JP2008136314A - Oscillating movement method and apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an oscillating movement method and oscillating movement apparatus capable of transferring oscillation of a piezoelectric actuator directly to a movement plane while attaining a small and simple mechanism. <P>SOLUTION: This oscillating movement apparatus includes a leg part 2 having the piezoelectric actuator 1 generating oscillation with applied voltage and a movement body 4 supporting the piezoelectric actuator 1 so that an oscillation direction is inclined by an angle of θ to a movement surface 3. The leg part 2 is structured so that three piezoelectric actuators 1 are radially arranged. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a vibration moving method and a vibration moving apparatus that can move without using existing power such as an engine or a motor while being a small and simple mechanism, and in particular, a vibration is applied to a leg using a piezoelectric actuator. The present invention relates to a vibration moving method and a vibration moving apparatus for moving an object by adding.

  Currently, various transport machines such as elevators, cranes, forklifts, automatic guided vehicles, etc. as logistics and cargo handling transport machines are mainly used for transporting heavy objects. However, in a simpler way, if there is a mobile device that can freely transport small items to each room on behalf of human beings in small buildings such as ordinary houses, apartments and condominiums, it can save labor by that much, It seems to be useful for the elderly, the disabled, and housewives. For this purpose, a moving device suitable for transporting a small quantity is necessary.

  By the way, when an engine, a motor, etc. are employ | adopted as a moving apparatus, a certain amount of size and weight will be needed inevitably. Therefore, as a result of earnest research focusing on the small and simple mechanism, I came up with the idea of using vibration as the driving force and using a piezoelectric actuator as the excitation mechanism. Piezoelectric actuators have piezoelectric and electrostrictive characteristics. When pressure is applied to the piezoelectric element, electricity is generated. Conversely, when electricity is applied, the actuator itself expands or contracts. Further, when a pulsed voltage is applied to the piezoelectric actuator, bimorph (bending) vibration occurs.

As a machine that uses the vibration of the piezoelectric actuator, there is an ultrasonic knife using mechanical resonance itself, a piezoelectric fan that transmits energy to gas or liquid, a piezoelectric pump, an ultrasonic microscope, or an ultrasonic motor (Non-Patent Document 1). reference). For example, an ultrasonic motor incorporates powerful ultrasonic vibration energy from a piezoelectric vibrator into the drive system of the motor. Depending on how micro-order micro vibrations are converted into one-way motion with high efficiency, It is classified into vibrating piece type and surface wave type. Furthermore, there is an ultrasonic linear motor that uses surface acoustic waves to solve the problem of wear occurring at the tip of the resonator element mold. This motor is expected to be a highly practical ultrasonic motor because it has a feature that a torque at a low speed is larger than that of a general electromagnetic motor and has good controllability.
Published by Morikita Publishing Co., Ltd., Kenji Uchino, edited by Japan Industrial Technology Center, "Piezoelectric / Electrostrictive Actuator: From Basics to Applications" (1986), pages 180-193

Further, a mobile robot described in Patent Document 1 has been proposed as a moving mechanism using a piezoelectric actuator. 2 and 4 of Patent Document 1 disclose a robot in which stacked piezoelectric actuators are connected separately for advancing and supporting feet, and these piezoelectric actuators are appropriately expanded and contracted to move in a predetermined direction. . Further, FIG. 8 and FIG. 11 of Patent Document 1 disclose one in which the moving speed is increased by changing the traveling piezoelectric actuator to a bimorph type and increasing the moving amount of one step.
Japanese Patent Laid-Open No. 5-340341 (FIGS. 2, 4, 8, and 11)

  Since the ultrasonic motor described above obtains rotational force by transmitting force in the rotational direction from minute vibrations of the piezoelectric actuator, the vibration of the piezoelectric actuator cannot be directly transmitted to the moving plane, and some power transmission There was a problem that a mechanism would be necessary. Further, since the above-described mobile robot described in Patent Document 1 has a mechanism that lifts and moves the piezoelectric actuator like a human foot, the piezoelectric actuator for moving in the vertical direction (for supporting foot) and the moving direction are used. The mechanism must be a combination of two types of piezoelectric actuators (for progression), and the vibration of the piezoelectric actuator must be transmitted to the moving plane in two stages, resulting in a complicated structure. It was.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a vibration moving method capable of directly transmitting vibrations of a piezoelectric actuator to a moving plane while being a small and simple mechanism. It is to provide a vibration moving device.

