JP2008116536A - Method for manufacturing color filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for stably manufacturing a color filter having a flat and uniform color layer without causing color mixing, white void or unevenness in each pixel by improving the quality of partitions containing an ink-repelling agent in a color filter where each pixel is printed by an ink-jet system. <P>SOLUTION: After applying a photosensitive resin composition containing an ink-repelling agent for constituting the partitions on a substrate, in a drying step, the applied composition is dried by a reduced-pressure drying step having at least two stages. In the reduced-pressure drying step, the achievable pressure in a first stage is set to be within a range of 5,000-50,000 Pa, and the achievable pressure in a second stage is set to be not higher than 500 Pa. Further, a solvent having a boiling point of 100-130°C is incorporated into a solvent, contained in the photosensitive resin composition, in a content of 10-70%, and the partitions are thermally cured at a temperature of ≤180°C. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a color filter used for a field emission display device, a fluorescent display device, a plasma display (PDP), a liquid crystal display device, and the like, and a manufacturing method thereof.

A color filter used in a color liquid crystal display device or the like is an indispensable member for a color liquid crystal display device or the like, and has a role of improving the image quality of the liquid crystal display device or giving each pixel a color of each primary color. Yes. Various studies have been made on the manufacturing method of this color filter, and a photolithography method, an ink jet method, and the like are known as typical methods. In the photolithography method, a coating film of a photosensitive resin layer of each color is formed on the entire substrate, and unnecessary portions of the coating film are removed later, and the remaining pattern is used as each color pixel. In this method, many of the coating films are unnecessary, and a large amount of materials such as pigments are wasted when manufacturing the color filter. In addition, since the exposure and development processes are performed for each color pixel, the number of processes increases. For this reason, the production of color filters by the photolithography method has problems in both cost and environment. In this respect, the ink jet method has recently attracted attention. In the production of a color filter by the ink jet method, each of the colors can be printed at the same time using three colored resin compositions of R, G, and B as inks. For this reason, there is little waste of material and the pixel formation process is shortened, so that it is possible to expect a reduction in environmental load and a significant cost reduction.

As a method for producing a color filter substrate using an ink jet method, methods described in Patent Documents 1 to 4 have been proposed. In Patent Document 1, in order to prevent the ink from spreading outside the desired colored layer region on the glass substrate, a pattern containing a hydrofluoric acid-based water- and oil-repellent agent in the black partition wall that partitions each pixel in advance is included. It is described that the ink is fixed only in the colored region by forming. Patent Document 2 and Patent Document 3 describe that a black resin layer containing a fluorine-containing compound and / or a silicon-containing compound is used as a partition wall for bleeding in ink and preventing color mixing in a colored layer forming step. Has been. Patent Document 4 discloses a manufacturing method including a substrate processing step of eliminating the water repellency / oil repellency after the partition wall portion of each pixel and the surface of any one of the pixels are formed to have water repellency / oil repellency. Are listed. These methods can be said to be very preferable methods that can reduce the environmental load and the manufacturing cost in that the number of steps is small.

However, when a material imparted with ink repellency such as a fluorine compound (hereinafter referred to as an ink repellant) is used in the above conventional method, the ink repellant dispersed in the film gradually segregates on the surface of the film. Therefore, there has been a problem that the segregation state of the ink repellent agent changes depending on the time from coating until the solvent evaporates and the coating film is completely solidified. Therefore, in the partition wall where the ink repellent becomes excessive due to the dry state of the solvent, when the colored layer is printed by the ink jet, the white color of the colored layer due to bleeding out of the ink repellent, the pixel shape does not become flat, etc. There was a problem. On the other hand, even when the addition amount of the ink repellent was reduced, color mixing occurred when the colored layer was printed on the partition where the ink repellent was insufficiently expressed. Therefore, it was necessary to control the balance between the ink repellency of the partition wall surface and the ink repellency (wetting property) of the substrate surface of the opening surrounded by the partition wall, depending on the type and amount of the ink repellent agent contained in the partition wall. However, it is easily affected by the time until drying and the adjustment is difficult.

