JP2008123767A - Photomultiplier tube, light measurement method, and device using the same - Google Patents

Photomultiplier tube, light measurement method, and device using the same Download PDF

Info

Publication number
JP2008123767A
JP2008123767A JP2006304680A JP2006304680A JP2008123767A JP 2008123767 A JP2008123767 A JP 2008123767A JP 2006304680 A JP2006304680 A JP 2006304680A JP 2006304680 A JP2006304680 A JP 2006304680A JP 2008123767 A JP2008123767 A JP 2008123767A
Authority
JP
Japan
Prior art keywords
photomultiplier tube
temperature
light
measurement
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006304680A
Other languages
Japanese (ja)
Other versions
JP5221868B2 (en
Inventor
Takayoshi Suzuki
孝佳 鈴木
Yasuo Arakawa
泰男 荒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kowa Co Ltd
Original Assignee
Kowa Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kowa Co Ltd filed Critical Kowa Co Ltd
Priority to JP2006304680A priority Critical patent/JP5221868B2/en
Publication of JP2008123767A publication Critical patent/JP2008123767A/en
Application granted granted Critical
Publication of JP5221868B2 publication Critical patent/JP5221868B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To allow measurement of very weak light with reliability even if sensitivity of a photomultiplier tube changes due to aging or in temperature at measurement. <P>SOLUTION: Since the sensitivity characteristics of a photomultiplier tube 1 changes as time elapses, after a certain time has elapsed since initial calibration, a switch 16 is turned on to heat a heater 14, so that the temperature of the photomultiplier tube 1 is forcedly changed. The photomultiplier tube 1 is irradiated with a reference light from a reference light source 22; a photocount value is acquired with a counter 6, and a sensitivity change rate per unit temperature of the photomultiplier tube is calculated to calibrate the photomultiplier tube. With such a configuration, even if the sensitivity of the photomultiplier tube changes due to aging, reliable measurements of very weak light can be made. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、被測定物からの微弱光を検出し測定値を出力する光電子増倍管、並びにこの光電子増倍管を用いて被測定物からの光強度を測定する光測定方法及び装置に関する。   The present invention relates to a photomultiplier tube that detects weak light from an object to be measured and outputs a measurement value, and an optical measurement method and apparatus that measures the light intensity from the object to be measured using the photomultiplier tube.

光電子増倍管は入射する微弱光のフォトカウントを行うもので、そのカウント値から入射する微弱光の強度を精度よく測定できるので、たとえば、微粒子測定装置や眼科測定装置などに用いられている。   A photomultiplier tube performs photocounting of incident faint light, and can accurately measure the intensity of the faint light incident from the count value. For example, the photomultiplier tube is used in a fine particle measuring apparatus or an ophthalmic measuring apparatus.

このような微弱光の強度を検出する必要のある測定装置では、微弱光を入射した光電子増倍管の出力信号に含まれる出力パルス(信号パルス)の単位時間当たりの数を入射光の光子数と見なしてカウントする光子計数法により微弱光の強度を測定している。カウントした出力パルス数をフォトカウント値ともいう。出力パルスは光電子増倍管の出力電流を電流/電圧変換及び増幅して得られる出力信号をしきい値電圧で2値化することによりノイズ成分をカットして識別している。   In such a measuring device that needs to detect the intensity of weak light, the number of output pulses (signal pulses) per unit time included in the output signal of the photomultiplier tube that has received weak light is the number of photons of the incident light. The intensity of faint light is measured by a photon counting method that counts as if it were. The counted number of output pulses is also referred to as a photocount value. The output pulse is identified by cutting the noise component by binarizing the output signal obtained by current / voltage conversion and amplification of the output current of the photomultiplier tube with the threshold voltage.

ところが光電子増倍管は、温度環境によって感度(=カウント値/微弱光強度)が変化する。一例を挙げると−0.3%/℃、つまり1℃環境温度が変化すると同じ強度の光を測定してもカウント値が0.3%変化する。つまり環境温度が10度上がると、測定値が約3%変化することになる。   However, the sensitivity (= count value / weak light intensity) of the photomultiplier tube changes depending on the temperature environment. As an example, when the ambient temperature changes by -0.3% / ° C., that is, by 1 ° C., the count value changes by 0.3% even if light of the same intensity is measured. That is, when the environmental temperature increases by 10 degrees, the measured value changes by about 3%.

従って、周辺温度を考慮しなければ、例えば、10度から40度の使用環境下で、測定誤差を3%に抑えようとしても無理がある。その対策として、光電子増倍管の温度を常に測定し、光電子増倍管の温度から光電子増倍管の感度を補正して、測定した測定値の結果にその感度を適用して真の測定値を算出するという方法が通常行なわれている(たとえば、下記の特許文献1〜4を参照)。   Therefore, if the ambient temperature is not taken into account, it is impossible to suppress the measurement error to 3% in a use environment of 10 to 40 degrees, for example. As a countermeasure, the temperature of the photomultiplier tube is always measured, the photomultiplier tube sensitivity is corrected from the photomultiplier tube temperature, and the sensitivity is applied to the result of the measured value. Is usually performed (see, for example, Patent Documents 1 to 4 below).

そのため、光電子増倍管の「温度感度変化率=感度変化率/温度」を予め測定し、それを測定器に記憶させておき、測定時にこの記憶された値を読み出し、測定値を補正している。   Therefore, the “temperature sensitivity change rate = sensitivity change rate / temperature” of the photomultiplier tube is measured in advance, stored in the measuring instrument, and the stored value is read out at the time of measurement, and the measured value is corrected. Yes.

しかしながら、光電子増倍管の感度変化率には個体差があり、例えば感度変化率は−0.1%/℃もあれば−0.8%/℃もあり、この個体差が測定精度に少なからず影響を与えている。従って、光電子増倍管を用いて得られた測定値に補正を行うには、予め「感度変化率」を光電子増倍管毎に測定しておく必要があった。   However, there is an individual difference in the sensitivity change rate of the photomultiplier tube, for example, the sensitivity change rate is -0.1% / ° C or -0.8% / ° C, and this individual difference is small in measurement accuracy. It has an influence. Therefore, in order to correct the measurement value obtained using the photomultiplier tube, it was necessary to measure the “sensitivity change rate” in advance for each photomultiplier tube.