  The vibration moving method of the present invention for solving the above-mentioned problem is a vibration moving method using a piezoelectric actuator that generates vibration by an applied voltage, and the piezoelectric actuator is arranged so that the vibration direction is inclined with respect to the moving surface. Then, a voltage is applied to the piezoelectric actuator to vibrate, and an object having the piezoelectric actuator is moved by changing an inclination angle between the vibration direction and the moving surface. Here, when a plurality of the piezoelectric actuators are provided, the piezoelectric actuators necessary for the moving direction may be selected and vibrated.

  In addition, a vibration moving device of the present invention for solving the above-described problem is a vibration moving device using a piezoelectric actuator that generates vibration by an applied voltage, and the leg portion having the piezoelectric actuator and the piezoelectric actuator in a vibration direction. Comprising: a moving body main body that is inclined with respect to the moving surface; and a voltage supply device that applies a voltage to the piezoelectric actuator. Here, when the leg portion has a plurality of piezoelectric actuators, the voltage supply device may include a controller that can select a necessary piezoelectric actuator in the moving direction and apply a voltage. The leg portion may have a structure in which three piezoelectric actuators are arranged radially. Furthermore, you may make it provide a nonslip body in the part which contacts the said moving surface of the said piezoelectric actuator.

  Further, in the vibration moving device of the present invention, the moving body main body is fixed to the lower support so as to press the piezoelectric actuator against the moving surface side, and a lower support that supports the end of the piezoelectric actuator from below. And an upper support. Further, the lower support may be constituted by three support plates that extend radially, and a lower support body that supports the support plates so as to follow the vibration of the piezoelectric actuator, The support body may be constituted by three pressing plates that are radially extended and an upper support body that supports the pressing plate at an angle larger than the inclination angle of the piezoelectric actuator.

  According to the vibration moving method and the vibration moving apparatus of the present invention, the vibration of the piezoelectric actuator is transmitted to the moving surface as the thrust, so that the resolution is extremely high, the response is fast, the driving force is large, the conversion efficiency is high, and the use The frequency range that can be used is wide (the ultrasonic range can also be used), the shape can be produced in minute shapes, and the advantages of piezoelectric actuators such as light weight can be enjoyed. A mechanism moving method and a moving device can be realized.

  In addition, according to the vibration moving method and the vibration moving device of the present invention, in addition to transporting small quantities, it is possible to move inside a narrow gap with a low height. It can be used for various applications, such as the situation of the bottom of a machine or piping that is not present, or the corrosion of the lower part of an automobile, which has a high risk for humans to enter.

  Hereinafter, specific embodiments of the vibration moving method and the vibration moving apparatus of the present invention will be described with reference to FIGS. Here, FIG. 1 is an external view showing an embodiment of the vibration moving device of the present invention, (A) is a top view, and (B) is a view taken in the direction of arrow B in FIG. FIG. 2 is an exploded view of the vibration moving device shown in FIG.

  As shown in FIGS. 1A and 1B, the vibration moving device of the present invention includes a leg 2 having a piezoelectric actuator 1 that generates vibration by an applied voltage, and the vibration direction of the piezoelectric actuator 1 with respect to a moving surface 3. And a movable body main body 4 that is supported so as to be inclined by an angle θ, and the leg portion 2 has a structure in which three piezoelectric actuators 1 are arranged radially (preferably arranged radially at equal intervals). ing. In addition, the preferable form of the structure arrange | positioned radially can mention the structure arrange | positioned radially at equal intervals or substantially equal intervals, ie, the structure arrange | positioned radially at 120 degrees or substantially 120 degrees.

