JP2008145780A5 - - Google Patents

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Publication number
JP2008145780A5
JP2008145780A5 JP2006333653A JP2006333653A JP2008145780A5 JP 2008145780 A5 JP2008145780 A5 JP 2008145780A5 JP 2006333653 A JP2006333653 A JP 2006333653A JP 2006333653 A JP2006333653 A JP 2006333653A JP 2008145780 A5 JP2008145780 A5 JP 2008145780A5
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JP
Japan
Prior art keywords
thin film
display device
manufacturing
convex portion
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006333653A
Other languages
Japanese (ja)
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JP2008145780A (en
JP5031348B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2006333653A priority Critical patent/JP5031348B2/en
Priority claimed from JP2006333653A external-priority patent/JP5031348B2/en
Priority to TW096146037A priority patent/TW200834131A/en
Priority to KR1020070127514A priority patent/KR20080053896A/en
Priority to CN200710199606A priority patent/CN100593747C/en
Publication of JP2008145780A publication Critical patent/JP2008145780A/en
Publication of JP2008145780A5 publication Critical patent/JP2008145780A5/ja
Application granted granted Critical
Publication of JP5031348B2 publication Critical patent/JP5031348B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (5)

無機材料からなる基板上に有機材料からなる凸部が形成されてなり、その凸部により区切られた凹部にインクジェット方式によって薄膜材料液を供給して薄膜層を形成する表示装置の製造装置において、
前記凸部と凹部にフッ素樹脂を堆積させるスパッタリング装置と、
凸部と凹部に堆積したフッ素樹脂を洗浄する洗浄装置とを有することを特徴とする表示装置の製造装置。
In a manufacturing apparatus of a display device in which a convex portion made of an organic material is formed on a substrate made of an inorganic material, and a thin film layer is formed by supplying a thin film material liquid to the concave portion delimited by the convex portion by an inkjet method,
A sputtering apparatus for depositing a fluororesin on the convex part and the concave part;
An apparatus for manufacturing a display device, comprising: a convex portion and a cleaning device for cleaning the fluororesin deposited in the concave portion.
前記洗浄装置が洗浄液を純水とする超音波洗浄装置である請求項1に記載の表示装置の製造装置。 The display device manufacturing apparatus according to claim 1, wherein the cleaning device is an ultrasonic cleaning device using pure water as a cleaning liquid. 無機材料からなる基板上に有機材料からなる凸部が形成されてなり、その凸部により区切られた凹部にインクジェット方式によって薄膜材料液を供給して薄膜層を形成する表示装置の製造方法において、
前記凸部と凹部にフッ素樹脂をスパッタリング装置により堆積させ、
凸部と凹部に堆積したフッ素樹脂を洗浄することを特徴とする表示装置の製造方法。
In a manufacturing method of a display device in which a convex portion made of an organic material is formed on a substrate made of an inorganic material, and a thin film layer is formed by supplying a thin film material liquid to the concave portion delimited by the convex portion by an inkjet method.
Fluorine resin is deposited on the convex and concave portions by a sputtering device ,
A method for manufacturing a display device, comprising: cleaning a fluororesin deposited on a convex portion and a concave portion.
前記フッ素樹脂を超音波洗浄装置により洗浄する請求項3に記載の表示装置の製造方法。 The method for manufacturing a display device according to claim 3, wherein the fluororesin is cleaned by an ultrasonic cleaning device. 基板の凹部に薄膜材料液を供給して薄膜層を形成するインクジェット供給装置において、
前記基板を請求項3又は4に記載の方法により製造した基板とすることを特徴とするインクジェット供給装置。
In an inkjet supply apparatus for forming a thin film layer by supplying a thin film material liquid to a recess of a substrate,
An inkjet supply apparatus, wherein the substrate is a substrate manufactured by the method according to claim 3 or 4 .
JP2006333653A 2006-12-11 2006-12-11 Manufacturing method of display device Expired - Fee Related JP5031348B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006333653A JP5031348B2 (en) 2006-12-11 2006-12-11 Manufacturing method of display device
TW096146037A TW200834131A (en) 2006-12-11 2007-12-04 Apparatus and method for manufacturing display device and ink-jet supply apparatuS
KR1020070127514A KR20080053896A (en) 2006-12-11 2007-12-10 Apparatus for manufacturing display devices, method for manufacturing device, and ink-jet type liquid supply apparatus
CN200710199606A CN100593747C (en) 2006-12-11 2007-12-11 Device and method for manufacturing display device, ink-jet type liquid supply apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006333653A JP5031348B2 (en) 2006-12-11 2006-12-11 Manufacturing method of display device

Publications (3)

Publication Number Publication Date
JP2008145780A JP2008145780A (en) 2008-06-26
JP2008145780A5 true JP2008145780A5 (en) 2010-02-04
JP5031348B2 JP5031348B2 (en) 2012-09-19

Family

ID=39516745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006333653A Expired - Fee Related JP5031348B2 (en) 2006-12-11 2006-12-11 Manufacturing method of display device

Country Status (4)

Country Link
JP (1) JP5031348B2 (en)
KR (1) KR20080053896A (en)
CN (1) CN100593747C (en)
TW (1) TW200834131A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114573240B (en) * 2022-02-24 2024-03-01 西安中易建科技有限公司 Front plate glass, preparation method thereof, photovoltaic module and photovoltaic curtain wall

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2819245B2 (en) * 1994-10-19 1998-10-30 大日本印刷株式会社 How to fix color filters

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