JP2008129338A - Light source device and adjustment method for light source device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make it possible to correct center deviation among respective wavelength regions by extracting light rays of predetermined wavelength regions from light rays emitted by a light source. <P>SOLUTION: A wavelength selecting optical system 104 is provided with: a condenser lens 22 that condenses the light rays emitted by the light source 21 and emits parallel light rays 41; bending optical systems 24A to 24C that bend incident light rays so that they are symmetrical to the respective predetermined axes of the optical systems; a selecting and reflecting optical system 23 that divides the parallel light rays 41 into light rays of respective predetermined wavelength areas, and causes the branch light rays 42A to 42C of the respective predetermined wavelength areas to enter the corresponding bending optical systems 24A to 24C, and combines the light rays 45A to 45C bent by the corresponding bending optical systems 24A to 24C for the corresponding predetermined wavelength areas; a condenser lens 22 that condenses the composite light ray 46 composed by the selecting and reflecting optical system 23, and images the light source images 47A to 47C of the light source 21; and mirror holders 30A to 30C that change the imaging positions of the light source images 47A to 47C by eccentrically shifting parts of the bending optical systems 24A to 24C for the corresponding predetermined wavelength areas. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a light source device that emits light in a plurality of predetermined wavelength regions out of light emitted from a light source, and a method for adjusting the light source device.

  2. Description of the Related Art Conventionally, in a light source device used for a microscope or the like, in order to efficiently use light emitted from a light source such as a lamp without waste, centering adjustment and focusing adjustment of a light source and an optical element that collects light emitted from the light source are performed. (For example, refer to Patent Documents 1 and 2).

  In Patent Document 1, in a light source device attached to a microscope, a light source is moved perpendicularly to the optical axis, thereby positioning (centering) a light source image at the center of a pupil of an objective lens provided in the microscope. The light source image is focused on the pupil of the objective lens by moving a condensing lens that collects the emitted light in the optical axis direction. Further, in Patent Document 2, in the light source device provided in the microscope, the light source is set perpendicular to the optical axis so that the output from the photodetector provided on the stage on which the sample is placed is maximized. In addition to the movement, the collector lens is moved in the optical axis direction to uniformly illuminate the observation range of the objective lens.

JP 2001-75010 A JP 2002-277748 A

  By the way, particularly in a microscope for industrial use, an inspection device such as an FPD or a semiconductor wafer, light in a plurality of different wavelength ranges is extracted from the light emitted from the light source, and the extracted light in each wavelength range is selectively used. There is a demand to introduce it into a microscope. In this case, centering adjustment is required for each wavelength range to be extracted. However, in the above-described conventional technology, adjustment is performed by moving the light source and the condenser lens (collector lens), and therefore, misalignment between wavelength ranges caused by manufacturing errors, assembly errors, and the like is corrected. There was a problem that I could not.

  Further, in the above-described conventional technology, since it is necessary to perform adjustment in a state where the light source device is mounted on a microscope or the like that is the introduction destination device of light emitted from the light source device, when performing centering adjustment for each wavelength range, After connecting the light source device to a microscope or the like, there is a problem that not only complicated work is required before observation can be started, but also a great deal of time and labor must be spent.

  The present invention has been made in view of the above, and can extract light in a plurality of predetermined wavelength regions from light emitted from a light source, and can correct misalignment between the extracted wavelength regions. An object of the present invention is to provide a light source device and a light source device adjustment method capable of correcting the misalignment between wavelength regions without using a microscope or the like as an introduction destination device of extracted light.

  In order to solve the above-described problems and achieve the object, a light source device according to the present invention is a light source device that emits light in a plurality of predetermined wavelength regions among light emitted from a light source, and collimates light emitted from the light source. A collimating optical system that emits light, a folding optical system that is provided for each of the predetermined wavelength ranges, and that folds incident light symmetrically with respect to a predetermined axis of the own optical system, and parallel light emitted by the collimating optical system A plurality of light beams in the predetermined wavelength region are branched out, and the branched light beams in the respective wavelength regions are respectively incident on the corresponding folded optical systems, and the folded optical system is folded back for each of the predetermined wavelength regions. An extraction optical system for synthesizing the folded light, a condensing optical system for condensing the synthesized light synthesized by the extraction optical system to form a light source image of the light source, and the folding optics for each predetermined wavelength region System and said At least a portion of the light exiting Gakukei shifted eccentrically or tilting eccentric, characterized in that and a eccentric drive mechanism for changing the imaging position of the light source image.

  In the light source device according to the present invention as set forth in the invention described above, the folding optical system includes an imaging lens system that focuses the branched light to form a first intermediate image of the light source, and the first intermediate A reflective imaging system that collects light emitted from the image and forms a second intermediate image of the light source at a position symmetrical to the first intermediate image with respect to the optical axis of the self-imaging system; The imaging lens system condenses the light emitted from the second intermediate image, emits the folded light symmetric to the branched light with respect to the optical axis of the own lens system, and the eccentric drive mechanism includes the For each predetermined wavelength range, at least a part of the reflection imaging system and the imaging lens system is shifted or decentered to change the imaging position of the light source image.

  In the light source device according to the present invention as set forth in the invention described above, the folding optical system includes a plane mirror that reflects the branched light, and the eccentric drive mechanism tilts the plane mirror for each predetermined wavelength range. Thus, the imaging position of the light source image is changed.

  In the light source device according to the present invention as set forth in the invention described above, the extraction optical system selectively reflects light in one wavelength range among the plurality of lights in the predetermined wavelength range, and A selective reflection optical element that transmits light other than the predetermined reflection for each predetermined wavelength range, and the decentering drive mechanism tilts the selective reflection optical element for each predetermined wavelength range to form an image forming position of the light source image. It is characterized by changing.

  Further, the light source device according to the present invention is the light source device according to the above invention, wherein the light source device is detachably provided on the imaging surface of the light source image by the condensing optical system, and the light source when the light source device is provided on the imaging surface. An index member indicating a predetermined image formation position of the image, and the light source image has a high-intensity portion in the light source image positioned at the predetermined image formation position by the eccentric drive mechanism for each predetermined wavelength region. Features.

  In the light source device according to the present invention, the light source is an arc lamp that emits light by arc discharge, and the light source image is generated by the eccentric drive mechanism for each predetermined wavelength range. A portion conjugate to the cathode tip is positioned at the predetermined imaging position.

  In the above invention, the light source device according to the present invention has a predetermined size, is provided at a predetermined light source position of the light source so as to be exchangeable with the light source, and a plurality of light source devices are provided at the predetermined light source position. A temporary light source that emits illumination light including the light in the predetermined wavelength range to the collimating optical system, and an imaging surface of the light source image formed by the condensing optical system. And an index member that indicates a predetermined imaging position of a temporary light source image of the temporary light source formed by the condensing optical system, and the temporary light source image is provided for each predetermined wavelength region. The eccentric drive mechanism is positioned at the predetermined imaging position.

  In the above invention, the light source device according to the present invention has a predetermined size, is detachably provided at a predetermined light source image position of the light source image, and a plurality of light source devices are provided at the light source image position. A temporary light source that emits illumination light including light in the predetermined wavelength range to the condensing optical system, and a focal plane of the collimating optical system that is replaceable with the light source, and is provided on the focal plane. A temporary light source image of the temporary light source imaged by the collimating optical system for each predetermined wavelength region by the eccentric drive mechanism. It is positioned at the light source position.

  The light source device adjustment method according to the present invention is a method for adjusting a light source device that extracts light in a plurality of predetermined wavelength regions from light emitted from a light source, and synthesizes and emits the extracted light in each wavelength region. A method of arranging an index member that indicates a predetermined imaging position of a light source image of the light source imaged by a condensing optical system provided in the light source device on an imaging surface of the light source image; A positioning step in which at least a part of an optical element provided on the optical path of each wavelength region is shifted or decentered for each predetermined wavelength region to position a high-luminance portion in the light source image at the predetermined imaging position. It is characterized by including these.

  The light source device adjustment method according to the present invention is a method for adjusting a light source device that extracts light in a plurality of predetermined wavelength regions from light emitted from a light source, and synthesizes and emits the extracted light in each wavelength region. A temporary light source arrangement step of arranging a temporary light source having a predetermined size and emitting illumination light including a plurality of lights in the predetermined wavelength region at a predetermined light source position of the light source instead of the light source; An index member indicating a predetermined imaging position of the temporary light source image of the temporary light source formed by the condensing optical system included in the light source device is formed on the imaging surface of the light source image of the light source by the condensing optical system. For each of the predetermined wavelength ranges, the temporary light source image is positioned at the predetermined imaging position by shifting or decentering at least a part of the optical element provided on the optical path of each wavelength range for each of the predetermined wavelength ranges. Positioning step, Characterized in that it contains.

  The light source device adjustment method according to the present invention is a method for adjusting a light source device that extracts light in a plurality of predetermined wavelength regions from light emitted from a light source, and synthesizes and emits the extracted light in each wavelength region. A light source image of the light source formed by a condensing optical system provided in the light source device, wherein the light source device has a temporary light source that has a predetermined size and emits illumination light including a plurality of lights in the predetermined wavelength range. A temporary light source placement step for placing the light source at a predetermined imaging position; an index placement step for placing an index member indicating the predetermined light source position of the light source on a focal plane of the collimating optical system instead of the light source; and the predetermined wavelength. Each region is imaged by a collimating optical system in which at least a part of the optical element provided on the optical path of each wavelength region is shifted or decentered, and the light emitted from the light source is condensed into parallel light. The temporary light source A light source image, characterized in that it comprises a positioning step of positioning at the predetermined light source position.

