JP2008128736A - Waveform display apparatus and waveform display method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To overcome the problem wherein analysis of tendency in the measured physical quantity and detail reading of the current physical quantity cannot be implemented simultaneously, since adjacent waveforms displayed on a display are mixed. <P>SOLUTION: A waveform display apparatus 10 is provided with a measurement section 4 for measuring the physical quantity of a to be measured object; a storage section for storing time-series data as the physical quantity of the to-be-measured object, measured by the measurement section 4 at each predetermined measurement time; a calculation/processing section for reading the time-series data stored in the storage section, and calculating the ratio at each predetermined measurement time with respect to all measurement times of the time-series data; and a display section 2 for displaying a graph of the physical quantity of the to be measured object measured at each predetermined measurement time, by changing the display width at each predetermined measurement time, based on the ratio at each predetermined measurement time calculated by the calculation/processing section. The apparatus carries out a compressed displaying. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a waveform display apparatus and method suitable for application to, for example, measuring the temperature of an object to be measured using a temperature sensor and displaying the measured temperature in a time series over a long period of time.

Conventionally, there has been provided a waveform display device that measures a physical quantity that fluctuates with time and displays the measured physical quantity in time series. Such a waveform display device is, for example,
・ Monitoring the temperature in the thermostatic chamber during the temperature test ・ Monitoring of various life tests such as power monitoring of laser life tests ・ Vacuum level of vapor deposition equipment, power to the evaporation source, measurement of film thickness of vapor deposition material, etc. It was used to display. The waveform display device is provided with a display unit composed of a liquid crystal display panel or the like, and the measured physical quantity is displayed, for example, in a two-dimensional line graph.

  In the display unit included in the conventional waveform display device, the display contents are updated in real time every time the measured physical quantity is updated. And the physical quantity measured for every fixed time had a waveform displayed at equal intervals of the measurement time.

  Here, an example of a conventional waveform display will be described with reference to FIGS. 10 to 12 show examples in which the physical quantity to be measured is displayed as a waveform on the display unit as a temperature. In FIGS. 10 to 12, the temperature measured every second is displayed in time series on the display unit. 10 to 12, the horizontal axis indicates the elapsed time, and the vertical axis indicates the relative value of the monitored physical quantity (for example, temperature). The time width displayed on the display unit is constant, and the scale is divided by the elapsed time every 50 seconds. In addition, when the time width displayed on the display unit is constant, it is referred to as linear display.

  First, a display example of temperature measured from the start of measurement (first 0 seconds) to 300 seconds will be described with reference to FIG. As the measurement starts, the measured temperature is displayed in a waveform from left to right toward the display unit. FIG. 10 shows that the measured temperature waveform includes a short cycle waveform in a long cycle waveform. At this time, the number of sample points that can be displayed on the display unit is 300 points.

  In the conventional waveform display example, the measured temperature continues to be displayed even after 300 seconds have elapsed from the start of measurement (the first 0 seconds). Here, a waveform display example of the temperature measured when 300 seconds to 600 seconds have elapsed after the start of measurement will be described with reference to FIG.

  The temperature measured in FIG. 10 is taken over and displayed as shown in FIG. When the measured temperature is updated in real time so as to be displayed on the display unit as it is, the latest data is additionally displayed on the rightmost side of the display range every predetermined time (for example, 1 second). As the actual time elapses, the past elapsed time moves to the left side, and the displayed waveform also moves to the left side of the display range. Also in FIG. 11, the number of sample points that can be displayed on the display unit is 300 points.

  Here, it is attempted to display all the temperatures measured from the start of measurement (first 0 seconds) to 600 seconds within the display range of the display unit. In FIG. 12, the temperature measured from the start of measurement (first 0 seconds) to 600 seconds is displayed in time series on the display unit. Also in FIG. 12, the temperature measured in time series is linearly displayed. At this time, the number of sample points that can be displayed on the display unit is 600 points.

