JP2008154447A - Artificial muscle using electrostatic actuator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a solution as to how to realize a method for supplying electric power to the respective actuators and a method for driving and controlling them as problems accompanied by realization of lamination and the lamination in order to realize artificial muscles using the DC-driven electrostatic actuators (Japanese Patent Application 2007-62558). <P>SOLUTION: Because softening of the actuator is essential in order to realize the artificial muscles, a film-shaped or cylindrical actuator is proposed as a method of softening. On the other hand, power supply to the respective actuators becomes a problem for lamination. Hence, as the method for supplying electric power using fluid, the method utilizing principals of fuel cell and bio battery is proposed for the respective actuators. A schematic diagram of an artificial muscle system made by combining these technologies is shown in Fig. 1, an actuator structure 1 is driven by a signal of a driving control line 3 utilizing a fluid 6, the waste solution thereof is regenerated at a regenerator 4, and the regenerated solution is returned to the electrostatic actuator again, and is utilized through circulation by a pump 7, 9 and 10 show branch tubes to the other actuators. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to an assembly technique using a DC-driven electrostatic actuator (Japanese Patent Application No. 2007-62558) and realization of an artificial muscle.

The industry is currently seeing remarkable equipment miniaturization. Naturally, the drive device used there is also required to be small, light and low power consumption.
It is easy to imagine that the most suitable for this would be the muscles of the living body. This is because the muscle is a drive mechanism that can be realized in a small structure like an ant.
However, there are still many mysteries about the operating principle of the muscles in the living body, and the development of artificial muscles close to the living body has not yet been completed.
"Biomolecular Motor" (Iwanami Shoten) Pages 1-8 "Muscle" (Chemical Doujin) Pages 39-66

Of course, various artificial muscles are currently being developed, but their structures and operating principles are completely different from those of living organisms.
JP-A-5-22959 JP-A-5-91661

However, even if the driving mechanism of the living muscle is not clarified in detail, it is considered that an artificial muscle having the same operation as that of the living muscle can be realized.
For sure, there are many mysteries in the muscles of living organisms, but it has been known for a long time that myosin slides on actin, and it is also clear that the slide is caused by electrostatic force. (There are only four types of interactions that have been discovered in physics, and in vivo interactions can only be electromagnetic forces, especially electrostatic forces. There is no change in the interaction derived from, and if you think closely, it is essentially the same as the electrostatic force acting in the capacitor.) As long as there is a muscle that contracts in nature, if you control the charge well, it will be the same as the muscle This is because it should be possible to create actuators that move (slide and contract).
In that sense, an electrostatic actuator (hereinafter, Japanese Patent Application No. 2007-62558 is referred to as a basic patent, and a DC-driven electrostatic actuator therein is simply referred to as an electrostatic actuator.) You can think about it.
If so, it would be possible to realize a muscle system similar to that of a living body using this electrostatic actuator.

The present invention uses an electrostatic actuator to clarify the items required to construct a muscle system similar to that of a living body, and presents a solution.

First, in the above-mentioned patent “DC-driven electrostatic actuator” (patent number), which is described based on a hard substrate, the actual biological muscle is flexible and soft.
Certainly, the range of use is limited if it is a rigid substrate, so the range of use will be greatly expanded if flexibility is provided. However, even if the above-mentioned patent is replaced with a flexible material as it is, electrode installation and power supply In addition, with the softening of the stator or the mover, the contact between the two becomes incomplete, which may lead to the loss of the drive mechanism.
On the contrary, when the contact pressure between the two increases, a large frictional resistance is generated, and as a result, the driving function may be lost.
Therefore, the development of an electrostatic actuator that can maintain the driving function even if it is flexible has become an issue.

Moreover, the performance is limited only by making the electrostatic actuator flexible.
Therefore, the range of use is greatly expanded by combining a plurality of electrostatic actuators and improving the functions.
For example, a plurality of electrostatic actuators are arranged in series in the contraction direction, and the mover of the electrostatic actuator at the end and the stator of the adjacent electrostatic actuator are structurally coupled, and the mover of the adjacent actuator and further When it is structurally coupled to the electrostatic actuator stator adjacent to it, and such a structure is repeatedly coupled to the electrostatic actuator at the other end (this is referred to as stacking in series), such as Such an electrostatic actuator assembly can increase the contraction speed several times as much as that of a single electrostatic actuator having the same length.
Although detailed description will be given later, functions that cannot be obtained by a single electrostatic actuator can be realized by stacking a plurality of electrostatic actuators.
Therefore, it has become a problem to clarify what functions can be obtained by taking any laminated structure.