  Such an embodiment will be described in detail with reference to the exploded view of FIG.

  The leg portion 2 is composed of a piezoelectric actuator 1 and a non-slip body 5 provided at a portion that contacts the moving surface 3 of the piezoelectric actuator 1. As the piezoelectric actuator 1, a bimorph vibration type is used. A bimorph vibration type piezoelectric actuator is composed of a metal elastic plate serving as a central electrode, and two piezoelectric ceramic thin plates bonded together. By connecting the two thin plates so that one of them is expanded by voltage and the other is contracted. It is bent and displaced according to the waveform of the applied voltage, and is used as an actuator. Moreover, the antiskid body 5 is comprised with a raw material with high grip force like a synthetic rubber. It is sufficient to use a general material used for anti-slip of furniture. By providing the non-slip body 5, a frictional force is generated when the leg portion 2 contacts the moving surface 3, and the leg portion 2 can move stably without sliding on the moving surface 3. The number of piezoelectric actuators 1 used for the legs 2 is not limited to that shown in the figure, but may be four or more, one or a plurality of piezoelectric actuators 1 and rollers, or a member having a low coefficient of friction. Etc. may be combined.

  The movable body 4 includes a lower support 6 that supports the end of the piezoelectric actuator 1 from below, an upper support 7 that is fixed to the lower support 6 so as to press the piezoelectric actuator 1 against the moving surface 3 side, It has. The lower support 6 and the upper support 7 are fixed by, for example, bolts 8 and nuts 9. In addition, the lower support body 6 and the upper support body 7 are formed of a plastic material, for example.

  The lower support 6 includes three support plates 6a that extend radially (preferably radially at equal intervals), and a lower support body 6b that supports the support plate 6a so as to follow the vibration of the piezoelectric actuator 1. , Is composed of. The support plate 6a and the lower support body 6b are connected by a connecting portion 6c formed thin, and the support plate 6a can be easily bent by the connecting portion 6c. However, since the connecting portion 6c is thin by providing a groove on the upper surface side, the connecting portion 6c is easily bent upward, strong against the downward bending, and can sufficiently support the piezoelectric actuator 1 from below. ing. Further, the support plate 6a and the piezoelectric actuator 1 are connected by means such as an adhesive, an adhesive tape, a screw, and a screw so that they are not easily separated by vibration of the piezoelectric actuator 1. In addition, the bolt hole which lets the volt | bolt 8 used when connecting the lower support body 6 and the upper support body 7 is formed in the lower support body 6b.

  The upper support 7 includes three pressing plates 7a that extend radially (preferably radially at equal intervals), and an upper portion that supports the pressing plates 7a so as to have an angle larger than the inclination angle θ of the piezoelectric actuator 1. And a support body 7b. By changing the length of the pressing plate 7a and the angle with the upper support body 7b, the pressing force can be changed. Further, the pressing force can be changed by adjusting the distance between the upper support 7 and the lower support 6 with the bolt 8 and the nut 9. In this way, pressing the piezoelectric actuator 1 with the upper support 7 serves to change the vibration mode of the piezoelectric actuator 1 (vibration support), and stable movement is possible because the vibration acts only on the grounding portion. . In the case where vibration support is not performed, the vibration of the piezoelectric actuator 1 is transmitted to the entire mobile body 4, which causes unstable movement without regularity during straight movement or turning.

  The shapes of the upper support 6 and the lower support 7 described above, in particular, the number and shape of the support plate 6a and the pressing plate 7a are appropriately changed depending on the number and shape of the piezoelectric actuators 1 provided on the legs 2. It is not limited to what is illustrated. Further, the overall shape is such that the piezoelectric actuator 1 is inclined and arranged so that the overall height is low and the width is long, the center of gravity is low, and stable running performance can be obtained. You can enter even in a high space. Furthermore, since a steel material system is not used as the material of the moving body 4, the weight can be reduced so that its own weight becomes several g to several tens g. If a heavy iron material or the like is used as the material, the weight of the device is too heavy, the amplitude of vibration of the piezoelectric actuator 1 is reduced, and the moving speed is reduced.