  According to the light source device and the adjustment method of the light source device according to the present invention, light in a plurality of predetermined wavelength ranges can be extracted from the light emitted from the light source, and the misalignment between the extracted wavelength ranges can be corrected. In addition, it is possible to correct misalignment between wavelength ranges without using a microscope or the like as an introduction destination device of the extracted light.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a light source device and a method for adjusting a light source device according to the present invention will be described in detail with reference to the accompanying drawings. Note that the present invention is not limited to the embodiments. Moreover, in description of drawing, the same code | symbol is attached | subjected and shown to the same part.

(Embodiment 1)
First, the light source device and the light source device adjustment method according to the first embodiment of the present invention will be described. FIG. 1 is a diagram illustrating an overall configuration of an ultraviolet microscope apparatus 100 as a microscope apparatus using the light source device according to the first embodiment. As shown in this figure, the ultraviolet microscope apparatus 100 is roughly provided with a microscope main body 101, a light source device 102, and a control device 103.

  The microscope main body 101 holds the objective lens 3 via the stage 2 on which the specimen 1 is placed, the objective lens 3 disposed above the specimen 1, and the revolver 4, and the stage 2 via the focusing mechanism 5. 2, a light projection tube 7 placed on the top of the stand 6, and an eyepiece unit 9 mounted on the light projection tube 7 via the lens barrel 8. In addition, the light source device 102 includes a light source therein, and a wavelength selection unit 11 that extracts and emits ultraviolet light in a plurality of predetermined wavelength regions from light emitted from the light source, and an ultraviolet that the wavelength selection unit 11 emits. And an optical fiber 12 that receives light and introduces it into the microscope main body 101.

  The objective lens 3 is detachably attached to the revolver 4 and is arranged on the stage 2 in accordance with the rotation operation of the revolver 4. The stage 2 is freely moved in a plane orthogonal to the optical axis of the objective lens 3 by a plane drive mechanism (not shown), and changes the observation position of the sample 1 with respect to the objective lens 3. The stage 2 is moved up and down by the focusing mechanism 5 to focus the sample 1 on the objective lens 3.

  The light projecting tube 7 includes an illumination optical system and an observation optical system (not shown) inside, and a camera 13 as an imaging device on the side surface portion. An optical fiber 12 is attached to the light projecting tube 7 via a fiber connector 7a, and ultraviolet light introduced from the wavelength selection unit 11 via the optical fiber 12 is passed through the objective lens 3 by an illumination optical system. The specimen 1 is irradiated as illumination light. The light projecting tube 7 cooperates with the objective lens 3 and forms an observation image of the specimen 1 illuminated by the illumination optical system by the observation optical system. The camera 13 captures this observation image and generates an observation image.

  The lens barrel 8 has an imaging lens (not shown) inside, and forms a visible observation image of the sample 1 in cooperation with the objective lens 3 based on visible light irradiated by an illumination device (not shown). To do. This visible observation image is visually observed through the eyepiece unit 9.

  The control device 103 is configured using, for example, a personal computer. The control device 103 is electrically connected to the microscope main body 101, the camera 13, and the wavelength selection unit 11 via cables 14a to 14c, respectively, and performs processing and operation of each unit included in the microscope main body 101 and the wavelength selection unit 11. Control.

  Next, the wavelength selection unit 11 will be described. FIG. 2 is a diagram showing a main configuration of the wavelength selection optical system 104 provided in the wavelength selection unit 11. As shown in this figure, the wavelength selection optical system 104 includes a light source 21, a condensing lens 22 as a collimating optical system and a condensing optical system, a selective reflection optical system 23 as an extraction optical system, and a folding optical system 24A. To 24C, a total reflection mirror 25, and shutters 26A to 26C.

  The light source 21 is a lamp that emits light including ultraviolet light from the near ultraviolet region to the deep ultraviolet region, such as a mercury lamp, a mercury xenon arc lamp, or a metal halide lamp. The light emitting unit of the light source 21 is disposed on the front focal plane of the condenser lens 22 and at a position deviated from the optical axis 20 of the condenser lens 22 (a position deviated upward from the optical axis 20 in FIG. 2). The

  The condenser lens 22 emits parallel light 41 inclined with respect to the optical axis 20 from the light emitted from the light source 21. The emitted parallel light 41 enters the selective reflection optical system 23. The parallel light 41 is not limited to a strictly parallel light beam but includes a substantially parallel light beam. Accordingly, the arrangement position of the light emitting unit of the light source 21 is not strictly limited to the front focal plane of the condenser lens 22 and may be in the vicinity of the front focal plane.

  The selective reflection optical system 23 is configured using dichroic mirrors 23 </ b> A to 23 </ b> C arranged in series on the optical axis 20. The dichroic mirrors 23 </ b> A to 23 </ b> C reflect ultraviolet light in a predetermined wavelength range included in the parallel light 41, and transmit light outside the reflected wavelength range. For example, the dichroic mirror 23A reflects ultraviolet light in a wavelength range of 240 to 290 nm (hereinafter referred to as a first wavelength range) and transmits light outside this wavelength range. Similarly, the dichroic mirrors 23B and 23C respectively emit ultraviolet light in a wavelength range of 290 to 330 nm (hereinafter referred to as a second wavelength range) and a wavelength range of 330 to 385 nm (hereinafter referred to as a third wavelength range). The light is reflected and light outside the reflected wavelength region is transmitted.

  The folding optical systems 24A to 24C are arranged on the branched optical axes 20A to 20C of the dichroic mirrors 23A to 23C, respectively, and are reflected by the dichroic mirrors 23A to 23C and branched from the parallel light 41, respectively. The branched light beams 42A to 42C are received, and the received branched light beams 42A to 42C are folded back symmetrically with respect to the branched optical axes 20A to 20C and emitted. The branched optical axes 20A to 20C correspond to the reflected optical axes of the optical axis 20 by the dichroic mirrors 23A to 23C, respectively. The folded optical systems 24A to 24C are provided with their optical axes aligned with the branched optical axes 20A to 20C, respectively.

  Here, the folding optical system 24A is configured using an imaging lens 27A as an imaging lens system and a concave mirror 28A as a reflection imaging system. Further, the concave mirror 28A is provided with a mirror holder 30A as an eccentric drive mechanism for holding the concave mirror 28A so as to be capable of shifting eccentrically with respect to the branch optical axis 20A. The shift eccentricity means that an optical element such as a concave mirror or a lens is moved in a direction perpendicular to the optical axis.

  The imaging lens 27 </ b> A is a lens having a predetermined focal length that is aberration-corrected for ultraviolet light in the first wavelength region. The imaging lens 27A is provided with the optical axis of its own lens aligned with the branch optical axis 20A, and is separated from the exit pupil EP1 of the condenser lens 22 along the branch optical axis 20A by more than its predetermined focal length. It is arranged at the position. The imaging lens 27A condenses the branched light 42A and forms a first intermediate image 43A of the light source 21 on the rear focal plane.

  The concave mirror 28A has a spherical reflecting surface 28Aa formed with a predetermined radius of curvature, and is separated from the first intermediate image 43A in the direction of the branched optical axis 20A by a distance equal to the predetermined radius of curvature on the branched optical axis 20A. It is arranged at the position. This arrangement position corresponds to the conjugate position of the exit pupil EP1 by the imaging lens 27A. In addition, the concave mirror 28A is provided as an initial setting so that the optical axis of the self-imaging system coincides with the branched optical axis 20A by the mirror holder 30A. The concave mirror 28A collects the light emitted from the first intermediate image 43A and forms the second intermediate image 44A of the light source 21 at a position symmetrical to the first intermediate image 43A with respect to the branch optical axis 20A. The light emitted from the second intermediate image 44A is again emitted as the folded light 45A, which is a parallel light beam symmetrical to the branched light 42A with respect to the branched optical axis 20A, through the imaging lens 27A.

  Specifically, for example, when the focal length of the imaging lens 27A is 50 mm, the imaging lens 27A is arranged at a position separated from the exit pupil EP1 by 50 mm or more on the branch optical axis 20A. When the arrangement position is 100 mm from the exit pupil EP1, the conjugate position of the exit pupil EP1 by the imaging lens 27A is 100 mm from the imaging lens 27A, and the concave mirror 28A is arranged at this position. At this time, since the first intermediate image 43A is imaged at a position of 50 mm from the imaging lens 27A, the radius of curvature of the concave mirror 28A is equal to the distance from the first intermediate image 43A, 50 (= 100-50) mm. It is said. In this case, the second intermediate image 44A is formed at a position 50 mm from the imaging lens 27A and at a position symmetrical to the first intermediate image 43A with respect to the branch optical axis 20A.

  On the other hand, the folding optical systems 24B and 24C are configured by using imaging lenses 27B and 27C and concave mirrors 28B and 28C, respectively, similarly to the folding optical system 24A. Mirror holders 30B and 30C are provided as eccentric drive mechanisms that hold the 28C so as to be able to shift eccentrically with respect to the branched optical axes 20B and 20C, respectively.