However, stacking actuators also makes it difficult to supply power to each actuator.
This is because the structure for moving the drive target that transmits the drive force of the actuator (when power is supplied by a conductor, the power of the actuator is usually supplied from this structure) This is because there are actuators that move together as the child contracts, and it is necessary to devise power supply and the like.
Therefore, the development of a method capable of supplying power even in a laminated structure has become an issue.

Furthermore, how to control shrinkage by stacking actuators is also a problem.
In the method of the aforementioned patent, a signal must be transmitted to each actuator as in the case of power supply.
Therefore, the development of a method that can be easily controlled even in a laminated structure has become an issue.

In addition, driving in a harsh environment is naturally conceivable as the actuator system becomes larger.
In order to obtain high output with this point electrostatic actuator, it is necessary to reduce the size to a micrometer size, and therefore, temperature management for lubricant characteristics and position management accompanying thermal expansion is essential.
Therefore, the issue was how to manage temperature.

Further, when the electrostatic actuator is used for a long period of time, it is conceivable that the lubricant is deteriorated and the performance of the actuator is deteriorated.
Therefore, how to purify the lubricant became an issue.

As a method for solving the contact failure between the stator and the moving member or the loss of the driving function due to the increase in friction, a method of keeping the pressure between the two substantially constant by stacking dozens of actuators is conceivable.
When actuators are stacked, if the stator of a certain actuator and the mover are about to leave, the contact pressure between the stator and mover of the adjacent actuator increases and pushes back. This is because the stator and the mover can maintain the contact pressure.
Therefore, actuators are stacked to overcome the problems associated with flexibility, and a configuration method is proposed.

Next, in evaluating the performance of a combination of a plurality of electrostatic actuators, the performance can be expressed by three parameters of contraction force, contraction rate, and contraction speed, and the most appropriate configuration can be obtained to obtain the desired performance. Like that.
As a result, it is possible to clarify what function can be obtained with any stacked structure.

On the other hand, regarding the power supply method that accompanies the stacking of electrostatic actuators, we devised a wiring method and sought to make it easier to construct, and sought to transport charges using fluids, for example, regardless of wiring. It can be thought of as a way to

First, as wiring methods, there are a method of gathering electrostatic actuators in parallel and a method of gathering in series.
Among these, when stacked in parallel, a structure for fixing the stators to each other is required, and wiring to each actuator may be provided in the structure, and the solution is relatively easy.
The problem is when stacked in series.
In this case, since the positions between the stators change, it is necessary to flexibly arrange wiring for supplying a voltage to the drive electrodes.
Therefore, a method of enabling voltage supply by providing wiring for bridging between adjacent stators can be considered.
Furthermore, if the electrostatic actuator overextension prevention structure includes a wiring function, the problem can be solved more rationally.

The other is a method of transporting charges using a fluid.
In this method, a fluid capable of holding charge and a charge transfer electrode having a charge transfer function from the fluid are provided on each drive electrode of the stator, and the voltage of the drive electrode is maintained by the received charge. It is.
In this method, it is not necessary to provide wiring for supplying a voltage between the stators, and the configuration of the electrostatic actuator assembly can be simplified.

Finally, with regard to the start-up control of the electrostatic actuator assembly, the most general solution may be to directly drive each actuator.
In this method, all the actuators that have become large as an aggregate must be turned on and off by the start circuit, and in some cases, the control circuit and wiring may need to be thickened.
Therefore, for a large-scale electrostatic actuator assembly, a complicated control circuit such as providing a high-current output circuit or controlling the output of a low-current output circuit with a start signal is required.
However, this method is suitable for a driving method in which driving power is supplied by wiring, and is not suitable for the above-described method using a fluid containing high-energy molecules.

On the other hand, when a high energy fluid is used, a method of providing a switch between the redox electrode for taking out electric charge from the energy fluid and the drive electrode and turning it on / off is conceivable.
In this method, since the starting current hardly flows, the output circuit for driving control can be downsized even with a huge electrostatic actuator structure.

