wavelength conversion element of any one of Claims 1-4.
該検出手段からの検出結果に基づいて前記第１単一分極化用電極及び前記第２単一分極化用電極と前記基板とが平行になるように前記基板あるいは少なくとも前記第１単一分極化用電極及び前記第２単一分極化用電極を移動する平行度調整手段を備えることを特徴とする請求項５に記載の波長変換素子の製造装置。 Detection means for detecting parallelism between the first single polarization electrode and the second single polarization electrode and the substrate;
Based on the detection result from the detection means, the substrate or at least the first single polarization so that the first single polarization electrode and the second single polarization electrode are parallel to the substrate. The apparatus for manufacturing a wavelength conversion element according to claim 5, further comprising a parallelism adjusting unit that moves the electrode for electrode and the second electrode for single polarization.
前記平行度調整手段が、前記基板と前記第１電極及び前記第２電極とが平行になるように、前記基板あるいは前記第１電極及び前記第２電極を移動することを特徴とする請求項６に記載の波長変換素子の製造装置。 The detecting means detects parallelism between the first electrode and the second electrode and the substrate;
7. The parallelism adjusting means moves the substrate or the first electrode and the second electrode so that the substrate and the first electrode and the second electrode are parallel to each other. The manufacturing apparatus of the wavelength conversion element of description.
前記基板の一方の面に前記第１電極を接触あるいは近接する工程と、
前記基板の他方の面に前記第２電極を接触あるいは近接する工程と、
前記第１電極と前記第２電極との間に電圧を印加する工程とを備えることを特徴とする波長変換素子の製造方法。 Using a first electrode that applies a voltage to one surface of a substrate made of a ferroelectric, and a second electrode that applies a voltage to the other surface opposite to the one surface of the substrate,
Contacting or approaching the first electrode to one surface of the substrate;
Contacting or approaching the second electrode to the other surface of the substrate;
And a step of applying a voltage between the first electrode and the second electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007109141A JP2008170931A (en) | 2006-12-15 | 2007-04-18 | Apparatus for manufacturing wavelength converting element and method for manufacturing wavelength converting element |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006338292 | 2006-12-15 | ||
| JP2007109141A JP2008170931A (en) | 2006-12-15 | 2007-04-18 | Apparatus for manufacturing wavelength converting element and method for manufacturing wavelength converting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008170931A JP2008170931A (en) | 2008-07-24 |
| JP2008170931A5 true JP2008170931A5 (en) | 2010-01-21 |
Family
ID=39699041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007109141A Pending JP2008170931A (en) | 2006-12-15 | 2007-04-18 | Apparatus for manufacturing wavelength converting element and method for manufacturing wavelength converting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008170931A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010060764A (en) * | 2008-09-03 | 2010-03-18 | Fuji Electric Holdings Co Ltd | Method for forming polarization-inverted area, method for manufacturing pseudo phase matching element, electrode, and method for manufacturing electrode |
| JP5300664B2 (en) * | 2008-10-30 | 2013-09-25 | 日本碍子株式会社 | Method for manufacturing polarization reversal part |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03121428A (en) * | 1989-07-17 | 1991-05-23 | Sony Corp | Domain control method for nonlinear ferroelectric optical material |
| JP4667544B2 (en) * | 1997-04-17 | 2011-04-13 | キネティック リミテッド | Etching method |
| JP2006259338A (en) * | 2005-03-17 | 2006-09-28 | Ricoh Co Ltd | Method and device for fabricating polarization reversal structure |
-
2007
- 2007-04-18 JP JP2007109141A patent/JP2008170931A/en active Pending
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