  Next, an energy supply system will be described. In the vibration moving apparatus of the present invention, at least a voltage sufficient to vibrate the piezoelectric actuator 1 must be supplied to the piezoelectric actuator 1. Here, FIG. 3 is a conceptual diagram of a voltage supply device for applying a voltage to the piezoelectric actuator of the vibration moving device of the present invention.

  As shown in FIG. 3, the vibration moving device of the present invention applies a voltage to the piezoelectric actuator 1 by a voltage supply device 10. The voltage supply device 10 includes an oscillator 11 that outputs a square-wave voltage pulse, an amplifier 12 that amplifies the voltage output from the oscillator 11, and a switch 13 that selects the piezoelectric actuator 1 that supplies the voltage. Yes.

  When the frequency applied to the piezoelectric actuator 1 is set, the oscillator 11 outputs a predetermined square wave voltage pulse. The voltage amplified by the amplifier 12 is supplied to the piezoelectric actuator 1 in which the switch 13 is ON. The piezoelectric actuator 1 has a structure in which a metal elastic plate 1a that is a center electrode is sandwiched between two piezoelectric ceramics 1b. The metal elastic plate 1a is connected to an oscillator 11 via a switch 13 and an amplifier 12, and the piezoelectric ceramics 1a. 1b is grounded. The setting and control of the oscillator 11 and the switch 13 may be performed manually or by connecting a computer. When a voltage is applied to the predetermined piezoelectric actuator 1 by the voltage supply device 10, the predetermined piezoelectric actuator 1 vibrates, and the movable body 4 moves on the moving surface 3 due to the vibration. At this time, forward and turning can be controlled by changing the magnitude of the applied voltage or applied frequency and the combination of the piezoelectric actuators 1 that provide the applied voltage.

  When controlling the moving direction, the behavior of the vibration moving device changes depending on the shape of the vibration moving device, so the relationship between the applied voltage and applied frequency, the moving speed and the turning angle is screened, and the result It is preferable to operate the vibration moving device based on or stored in a computer.

  Next, the movement principle (vibration movement method) of the vibration movement device of the present invention will be described. FIG. 4 is an explanatory view showing the vibration moving method of the present invention. The feature of the movement principle of the present invention is that the piezoelectric actuator 1 is inclined and brought into contact with the moving surface 3 as shown in FIG. Here, P is the moving thrust, f is the frictional force, α is the inclination angle between the piezoelectric actuator 1 and the moving surface 3, and the broken line state is the state when no applied voltage is applied, and the solid line state is the applied voltage. The state of the case.

  When an applied voltage is not applied to the piezoelectric actuator 1, the piezoelectric actuator 1 is in contact with the moving surface 3 at an inclination angle α1, and the moving thrust P1 is smaller than the frictional force f1, so that the tip of the piezoelectric actuator 1 stops. It remains. Here, when an applied voltage is applied to the piezoelectric actuator 1, the inclination angle changes from α1 to α2 as indicated by the broken line in FIG. 4, the moving thrust P2 becomes larger than the frictional force f2, and the tip of the piezoelectric actuator 1 is Move the moving surface 3. The moving body main body advances by repeating this continuously.

  Here, it supplements about the change (f1-> f2) of the frictional force f. When the applied voltage is applied, the tip of the piezoelectric actuator 1 repeats the amplitude change, the direction of the force pushing the moving surface 3 changes, and the inclination angle α also changes. When the inclination angle α changes, the friction coefficient at the contact tip also changes, and the frictional force f also changes. In the case of FIG. 4, since the contact angle α decreases from the broken line state to the solid line state, the friction coefficient also decreases and the friction force f also decreases. Therefore, the force of the moving thrust P becomes relatively large, and the tip of the piezoelectric actuator 1 moves on the moving surface 3 in the traveling direction.