As described above, by combining a plurality of electrostatic actuators, artificial muscles having various performances can be configured, and an effect of market expansion can be expected.
In addition, by devising a power supply method, it is possible to use a fluid instead of using a conventional conductor, and it can also function as a lubricant, a coolant, or a heat insulating material. Can be closer.
This opens the way for application to fusion with living bodies, for example, artificial hearts.
Furthermore, since it is an artificial muscle, it can be expected to be applied to extreme environments (such as outer space, high radiation areas, high pressure, high temperature, and cryogenic space) that are impossible with living muscles.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

Since this electrostatic actuator is direct current driven, it does not require a complicated drive control circuit. Therefore, in addition to the general method of supplying drive power by conducting wires, each drive energy is placed on a high energy fluid. It is possible to generate a driving force by drawing out charges in the actuator.
FIG. 1 shows a schematic structural diagram of a regeneration system in which the actuator is driven using high energy, the waste liquid is regenerated, returned to the electrostatic actuator, and circulated for use.
First, the electrostatic actuator 1 is driven using the charge received from the high energy fluid 6. (The mechanism for extracting the charge from the high-energy fluid in the electrostatic actuator will be described later.)
This driving force is transmitted to the outside through the driving force transmission structure 2.
Thereafter, the waste liquid of the high energy fluid that has exited the actuator joins with the waste liquid discharged from other actuators and is sent to the regenerator 4.
In the regenerator 4, the power supplied from the regeneration power supply line 5 is regenerated into a high energy fluid.
The high energy fluid 6 exiting the regenerator 4 is boosted by the circulation pump 7, then branched to the supply branch pipe 9 to other actuators, and sent again to the electrostatic actuator 1 via the flow rate control valve 8. .
Thus, even a plurality of stacked electrostatic actuator structures can be driven by a single regenerator.
Accordingly, it is possible to supply power without providing a special power supply line, and it is possible to supply power relatively simply even in a complex system including a plurality of stacked electrostatic actuator structures.
Furthermore, if the regenerator has a constant temperature function and a cleaning function (foreign matter removal function), the temperature of the actuator itself can be kept constant, and it can be used in a high or low temperature environment, or the destruction of high energy molecules under high radiation. It is possible to improve the functional deterioration due to the above.

FIG. 2 shows the principle of operation of the electrostatic actuator.
The electrostatic actuator includes a stator 11 on which electrodes are arranged, and a mover 12 that slides while contacting the electrodes. By applying a voltage to drive electrodes 13 and 14 arranged on the stator 11, the electrostatic actuator is provided. It has a working structure.
The electrical structure is composed of two types of electrodes, that is, plus and minus drive electrodes 13 and 14 installed on the surface on the stator side, and a projecting electrode 15 extending from the drive electrode in the drive direction. Is supplied.
The supplied voltage is charged in the charging slit on the surface of the moving slider. (16)
A driving force 17 is generated in the moving element due to the interaction between the charged electric charge and the electric field formed by the stator.

FIG. 3 shows a schematic diagram of a laminated structure in which the electrostatic actuator of FIG. 2 is laminated.
The laminated structure is coupled in parallel so that the stators or the movers are in contact with each other by the fixed structure 18 that fixes the stators 11 to the movers 12 of the plurality of actuators. It has a structure in which multiple layers are connected in series.
The laminated structure is covered with an outer coating 19 surrounding them, and the structure is constrained from the outside with a constant pressure so that the stator 11 and the mover 12 of each actuator are not separated.
Therefore, in this method, the flexibility of the structure itself is considerably deteriorated unless the fixed structure has some flexibility or the outer coating film has elasticity.

FIG. 4 shows an example of the stator 11 used in the laminated structure.
The stator 11 is provided with drive electrodes 13 and 14 on both sides of a thin flexible film, and has a long band shape in the comb direction of the drive electrodes.
In addition, power to the drive electrode is supplied by wiring from a fixed structure 18 that is coupled to the stator 11.

On the other hand, FIG. 5 shows an example of the mover 12 used in the laminated structure.
Similar to the stator, the mover 12 has a thin and flexible film shape, has extremely fine charging slits 20 on both sides, and has a long strip shape in the slit direction.

FIG. 6 shows a combination of both.
The stator 11 and the mover 12 are alternately stacked, and when a voltage is applied to the drive electrodes 13 and 14, a drive force is generated in the entire mover.