更に、この係数「感度変化率/温度」が長期に渡って変化しないという保証がない、つまり経時変化を起こすため、正確な測定を行おうとすると定期的に「感度変化率/温度」を再度求めなければならない、という問題がある。たとえば、定期的(例えば年1回)、光電子増倍管(のユニット)、あるいはそれを使用している装置ごと使用場所から引き上げて、恒温槽等に入れ、基準光による測定を行い、再度係数「感度変化率/温度」を書き換える必要があった。   Furthermore, there is no guarantee that this coefficient “sensitivity change rate / temperature” will not change over a long period of time, that is, it will change over time, so if you want to make an accurate measurement, periodically obtain “sensitivity change rate / temperature” again. There is a problem of having to. For example, periodically (for example, once a year), the photomultiplier tube (unit) or the device that uses it is pulled up from the place of use, placed in a thermostat, etc., measured with the reference light, and again the coefficient It was necessary to rewrite “sensitivity change rate / temperature”.

そのためユーザーにおける装置の運営上の問題、アフターサービスの負担の問題があった。   As a result, there were problems in the operation of the device for users and the burden of after-sales service.

本発明は、このような問題点を解決するためになされたもので、測定時の温度や経時変化によって光電子増倍管の感度が変化してしまうような場合でも、信頼性のある微弱光の測定が可能な光電子増倍管、並びに該光電子増倍管を用いた光測定方法及び装置を提供することを課題とする。   The present invention has been made to solve such a problem, and even when the sensitivity of the photomultiplier tube changes due to the temperature at the time of measurement or the change over time, the reliable weak light is not affected. It is an object of the present invention to provide a photomultiplier tube capable of measurement and a light measurement method and apparatus using the photomultiplier tube.

本発明は、
被測定物からの微弱光を検出し測定値を出力する光電子増倍管であって、
光電子増倍管の温度を変化させる温度調節手段が設けられ、
前記温度調節手段により光電子増倍管の温度を変化させて光電子増倍管の単位温度当たりの感度変化率が算出可能なことを特徴とする。
The present invention
A photomultiplier tube that detects weak light from an object to be measured and outputs a measured value,
A temperature adjusting means for changing the temperature of the photomultiplier tube is provided,
The rate of change in sensitivity per unit temperature of the photomultiplier tube can be calculated by changing the temperature of the photomultiplier tube by the temperature adjusting means.

また、本発明は、
被測定物からの微弱光を検出し測定値を出力する光電子増倍管を用いて被測定物からの光強度を測定する光測定方法及び装置であって、
光電子増倍管の温度を変化させる温度調節手段を設けること、
温度調節手段により光電子増倍管の温度を変化させて光電子増倍管の単位温度当たりの感度変化率を算出すること、
前記算出した単位温度当たりの感度変化率と測定時の光電子増倍管の周囲温度から定まる光電子増倍管への入射光量と光電子増倍管の測定値の関係から、被測定物からの光強度を示す値を演算することを特徴とする。
The present invention also provides:
A light measurement method and apparatus for measuring light intensity from a measurement object using a photomultiplier tube that detects weak light from the measurement object and outputs a measurement value,
Providing a temperature adjusting means for changing the temperature of the photomultiplier;
Calculating the sensitivity change rate per unit temperature of the photomultiplier tube by changing the temperature of the photomultiplier tube by the temperature adjusting means;
From the relationship between the calculated rate of change in sensitivity per unit temperature and the amount of light incident on the photomultiplier tube determined from the ambient temperature of the photomultiplier tube at the time of measurement, and the measured value of the photomultiplier tube, the light intensity from the object to be measured It is characterized in that a value indicating is calculated.

本発明では、光電子増倍管の単位温度当たりの感度変化率を簡単に取得できるので、その感度変化率を考慮して被測定物からの微弱光の強度を示す値を算出することができ、測定時の温度や経時変化によって光電子増倍管の感度が変化してしまうような場合でも、信頼性のある微弱光の測定が可能となる。   In the present invention, since the sensitivity change rate per unit temperature of the photomultiplier tube can be easily obtained, it is possible to calculate a value indicating the intensity of weak light from the object to be measured in consideration of the sensitivity change rate, Even in the case where the sensitivity of the photomultiplier tube changes due to the temperature at the time of measurement or changes with time, it is possible to measure weak light with reliability.

以下、図面に示す実施例に基づいて本発明を詳細に説明する。   Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.

図1には、被測定物からの微弱光の強度を測定する光測定装置の構成が図示されている。光測定装置8は、微粒子測定装置などに用いられ、被測定物24、たとえば微粒子からの微弱な散乱光の強度をフォトカウント値として出力する。   FIG. 1 shows a configuration of a light measurement device that measures the intensity of weak light from a measurement object. The light measuring device 8 is used in a fine particle measuring device or the like, and outputs the intensity of weak scattered light from the measurement object 24, for example, fine particles, as a photocount value.

光測定装置8の装置本体(筐体)9内には、光電子増倍管1に配置され、この光電子増倍管1の光電面(陰極)には、対物レンズ10、ミラー11及び絞り12などからなる集光光学系を介して、被測定物24からの微弱な測定光が入射される。   The photomultiplier tube 1 is disposed in the main body (housing) 9 of the light measuring device 8, and an objective lens 10, a mirror 11, a diaphragm 12, and the like are disposed on the photocathode (cathode) of the photomultiplier tube 1. The weak measurement light from the object to be measured 24 enters through the condensing optical system consisting of

光電子増倍管1からは測定光の強度に応じたパルス電流が出力され、それが電流/電圧変換及び増幅回路3によってパルス形状の出力信号に変換され、パルス2値化回路4に入力される。パルス2値化回路4は、光電子増倍管からの出力信号の電圧をしきい値電圧と比較し、しきい値電圧より低ければノイズ成分とみなして「0」としてカットし、高ければ信号成分とみなして「1」としてパルス信号を出力する。   A pulse current corresponding to the intensity of the measurement light is output from the photomultiplier tube 1, converted into a pulse-shaped output signal by the current / voltage conversion and amplification circuit 3, and input to the pulse binarization circuit 4. . The pulse binarization circuit 4 compares the voltage of the output signal from the photomultiplier tube with a threshold voltage, and if it is lower than the threshold voltage, it is regarded as a noise component and cut as “0”, and if higher, the signal component The pulse signal is output as “1”.

