JP2008155337A - Indexing device - Google Patents

Indexing device Download PDF

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Publication number
JP2008155337A
JP2008155337A JP2006348715A JP2006348715A JP2008155337A JP 2008155337 A JP2008155337 A JP 2008155337A JP 2006348715 A JP2006348715 A JP 2006348715A JP 2006348715 A JP2006348715 A JP 2006348715A JP 2008155337 A JP2008155337 A JP 2008155337A
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Prior art keywords
bearing
indexing
pressure
bearing gap
flow rate
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JP2006348715A
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Japanese (ja)
Inventor
Teruzo Suzuki
照三 鈴木
Takanobu Akiyama
貴信 秋山
Hiroshi Uchimura
浩 内村
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Shibaura Machine Co Ltd
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Toshiba Machine Co Ltd
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Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP2006348715A priority Critical patent/JP2008155337A/en
Priority to KR1020070136323A priority patent/KR100966936B1/en
Priority to TW096149955A priority patent/TW200909119A/en
Priority to CN200710144184.9A priority patent/CN101219520B/en
Publication of JP2008155337A publication Critical patent/JP2008155337A/en
Priority to KR1020100020714A priority patent/KR100987564B1/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00Equipment for precise positioning of tool or work into particular locations not otherwise provided for
    • B23Q16/02Indexing equipment
    • B23Q16/021Indexing equipment in which only the positioning elements are of importance
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B23Q17/2291Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the workpiece relative to the holder thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/26Fluid-pressure drives
    • B23Q5/266Fluid-pressure drives with means to control the feed rate by controlling the fluid flow
    • B23Q5/268Fluid-pressure drives with means to control the feed rate by controlling the fluid flow depending upon the position of the tool or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/02Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of drums or rotating tables or discs
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0644Details of devices to control the supply of liquids to the bearings
    • F16C32/0648Details of devices to control the supply of liquids to the bearings by sensors or pressure-responsive control devices in or near the bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662Details of hydrostatic bearings independent of fluid supply or direction of load
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2705/00Driving working spindles or feeding members carrying tools or work
    • B23Q2705/10Feeding members carrying tools or work
    • B23Q2705/12Fluid-pressure drives

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Machine Tool Units (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an indexing device which exerts high indexing accuracy even if a workpiece has a large size. <P>SOLUTION: According to the structure of the indexing device, an indexing table 11 is rotatably supported on a base 10 by a radial bearing 14, an upper thrust bearing 15, and a lower thrust bearing 17 which are all formed of fluid bearings. Then the size of a bearing gap in the upper thrust bearing 15 is detected by a sensor 25, and pressure of pressure fluid supplied to the upper thrust bearing 15 is adjusted by a pressure and flow rate adjusting means 18, so that the size of the bearing gap is maintained to a predetermined value or more at least during rotation of the indexing table 11. Thus an activation torque and a rotation torque of the indexing table 11 are reduced to small values, and the indexing accuracy is enhanced. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明は、金型等の超精密加工用の工作機械等に用いられる割出装置に係り、特に大型ワークへの対応と割出精度の向上に関する。   The present invention relates to an indexing device used for a machine tool for ultra-precise machining such as a mold, and more particularly to handling of a large workpiece and improvement of indexing accuracy.

従来、割出装置は、特許文献1に示されているように、ボールベアリングなどのころがり軸受により割出テーブルを回転自在に支持し、この割出テーブルをウォーム・ウォームホイール機構などにより所定角度回転させる方式のものが多く採用されている。
特開平6−344244号公報
Conventionally, as shown in Patent Document 1, the indexing device rotatably supports an indexing table by a rolling bearing such as a ball bearing, and this indexing table is rotated by a predetermined angle by a worm / worm wheel mechanism or the like. Many of them are used.
JP-A-6-344244

上記のように割出テーブルをころがり軸受で支持し、ウォーム・ウォームホイール機構で所定角度の回転を与える方式は、特に大型のワークを支持する場合、構造上、軸剛性が低くなり、割出精度を高めることができない欠点がある。   As described above, the indexing table is supported by rolling bearings, and the worm / worm wheel mechanism provides a specified angle of rotation, especially when supporting large workpieces, the shaft rigidity is low due to the structure and indexing accuracy. There is a disadvantage that can not be increased.