FIG. 7 shows a pattern example in the case where the stator 11 and the mover 12 combined in this way are connected to the fixed structure 18.
In the present plan, the structure is laminated on the slit strip in accordance with the shape of the fixed structure 18.
This proposal has the simplest structure, and has an advantage that it is not necessary to consider local stress because the stator 11 and the mover 12 are linearly used.
However, it is considered that it is considerably difficult to stack a large number of layers in accordance with the shape when the structure is downsized to about several μm.

FIG. 8 shows another pattern.
In the present plan, the stator 11 and the mover 12 are stacked in a spiral shape.
Although the present plan is relatively easy to manufacture, the fixed structure 18 is limited to a circular shape and has a drawback that the shape is limited.

FIG. 9 shows still another pattern.
In this plan, the stator 11 and the mover 12 are installed in ninety-nine folds to increase the driving force.
However, in this proposal, since the turning radius becomes too small at the turning portion, it is necessary to devise a proper installation.

FIG. 10 shows an example of a structure that is completely different from these laminated structures.
In order to overcome the problem that the stator and the moving element are separated or the contact pressure increases with the softening, the individual actuators are made circular, and the cylindrical stator 21 and the cylindrical moving element 22 are formed therein. It has a shape to be inserted (FIG. 11).
Thereby, even if the actuator is made flexible, the contact between the stator and the movable member can be maintained.
Such an actuator is arranged on the fixed structure 18 to form an aggregate. (Fig. 12, Fig. 13)

Next, changes in performance due to actuator lamination are evaluated.
Here, the performance of the electrostatic actuator is defined as contraction force F (F at maximum extension, F ′ at minimum contraction), contraction rate P (= total length B ′ at minimum contraction / total length B at maximum extension), contraction speed V Evaluation is made using three parameters (= shrinkage distance L / shrinkage time T).
FIG. 14 schematically shows a state in which one electrostatic actuator is most extended. The length of the stator or the mover is L, the overlap length of the stator and the mover is A, and the thickness of the fixed structure is shown. Assuming S, the overall length B1 is given by the following mathematical formula 1.

(Equation 1)
B1 = 2L-A + 2S

FIG. 15 schematically shows the state at the time of minimum contraction, and the overall length B1 ′ is expressed by the following mathematical formula 2.

(Equation 2)
B1 '= L + 2S
Therefore, the performances of F1, F1 ′, P1, and V1 are expressed by the following mathematical formulas 3 to 6, respectively.

(Equation 3)
F1 = C ・ A (at maximum extension)

(Equation 4)
F1 '= CL (at the time of minimum contraction)

(Equation 5)
P1 = (L + 2S) / (2L-A + 2S)

(Equation 6)
V1 = V0

Next, FIGS. 16 and 17 are schematic diagrams at the time of maximum expansion and minimum contraction when N1 electrostatic actuators are stacked in series.
Here, the overall length is expressed by the following formulas 7 and 8, respectively.

(Equation 7)
B2 = N1 · (2L−A + S) + S

(Equation 8)
B2 ′ = N1 · (L + S) + S

Accordingly, the performances of F2, F2 ′, P2, and V2 are expressed by the following mathematical formulas 9-12.

(Equation 9)
F2 = C ・ A (at maximum extension)

(Equation 10)
F2 '= CL (at minimum contraction)

(Equation 11)
P2 = (L + S + S / N1) / (2L-A + S + S / N1) (S / N1 << L + S)

(Equation 12)
V2 = N1 ・ V0

From the above, it can be seen that when the actuators are stacked in series, the contraction force F and the contraction rate P hardly change compared to the case of a single unit, while the contraction speed V increases by the number of stacking stages.

Further, FIGS. 18 and 19 are schematic views at the time of maximum expansion and minimum contraction when N2 electrostatic actuators are stacked in parallel.
Here, the overall length is expressed by the following formulas 13 and 14, respectively.

(Equation 13)
B3 = 2L-A + 2S

(Equation 14)
B3 '= L + 2S

Therefore, the performances of F3, F3 ′, P3, and V3 are expressed by the following formulas 15 to 18.

(Equation 15)
F3 = N2 · C · A (at maximum extension)

(Equation 16)
F3 '= N2, C, L (at minimum contraction)

(Equation 17)
P3 = (L + 2S) / (2L-A + 2S)

(Equation 18)
V3 = V0

From the above, it can be seen that when the actuators are stacked in parallel, the contraction rate P and the contraction speed V do not change compared to the case of a single unit, while the contraction force F is increased by the number of layers.