  The imaging lenses 27B and 27C are lenses having a predetermined focal length, which are aberration-corrected for ultraviolet light in the second and third wavelength regions, respectively. The imaging lenses 27B and 27C are provided with their optical axes aligned with the branched optical axes 20B and 20C, respectively, and from the exit pupil EP2 of the condenser lens 22 to the optical axis 20 and the branched optical axes 20B and 20C. Along each of them, they are arranged at positions separated by a predetermined focal length or more. The imaging lenses 27B and 27C collect the branched lights 42B and 42C, respectively, and form the first intermediate images 43B and 43C of the light source 21 on the rear focal plane.

  Concave mirrors 28B and 28C have spherical reflecting surfaces 28Ba and 28Ca formed with predetermined curvature radii, respectively, and are branched from first intermediate images 43B and 43C onto branched optical axes 20B and 20C on branched optical axes 20B and 20C. Are arranged at positions separated by a distance equal to a predetermined radius of curvature. This arrangement position corresponds to the conjugate position of the exit pupil EP2 by the imaging lenses 27B and 27C, respectively. The concave mirrors 28B and 28C are provided as an initial setting so that the optical axes of the self-imaging system are made to coincide with the branched optical axes 20B and 20C by the mirror holders 30B and 30C, respectively.

  The concave mirrors 28B and 28C collect the light emitted from the first intermediate images 43B and 43C, and the second light source 21 is positioned symmetrically with the first intermediate images 43B and 43C with respect to the branched optical axes 20B and 20C, respectively. Intermediate images 44B and 44C are formed. The light emitted from the second intermediate images 44B and 44C passes through the imaging lenses 27B and 27C again, and returns light 45B, which is a parallel light beam symmetrical to the branched lights 42B and 42C with respect to the branched optical axes 20B and 20C, respectively. Injected as 45C.

  The return lights 45A to 45C emitted from the return optical systems 24A to 24C are re-reflected by the dichroic mirrors 23A to 23C, respectively, and each re-reflected light is synthesized coaxially via the dichroic mirror 23A. The combined light 46 is used. The synthesized light 46 is incident on the condenser lens 22 symmetrically with the parallel light 41 with respect to the optical axis 20 and in the opposite direction.

  The condenser lens 22 is aberration-corrected with respect to the ultraviolet light in the first to third wavelength regions, and the ultraviolet light in the first to third wavelength regions included in the synthesized light 46 is transmitted through the total reflection mirror 25. To converge at the same position. Thereby, the light source images 47A to 47C of the light source 21 corresponding to each ultraviolet light in the first to third wavelength regions are telecentrically formed at the same position. The light source images 47A to 47C are secondary light sources for the ultraviolet light in the first to third wavelength regions, respectively, and the light source image 47 obtained by integrating the light source images 47A to 47C is an ultraviolet light obtained by synthesizing the first to third wavelength regions. Secondary light source.

  In the optical fiber 12, the incident end 12 a is disposed at a predetermined imaging position of the light source image 47. The optical fiber 12 receives ultraviolet light emitted from the light source image 47 from the incident end 12 a and emits it from the emission end attached to the light projecting tube 7. Accordingly, the light source device 102 can introduce ultraviolet light obtained by combining the first to third wavelength ranges into the light projecting tube 7 as illumination light.

  The shutters 26A to 26C are disposed in the vicinity of the first intermediate images 43A to 43C, respectively, and are selectively opened and closed by an opening / closing drive mechanism (not shown) to selectively select the optical paths of the light beams converged by the imaging lenses 27A to 27C. Shut off and open. Each open / close drive mechanism is electrically connected to the control device 103 via the cable 14 c and opens and closes the shutters 26 </ b> A to 26 </ b> C based on instructions from the control device 103. In the wavelength selection unit 11, ultraviolet light in the first to third wavelength regions can be selectively extracted and emitted from the light source image 47 by appropriately opening and closing the shutters 26 </ b> A to 26 </ b> C. Note that the shutters 26A to 26C are not limited to the optical paths of the light beams converged by the imaging lenses 27A to 27C, and the optical paths from the dichroic mirrors 23A to 23C to the dichroic mirrors 23A to 23C again via the folding optical systems 24A to 24C, respectively. As long as it selectively shuts off and opens.

  Next, the imaging position of the light source image 47 with respect to the incident end 12a of the optical fiber 12 will be described. FIG. 3 is a diagram illustrating an example of a light emitting unit of the light source 21, and FIG. 4 is a diagram illustrating a light source image 47 formed on the incident end 12a. As shown in FIG. 3, an arc lamp that emits light by arc discharge, such as a mercury lamp or a mercury xenon arc lamp used for the light source 21, generates an asymmetric emission luminance distribution 21c between the anode 21a and the cathode 21b. Among them, the high luminance portion 21d having the highest luminance is generated at the tip portion of the cathode 21b.

  In the light source image 47 formed based on the light source 21 having the light emission luminance distribution 21c shown in FIG. 3, the high luminance portion 47d that is a conjugate image of the high luminance portion 21d is included in the incident end 12a. Further, the image is projected so that the inside of the incident end 12a is filled as much as possible by the image luminance distribution 47c which is a conjugate image of the light emission luminance distribution 21c. Specifically, as shown in FIG. 4, in the light source image 47, the tip of the cathode image 47b, which is a conjugate image of the cathode 21b, is in contact with a predetermined position on the outer periphery of the incident end 12a (the outer peripheral lower end in FIG. 4). Is imaged as follows. At this time, the light source images 47A to 47C in the first to third wavelength regions included in the light source image 47 are similarly formed.

  On the other hand, as shown in FIG. 5, for example, when the high brightness portion 47d is imaged at the center of the incident end 12a, a non-incident region 12b that is not filled with the image brightness distribution 47c is formed in the incident end 12a. The In this case, since the light emitted from the light source 21 is not introduced into the non-incident area 12b, the amount of light corresponding to the non-incident area 12b out of the light emitted from the light source 21 is wasted. However, in the wavelength selection optical system 104, since the light source image 47 is formed on the incident end 12a as shown in FIG. 4, the amount of wasted light out of the light emitted from the light source 21 is suppressed, and the optical fiber is reduced. It is possible to efficiently introduce a large amount of light into 12.

  In such a wavelength selection optical system 104, in order to form the light source image 47 on the incident end 12a as shown in FIG. 4, the arrangement positions of the concave mirrors 28A to 28C are appropriately corrected by the mirror holders 30A to 30C. Yes. In other words, the positional deviations of the light source images 47A to 47C with respect to the incident end 12a due to manufacturing errors, assembly errors, etc. of the respective parts constituting the wavelength selection optical system 104, particularly relative positional deviations between the respective light source images 47A to 47C. It is corrected by the shift eccentricity of the concave mirrors 28A to 28C by the mirror holders 30A to 30C.

  That is, when the respective parts of the wavelength selection optical system 104 are assembled as described above, the light source images 47A to 47C are formed at the same position with the same size, but for example, the dichroic mirrors 23A to 23C are respectively formed at desired angles. Are inclined, and when the optical axes of the folding optical systems 24A to 24C (the optical axes of the imaging lenses 27A to 27C) and the branched optical axes 20A to 20C do not match each other, a predetermined angle of each dichroic mirror 23A to 23C The light source images 47A to 47C are displaced from each other in accordance with the amount of inclination from the light source. The deviation of the imaging position is not limited to the dichroic mirrors 23A to 23C, but also occurs due to assembly errors of the imaging lenses 27A to 27C and the condenser lens 22. In the wavelength selection optical system 104, the relative positional deviation between the respective light source images 47A to 47C generated in this way is corrected by shifting and decentering the concave mirrors 28A to 28C by the mirror holders 30A to 30C.

  Next, the positional deviation correction of the light source images 47A to 47C will be described. FIG. 6 is a diagram illustrating a configuration of the light source device 102 when the positional deviation correction of the light source images 47A to 47C is performed. As shown in this figure, in the light source device 102, when correcting the displacement of the light source images 47 </ b> A to 47 </ b> C, the light source image observation unit 50 is connected to the wavelength selection optical system 104 instead of the optical fiber 12.

  The light source image observation unit 50 condenses the target plate 51 as an index member indicating the predetermined image formation positions of the light source images 47A to 47C and the ultraviolet light emitted from the light source images 47A to 47C via the target plate 51, An imaging lens 52 that forms a secondary light source image as an observation image, a camera 53 that captures the secondary light source image to generate a secondary light source observation image, and a display 54 that displays the secondary light source observation image It is comprised using.

  As shown in FIG. 7, the target plate 51 is a disc-shaped transparent member formed using quartz glass or the like, and has a cross mark 51 a indicating a center point 51 c of the target plate 51 and a center on the surface thereof. A circular mark 51b indicating the size of the incident end 12a of the optical fiber 12 is formed around the point 51c. The target plate 51 is placed on the imaging surface of the light source image 47 in place of the optical fiber 12 so that the circular mark 51b is provided in alignment with the predetermined arrangement position of the incident end 12a, that is, the predetermined imaging position of the light source image 47. It is arranged to be removable.