JP-A-6-347637 JP-A-7-35915 JP 7-35917 A JP-A-7-248413

The present invention has been made in order to solve the above-described problems, and the problem is that in the color filter in which each pixel is printed by the ink jet method, the quality of the partition is improved. An object of the present invention is to provide a method for stably producing a color filter having a flat and uniform colored layer free from color mixing, white spot defects and unevenness in pixels.

The invention according to claim 1, which has been made to solve the above-described problems, includes (a) a step of applying a coating liquid of a photosensitive resin composition subjected to an ink repellent treatment onto a substrate (b) the photosensitive (C) Step of drying the photosensitive resin composition under reduced pressure (c) Step of heating and drying the photosensitive resin composition (d) Step of pattern exposure and development to form a partition made of the photosensitive resin composition (e) The partition (F) A method for producing a color filter, comprising: a step of forming a colored layer by ejecting ink into the pixels delimited by the partition walls by an ink jet method. It is a method for producing a color filter, wherein the coating liquid of the composition contains a solvent having a boiling point of 100 to 130 ° C., and vacuum drying is performed in two stages of preliminary drying and main drying in the step (b). .

The invention according to claim 2 is the color filter manufacturing method, wherein after the step of curing the partition wall by UV irradiation, the partition wall is further thermally cured at a heating temperature of 180 ° C. or less.

The invention according to claim 3 is characterized in that 10 to 70% of a solvent having a boiling point of 100 to 130 ° C. is contained in the coating liquid of the photosensitive composition in a solvent ratio. This is a color filter manufacturing method.

The invention according to claim 4 is characterized in that the ink repellency treatment of the photosensitive resin composition is addition of a fluorine-containing compound having a mass average molecular weight of 10,000 to 100,000 to the photosensitive resin composition. The color filter manufacturing method according to any one of claims 1 to 3.

The invention according to claim 5 further has an ultimate pressure in preliminary drying of 5000 to 50000 Pa, and an ultimate pressure in main drying of 500 Pa or less. Is the method.

The invention according to claim 6 is the color filter manufacturing method according to any one of claims 1 to 5, wherein at least a part of the partition walls has a light shielding property.

According to the first aspect of the invention, the ink repellent agent contained in the partition walls is separated by two or more drying steps of preliminary drying in which the ink repellent segregation state changes and main drying in which pressure is reduced to a lower pressure. It was able to diffuse near the inner surface. As a result, ink repellency was improved, and a color filter free from color mixing due to insufficient ink repellency on the partition wall surface could be produced. Furthermore, by including a solvent having a boiling point of 100 to 130 ° C., the ink repellent agent can be segregated near the partition wall surface stably with respect to the time until drying, and thus a stable color filter is manufactured. Became possible.

According to the second aspect of the present invention, a color filter having no color unevenness can be produced without scattering or bleeding out of the ink repellent because the temperature at which the partition walls are thermally cured is 180 ° C. or less.

According to the invention of claim 3, by containing a solvent having a boiling point of 100 to 130 ° C. in a coating solution of the photosensitive composition at a solvent ratio of 10 to 70%, the solvent can be stably repelled with respect to the time until drying. The ink agent could be segregated near the partition wall surface, so that a color filter free from white spots and color mixture could be stably produced.

According to the invention of claim 4, by using a fluorine-containing compound having a mass average molecular weight of 10,000 to 100,000 for the ink repellent agent, both the ink repellency on the partition wall surface and the ink affinity on the surface of the opening base material are compatible. Thus, a high-definition color filter having a flat colored layer could be stably produced.

According to the invention of claim 5, the ink repellency segregation state changes moderately in the preliminary drying stage, and the ink repellency agent segregates near the partition wall surface in the main drying stage, thereby improving the ink repellency of the partition wall surface. The ultimate pressure in the preliminary drying is 5000 to 50000 Pa, and the ultimate pressure in the main drying is 500 Pa or less, the unevenness of the partition walls was suppressed.

The invention according to claim 6 makes it possible to stably manufacture a color filter having both a contrast and a transmitted light amount.