Further, FIGS. 20 and 21 are schematic diagrams at the time of maximum expansion and minimum contraction when N3 electrostatic actuators are stacked in cascade.
Here, the overall length is represented by the following mathematical formulas 19 and 20, respectively.

(Equation 19)
B4 = (N3-1). (LA) + L + 2S

(Equation 20)
B4 '= L + 2S

Therefore, the performances of F4, F4 ′, P4, and V4 are expressed by the following formulas 21 to 24, respectively.

(Equation 21)
F4 = C ・ A (at maximum extension)

(Equation 22)
F4 '= CL (at the time of minimum contraction)

(Equation 23)
P4 = (L + 2S) / [(N3-1) · (LA) + L + 2S]

(Equation 24)
V4 = V0

From the above, it can be seen that when the actuators are stacked in cascade, the contraction force F and the contraction speed V do not change, but the contraction rate P increases by the number of stacking stages compared to the case of single actuators.

FIG. 22 shows an example of manufacturing a laminated structure by combining them.
Since these can be configured by combining a plurality of methods, desired performance can be obtained by appropriately combining the lamination methods.
Table 1 summarizes the lamination type and performance changes.

In FIG. 23, the simplest method for supplying power to the stretched laminated structure is to supply power to the fixed structure 18 of each layer using a flexible conductor 23, and to each electrostatic actuator of each layer. A method performed by wiring on a fixed structure will be described.
FIG. 24 shows the contracted state.
This example is:
By the way, since the electrostatic actuators are separated from each other when the mover is overdrawn from the stator, the drive function is lost, and each electrostatic actuator needs a mechanism for preventing overdrawing.
As one of the methods, a method using a constraining line or a constraining film so as not to leave a certain distance between adjacent fixed structures can be considered.
In that case, a conductor can be provided on the line or film, and power supply or the like can be realized relatively easily.
However, since the conductor itself is required to be flexible, in the case of a large actuator structure, the conductor must be thickened, which is difficult to realize, and the conductor itself deforms due to shrinkage, so that the wire breaks if the strength is weak. It has a drawback that it is likely to cause problems such as.

25 and 26 show a power feeding method using a fluid.
Unlike conventional inverter-controlled actuators, DC-driven electrostatic actuators can operate as long as they can supply a certain charge to the electrodes of the actuator, so they do not need to be supplied by a conductor and transport charge to the fluid. It is also possible to drive it.
However, in order to take advantage of the low power characteristics of the electrostatic actuator, the drive electrode cannot be immersed in a high concentration ionic fluid such as an electrolytic solution.

FIG. 25 shows a method using the principle of a fuel cell as an example of using a neutral fluid.
First, the structure will be described.
The stator 11 and the mover 12 are filled with an insulating lubricant 43 containing hydrogen molecules, and a vaporization layer 34 and a diffusion layer 35 opened on the mover surface side are provided inside the stator 11 having a drive electrode. It is in between.
A polymer film 38 is provided on the lower surface of the inner stator 11, and the surface of the diffusion layer between the diffusion layer 35 and the polymer layer 38 is coated with a catalyst 36, and hydrogen ions generated by the catalyst 36 are It has a transparent structure.
In addition, there is a diffusion layer 40 facing the polymer film, and a catalyst 41 is coated between the diffusion layer and the polymer film.
The tip of the diffusion layer is in contact with the cooling water layer 33 through the vaporization layer 39, so that the cooling water containing oxygen flows and oxygen is supplied through the vaporization layer 39 and the diffusion layer 40.
Below the cooling water layer 33 is a stator lower layer 32 that seals the cooling water, and supports a complicated stator structure.

Next, the principle of operation will be described.
The hydrogen molecules in the lubricant 43 fill in the vaporized layer 34 made of water-repellent or oil-repellent fine particles opened on the stator in a gaseous state.
The hydrogen gas reaches the catalyst 36 through the diffusion layer 35 and is ionized.
The generated electrons are sent to the negative drive electrode 14 through the conductor 37, and the electrode has a negative potential.
Further, hydrogen ions generated in the catalyst 36 pass through the polymer film 38 and reach the catalyst 41 ahead of the catalyst 36, and through the water management layer 39 that controls the moisture on the catalyst surface from the cooling water 33 through the diffusion layer 40 having water repellency. It is combined with oxygen molecules supplied in this way, and is released as water molecules to the cooling water side.
The electrons consumed at this time are supplied from the drive electrode 13 on the stator via the conductor 42, and as a result, the electrode has a positive potential.
See below for details.
"Hydrogen / Fuel Cell Handbook" (published by Ohmsha) Pages 137-162, but this example shows the moisture management of the catalyst 41 and temperature problems during driving, the stator 11, the polymer film layer 38, and the reducing layer in order from the surface 31 has a multilayer structure with a cooling water layer and a lower stator layer 32 thereunder, and there are many problems to be overcome such as a complicated structure and difficulty in miniaturization.