Patent Document 1 discloses a waveform display device that displays waveform data on a display unit.
JP 2005-300408 A

  By the way, in FIG. 11, the time series data from the start of measurement (first 0 seconds) to 300 seconds is out of the display range, and the user cannot see. As described above, when the number of sample points that can be displayed on the display unit is fixed, the previously displayed waveform is not displayed. In order to read the trend of the physical quantity measured in the past, it has been troublesome to read and display the physical quantity stored retroactively to the past data.

  In FIG. 12, the same display unit as in FIGS. 10 and 11 is used, so the waveform display range does not change. For this reason, when the number of sample points that can be displayed on the display unit is 600, in order to display all the measured physical quantities (temperatures) as waveforms, the time widths are shown in FIGS. 10 and 11 (300 sample points). Must be at least half of the display example. As shown in FIG. 12, even if an attempt is made to display the entire time (for example, when the number of sample points is 600 or more) with a narrow time width, the detailed portion of the displayed waveform is crushed depending on the resolution of the display unit. As a result, even if the tendency of the physical quantity measured for a long time is analyzed or the recent physical quantity is read in detail, the adjacent physical waveforms are not clearly displayed, so that the detailed physical quantity cannot be read.

  The present invention has been made in view of such a situation, and an object of the present invention is to display a physical quantity by changing the time width of the waveform in accordance with the elapsed time of the measured physical quantity.

  The present invention measures a physical quantity of an object to be measured, stores the measured physical quantity of the object to be measured as time-series data in time series every predetermined time, reads the stored time-series data, Based on the calculated ratio for each measurement time when calculating the ratio for every measurement time of the data and displaying the physical quantity of the measured object measured for each measurement time as a graph Thus, the display width is changed for each predetermined measurement time.

  By doing in this way, according to the elapsed time which measured the physical quantity of the to-be-measured object, it became possible to display time-sequential data in a graph by changing the display width for every predetermined measurement time.

  According to the present invention, the time-series data is displayed by changing the display width of the measurement time according to the elapsed time when the physical quantity of the measurement object is measured. Therefore, it is possible to display time-series data by narrowing the time width of past physical quantities with a long elapsed time and widening the time width of recent physical quantities with a short elapsed time and changing the display width for each measurement time. . As a result, the physical quantity measured in the past has an effect of making it easy to visually recognize the tendency, and the recently measured physical quantity has an effect of making it easy to visually recognize detailed changes.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. Hereinafter, an example will be described in which a physical quantity of an object to be measured is measured every predetermined measurement time and applied to the waveform display device 10 that displays the measured physical quantity in time series. The physical quantity measured using the waveform display device 10 includes at least one of temperature, humidity, voltage, and current that change in time series. In this example, the physical quantity to be measured is the temperature of the object to be measured.

  First, an external configuration example of the waveform display device 10 of this example will be described with reference to FIG. The waveform display device 10 can measure the physical quantity (temperature) of the object to be measured by bringing the measuring unit 4 including a temperature sensor or the like close to the object to be measured. The measurement unit 4 supplies the measured physical quantity (temperature) to the calculation unit 1 that performs calculation processing for performing waveform display. The calculation unit 1 stores the temperature supplied from the measurement unit 4 in time series for each predetermined measurement time. In addition, the calculation unit 1 performs a calculation process of adjusting the time width so that the past time width is narrowed and the recent time width is displayed wide according to the measured elapsed time. On the display unit 2 constituted by the liquid crystal panel, the measured physical quantity of the measured object is displayed in a waveform as a two-dimensional line graph based on the ratio for each predetermined measurement time calculated by the calculation unit 1. At this time, the display unit 2 displays the display with a different display width for each predetermined measurement time. In the following description, when the waveform is displayed on the display unit 2 while changing the display width for each predetermined measurement time according to the elapsed time of the measured physical quantity, it is referred to as compression display. Then, the user performs an input operation or the like with the operation unit 3 configured with a keyboard or the like connected to the calculation unit 1. Setting of parameters for calculation processing performed by the calculation unit 1 and updating of display contents of the display unit 2 are performed by the operation unit 1.