(Color filter configuration)
As shown in FIG. 1, a color filter manufactured by forming a colored layer by an ink jet method is a transparent substrate 1 in order to prevent color mixing of red (R), green (G), and blue (B) colored inks. The partition wall 2 is provided on the top. Further, in order to improve the contrast of the color filter, it is desirable to provide light shielding properties to a part or all of the partition wall 2. In general, as a means for imparting light-shielding properties, a black material is used for a part or all of the partition wall and a black part is provided. Next, when a colored layer 3 of red (R), green (G), and blue (B) is formed on a transparent substrate, and this is used for liquid crystal, a transparent conductive layer and an alignment film layer are sequentially laminated. For example, a liquid crystal display device is configured through a liquid crystal layer facing a counter substrate on which an electrode such as a thin film transistor is formed. Hereinafter, the transparent substrate, the partition, and the colored pixel layers of red, green, and blue are combined to form a color filter. If necessary, a protective layer 4 can be provided on the color filter.

(Color filter manufacturing method)
Hereinafter, a method for manufacturing a color filter according to the present invention will be described.

First, the photosensitive resin composition 5 for forming a partition is applied on the transparent substrate 1 (step a).
As the transparent substrate of the color filter, a known transparent substrate material such as a glass substrate, a quartz substrate, or a plastic substrate can be used. In particular, a glass substrate is preferable because of its excellent transparency, strength, heat resistance, and weather resistance.

The photosensitive resin composition of the present invention is a negative photosensitive resin composition, and one having photosensitivity in a wavelength range of 200 to 500 nm is used. The main component consists of a binder resin, a compound having radical polymerizability, a photopolymerization initiator, a solvent, an ink repellent agent, and, if necessary, a light shielding member.

First, as the binder resin, an alkane-soluble thermosetting resin is preferable, and specific examples include cresol-novolak resin, polyvinylphenol resin, acrylic resin, and methacrylic resin. These binder resins may be used alone or in combination of two or more. Moreover, in order to accelerate | stimulate sclerosis | hardenability at low temperature, in addition to these resins, a melamine derivative and a photo-acid generator can also be contained. The melamine derivative may be a compound having a methylol group or a methoxymethyl group, but is particularly preferably a compound having high solubility in a solvent.

As the compound having radical polymerizability, for example, a monomer or oligomer having a vinyl group or an allyl group, or a polymer having a vinyl group or an allyl group at the terminal or side chain can be used. Specifically, (meth) acrylic acid and salts thereof, (meth) acrylic acid esters, (meth) acrylamides, maleic anhydride, maleic acid esters, itaconic acid esters, styrenes, vinyl ethers, vinyl esters, Mention may be made of N-vinyl heterocycles, allyl ethers, allyl esters, and derivatives thereof. Examples of suitable compounds include relatively low molecular weight polyfunctional acrylates such as pentaerythritol triacrylate, trimethylolpropane triacrylate, pentaerythritol tetraacrylate, ditrimethylolpropane tetraacrylate, dipentaerythritol pentaacrylate, and hexaacrylate. Can be, but this is not the case. These radically polymerizable compounds may be used alone or in combination of two or more.

The photopolymerization initiator generates radicals by exposure and crosslinks the binder resin through a compound having radical polymerizability. Specific examples of photopolymerization initiators include benzophenone compounds such as benzophenone, 4,4′-bis (dimethylamino) benzophenone, 4,4′-bis (diethylamino) benzophenone, 1-hydroxycyclohexylacetophenone, 2,2 Acetophenone derivatives such as 2-dimethoxy-2-phenylacetophenone and 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one, thioxanthone, 2,4-diethylthioxanthone, 2-isopropyl Thioxanthone derivatives such as thioxanthone and 2-chlorothioxanthone, anthraquinone derivatives such as 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone and chloroanthraquinone, benzoin methyl ether, benzoy Benzoin ether derivatives such as ethyl ether and benzoin phenyl ether, acylphosphine derivatives such as phenylbis- (2,4,6-trimethylbenzoyl) -phosphine oxide, 2- (o-chlorophenyl) -4,5-bis ( 4'-methylphenyl) imidazoline dimer and other lophine mers, N-arylglycines such as N-phenylglycine, organic azides such as 4,4'-diazidochalcone, 3,3 ', 4,4 Examples include '-tetra (tert-butylperoxycarboxy) benzophenone and quinonediazide group-containing compounds. These photopolymerization initiators may be used alone or in combination of two or more.