FIG. 26 shows a method using a high energy fluid having insulating properties.
In this method, a fluid 53 containing high-energy molecules (for example, glycolose) is used as a fluid that fills the moving element, and an oxidation electrode 51 (glucose oxidase immobilized electrode, hereinafter referred to as GOD) containing an oxidase in contact with the drive electrode 14. .)
Glycose is oxidized in contact with the oxidation electrode, and two hydrogen ions and two electrons are emitted.
Therefore, a negative voltage is applied to the drive electrode 14 in contact with the oxidation electrode 51.
On the other hand, another drive electrode 13 is in contact with a reduction electrode 52 (for example, a bilirubin oxidase-immobilized electrode; hereinafter referred to as BOD) to which a reducing substance for reducing oxygen is added, and hydrogen generated by GOD. Ions are used to reduce oxygen molecules in the fluid, consuming two electrons and releasing water molecules.
Therefore, a positive voltage is applied to the drive electrode 13 in contact with the BOD.
This is a kind of bio-battery, and if this method is used, power supply can be further simplified and further miniaturization can be expected.
See below for details.
“Practical Bioelectrochemistry” (CMC Publishing) Pages 254 to 257

FIG. 27 shows a stacked structure when such a power feeding method is used.
The whole is covered with a flexible and hermetic outer coating 19, and a high energy fluid 53 is injected from one side and discharged from the other side.
Further, in order to flow a fluid to each actuator, a fluid flow path 54 is provided in the stationary structure 18 and the stator 11 to the movable body 12 so that the fluid flows.
When a fluid is used in this way, a special structure such as a conductor is unnecessary, and power can be supplied to all actuators with a relatively simple structure.

FIG. 28 shows a structure in which a check valve is provided in the electrostatic actuator and fluid is circulated by its own driving force.
In this example, the inflow check valve 55 is installed in the direction of flowing from the outside into the actuator inside of the through hole 54 penetrating into the moving element 12.
The outflow check valve 56 is installed in the direction of flowing out from the inside of the electrostatic actuator outside the through-hole opened toward the outside earlier than the most insertion position of the moving element of the stator 11.
When the electrostatic actuator extends, a high-energy fluid flows from the outside into the electrostatic actuator through the through-hole in the moving element and the inflow check valve 55, and the fluid is oxidized and reduced by GOD and BOD.
Thereafter, when the electrostatic actuator contracts and the slider is inserted, the pressure in the electrostatic actuator rises due to the piston effect, the inflow side check valve 55 is closed and the outflow side check valve 56 is opened. To be discharged.
In this way, the fluid can be pumped using the expansion / contraction operation of the electrostatic actuator.
If this is used, the consumption of electric charge in the actuator is severe, and during continuous contraction driving that requires a large amount of high-energy fluid, the fluid can be circulated by the actuator itself, and the circulation pump 7 (FIG. 1) is small. Can be achieved.

Next, FIG. 29 shows a method of using a switch as a starting method of the electrostatic actuator.
In this method, a switch 61 (for example, a field effect transistor) is provided between the redox electrodes 51 and 52 and the drive electrodes 14 and 13, and ON / OFF of the actuator drive is controlled by sending an open / close signal (gate signal). .
30 and 31 show a specific arrangement example on the stator.

FIG. 30 shows an example in which a bus bar that distributes electric power to each drive electrode is a redox electrode, and a switch (transistor) 61 is installed between the bus and each drive electrode.
In this case, the gate signals of the switches are combined into one by the drive control gate signal line 63 installed in the stator.
However, in this method, there is a possibility that the power generation performance of the portion covered with the moving element of the redox electrode is deteriorated, and there is a possibility that sufficient electric power cannot be supplied when the moving element is fully inserted (most contracted).