上記パルス2値化回路4からのパルス信号はパルス数カウンタ6に入力される。このカウンタ6は、不図示のCPUが実行するソフトウェアにより、あるいは専用のハードウェアにより構成され、出力パルスの単位時間当たりの数をカウントする。そのカウント値は、フォトカウント値とも呼ばれ、被測定物24からの測定光の強度を示している。そして、このカウント値が、後述する演算回路(演算手段)19により補正演算され、測定結果として液晶表示装置などからなる表示部(モニタ)7に表示される。   The pulse signal from the pulse binarization circuit 4 is input to the pulse number counter 6. The counter 6 is configured by software executed by a CPU (not shown) or by dedicated hardware, and counts the number of output pulses per unit time. The count value is also called a photocount value, and indicates the intensity of measurement light from the object to be measured 24. Then, the count value is corrected and calculated by an arithmetic circuit (arithmetic unit) 19 to be described later, and displayed as a measurement result on a display unit (monitor) 7 including a liquid crystal display device.

光電子増倍管1は、図2に示したように、ソケット1aに取り付けられ、測定光を導く開口2aを形成した筐体2内に配置されていて、光電子増倍管1、ソケット1a、筐体2などによって光電子増倍管ユニットが構成される。   As shown in FIG. 2, the photomultiplier tube 1 is attached to a socket 1a and is disposed in a housing 2 having an opening 2a for guiding measurement light. The photomultiplier tube 1, the socket 1a, the housing A photomultiplier tube unit is constituted by the body 2 and the like.

ところで、光電子増倍管1は、温度により感度(フォトカウント値/受光光量)が変化し、そのため測定値に影響がでる。光電子増倍管の感度は、光電子増倍管が設置される周囲温度の影響で変化し、また装置の起動中も光電子増倍管自身の発熱によって常に温度は変動するので、それによっても、光電子増倍管の感度は変化する。   By the way, the sensitivity (photocount value / light reception amount) of the photomultiplier tube 1 varies depending on the temperature, and therefore the measurement value is affected. The sensitivity of the photomultiplier tube changes due to the influence of the ambient temperature where the photomultiplier tube is installed, and the temperature constantly fluctuates due to the heat generated by the photomultiplier tube itself even during startup of the device. The sensitivity of the multiplier varies.

本実施例では、光電子増倍管の校正のために、光電子増倍管1の筐体2には、温度センサ15が着脱可能に取り付けられるとともに、光電子増倍管1の温度を強制的に変化させるために、光電子増倍管1の筐体2には、温度調節手段としての熱源が着脱可能に取り付けられる。この熱源は、たとえばヒータ14として実現され、スイッチ16によってオン、オフできるようになっている。   In this embodiment, a temperature sensor 15 is detachably attached to the housing 2 of the photomultiplier tube 1 for calibrating the photomultiplier tube, and the temperature of the photomultiplier tube 1 is forcibly changed. Therefore, a heat source as a temperature adjusting means is detachably attached to the housing 2 of the photomultiplier tube 1. This heat source is realized, for example, as a heater 14 and can be turned on and off by a switch 16.

今、ここで、10℃から40℃の環境で測定することを考えた光電子増倍管ユニットの校正を考えてみる。この校正時には、図1において、被測定物24からの測定光の代わりに、LEDなどからなる約10nWの出力を有する基準光源22からの基準光を光測定装置8に入射させ、これを光電子増倍管1で受光し、そのフォトカウント値を調べる。   Now, let us consider calibration of a photomultiplier tube unit that is considered to be measured in an environment of 10 ° C. to 40 ° C. At the time of this calibration, in FIG. 1, instead of the measurement light from the object to be measured 24, reference light from the reference light source 22 having an output of about 10 nW made of LED or the like is made incident on the light measurement device 8, and this is increased by photoelectron amplification. Light is received by the double tube 1 and the photocount value is examined.

まず、光電子増倍管ユニットの製作時、あるいは製造元出荷時においては、恒温層などで調整して光電子増倍管ユニットの温度が15℃および35℃になるようにしてそれぞれ基準光源22からの基準光を受光させたときのフォトカウント値を求める。その結果が、図3に図示されている。   First, at the time of manufacture of the photomultiplier tube unit or at the time of shipment from the manufacturer, the temperature of the photomultiplier tube unit is adjusted to 15 ° C. and 35 ° C. by adjusting with a constant temperature layer or the like. The photocount value when light is received is obtained. The result is illustrated in FIG.

光電子増倍管の単位温度当たりの感度変化率(感度変化率/温度)は、光電子増倍管1の周囲温度を温度1から温度2に変化させたとき、測定値(フォトカウント値)が、測定値1から測定値2に変化したとして、図1の感度変化率算出手段17により、
(測定値2−測定値1)/(測定値1)/(温度2−温度1)
として算出される。
The rate of change in sensitivity per unit temperature (sensitivity change rate / temperature) of the photomultiplier tube is the measured value (photocount value) when the ambient temperature of the photomultiplier tube 1 is changed from temperature 1 to temperature 2. Assuming that the measured value 1 has changed to the measured value 2, the sensitivity change rate calculating means 17 in FIG.
(Measured value 2-Measured value 1) / (Measured value 1) / (Temperature 2-Temperature 1)
Is calculated as

図3に示す測定結果の場合には、単位温度当たりの感度変化率は、
(90−110)/{(35℃−15℃)×110}=−0.9%/℃
となる。この算出した感度変化率/温度は、測定値2、測定値1、温度2、温度1等の測定パラメータとともに、記憶装置(記憶手段)18に記憶しておくものとする。
In the case of the measurement results shown in FIG. 3, the sensitivity change rate per unit temperature is
(90-110) / {(35 ° C.-15 ° C.) × 110} = − 0.9% / ° C.
It becomes. The calculated sensitivity change rate / temperature is stored in the storage device (storage means) 18 together with measurement parameters such as measurement value 2, measurement value 1, temperature 2, and temperature 1.