これは、割出のための角度エンコーダ等のスケールを割出テーブルの中心に置く構造が一般的に採用されており、割出角度は、ワークが大きくなる程、外周部での位置のずれが大きくなるためである。   In general, a structure in which a scale such as an angle encoder for indexing is placed at the center of the indexing table is used. The larger the workpiece, the more the position shifts at the outer periphery. This is because it becomes larger.

これに対し、割出テーブルを空気軸受などの流体軸受により支持すれば、割出テーブルの起動トルクを小さく抑えることができ、結果的に軸剛性を高めたこととなり、割出精度を高めることはできる。しかしながら、特に起動トルクをより小さく抑えることができる空気軸受の場合、軸剛性の低下はないが、軸受剛性が低くなり、大型ワークのような重量物を支えることができないと同時に、軸受への偏荷重に弱いなどの課題があり、流体軸受は軽量用の割出装置に用いられるのが一般的であった。   On the other hand, if the indexing table is supported by a fluid bearing such as an air bearing, the starting torque of the indexing table can be kept small, resulting in increased shaft rigidity and higher indexing accuracy. it can. However, in the case of an air bearing that can suppress the starting torque to a smaller extent, there is no reduction in shaft rigidity, but the bearing rigidity is lowered and cannot support a heavy object such as a large workpiece. There are problems such as weakness in load, and fluid bearings are generally used for light-weight indexing devices.

この発明は、大型ワークであっても高い割出精度を得ることのできる割出装置を提供することを目的としている。   An object of the present invention is to provide an indexing device capable of obtaining a high indexing accuracy even for a large workpiece.

上記目的を達成するためのこの発明による割出装置は、ベースと、このベースに流体軸受を介して回転自在に取り付けられた割出テーブルと、ベースと割出テーブルとの間に設けられ、流体軸受の軸受隙間の大きさを測定するためのセンサと、流体軸受に供給する圧力流体の圧力・流量を調整して軸受隙間の大きさを変化させるための圧力・流量調整手段と、前記センサの出力を取り込み、少なくとも前記割出テーブルの回転時には軸受隙間の大きさを所定値以上に保つように圧力・流量調整手段を作動させる制御部と、を備えてなることを特徴としている。   In order to achieve the above object, an indexing device according to the present invention is provided with a base, an indexing table rotatably attached to the base via a fluid bearing, and provided between the base and the indexing table. A sensor for measuring the size of the bearing gap of the bearing, a pressure / flow rate adjusting means for adjusting the pressure / flow rate of the pressure fluid supplied to the fluid bearing to change the size of the bearing gap, And a control unit that operates the pressure / flow rate adjusting means so as to keep the size of the bearing gap at or above a predetermined value at least when the indexing table rotates.

なお、割出テーブルは水平に配置され、センサは前記割出テーブルの荷重が作用する上部スラスト軸受の軸受隙間の大きさを測定するように構成されているものであってよく、この場合、前記制御部は、前記割出テーブルの回転時には前記上部スラスト軸受の軸受隙間の大きさを所定値以上に保つと共に、前記割出テーブルの停止時には前記上部スラスト軸受の軸受隙間をなくすように前記圧力・流量調整手段を作動させるように構成されていることが望ましい。
また、前記制御部は、前記軸受隙間センサのほか、さらに、少なくも圧力流体の圧力または流量を検出するためのセンサを含む他の種類のセンサと共に使用して、割出テーブル軸受隙間を手動または自動で所定の値に保つように構成されていることを特徴とする請求項2に記載の割出装置。
さらに、前記流体軸受は、空気軸受であることが好ましい。
The indexing table may be arranged horizontally, and the sensor may be configured to measure the size of the bearing gap of the upper thrust bearing on which the load of the indexing table acts. The control unit maintains the size of the bearing gap of the upper thrust bearing at a predetermined value or more when the indexing table rotates, and eliminates the bearing gap of the upper thrust bearing when the indexing table stops. Desirably, the flow rate adjusting means is configured to operate.
In addition to the bearing gap sensor, the control unit may be used with other types of sensors including at least a sensor for detecting the pressure or flow rate of the pressure fluid, and the indexing table bearing gap may be manually or The indexing device according to claim 2, wherein the indexing device is configured to automatically maintain a predetermined value.
Furthermore, the fluid bearing is preferably an air bearing.