  Next, an internal configuration example of the waveform display device 10 of this example will be described with reference to FIG. The physical quantity (temperature in this example) obtained by the measuring unit 4 measuring the object to be measured is supplied to the computing unit 1 via the input unit 7 that conforms to the digital interface standard of the measuring unit 4. The calculation unit 1 includes a clock unit 9 that supplies a reference time, and gives a predetermined measurement time to the supplied physical quantity. The computing unit 1 includes a RAM (Random Access Memory) that temporarily stores data. The physical quantity of the measurement target to which the measurement time is given by the calculation unit 1 is stored in the storage unit 6 as time series data for each predetermined measurement time. The arithmetic processing unit 8 that performs arithmetic processing of the compression display provided in the arithmetic unit 1 reads out the time series data stored in the storage unit 6 and sets the ratio for each predetermined measurement time with respect to all the measurement times of the time series data. Calculate. An example of the ratio calculation processing for compression display performed by the calculation processing unit 8 will be described later. After performing arithmetic processing in the arithmetic processing unit 8, the time-series data is compressed and displayed on the display unit 2 by changing the display width for each measurement time based on the ratio of the predetermined measurement time for each calculated time-series data. .

  Next, an example of a compression display calculation process performed by the calculation processing unit 8 will be described below.

First, time series data v _t to be displayed is defined as follows. In this example, data whose physical quantity changes with the passage of time is referred to as time-series data v _t .

The time-series data v _t is a value that is updated by increasing T by one at a certain time interval t ₀ . Consider drawing such time-series data v _t in a two-dimensional line graph {x _n , y _n }. First, in order to display the measured physical quantity in the display area of the display unit 2 in a two-dimensional line graph, the length of the horizontal axis of the display area is set to 1. And

  Instead of,

  Draw a sequence of points. This f (t) is referred to as a compression function. At this time, the horizontal axis (time width) is determined using f (t) under the conditions of Expressions (1) to (4).

  Further, Expression (5) is used as the compression function f (t).

L is a parameter for designating the display width of the physical quantity measured recently. T ₀ is the solution of equation (6).

  Expression (5) is a function that satisfies Expression (4).

  By the way, in general, information indicating the past state of the object to be measured is necessary, but information indicating a recent state is highly important. For this reason, as shown in FIG. 12, if information indicating past and recent states is displayed with the same time width, there is a possibility that the required recent physical quantity cannot be read.

Here, it is desirable that the time-series data v _t displayed on the display unit 2 is always compressed and displayed naturally without the latest display density changing and the compressed display width not being zero. This is considered that the above-described compression function f (t) should satisfy the expressions (1) to (4) when the horizontal axis of the display is (0, 1).

  Expressions (2) and (3) indicate that the past measurement start time is displayed on the left end of the display unit 2 and the current measurement time point is displayed on the right end of the display unit 2. Further, the waveform is smoothly connected and displayed in a compressed manner by the differential coefficient of Expression (3). Expression (4) represents that the density of the display width in the latest time interval does not change. That is, even if T increases, the interval between the latest point and the point in the past does not change. Moreover, Formula (4) represents Formula (7).

Expression (7) represents that the time interval displayed on the display unit 2 is displayed narrower as the time-series data v _t is a physical quantity measured in the past. Further, as a specific compression function f (t) satisfying the expressions (2) to (4), the expression (5) is used.

L is a parameter to specify the display width of the series data v _t when measured recently. By setting the parameter value in advance, the arithmetic processing unit 8 changes the ratio of every predetermined measurement time with respect to all the measurement times of the time series data for every predetermined measurement time displayed on the display unit 2. The display width of can be changed. L is a parameter obtained by rewriting k shown in Expression (3) as shown in Expression (8).

T ₀ is a constant determined by giving L and T, and is the solution of equation (9).

  The solution of equation (9) is not algebraically determined, but can be determined numerically.