  On the other hand, the mirror holder 30A is configured, for example, as shown in FIGS. 8A is a side view, and FIG. 8B is a front view of the concave mirror 28A. The mirror holder 30A includes a columnar shaft portion 31 protruding from the back surface of the concave mirror 28A, a ring-shaped support portion 32 fixed to a pedestal (not shown) and surrounding the circumferential portion of the shaft portion 31, and a support. The screw 32 is inserted into a through-hole 32 a provided in the side surface of the portion 32, and a screw 33 is inserted into the groove 31 a formed in the side surface of the shaft portion 31. . The inner wall surface of the through hole 32a and the side surface of the screw 33 are threaded, and the screw 33 is screwed into the through hole 32a by this screw. The through-holes 32a and the screws 33 are provided at three locations with a central angle of 120 ° in the circumferential direction of the shaft portion 31, respectively.

  In this mirror holder 30A, the concave mirror 28A can be freely moved in a plane perpendicular to the optical axis by appropriately screwing or unscrewing the three screws 33 with respect to the support portion 32. Thereby, in the wavelength selection optical system 104, the concave mirror 28A can be freely shifted and decentered with respect to the branch optical axis 20A (the optical axis of the imaging lens 27A). The mirror holders 30B and 30C are also configured in the same manner as the mirror holder 30A, and the concave mirrors 28B and 28C can be freely shifted and decentered with respect to the branched optical axes 20B and 20C, respectively. The configurations of the mirror holders 30A to 30C are not limited to the configurations shown in FIGS. 8-1 and 8-2, and the concave mirrors 28A to 28C can be freely shifted, such as a guide mechanism using a known slider, for example. Any configuration that can be eccentric can be used.

  FIG. 9 is a diagram showing a change in the optical path of the reflected light due to the shift decentering of the concave mirror 28A and a change in the imaging position of the light source image 47A. In this figure, an optical path related to the first wavelength region in the wavelength selection optical system 104 is extracted and shown. As shown by a broken line in FIG. 9, the second intermediate image 44A formed by the concave mirror 28A is shifted by decentering the concave mirror 28A in the right direction in the drawing by the mirror holder 30A and moving to the concave mirror 28A ′. Transition to the intermediate image 44A ′. At this time, the second intermediate image 44A moves to the right in the figure by the shift amount 2Δ in accordance with the shift amount Δ of the concave mirror 28A.

  With the movement of the second intermediate image 44A, the return light 45A shifts to the return light 45A ', and the ultraviolet light in the first wavelength region of the combined light 46 shifts to the combined light 46'. As a result, the combined light 46 'enters the condenser lens 22 at an angle larger than that of the combined light 46 with respect to the optical axis 20, and the light source image 47A shifts to the light source image 47A'. At this time, the light source image 47A is shifted leftward in the figure by the shift amount 2Δ / β based on the imaging magnification β from the light source 21 to the first intermediate image 43A and the shift amount 2Δ of the second intermediate image 44A. Moving. Note that the folded light 45A ′ passes through the same region as the folded light 45A at the exit pupil EP1 of the condenser lens 22, and telecentricity is maintained in the formation of the light source image 47A ′ by the condenser lens 22.

  Similarly, when the concave mirror 28A is shifted and decentered by the shift amount Δ in the left direction in the drawing by the mirror holder 30A, the second intermediate image 44A moves to the left in the drawing by the shift amount 2Δ, and the light source image 47A is shifted. Move to the right in the figure by an amount 2Δ / β. Further, when the concave mirror 28A is shifted decentered by the shift amount Δ in the direction perpendicular to the paper surface in the drawing by the shift amount Δ, the second intermediate image 44A moves to the back side / front side by the shift amount 2Δ, respectively. The image 47A moves forward / backward by a shift amount 2Δ / β, respectively. In any case, the folded light after the shift decentering passes through the same area as the folded light 45A in the exit pupil EP1, and the telecentricity is maintained in the formation of the light source image after the shift decentering by the condenser lens 22. The

  Also in the second and third wavelength regions, the second intermediate images 44B and 44C and the light source images 47B and 47C are respectively obtained by shifting and decentering the concave mirrors 28B and 28C in the same manner as the concave mirror 28A by the mirror holders 30B and 30C, respectively. It can be moved similarly to the intermediate image 44A and the light source image 47A. That is, in the wavelength selection optical system 104, the imaging positions of the light source images 47A to 47C can be freely moved by appropriately decentering the concave mirrors 28A to 28C with the mirror holders 30A to 30C.

  In the light source device 102, when correcting the misalignment of the light source images 47 </ b> A to 47 </ b> C, first, the light source image observation unit 50 is provided in place of the optical fiber 12, and the target plate 51 is formed on the imaging surface of the light source image 47 by the condenser lens 22. Place on top. Subsequently, the concave mirrors 28A to 28C are appropriately shifted and decentered by the mirror holders 30A to 30C, and the respective light source images 47A to 47C are placed at predetermined imaging positions of the light source image 47 indicated by the cross marks 51a and the circular marks 51b on the target plate 51. Positioning.

  Specifically, as shown in FIG. 10, the light source images 47 </ b> A to 47 </ b> C so that the tip of the cathode image 47 b projected onto the target plate 51 is in contact with a predetermined end (the lower end in FIG. 10) of the circular mark 51 b. Thus, the high brightness portion 47d in the light source images 47A to 47C is positioned in the circular mark 51b. At this time, the light sources images 47A to 47C can be easily observed by appropriately blocking the ultraviolet light in the first to third wavelength regions by the shutters 26A to 26C.

  By positioning the light source images 47A to 47C in this way, the light source device 102 corrects the relative positional deviation between the light source images 47A to 47C, and the light source images 47A to 47C are corrected on the predetermined image formation positions. By matching, the misalignment between the wavelength ranges can be corrected. For this reason, when the optical fiber 12 is arranged at a predetermined imaging position instead of the target plate 51, the matched light source image 47 is imaged at an appropriate position with respect to the incident end 12a as shown in FIG. be able to. Accordingly, the light source device 102 can efficiently introduce the light emitted from the light source 21 into the optical fiber 12.

  Further, in the light source device 102, the light source images 47 </ b> A to 47 </ b> C are focused on the incident end 12 a by appropriately moving the folding optical systems 24 </ b> A to 24 </ b> C in the directions of the branched optical axes 20 </ b> A to 20 </ b> C by a moving mechanism (not shown). Can do. As a result, the light source images 47A to 47C can be clearly formed on the incident end 12a, and the light emitted from the light source 21 can be introduced into the optical fiber 12 more efficiently. Here, the folding optical systems 24A to 24C may be moved in the optical axis direction, or the folding optical systems 24A to 24C may be moved together, respectively, or the imaging lenses 27A to 27C may be moved for each of the folding optical systems 24A to 24C. At least one of the concave mirrors 28A to 28C may be moved individually.

  Further, in the light source device 102, by using the light source image observation unit 50 as described above, each light source device 102 alone can be used without using the microscope body 101 as an introduction destination device of light emitted from the light source device 102. It is possible to correct the relative displacement between 47A to 47C. For this reason, it is possible to correct the misalignment between the first to third wavelength regions before attaching the light source device 102 to the microscope body 101. After attaching the light source device 102 to the microscope body 101, the ultraviolet microscope can be easily and quickly performed. The entire apparatus 100 can be started up.

  The mark on the target plate 51 indicating the predetermined image formation position of the light source image 47 is not limited to the cross mark 51a and the circular mark 51b described above, and various marks can be applied. For example, the circular mark 51b can be eliminated and only the cross mark 51a can be formed, and the predetermined image forming position of the tip of the cathode image 47b can be indicated by the center point 51c as the intersection of the cross mark 51a. Alternatively, instead of the cross mark 51a and the circular mark 51b, a mark schematically showing the shape of the cathode image 47b, the image luminance distribution 47c, and the high luminance portion 47d of the light source image 47 can be used.

(Modification)
Next, a modification of the light source device and the method for adjusting the light source device according to the first embodiment will be described. FIG. 11 is a diagram illustrating a configuration of the light source device 102 according to the present modification. As shown in this figure, in the light source device 102 according to this modification, when correcting the displacement of the light source images 47A to 47C, the light source image observation unit 60 is replaced with the wavelength selection optical system 104 instead of the light source image observation unit 50. Connected.

  The light source image observation unit 60 includes a target plate 61 as an index member indicating a predetermined light source position of the light source 21, an optical fiber 62 having an emission end 62a having a predetermined size, and ultraviolet light in the first to third wavelength regions. And a condensing lens 64 that condenses the light emitted from the tool light source 63 and introduces the light into the optical fiber 62. Similarly to the light source image observation unit 50, an imaging lens is provided. 52, a camera 53 and a display 54.

  As shown in FIG. 12, the target plate 61 is a disc-shaped transparent member formed using quartz glass or the like, and has a cross mark 61a indicating the center point 61c of the target plate 61 and a light source on the surface thereof. The light source mark 61b which shows typically the shape of 21 anode 21a, the cathode 21b, the light emission luminance distribution 21c, and the high-intensity part 21d is formed. The position corresponding to the tip of the cathode 21b in the light source mark 61b is matched with the center point 61c. The target plate 61 is detachably disposed on the focal plane of the condenser lens 22 in place of the light source 21 so that the light source mark 61 b is provided at a predetermined light source position of the light source 21.