この発明は、上記のように割出テーブルを流体軸受により回転自在に支持すると共に、センサにより軸受隙間の大きさを測定し、少なくとも前記割出テーブルの回転時には軸受隙間の大きさを所定値以上に保つように前記流体軸受に供給する圧力流体の圧力を調整するようにしたため、大型ワークのような重量物であっても所定の大きさの軸受隙間を設けて回転自在に支えることができ、特に起動トルクがより小さい空気軸受の場合にも、大型ワークのような重量物を的確に支えて小さいトルクで回転させることができ、これにより割出精度を高めることができる効果が得られる。   As described above, the present invention supports the indexing table rotatably with a fluid bearing, measures the size of the bearing gap with a sensor, and at least rotates the indexing table when the indexing table rotates. Since the pressure of the pressure fluid supplied to the fluid bearing is adjusted so as to maintain the fluid bearing, even a heavy object such as a large workpiece can be rotatably supported by providing a bearing gap of a predetermined size, In particular, even in the case of an air bearing having a smaller starting torque, a heavy load such as a large workpiece can be accurately supported and rotated with a small torque, thereby obtaining an effect of improving the indexing accuracy.

以下図1によりこの発明の一実施形態例について説明する。図1において、10はベース、11は割出テーブルである。割出テーブル11は水平に配置され、その中心下部に後述するダイレクトドライブ(DD)モータ12を構成するロータ12Aが設けられると共に、このロータ12Aを囲むように円環状ボス13が一体的に設けられている。   An embodiment of the present invention will be described below with reference to FIG. In FIG. 1, 10 is a base and 11 is an indexing table. The indexing table 11 is horizontally arranged, and a rotor 12A constituting a direct drive (DD) motor 12 described later is provided at the lower center of the indexing table 11, and an annular boss 13 is integrally provided so as to surround the rotor 12A. ing.

円環状ボス13の外周面は、ベース10に設けられた例えば静圧型などの流体軸受からなるラジアル軸受14に回転自在に係合している。また、割出テーブル11の下面は、同じくベース10に設けられた例えば静圧型などの流体軸受からなる上部スラスト軸受15により回転自在に支持されている。さらに、円環状ボス13の下端には、リング状の受け板16が取り付けられ、この受け板16の上面は、同じくベース10に設けられた例えば静圧型などの流体軸受からなる下部スラスト軸受17に回転自在に近接対向されている。   An outer peripheral surface of the annular boss 13 is rotatably engaged with a radial bearing 14 provided on the base 10 and made of a hydrodynamic bearing such as a static pressure type. Further, the lower surface of the indexing table 11 is rotatably supported by an upper thrust bearing 15 which is provided on the base 10 and is composed of a hydrodynamic bearing such as a static pressure type. Further, a ring-shaped receiving plate 16 is attached to the lower end of the annular boss 13, and the upper surface of the receiving plate 16 is also connected to a lower thrust bearing 17 formed of a hydrodynamic bearing such as a hydrostatic type provided on the base 10. It is close to each other so that it can rotate freely.