  When the anti-slip body 5 is not provided at the tip of the piezoelectric actuator 1, the tip of the piezoelectric actuator 1 slides on the moving surface 3, and when the anti-slip body 5 is provided, a moving thrust is provided. When P exceeds a certain value, it moves while jumping.

  Hereinafter, the present invention will be described more specifically with reference to examples. In addition, the Example shown below is only a part of the specific illustration of this invention shown in order to make the understanding of the content of this invention easy, and this invention is not limited to these at all. Here, FIG. 5 is a diagram showing the shape of the test body of the vibration moving device used in the experiment, FIG. 6 is a diagram showing the experimental results, (A) shows the relationship between the applied frequency and the moving speed, B) shows the relationship between the applied frequency and the turning angle, and (C) shows the relationship between the applied voltage and the moving speed.

(Test specimen)
The piezoelectric actuator is a bimorph vibration type piezoelectric actuator having a length of 55 mm, a width of 20 mm, and a thickness of 0.5 mm. In FIG. 5, for convenience, the piezoelectric actuators are denoted by symbols A to C, but all have the same shape. The antiskid body is a rectangular parallelepiped synthetic rubber having a length of 20 mm and a cross section of 5 mm × 5 mm. Further, the angle formed between the antiskid body and the moving surface is 72 ° (inclination angle θ is 18 °). Note that the three piezoelectric actuators A to C are arranged radially at equal intervals of 120 °.

  The support plate of the lower support and the pressing plate of the upper support have a length of 25 mm and a width of 20 mm. Moreover, the lower support body and the upper support body are in the shape of an equilateral triangle having a side of 20 mm.

  The entire vibration moving device has a length of 100 mm, a width of 115 mm, a height of 20 mm, and a weight of 15.56 g.

(Movement speed experiment 1)
The test body is placed on a flat floor, and the applied voltage applied to the piezoelectric actuator A is fixed to 100V. Next, the applied frequency is applied to the piezoelectric actuator A in the range of 0 to 500 Hz in 10 Hz increments for 5 seconds, the specimen is moved straight in the direction of the piezoelectric actuator A, the distance traveled by the specimen is measured and moved Divide the distance by 5 seconds to obtain the moving speed. And this experiment was repeated 5 times and the average value of the moving speed was calculated | required. The result is shown in FIG.

  In FIG. 6A, the horizontal axis represents the applied frequency (Hz) applied to the piezoelectric actuator A, the vertical axis represents the average moving speed (mm / s), the positive side of the vertical axis is forward, and the negative side is Represents backwards. As shown in the figure, when the applied frequency is in the range of 0 to 160 Hz, the forward and backward movements appear alternately, and thereafter, the forward speed is further increased, and the forward speed is maximized around 360 Hz. After that, the forward speed gradually decreased.

(Swivel angle experiment)
Since the vibration moving device swivels with the movement or on the spot (the position of the piezoelectric actuator A rotates in the direction of the piezoelectric actuator B or C), the relationship between the applied frequency and the swivel angle was examined. First, a test body is placed on a flat floor, and the applied voltage applied to the piezoelectric actuator A is fixed at 100V. Next, the applied frequency is applied to the piezoelectric actuator A in the range of 0 to 500 Hz for 5 seconds in 10 Hz increments, and the angle at which the specimen is turned is measured, and this experiment is repeated 5 times to obtain the average turning angle. Asked. The result is shown in FIG.

  In FIG. 6B, the horizontal axis represents the applied frequency (Hz), the vertical axis represents the turning angle (deg), the + side of the vertical axis represents the left turning movement, and the − side represents the right turning movement. Yes. As shown in this figure, in the range of 0 to 400 Hz, left turn and right turn appear alternately, and during this time, a turn angle was observed within a range of ± 30 ° for both left and right turns. From 400 to 500 Hz, the left turn angle suddenly increased, and then the turn angle gradually decreased.