Specifically as a solvent of the photosensitive resin composition coating liquid, dichloromethane, dichloroethane, chloroform, acetone, cyclohexanone, ethyl acetate, 2-methoxyethanol, 2-ethoxyethanol, 2-butoxyethanol, 2-ethylethoxyacetate, 2-butoxyethyl acetate, 2-methoxyethyl ether, 2-ethoxyethyl ether, 2- (2-ethoxyethoxy) ethanol, 2- (2-butoxyethoxy) ethanol, 2- (2′ethoxyethoxy) ethyl acetate, 2 -(2-butoxyethoxy) ethyl acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, diethylene glycol dimethyl ether, tetrahydrofuran, methyl ethyl ketone, Ethyl ketone, methyl propyl ketone, methyl -n- butyl ketone, ethyl -n- propyl ketone, methyl isobutyl ketone (MIBK), diisopropyl ketone, 2-heptanone, 3-heptanone, can be used 4-heptanone. The boiling point of the solvent is preferably 100 ° C. or higher from the viewpoint that it is homogeneous when applied onto a substrate and a coating film without pinholes and uneven coating can be formed. As will be described later, it is desirable to contain a solvent having a boiling point of 130 ° C. or lower from the viewpoint that the ink repellent agent can be stably segregated on the surface of the coating film by drying in a short time. Furthermore, the solvent ratio of the solvent is more preferably in the range of 10% at which the effect appears to 70% at which the solubility becomes poor.

The ink repellent agent imparts ink repellency to the partition wall with respect to the colored ink. The ink repellent agent can be added in advance to the photosensitive resin composition used for partition formation. As the ink repellent agent, a fluorine-containing compound or a silicon-containing compound can be used, and these can also be mixed and used. As an example of the fluorine-containing compound, the fluorine-containing copolymer having a mass average molecular weight of 10,000 to 100,000 has both the ink repellency on the partition wall surface and the ink affinity on the surface of the opening base material in the present invention. Is particularly preferable. Further, as will be described later, when the partition walls have a multilayer structure, an ink repellant may be added to the photosensitive resin composition forming at least the uppermost layer to impart ink repellency.

The black light shielding member imparts light shielding properties to the partition walls and improves the contrast of the color filter. As the black light shielding member, black pigment, black dye, carbon black, aniline black, graphite, iron black, titanium oxide, inorganic pigment, and organic pigment can be used. These black light shielding members may be used alone or in combination of two or more.

In addition, the photosensitive resin composition used for forming the partition wall may contain compatible additives such as a leveling agent, a chain transfer agent, a stabilizer, a sensitizing dye, a surfactant, and a coupling agent as necessary. Can be added.

The photosensitive resin composition coating liquid having the above-described configuration is uniformly applied using a known coating apparatus such as a slit die coater or a spin coater (step a).

Next, an unnecessary solvent component is removed after coating by a drying step b in which two or more stages of vacuum drying and heat drying (pre-baking) using a hot plate are performed (step b). In the photosensitive resin composition before drying, the ink repellent dispersed in the coating film has a property of gradually segregating on the coating film surface, and the solvent is volatilized from the coating to complete the coating film. The segregation state of the ink repellent agent changes depending on the time until. Therefore, in order to obtain a uniform partition wall, it is desirable to keep the time interval from coating to vacuum drying and prebaking in this step uniform.