上記ラジアル軸受14、上部スラスト軸受15及び下部スラスト軸受17は、それぞれ円周上で複数に分割され、上記3つの軸受14、15、17のうち割出テーブルの荷重が直接作用する上部スラスト軸受15の分割された各軸受には、各軸受にそれぞれ対応させて圧力・流量調整手段18が設けられ、これらの圧力・流量調整手段18を介して加圧空気や圧油などの圧力流体が各軸受に供給される。なお、ラジアル軸受14及び下部スラスト軸受17も、上部スラスト軸受15と同様に複数に分割され、図示省略した圧力・流量調整手段を介して所定の圧力の圧力流体がそれぞれ供給される。   The radial bearing 14, the upper thrust bearing 15 and the lower thrust bearing 17 are each divided into a plurality of parts on the circumference, and the upper thrust bearing 15 to which the load of the indexing table directly acts out of the three bearings 14, 15, 17. Each of the divided bearings is provided with pressure / flow rate adjusting means 18 corresponding to each bearing, and pressure fluid such as pressurized air or pressurized oil is supplied to each bearing through these pressure / flow rate adjusting means 18. To be supplied. The radial bearing 14 and the lower thrust bearing 17 are also divided into a plurality of parts like the upper thrust bearing 15 and supplied with a pressure fluid of a predetermined pressure via a pressure / flow rate adjusting means (not shown).

上記DDモータ12は、割出テーブル11の中心下部に一体的に形成された突出部11Aに設けられたロータ12Aと、ベース10に取り付けられたステータ12Bとからなり、モータ駆動部19により作動されて割出テーブル11を回転させる。   The DD motor 12 includes a rotor 12A provided on a projecting portion 11A integrally formed at the lower center of the indexing table 11, and a stator 12B attached to the base 10, and is operated by a motor driving portion 19. Then, the indexing table 11 is rotated.

DDモータ12の下端、すなわち割出テーブル11の突出部11Aの下端とベース10との間には角度エンコーダ20が取り付けられ、割出テーブル11の回転角度位置を検出し、その出力は制御部21へ送られる。制御部21は、外部から与えられた指令と角度エンコーダ20の出力によりモータ駆動部19を作動させて割出テーブル11を所定角度回転させると共に、所定角度位置に停止・保持する。   An angle encoder 20 is attached between the lower end of the DD motor 12, that is, between the lower end of the protruding portion 11 </ b> A of the indexing table 11 and the base 10, detects the rotational angle position of the indexing table 11, and its output is the control unit 21. Sent to. The control unit 21 operates the motor drive unit 19 by a command given from the outside and the output of the angle encoder 20 to rotate the index table 11 by a predetermined angle, and stops and holds the index table 11 at a predetermined angular position.

割出テーブル11には、ワークWを真空吸着するための流路22が設けられ、この流路22は、割出テーブル11の突出部11Aの下端中央に設けられた回転継手23を介して真空装置24に接続されている。この真空装置24は、制御部21からの指令により作動され、流路22を負圧と大気圧とに選択的に切り換える。   The indexing table 11 is provided with a flow path 22 for vacuum-sucking the workpiece W, and this flow path 22 is vacuumed via a rotary joint 23 provided at the center of the lower end of the protruding portion 11A of the indexing table 11. It is connected to the device 24. The vacuum device 24 is operated by a command from the control unit 21 and selectively switches the flow path 22 between a negative pressure and an atmospheric pressure.

ベース10には、割出テーブル11の下面に対向させて好ましくは非接触式のセンサ25が割出テーブル11の円周方向に例えば90°の間隔等で複数個配置され、割出テーブル11の下面の上下方向位置の変化又はセンサ25からの距離を検出し、その出力を制御部21に送るようになっている。   A plurality of preferably non-contact sensors 25 are arranged on the base 10 so as to face the lower surface of the indexing table 11 at intervals of, for example, 90 ° in the circumferential direction of the indexing table 11. The change in the vertical position of the lower surface or the distance from the sensor 25 is detected, and the output is sent to the control unit 21.