In the following description, a compressed display example when a waveform is displayed on the display unit 2 using the function of Expression (9) will be described with reference to FIGS. 3 to 7 are diagrams comparing the conventional linear display and the compressed display of this example. The vertical axis represents the measured physical quantity of the object to be measured, and the horizontal axis represents the elapsed time (number of sample points). Here, the time series data v _t is the sum of a long and short sine wave and a normal distribution function. In addition, parameter: L = 40.

A display example of the time series data v _t will be described with reference to FIG. In FIG. 3, the first 50 points are taken as the number of sample points T, and the linear display and the compressed display of the time series data v _t are compared. FIG. 3A shows an example of linear display. FIG. 3B is an example of compressed display. The vertical grids in FIGS. 3A and 3B are drawn every t = 10.

  In FIG. 3, since the number of sample points is small (measurement time is short), there is almost no difference in display between the linear display and the compressed display.

Next, T = 100 is taken as the number of sample points. A display example of the time-series data v _t at T = 100 will be described with reference to FIG. In Figure 4, taken at 100 points as the sample points T, hours compares the linear display and the compressed display of series data v _t. FIG. 4A shows an example of linear display. FIG. 4B is an example of compressed display. The vertical grids in FIGS. 4A and 4B are drawn every t = 10.

  Compared to FIG. 3A, it can be seen that in FIG. 4A, the intervals between the vertical grid lines of the linear display are evenly narrowed. On the other hand, in FIG. 4B, it can be seen that the vertical grid line interval of the compressed display is wide on the right side (for example, 90 to 100) and narrow on the left side (for example, 0 to 10).

Next, T = 200 is taken as the number of sample points. A display example of the time-series data v _t at T = 200 will be described with reference to FIG. In Figure 5, it takes a 200-point as a sample number T, hours compares the linear display and the compressed display of series data v _t. FIG. 5A shows an example of linear display. FIG. 5B is an example of compressed display.

  Compared to FIG. 4A, it can be seen that in FIG. 5A, the intervals between the vertical grid lines of the linear display are evenly narrowed. On the other hand, in FIG. 5B, it can be seen that the vertical grid lines of the compressed display have a wide right side (for example, 150 to 200) and a narrow left side (for example, 0 to 50). However, the interval between the vertical grid lines on the right side is not narrower than the interval when T = 50 (see FIG. 3B).

Next, T = 500 is taken as the number of sample points. A display example of the time-series data v _t at T = 500 will be described with reference to FIG. In FIG. 6, 500 points are taken as the number of sample points T, and the linear display and the compressed display of the time series data v _t are compared. FIG. 6A shows an example of linear display. FIG. 6B is an example of compressed display.

  Compared to FIG. 5A, in FIG. 6A, it can be seen that the intervals between the vertical grid lines of the linear display are evenly narrowed. On the other hand, in FIG. 6B, it can be seen that the vertical grid lines of the compressed display have a wide right side (for example, 250 to 500) and a narrow left side (for example, 0 to 250). However, the interval between the vertical grid lines on the right side is not narrower than the interval when T = 50 (see FIG. 3B).

Next, T = 1000 is taken as the number of sample points. A display example of the time-series data v _t at T = 1000 will be described with reference to FIG. In Figure 7, it takes the 1000 points as the sample points T, hours compares the linear display and the compressed display of series data v _t. FIG. 7A shows an example of linear display. FIG. 7B is an example of compressed display.

Compared to FIG. 6A, in FIG. 7A, it can be seen that the intervals between the vertical grid lines of the linear display are evenly narrowed. At this time, the time-series data v _t measured at the time of measurement from the past to the present is crushed as a whole, and the physical quantity measured recently cannot be read immediately. On the other hand, in FIG. 7B, it can be seen that the right side is wide and the left side is narrow as the interval of the vertical grid lines of the compressed display. However, the interval between the vertical grid lines on the right side is not narrower than the interval when T = 50 (see FIG. 3B). For this reason, the time-series data v _t measured at the past measurement time points shows the overall tendency, but since the physical quantity measured recently is displayed in detail, the measured physical quantity is displayed in the display range of the display unit 2. It is possible to read all at once.