次に、周囲温度が20℃のときに被測定物24からの微弱光の強度を測定する。周囲温度が20℃の測定時には、光電子増倍管1の感度が変化するので、その温度のときに感度特性を求める。このとき、図3より求めた感度変化率/温度が不変であるとすると、
(20℃−15℃)×(−0.9%/℃)×110+110=105
となり、図4で実線で示したような、周囲温度20℃でのフォトカウント値と受光光量との関係(感度特性)が得られる。
Next, the intensity of faint light from the object to be measured 24 is measured when the ambient temperature is 20 ° C. When the ambient temperature is 20 ° C., the sensitivity of the photomultiplier tube 1 changes. Therefore, the sensitivity characteristic is obtained at that temperature. At this time, if the sensitivity change rate / temperature obtained from FIG. 3 is unchanged,
(20 ° C.-15 ° C.) × (−0.9% / ° C.) × 110 + 110 = 105
Thus, the relationship (sensitivity characteristic) between the photocount value and the amount of received light at an ambient temperature of 20 ° C. as shown by the solid line in FIG. 4 is obtained.

この関係から、たとえば、パルス数カウンタ6のフォトカウント値がC1であった場合には、光量W1が測定される。この測定光量W1は、図1において、温度センサ15により測定される周囲温度、並びに記憶装置18に格納されている値を用いて、演算回路19により求めることができる。   From this relationship, for example, when the photocount value of the pulse number counter 6 is C1, the light amount W1 is measured. The measured light quantity W1 can be obtained by the arithmetic circuit 19 using the ambient temperature measured by the temperature sensor 15 and the value stored in the storage device 18 in FIG.

上述した最初の校正時には、求めた感度変化率/温度は−0.9%/℃であり、この感度変化率/温度が不変の場合には、上述したように、温度センサ15により測定される周囲温度、並びに記憶装置18に格納されている値を用いて、カウンタ6からのカウント値から被測定物からの光の強度を測定することができる。   At the time of the first calibration described above, the obtained sensitivity change rate / temperature is −0.9% / ° C. When the sensitivity change rate / temperature is not changed, it is measured by the temperature sensor 15 as described above. Using the ambient temperature and the value stored in the storage device 18, the intensity of light from the object to be measured can be measured from the count value from the counter 6.

しかし、最初の校正時から所定の時間(たとえば1年)が経過した場合には、光電子増倍管1に経時変化が発生し、測定温度での感度特性が変化することが確認されている。   However, it has been confirmed that when a predetermined time (for example, one year) elapses from the time of the first calibration, a change with time occurs in the photomultiplier tube 1 and the sensitivity characteristic at the measurement temperature changes.

今、たとえば、最初の校正時から、たとえば1年が経過して測定を行うときの温度が25℃だとし、感度変化率/温度が最初の校正時と同様に、−0.9%/℃とすると、基準光量に対するフォトカウント値は、
(25℃−15℃)×(−0.9%/℃)×110+110=100
となるが、実際には、図5に示したように、基準光量に対するフォトカウント値は95となり、上記の値とは相違している。
Now, for example, assume that the temperature when measurement is performed after one year has passed since the first calibration is 25 ° C., and the rate of change in sensitivity / temperature is −0.9% / ° C. as in the first calibration. Then, the photocount value for the reference light amount is
(25 ° C.-15 ° C.) × (−0.9% / ° C.) × 110 + 110 = 100
Actually, however, as shown in FIG. 5, the photocount value with respect to the reference light amount is 95, which is different from the above value.

これは、光電子増倍管の単位温度当たりの感度変化率が経時変化したものと考えられ、そのため測定値にも影響がでてしまう。測定のたびに基準光量で校正を行っても校正終了から測定前までにそれなりに温度変化が起きてしまう。   This is considered that the rate of change in sensitivity per unit temperature of the photomultiplier tube has changed over time, and thus the measured value is also affected. Even if calibration is performed with the reference light amount every time measurement is performed, the temperature changes as it is between the end of calibration and before measurement.

また、先の校正結果から一律に補正する方法、例えば今回だと25℃でフォトカウント値が100→95になっているので、各温度一律に5%減、とする方法では不適であることが判っている。仮に光電子増倍管感度そのものが劣化したという原因ならば、全ての温度で一律5%減したと判断し補正を掛けることで問題は解決する。しかしながら、光電子増倍管の感度劣化ではなく、温度変化に伴う光電子増倍管の感度変化率/温度が原因だとすると、例えば温度15℃では感度低下はなく、25℃では−5%感度低下、35℃では−10%感度低下する可能性もある。   In addition, a method of uniformly correcting from the previous calibration result, for example, a method in which the photocount value is changed from 100 to 95 at 25 ° C. at this time, it is not suitable for a method of uniformly reducing each temperature by 5%. I understand. If the cause is that the photomultiplier tube sensitivity itself has deteriorated, the problem can be solved by determining that the temperature has been uniformly reduced by 5% at all temperatures. However, if the sensitivity change rate / temperature of the photomultiplier tube due to temperature change is not the cause, not the sensitivity deterioration of the photomultiplier tube, for example, there is no sensitivity decrease at a temperature of 15 ° C., and −5% sensitivity decrease at 25 ° C., 35 There may be a decrease in sensitivity of -10% at ℃.

このため、ある程度時間が経つと、正しい測定が不可能になるので、最初の校正時から所定の時間が経過した場合には、光電子増倍管の感度変化率/温度を再度演算しなおす。そのため、最初の校正時から所定の時間が経過したとき、スイッチ16をオンしてヒータ14を発熱させ、光電子増倍管1の温度を強制的に変化させて光電子増倍管1に基準光源22から基準光を入射し、カウント値を求めることより感度変化率/温度を算出し光電子増倍管ユニットの校正を行う。   For this reason, since correct measurement becomes impossible after a certain period of time, when a predetermined time has elapsed since the first calibration, the sensitivity change rate / temperature of the photomultiplier tube is recalculated. Therefore, when a predetermined time has elapsed since the first calibration, the switch 16 is turned on to cause the heater 14 to generate heat, and the temperature of the photomultiplier tube 1 is forcibly changed to cause the photomultiplier tube 1 to be supplied with the reference light source 22. Then, the reference light is incident, and the rate of change in sensitivity / temperature is calculated by calculating the count value, and the photomultiplier tube unit is calibrated.