  The optical fiber 62 is detachably disposed in place of the optical fiber 12 so that the emission end 62a as a temporary light source is provided at a predetermined light source image position on the image plane of the light source image 47. The optical fiber 62 emits the light from the tool light source 63 introduced by the condenser lens 64 from the emission end 62a and collects the light through the total reflection mirror 25 when the emission end 62a is provided at a predetermined imaging position. The lens 22 is irradiated. The irradiated light is condensed by the condenser lens 22 via the wavelength selection optical system 104. As a result, an exit end image that is a conjugate image of the exit end 62 a is formed on the target plate 61. The respective emission end images of ultraviolet light in the first to third wavelength regions can be freely positioned in the same manner as the light source images 47A to 47C by appropriately decentering the concave mirrors 28A to 28C by the mirror holders 30A to 30C. Moved to.

  The imaging lens 52 condenses the ultraviolet light emitted from the emission end image of each wavelength region imaged on the target plate 61 through the target plate 61, and forms a secondary emission end image as the observation image. Image. The camera 53 captures the secondary exit end image to generate a secondary exit end observation image, and the display 54 displays the secondary exit end observation image.

  In the light source device 102 according to the present modification, when correcting the positional deviation of the light source images 47A to 47C, first, the optical fiber 62 is provided instead of the optical fiber 12, and the emission end 62a of the light source image 47 by the condenser lens 22 is provided. It is arranged at a predetermined imaging position on the imaging plane. Further, a target plate 61 is provided in place of the light source 21, and the cross mark 61 a and the light source mark 61 b on the target plate 61 are arranged at predetermined light source positions of the light source 21. Subsequently, the concave mirrors 28A to 28C are appropriately shifted and decentered by the mirror holders 30A to 30C, and the emission end of ultraviolet light in the first to third wavelength regions is placed at a predetermined light source position of the light source 21 indicated by the cross mark 61a and the light source mark 61b. Position the image.

  Specifically, as shown in FIG. 13, a predetermined end portion (lower end portion in FIG. 13) of the emission end image 67 in the first to third wavelength regions projected onto the target plate 61 is included in the light source mark 61b. Positioning is made so as to be in contact with the center point 61c as a position corresponding to the tip of the cathode 21b, and thereby, a position corresponding to the high luminance portion 21d in the light source mark 61b is positioned in the emission end image 67. At this time, the emission end image 67 for each wavelength region can be easily observed by appropriately blocking the light in the first to third wavelength regions by the shutters 26A to 26C.

  By positioning the emission end image 67 in this manner, the light source device 102 according to the present modification can match the emission end image 67 in each wavelength region on a predetermined light source position. For this reason, when the light source 21 is arranged at a predetermined light source position instead of the target plate 61 and the optical fiber 12 is arranged at a predetermined image forming position instead of the optical fiber 62, the light source images 47A to 47C are matched to each other in wavelength. The misalignment between the areas can be corrected, and the matched light source image 47 can be formed at an appropriate position with respect to the incident end 12a as shown in FIG. Thereby, also in the light source device 102 according to this modification, the light emitted from the light source 21 can be efficiently introduced into the optical fiber 12.

  In the light source device 102 according to this modification, the light source images 47A to 47C are focused on the incident end 12a by appropriately moving the folding optical systems 24A to 24C in the directions of the branch optical axes 20A to 20C, respectively. it can. As a result, the light source images 47A to 47C can be clearly formed on the incident end 12a, and the light emitted from the light source 21 can be introduced into the optical fiber 12 more efficiently.

  Further, in the light source device 102 according to the present modification, as in the case of using the light source image observation unit 50, the light source device 102 alone is used without using the microscope main body 101 as an introduction destination device of light emitted from the light source device 102. The relative positional deviation between the light source images 47 </ b> A to 47 </ b> C can be corrected, and the misalignment between the wavelength ranges can be corrected before the light source device 102 is attached to the microscope body 101.

  The mark on the target plate 61 indicating the predetermined light source position of the light source 21 is not limited to the cross mark 61a and the light source mark 61b described above, and various marks can be applied. For example, the light source mark 61b is abolished and only the cross mark 61a is formed, and the predetermined image formation position of the emission end image 67 can be indicated by the center point 61c as the intersection of the cross mark 61a. Alternatively, a circular mark indicating the shape of the exit end image 67 can be used instead of the cross mark 61a and the light source mark 61b.

  By the way, in the light source device 102 according to this modification, in the light source image observation unit 60, the emission end 62a of the optical fiber 62 is provided at a predetermined image formation position of the light source image 47, and the target plate 61 indicating the predetermined light source position of the light source 21. Are arranged on the focal plane of the condenser lens 22 and the exit end image 67 of the exit end 62a is positioned and matched to a predetermined light source position for each wavelength region. However, the arrangement of the exit end 62a and the target plate 61 is arranged. Can be replaced.

  That is, the emission end 62 a is arranged at a predetermined light source position, and the target plate 61 is arranged on the imaging surface of the light source image 47 so that the light source mark 61 b is provided at a predetermined imaging position of the light source image 47. Then, the concave mirrors 28A to 28C are appropriately shifted and decentered by the mirror holders 30A to 30C, and the emission end images 67 for the first to third wavelength ranges are positioned at predetermined light source image positions, whereby the emission end images of the respective wavelength ranges are obtained. 67 can be matched on a predetermined imaging position.

  As a result, when the light source 21 is disposed at a predetermined light source position instead of the emission end 62a and the optical fiber 12 is disposed at a predetermined image formation position instead of the target plate 61, the light source images 47A to 47C are placed on the incident end 12a. The matched light source image 47 can be imaged at an appropriate position with respect to the incident end 12a as shown in FIG. Thereby, similarly to the above-mentioned case, the light emitted from the light source 21 can be efficiently introduced into the optical fiber 12.

(Embodiment 2)
Next, a light source device and a method for adjusting the light source device according to the second embodiment of the present invention will be described. FIG. 14 is a diagram illustrating a configuration of the wavelength selection optical system 204 included in the light source device 202 according to the second embodiment. Here, the light source device 202 is used in the ultraviolet microscope apparatus 100 so as to be interchangeable with the light source device 102. The wavelength selection optical system 204 is replaced with the wavelength selection optical system 104 based on the configuration of the wavelength selection unit 11. The wavelength selection unit 211 provided with the optical fiber 12 (see FIG. 1).

  The wavelength selection optical system 204 is based on the configuration of the wavelength selection optical system 104, and instead of the condenser lens 22, the folding optical systems 24A to 24C and the shutters 26A to 26C, the condenser lens 72, the plane mirrors 74A to 74C, and the shutter. 76A to 76C are provided. The plane mirrors 74A to 74C are provided with mirror holders 80A to 80C as eccentric drive mechanisms for holding the respective mirrors in a tiltable manner with respect to the branched optical axes 20A to 20C. Other configurations are the same as those of the first embodiment, and the same portions are denoted by the same reference numerals. Note that tilt decentering means that an optical element such as a plane mirror or lens is tilted with respect to a plane perpendicular to a predetermined axis such as an optical axis, or further tilted from a state in which the optical element is tilted at a predetermined angle with respect to the plane. Means.

  Similar to the condenser lens 22, the condenser lens 72 condenses the light emitted from the light source 21 and emits parallel light 91 inclined with respect to the optical axis 20. The emitted parallel light 91 enters the selective reflection optical system 23.

  The plane mirrors 74A to 74C are arranged on the branched optical axes 20A to 20C, respectively. As an initial setting, the reflecting surfaces 74Aa, 74Ba, and 74Ca are respectively matched with the exit pupils EPA to EPC of the condenser lens 72, The central axes perpendicular to the reflecting surfaces 74Aa, 74Ba, and 74Ca are aligned with the branched optical axes 20A to 20C, respectively. The plane mirror 74A reflects the branched light 92A reflected by the dichroic mirror 23A and branched from the parallel light 91, and is folded back symmetrically with respect to the branched optical axis 20A. Similarly, the plane mirrors 74B and 74C reflect the branched lights 92B and 92C reflected from the parallel light 91 by the dichroic mirrors 23B and 23C, respectively, and are folded back symmetrically with respect to the branched optical axes 20B and 20C.

  The folded lights 95A to 95C folded by the plane mirrors 74A to 74C are re-reflected by the dichroic mirrors 23A to 23C, respectively, and the re-reflected lights are coaxially combined via the dichroic mirror 23A to be combined light. 96. The synthesized light 96 is incident on the condenser lens 72 symmetrically with the parallel light 91 with respect to the optical axis 20 and in the opposite direction.

  The condensing lens 72 is aberration-corrected with respect to the ultraviolet light in the first to third wavelength regions, and each ultraviolet light in the first to third wavelength regions included in the synthesized light 96 is passed through the total reflection mirror 25. To converge at the same position. As a result, the light source images 97A to 97C of the light source 21 corresponding to each ultraviolet light in the first to third wavelength regions are telecentrically formed at the same position. The light source images 97A to 97C are secondary light sources for the ultraviolet light in the first to third wavelength regions, respectively, and the light source image 97 obtained by integrating the light source images 97A to 97C is an ultraviolet light obtained by synthesizing the first to third wavelength regions. Secondary light source.

  In the optical fiber 12, the incident end 12 a is disposed at a predetermined imaging position of the light source image 97. The optical fiber 12 receives ultraviolet light emitted from the light source image 97 from the incident end 12 a and emits it from the emission end attached to the light projecting tube 7. As a result, the light source device 202 can introduce, into the light projecting tube 7, ultraviolet light obtained by synthesizing the first to third wavelength regions as illumination light, similarly to the light source device 102.