  As shown with reference to FIGS. 3 to 7, in the linear display, only the overall tendency is known, but in the compressed display, the details of the most recent part are obtained by comparing the position of the rightmost grid with T = It can be seen that it is not so different from the case of 50 (see FIG. 3).

Moreover, when all the right end parts of FIGS. 3 to 7 are compared, it can be seen that the sample points T are displayed with almost the same time width even though the sample points T are considerably different from 50 to 1000. This means that even if the user visually recognizes the display unit 2 at any time during the measurement of the physical quantity, the cycle of the most recently measured time series data v _t and the speed of change are measured in the past. This means that the data can be compared on the same scale. For this reason, it can be said that the intuition of the user who visually recognizes the compressed display is not confused.

  Next, an example of compressed display when the parameter L is changed when the number of sample points T shown in FIG. 7 is T = 1000 will be described with reference to FIGS. L is a parameter for adjusting the recent time width that the user is interested in. Here, the arithmetic processing unit 8 performs processing for displaying the time series data on the display unit 2 by changing the display width of the measurement time for each time series data according to the parameter L that changes the ratio of the predetermined measurement time. . 3 to 7, the case where L = 40 has been described.

  First, an example of compressed display when L = 80 will be described with reference to FIG. Assuming L = 80, L is twice as large as L = 40. At this time, it can be seen that the vertical grid interval (time width) at the right end is narrower than in the compressed display example of FIG.

  An example of compressed display when L = 120 will be described with reference to FIG. Assuming L = 120, L is three times as large as L = 40. At this time, it can be seen that the vertical grid interval (time interval) at the right end is further narrower than that in the compressed display example of FIG.

  As described above, when the number of all points displayed on the display unit 2 is the same, the interval between the vertical grids of the latest measurement data can be changed by adjusting the value of the parameter L. That is, when the parameter L is increased, the interval between the recent vertical grids becomes closer. For this reason, the time width displayed uniformly increases and the past time width widens. When L is decreased, the interval between the recent vertical grids becomes sparse. For this reason, the time width displayed uniformly is reduced, and the time width of the physical quantity measured in the past is narrowed. Further, by not displaying the physical quantity measured after a predetermined time has elapsed, it is possible to perform compression display within a certain period.

In the embodiment described above, the time series data v _t can be compressed and displayed on the display unit 2 in real time. At this time, the display width is changed for each predetermined measurement time according to the elapsed time when the physical quantity of the measurement object is measured. For this reason, the past physical quantity with a long elapsed time is narrowed, the recent physical quantity with a short elapsed time is widened, the display width is changed at every measurement time, and the measured quantity is measured at a predetermined measurement time. The physical quantity (time series data) of the measurement object can be displayed in a graph. As a result, it is easy to visually recognize the tendency of the physical quantity measured in the past, and it is easy to visually recognize the detailed change of the physical quantity measured recently. In addition, there is an effect that it is easy to grasp a necessary physical quantity even if measurement is performed for a long time.

  In addition, the arithmetic processing unit 8 changes the display width for each predetermined measurement time displayed on the display unit 2 according to a parameter for changing the ratio for each predetermined measurement time with respect to all the measurement times of the time series data, thereby changing the time series. Data graph can be displayed. As a result, when the recently measured physical quantity is viewed in detail, increasing the parameter: L increases the recent time width of the compressed and displayed waveform and narrows the past time width. On the other hand, when visually recognizing the tendency of the physical quantity measured in the past, by reducing the parameter L, the time width of the waveform compressed and displayed is narrowed and the past time width is widened. As described above, there is an effect that the user can easily change the time width of the waveform that is compressed and displayed simply by changing the parameter L, depending on the application to be used, thereby making it easier to visually recognize the waveform.