制御部21は、各センサ25の出力から上部スラスト軸受15の分割された各軸受の軸受隙間の大きさを求め、各軸受毎に設けられている圧力・流量調整手段18をそれぞれ作動させて、各軸受の軸受隙間の大きさを所定値以上に保つことのできる圧力で加圧空気や圧油などの圧力流体を上部スラスト軸受15の各軸受へ供給するように構成されている。また、この制御部21は、割出テーブル11の停止中には上記圧力流体の圧力を下げるように圧力調整手段18をそれぞれ作動させて、各軸受の軸受隙間をなくすように構成され、さらに、割出テーブル11の回転指令が出されたときには、上記軸受隙間の大きさを所定値以上にすべく圧力調整手段18をそれぞれ作動させると共に、該軸受隙間の大きさが所定値以上になったところで割出テーブル11を回転させるように構成されている。   The control unit 21 obtains the size of the bearing clearance of each of the divided bearings of the upper thrust bearing 15 from the output of each sensor 25, operates each pressure / flow rate adjusting means 18 provided for each bearing, A pressure fluid such as pressurized air or pressurized oil is supplied to each bearing of the upper thrust bearing 15 at a pressure capable of keeping the size of the bearing gap of each bearing at a predetermined value or more. The control unit 21 is configured to operate the pressure adjusting means 18 so as to reduce the pressure of the pressure fluid while the indexing table 11 is stopped, thereby eliminating the bearing gaps of the respective bearings. When a rotation command for the indexing table 11 is issued, the pressure adjusting means 18 is operated to make the size of the bearing gap larger than a predetermined value, and when the size of the bearing gap becomes larger than the predetermined value. The index table 11 is configured to rotate.

次いでこの装置の作用について説明する。上記のように割出テーブル11の停止中は、圧力・流量調整手段18により上部スラスト軸受15へ供給する圧力流体の圧力を下げて上部スラスト軸受15の軸受隙間をなくし、割出テーブル11を上部スラスト軸受15により直接的に支持する。これにより割出テーブル11は、軸受隙間の変化に伴う傾きなどを発生することなく、確実に所定の姿勢で停止状態を保つ。   Next, the operation of this apparatus will be described. While the indexing table 11 is stopped as described above, the pressure / flow rate adjusting means 18 lowers the pressure of the pressure fluid supplied to the upper thrust bearing 15 to eliminate the bearing clearance of the upper thrust bearing 15, and the indexing table 11 is moved upward. It is directly supported by the thrust bearing 15. As a result, the indexing table 11 reliably maintains a stopped state in a predetermined posture without causing an inclination or the like due to a change in the bearing gap.

なお、ラジアル軸受14及び下部スラスト軸受17は、上記割出テーブル11の停止中にも、所定圧力の圧力流体を供給され、ラジアル軸受14により割出テーブル11の中心位置を保持すると共に、下部スラスト軸受17により割出テーブル11を下方へ押し下げ、上部スラスト軸受15の軸受隙間をより完全になくして割出テーブル11を固定的に保持する。   The radial bearing 14 and the lower thrust bearing 17 are supplied with a pressure fluid of a predetermined pressure even while the indexing table 11 is stopped, hold the center position of the indexing table 11 by the radial bearing 14, and lower thrust. The indexing table 11 is pushed downward by the bearing 17 to eliminate the bearing gap of the upper thrust bearing 15 more completely, and the indexing table 11 is fixedly held.

上記停止状態において、割出テーブル11の回転指令が出されると、制御部21は、まず、センサ25の出力が所定値以上、すなわち上部スラスト軸受15の分割された各軸受の軸受隙間の大きさがそれぞれ所定値以上となるように圧力・流量調整手段18を作動させて上部スラスト軸受15の各軸受に供給する圧力流体の圧力を高める。   When a rotation command for the indexing table 11 is issued in the stop state, the control unit 21 firstly outputs the sensor 25 at a predetermined value or more, that is, the size of the bearing clearance of each of the divided bearings of the upper thrust bearing 15. The pressure / flow rate adjusting means 18 is actuated to increase the pressure of the pressure fluid supplied to the bearings of the upper thrust bearing 15 so that each becomes equal to or greater than a predetermined value.