In the drying process of the present invention, as shown in FIG. 3, two-stage reduced-pressure drying is possible because the expression of the ink repellent can be improved and the expression of the ink repellent with respect to the drying conditions after coating is stable. Use the method. First, the first stage of drying (preliminary drying, step b1) is performed by slowly drying, whereby the ink repellent agent is appropriately dispersed on the surface of the partition wall due to segregation, and then returned to atmospheric pressure once. The photosensitive resin composition is completely dried by performing the stage drying (main drying, step b2), and the ink repellent agent is segregated near the partition wall surface. By performing such a drying step, a partition having excellent ink repellency can be formed, and a good color filter without white spots or color mixing of the colored layer can be produced. Furthermore, it is more preferable that the ultimate pressure for preliminary drying is 5000 to 50000 Pa that can suppress the occurrence of unevenness in the colored layer, and the ultimate pressure for main drying is 500 Pa or less at which the coating film dries. When the ultimate pressure for preliminary drying is 5000 Pa or less, unevenness of the partition wall surface occurs, and when it is 50000 Pa or more, the effect of segregation control of the ink repellent as described above does not occur, and the ultimate pressure for main drying is 500 Pa or more. This is because the drying becomes insufficient and a formation defect occurs when the partition wall pattern is formed.

In the said drying method, as mentioned above, it can dry quickly by including the low boiling point solvent whose boiling point is 100 to 130 degreeC as a solvent of the photosensitive resin composition. This promotes segregation to the vicinity of the partition wall surface by volatilizing prior to other solvents in the preliminary process, particularly in the two-stage decompression process of the present invention. On the other hand, by performing such preliminary drying before the main drying, it is possible to prevent unevenness and poor formation of the partition walls due to rapid pressure reduction even if a low boiling point solvent is contained. For this reason, it is possible to form a partition wall that is stable against changes in the reduced-pressure drying process and the time before and after the pre-baking process and the time before and after the pre-baking process.

Next, a partition pattern is formed by a photolithography method. A known development / exposure method may be used for the pattern exposure step and the development step in this step.

As the developing solution in the partition pattern developing step d, a solution capable of dissolving the non-exposed portion, for example, an alkaline aqueous solution such as sodium hydroxide or sodium carbonate can be used.

Next, the partition wall layer formed by the exposure / development process is irradiated with UV and cured (process e). In particular, in the present invention, the ink repellent agent that is segregated uniformly on the partition wall surface by two-stage reduced-pressure drying is particularly important for preventing bleeding or scattering in the step of firing the colored layer.

In the UV irradiation step, it is preferable to cure the substrate 1 by irradiating it with UV of 200 to 500 nm from the upper surface of the substrate 1. Moreover, since the photosensitive resin has photosensitivity in a wavelength range of 200 to 500 nm as a light source to be irradiated, it is particularly preferable to have at least one spectral peak in this wavelength range. Also, those containing a wavelength that promotes the decomposition of the ink repellent agent are not suitable because the decomposed ink repellent agent contaminates the substrate surface of the opening. High pressure mercury lamps or metal halide lamps are particularly preferred. The exposure dose to be irradiated is preferably 100 mJ / cm ² or more at 365 nm because the roughness of the partition wall surface generated when forming the colored layer can be reduced and the number can be reduced.

When the partition layer is a light-shielding layer having a light-shielding property, the UV irradiation by the high-pressure mercury lamp or the metal halide lamp may cure the surface of the partition wall but may not be cured to the inside because it is shielded from light. In this case, it is preferable to provide the process f which heat-processes and thermosets after the said partition formation process. As a heating method, a convection oven, a hot plate, a halogen heater, heating by an IR oven or the like can be used, and is not particularly limited. However, when heated at a temperature exceeding 180 ° C, the ink repellent agent bleeds out on the surface of the opening substrate and forms a colored layer by an ink jet even if the surface of the partition wall is UV cured with a high-pressure mercury lamp or metal halide lamp in the previous step. In this case, it is desirable to suppress the heating temperature for thermosetting to 180 ° C. or lower because white spots and deterioration of flatness are caused.

It is preferable to form the partition formed in the above steps with a height of 1.0 μm or more. Furthermore, it is more preferable to form with a height of 1.5 μm to 5 μm. When the height of the partition is 1.0 μm or less, color mixing of colored inks occurs. On the other hand, when the height of the partition wall is 5 μm or more, it is not preferable because it is difficult to form a fine partition wall and a step with the colored layer is increased.