具体的には、2回目の校正を行う時、温度センサ15により測定される周囲温度が25℃だとすると、図6に示したように、その時の基準光量10nWに対するフォトカウント値95を求める。その後、スイッチ16をオンにしてヒータ14を作動させ光電子増倍管ユニットの温度を強制的に上昇させる。温度がある程度平衡状態になったら、図1の感度変化率算出手段17は、一点鎖線で示すように、その時温度センサ15により求められる光電子増倍管1の温度45℃と、パルス数カウンタ6から得られる基準光量に対するフォトカウント値70から、単位温度当たりの感度変化率、
(70−95)/{(45℃−25℃)×95}=−1.3%/℃
を算出する。そして、この算出された新しい感度変化率/温度は、前のものに上書きされる形で記憶装置18に格納される。
Specifically, when the second calibration is performed and the ambient temperature measured by the temperature sensor 15 is 25 ° C., as shown in FIG. 6, a photocount value 95 for the reference light amount 10 nW at that time is obtained. Thereafter, the switch 16 is turned on to operate the heater 14 to forcibly raise the temperature of the photomultiplier tube unit. When the temperature reaches an equilibrium state to some extent, the sensitivity change rate calculation means 17 in FIG. 1 obtains the temperature 45 ° C. of the photomultiplier tube 1 obtained by the temperature sensor 15 at that time and the pulse number counter 6 as shown by a one-dot chain line. From the photocount value 70 with respect to the obtained reference light amount, the rate of change in sensitivity per unit temperature,
(70-95) / {(45 ° C.-25 ° C.) × 95} = − 1.3% / ° C.
Is calculated. The calculated new sensitivity change rate / temperature is stored in the storage device 18 in the form of being overwritten with the previous one.

その後の測定は、新しい感度変化率/温度を用いて行われる。すなわち、被測定物24からの微弱光が光電子増倍管1に受光され、パルス数カウンタ6は、たとえばフォトカウント値C2を出力する。演算回路19は、温度センサ15より測定時の周囲温度が20℃とすると、この温度と、記憶装置18から読み出される新しい感度変化率−1.3%/℃から、図7に示したように、20℃での光量とフォトカウント値の関係を示す実線で示した感度特性から、カウント値C2に対する測定光量W2を演算する。そして、この演算された測定光量を、被測定物24からの微弱光の強度を示す値として表示部7に表示する。   Subsequent measurements are made using the new rate of sensitivity change / temperature. That is, feeble light from the object to be measured 24 is received by the photomultiplier tube 1, and the pulse number counter 6 outputs, for example, a photocount value C2. As shown in FIG. 7, the arithmetic circuit 19 assumes that the ambient temperature at the time of measurement from the temperature sensor 15 is 20 ° C., from this temperature and a new sensitivity change rate of −1.3% / ° C. read from the storage device 18. The measured light quantity W2 for the count value C2 is calculated from the sensitivity characteristic indicated by the solid line indicating the relationship between the light quantity at 20 ° C. and the photocount value. Then, the calculated measurement light amount is displayed on the display unit 7 as a value indicating the intensity of the weak light from the measurement object 24.

このように、所定時間が経過するごとに、光電子増倍管の校正を行うことにより、光電子増倍管の感度が変化してしまうような場合でも、信頼性のある微弱光の測定が可能となる。   In this way, by calibrating the photomultiplier tube every time a predetermined time elapses, even if the sensitivity of the photomultiplier tube changes, it is possible to reliably measure weak light. Become.

上述した実施例では、被測定物24からの微弱光は、例えば微粒子測定装置などで微粒子から散乱される散乱光であったが、光測定装置8の構成は、被検眼の前房内からの散乱光を解析してフレア測定、セル測定などの眼科測定を行う眼科測定装置にも適用することができる。例えば、フレア測定では、前房内に存在する細胞あるいはたんぱく質にレーザー光が照射され、そこから散乱される散乱光が、図1に示した光測定装置8と同様な構成の光電子増倍管に入射され、その測定値(フォトカウント値)から前房内の測定体積内の細胞数が計測され、たんぱく質濃度(フレア値)が測定される。このような装置においても、定期的に装置を校正して感度変化率/温度を簡単に更新できるので、経時変化によって光電子増倍管の感度が変化してしまうような場合でも、信頼性のあるフレア測定が可能となる。   In the above-described embodiment, the weak light from the object to be measured 24 is scattered light scattered from the fine particles by, for example, the fine particle measuring device, but the configuration of the light measuring device 8 is from the anterior chamber of the eye to be examined. The present invention can also be applied to an ophthalmic measurement apparatus that analyzes scattered light and performs ophthalmic measurements such as flare measurement and cell measurement. For example, in flare measurement, cells or proteins existing in the anterior chamber are irradiated with laser light, and scattered light scattered from the cells or proteins is applied to a photomultiplier tube having a configuration similar to that of the light measurement device 8 shown in FIG. The number of cells in the measurement volume in the anterior chamber is measured from the measured value (photocount value), and the protein concentration (flare value) is measured. Even in such a device, since the sensitivity change rate / temperature can be easily updated by periodically calibrating the device, it is reliable even when the sensitivity of the photomultiplier tube changes due to a change over time. Flare measurement is possible.

なお、上述した実施例では、ヒータ14は、光電子増倍管自体を収納する筐体2ないし光電子増倍管ユニットの外部に取付けられているが、筐体2の内部に着脱可能に取付けるようにしてもよい。また、収納筐体2ないし光電子増倍管ユニットから離れた場所で、光電子増倍管の温度を変化させることができる場所に配置することもできる。   In the above-described embodiment, the heater 14 is attached to the outside of the housing 2 or the photomultiplier tube unit that houses the photomultiplier tube itself, but is detachably attached to the inside of the housing 2. May be. Moreover, it can also arrange | position in the place which can change the temperature of a photomultiplier tube in the place away from the storage housing | casing 2 thru | or a photomultiplier tube unit.

また、光電子増倍管の温度を変化させる温度調節手段は、ヒータ14などの熱源でなく、光測定装置8が設置される部屋の空調機であってもよく、また光測定装置全体を収納する温度調節可能な恒温槽であってもよい。   Further, the temperature adjusting means for changing the temperature of the photomultiplier tube may be an air conditioner in a room where the light measuring device 8 is installed, instead of a heat source such as the heater 14, and houses the entire light measuring device. It may be a temperature-controlled thermostat.

また、光電子増倍管の周囲温度を測定する温度センサ15は、光電子増倍管の収納筐体に取り付けるのではなく、光電子増倍管の温度を測定できる周囲の所定の箇所に配置するようにしてもよい。   The temperature sensor 15 for measuring the ambient temperature of the photomultiplier tube is not attached to the housing for the photomultiplier tube, but is disposed at a predetermined location around the photomultiplier tube where the temperature can be measured. May be.