センサ25の出力が所定値以上に達すると、制御部21は、モータ駆動部19に起動指令を出してDDモータ12を作動させ、割出テーブル11を回転させる。割出テーブル11の回転角度位置は角度エンコーダ20により検出され、これが所定の値に達すると、
制御部21は、停止指令を出して割出テーブル11の回転を停止させる。
When the output of the sensor 25 reaches a predetermined value or more, the control unit 21 issues a start command to the motor drive unit 19 to operate the DD motor 12 and rotate the index table 11. The rotation angle position of the indexing table 11 is detected by the angle encoder 20, and when this reaches a predetermined value,
The control unit 21 issues a stop command to stop the rotation of the index table 11.

この割出テーブル11の割出動作は、ラジアル軸受14及び下部スラスト軸受17はもちろん荷重が直接作用する上部スラスト軸受15の軸受隙間の大きさを所定値以上に保って行われるため、割出テーブル11の起動トルク及び回転トルクが小さく抑えられる。このため割出テーブル11は、スティックスリップやオーバランなどを抑えられ、正確な割出位置に停止される。   The indexing operation of the indexing table 11 is performed while maintaining the size of the bearing clearance of the upper thrust bearing 15 to which the load is applied directly as well as the radial bearing 14 and the lower thrust bearing 17 at a predetermined value or more. 11 starting torque and rotational torque can be kept small. For this reason, the index table 11 is prevented from stick-slip or overrun, and is stopped at an accurate index position.

割出テーブル11が完全に停止すると、制御部21は、上部スラスト軸受15の軸受隙間をなくすように圧力・流量手段18を作動させ、割出テーブル11を上記のように確実に保持する。   When the indexing table 11 is completely stopped, the control unit 21 operates the pressure / flow rate means 18 so as to eliminate the bearing clearance of the upper thrust bearing 15 and reliably holds the indexing table 11 as described above.

前述した実施形態例では、割出テーブル11を水平に配置した例を示したが、この発明はこれに限定されるものではなく、割出テーブル11の軸心を水平に配置する方式の割出装置であっても同様の作用効果が得られる。また、流体軸受としては、公知の種々のものを用いることができ、特に静圧型の空気等の気体を用いる流体軸受が工場に用意されているエアー配管を利用でき、また空気であり取り扱いが比較的に容易であることなどから好ましい。さらにまた、前述した実施形態例では、軸受隙間の大きさを測定するためのセンサとして、割出テーブル11の下面に対向させた非接触式のセンサ25を用いた例を示したが、この発明は、これに限定されるものではなく、軸受内に組込み可能な静電容量型のセンサなど種々のセンサを用いることができる等、種々変形実施可能である。   In the above-described embodiment, the example in which the index table 11 is horizontally arranged has been shown. However, the present invention is not limited to this, and the index of the system in which the axis of the index table 11 is horizontally arranged is shown. Even if it is an apparatus, the same effect can be obtained. In addition, various well-known bearings can be used as the fluid bearing, and in particular, a fluid bearing using a gas such as static pressure type air can be used in an air pipe prepared in the factory. It is preferable because it is easy. Furthermore, in the above-described embodiment, an example in which the non-contact sensor 25 opposed to the lower surface of the indexing table 11 is used as a sensor for measuring the size of the bearing gap is shown. However, the present invention is not limited to this, and various modifications such as various sensors such as a capacitance type sensor that can be incorporated in the bearing can be used.

