JP2008128871A5 - - Google Patents

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Publication number
JP2008128871A5
JP2008128871A5 JP2006315391A JP2006315391A JP2008128871A5 JP 2008128871 A5 JP2008128871 A5 JP 2008128871A5 JP 2006315391 A JP2006315391 A JP 2006315391A JP 2006315391 A JP2006315391 A JP 2006315391A JP 2008128871 A5 JP2008128871 A5 JP 2008128871A5
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JP
Japan
Prior art keywords
light
scale
reflected light
measurement object
displacement detection
Prior art date
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Granted
Application number
JP2006315391A
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English (en)
Japanese (ja)
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JP4909023B2 (ja
JP2008128871A (ja
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Publication date
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Priority to JP2006315391A priority Critical patent/JP4909023B2/ja
Priority claimed from JP2006315391A external-priority patent/JP4909023B2/ja
Publication of JP2008128871A publication Critical patent/JP2008128871A/ja
Publication of JP2008128871A5 publication Critical patent/JP2008128871A5/ja
Application granted granted Critical
Publication of JP4909023B2 publication Critical patent/JP4909023B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006315391A 2006-11-22 2006-11-22 変位検出装置 Expired - Fee Related JP4909023B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006315391A JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006315391A JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Publications (3)

Publication Number Publication Date
JP2008128871A JP2008128871A (ja) 2008-06-05
JP2008128871A5 true JP2008128871A5 (https=) 2010-01-14
JP4909023B2 JP4909023B2 (ja) 2012-04-04

Family

ID=39554838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006315391A Expired - Fee Related JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Country Status (1)

Country Link
JP (1) JP4909023B2 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638048B2 (ja) * 1988-01-22 1994-05-18 株式会社ミツトヨ 反射型エンコーダ
JPH03287015A (ja) * 1990-04-04 1991-12-17 Mitsutoyo Corp 反射型光学式変位検出器
JPH0898838A (ja) * 1994-09-30 1996-04-16 Toshiba Corp エンコーダ装置、超音波プローブおよび超音波検査装置
JP4280447B2 (ja) * 2001-02-20 2009-06-17 キヤノン株式会社 反射スケールおよびそれを用いた変位検出装置

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