また、上述した実施例では、基準光は基準光源22を用いて発生させたが、通常の光源と、複数の濃度フィルタから選択された所定の濃度のフィルタを用いて基準光を発生させるようにしてもよい。   In the embodiment described above, the reference light is generated using the reference light source 22, but the reference light is generated using a normal light source and a filter having a predetermined density selected from a plurality of density filters. May be.

光測定装置の構成を示した構成図である。It is the block diagram which showed the structure of the optical measurement apparatus. 光電子増倍管ユニットにおける温度センサ並びにヒータの取り付け状態を示した説明図である。It is explanatory drawing which showed the attachment state of the temperature sensor and heater in a photomultiplier tube unit. 感度変化率/温度を求める方法を説明したグラフ図である。It is a graph explaining the method of calculating | requiring a sensitivity change rate / temperature. 図3で求めた感度変化率/温度での入射光量とフォトカウント値との関係を示すグラフ図である。It is a graph which shows the relationship between the incident light quantity in the sensitivity change rate / temperature calculated | required in FIG. 3, and a photo count value. 光電子増倍管の感度特性が変化した場合のフォトカウント値のずれを示すグラフ図である。It is a graph which shows the shift | offset | difference of the photocount value when the sensitivity characteristic of a photomultiplier tube changes. 光電子増倍管の感度特性が変化した場合の感度変化率/温度を再度求める方法を説明したグラフ図である。It is a graph explaining the method of calculating | requiring the sensitivity change rate / temperature again when the sensitivity characteristic of a photomultiplier tube changes. 図6で求めた感度変化率/温度での入射光量とフォトカウント値との関係を示すグラフ図である。It is a graph which shows the relationship between the incident light quantity in the sensitivity change rate / temperature calculated | required in FIG. 6, and a photo count value.

符号の説明Explanation of symbols

1 光電子増倍管
8 光測定装置
14 ヒータ
15 温度センサ
17 感度変化率算出手段
18 記憶装置
19 演算回路(演算手段)
22 基準光源
24 被測定物
DESCRIPTION OF SYMBOLS 1 Photomultiplier tube 8 Light measuring device 14 Heater 15 Temperature sensor 17 Sensitivity change rate calculation means 18 Memory | storage device 19 Calculation circuit (calculation means)
22 Reference light source 24 DUT

Claims (17)