さらに、前述の実施形態例では、軸受隙間の大きさを測定するためのセンサ25を使用した例を示したが、本発明はこの例に限定されず、別な実施形態の例としては、テーブルの位置を監視するなどの位置のセンサ、圧力センサ、流量センサ等の他の性質のセンサと併用して使用する形態としても良い。特に、圧力流体の調節手段である圧力流体調節手段に標準的に備えられている圧力センサや、流体の流路に設けられた流量センサなどの値を制御装置21に入力して、それらを一緒に用いると都合が良い。この場合、制御部21は、これらの軸受隙間センサの以外の他のセンサからの得られる圧力、流量等の情報も利用できる。このような複数のセンサを使用した場合は、軸受隙間を監視しつつ、流体の圧力や流量についても検知しながら、制御可能になる。つまりあらかじめ設定した流体の圧力や流量の値を、軸受部や流体の流路等に設けられたこれらの他のセンサの値を監視しつつ流量制御手段18を用いて、手動あるいは自動により制御し、ワーク重量と軸受隙間との関係を、所定の加工条件で、あるいは状況に応じて、最適な状況に保つよう監視しつつ制御できる。さらに他のセンサとして位置のセンサを使用して、例えば、テーブルの上面の位置等を測定するなどしして、軸受隙間を計算から推定し、圧力・流量調節手段を手動あるいは自動で制御し、軸受隙間を最適な所望の位置に制御すような構成の実施形態をとることも可能である。しかしこのような場合には、構成がより複雑になる。 Furthermore, in the above-mentioned embodiment, the example using the sensor 25 for measuring the size of the bearing gap is shown, but the present invention is not limited to this example, and another example of the embodiment includes a table. The position may be used in combination with a sensor having other properties such as a position sensor, a pressure sensor, a flow rate sensor, or the like. In particular, values such as a pressure sensor that is normally provided in the pressure fluid adjustment means, which is a pressure fluid adjustment means, and a flow rate sensor provided in the fluid flow path are input to the control device 21 and are combined together. It is convenient to use for. In this case, the control unit 21 can also use information such as pressure and flow rate obtained from sensors other than these bearing gap sensors. When such a plurality of sensors are used, control is possible while monitoring the bearing gap and detecting the pressure and flow rate of the fluid. That is, the fluid pressure and flow rate values set in advance are controlled manually or automatically using the flow rate control means 18 while monitoring the values of these other sensors provided in the bearings and fluid flow paths. The relationship between the workpiece weight and the bearing gap can be controlled while monitoring so as to maintain an optimum situation under predetermined processing conditions or according to the situation. Furthermore, using the position sensor as another sensor, for example, measuring the position of the upper surface of the table, etc., estimating the bearing gap from the calculation, controlling the pressure / flow rate adjusting means manually or automatically, It is also possible to take an embodiment in which the bearing gap is controlled to an optimum desired position. However, in such a case, the configuration becomes more complicated.

この発明は、金型等の超精密加工用であって、かつ大型ワークを加工する工作機械に用いられる割出装置において大きな効果を発揮するが、これに限らず、小型ワーク用や工作機械以外の種々の機械用の割出装置に広く適用可能である。   The present invention is effective for an indexing device used for a machine tool for machining a large workpiece, for ultra-precision machining of a mold or the like, but is not limited thereto, and is not limited to a small workpiece or a machine tool. The present invention can be widely applied to indexing devices for various machines.

この発明を適用した割出装置の概要構成図。The outline block diagram of the indexing device to which this invention is applied.

符号の説明Explanation of symbols

10 ベース
11 割出テーブル
11A 突出部
12 ダイレクトドライブ(DD)モータ
12A ロータ
12B ステータ
13 円環状ボス
14 ラジアル軸受
15 上部スラスト軸受
16 受け板
17 下部スラスト軸受
18 圧力・流量調整手段
19 モータ駆動部
20 角度エンコーダ
21 制御部
22 流路
23 回転継手
24 真空装置
25 センサ
W ワーク。
DESCRIPTION OF SYMBOLS 10 Base 11 Indexing table 11A Protrusion part 12 Direct drive (DD) motor 12A Rotor 12B Stator 13 Annular boss 14 Radial bearing 15 Upper thrust bearing 16 Receiving plate 17 Lower thrust bearing 18 Pressure / flow rate adjustment means 19 Motor drive part 20 Angle Encoder 21 Control unit 22 Flow path 23 Rotary joint 24 Vacuum device 25 Sensor W Workpiece.