  The shutters 76A to 76C are disposed in the vicinity of the reflecting surfaces 74Aa, 74Ba, and 74Ca of the plane mirrors 74A to 74C, that is, in the vicinity of the exit pupils EPA to EPC of the condenser lens 72, respectively. The shutters 76A to 76C are opened and closed by an opening / closing drive mechanism (not shown), thereby selectively blocking and opening the optical paths from the dichroic mirrors 23A to 23C to the dichroic mirrors 23A to 23C via the plane mirrors 74A to 74C. Each open / close drive mechanism is electrically connected to the control device 103 via the cable 14 c and opens and closes the shutters 76 </ b> A to 76 </ b> C based on an instruction from the control device 103. The wavelength selection unit 211 can selectively extract ultraviolet light in the first to third wavelength regions and emit it from the light source image 97 by opening and closing the shutters 76 </ b> A to 76 </ b> C in an appropriate combination. The arrangement of the shutters 76A to 76C is not limited to the vicinity of the reflecting surfaces 74Aa, 74Ba, and 74Ca, and the optical paths from the dichroic mirrors 23A to 23C to the dichroic mirrors 23A to 23C again through the plane mirrors 74A to 74C are selectively selected. Any position can be used as long as it can be shut off and opened.

  Next, the positional deviation correction of the light source images 97A to 97C in the light source device 202 will be described. FIG. 15 is a diagram illustrating a configuration of the light source device 202 when the positional deviation correction of the light source images 97A to 97C is performed. As shown in this figure, in the light source device 202, when correcting the positional deviation of the light source images 97 </ b> A to 97 </ b> C, the light source image observation unit 50 is replaced with the optical fiber 12 and the wavelength selection optics is used in the same manner as in the first embodiment. Connected to system 204. At this time, the target plate 51 forms an image of the light source image 97 instead of the optical fiber 12 so that the circular mark 51b is provided in accordance with a predetermined arrangement position of the incident end 12a, that is, a predetermined image formation position of the light source image 97. It is detachably arranged on the surface.

  On the other hand, the mirror holder 80A is configured, for example, as shown in FIGS. 16-1 and 16-2. 16A is a side view, and FIG. 16B is a front view of the plane mirror 74A. The mirror holder 80A includes a columnar shaft portion 81 protruding from the center of the back surface of the plane mirror 74A, a flat plate-like support portion 82 fixed to a pedestal (not shown) and connected to the shaft portion 81, and a support portion. A screw 83 is inserted through a through hole 82a provided in 82 and has a tip inserted into a groove 74Ab formed on the back surface of the plane mirror 74A, and both ends of the plane mirror 74A and the support 82 A coil spring 84 connected to each facing surface is used.

  Screws are cut on the inner wall surface of the through hole 82a and the side surface of the screw 83, and the screw 83 is screwed into the through hole 82a by this screw. The through-hole 82a, the screw 83, and the coil spring 84 are provided at three locations around the shaft portion 81 at each central angle of 120 °, and the through-hole 82a, the screw 83, and the coil spring 84 are centered around the shaft portion 81. Alternatingly arranged every 60 °. The coil spring 84 always exerts a stress that attracts the plane mirror 74A toward the support portion 82.

  In this mirror holder 80 </ b> A, the plane mirror 74 </ b> A can be freely tilted about the shaft portion 81 by appropriately screwing and unscrewing the three screws 83 from the back surface of the support portion 82. Thereby, in the wavelength selection optical system 204, the plane mirror 74A can be tilted and decentered freely with respect to the branch optical axis 20A. The mirror holders 80B and 80C are configured similarly to the mirror holder 80A, and the plane mirrors 74B and 74C can be tilted and decentered freely with respect to the branched optical axes 20A and 20C, respectively. The configuration of the mirror holders 80A to 80C is not limited to the configuration shown in FIGS. 16A and 16B, and any configuration can be used as long as the plane mirrors 74A to 74C can be freely tilted and decentered. be able to.

  FIG. 17 is a diagram illustrating a change in the optical path of the return light 95A and a change in the image formation position of the light source image 97A due to the tilt eccentricity of the plane mirror 74A. In this figure, an optical path related to the first wavelength region in the wavelength selection optical system 204 is extracted and shown. As shown by a broken line in FIG. 17, the mirror mirror 80A is tilted clockwise by the mirror holder 80A and shifted to the plane mirror 74A ′, so that the return light 95A reflected by the plane mirror 74A becomes the return light 95A ′. Migrated. At this time, the return light 95A is deflected clockwise in the figure by the declination amount 2δ according to the tilt amount δ of the plane mirror 74A.

  As the reflected light 95A is deflected, the ultraviolet light in the first wavelength region of the combined light 96 shifts to the combined light 96 '. As a result, the synthesized light 96 'enters the condenser lens 72 at an angle larger than that of the synthesized light 96 with respect to the optical axis 20, and the light source image 97A shifts to the light source image 97A'. At this time, the light source image 97A moves to the left in the figure by the shift amount 2δ · f based on the focal length f of the condenser lens 72 and the deflection angle amount 2δ of the reflected light 95A. Note that telecentricity is maintained in the formation of the light source image 97 </ b> A ′ by the condenser lens 72.

  Similarly, when the plane mirror 74A is tilted eccentrically by the tilt amount δ counterclockwise in the figure by the mirror holder 80A, the return light 95A is deflected counterclockwise in the figure by the deviation amount 2δ, and the light source image 97A is It moves to the right in the figure by the shift amount 2δ · f. Further, when the plane mirror 74A is tilted eccentrically by the tilt amount δ in the direction perpendicular to the paper surface in the drawing by the tilt amount δ, the return light 95A is deflected forward / backward by the deflection amount 2δ, respectively, and the light source image 97A Respectively move to the front / back side by a shift amount 2δ · f. Here, the upward / downward tilt eccentricity of the plane mirror 74A corresponds to an inclination when the front end of the plane mirror 74A in the drawing is moved upward / downward.

  Also in the second and third wavelength regions, the mirrors 80B and 80C respectively tilt the plane mirrors 74B and 74C in the same manner as the plane mirror 74A, thereby turning the reflected light beams 95B and 95C and the light source images 97B and 97C into the reflected light beams 95A and 95A, respectively. It can be deflected or moved in the same manner as the light source image 97A. That is, in the wavelength selection optical system 204, the imaging positions of the light source images 97A to 97C can be freely moved by appropriately tilting the plane mirrors 74A to 74C with the mirror holders 80A to 80C.

  In the light source device 202, when correcting the positional deviation of the light source images 97A to 97C, first, the light source image observation unit 50 is provided instead of the optical fiber 12, and the target plate 51 is placed on the image plane of the light source image 97 by the condenser lens 72. To place. Subsequently, the plane mirrors 74A to 74C are appropriately tilted and decentered by the mirror holders 80A to 80C, and the respective light source images 97A to 97C are placed at predetermined imaging positions of the light source image 97 indicated by the cross marks 51a and the circular marks 51b on the target plate 51. Positioning. Specifically, as in the first embodiment, positioning is performed as shown in FIG.

  As a result, the light source device 202 can correct the relative positional deviation between the light source images 97A to 97C and match the light source images 97A to 97C to correct the misalignment between the wavelength ranges. For this reason, when the optical fiber 12 is arranged at a predetermined imaging position instead of the target plate 51, the matched light source image 97 is imaged at an appropriate position with respect to the incident end 12a as shown in FIG. be able to. As a result, the light source device 202 can efficiently introduce the light emitted from the light source 21 into the optical fiber 12 as in the first embodiment.

  Further, in the light source device 202, as in the first embodiment, the light source image observation unit 50 is used to correct the misalignment of the light source images 97A to 97C, so that a microscope as an introduction destination device of light emitted from the light source device 102 is used. Without using the main body 101, it is possible to correct the relative displacement between the light source images 97A to 97C by using the light source device 202 alone. This makes it possible to correct the misalignment between the first to third wavelength regions before attaching the light source device 202 to the microscope body 101. After attaching the light source device 202 to the microscope body 101, the ultraviolet microscope can be easily and quickly performed. The entire apparatus 100 can be started up.

  Note that, in the light source device 202, the positional deviation correction of the light source images 97A to 97C can be performed using the light source image observation unit 60, as in the modification of the first embodiment described above. In that case, the exit end 62a of the optical fiber 62 is provided at a predetermined image formation position of the light source image 97, and the target plate 61 indicating the predetermined light source position of the light source 21 is provided on the focal plane of the condenser lens 72, The exit end image 67 may be positioned and matched at a predetermined light source position for each of the first to third wavelength regions. Alternatively, the emission end 62a is disposed at a predetermined light source position, and the target plate 61 is disposed on the image formation surface of the light source image 97 so that the light source mark 61b is provided at a predetermined image formation position of the light source image 97. The exit end image 67 may be matched on a predetermined image forming position.

  So far, the best mode for carrying out the present invention has been described as the first and second embodiments. However, the present invention is not limited to the above-described first and second embodiments, and may be within the scope of the present invention. Various modifications are possible.