The partition may have a single layer or a multilayer structure of two or more layers. In general, there is a limit to the height of the partition wall that can be formed in one step. Therefore, when a partition wall having a large layer thickness is formed, partition walls having the same pattern can be stacked to form a multilayer structure. When the partition wall has a multilayer structure, it is preferable to provide a light shielding layer by providing light shielding properties to at least one of them. At least the uppermost layer in the case of a multilayer structure is preferably formed as described above using a photosensitive resin composition containing an ink repellent agent. If the uppermost layer is ink-repellent, the effects of the present invention such as prevention of color mixing and uneven color in the colored layer can be obtained.

Next, on the substrate on which the partition walls have been formed, by using a known ink jet method, three colored inks are printed to form the colored layer 3 (step g) and are baked to form a color filter.

Here, the firing conditions are preferably 200 to 250 ° C. and heated for 10 to 60 minutes. In this baking, the partition walls are completely cured together with the colored ink, and sufficient resistance as a color filter is obtained. In addition, since the ink repellent agent on the partition walls is thermally decomposed during this firing, the ink repellency has already been lowered when the protective layer 4 or the like is formed in the next step. For this reason, the protective layer or the like can be formed in a partition shape. Further, in order to completely remove the ink repellent agent on the partition walls, it is possible to provide a process such as cleaning with a solvent or detergent, UV irradiation with a low-pressure mercury lamp or excimer UV irradiation, and polishing.

The color filter of this invention can be manufactured according to the above process.

EXAMPLES Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited to this form.

In each example, the following materials were used.
[Transparent substrate]
Non-alkali glass “# 1737” (Corning)
[Photosensitive resin composition]
Cyclohexanone (boiling point 155.7 ° C.) 60 parts by weight methyl isobutyl ketone (MIBK, boiling point 116.2 ° C.) 20 parts by weight cresol-novolak resin “EP4050G” (manufactured by Asahi Organic Materials Co., Ltd.) 20 parts by weight carbon pigment “MA-8” (manufactured by Mitsubishi Materials Corp.) 23 parts by weight dispersant “Solsperse # 5000” (manufactured by Zeneca Corp.) 1.4 parts by weight compound “trimethylol” having radical polymerizability "Propane triacrylate" (manufactured by Osaka Organic Chemical Industry Co., Ltd.) ... 5 parts by weight photopolymerization initiator "Irgacure 369" (manufactured by Ciba Specialty Chemicals) ... 2 parts by weight of fluorine-containing compound "Modiper F-600" (Japan) Manufactured by Yushi Co., Ltd., mass average molecular weight 35000) 0.5 parts by weight

Said photosensitive resin composition was apply | coated on the transparent substrate, and the film | membrane of the photosensitive resin composition with a film thickness of 2 micrometers was formed. After this substrate is placed in a vacuum machine, only one-stage reduced-pressure drying (main drying) and two-stage reduced-pressure drying (preliminary drying, main-drying) are each reduced to the ultimate pressure as shown in Table 1 and dried. Pre-baked on a hot plate.

Thereafter, using a photomask which is a lattice-like pattern, UV irradiation with an i-line exposure amount of 25 mJ / cm 2 was performed and development processing was performed. Subsequently, UV irradiation with an i-line exposure amount of 1700 mJ / cm 2 was performed, and a heat treatment was performed in an oven at 160 ° C. for 20 minutes.

In order to evaluate the ink repellency on the surface of the partition wall thus produced, the contact angle was measured using carbitol acetate (CBAc). Table 1 shows the relationship between the vacuum drying conditions and the partition wall quality.

From the results of Example 1, the average contact angle of the partition wall surface in the case of one-stage vacuum drying is 35 °, whereas the average contact angle is 38 ° in vacuum drying in two stages, and vacuum drying is performed in two stages. It was confirmed that the ink repellency on the partition wall surface was improved. Furthermore, when the ultimate pressure in the preliminary drying was dried at 1300 Pa of 5000 or less, unevenness was confirmed on the partition wall surface, but when it was dried at 6000 Pa of 5000 or more, good partition walls were formed.