Claims (5)

ベースと、
このベースに流体軸受を介して回転自在に取り付けられた割出テーブルと、
前記ベースと割出テーブルとの間に設けられ、前記流体軸受の軸受隙間の大きさを測定するための軸受隙間センサと、
前記流体軸受に供給する圧力流体の圧力・流量を調整して前記軸受隙間の大きさを変化させるための圧力・流量調整手段と、
前記軸受隙間センサの出力を取り込み、少なくとも前記割出テーブルの回転時には軸受隙間の大きさを所望の状態に保つように前記圧力・流量調整手段を作動させる制御部と、
を備えてなる割出装置。
Base and
An indexing table rotatably attached to the base via a fluid bearing;
A bearing gap sensor provided between the base and the indexing table for measuring the size of the bearing gap of the fluid bearing;
Pressure / flow rate adjusting means for adjusting the pressure / flow rate of the pressure fluid supplied to the fluid bearing to change the size of the bearing gap;
A controller that takes in the output of the bearing gap sensor and operates the pressure / flow rate adjusting means so as to keep the size of the bearing gap in a desired state at least during rotation of the indexing table;
An indexing device comprising:
前記割出テーブルは、水平に配置され、また前記軸受隙間センサは、前記割出テーブルの荷重が作用する上部スラスト軸受の軸受隙間の大きさを測定するように構成されていることを特徴とする請求項1に記載の割出装置。   The index table is arranged horizontally, and the bearing gap sensor is configured to measure the size of the bearing gap of the upper thrust bearing on which the load of the index table acts. The indexing device according to claim 1. 前記制御部は、前記割出テーブルの回転時には前記上部スラスト軸受の軸受隙間の大きさを所定値以上に保つと共に、前記割出テーブルの停止時には前記上部スラスト軸受の軸受隙間をなくすように前記圧力・流量調整手段を作動させるように構成されていることを特徴とする請求項2に記載の割出装置。   The control unit maintains the size of the bearing gap of the upper thrust bearing at a predetermined value or more when the indexing table rotates, and eliminates the bearing gap of the upper thrust bearing when the indexing table stops. The indexing device according to claim 2, wherein the indexing device is configured to operate the flow rate adjusting means. 前記制御部は、さらに、前記軸受隙間センサのほか、少なくも前記圧力流体の圧力または流量を検出するためのセンサを含む他の種類のセンサを共に使用して、前記割出テーブル軸受隙間を手動または自動で所望の状態に保つように構成されていることを特徴とする請求項1に記載の割出装置。 In addition to the bearing gap sensor, the controller further uses other types of sensors including at least a sensor for detecting the pressure or flow rate of the pressure fluid to manually determine the index table bearing gap. The indexing device according to claim 1, wherein the indexing device is configured to automatically maintain a desired state. 前記流体軸受は、空気軸受であることを特徴とする請求項1ないし4項に記載の割出装置。   5. The indexing device according to claim 1, wherein the fluid bearing is an air bearing.
JP2006348715A 2006-12-26 2006-12-26 Indexing device Pending JP2008155337A (en)

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TW096149955A TW200909119A (en) 2006-12-26 2007-12-25 Indexing device
CN200710144184.9A CN101219520B (en) 2006-12-26 2007-12-26 Indexing means
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KR20120068196A (en) * 2010-12-17 2012-06-27 두산인프라코어 주식회사 Rotary table device for direct drive
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A912 Removal of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20121019