  For example, in the first embodiment described above, the concave mirrors 28A to 28C are shifted and decentered to correct the positional deviation of the light source images 47A to 47C. In the second embodiment, the plane mirrors 74A to 74C are tilted and decentered. Although the positional deviation correction of the light source images 97A to 97C is performed, the present invention is not limited to this, and the positional deviation correction of the light source images 47A to 47C and 97A to 97C is performed by tilting the dichroic mirrors 23A to 23C. It can also be. Further, when the wavelength selection optical system 104 is used as in the first embodiment, the positional deviation correction of the light source images 47A to 47C is performed by shifting or decentering the imaging lenses 27A to 27C, respectively. You can also However, when the positional deviation correction is performed by the dichroic mirrors 23A to 23C and the imaging lenses 27A to 27C, the telecentricity may be impaired in the imaging of the light source images 47A to 47C and 97A to 97C. As described above, it is preferable to perform positional deviation correction by the concave mirrors 28A to 28C or the plane mirrors 74A to 74C.

  In the first and second embodiments described above, the description has been made on the assumption that the mirror holders 30A to 30C and 80A to 80C are manually operated in order to correct the positional deviation of the light source images 47A to 47C and 97A to 97C. The mirror holders 30 </ b> A to 30 </ b> C and 80 </ b> A to 80 </ b> C can be automatically operated based on control from the control device 103 without being limited to manual operation. In this case, for example, the screws 33 and 83 provided in the mirror holders 30 </ b> A to 30 </ b> C and 80 </ b> A to 80 </ b> C are screwed and screwed by an electric micrometer or the like, and the electric micrometer is driven and controlled by the control device 103. Good. Further, the control device 103 acquires the observation image generated by the camera 53 and performs predetermined image processing on the observation image, thereby positioning the light source images 47A to 47C or 97A to 97C with respect to the target plates 51 and 61. It is recommended to check.

  When the positional deviation correction of the light source images 47A to 47C and 97A to 97C is performed manually, the casing of the wavelength selection units 11 and 211, that is, the cover member that accommodates the wavelength selection optical systems 104 and 204 is externally attached. It is preferable to provide an opening for enabling the screws 33 and 83 to be operated.

  In the first and second embodiments described above, the wavelength selection optical systems 104 and 204 have been described as extracting ultraviolet light in the first to third wavelength ranges, but the number of wavelength ranges to be extracted is limited to three. It is possible to extract ultraviolet light in two or less or four or more wavelength regions. Further, the wavelength range extracted by the wavelength selection optical systems 104 and 204 is not limited to the ultraviolet range, and may be a visible range or an infrared range, and these wavelength ranges may be mixed. Accordingly, the microscope apparatus using the light source device according to the present invention is not limited to the ultraviolet microscope apparatus, and can be applied to the visible region, the infrared region, or a wide wavelength region from the ultraviolet region to the infrared region. A microscopic device or the like.

  In the case where the first to third wavelength regions are visible regions, the light source images 47A to 47C and 97A to 97C are imaged on the target plates 51 and 61 without the camera 53 in the positional deviation correction. An optical image can be visually observed. When the first to third wavelength regions are visible, an incandescent lamp such as a halogen lamp can be used as the light source 21. In this case, since the high-intensity part such as a halogen lamp is located at the center of the filament, the light source images 47A to 47C and 97A to 97C are misaligned so as to match the center of the incident end 12a of the optical fiber 12, respectively. It is good to make corrections.

  In the first and second embodiments described above, the wavelength selection optical systems 104 and 204 include the condensing lenses 22 and 72 as the collimating optical system and the condensing optical system, respectively. Individual lens systems can also be provided as systems. That is, a collimating lens system that condenses light emitted from the light source 21 and emits parallel light, and a condensing lens system that condenses the combined lights 46 and 96 to form the light source images 47 and 97 are individually provided. Can be provided.

  In the first and second embodiments described above, the wavelength selection optical systems 104 and 204 are provided with the light source 21 at a position off the optical axis 20, but may be provided on the optical axis 20. In this case, for example, the total reflection mirror 25 may be removed, and a half mirror may be provided on the optical path between the light source 21 and the condenser lenses 22 and 72. As a result, the light emitted from the light source 21 and the light converged by the condenser lenses 22 and 72 can be separated, and the light source images 47 and 97 of the optical fiber 12 can be obtained as in the case where the total reflection mirror 25 is used. An image can be formed on the incident end 12a.

  In the first and second embodiments described above, the microscope main body 101 has been described as an upright microscope that observes the specimen from the upper part. However, an inverted microscope that observes from the lower part of the specimen may be used. it can. Further, although the microscope main body 101 has been described as illuminating the specimen with the illumination light emitted from the light source devices 102 and 202, the microscope main body 101 may be configured to transmit and illuminate.

(Appendix 1)
In the light source device that emits light in a plurality of predetermined wavelength ranges among the light emitted from the light source,
A collimating optical system that emits the light emitted from the light source as parallel light; and
A folding optical system that is provided for each of the predetermined wavelength regions and that folds incident light symmetrically with respect to a predetermined axis of the optical system;
A plurality of light of the predetermined wavelength range is branched from the parallel light emitted from the collimating optical system, and the branched light of each branched wavelength range is incident on the corresponding folding optical system, and the folding optics An extraction optical system that synthesizes the folded light that is folded for each predetermined wavelength range of the system;
A condensing optical system for condensing the combined light synthesized by the extraction optical system to form a light source image of the light source;
A decentering drive mechanism for changing the imaging position of the light source image by shifting or decentering at least a part of the folding optical system and the extraction optical system for each predetermined wavelength range;
A light source device comprising:

(Appendix 2)
The folding optical system condenses the branched light to form a first intermediate image of the light source and condenses the light emitted from the first intermediate image. A reflective imaging system that forms a second intermediate image of the light source at a position symmetrical to the first intermediate image with respect to the optical axis;
The imaging lens system collects light emitted from the second intermediate image, and emits the folded light that is symmetric with the branched light with respect to the optical axis of the own lens system;
The decentering drive mechanism shifts or decenters at least a part of the reflection imaging system and the imaging lens system for each predetermined wavelength range to change the imaging position of the light source image. The light source device according to appendix 1.

(Appendix 3)
The folding optical system has a plane mirror that reflects the branched light;
2. The light source device according to appendix 1, wherein the eccentric drive mechanism changes the imaging position of the light source image by tilt decentering the plane mirror for each predetermined wavelength range.

(Appendix 4)
The extraction optical system selectively reflects light in one wavelength range among a plurality of light in the predetermined wavelength range and transmits a selective reflection optical element that transmits light other than the one wavelength range in the predetermined wavelength range. Every
The decentering driving mechanism changes the imaging position of the light source image by tilt decentering the selective reflection optical element for each of the predetermined wavelength ranges. Light source device.

(Appendix 5)
An index member that is detachably provided on the imaging surface of the light source image by the condensing optical system, and that indicates a predetermined imaging position of the light source image when provided on the imaging surface;
The light source image is any one of appendices 1 to 4, wherein a high-luminance portion in the light source image is positioned at the predetermined imaging position by the eccentric drive mechanism for each predetermined wavelength region. The light source device described.

(Appendix 6)
The light source is an arc lamp that emits light by arc discharge;
6. The light source according to claim 5, wherein the light source image has a portion conjugate with the cathode tip of the arc lamp positioned at the predetermined imaging position by the eccentric drive mechanism for each predetermined wavelength region. apparatus.

(Appendix 7)
The collimating optics has a predetermined size and is provided at a predetermined light source position of the light source so as to be exchangeable with the light source, and when the light is provided at the predetermined light source position, A temporary light source emitted to the system;
A temporary light source image of the temporary light source that is formed on the imaging surface of the light source image by the condensing optical system and is imaged by the condensing optical system when provided on the imaging surface. An index member indicating a predetermined imaging position of
With
5. The light source device according to claim 1, wherein the temporary light source image is positioned at the predetermined imaging position by the eccentric drive mechanism for each of the predetermined wavelength regions.

(Appendix 8)
The light source has a predetermined size and is detachably provided at a predetermined light source image position of the light source image. When the light source image is provided at the light source image position, the illumination light including a plurality of lights in the predetermined wavelength region is condensed. A temporary light source that emits to the optical system;
An indicator member provided on the focal plane of the collimating optical system so as to be interchangeable with the light source, and indicating a predetermined light source position of the light source when provided on the focal plane;
With
The temporary light source image of the temporary light source formed by the collimating optical system is positioned at the predetermined light source position by the eccentric drive mechanism for each predetermined wavelength range. The light source device according to one.

(Appendix 9)
The light source device according to appendix 7 or 8, wherein the temporary light source is an exit end of an optical fiber into which the illumination light is introduced.

(Appendix 10)
The light source device according to any one of appendices 5 to 9, further comprising an observation device that captures and displays an optical image formed on the index member.

(Appendix 11)
The light source device according to any one of appendices 1 to 10, wherein the collimating optical system and the condensing optical system are provided so that each optical axis and each pupil coincide with each other.

(Appendix 12)
Additional shutters for selectively blocking and opening an optical path from the extraction optical system to the extraction optical system again via the folding optical system for each predetermined wavelength range The light source device according to any one of the above.