被測定物からの微弱光を検出し測定値を出力する光電子増倍管であって、
光電子増倍管の温度を変化させる温度調節手段が設けられ、
前記温度調節手段により光電子増倍管の温度を変化させて光電子増倍管の単位温度当たりの感度変化率が算出可能なことを特徴とする光電子増倍管。
A photomultiplier tube that detects weak light from an object to be measured and outputs a measured value,
A temperature adjusting means for changing the temperature of the photomultiplier tube is provided,
A photomultiplier tube characterized in that the rate of change in sensitivity per unit temperature of the photomultiplier tube can be calculated by changing the temperature of the photomultiplier tube by the temperature adjusting means.
前記温度調節手段が、光電子増倍管の収納筐体の内部あるいは外部に着脱可能に取り付けられることを特徴とする請求項1に記載の光電子増倍管。   2. The photomultiplier tube according to claim 1, wherein the temperature adjusting unit is detachably attached to the inside or outside of the housing of the photomultiplier tube. 3. 前記温度調節手段が、光電子増倍管の収納筐体の外部に配置されることを特徴とする請求項1に記載の光電子増倍管。   2. The photomultiplier tube according to claim 1, wherein the temperature adjusting means is disposed outside a housing for the photomultiplier tube. 前記温度調節手段が光電子増倍管を加熱する熱源であり、熱源をオンしたときの光電子増倍管の温度変化と、熱源オフ時並びにオン時に基準光源からの基準光を受光する光電子増倍管の測定値とに基づき前記単位温度当たりの感度変化率が算出されることを特徴とする請求項1から3のいずれか1項に記載の光電子増倍管。   The temperature adjusting means is a heat source for heating the photomultiplier tube, and changes in temperature of the photomultiplier tube when the heat source is turned on, and a photomultiplier tube that receives the reference light from the reference light source when the heat source is turned off and on The photomultiplier tube according to any one of claims 1 to 3, wherein a rate of change in sensitivity per unit temperature is calculated based on the measured value. 光電子増倍管の周囲温度を測定する温度センサが、光電子増倍管の収納筐体に取り付けられることを特徴とする請求項1から4のいずれか1項に記載の光電子増倍管。   The photomultiplier tube according to any one of claims 1 to 4, wherein a temperature sensor for measuring an ambient temperature of the photomultiplier tube is attached to a housing of the photomultiplier tube. 被測定物からの微弱光を検出し測定値を出力する光電子増倍管を用いて被測定物からの光強度を測定する光測定方法であって、
光電子増倍管に該光電子増倍管の温度を変化させる温度調節手段を設け、
温度調節手段により光電子増倍管の温度を変化させて光電子増倍管の単位温度当たりの感度変化率を算出し、
前記算出した単位温度当たりの感度変化率と測定時の光電子増倍管の周囲温度から定まる光電子増倍管への入射光量と光電子増倍管の測定値の関係から、被測定物からの光強度を示す値を算出することを特徴とする光測定方法。
A light measurement method for measuring light intensity from a measurement object using a photomultiplier tube that detects weak light from the measurement object and outputs a measurement value,
A temperature adjusting means for changing the temperature of the photomultiplier tube is provided in the photomultiplier tube,
Calculate the rate of change in sensitivity per unit temperature of the photomultiplier tube by changing the temperature of the photomultiplier tube with the temperature control means,
From the relationship between the calculated rate of change in sensitivity per unit temperature and the amount of light incident on the photomultiplier tube determined from the ambient temperature of the photomultiplier tube at the time of measurement, and the measured value of the photomultiplier tube, the light intensity from the object to be measured A light measurement method characterized by calculating a value indicating
前記温度調節手段が、光電子増倍管の収納筐体の内部あるいは外部に着脱可能に取り付けられることを特徴とする請求項6に記載の光測定方法。   The optical measurement method according to claim 6, wherein the temperature adjusting means is detachably attached to the inside or outside of the housing of the photomultiplier tube. 前記温度調節手段が、光電子増倍管の収納筐体の外部に配置されることを特徴とする請求項6に記載の光測定方法。   The light measuring method according to claim 6, wherein the temperature adjusting means is disposed outside a housing of the photomultiplier tube. 前記温度調節手段が光電子増倍管を加熱する熱源であり、熱源をオンしたときの光電子増倍管の温度変化と、熱源オフ時並びにオン時に基準光源からの基準光を受光する光電子増倍管の測定値とに基づき前記単位温度当たりの感度変化率が算出されることを特徴とする請求項6から8のいずれか1項に記載の光測定方法。   The temperature adjusting means is a heat source for heating the photomultiplier tube, and changes in temperature of the photomultiplier tube when the heat source is turned on, and a photomultiplier tube that receives the reference light from the reference light source when the heat source is turned off and on The light measurement method according to claim 6, wherein a rate of change in sensitivity per unit temperature is calculated based on the measured value. 光電子増倍管の周囲温度を測定する温度センサが、光電子増倍管の収納筐体に取り付けられることを特徴とする請求項6から9のいずれか1項に記載の光測定方法。   10. The light measurement method according to claim 6, wherein a temperature sensor for measuring the ambient temperature of the photomultiplier tube is attached to the housing for the photomultiplier tube. 前記単位温度当たりの感度変化率が、所定時間経過ごとに算出されることを特徴とする請求項6から10のいずれか1項に記載の光測定方法。   The light measurement method according to claim 6, wherein the sensitivity change rate per unit temperature is calculated every elapse of a predetermined time. 被測定物からの微弱光を検出し測定値を出力する光電子増倍管を用いて被測定物からの光強度を測定する光測定装置であって、
光電子増倍管の温度を変化させる温度調節手段と、
温度調節手段により光電子増倍管の温度を変化させて光電子増倍管の単位温度当たりの感度変化率を算出する算出手段と、
前記算出した単位温度当たりの感度変化率と測定時の光電子増倍管の周囲温度から定まる光電子増倍管への入射光量と光電子増倍管の測定値の関係から、被測定物からの光強度を示す値を演算する演算手段と、
を有することを特徴とする光測定装置。
A light measurement device that measures light intensity from a measurement object using a photomultiplier tube that detects weak light from the measurement object and outputs a measurement value,
Temperature adjusting means for changing the temperature of the photomultiplier;
A calculation means for calculating a sensitivity change rate per unit temperature of the photomultiplier tube by changing the temperature of the photomultiplier tube by the temperature adjusting means;
From the relationship between the calculated rate of change in sensitivity per unit temperature and the amount of light incident on the photomultiplier tube determined from the ambient temperature of the photomultiplier tube at the time of measurement, and the measured value of the photomultiplier tube, the light intensity from the object to be measured Computing means for computing a value indicating
A light measuring device comprising:
前記温度調節手段が、光電子増倍管の収納筐体の内部あるいは外部に着脱可能に取り付けられることを特徴とする請求項12に記載の光測定装置。   13. The optical measurement apparatus according to claim 12, wherein the temperature adjusting means is detachably attached to the inside or outside of the housing for the photomultiplier tube. 前記温度調節手段が、光電子増倍管の収納筐体の外部に配置されることを特徴とする請求項12に記載の光測定装置。   13. The light measuring device according to claim 12, wherein the temperature adjusting means is disposed outside a housing for the photomultiplier tube. 前記温度調節手段が光電子増倍管を加熱する熱源であり、熱源をオンしたときの光電子増倍管の温度変化と、熱源オフ時並びにオン時に基準光源からの基準光を受光する光電子増倍管の測定値とに基づき前記単位温度当たりの感度変化率が算出されることを特徴とする請求項12から14のいずれか1項に記載の光測定装置。   The temperature adjusting means is a heat source for heating the photomultiplier tube, and changes in temperature of the photomultiplier tube when the heat source is turned on, and a photomultiplier tube that receives the reference light from the reference light source when the heat source is turned off and on The optical measurement apparatus according to claim 12, wherein a rate of change in sensitivity per unit temperature is calculated based on a measured value of the above. 光電子増倍管の周囲温度を測定する温度センサが、光電子増倍管の収納筐体に取り付けられることを特徴とする請求項12から15のいずれか1項に記載の光測定装置。   16. The light measuring device according to claim 12, wherein a temperature sensor for measuring an ambient temperature of the photomultiplier tube is attached to a housing for the photomultiplier tube. 前記単位温度当たりの感度変化率が、所定時間経過ごとに算出されることを特徴とする請求項12から16のいずれか1項に記載の光測定装置。   The optical measurement apparatus according to claim 12, wherein the sensitivity change rate per unit temperature is calculated every elapse of a predetermined time.
JP2006304680A 2006-11-10 2006-11-10 Light measuring method and apparatus Expired - Fee Related JP5221868B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006304680A JP5221868B2 (en) 2006-11-10 2006-11-10 Light measuring method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006304680A JP5221868B2 (en) 2006-11-10 2006-11-10 Light measuring method and apparatus

Publications (2)

Publication Number Publication Date
JP2008123767A true JP2008123767A (en) 2008-05-29
JP5221868B2 JP5221868B2 (en) 2013-06-26

Family

ID=39508313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006304680A Expired - Fee Related JP5221868B2 (en) 2006-11-10 2006-11-10 Light measuring method and apparatus

Country Status (1)

Country Link
JP (1) JP5221868B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2457559A (en) * 2008-02-20 2009-08-26 Bruker Daltonik Gmbh Method of adjusting the detector amplification in mass spectrometers
JP2010164542A (en) * 2009-01-19 2010-07-29 Tohoku Univ Radiation measuring method and radiation measuring device
JP2014086167A (en) * 2012-10-19 2014-05-12 Horon:Kk Electronic detection device and electronic detection method
CN105590941A (en) * 2016-03-04 2016-05-18 北华大学 Method for improving photoelectric sensor and light-sensitive material weak light detection ability
JP2018060781A (en) * 2016-09-29 2018-04-12 旭化成エレクトロニクス株式会社 Light receiving device, and method for compensating light emitting device
WO2018163782A1 (en) * 2017-03-07 2018-09-13 株式会社日立製作所 Radiation imaging apparatus
JP2019018021A (en) * 2017-07-20 2019-02-07 キヤノンメディカルシステムズ株式会社 X-ray CT apparatus
JP7399275B2 (en) 2019-10-22 2023-12-15 ネバダ・ナノテック・システムズ・インコーポレイテッド How to operate and calibrate gas sensors and related gas sensors