FIG. 31 shows a structure in which the redox electrodes 51 and 52 are arranged at the end of the most moved position of the moving element so that they can always come into contact with a high-energy fluid, and are switched to a line for supplying power from the electrodes to the driving electrodes 14 and 13. It is assumed that 61 is installed.
As a result, a voltage can always be supplied to the drive electrode regardless of the position of the slider, and drive control can be realized with a simple structure.
However, since the mover cannot move in the redox electrode portion, the contraction rate slightly decreases.

Finally, FIG. 32 shows an example in which a constant temperature mechanism and a purification mechanism are provided in the regenerator for temperature control of the electrostatic actuator and prevention of deterioration of the lubricant.
The waste liquid discharged from each actuator returns to the regenerator and is cleaned through the filter 71.
The filter 71 has a function of removing foreign substances generated in the actuator and molecules altered by radiation / chemical changes.
Thereafter, the fluid passes between the radiators 73 and is heated and cooled to a constant temperature by the heating and cooling unit 72.
This heating / cooling device is operated by being supplied with electric power through a specific power line 74.
Furthermore, it is regenerated into a high energy fluid through the regenerator 4 and sent again to the actuator.
This method is effective for a complicated actuator system because it is not necessary to provide a special mechanism on each actuator side by providing the regenerator with necessary functions.

The electrostatic actuator of the present invention is easy to control, and can be constructed with actuators of any output and stroke by lamination and multiple connection, and can be used as a general-purpose power source for all industries from micro to macro.

It is the schematic of the electrostatic actuator drive system using a high energy fluid. It is a schematic structure figure of a direct current drive type electrostatic actuator. It is the schematic of an electrostatic actuator structure. It is an electrode pattern of the stator of a strip type actuator. It is a charging slit pattern of the slider of a band type actuator. It is an external view which combined the stator and movable element of the strip type actuator. It is the figure which showed the installation pattern of the strip type actuator. (Example 1) It is the figure which showed the installation pattern of the strip type actuator. (Example 2) It is the figure which showed the installation pattern of the strip type actuator. (Example 3) FIG. 3 is a schematic structural diagram of a stator and a mover of a cylindrical actuator. It is an external view which combined the stator and moving part of the cylindrical actuator. It is the figure which showed the installation pattern of the cylindrical actuator. It is the figure which looked at the installation pattern of a cylindrical actuator from the side. It is a figure explaining the performance of one electrostatic actuator. (Extended state) It is a figure explaining the performance of one electrostatic actuator. (Shrink state) It is a figure explaining the performance of a plurality of electrostatic actuators connected in series. (Extended state) It is a figure explaining the performance of a plurality of electrostatic actuators connected in series. (Shrink state) It is a figure explaining the performance of the several electrostatic actuator connected in parallel. (Extended state) It is a figure explaining the performance of the several electrostatic actuator connected in parallel. (Shrink state) It is a figure explaining the performance of a plurality of electrostatic actuators connected in cascade. (Extended state) It is a figure explaining the performance of a plurality of electrostatic actuators connected in cascade. (Shrink state) It is the figure which showed the structural example which combined the several actuator in series and parallel. It is the figure which showed the method of supplying electric power to each layer of a laminated actuator with a wire. (Extension state) It is the figure which showed the method of supplying electric power to each layer of a laminated actuator with a wire. (Shrink state) It is the figure which showed the method of supplying an electric charge to a drive electrode using the principle of a fuel cell. It is the figure which showed the method of supplying an electric charge to a drive electrode using the principle of a bio battery. It is the figure which showed the method of supplying electric power to each actuator of a lamination | stacking actuator using a high energy fluid. It is a figure which shows the structure which gave the pump function to the lamination | stacking actuator using a high energy fluid. It is the figure which showed the starting method at the time of using a high energy fluid. It is the schematic of the stator which gave the starting control function at the time of using a high energy fluid. (Each drive electrode has an oxidation / reduction electrode) It is the schematic of the stator which gave the starting control function at the time of using a high energy fluid. (Example of having one oxidation / reduction electrode for multiple drive electrodes) It is the schematic of the regenerator which gave the cleaning and constant temperature function of the lubricant.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electrostatic actuator 2 Driving force transmission structure 3 Contraction control line 4 Regenerator 5 Regeneration power supply line 6 High energy fluid 7 Circulating pump 8 Flow rate adjusting valve 9 Branch pipe for fluid supply to other actuators 10 Fluid from other actuators Collecting branch pipe 11 Stator 12 Migrator 13 + Pole drive electrode 14 -Pole drive electrode 15 Projecting electrode 16 Migrator charge 17 Drive force 18 Fixed structure 19 Assembly outer coating 20 Migrator charge pattern 21 Cylindrical stator 22 Cylindrical moving element 23 Electric power supply conductor 31 Reduction layer 32 Stator lower layer 33 Stator cooling water layer 34 Oxide electrode vaporization layer 35 Oxidation electrode diffusion layer 36 Oxidation electrode catalyst coating 37 Oxidation electrode charge supply line 38 Polymer film 39 Reduction Electrode water management layer 40 Reduction electrode diffusion layer 41 Reduction electrode catalyst coating 42 Reduction electrode charge supply line 43 Hydrogen content Edge of lubricant 51 oxide electrode (e.g., glucose oxidase immobilized electrode .GOD)
52 Reduction electrode (eg, bilirubin oxidase immobilized electrode; BOD)
53 High energy fluid (eg glucose-containing water)
54 Flow path in moving element 55 Inflow side check valve 56 Outflow side check valve 61 Power supply switch (for example, field effect transistor)
62 Switch open / close signal line 63 Drive control gate signal line 64 Moving element moving range 71 Lubricant cleaning filter 72 Heating / cooling device 73 Heat radiator 71 Heating / cooling power line