It is a figure which shows the whole structure of the microscope apparatus using the light source device concerning Embodiment 1 and 2 of this invention. FIG. 3 is a diagram illustrating a configuration of a wavelength selection optical system included in the light source device according to the first embodiment. It is a figure which shows an example of the light emission part structure of the light source shown in FIG. It is a figure which shows the positional relationship of the light source image corresponding to the light source shown in FIG. 3, and an optical fiber incident end. It is a figure which shows the positional relationship of the light source image corresponding to the light source shown in FIG. 3, and an optical fiber incident end. It is a figure which shows the structure of the light source image observation unit with which the light source device concerning Embodiment 1 is equipped when correcting the position shift of a light source image. It is a figure which shows the structure of the target board shown in FIG. It is sectional drawing which shows the structure of the mirror holder shown in FIG. It is a front view which shows the structure of the mirror holder shown in FIG. It is a figure explaining the effect | action at the time of decentering the concave mirror shown in FIG. It is a figure which shows the light source image imaged on the target board shown in FIG. FIG. 6 is a diagram illustrating another configuration of the light source image observation unit provided when the light source device according to the first embodiment corrects the positional deviation of the light source image. It is a figure which shows the structure of the target board shown in FIG. It is a figure which shows the fiber emission end image imaged on the target board shown in FIG. It is a figure which shows the structure of the wavelength selection optical system with which the light source device concerning Embodiment 2 is provided. It is a figure which shows the structure of the light source image observation unit with which the light source device concerning Embodiment 2 is equipped when correcting the position shift of a light source image. It is sectional drawing which shows the structure of the mirror holder shown in FIG. It is a front view which shows the structure of the mirror holder shown in FIG. It is a figure explaining the effect | action at the time of decentering the plane mirror shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Specimen 2 Stage 3 Objective lens 4 Revolver 5 Focusing mechanism 6 Base 7 Projection tube 7a Fiber connector 8 Lens tube 9 Eyepiece unit 11, 211 Wavelength selection unit 12 Optical fiber 12a Incident end 13 Camera 20 Optical axis 20A-20C Branch light Axis 21 Light source 21a Anode 21b Cathode 21c Luminance distribution 21d High brightness part 22 Condensing lens 23 Selective reflection optical system 23A-23C Dichroic mirror 24A-24C Folding optical system 25 Total reflection mirror 26A-26C Shutter 27A-27C Imaging lens 28A -28C Concave mirror 28Aa, 28Ba, 28Ca Reflective surface 30A-30C Mirror holder 31 Shaft part 31a Groove part 32 Support part 32a Through hole 33 Screw 41, 91 Parallel light 42A-42C, 92A-92C Branched light 43A-43C 1st intermediate image 4 A to 44C Second intermediate image 45A to 45C, 95A to 95C Folded light 46,96 Combined light 47, 47A to 47C, 97, 97A to 97C Light source image 47c Image luminance distribution 47d High luminance portion 50, 60 Light source image observation unit 51 , 61 Target plate 51a, 61a Cross mark 51b Circular mark 51c, 61c Center point 52 Imaging lens 53 Camera 54 Display 61b Light source mark 62 Optical fiber 62a Emission end 63 Tool light source 64 Condensing lens 67 Ejection end image 72 Condensing lens 74A -74C Plane mirror 74Aa, 74Ba, 74Ca Reflecting surface 74Ab Groove part 76A-76C Shutter 80A-80C Mirror holder 81 Shaft part 82 Support part 82a Through-hole 83 Screw 84 Coil spring 100 Ultraviolet microscope apparatus 101 Microscope main body 102, 202 Light source apparatus 103 Controller 104, 204 Wavelength selection optical system EP1, EP2, EPA to EPC Exit pupil

Claims (11)

In the light source device that emits light in a plurality of predetermined wavelength ranges among the light emitted from the light source,
A collimating optical system that emits the light emitted from the light source as parallel light; and
A folding optical system that is provided for each of the predetermined wavelength regions and that folds incident light symmetrically with respect to a predetermined axis of the optical system;
A plurality of light of the predetermined wavelength range is branched from the parallel light emitted from the collimating optical system, and the branched light of each branched wavelength range is incident on the corresponding folding optical system, and the folding optics An extraction optical system that synthesizes the folded light that is folded for each predetermined wavelength range of the system;
A condensing optical system for condensing the combined light synthesized by the extraction optical system to form a light source image of the light source;
A decentering drive mechanism for changing the imaging position of the light source image by shifting or decentering at least a part of the folding optical system and the extraction optical system for each predetermined wavelength range;
A light source device comprising: The folding optical system condenses the branched light to form a first intermediate image of the light source and condenses the light emitted from the first intermediate image. A reflective imaging system that forms a second intermediate image of the light source at a position symmetrical to the first intermediate image with respect to the optical axis;
The imaging lens system collects light emitted from the second intermediate image, and emits the folded light that is symmetric with the branched light with respect to the optical axis of the own lens system;
The decentering drive mechanism shifts or decenters at least a part of the reflection imaging system and the imaging lens system for each predetermined wavelength range to change the imaging position of the light source image. The light source device according to claim 1. The folding optical system has a plane mirror that reflects the branched light;
2. The light source device according to claim 1, wherein the decentering driving mechanism tilts and decenters the plane mirror for each predetermined wavelength range to change an imaging position of the light source image. The extraction optical system selectively reflects light in one wavelength range among a plurality of light in the predetermined wavelength range and transmits a selective reflection optical element that transmits light other than the one wavelength range in the predetermined wavelength range. Every
The said decentration drive mechanism changes the imaging position of the said light source image by tilt-decentering the said selective reflection optical element for every said predetermined wavelength range, It is characterized by the above-mentioned. Light source device. An index member that is detachably provided on the imaging surface of the light source image by the condensing optical system, and that indicates a predetermined imaging position of the light source image when provided on the imaging surface;
5. The light source image according to claim 1, wherein a high-luminance portion in the light source image is positioned at the predetermined imaging position by the eccentric drive mechanism for each of the predetermined wavelength regions. The light source device according to 1. The light source is an arc lamp that emits light by arc discharge;
6. The light source image according to claim 5, wherein a portion conjugate with a cathode tip portion of the arc lamp is positioned at the predetermined imaging position by the eccentric drive mechanism for each predetermined wavelength region. Light source device. The collimating optics has a predetermined size and is provided at a predetermined light source position of the light source so as to be exchangeable with the light source, and when the light is provided at the predetermined light source position, A temporary light source emitted to the system;
A temporary light source image of the temporary light source that is formed on the imaging surface of the light source image by the condensing optical system and is imaged by the condensing optical system when provided on the imaging surface. An index member indicating a predetermined imaging position of
With
5. The light source device according to claim 1, wherein the temporary light source image is positioned at the predetermined imaging position by the eccentric drive mechanism for each of the predetermined wavelength regions. The light source has a predetermined size and is detachably provided at a predetermined light source image position of the light source image. When the light source image is provided at the light source image position, the illumination light including a plurality of lights in the predetermined wavelength region is condensed. A temporary light source that emits to the optical system;
An indicator member provided on the focal plane of the collimating optical system so as to be interchangeable with the light source, and indicating a predetermined light source position of the light source when provided on the focal plane;
With
5. The temporary light source image of the temporary light source formed by the collimating optical system is positioned at the predetermined light source position by the eccentric drive mechanism for each predetermined wavelength region. The light source device according to claim 1. A method of adjusting a light source device that extracts light in a plurality of predetermined wavelength regions from light emitted from a light source, synthesizes and emits light in the extracted wavelength regions,
An index placement step of placing an index member indicating a predetermined imaging position of a light source image of the light source imaged by a condensing optical system included in the light source device on an imaging plane of the light source image;
A positioning step in which at least a part of an optical element provided on the optical path of each wavelength region is shifted or decentered for each predetermined wavelength region to position a high-luminance portion in the light source image at the predetermined imaging position. When,
A method for adjusting a light source device, comprising: A method of adjusting a light source device that extracts light in a plurality of predetermined wavelength regions from light emitted from a light source, synthesizes and emits light in the extracted wavelength regions,
A temporary light source placement step of placing a temporary light source having a predetermined size and emitting illumination light including a plurality of lights in the predetermined wavelength range at a predetermined light source position of the light source instead of the light source;
An index member that indicates a predetermined imaging position of a temporary light source image of the temporary light source that is imaged by a condensing optical system included in the light source device is disposed on an imaging surface of the light source image of the light source by the condensing optical system. An indicator placement step,
A positioning step for positioning the temporary light source image at the predetermined imaging position by shifting or decentering at least a part of the optical element provided on the optical path of each wavelength range for each predetermined wavelength range;
A method for adjusting a light source device, comprising: A method of adjusting a light source device that extracts light in a plurality of predetermined wavelength regions from light emitted from a light source, synthesizes and emits light in the extracted wavelength regions,
A predetermined imaging position of a light source image of the light source formed by a condensing optical system provided in the light source device with a temporary light source having a predetermined size and emitting illumination light including a plurality of lights in the predetermined wavelength range A temporary light source placement step to be placed on,
An index placement step of placing an index member indicating a predetermined light source position of the light source on a focal plane of the collimating optical system instead of the light source;
For each of the predetermined wavelength ranges, by a collimating optical system in which at least a part of the optical element provided on the optical path of each wavelength range is shifted or decentered, and the light emitted from the light source is condensed into parallel light A positioning step of positioning a temporary light source image of the temporary light source to be imaged at the predetermined light source position;
A method for adjusting a light source device, comprising:

Images