(Movement speed experiment 2)
Subsequently, the relationship between the change in the magnitude of the voltage applied to the piezoelectric actuator and the moving speed was examined. First, the applied frequency for moving the specimen substantially in a straight line is fixed to the piezoelectric actuator A at 200 Hz. Next, in the range of applied voltage from 0 to 200 V, voltage was applied to the piezoelectric actuator A in increments of 10 V for 5 seconds, the distance traveled by the specimen was measured, and the moving speed was calculated by dividing the moving distance by 5 seconds. . This experiment was repeated 5 times to determine the average moving speed. The result is shown in FIG.

  In FIG. 6C, the horizontal axis represents the applied voltage (V), and the vertical axis represents the moving speed (mm / s). As shown in this figure, the specimen does not move until the applied voltage is 0 to 50V, and the moving speed tends to increase almost proportionally when the applied voltage of the piezoelectric actuator A is increased after 60V. became.

(Transportation experiment)
Next, an experiment was conducted as to how much heavy material the test body shown in FIG. 5 can carry. FIGS. 7A and 7B show a state in which a weighing pan is placed on the test body, where FIG. 7A is a top view and FIG. 7B is a photograph showing the appearance.

  The weight of the weighing pan 14 is 16.37 g, and the weight is placed on the weighing pan 14. In addition, as shown in FIG. 7, the balance pan 14 was inclined to the piezoelectric actuator A side so that the position of the center of gravity of the test body did not approach the piezoelectric actuator B or C side.

  The order of experiments is as follows. (1) Set the excitation frequency to 300 Hz. (2) The weighing pan 14 is placed on the top of the test body, and applied voltages 100, 150, 200, and 250 V are applied to the piezoelectric actuator A for 5 seconds each. (3) The distance traveled by the specimen is measured to determine the moving speed. (4) Repeat the movement experiment of (3) five times to obtain the average movement speed. (5) Place 10 g of weight on the weighing pan 14 and repeat the experiments (2) to (4). (6) Repeat the experiment of (5) until the specimen does not move. The result is shown in FIG.

  8A and 8B are diagrams showing the results of the transport experiment, where FIG. 8A shows the case where the applied voltage is 150V, FIG. 8B shows the case where the applied voltage is 200V, and FIG. 8C shows the case where the applied voltage is 250V. When the applied voltage was 100 V, the test specimen did not move without placing a weight on the weighing pan 14 (that is, it cannot move with a weight (16.37 g) more than the weighing pan). Therefore, it is understood that the moving thrust required for transportation is small at an applied voltage of 100 V), so the figure is omitted.

  When the applied voltage reached 150 V, the test specimen was able to move with a weight placed on the weighing pan 14. The result is shown in FIG. In FIG. 8A, the horizontal axis indicates the weight (g) of the weight, and the vertical axis indicates the average moving speed (mm / s). As shown in the figure, it can be seen that the moving speed becomes almost proportionally slow as the weight increases, and the test piece stops moving when the weight is 66.37 g. This is thought to be because the piezoelectric actuator A was pressed by the increased weight, and the amplitude of vibration gradually decreased.

  The result when the applied voltage is 200 V is shown in FIG. In FIG. 8B, the horizontal axis indicates the weight (g) of the weight, and the vertical axis indicates the average moving speed (mm / s). As shown in this figure, when the applied voltage is 200 V, the relationship between the weight and the average moving speed is not proportional, and the moving speed becomes maximum when the weight is 36.37 g, and 56.37 g. The test specimen stopped moving.

  The result when the applied voltage is 250 V is shown in FIG. In FIG. 8C, the horizontal axis indicates the weight (g) of the weight, the vertical axis indicates the average moving speed (mm / s), the + direction is forward, and the − direction is reverse. As shown in the figure, when the weight weight was 26.37 g, the test specimen moved backward, and when the weight was 46.37 g, the test specimen stopped moving. It is considered that the weight of the weight of 26.37g and the test piece moved backwards may have changed the position of the center of gravity of the test piece due to the weight of the weight.