When colored ink was printed on the substrate having the partition walls by using an ink jet apparatus, no white spots or color mixing occurred in the colored layer in any of the substrates.

The time from application of the photosensitive resin composition to the vacuum drying step (time before vacuum drying) and the time from prebaking to exposure (time after prebaking) were changed, and the stability of the quality of the color filter production was investigated. . Further, for comparison, the solvent MIBK in the photosensitive resin material was changed to ethyl-n-propyl ketone (boiling point 123 ° C.) and cyclohexane (boiling point 155.7 ° C.), and the stability was examined.

The conditions other than the above were the same as in Example 1 and a color filter was manufactured. As shown in Table 2 below, all of the conditions in Example 1 were able to manufacture a stable quality color filter with no white spots or mixed colors. However, the color filter without a solvent having a boiling point of 100 to 130 ° C. had white spots depending on the time interval conditions.

It is explanatory drawing of the cross-sectional shape of the color filter provided with the partition of this invention. It is explanatory drawing of the color filter manufacturing method of this invention. It is explanatory drawing of the drying process of the solvent after photosensitive resin composition application | coating.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Transparent substrate 2 ... Partition 3 ... Colored layer 4 ... Protective layer 5 ... Photosensitive resin composition 6 ... Volatile solvent 7 ... UV exposure light 8 ... Photomask 9 ... Baking device 10 ... Ink jet device 11 ... Vacuum dryer 12 ... Hot plate a ... Step of applying photosensitive resin composition to substrate b ... Step of drying photosensitive resin composition c ... Step of exposing with mask pattern d ... Development step e ... Step of curing by UV irradiation treatment f Step of heat curing at a temperature of 180 ° C. or lower g Step of forming a colored layer by ejecting ink by an ink jet method h Completed color filter b1 Preliminary drying step b2 Main drying step b3 Prebaking step

Claims (6)

At least (a) a step of applying a coating solution of a photosensitive resin composition subjected to an ink repellent treatment onto a substrate (b) a step of drying the photosensitive resin composition under reduced pressure (c) the photosensitive resin composition (D) pattern drying and developing to form partition walls made of the photosensitive resin composition (e) curing the partition walls by UV irradiation (f) in the pixels delimited by the partition walls And a method for producing a color filter including a step of forming a colored layer by ejecting ink by an ink jet method, comprising a solvent having a boiling point of 100 to 130 ° C. in the coating liquid of the photosensitive resin composition, And the manufacturing method of the color filter characterized by performing vacuum drying in two steps, preliminary drying and this drying, in the said (b) process. At least (g) a step of applying a coating solution of a photosensitive resin composition subjected to ink repellent treatment onto a substrate (h) a step of drying the photosensitive resin composition under reduced pressure (i) the photosensitive resin composition (J) Step of forming a partition made of the photosensitive resin composition by pattern exposure and development (k) Step of curing the partition by UV irradiation (l) Step of thermally curing the partition ( m) A method for producing a color filter including a step of forming a colored layer by ejecting ink by an ink jet method into the pixels delimited by the partition walls, and in the coating liquid of the photosensitive resin composition The solvent contains a solvent having a boiling point of 100 to 130 ° C., and is dried under reduced pressure in two steps of preliminary drying and main drying in the step (h), and the temperature for thermosetting the partition wall in the step (l) is 180 ° C. or lower. Arco Method of manufacturing a color filter according to claim. 3. The method for producing a color filter according to claim 1, wherein a solvent having a boiling point of 100 to 130 ° C. is contained in an amount of 10 to 70% in the coating liquid of the photosensitive composition. The ink repellency treatment of the photosensitive resin composition is addition of a fluorine-containing compound having a mass average molecular weight of 10,000 to 100,000 to the photosensitive resin composition. The color filter manufacturing method in any one of. The ultimate pressure in the said preliminary drying is 5000-50000Pa, and the ultimate pressure in the said main drying is 500 Pa or less, The color filter manufacturing method in any one of Claim 1 to 4 characterized by the above-mentioned. The method for producing a color filter according to claim 1, wherein at least a part of the partition wall has a light shielding property.