Claims (16)

In a DC-driven electrostatic actuator (patent number), a flexible film-shaped, cylindrical, or filament-shaped material is used for a stator and a moving element, respectively, and the structure can be freely deformed. Electrostatic actuator.
In a DC-driven electrostatic actuator (patent number), a DC-driven static actuator is characterized in that it is used for a flexible cylindrical stator and a cylindrical slider that enters the stator, and the structure can be freely deformed. Electric actuator.
An electrostatic actuator structure using the electrostatic actuator according to claim 1, wherein a plurality of the actuators are arranged in a contracting direction and can be contracted at a higher speed than that realized by a single actuator having the same length. .
An electrostatic actuator using the electrostatic actuator according to claim 1 or 2, wherein a plurality of the actuators are arranged in parallel with the contracting direction and can be contracted more strongly than a single actuator having the same length. Structure.
The electrostatic actuator according to claim 1 or 2, wherein a plurality of the actuators are arranged in parallel with the contraction direction, and one moving element at the end and a stator of another actuator adjacent thereto are structurally structured. By connecting the stator of the adjacent actuator and the mover of the actuator adjacent to the other side, and repeating such a structural connection (cascade shape) to the same length. An electrostatic actuator structure capable of contracting at a contraction rate larger than that realized by a single actuator.
6. An electrostatic actuator structure having a performance that cannot be realized by combining a plurality of the structures of claims 3 to 5 with a single electrostatic actuator.
7. An electrostatic actuator structure having the structure according to claim 3, wherein a conductor is used for supplying electric power to each actuator.
7. An electrostatic actuator structure having the structure according to claim 3, wherein the energy is transferred by using a fluid to supply power to each actuator.
9. The power supply method according to claim 8, wherein a fluid containing hydrogen and a fluid containing oxygen are separately flowed to supply power to the drive electrode using the power generation principle of the fuel cell.
9. The power supply method according to claim 8, wherein a fluid containing glycose and oxygen is flowed as a lubricant, and power is supplied to the drive electrode using a power generation principle of a bio battery.
11. The fluid regeneration mechanism according to claim 8, wherein the waste liquid discharged from the actuator is regenerated by a regenerator and sent to the actuator again, and the fluid is circulated and used for driving.
11. The external forced refresh mechanism according to claim 8, wherein a constant amount of fluid is constantly supplied so that electric power is always supplied to the electrode even when the actuator is stopped for a long time.
11. The power supply method according to claim 8, wherein a waste molecule after power supply to the electrode is removed and a contraction of the electrostatic actuator is used to supply new electrolytic molecules or high energy molecules. Features a refresh mechanism.
11. The actuator operation control mechanism according to claim 8, wherein the operation of the actuator is controlled by controlling charge movement between the charge receiving portion and the drive electrode by an external signal.
12. The temperature management mechanism according to claim 11, wherein the temperature of the actuator can be managed by heating and cooling the fluid in the regenerator.
12. The fluid regeneration mechanism according to claim 11, wherein foreign matter or impurities in the waste liquid discharged from the actuator are removed, and even if the actuator is driven for a long period of time, reduction in performance of the actuator due to deterioration of the lubricant is reduced. Material purification mechanism.

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