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223775A (en) * 1982-06-23 1983-12-26 Japan Atom Energy Res Inst Temperature dependency compensating circuit of scintillation detector
JPS61116064U (en) * 1984-12-29 1986-07-22
JPH01237640A (en) * 1988-03-18 1989-09-22 Fuji Photo Film Co Ltd Radiographic image information reader
JPH0489027A (en) * 1990-07-31 1992-03-23 Kowa Co Ophthalmic measuring device
JP2000346805A (en) * 1999-06-09 2000-12-15 Shimadzu Corp Fluorescence spectrophotometer
JP2001228267A (en) * 2000-02-18 2001-08-24 Shinyosha:Kk Snowfall sensor
JP2002196080A (en) * 2000-12-25 2002-07-10 Toshiba Corp Instrumentation system for radiation, method of diagnosing soundness, and method of measuring radiation
JP2002202254A (en) * 2000-10-30 2002-07-19 Dkk Toa Corp Light measuring method and device therefor
JP2006041046A (en) * 2004-07-23 2006-02-09 Canon Inc Photoelectric measuring apparatus and exposure device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223775A (en) * 1982-06-23 1983-12-26 Japan Atom Energy Res Inst Temperature dependency compensating circuit of scintillation detector
JPS61116064U (en) * 1984-12-29 1986-07-22
JPH01237640A (en) * 1988-03-18 1989-09-22 Fuji Photo Film Co Ltd Radiographic image information reader
JPH0489027A (en) * 1990-07-31 1992-03-23 Kowa Co Ophthalmic measuring device
JP2000346805A (en) * 1999-06-09 2000-12-15 Shimadzu Corp Fluorescence spectrophotometer
JP2001228267A (en) * 2000-02-18 2001-08-24 Shinyosha:Kk Snowfall sensor
JP2002202254A (en) * 2000-10-30 2002-07-19 Dkk Toa Corp Light measuring method and device therefor
JP2002196080A (en) * 2000-12-25 2002-07-10 Toshiba Corp Instrumentation system for radiation, method of diagnosing soundness, and method of measuring radiation
JP2006041046A (en) * 2004-07-23 2006-02-09 Canon Inc Photoelectric measuring apparatus and exposure device

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2457559A (en) * 2008-02-20 2009-08-26 Bruker Daltonik Gmbh Method of adjusting the detector amplification in mass spectrometers
GB2457559B (en) * 2008-02-20 2012-02-22 Bruker Daltonik Gmbh Method of adjusting the detector amplification in mass spectrometers
US8536519B2 (en) 2008-02-20 2013-09-17 Bruker Daltonik Gmbh Adjusting the detector amplification in mass spectrometers
JP2010164542A (en) * 2009-01-19 2010-07-29 Tohoku Univ Radiation measuring method and radiation measuring device
JP2014086167A (en) * 2012-10-19 2014-05-12 Horon:Kk Electronic detection device and electronic detection method
CN105590941B (en) * 2016-03-04 2018-12-28 北华大学 A method of improving photoelectric sensor and photosensitive material Dim light measurement ability
CN105590941A (en) * 2016-03-04 2016-05-18 北华大学 Method for improving photoelectric sensor and light-sensitive material weak light detection ability
JP2018060781A (en) * 2016-09-29 2018-04-12 旭化成エレクトロニクス株式会社 Light receiving device, and method for compensating light emitting device
US9980336B2 (en) 2016-09-29 2018-05-22 Asahi Kasei Microdevices Corporation Light receiving device, light emitting device and light receiving/emitting device
WO2018163782A1 (en) * 2017-03-07 2018-09-13 株式会社日立製作所 Radiation imaging apparatus
US10884143B2 (en) 2017-03-07 2021-01-05 Hitachi, Ltd. Radiation imaging apparatus
JP2019018021A (en) * 2017-07-20 2019-02-07 キヤノンメディカルシステムズ株式会社 X-ray CT apparatus
JP7152209B2 (en) 2017-07-20 2022-10-12 キヤノンメディカルシステムズ株式会社 X-ray CT device
JP7399275B2 (en) 2019-10-22 2023-12-15 ネバダ・ナノテック・システムズ・インコーポレイテッド How to operate and calibrate gas sensors and related gas sensors

Also Published As

Publication number Publication date
JP5221868B2 (en) 2013-06-26

Similar Documents

Publication Publication Date Title
JP5221868B2 (en) Light measuring method and apparatus
US9396637B2 (en) Photoelectric smoke detector with drift compensation
KR101779761B1 (en) Temperature compensation thermometer and method using a distance measuring seneor
CN108426808B (en) Particulate matter measuring apparatus and method for determining mass concentration of particulate matter in aerosol
JP2020126046A (en) Particulate detection sensor, dust sensor, air conditioner, and control method of particulate detection sensor
US20210367397A1 (en) Deterioration diagnosis device and method for diagnosing deterioration of optical transceiver
US20220097047A1 (en) Method, apparatus, and computer program product for controlling components of a detection device
KR102578379B1 (en) Particulate matters sensor calibration apparatus
JP7370908B2 (en) Light receiving/emitting device and deterioration diagnosis method
JP4154274B2 (en) Gas concentration detection method and gas concentration detection device
US10070797B2 (en) Measuring apparatus, probe portion, and connecting cable
JP2006245685A (en) Photoelectric sensor
JP5091169B2 (en) Smoke sensor device
KR101880629B1 (en) Temperature sensing system using least square method
US11549924B2 (en) Methane sensor automatic baseline calibration
JP2009145257A (en) Temperature sensor and measuring method of temperature
US20160334263A1 (en) Aging compensation and temperature compensation of a photomultiplier in a radiometric measurement device having a scintillator arrangement
JP4170878B2 (en) Refractive index measuring device
JP6912348B2 (en) Gas detector
US20230296505A1 (en) Apparatus and method
RU209992U1 (en) Device for measuring background radiation
JP3656877B2 (en) Radiation thermometer
JP6680098B2 (en) Differential refractive index detector
CN116773477A (en) Apparatus and method
JP2020106457A (en) measuring device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091027

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110518

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110524

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110722

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120207

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120329

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121023

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121214

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130305

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130308

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160315

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees