JP2008161619A - Low-humidity purification unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact low-humidity purification unit having almost the same structure as a conventional one and highly efficient in achieving low humidity and purity inside the unit. <P>SOLUTION: An air permeable material 10 carrying a titanium oxide that works as photocatalyst is provided in air flow passages in an automatic drier 1 within the unit for regenerating a drying agent 3 stored at part of a sealed cabinet 8. The surface of the air-permeable material 10 is irradiated with light of 250 to 450 nm to keep humidity within the cabinet low and decompose and remove organic substances with approximate 0.1 to 10 μm floating in air. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a low-humidity purifier that further enhances its effect by synergistic use of low-humidity action and cleaning action.

Conventionally, as a method of keeping the inside of the cabinet at a low humidity, a method of heating and regenerating the desiccant by automatic control by a timer and keeping the inside humidity at 10% or 30% is known, and photocatalytic action by titanium oxide and ultraviolet rays is known. The method of performing is also known.

However, utilizing the synergistic effect of combining them, the present invention is the most efficient method for low humidity and cleanliness, and is practical as a high-functional model due to the compact design that incorporates almost the same structure as the conventional method in the unit. And progressive.

The present invention focuses on the change in the air layer caused by the difference in water vapor partial pressure in a conventional device that performs a dehumidifying function (hereinafter referred to as a dehumidifying unit), and sucks organic impurities using the difference in air partial pressure.・ By disassembling / removing, the small dehumidifying action and cleaning action are compatible without changing the external dimensions and shape of the dehumidifying unit.

As a method for solving the above-mentioned problems, the photocatalyst utilizes a known technique such as mixing of titanium oxide and apatite, miniaturization of nano units, and the difference in the water vapor partial pressure in the air having a low humidity action is a desiccant. Because it is induced by the moisture-absorbing action of water, paying attention to the pressure difference, the change caused by the movement of air flow, that is, the decomposition of organic impurities mainly composed of titanium oxide in the dehumidification unit that makes the best use of the flow of water vapor partial pressure difference -It is a great feature of the present invention that a photocatalytic function for performing a removing action is arranged.
To explain an example of the difference in water vapor partial pressure, the water vapor partial pressure is apparently 13.4 mmHg from the air diagram at an internal temperature of 24 ° C. and a humidity of 60%. On the other hand, at a temperature of 24 ° C., the water vapor partial pressure on the surface of the desiccant is 0.5 mmHg when the humidity is 0.5% (actually lower), and the difference is 12.9 mmHg. This pressure difference causes the air layer containing water vapor to move slowly. It is a feature of the present invention that this air layer flow is utilized.

That is, according to the present invention, a low-humidity action is achieved by various titanium oxide-supporting methods and arrangements that do not inhibit the air flow in order to introduce a titanium oxide-based photocatalytic action into the air generated by the difference in water vapor pressure in the air in the warehouse. The purifying action promotes a synergistic effect and achieves the purpose of low humidity and cleaning in the cabinet.

As a result of this, for consumer use, camera / lens prevention was done by reducing the humidity in the cabinet (about 30-40%), but fine organic substances contained in the air due to the photocatalytic effect ( 0.1 to several μm) is effective in preventing and removing impurities on the image pickup device (CCD) together with a recently developed digital single lens reflex camera lens. Each camera manufacturer required special equipment such as ultrasonic vibration as a countermeasure against the impurity, which was unreasonable in terms of cost. These were successfully cleaned of impurities, which is a problem, by the low-humidity clean box of the present invention.

In the industrial field, it is essential for storage during the manufacturing process of the CCD or during the camera manufacturer process.

Furthermore, it is extremely effective as a countermeasure for removing a large number of floating organic impurities in both a semiconductor process, wafer storage, and transfer and in a clean room.

The gist of the present invention will be specifically described below with reference to the drawings of the embodiment.

As shown in the side sectional view of the present invention in FIG. 1, the apparatus unit 1 is usually provided on the back side 9 of the cabinet 8 with a hermetic door. Since the unit 1 has a dehumidifying function, the unit 1 is provided with an exhaust port 4 'in the upper part and an intake port 7' in the lower part. The inside of the interior is provided with a hygroscopic agent 3 typified by zeolum silica gel or the like in the middle, and this hygroscopic agent is constituted by a small hole-opening container 2 or a net-like container which is air permeable. These are regenerated at regular intervals under the control of a timer or the like (not shown), and the discharged water is sucked and discharged from the upper 4 'intake by the lower 7' shutter, and is restored by the spring 5 after regenerating the desiccant. .

On the other hand, when the shutters 4 'and 7' are closed, the inner shutter 4.7 is opened in conjunction with the moisture absorption of the internal air (about 6 hours). At this time, the activated desiccant is activated. 3 absorbs moisture from the interior air intake shutter 7 due to the difference in water vapor partial pressure, passes through the desiccant 3, that is, undergoes dehumidification, and stores from the upper shutter due to the water vapor partial pressure difference. This is done continuously for 6 hours.

This air flow process is provided with a titanium oxide-supported screen in the air circuit of FIG. 1, and a light having a wavelength of 250 to 350 nm, or 400 corresponding to visible light, corresponding to the titanium oxide surface layer by small illumination of the LED 11. Irradiates light with a wavelength of ˜450 nm to perform photocatalysis.

FIG. Each part of the side sectional view showing the configuration of the unit of the present invention. 1. Dehumidification / cleaning unit of the present invention 2. Desiccant storage container (breathable hole format) Desiccant 4. 4. Upper internal air discharge side shutter 4 'Upper external air discharge side shutter 5. Tension spring 6. Upper shutter opening / closing fulcrum Lower air intake side shutter 7 'Lower external air intake side shutter 8' Sealed cabinet 9. Same as above 10. 10. Titanium oxide-carrying breathable screen LED lighting lamp 12. Lower shutter opening / closing fulcrum 13. Titanium oxide layer is placed inside the production FIG. Side sectional view of mounting the unit of the present invention on a cabinet 14. Cabinet sealing door 15. Cabinet cabinet shelf 16. Cabinet lower shelf

Claims (2)

Utilizing the difference in water vapor partial pressure of a desiccant with a large adsorption capacity at low humidity, such as Zeolum, a titanium oxide-based catalyst that performs photocatalysis between the desiccant and the flowing air phase in the cabinet is used as the surface of the desiccant container. A clean structure having a structure in which a photocatalytic titanium oxide layer is provided on the inner layer surface of the production that constitutes the above, and at the same time, each titanium oxide layer is irradiated with light having a wavelength of 250 nm to 450 nm, such as LED and mercury lamp. In the above, in order to make the photocatalytic effect effective, the best position for air movement by the water vapor partial pressure induced by the desiccant is oxidized in the middle of the air inlet and outlet in the unit device. An apparatus in which a catalyst made of titanium is arranged and irradiated with the light.

Images