  In addition, the waveform display device 10 of the present example can display recently measured physical quantities in a waveform by linking physical quantities measured in the past. For this reason, the waveform drawn in the display range of the display unit 2 from the past to the present can be smoothly connected. In addition, the time width of the compressed and displayed waveform does not become zero. For this reason, a sense of incongruity does not occur in the compressed and displayed waveform. That is, the compression rate is not suddenly changed in the middle of the display range, or linear display is not performed until the middle of the display range. For this reason, for example, when displaying a waveform that periodically changes, the period itself changes when compressed and displayed. However, since the waveform changes naturally, if the waveform is disturbed during the measurement, the user can immediately notice the waveform disturbance. As described above, even if the physical quantity is measured for a long time for the user, there is an effect that the abnormality of the physical quantity measured in the past can be quickly grasped.

  The physical quantity to be measured may be a time series, and physical quantities other than temperature, humidity, voltage, and current may be measured. Alternatively, time-series data of physical quantities measured by another measuring apparatus may be stored in a storage medium such as a flash memory, and the physical quantities read from the storage medium may be compressed and displayed. In the above-described embodiment, the case where the two-dimensional display is performed has been described. However, the present invention can be suitably applied to the case where the measured physical quantity is displayed in a multidimensional manner. Further, past measurement data, simulation data, or the like may be calculated on a program, and the waveform may be compressed and displayed.

It is the external block diagram which showed the example of the waveform display apparatus which concerns on one example of embodiment of this invention. It is an internal block diagram which showed the example of the waveform display apparatus which concerns on one example of embodiment of this invention. It is explanatory drawing which showed the example which compared the linear display and compression display of the first 50 points | pieces concerning the example of 1 embodiment of this invention. It is explanatory drawing which showed the example which compared the linear display and compression display of 100 points | pieces which concern on the example of 1 embodiment of this invention. It is explanatory drawing which showed the example which compared the linear display and compression display of 200 points | pieces which concern on the example of 1 embodiment of this invention. It is explanatory drawing which showed the example which compared the linear display and compression display of 500 points | pieces which concern on the example of 1 embodiment of this invention. It is explanatory drawing which showed the example which compared the 1000 points | pieces linear display and compression display which concern on one Example of this invention. It is explanatory drawing which showed the example of the compression display in the case of L = 80 which concerns on the example of 1 embodiment of this invention. It is explanatory drawing which showed the example of the compression display in case of L = 120 which concerns on the example of 1 embodiment of this invention. It is explanatory drawing which showed the example of a display of the conventional measurement data. It is explanatory drawing which showed the example of a display of the conventional measurement data. It is explanatory drawing which showed the example of a display of the conventional measurement data.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Calculation part, 2 ... Display part, 3 ... Operation part, 4 ... Measurement part, 6 ... Memory | storage part, 7 ... Input part, 8 ... Calculation processing part, 9 ... Clock part, 10 ... Waveform display apparatus

Claims (4)

A measurement unit for measuring the physical quantity of the measurement object;
A storage unit that stores the physical quantity of the measurement target measured by the measurement unit as time-series data for each predetermined measurement time;
An arithmetic processing unit that reads out the time series data stored in the storage unit and calculates a ratio for each predetermined measurement time with respect to all the measurement times of the time series data;
When displaying the measured physical quantity of the measured object for each predetermined measurement time in a graph, the display for each predetermined measurement time based on the ratio for each predetermined measurement time calculated by the arithmetic processing unit A waveform display device comprising: a display unit configured to display with a different width. The waveform display device according to claim 1,
The arithmetic processing unit changes a display width for each predetermined measurement time displayed on the display unit according to a parameter for changing a ratio for each predetermined measurement time with respect to all measurement times of the time series data. Waveform display device. The waveform display device according to claim 1,
The physical quantity to be measured includes at least one of temperature, humidity, voltage, and current that change in time series. Waveform display device. Measure the physical quantity of the object to be measured,
The physical quantity of the measured object to be measured is stored as time series data in a time series every predetermined time,
Reading the stored time series data, calculating the ratio of each predetermined measurement time to all the measurement time of the time series data,
When displaying the measured physical quantity of the measured object for each predetermined measurement time in a graph, the display width for each predetermined measurement time is changed based on the calculated ratio for each predetermined measurement time. A waveform display method characterized by displaying.

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