  Summarizing the above transport experiment results, it was found that the object can be moved on the specimen by increasing the applied voltage. In addition, this test specimen can carry up to 3.6 times the weight of its own weight (56.37g), and it can be confirmed that it has sufficient functions as a cargo handling equipment for small quantities. It was.

BRIEF DESCRIPTION OF THE DRAWINGS It is an external view which shows one Embodiment of the vibration movement apparatus of this invention, (A) is a top view, (B) is a B arrow view in FIG. 1 (A). FIG. 2 is an exploded view of the vibration moving device shown in FIG. 1. It is a conceptual diagram of the voltage supply apparatus which applies a voltage to the piezoelectric actuator of the vibration moving apparatus of this invention. It is explanatory drawing which showed the vibration movement method of this invention. It is a figure which shows the shape of the test body of the vibration moving apparatus used for experiment. It is a figure which shows an experimental result, (A) shows the relationship between an applied frequency and a moving speed, (B) shows the relationship between an applied frequency and a turning angle, (C) shows the relationship between an applied voltage and a moving speed. ing. The state which mounted the balance pan on the test body is shown, (A) is a top view, (B) is a photograph which shows an external appearance. It is a figure which shows a conveyance experiment result, (A) is the case of the applied voltage 150V, (B) is the case of the applied voltage 200V, (C) has shown the case of the applied voltage 250V.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Piezoelectric actuator 1a Metal elastic plate 1b Piezoelectric ceramics 2 Leg part 3 Moving surface 4 Moving body main body 5 Non-sliding body 6 Lower support body 6a Support plate 6b Lower support body main body 6c Connection part 7 Upper support body 7a Pushing plate 7b Upper support body Body 8 Volt 9 Nut 10 Voltage supply device 11 Oscillator 12 Amplifier 13 Switch 14 Balance pan

Claims (9)

  A vibration moving method using a piezoelectric actuator that generates vibration by an applied voltage, wherein the piezoelectric actuator is arranged so that a vibration direction is inclined with respect to a moving surface, and a voltage is applied to the piezoelectric actuator to vibrate, A vibration moving method comprising: moving an object provided with the piezoelectric actuator by changing an inclination angle between a vibration direction and the moving surface.   The vibration movement method according to claim 1, wherein when there are a plurality of the piezoelectric actuators, a piezoelectric actuator necessary for the movement direction is selected and vibrated.   A vibration moving device using a piezoelectric actuator that generates vibration by an applied voltage, a leg having the piezoelectric actuator, and a moving body main body that supports the piezoelectric actuator so that a vibration direction is inclined with respect to a moving surface; And a voltage supply device for applying a voltage to the piezoelectric actuator.   The vibration moving device according to claim 3, wherein the leg portion includes a plurality of piezoelectric actuators, and the voltage supply device includes a controller capable of selecting a necessary piezoelectric actuator in a moving direction and applying a voltage.   The vibration moving device according to claim 3 or 4, wherein the leg portion has a structure in which three piezoelectric actuators are radially arranged.   The movable body includes a lower support that supports an end of the piezoelectric actuator from below, and an upper support that is fixed to the lower support so as to press the piezoelectric actuator against the moving surface. The vibration movement apparatus in any one of Claims 3-5.   The vibration according to claim 6, wherein the lower support body includes three support plates that extend radially, and a lower support body that supports the support plate so as to follow the vibration of the piezoelectric actuator. Mobile equipment.   The said upper support body consists of three pressing plates extended radially, and the upper support body which supports this pressing plate so that it may become an angle larger than the inclination-angle of the said piezoelectric actuator. Or the vibration movement apparatus of Claim 7.   The vibration moving device according to any one of claims 3 to 8, wherein a non-slip body is provided at a portion of the piezoelectric actuator that contacts the moving surface.

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